CN106949914A - A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency - Google Patents
A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency Download PDFInfo
- Publication number
- CN106949914A CN106949914A CN201710178516.9A CN201710178516A CN106949914A CN 106949914 A CN106949914 A CN 106949914A CN 201710178516 A CN201710178516 A CN 201710178516A CN 106949914 A CN106949914 A CN 106949914A
- Authority
- CN
- China
- Prior art keywords
- micro
- cantilever
- thermal
- vibrational energy
- conversion efficiency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 42
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 23
- 239000002082 metal nanoparticle Substances 0.000 claims abstract description 20
- 239000010931 gold Substances 0.000 claims abstract description 9
- 229910052737 gold Inorganic materials 0.000 claims abstract description 8
- 230000000694 effects Effects 0.000 claims description 18
- 238000004544 sputter deposition Methods 0.000 claims description 14
- 238000000137 annealing Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 230000004044 response Effects 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 6
- 238000001914 filtration Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 abstract description 6
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 238000011161 development Methods 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- 235000013339 cereals Nutrition 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- 230000010339 dilation Effects 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 238000000985 reflectance spectrum Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Composite Materials (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency, including：Local phasmon structure, collection are prepared on the micro-cantilever because light stimulus micro-cantilever vibrates sent vibration signal.The luminous energy of absorption is converted into the kinetic energy of electronic resonance by metal nanoparticle, then this energy is converted into the scattering of electronics by lattice the vibrational energy of lattice.Gold nano grain can also be such that the effective mass of micro-cantilever increases so as to improve its quality, and this can effectively improve the detection accuracy and resolution ratio of micro-cantilever beam sensor.In addition, combine phasmon micro-cantilever can also as a function admirable light power meter, test limit is up to pm/nW.The present invention efficiently solves light and excites the problem of micro-cantilever vibration efficiency is low, and succinct convenient, has important practical value to the development and application that micro-cantilever vibration is excited based on light.
Description
Technical field
Photo-thermal is improved using local phasmon structure excite micro-cantilever vibrational energy conversion effect the present invention relates to one kind
The method of rate, belongs to the technical field of micro electro mechanical device vibration.
Background technology
Micro-cantilever beam sensor to tiny signal because having the characteristics of detection sensitivity is high in biology, chemistry, mechanics, matter
The detection fields such as amount are widely used.The precondition of high-performance micro-cantilever beam sensor application is to micro-cantilever
Effective excitation.Up to the present, various exciting methods are had been developed that.Wherein, photo-thermal is excited due to long-range noncontact
The characteristics of and be widely used at a high speed, in high-resolution and quantitative analysis, be particularly not easy the liquid of application in other technologies
Or adverse circumstances.However, the launching efficiency that photo-thermal is excited is relatively low.Input optical power sufficiently high just can must effectively encourage micro-
Cantilever beam vibration, too high laser power is likely to result in mechanical non-linearity, frequency displacement, or even optical damage.In order to effectively excite
Micro-cantilever vibrates, it usually needs vibrated in its plated surface layer of metal with being produced using the coefficient of thermal expansion differences of materials at two layers.
But the amplification of this energy conversion efficiency is limited, and the quality factor of cantilever beam is reduced, make the reduction of its detectivity.
Plasma is a kind of dissimulated electricity that metal surface free electron is produced with incident photon same frequency collective oscillation
Electromagnetic wave, plasmon nanostructure has abundant optical property.The luminous energy of absorption is converted into electronics by metal nanoparticle
The kinetic energy of resonance, is then converted into this energy to the scattering of electronics by lattice the vibrational energy of lattice.Metal nanoparticle
The luminous energy of absorption is converted into the kinetic energy of electronic resonance, this energy is then converted into by lattice by lattice to the scattering of electronics
Vibrational energy.The heat energy of lattice vibration can be further transferred to micro-cantilever, so as to raise the surface temperature of micro-cantilever, have
Micro-cantilever is more efficiently encouraged to vibrate beneficial to thermal gradient mechanism and duplicature mechanism.The presence of gold nano grain can also make micro-
The effective mass of cantilever beam increases so as to improve its quality, and this can effectively improve the detection essence of micro-cantilever beam sensor
Degree and resolution ratio.The present invention efficiently solves light and excites the problem of micro-cantilever vibration efficiency is low, and succinct convenient, to based on light
Exciting development and application that micro-cantilever vibrates has important practical value.
