CN106500967B - Solar blind ultraviolet image intensifier spatial resolution testing device and method - Google Patents

Solar blind ultraviolet image intensifier spatial resolution testing device and method Download PDF

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Publication number
CN106500967B
CN106500967B CN201610953657.9A CN201610953657A CN106500967B CN 106500967 B CN106500967 B CN 106500967B CN 201610953657 A CN201610953657 A CN 201610953657A CN 106500967 B CN106500967 B CN 106500967B
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lens
ultraviolet
adjusting bracket
blind ultraviolet
multidimensional adjusting
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CN106500967A (en
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韦永林
赛小锋
田进寿
卢裕
王兴
徐向晏
刘虎林
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Dongguan Zhongke Atomic Precision Manufacturing Technology Co ltd
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for

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  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The invention provides a solar blind ultraviolet image intensifier spatial resolution testing device which is small in chromatic aberration, small in spherical aberration, simple to process, easy to install and adjust, compact in structure and simple to operate, and solves the problems that an existing device is large in spherical aberration, an aspherical mirror is difficult to process and inspect, and a system is difficult to install and adjust. The testing device comprises an ultraviolet light source, a ground glass sheet, a resolution testing target, a first parallel light pipe, an ultraviolet narrow-band light filter, a diaphragm, a second parallel light pipe, a solar blind ultraviolet image intensifier and a microscope which are sequentially arranged, and further comprises a tubular shell, a support, a guide rail and a multi-dimensional adjusting frame; the microscope and the solar blind ultraviolet image intensifier are arranged on the multidimensional adjusting frame, the multidimensional adjusting frame is arranged on the support, and the support is arranged on the guide rail and used for supporting the multidimensional adjusting frame and the ultraviolet source to move axially on the guide rail. The method is mainly used for testing the spatial resolution of the solar blind ultraviolet image intensifier and can also be used for testing the spatial resolution of photoelectric devices such as an ultraviolet stripe image converter and the like.

