CN106500967B - Solar blind ultraviolet image intensifier spatial resolution testing device and method - Google Patents
Solar blind ultraviolet image intensifier spatial resolution testing device and method Download PDFInfo
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- CN106500967B CN106500967B CN201610953657.9A CN201610953657A CN106500967B CN 106500967 B CN106500967 B CN 106500967B CN 201610953657 A CN201610953657 A CN 201610953657A CN 106500967 B CN106500967 B CN 106500967B
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- 238000012360 testing method Methods 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title abstract description 9
- 238000003384 imaging method Methods 0.000 claims description 58
- 239000003623 enhancer Substances 0.000 claims description 52
- 239000005338 frosted glass Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000012634 optical imaging Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 5
- 238000010998 test method Methods 0.000 claims description 4
- 230000004304 visual acuity Effects 0.000 claims description 4
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical group [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 3
- 229910001634 calcium fluoride Inorganic materials 0.000 claims description 3
- 229910052805 deuterium Inorganic materials 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- 238000009738 saturating Methods 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 2
- 239000005357 flat glass Substances 0.000 claims 1
- 230000004075 alteration Effects 0.000 abstract description 7
- 239000005337 ground glass Substances 0.000 abstract 1
- 230000008901 benefit Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention provides a solar blind ultraviolet image intensifier spatial resolution testing device which is small in chromatic aberration, small in spherical aberration, simple to process, easy to install and adjust, compact in structure and simple to operate, and solves the problems that an existing device is large in spherical aberration, an aspherical mirror is difficult to process and inspect, and a system is difficult to install and adjust. The testing device comprises an ultraviolet light source, a ground glass sheet, a resolution testing target, a first parallel light pipe, an ultraviolet narrow-band light filter, a diaphragm, a second parallel light pipe, a solar blind ultraviolet image intensifier and a microscope which are sequentially arranged, and further comprises a tubular shell, a support, a guide rail and a multi-dimensional adjusting frame; the microscope and the solar blind ultraviolet image intensifier are arranged on the multidimensional adjusting frame, the multidimensional adjusting frame is arranged on the support, and the support is arranged on the guide rail and used for supporting the multidimensional adjusting frame and the ultraviolet source to move axially on the guide rail. The method is mainly used for testing the spatial resolution of the solar blind ultraviolet image intensifier and can also be used for testing the spatial resolution of photoelectric devices such as an ultraviolet stripe image converter and the like.
Description
Technical field
The present invention relates to photoelectronic imaging device performance testing fields, and in particular to a kind of day blind ultraviolet imaging enhancer space point
Resolution test device and method.
Background technique
Spatial resolution refers to the least limit of identifiable critical object space geometrical length in image, i.e., to subtle knot
The resolution ratio of structure, is one of key parameter index of ultraviolet imaging enhancer, and performance quality determines the imaging of ultraviolet imaging enhancer
Quality.Since the test equipment of image intensifier is highly professional, the manufacturer of external image intensifier is all that oneself develops correlation
Test equipment assessment test is carried out to the resolution ratio of image intensifier, there is no commercialization test equipment in the market.There is correlation in the country
Unit studies the test device of ultraviolet imaging enhancer, a kind of using total reflection mirror at present there are two types of test device
Optical system, including spherical reflector and plane mirror etc., another kind using off-axis parabolic mirror add refraction-reflection at
As the optical system of objective lens mode, the test device existing defects of both ultraviolet imaging enhancers are mainly as follows: the first by
In using spherical reflector, it is easy to have many advantages, such as to process adjustment, but spherical aberration is larger and difficult correction.Second off-axis due to using
Reflecting system has good imaging quality, and without blocking, system optics gain is also readily satisfied, but its non-spherical reflector adds
Work, inspection are all relatively difficult, and system resetting difficulty is larger.
