CN111224639B - Resonant frequency self-adaptive control system based on two-dimensional heterogeneous thin film - Google Patents
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- 239000010409 thin film Substances 0.000 title claims description 28
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 230000003750 conditioning effect Effects 0.000 claims abstract description 13
- 239000002923 metal particle Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims abstract description 8
- 239000000919 ceramic Substances 0.000 claims abstract description 7
- 230000003044 adaptive effect Effects 0.000 claims description 10
- 238000001914 filtration Methods 0.000 claims description 5
- 239000002082 metal nanoparticle Substances 0.000 claims description 5
- 229920000620 organic polymer Polymers 0.000 claims description 5
- 238000001338 self-assembly Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 3
- 230000008447 perception Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims 3
- 238000005286 illumination Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 16
- 239000002105 nanoparticle Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 230000001105 regulatory effect Effects 0.000 description 6
- 230000001276 controlling effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 244000062645 predators Species 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000001808 coupling effect Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000011664 nicotinic acid Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 241001481833 Coryphaena hippurus Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008260 defense mechanism Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 210000001061 forehead Anatomy 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 239000002159 nanocrystal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000003863 physical function Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 210000004872 soft tissue Anatomy 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 210000000115 thoracic cavity Anatomy 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 210000003454 tympanic membrane Anatomy 0.000 description 1
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- H—ELECTRICITY
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- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
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Abstract
The invention relates to a resonant frequency self-adaptive control system based on a two-dimensional heterogeneous film, which comprises the two-dimensional heterogeneous film, a supporting substrate, a piezoelectric ceramic driver, an external adjustable light source, a vibration detector and a signal conditioning circuit, wherein nano metal particles on the heterogeneous film can generate a plasma resonance effect, the two-dimensional heterogeneous film is arranged on the supporting substrate, the supporting substrate is fixedly connected with the piezoelectric ceramic driver, the external adjustable light source irradiates the two-dimensional heterogeneous film, the piezoelectric ceramic driver drives the two-dimensional heterogeneous film to vibrate, the vibration detector senses the vibration of the two-dimensional heterogeneous film and generates corresponding electric signals, and the signal conditioning circuit processes the electric signals generated by the vibration detector and converts the electric signals into driving control signals, so that the vibration control of the piezoelectric ceramic driver is realized. The invention has the characteristics of non-contact, large range and self-adaption, and can realize flexible regulation and control and high-precision detection.
Description
Technical Field
The invention belongs to the technical field of micro-electro-mechanical control, and particularly relates to a resonant frequency self-adaptive control system based on a two-dimensional heterogeneous film.
Background
Adaptive adjustment of structural resonant frequency is a typical evolutionary mechanism, which is mainly manifested by sensing external environment, communicating with peers, or recognizing external risks, defending predators, and the like. The bat carries out echo positioning based on ultrasonic waves, and after potential prey is detected, the ultrasonic frequency of the bat is subjected to self-adaptive control according to the position information of the prey, so that accurate predation is realized; the moth thoracic cavity is provided with a drum membrane-like structure, the eardrum state is changed by regulating and controlling the pretension, a sensitive area of a moth auditory system can be adaptively adjusted from a low-frequency signal to a high frequency when facing a predator, and a defense mechanism for resisting the predator is made on the basis of the high-frequency signal; the blowholes of the dolphin will sound a "click" to track a prey or identify an obstacle, and through adaptive control of the forehead soft tissue structure, a signal of frequency variation is generated in a larger range for high-bandwidth detection.
The two-dimensional system nano-particles are widely concerned by researchers due to unique properties, and when two materials with different properties are self-assembled into a two-dimensional heterogeneous lattice structure, the two-dimensional system nano-particles often show unique optical, electrical, thermal, magnetic and other characteristics different from micro-particles and macro-substances, and simultaneously, the materials generate unique macro physical properties and functions. The nanoparticles can couple incident electromagnetic wave energy during plasmon resonance, show strong absorption and scattering enhancement effects, convert into heat energy through nonradiative transition with great efficiency, and obviously improve the temperature of the nanoparticles. Nanoparticles in heterogeneous nano-lattices efficiently absorb incident light and convert it to heat on a picosecond time scale through electron-electron, electron-phonon interactions. When incident light and nano-particle interact, the photo-thermal coupling effect in the resonant crystal lattice can be obviously enhanced, and generated heat is accumulated along with time and conducted to surrounding media, so that the thermal stress state in the nano-crystal lattice is changed, and the modal frequency of the resonator is further influenced.
The rigidity and mass deep coupling of the traditional resonator are difficult to independently regulate and control, and the problems of low efficiency, poor flexibility and the like exist at the same time.
Disclosure of Invention
Aiming at the problems, the invention aims to provide a resonant frequency adaptive control system with typical bionic adaptive control characteristics.