The content of the invention
In view of the shortcomings of the prior art, the present invention propose it is a kind of using local phasmon structure improve photo-thermal excite it is micro-
The method of cantilever beam vibrational energy conversion efficiency.
Technical scheme is as follows：
A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency, bag
Include：Local phasmon structure, collection are prepared on the micro-cantilever because light stimulus micro-cantilever vibrates sent vibration
Signal.
According to currently preferred, the method for local phasmon structure is prepared on the micro-cantilever to be included：To micro-
Cantilever beam sputtering metal membrane and then makes annealing treatment in nitrogen atmosphere to the micro-cantilever in a vacuum：In micro-cantilever
Surface forms metal nanoparticle.
It is golden film according to currently preferred, described metal film；The metal nanoparticle is gold nano grain.
According to currently preferred, it is described sputter golden film in a vacuum to micro-cantilever specific method be：Utilize vacuum
Sputter sputters golden film to micro-cantilever in a vacuum, and vacuum is set to 10mbar, and electric current is 10mA, and sputtering time is 30-
240s.It is preferred that, the sputtering time is respectively 30s, 60s, 90s, 120s, 240s.
According to currently preferred, it is to anneal in the method made annealing treatment in nitrogen atmosphere to the micro-cantilever
Temperature is 500 DEG C.Heating rate is 10 DEG C/min, constant temperature 1 hour at 500 DEG C, last automatic cooling.
According to currently preferred, gather because as follows the step of light stimulus micro-cantilever vibrates sent vibration signal：
The corresponding light wave of the light stimulus is a length of：The phasmon is set to produce the optical wavelength of resonance.
According to currently preferred, the corresponding light wave of the light stimulus is a length of：365-940nm.It is preferred that, the light stimulus
Corresponding light wave is a length of：523nm.
According to currently preferred, the light stimulus is to the micro- of local phasmon structure using light emitting diode
Cantilever beam is irradiated, and thermal gradients and duplicature effect collective effect encourage it to vibrate：Utilize list inside lock-in amplifier
The pure oscillation signal driving LED flash of reference model output, lumination of light emitting diode centre wavelength is 365-
940nm；It is preferred that, the lumination of light emitting diode centre wavelength is respectively 365nm, 385nm, 425nm, 460nm, 523nm,
620nm, 850nm, 940nm.Its flicker frequency is identical with lock-in amplifier internal lock frequency.
Lumination of light emitting diode pulse interacts with micro-cantilever, for blank micro-cantilever, photoreceiving surface radiation meeting
Thermograde is produced in thickness direction, different temperature can make its dilation different, so as to cause it to bend.In modulation light stimulus
Under just can produce vibration (thermal gradients), for plated film micro-cantilever, because cantilever beam is different with the thermal coefficient of expansion of film, by
The dilation that light radiation is produced is also different, so that beam produces bending, vibration can be produced under modulation light stimulus.Duplicature effect
It is encouraged to vibrate (duplicature effect)；350 microns of length of cantilever, it is wide 35 microns, it is thick 1 micron.
According to currently preferred, the vibration signal of micro-cantilever is gathered using laser vibration measurer.The laser vibration measurer
It is the instrument that displacement and speed using the Doppler effect of laser to moving object are detected：When vialog laser probe hair
When the laser gone out is irradiated in moving object, micro-cantilever surface need to be focused on to it, focused spot is about 10 microns, when micro-
Cantilever beam is moved towards laser probe, and its laser being reflected back can have shorter wavelength than incident laser, that is, occur blue shift；When
Dorsad laser probe is moved micro-cantilever, and its laser being reflected back can have longer wavelength than incident laser, that is, occur red shift.
By the wavelength and the phase relative to incident light that measure reflected light, you can calculate the displacement and speed of micro-cantilever vibration
Angle value, and it is translated into voltage signal.
It is described to gather after vibration signal according to currently preferred, by the vibration signal collected by lock-in amplifier,
The result obtained after amplified and bandpass filtering with the common input mixer of reference signal, then after being filtered by low pass filter
To the frequency domain response of its vibration signal, wherein, the reference signal is locked as the sinusoidal signal of output inside lock-in amplifier.