Summary of the invention
That the present invention provides a kind of color difference is small, spherical aberration is small, the processing is simple, easy adjustment, day compact-sized, easy to operate are blind
Ultraviolet imaging enhancer spatial resolution test device and test method, with overcome the test device spherical aberration of optical system of total reflection compared with
Greatly, aspherical mirror processing in the test device of aspherical reflective optics, examine relatively difficult, system resetting difficulty is biggish
Problem.
Technical proposal that the invention solves the above-mentioned problems is:
A kind of day blind ultraviolet imaging enhancer spatial resolution test device, including ultraviolet source, the frosted glass set gradually
Piece, resolution test target, the first parallel light tube, ultraviolet narrow band filter, clear aperature from the adjustable diaphragm of 0.5mm-10mm and
Second parallel light tube further includes tubular shell, microscope, support, guide rail and multidimensional adjusting bracket;The microscope and day are blind ultraviolet
Image intensifier is set on multidimensional adjusting bracket;The multidimensional adjusting bracket, ultraviolet source and tubular shell setting are on the support, described
Support is arranged on guide rail, and the support for being used to support multidimensional adjusting bracket and ultraviolet source moves axially on guide rail;
First parallel light tube, the second parallel light tube and tubular shell constitute optical imaging system, and described first is parallel
Light pipe, the second parallel light tube are arranged in tubular shell, described in the ultraviolet narrow band filter and diaphragm insertion tubular shell
Optical imaging system imaging magnification be 1:1, first parallel light tube include the first lens set gradually, the second lens,
The third lens, the 4th lens, second parallel light tube include the 5th lens set gradually, the 6th lens, the 7th lens,
Eight lens, first lens, the second lens, the 4th lens, the 5th lens, the 7th lens, the 8th lens are by CaF2It is made
Positive lens, the third lens and the 6th lens are the concavees lens made of quartz.
The ultraviolet source can be made of deuterium lamp, and radiation wave band range is 110nm-400nm.
The frosted glass plate can be frosted glass plate made of the JGS1 silica glass material using saturating ultraviolet light.
The resolution test target can be using USAF1951 resolving power test target made of JGS1 silica glass material photoetching,
It is 185nm-2500nm through wavelength band.
The present invention also provides a kind of blind ultraviolet imaging enhancer spatial resolution test methods of day, comprising the following steps:
1) power supply is opened, to ultraviolet source and the blind ultraviolet imaging enhancer power supply of tested day, is waited 10 minutes, allows ultraviolet source
Stable state is in day blind ultraviolet imaging enhancer;
2) diaphragm is adjusted, keeps clear aperature maximum, while the mobile support for being loaded with ultraviolet source in orbit, improves and differentiates
Rate tests target image brightness;
3) it is moved between optical imaging system output end and image intensifier using virgin paper sheet, target picture is allowed to be presented on blank sheet of paper
On piece observes target image sharpness situation of change, slightly sentences the position of target image planes;
4) support for being loaded with day blind ultraviolet imaging enhancer mobile in orbit, at the beginning of the cathode plane for making day blind ultraviolet imaging enhancer
Step is in target image planes;
5) it is packed into ultraviolet narrow band filter, adjusts diaphragm to suitably sized;
6) ultraviolet imaging enhancer cathode shading protective cover is removed;
7) multidimensional adjusting bracket one is adjusted, is moved forward and backward day blind ultraviolet imaging enhancer, while observing image intensifier fluorescent screen
On target picture, accurate adjustment day blind ultraviolet imaging enhancer position, until image clearly, the multidimensional adjusting bracket one is that carry day blind
The multidimensional adjusting bracket of ultraviolet imaging enhancer;
8) movement is loaded with microscopical support, observes the target image sharpness situation of change on fluorescent screen by eyepiece, slightly
Adjust microscopical position;
9) mobile multidimensional adjusting bracket two, is moved forward and backward microscope, while observing the target picture on fluorescent screen by eyepiece,