When incident light irradiates the heterogeneous composite resonance film, the photothermal coupling effect caused by metal (gold/silver) nanoparticle plasma resonance is remarkable, and the generated heat is transferred to a surrounding medium by taking the metal particles as the center and is gradually accumulated along with time to cause the macroscopic temperature of the film to change. The heterogeneous thin film has smaller equivalent mass and vibration rigidity, and the temperature fluctuation can generate obvious disturbance on the vibration characteristic of the thin film resonator, so that the change of the micro-scale key size or the change of the mechanical characteristic is caused, and the change of the resonance frequency of the heterogeneous composite thin film is caused.
When incident light parameters (such as light intensity and wavelength) are changed, the temperature and the stress of the resonant structure are changed, so that the resonant frequency is adapted and matched with environmental parameters, and the non-contact and large-range flexible regulation and control of the resonant frequency of the heterogeneous composite film can be realized in a non-contact manner.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a resonant frequency self-adaptation control system based on two-dimensional heterogeneous film, including two-dimensional heterogeneous film, supporting substrate, piezoceramics driver, outside adjustable light source, vibration detector and signal conditioning circuit, nanometer metal particle on the two-dimensional heterogeneous film can produce plasma resonance effect, two-dimensional heterogeneous film is unsettled to be arranged in on the supporting substrate, supporting substrate and piezoceramics driver realize fixed connection, outside adjustable light source shines two-dimensional heterogeneous film, piezoceramics driver drive two-dimensional heterogeneous film vibrates, the vibration of vibration detector perception two-dimensional heterogeneous film produces corresponding signal of telecommunication, signal conditioning circuit handles the signal of telecommunication that vibration detector generated and converts into drive control signal, thereby realize the vibration control to piezoceramics driver.
Preferably, the two-dimensional heterogeneous thin film is prepared based on a surface critical self-assembly process and is formed by connecting nano metal particles through organic polymer, and the structural form and the critical dimension of the metal nano particles can be selected.
Preferably, the support substrate is prepared on the basis of a silicon wafer, obtained by means of a dry etching or wet etching process.
Preferably, when the two-dimensional heterogeneous thin film is irradiated by an external adjustable light source, the wavelength and the intensity of incident light can be adjusted.
Preferably, the signal conditioning circuit comprises a phase-locked amplifying circuit, a filtering processing circuit and a phase adjusting circuit.
Preferably, the vibration detector is a doppler laser interferometer.
Due to the adoption of the technical scheme, the invention has the following advantages:
1. and (4) non-contact regulation. Compared with other modes, the light control has the remarkable characteristics of non-contact, flexible control and the like by changing the parameters of the far-field light source. The structural resonance frequency regulation has two important indexes, namely the frequency regulation range and the required energy.
2. And (4) regulating and controlling in a large range. The self-adaptive tuner needs to have a self-adaptive internal working mechanism, and flexible and large-range regulation and control of the natural frequency of the structure are realized. The size of the metal particles can be flexibly regulated and controlled, and the sensitive wavelength selection is realized. The structural form and the key size of the metal nano particles can obviously influence the position of a resonance peak of the two-dimensional heterogeneous film, and the optical absorption peak of the two-dimensional heterogeneous film can be regulated and controlled by reasonably selecting the metal particles and controlling a self-assembly mode.
3. And (4) self-adaptive control. The self-adaptive control technology based on the nano-particle system has wide application prospect in the civil field, and the research result plays an important role in the field of bionic self-adaptive control, thereby having important significance for improving the research level in the field of China.
4. Integrates perception and regulation. Can be used for flexible regulation and control and can also be used for high-sensitivity detection. The adjacent nodes of the two-dimensional heterogeneous film are linked through flexible polymer, the temperature changes rapidly when surface plasma resonance occurs, the difference of thermal expansion coefficients between materials and the parameters of the materials can change, and key parameters influencing the performance of the device are changed.
Drawings
FIG. 1 is a schematic view of an embodiment of the present invention;
fig. 2 is a working principle diagram of the present invention.
Detailed Description
The invention is described in detail below with reference to the figures and examples. In this embodiment, an adaptive control system includes a two-dimensional heterogeneous thin film, a piezoelectric ceramic driver, an external adjustable light source, a vibration detector, a signal conditioning circuit, and the like, where the two-dimensional heterogeneous thin film is prepared based on a surface self-assembly process, the light intensity and wavelength generated by the external adjustable light source can be flexibly adjusted and controlled, the vibration detector detects a vibration signal of a resonator based on a doppler effect, and the signal conditioning circuit includes functions of filtering, phase-locked amplification, phase adjustment, and the like. The components of the invention are shown in fig. 1, and the working principle is shown in fig. 2.
The two-dimensional heterogeneous thin film is suspended above the substrate, and the substrate is fixedly connected with the PZT piezoelectric ceramic piece.
The two-dimensional heterogeneous film is prepared based on a surface critical autonomous assembly process, the nano metal particles are connected through organic polymer and suspended on the substrate, and the structural form and the key size of the metal nano particles can be selected.