Advantage of the invention is that：
1. the present invention is a kind of long-range non-contact technology for encouraging micro-cantilever to vibrate, relative to be excited with condenser type and piezoelectricity
Formula such as excites to excite at the short distance, has greatly expanded its application.
2. the present invention improves luminous energy-machine on the premise of laser is remained with as a kind of long-range noncontact excitation technique
Tool energy energy conversion efficiency, can more effectively excite micro-cantilever to vibrate.
3. the present invention is using light emitting diode excitation micro-cantilever vibration, compared to common laser pumping, with sexual valence
It is low in calories than high, long service life, environmental protection, small volume and the characteristics of be easily achieved, in the same of reduction operating method complexity
When, increase experimental precision.
4. the present invention may be up to GHz, be far longer than utilization using light emitting diode excitation micro-cantilever vibration, modulating frequency
Laser or chopper the modulation laser pulse excitation micro-cantilever of external modulation function, can motivate higher order resonance, high
Rank resonance has great meaning for improving the resolution ratio of micro-cantilever detector and sensor.
5. the metal nanoparticle that the present invention is used in the manufacture of micro-cantilever surface can effectively improve micro-cantilever
Quality factor, is improved the resolution ratio of various micro-cantilever beam sensors.
6. the versatility of the method for the invention is good.Rectangle micro-cantilever involved in the present invention can be changed into other shapes
The micro-cantilever or micro electromechanical structure of formula, based on above-mentioned exciting method, realize that effective light of different micro electromechanical structures is excited.
7. method of the present invention is widely used.Micro-cantilever is excited to vibrate as a kind of long-range noncontact, the present invention
Various field of detecting are can be widely applied to, the high accuracy to small-signal, the real-time detection of high speed is realized.
8. due to improving luminous energy-mechanical energy energy conversion efficiency in micro-cantilever surface structure metal nanoparticle, because
This can as a function admirable light power meter, test limit is up to pm/nW.
Brief description of the drawings
Fig. 1 is the scanning electron microscope image on blank micro-cantilever surface；
Fig. 2 is the scanning electron microscope image after the sputtering metal membrane of micro-cantilever surface；
Fig. 3 is the scanning electron microscope image for the micro-cantilever that surface is metal nanoparticle；
It is the micro- of metal nanoparticle that Fig. 4, which illustrates blank micro-cantilever, sputtering to have the micro-cantilever of metal film and surface,
The reflection spectrogram of cantilever beam；
Fig. 5 is heretofore described utilization light emitting diode excitation micro-cantilever vibration, and is shaken with laser vibration measurer detection
The schematic diagram of dynamic signal；
In Figure 5：1st, resonant method instrument probe in laser vibration measurer；2nd, metal nanoparticle；3rd, micro-cantilever；4th, send out
Optical diode；
Fig. 6 is amplitude of the micro-cantilever at the resonant frequency under different wave length light emitting diode is excited；
Fig. 7 is blank micro-cantilever, gold-plated film micro-cantilever, metal nanoparticle micro-cantilever Oscillation Amplitude response diagram；
Fig. 8 is blank micro-cantilever light excited vibrational mechanism choice；
Fig. 9 is gold-plated film micro-cantilever light excited vibrational mechanism choice；
Figure 10 is metal nanoparticle micro-cantilever light excited vibrational mechanism choice；
Figure 11 is amplitude of the micro-cantilever surface in the case where constructing different size metallic nano particles relative to blank micro-cantilever
The increase figure of beam amplitude；
Figure 12 is frequency and quality factor variation diagram of the metal nanoparticle micro-cantilever relative to blank micro-cantilever.
Embodiment
The present invention is described in detail with reference to embodiment and Figure of description, but not limited to this.
Embodiment 1,
A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency, bag
Include：Local phasmon structure, collection are prepared on the micro-cantilever because light stimulus micro-cantilever vibrates sent vibration
Signal.
Embodiment 2,
It is a kind of as described in Example 1 to excite micro-cantilever vibrational energy to turn using local phasmon structure raising photo-thermal
The method for changing efficiency, its difference is that the method that local phasmon structure is prepared on the micro-cantilever includes：To micro- outstanding
Arm beam sputtering metal membrane and then makes annealing treatment in nitrogen atmosphere to the micro-cantilever in a vacuum：In micro-cantilever table
Face forms metal nanoparticle.