The microscopical position of accurate adjustment, until image clearly, the multidimensional adjusting bracket two is to carry microscopical multidimensional adjusting bracket;
10) multidimensional adjusting bracket one is adjusted again, is moved forward and backward ultraviolet imaging enhancer, while adjusting multidimensional adjusting bracket two,
The target on fluorescent screen is observed as situation of change by eyepiece;
11) step 10) is repeated several times, the numerical value corresponding to the minimal graph group that obtains by microscope is image intensifying
The spatial resolution of device
The beneficial effects of the present invention are: can make test device using the positive and negative lens combination of multi-disc at refractive optics system
System has that color difference is small, spherical aberration is small, the processing is simple, easy adjustment, structure are tight wherein positive negative lens selects different refraction materials
It gathers, simple operation and other advantages.Present invention is mainly used for the tests of the spatial resolution of day blind ultraviolet imaging enhancer, while can also use
It is tested in the spatial resolution of the photoelectric devices such as ultraviolet striped image converter tube.The test device passes through replacement radiation wave band to visible light
Light source, it may also be used for other photoelectricity such as visible light image intensifying and visible striations image converter tube visit device spatial resolution survey
Examination, wide market, thus there is extremely strong economic benefit and social benefit.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of day of the invention blind ultraviolet imaging enhancer spatial resolution test device embodiment;
Fig. 2 is resolution test target pattern schematic diagram of the present invention.
Appended drawing reference: 1- ultraviolet source, 2- frosted glass plate, 3- resolution test target, the first lens of 4-, the second lens of 5-,
6- the third lens, the 4th lens of 7-, the ultraviolet narrow band filter of 8-, 9- diaphragm, the 5th lens of 10-, the 6th lens of 11-, 12- the 7th
Lens, the 8th lens of 13-, 14- days blind ultraviolet imaging enhancers, 15- microscope, 16- multidimensional adjusting bracket one, 17- support, 18- is led
Rail, 19- multidimensional adjusting bracket two, 20- tubular shell
Specific embodiment
The contents of the present invention are described in further detail below in conjunction with the drawings and specific embodiments:
A kind of day as shown in Figure 1 blind ultraviolet imaging enhancer spatial resolution test device, it is ultraviolet including what is set gradually
Light source 1, frosted glass plate 2, resolution test target 3, the first parallel light tube, ultraviolet narrow band filter 8, diaphragm 9, the second directional light
Pipe, day blind ultraviolet imaging enhancer 14, microscope 15, further include tubular shell 20, support 17, guide rail 18, multidimensional adjusting bracket 1
With multidimensional adjusting bracket 2 19;The microscope 15 and day blind ultraviolet imaging enhancer 14 are respectively arranged at multidimensional adjusting bracket 2 19, more
It ties up on adjusting bracket 1, the adjusting of five dimensions may be implemented in multidimensional adjusting bracket, convenient for making tested image intensifier cathode plane be placed in test system
On the focal plane of system;The multidimensional adjusting bracket 1, multidimensional adjusting bracket 2 19, ultraviolet source 1 and tubular shell 20 are arranged in support
On 17, the support 17 is set on guide rail 18, is used to support multidimensional adjusting bracket 1,2 19 frame of multidimensional adjusting bracket, ultraviolet light
The support 17 in source 1 is moved axially in guide rail 18;Microscope 15 is set on multidimensional adjusting bracket 2 19, glimmering for observing image intensifier
Resolution test target image on optical screen.9 clear aperature of diaphragm is adjustable from 0.5mm-10mm, is incident on ultraviolet image intensifying to adjust
The ultraviolet ray intensity of device.The narrowband ultraviolet filter can reduce the color difference of system.
The ultraviolet source 1 is made of deuterium lamp, and radiation wave band range is 110nm-400nm.
The frosted glass plate 2 is frosted glass plate 2 made of the JGS1 silica glass material using saturating ultraviolet light, is made uneven
Ultraviolet point light source be converted into uniform area source and be irradiated on resolving power test target.