Description

A kind of day blind ultraviolet imaging enhancer spatial resolution test device and method
Technical field
The present invention relates to photoelectronic imaging device performance testing fields, and in particular to a kind of day blind ultraviolet imaging enhancer space point Resolution test device and method.
Background technique
Spatial resolution refers to the least limit of identifiable critical object space geometrical length in image, i.e., to subtle knot The resolution ratio of structure, is one of key parameter index of ultraviolet imaging enhancer, and performance quality determines the imaging of ultraviolet imaging enhancer Quality.Since the test equipment of image intensifier is highly professional, the manufacturer of external image intensifier is all that oneself develops correlation Test equipment assessment test is carried out to the resolution ratio of image intensifier, there is no commercialization test equipment in the market.There is correlation in the country Unit studies the test device of ultraviolet imaging enhancer, a kind of using total reflection mirror at present there are two types of test device Optical system, including spherical reflector and plane mirror etc., another kind using off-axis parabolic mirror add refraction-reflection at As the optical system of objective lens mode, the test device existing defects of both ultraviolet imaging enhancers are mainly as follows: the first by In using spherical reflector, it is easy to have many advantages, such as to process adjustment, but spherical aberration is larger and difficult correction.Second off-axis due to using Reflecting system has good imaging quality, and without blocking, system optics gain is also readily satisfied, but its non-spherical reflector adds Work, inspection are all relatively difficult, and system resetting difficulty is larger.
Summary of the invention
That the present invention provides a kind of color difference is small, spherical aberration is small, the processing is simple, easy adjustment, day compact-sized, easy to operate are blind Ultraviolet imaging enhancer spatial resolution test device and test method, with overcome the test device spherical aberration of optical system of total reflection compared with Greatly, aspherical mirror processing in the test device of aspherical reflective optics, examine relatively difficult, system resetting difficulty is biggish Problem.
Technical proposal that the invention solves the above-mentioned problems is:
A kind of day blind ultraviolet imaging enhancer spatial resolution test device, including ultraviolet source, the frosted glass set gradually Piece, resolution test target, the first parallel light tube, ultraviolet narrow band filter, clear aperature from the adjustable diaphragm of 0.5mm-10mm and Second parallel light tube further includes tubular shell, microscope, support, guide rail and multidimensional adjusting bracket;The microscope and day are blind ultraviolet Image intensifier is set on multidimensional adjusting bracket;The multidimensional adjusting bracket, ultraviolet source and tubular shell setting are on the support, described Support is arranged on guide rail, and the support for being used to support multidimensional adjusting bracket and ultraviolet source moves axially on guide rail;
First parallel light tube, the second parallel light tube and tubular shell constitute optical imaging system, and described first is parallel Light pipe, the second parallel light tube are arranged in tubular shell, described in the ultraviolet narrow band filter and diaphragm insertion tubular shell Optical imaging system imaging magnification be 1:1, first parallel light tube include the first lens set gradually, the second lens, The third lens, the 4th lens, second parallel light tube include the 5th lens set gradually, the 6th lens, the 7th lens, Eight lens, first lens, the second lens, the 4th lens, the 5th lens, the 7th lens, the 8th lens are by CaF2It is made Positive lens, the third lens and the 6th lens are the concavees lens made of quartz.
The ultraviolet source can be made of deuterium lamp, and radiation wave band range is 110nm-400nm.
The frosted glass plate can be frosted glass plate made of the JGS1 silica glass material using saturating ultraviolet light.
The resolution test target can be using USAF1951 resolving power test target made of JGS1 silica glass material photoetching, It is 185nm-2500nm through wavelength band.
The present invention also provides a kind of blind ultraviolet imaging enhancer spatial resolution test methods of day, comprising the following steps:
1) power supply is opened, to ultraviolet source and the blind ultraviolet imaging enhancer power supply of tested day, is waited 10 minutes, allows ultraviolet source Stable state is in day blind ultraviolet imaging enhancer;
2) diaphragm is adjusted, keeps clear aperature maximum, while the mobile support for being loaded with ultraviolet source in orbit, improves and differentiates Rate tests target image brightness;
3) it is moved between optical imaging system output end and image intensifier using virgin paper sheet, target picture is allowed to be presented on blank sheet of paper On piece observes target image sharpness situation of change, slightly sentences the position of target image planes;
4) support for being loaded with day blind ultraviolet imaging enhancer mobile in orbit, at the beginning of the cathode plane for making day blind ultraviolet imaging enhancer Step is in target image planes;
5) it is packed into ultraviolet narrow band filter, adjusts diaphragm to suitably sized;
6) ultraviolet imaging enhancer cathode shading protective cover is removed;
7) multidimensional adjusting bracket one is adjusted, is moved forward and backward day blind ultraviolet imaging enhancer, while observing image intensifier fluorescent screen On target picture, accurate adjustment day blind ultraviolet imaging enhancer position, until image clearly, the multidimensional adjusting bracket one is that carry day blind The multidimensional adjusting bracket of ultraviolet imaging enhancer;
8) movement is loaded with microscopical support, observes the target image sharpness situation of change on fluorescent screen by eyepiece, slightly Adjust microscopical position;
9) mobile multidimensional adjusting bracket two, is moved forward and backward microscope, while observing the target picture on fluorescent screen by eyepiece, The microscopical position of accurate adjustment, until image clearly, the multidimensional adjusting bracket two is to carry microscopical multidimensional adjusting bracket;
10) multidimensional adjusting bracket one is adjusted again, is moved forward and backward ultraviolet imaging enhancer, while adjusting multidimensional adjusting bracket two, The target on fluorescent screen is observed as situation of change by eyepiece;
11) step 10) is repeated several times, the numerical value corresponding to the minimal graph group that obtains by microscope is image intensifying The spatial resolution of device
The beneficial effects of the present invention are: can make test device using the positive and negative lens combination of multi-disc at refractive optics system System has that color difference is small, spherical aberration is small, the processing is simple, easy adjustment, structure are tight wherein positive negative lens selects different refraction materials It gathers, simple operation and other advantages.Present invention is mainly used for the tests of the spatial resolution of day blind ultraviolet imaging enhancer, while can also use It is tested in the spatial resolution of the photoelectric devices such as ultraviolet striped image converter tube.The test device passes through replacement radiation wave band to visible light Light source, it may also be used for other photoelectricity such as visible light image intensifying and visible striations image converter tube visit device spatial resolution survey Examination, wide market, thus there is extremely strong economic benefit and social benefit.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of day of the invention blind ultraviolet imaging enhancer spatial resolution test device embodiment;
Fig. 2 is resolution test target pattern schematic diagram of the present invention.
Appended drawing reference: 1- ultraviolet source, 2- frosted glass plate, 3- resolution test target, the first lens of 4-, the second lens of 5-, 6- the third lens, the 4th lens of 7-, the ultraviolet narrow band filter of 8-, 9- diaphragm, the 5th lens of 10-, the 6th lens of 11-, 12- the 7th Lens, the 8th lens of 13-, 14- days blind ultraviolet imaging enhancers, 15- microscope, 16- multidimensional adjusting bracket one, 17- support, 18- is led Rail, 19- multidimensional adjusting bracket two, 20- tubular shell