The corresponding light wave of the light stimulus is a length of：The phasmon is set to produce the optical wavelength of resonance.
The corresponding light wave of the light stimulus is a length of：365-940nm.
Embodiment 3,
It is a kind of as described in Example 2 to excite micro-cantilever vibrational energy to turn using local phasmon structure raising photo-thermal
The method for changing efficiency, its difference is that described metal film is golden film；The metal nanoparticle is gold nano grain.It is described
The corresponding light wave of light stimulus is a length of：523nm.
Embodiment 4,
It is a kind of as described in Example 3 to excite micro-cantilever vibrational energy to turn using local phasmon structure raising photo-thermal
The method for changing efficiency, its difference is, it is described sputter golden film in a vacuum to micro-cantilever specific method be：Splashed using vacuum
Penetrate instrument and sputter golden film in a vacuum to micro-cantilever, vacuum is set to 10mbar, and electric current is 10mA, and sputtering time is 30-
240s.It is preferred that, the sputtering time is respectively 30s, 60s, 90s, 120s, 240s.
It is that annealing temperature is 500 DEG C in the method made annealing treatment in nitrogen atmosphere to the micro-cantilever.Heating speed
Rate is 10 DEG C/min, constant temperature 1 hour at 500 DEG C, last automatic cooling.
As Figure 1-3, micro-cantilever surface is by sputtering golden film for the gold nano grain formed on micro-cantilever surface
And stable gold nano grain is formd after annealing.Micro-cantilever has a reflection to reflectance spectrum near 534nm as shown in fig. 4
Peak, this is attributable to the localized surface plasmons resonance (LSPR) of gold nano grain, effect of the conduction electronics in incident light wave
Under, produce collective resonance.
Embodiment 5,
One kind as described in embodiment 1-4 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, its difference is that the light stimulus is using light emitting diode to local phasmon structure
Micro-cantilever is irradiated, and thermal gradients and duplicature effect collective effect encourage it to vibrate：Inside lock-in amplifier
The pure oscillation signal driving LED flash of single reference model output, lumination of light emitting diode centre wavelength is 365-
940nm；It is preferred that, the lumination of light emitting diode centre wavelength is respectively 365nm, 385nm, 425nm, 460nm, 523nm,
620nm, 850nm, 940nm.Its flicker frequency is identical with lock-in amplifier internal lock frequency.
Lumination of light emitting diode pulse interacts with micro-cantilever, for blank micro-cantilever, photoreceiving surface radiation meeting
Thermograde is produced in thickness direction, different temperature can make its dilation different, so as to cause it to bend.In modulation light stimulus
Under just can produce vibration (thermal gradients), for plated film micro-cantilever, because cantilever beam is different with the thermal coefficient of expansion of film, by
The dilation that light radiation is produced is also different, so that beam produces bending, vibration can be produced under modulation light stimulus.Duplicature effect
It is encouraged to vibrate (duplicature effect)；350 microns of length of cantilever, it is wide 35 microns, it is thick 1 micron.
Embodiment 6,
It is a kind of as described in Example 1 to excite micro-cantilever vibrational energy to turn using local phasmon structure raising photo-thermal
The method for changing efficiency, its difference is that the vibration signal of micro-cantilever is gathered using laser vibration measurer.The laser vibration measurer is
The instrument that displacement and speed using the Doppler effect of laser to moving object are detected：When vialog laser probe is sent
Laser when being irradiated in moving object, micro-cantilever surface need to be focused on to it, focused spot is about 10 microns, when micro- outstanding
Arm beam is moved towards laser probe, and its laser being reflected back can have shorter wavelength than incident laser, that is, occur blue shift；When micro-
Dorsad laser probe is moved cantilever beam, and its laser being reflected back can have longer wavelength than incident laser, that is, occur red shift.It is logical
Cross the wavelength and the phase relative to incident light of measurement reflected light, you can calculate the displacement and speed of micro-cantilever vibration
Value, and it is translated into voltage signal.