The resolution test target 3 is using USAF1951 resolving power test target made of the photoetching of JGS1 silica glass material, thoroughly
Crossing wavelength band is 185nm-2500nm.
First parallel light tube, the second parallel light tube and tubular shell 20 constitute optical imaging system, and described first is flat
Row light pipe, the second parallel light tube are arranged in tubular shell 20, and the ultraviolet narrow band filter 8 and diaphragm 9 are inserted into tubular shell
In 20, the optical imaging system imaging magnification is 1:1, total focal length 202.8mm, field number Φ 50mm, relative aperture 1/
8, distortion < 0.1%, the depth of field ± 0.1mm.First parallel light tube includes the first lens 4 set gradually, the second lens 5,
Three lens 6, the 4th lens 7, focal length 309mm, bore 53mm.The incident curvature radius of first lens 4 is 58.48, separately
It is on one side -792.5;The incident curvature radius of second lens 5 is 195.88, another side 34360;6 plane of incidence of the third lens is bent
Rate radius is -174.58, another side 54.95;The incident curvature radius of 4th lens 7 is 259.4, and another side is -291.7.
Second parallel light tube includes the 5th lens 10, the 6th lens 11, the 7th lens 12, the 8th lens 13 set gradually, the
Image-forming objective lens of two parallel light tubes as system, focal length 300mm, bore 53mm, the incident curvature radius of the 5th lens 10
It is 347.5, another side is -165.72;The incident curvature radius -44.27 of 6th lens 11, another side 183.65;7th thoroughly
The incident curvature radius of mirror 12 is 2333, and another side is -115.88;The incident curvature radius of 8th lens 13 is -225.9, separately
It is on one side -47.86.First lens 4, the second lens 5, the 4th lens 7, the 5th lens 10, the 7th lens 12, the 8th lens
13 be by CaF2Manufactured positive lens, the third lens 6 and the 6th lens 11 are the concavees lens made of quartz.
Following table is the relevant parameter of each lens of optical system, unit mm
The workflow of day blind ultraviolet imaging enhancer spatial resolution test device of the invention: being first turned on power supply, to purple
Outer light source 1 and blind ultraviolet imaging enhancer 14 of tested day are powered, the light of ultraviolet point light source radiation by quartzy frosted glass, be converted into compared with
Uniform ultraviolet area source, is then irradiated on the resolution test target 3 being placed on focal surface of collimator tube, and light enters first
Lens 4, the second lens 5, the third lens 6, the 4th lens 7, form parallel ultraviolet light, and light passes through narrow band filter, diaphragm
9, the object lens being made of the 5th lens 10, the 6th lens 11, the 7th lens 12, the 8th lens 13 are incident on, finally resolution ratio
Target 3 is tested as on the image intensifier cathode plane being placed at object lens focal plane.Because image intensifier is in running order, finally
3 UV image of resolution test target passes through the conversion of ultraviolet imaging enhancer, becomes visible images into the fluorescent screen in image intensifier
On.If the visible images on fluorescence are unintelligible, the position of image intensifier cathode plane can be adjusted by multidimensional adjusting bracket, together
When with picture of the microscope 15 to fluorescent screen carry out interpretation, most preferably show the cathode plane of image intensifier until the clarity of picture reaches
On focal plane in test macro, passing through numerical value corresponding to the minimal graph group that microscope 15 obtains at this time is just image intensifier
Spatial resolution.In addition the day blind ultraviolet imaging enhancer 14 in the case of different light intensity can be tested by adjusting diaphragm 9
Image resolution ratio.Fig. 2 is a specific resolution test target pattern of the invention.