The supporting substrate is prepared on the basis of silicon wafers through dry etching or wet etching, and the suspended size is regulated and controlled according to the size requirement of the thin film.
The incident light is guided to the surface of the two-dimensional heterogeneous thin film resonator through a specific light path and the like, incident light parameters (wavelength and intensity) are the key for regulating and controlling the resonant frequency of the two-dimensional heterogeneous thin film resonator, and flexible regulation and control in a certain range can be realized by changing the parameters of the incident light.
The vibration detector can extract vibration signals (displacement and speed) within a certain frequency and range, and converts the vibration signals into electric signals for a subsequent signal conditioning circuit. The vibration detector adopts a Doppler laser interferometer to test the vibration characteristics of the two-dimensional heterogeneous thin film structure in time domain and frequency domain.
The signal conditioning circuit specifically comprises a phase-locked amplifying circuit, a filtering processing circuit and a phase adjusting circuit. The phase-locked amplifier can amplify the vibration signal, and the vibration signal is used as a driving signal to drive the piezoelectric resonator after filtering and phase change conditioning. Different resonance sensitivity peaks can be achieved by adjusting the size.
In this embodiment, the two-dimensional heterogeneous thin film is prepared based on a surface critical self-assembly process, such that a plurality of metal nanoparticle individuals are spontaneously associated and integrated to form a compact and ordered two-dimensional multi-particle mesostructure.
In the embodiment, the self-driving circuit and the closed-loop feedback circuit are designed, so that the two-dimensional heterogeneous film works in a closed-loop mode, and the dynamic characteristic of the system is obviously improved. When the environment changes, the closed-loop control makes the output frequency of the resonator correspondingly adjusted, and the structural vibration is always maintained in a resonance state; and the frequency meter monitors the frequency signal of the system to reflect the vibration information in real time.
The foregoing is merely a preferred embodiment of the invention and is not intended to limit the invention in any manner. Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make many possible variations and modifications to the disclosed embodiments, or equivalent modifications, without departing from the spirit and scope of the invention, using the methods and techniques disclosed above. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention are still within the scope of the protection of the technical solution of the present invention.
Claims (6)
1. A resonant frequency self-adaptive control system based on a two-dimensional heterogeneous thin film is characterized by comprising a supporting substrate (1), the two-dimensional heterogeneous thin film (2), a piezoelectric ceramic driver (3), a vibration detector (4), a signal conditioning circuit and an external adjustable light source (8), wherein the two-dimensional heterogeneous thin film (2) is formed by connecting nano metal particles through a flexible organic polymer and is self-assembled into a two-dimensional heterogeneous lattice structure, the structural form and the size of the two-dimensional heterogeneous lattice structure formed by connecting the nano metal particles on the flexible organic polymer can obviously influence the position of a resonant peak of the two-dimensional heterogeneous thin film, the microstructure of the two-dimensional heterogeneous lattice structure can be changed under the influence of illumination, so that the resonant frequency of the two-dimensional heterogeneous thin film is changed, the two-dimensional heterogeneous thin film (2) is suspended on the supporting substrate (1), support substrate (1) and piezoceramics driver (3) and realize fixed connection, outside adjustable light source (8) shine two-dimentional heterogeneous membrane (2), piezoceramics driver (3) drive two-dimentional heterogeneous membrane (2) vibration, the vibration of vibration detector (4) perception two-dimentional heterogeneous membrane (2) produces corresponding signal of telecommunication, signal conditioning circuit handles the signal of telecommunication that vibration detector (4) generated and converts into drive control signal, thereby realize the vibration control to piezoceramics driver (3).
2. The adaptive control system for the resonant frequency based on the two-dimensional heterogeneous thin film according to claim 1 is characterized in that the two-dimensional heterogeneous thin film (2) is prepared based on a critical self-assembly process of a surface and is formed by connecting nano metal particles through organic polymer, and the structural form and the critical dimension of the metal nano particles can be selected.
3. The adaptive control system of resonant frequency based on two-dimensional heterogeneous thin film according to claim 2, characterized in that the support substrate (1) is prepared based on silicon wafer, obtained by dry etching or wet etching process.
4. The adaptive control system for resonant frequency based on two-dimensional heterogeneous thin film according to claim 3, characterized in that when the external tunable light source (8) irradiates the two-dimensional heterogeneous thin film (2), the wavelength and intensity of incident light can be adjusted.
5. The adaptive control system for the resonant frequency based on the two-dimensional heterogeneous thin film according to claim 4, wherein the signal conditioning circuit comprises a phase-locked amplifying circuit (5), a filtering processing circuit (6) and a phase adjusting circuit (7).
6. The adaptive control system for resonance frequency based on two-dimensional heterogeneous thin films according to claim 4, characterized in that the vibration detector (4) is a Doppler laser interferometer.
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