Embodiment 7,
It is a kind of as described in Example 6 to excite micro-cantilever vibrational energy to turn using local phasmon structure raising photo-thermal
The method for changing efficiency, its difference is, after the collection vibration signal, by the vibration signal collected by lock-in amplifier,
The result obtained after amplified and bandpass filtering with the common input mixer of reference signal, then after being filtered by low pass filter
To the frequency domain response of its vibration signal, wherein, the reference signal is locked as the sinusoidal signal of output inside lock-in amplifier.Hair
Optical diode enters line frequency irradiation to micro-cantilever, and the micro-cantilever produces frequency vibration signal, and the vibration signal is by more
Obtained after general Le vialog collection by lock-in amplifier：When lock-in amplifier is performed a scan, that is, obtain micro-cantilever
Vibration frequency domain response, obtain each rank Oscillation Amplitude of the micro-cantilever and quality factor.
Application examples,
One kind as described in embodiment 1-7 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, is further illustrated with reference to such as Fig. 1-Figure 12：
1) golden film is sputtered in a vacuum to micro-cantilever first with vacuum sputtering instrument, vacuum is set to 10mbar, electricity
Flow for 10mA, sputtering time is respectively 30s, 60s, 90s, 120s, 240s；The resulting micro-cantilever that golden film is coated with surface
Annealed in the lehr, atmosphere nitrogen of annealing, annealing temperature is 500 DEG C, heating rate is perseverance at 10 DEG C/min, 500 DEG C
Temperature 1 hour, last automatic cooling just can obtain the micro-cantilever that surface is coated with metal nanoparticle.It is scanned Electronic Speculum and
Analysis of spectrum is reflected, sees whether to have obtained local phasmon structure, as shown in Figure 3.
2) resonant method instrument probe Laser Focusing：The 633nm sent by vibration measurement with laser instrument probe light passes through micro- thing
Mirror focuses on micro-cantilever surface, and focal beam spot is 10 μm, and focusing effect is obtained by light microscope detection, wherein regulation is poly-
The method of burnt effect is that the locus of micro-cantilever is moved by three-dimensional spiral micrometer；
3) vibration signal collection, processing：The vibration signal obtained by laser vibration measurer is controlled by Doppler vibrometer
Device is converted into voltage signal.Thereafter by lock-in amplifier, mixing is inputted after amplified and bandpass filtering jointly with reference signal
Device, then after being filtered by low pass filter, read by computer；
4) using the light emitting diode excitation micro-cantilever vibration of different wave length, as shown in fig. 6, micro-cantilever is in 523nm
Its lower amplitude of light emitting diode excitation of wavelength is maximum, illustrates that local plasmon resonance improves luminous energy-mechanical energy really
Energy conversion efficiency.
5) blank micro-cantilever, gold-plated film micro-cantilever are encouraged respectively for 523nm light emitting diode (35mW) using wavelength
Beam, metal nanoparticle micro-cantilever.The amplitude-frequency response of each micro-cantilever is observed, as shown in fig. 7, surface structure has metal to receive
The micro-cantilever amplitude of rice grain is maximum, illustrates that local phasmon structure improves the energy turn of its luminous energy-mechanical energy really
Change efficiency.Because luminous energy can be converted to heat energy by Au NPs with more efficient, so that exciting the heat that micro-cantilever vibrates
Gradient Effect and duplicature effect are more efficient.
6) using the light emitting diode that wavelength is 523nm, drive surface is configured with the micro- outstanding of different sized nanostructures particles respectively
Arm beam vibration, and its amplitude-frequency response is observed, as shown in figure 11.It was found that metal nanoparticle diameter is under 25.23nm yardsticks, amplitude
Increase has optimal value.This is due to that under this size, the local plasmon resonance intensity of a group metallic can reach
Maximize.
7) using the light emitting diode that wavelength is 523nm, drive surface is configured with the micro- outstanding of different sized nanostructures particles respectively
Arm beam vibration, and its frequency domain response is observed, and calculate being total to for the micro-cantilever under different sized nanostructures particles using frequency domain response
Vibration frequency and quality factor, as shown in figure 12, it is found that with the increase of gold-plated time, the resonant frequency of micro-cantilever reduces, product
Prime factor increase.This is due to the lengthening of gold-plated time, caused by the effective mass increase of cantilever beam, its quality factor
Increase can effectively improve the resolution ratio of micro-cantilever beam sensor.