A kind of day blind ultraviolet imaging enhancer spatial resolution test method, comprising the following steps:
1) power supply is opened, is powered to ultraviolet source 1 and blind ultraviolet imaging enhancer 14 of tested day, is waited 10 minutes, allow ultraviolet
Light source 1 and day blind ultraviolet imaging enhancer 14 are in stable state;
2) diaphragm 9 is adjusted, keeps clear aperature maximum, while the mobile support 17 for being loaded with ultraviolet source 1 in orbit, is improved
Resolution test target 3 marks image brightness;
3) it is moved between optical imaging system output end and image intensifier using virgin paper sheet, target picture is allowed to be presented on blank sheet of paper
On piece observes target image sharpness situation of change, slightly sentences the position of target image planes;
4) movement in orbit is loaded with the support 17 of day blind ultraviolet imaging enhancer 14, makes the yin of day blind ultraviolet imaging enhancer 14
Pole-face is tentatively in target image planes;
5) it is packed into ultraviolet narrow band filter 8, adjusting diaphragm 9 arrives suitably sized;
6) ultraviolet imaging enhancer cathode shading protective cover is removed;
7) multidimensional adjusting bracket 1 is adjusted, is moved forward and backward day blind ultraviolet imaging enhancer 14, while eyes observe image intensifying
Target picture on device fluorescent screen, accurate adjustment day blind ultraviolet imaging enhancer 14 position, until image clearly;
8) the mobile support 17 for being loaded with microscope 15 observes the target on fluorescent screen as situation of change, coarse adjustment by eyepiece
The position of microscope 15;
9) mobile multidimensional adjusting bracket 2 19, is moved forward and backward microscope 15, while observing the target on fluorescent screen by eyepiece
Mark picture, the position of accurate adjustment microscope 15, until image clearly;
10) multidimensional adjusting bracket 1 is adjusted again, is moved forward and backward ultraviolet imaging enhancer, while adjusting multidimensional adjusting bracket two
19, the target on fluorescent screen is observed as situation of change by eyepiece;
11) step 10) is repeated several times, is just as increasing until passing through numerical value corresponding to the minimal graph group that microscope 15 obtains
The spatial resolution of strong device;
Microscope 15 in device can also change CCD camera into and target picture on ultraviolet imaging enhancer fluorescent screen is imaged, so
After be transferred to computer, be presented on display and observe, adjusting method is identical as microscope 15.
Claims (5)
1. a kind of day blind ultraviolet imaging enhancer spatial resolution test device, it is characterised in that: including the ultraviolet light set gradually
Source, frosted glass plate, resolution test target, the first parallel light tube, ultraviolet narrow band filter, clear aperature is adjustable from 0.5mm-10mm
Diaphragm and the second parallel light tube, further include tubular shell, microscope, support, guide rail and multidimensional adjusting bracket;The microscope and
Day, blind ultraviolet imaging enhancer was set on multidimensional adjusting bracket;The multidimensional adjusting bracket, ultraviolet source and tubular shell setting are being propped up
On seat, the support is arranged on guide rail, and the support for being used to support multidimensional adjusting bracket and ultraviolet source moves axially on guide rail;
First parallel light tube, the second parallel light tube and tubular shell composition optical imaging system, first parallel light tube,
Second parallel light tube is arranged in tubular shell, in the ultraviolet narrow band filter and diaphragm insertion tubular shell, optical imagery
System imaging magnifying power be 1:1, first parallel light tube include the first lens set gradually, the second lens, the third lens,
4th lens, second parallel light tube include the 5th lens, the 6th lens, the 7th lens, the 8th lens set gradually, institute
Stating the first lens, the second lens, the 4th lens, the 5th lens, the 7th lens, the 8th lens is by CaF2Manufactured positive lens,
The third lens and the 6th lens are the concavees lens made of quartz.
2. day blind ultraviolet imaging enhancer spatial resolution test device according to claim 1, it is characterised in that: ultraviolet light
Source is deuterium lamp composition, and radiation wave band range is 110nm-400nm.
3. day blind ultraviolet imaging enhancer spatial resolution test device according to claim 1 or 2, it is characterised in that: hair
Sheet glass is frosted glass plate made of the JGS1 silica glass material using saturating ultraviolet light.