Specific embodiment
The contents of the present invention are described in further detail below in conjunction with the drawings and specific embodiments:
A kind of day as shown in Figure 1 blind ultraviolet imaging enhancer spatial resolution test device, it is ultraviolet including what is set gradually Light source 1, frosted glass plate 2, resolution test target 3, the first parallel light tube, ultraviolet narrow band filter 8, diaphragm 9, the second directional light Pipe, day blind ultraviolet imaging enhancer 14, microscope 15, further include tubular shell 20, support 17, guide rail 18, multidimensional adjusting bracket 1 With multidimensional adjusting bracket 2 19;The microscope 15 and day blind ultraviolet imaging enhancer 14 are respectively arranged at multidimensional adjusting bracket 2 19, more It ties up on adjusting bracket 1, the adjusting of five dimensions may be implemented in multidimensional adjusting bracket, convenient for making tested image intensifier cathode plane be placed in test system On the focal plane of system;The multidimensional adjusting bracket 1, multidimensional adjusting bracket 2 19, ultraviolet source 1 and tubular shell 20 are arranged in support On 17, the support 17 is set on guide rail 18, is used to support multidimensional adjusting bracket 1,2 19 frame of multidimensional adjusting bracket, ultraviolet light The support 17 in source 1 is moved axially in guide rail 18;Microscope 15 is set on multidimensional adjusting bracket 2 19, glimmering for observing image intensifier Resolution test target image on optical screen.9 clear aperature of diaphragm is adjustable from 0.5mm-10mm, is incident on ultraviolet image intensifying to adjust The ultraviolet ray intensity of device.The narrowband ultraviolet filter can reduce the color difference of system.
The ultraviolet source 1 is made of deuterium lamp, and radiation wave band range is 110nm-400nm.
The frosted glass plate 2 is frosted glass plate 2 made of the JGS1 silica glass material using saturating ultraviolet light, is made uneven Ultraviolet point light source be converted into uniform area source and be irradiated on resolving power test target.
The resolution test target 3 is using USAF1951 resolving power test target made of the photoetching of JGS1 silica glass material, thoroughly Crossing wavelength band is 185nm-2500nm.
First parallel light tube, the second parallel light tube and tubular shell 20 constitute optical imaging system, and described first is flat Row light pipe, the second parallel light tube are arranged in tubular shell 20, and the ultraviolet narrow band filter 8 and diaphragm 9 are inserted into tubular shell In 20, the optical imaging system imaging magnification is 1:1, total focal length 202.8mm, field number Φ 50mm, relative aperture 1/ 8, distortion < 0.1%, the depth of field ± 0.1mm.First parallel light tube includes the first lens 4 set gradually, the second lens 5, Three lens 6, the 4th lens 7, focal length 309mm, bore 53mm.The incident curvature radius of first lens 4 is 58.48, separately It is on one side -792.5;The incident curvature radius of second lens 5 is 195.88, another side 34360;6 plane of incidence of the third lens is bent Rate radius is -174.58, another side 54.95;The incident curvature radius of 4th lens 7 is 259.4, and another side is -291.7. Second parallel light tube includes the 5th lens 10, the 6th lens 11, the 7th lens 12, the 8th lens 13 set gradually, the Image-forming objective lens of two parallel light tubes as system, focal length 300mm, bore 53mm, the incident curvature radius of the 5th lens 10 It is 347.5, another side is -165.72;The incident curvature radius -44.27 of 6th lens 11, another side 183.65;7th thoroughly The incident curvature radius of mirror 12 is 2333, and another side is -115.88;The incident curvature radius of 8th lens 13 is -225.9, separately It is on one side -47.86.First lens 4, the second lens 5, the 4th lens 7, the 5th lens 10, the 7th lens 12, the 8th lens 13 be by CaF2Manufactured positive lens, the third lens 6 and the 6th lens 11 are the concavees lens made of quartz.
Following table is the relevant parameter of each lens of optical system, unit mm
The workflow of day blind ultraviolet imaging enhancer spatial resolution test device of the invention: being first turned on power supply, to purple Outer light source 1 and blind ultraviolet imaging enhancer 14 of tested day are powered, the light of ultraviolet point light source radiation by quartzy frosted glass, be converted into compared with Uniform ultraviolet area source, is then irradiated on the resolution test target 3 being placed on focal surface of collimator tube, and light enters first Lens 4, the second lens 5, the third lens 6, the 4th lens 7, form parallel ultraviolet light, and light passes through narrow band filter, diaphragm 9, the object lens being made of the 5th lens 10, the 6th lens 11, the 7th lens 12, the 8th lens 13 are incident on, finally resolution ratio Target 3 is tested as on the image intensifier cathode plane being placed at object lens focal plane.Because image intensifier is in running order, finally 3 UV image of resolution test target passes through the conversion of ultraviolet imaging enhancer, becomes visible images into the fluorescent screen in image intensifier On.If the visible images on fluorescence are unintelligible, the position of image intensifier cathode plane can be adjusted by multidimensional adjusting bracket, together When with picture of the microscope 15 to fluorescent screen carry out interpretation, most preferably show the cathode plane of image intensifier until the clarity of picture reaches On focal plane in test macro, passing through numerical value corresponding to the minimal graph group that microscope 15 obtains at this time is just image intensifier Spatial resolution.In addition the day blind ultraviolet imaging enhancer 14 in the case of different light intensity can be tested by adjusting diaphragm 9 Image resolution ratio.Fig. 2 is a specific resolution test target pattern of the invention.
A kind of day blind ultraviolet imaging enhancer spatial resolution test method, comprising the following steps:
1) power supply is opened, is powered to ultraviolet source 1 and blind ultraviolet imaging enhancer 14 of tested day, is waited 10 minutes, allow ultraviolet Light source 1 and day blind ultraviolet imaging enhancer 14 are in stable state;
2) diaphragm 9 is adjusted, keeps clear aperature maximum, while the mobile support 17 for being loaded with ultraviolet source 1 in orbit, is improved Resolution test target 3 marks image brightness;
3) it is moved between optical imaging system output end and image intensifier using virgin paper sheet, target picture is allowed to be presented on blank sheet of paper On piece observes target image sharpness situation of change, slightly sentences the position of target image planes;
4) movement in orbit is loaded with the support 17 of day blind ultraviolet imaging enhancer 14, makes the yin of day blind ultraviolet imaging enhancer 14 Pole-face is tentatively in target image planes;
5) it is packed into ultraviolet narrow band filter 8, adjusting diaphragm 9 arrives suitably sized;
6) ultraviolet imaging enhancer cathode shading protective cover is removed;
7) multidimensional adjusting bracket 1 is adjusted, is moved forward and backward day blind ultraviolet imaging enhancer 14, while eyes observe image intensifying Target picture on device fluorescent screen, accurate adjustment day blind ultraviolet imaging enhancer 14 position, until image clearly;
8) the mobile support 17 for being loaded with microscope 15 observes the target on fluorescent screen as situation of change, coarse adjustment by eyepiece The position of microscope 15;
9) mobile multidimensional adjusting bracket 2 19, is moved forward and backward microscope 15, while observing the target on fluorescent screen by eyepiece Mark picture, the position of accurate adjustment microscope 15, until image clearly;
10) multidimensional adjusting bracket 1 is adjusted again, is moved forward and backward ultraviolet imaging enhancer, while adjusting multidimensional adjusting bracket two 19, the target on fluorescent screen is observed as situation of change by eyepiece;
11) step 10) is repeated several times, is just as increasing until passing through numerical value corresponding to the minimal graph group that microscope 15 obtains The spatial resolution of strong device;
Microscope 15 in device can also change CCD camera into and target picture on ultraviolet imaging enhancer fluorescent screen is imaged, so After be transferred to computer, be presented on display and observe, adjusting method is identical as microscope 15.