Claims (10)
1. a kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency, it is special
Levy and be, this method includes：Local phasmon structure is prepared on the micro-cantilever, is gathered because light stimulus micro-cantilever shakes
Dynamic sent vibration signal.
2. one kind according to claim 1 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, it is characterised in that the method for local phasmon structure is prepared on the micro-cantilever to be included：To micro-
Cantilever beam sputtering metal membrane and then makes annealing treatment in nitrogen atmosphere to the micro-cantilever in a vacuum：In micro-cantilever
Surface forms metal nanoparticle.
3. one kind according to claim 2 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, it is characterised in that described metal film is golden film；The metal nanoparticle is gold nano grain.
4. one kind according to claim 3 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, it is characterised in that it is described sputter golden film in a vacuum to micro-cantilever specific method be：Utilize vacuum
Sputter sputters golden film to micro-cantilever in a vacuum, and vacuum is set to 10mbar, and electric current is 10mA, and sputtering time is 30-
240s, it is preferred that the sputtering time is respectively 30s, 60s, 90s, 120s, 240s.
5. one kind according to claim 4 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, it is characterised in that the method made annealing treatment in nitrogen atmosphere to the micro-cantilever is that annealing is warm
Spend for 500 DEG C.
6. one kind according to claim 1 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, it is characterised in that gather because as follows the step of light stimulus micro-cantilever vibrates sent vibration signal：
The corresponding light wave of the light stimulus is a length of：The phasmon is set to produce the optical wavelength of resonance.
7. one kind according to claim 6 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, it is characterised in that the corresponding light wave of the light stimulus is a length of：365-940nm, it is preferred that the light swashs
Encourage corresponding light wave a length of：523nm.
8. one kind according to claim 1 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, it is characterised in that the light stimulus is using light emitting diode to local phasmon structure
Micro-cantilever is irradiated, and thermal gradients and duplicature effect collective effect encourage it to vibrate：Lumination of light emitting diode center
Wavelength is 365-940nm；It is preferred that, the lumination of light emitting diode centre wavelength is respectively 365nm, 385nm, 425nm,
460nm, 523nm, 620nm, 850nm, 940nm.
9. one kind according to claim 1 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method of conversion efficiency, it is characterised in that the vibration signal of micro-cantilever is gathered using laser vibration measurer.
10. one kind according to claim 9 improves photo-thermal using local phasmon structure and excites micro-cantilever vibrational energy
The method for measuring conversion efficiency, it is characterised in that after the collection vibration signal, the vibration signal collected is mutually amplified by lock
The result obtained after device, amplified and bandpass filtering with the common input mixer of reference signal, then filtered by low pass filter
The frequency domain response of its vibration signal is obtained afterwards, wherein, the reference signal is locked as the sinusoidal letter of output inside lock-in amplifier
Number.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710178516.9A CN106949914A (en) | 2017-03-23 | 2017-03-23 | A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710178516.9A CN106949914A (en) | 2017-03-23 | 2017-03-23 | A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106949914A true CN106949914A (en) | 2017-07-14 |
Family
ID=59472436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710178516.9A Pending CN106949914A (en) | 2017-03-23 | 2017-03-23 | A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106949914A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111224639A (en) * | 2020-01-19 | 2020-06-02 | 中国人民解放军军事科学院国防科技创新研究院 | Resonant frequency self-adaptive control system based on two-dimensional heterogeneous thin film |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101802586A (en) * | 2007-09-13 | 2010-08-11 | 富士胶片株式会社 | Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor |
| CN104535172A (en) * | 2015-01-12 | 2015-04-22 | 山东大学 | Method and application utilizing light-emitting diode matrixes for achieving tiny cantilever beam high-order resonance excitation |
| GB2521417A (en) * | 2013-12-19 | 2015-06-24 | Swisslitho Ag | Multiscale patterning of a sample with apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capability |