4. day blind ultraviolet imaging enhancer spatial resolution test device according to claim 3, it is characterised in that: resolution ratio
Testing target is using USAF1951 resolving power test target made of JGS1 silica glass material photoetching, through wave band 185nm-2500nm.
5. a kind of day blind ultraviolet imaging enhancer spatial resolution test method, it is characterised in that: the following steps are included:
1) power supply is opened, to ultraviolet source and the blind ultraviolet imaging enhancer power supply of tested day, waits 10 minutes, allows ultraviolet source and day
Blind ultraviolet imaging enhancer is in stable state;
2) diaphragm is adjusted, keeps clear aperature maximum, while the mobile support for being loaded with ultraviolet source in orbit, mentions high resolution bathymetric
Try target image brightness;
3) it is moved between optical imaging system output end and image intensifier using virgin paper sheet, target picture is allowed to be presented on virgin paper sheet
On, target image sharpness situation of change is observed, the position of target image planes is slightly sentenced;
4) movement in orbit is loaded with the support of day blind ultraviolet imaging enhancer, locates the cathode plane of day blind ultraviolet imaging enhancer tentatively
In target image planes;
5) it is packed into ultraviolet narrow band filter, adjusts diaphragm to suitably sized;
6) ultraviolet imaging enhancer cathode shading protective cover is removed;
7) multidimensional adjusting bracket one is adjusted, is moved forward and backward day blind ultraviolet imaging enhancer, while observing on image intensifier fluorescent screen
Target picture, accurate adjustment day blind ultraviolet imaging enhancer position, until image clearly, the multidimensional adjusting bracket one is that carry day blind ultraviolet
The multidimensional adjusting bracket of image intensifier;
8) movement is loaded with microscopical support, observes the target image sharpness situation of change on fluorescent screen by eyepiece, coarse adjustment is aobvious
The position of micro mirror;
9) mobile multidimensional adjusting bracket two, is moved forward and backward microscope, while observing the target picture on fluorescent screen, accurate adjustment by eyepiece
Microscopical position, until image clearly, the multidimensional adjusting bracket two is to carry microscopical multidimensional adjusting bracket;
10) multidimensional adjusting bracket one is adjusted again, is moved forward and backward ultraviolet imaging enhancer, while adjusting multidimensional adjusting bracket two, is passed through
Eyepiece observes the target on fluorescent screen as situation of change;
11) step 10) is repeated several times, the numerical value corresponding to the minimal graph group that obtains by microscope is image intensifier
Spatial resolution.
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CN201610953657.9A CN106500967B (en) | 2016-11-03 | 2016-11-03 | Solar blind ultraviolet image intensifier spatial resolution testing device and method |
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CN108982990B (en) * | 2018-05-30 | 2020-12-04 | 中国人民解放军陆军工程大学 | Image intensifier tester |
CN110346120B (en) * | 2019-08-05 | 2021-03-09 | 北方夜视技术股份有限公司 | System and method for testing strong light resolution and dynamic range of automatic gate control image intensifier |
CN110375962B (en) * | 2019-08-15 | 2024-05-31 | 中科院南京天文仪器有限公司 | Device and method for calibrating focal plane of optical system based on front-end cluster illumination |
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JPS6017325A (en) * | 1983-07-08 | 1985-01-29 | Hamamatsu Photonics Kk | Apparatus for measuring intensity of ultraviolet image |
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CN206192634U (en) * | 2016-11-03 | 2017-05-24 | 中国科学院西安光学精密机械研究所 | Solar blind ultraviolet image intensifier spatial resolution testing device |
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Effective date of registration: 20200109 Address after: 523000 room 524, building 2, No.1 Xuefu Road, Songshanhu Park, Dongguan City, Guangdong Province Patentee after: Dongguan Zhongke atomic precision manufacturing technology Co.,Ltd. Address before: 710119, No. 17, information Avenue, new industrial park, hi tech Zone, Shaanxi, Xi'an Patentee before: XI'AN INSTITUTE OF OPTICS AND PRECISION MECHANICS OF CAS |