| CN104746049A (en) * | 2015-04-07 | 2015-07-01 | 南京大学 | Method for preparing surface-enhanced Raman scattering base with metal nanometer gaps by utilizing ALD (atomic layer deposition) |
| CN106119804A (en) * | 2016-08-22 | 2016-11-16 | 电子科技大学 | A kind of method based on short annealing metallic film self-assembled nanometer particle |
-
2017
- 2017-03-23 CN CN201710178516.9A patent/CN106949914A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101802586A (en) * | 2007-09-13 | 2010-08-11 | 富士胶片株式会社 | Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor |
| GB2521417A (en) * | 2013-12-19 | 2015-06-24 | Swisslitho Ag | Multiscale patterning of a sample with apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capability |
| CN104535172A (en) * | 2015-01-12 | 2015-04-22 | 山东大学 | Method and application utilizing light-emitting diode matrixes for achieving tiny cantilever beam high-order resonance excitation |
| CN104746049A (en) * | 2015-04-07 | 2015-07-01 | 南京大学 | Method for preparing surface-enhanced Raman scattering base with metal nanometer gaps by utilizing ALD (atomic layer deposition) |
| CN106119804A (en) * | 2016-08-22 | 2016-11-16 | 电子科技大学 | A kind of method based on short annealing metallic film self-assembled nanometer particle |
Non-Patent Citations (2)
| Title |
|---|
| CHI-NAN CHEN等: "Nanoparticle-embedded actuator based on localized surface plasmon resonance", 《JOURNAL OF OPTICS A: PURE AND APPLIED OPTICS》 * |
| 农金鹏等: "石墨烯纳米带修饰微悬臂梁的光热偏转特性研究", 《中国科技论文》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111224639A (en) * | 2020-01-19 | 2020-06-02 | 中国人民解放军军事科学院国防科技创新研究院 | Resonant frequency self-adaptive control system based on two-dimensional heterogeneous thin film |
| CN111224639B (en) * | 2020-01-19 | 2020-11-27 | 中国人民解放军军事科学院国防科技创新研究院 | Resonant frequency self-adaptive control system based on two-dimensional heterogeneous thin film |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5716977B2 (en) | Image resonance microscope of molecular resonance | |
| CN1793874B (en) | Equipment and method for measuring photoelectric performance of semiconductor nanometer structure | |
| EP2150785A1 (en) | High frequency deflection measurement of ir absorption | |
| Eah et al. | Plasmon scattering from a single gold nanoparticle collected through an optical fiber | |
| JP2012132886A (en) | Method and device for measuring optical characteristics of dielectric on metal thin film | |
| CN105699330A (en) | Refractive index sensor based on surface plasmon laser and detection system and method | |
| CN108981898A (en) | It is a kind of to realize the method for micro-cantilever resonant frequency tuning using photo-thermal effect, realizing system and application | |
| CN104535172B (en) | A kind of method and application for realizing that micro-cantilever high order resonance excites using light emitting diode matrix | |
| CN113433067A (en) | Refractive index sensor based on metal nanometer gap surface plasmon intrinsic radiation | |
| CN106949914A (en) | A kind of utilization local phasmon structure improves the method that photo-thermal excites micro-cantilever vibrational energy conversion efficiency | |
| CN110261315A (en) | A kind of scanning near-field opto-acoustic microscopic imaging instrument | |
| CN103288046A (en) | Two-dimensional periodic V-shaped metal plasma resonance structure and method for manufacturing same | |
| CN113075168A (en) | Detection method for exciting biomolecular terahertz resonance | |
| CN115980470A (en) | Rapid calibration method for nano-particle net electric quantity based on vacuum optical tweezers | |
| Tai et al. | Escherichia coli fiber sensors using concentrated dielectrophoretic force with optical defocusing method | |
| CN116499604A (en) | High-sensitivity thermometer based on silicon carbide double-vacancy color center and measuring method | |
| Xu et al. | Hybrid plasmonic structures: design and fabrication by laser means | |
| JP2007051916A (en) | Mass measuring instrument and mass measuring method | |
| CN111551278B (en) | Accurate and rapid temperature measurement system and temperature measurement method for single nanoparticle | |
| Freddi et al. | Excited-state lifetime assay for protein detection on gold colloids− fluorophore complexes | |
| CN117451653A (en) | Electrochemical nano infrared spectrum microscope and analysis method | |
| CN110308122B (en) | Device for measuring microwave power based on gold nanosphere nonlinear quantum coherent effect | |
| Lei et al. | Nanospectrofluorometry inside single living cell by scanning near-field optical microscopy | |
| US20040011946A1 (en) | Apparatus for measuring position of fine particle | |
| CN114370937B (en) | Infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170714 |
|
| RJ01 | Rejection of invention patent application after publication |