Claims (5)

1. a kind of day blind ultraviolet imaging enhancer spatial resolution test device, it is characterised in that: including the ultraviolet light set gradually Source, frosted glass plate, resolution test target, the first parallel light tube, ultraviolet narrow band filter, clear aperature is adjustable from 0.5mm-10mm Diaphragm and the second parallel light tube, further include tubular shell, microscope, support, guide rail and multidimensional adjusting bracket;The microscope and Day, blind ultraviolet imaging enhancer was set on multidimensional adjusting bracket;The multidimensional adjusting bracket, ultraviolet source and tubular shell setting are being propped up On seat, the support is arranged on guide rail, and the support for being used to support multidimensional adjusting bracket and ultraviolet source moves axially on guide rail;
First parallel light tube, the second parallel light tube and tubular shell composition optical imaging system, first parallel light tube, Second parallel light tube is arranged in tubular shell, in the ultraviolet narrow band filter and diaphragm insertion tubular shell, optical imagery System imaging magnifying power be 1:1, first parallel light tube include the first lens set gradually, the second lens, the third lens, 4th lens, second parallel light tube include the 5th lens, the 6th lens, the 7th lens, the 8th lens set gradually, institute Stating the first lens, the second lens, the 4th lens, the 5th lens, the 7th lens, the 8th lens is by CaF2Manufactured positive lens, The third lens and the 6th lens are the concavees lens made of quartz.
2. day blind ultraviolet imaging enhancer spatial resolution test device according to claim 1, it is characterised in that: ultraviolet light Source is deuterium lamp composition, and radiation wave band range is 110nm-400nm.
3. day blind ultraviolet imaging enhancer spatial resolution test device according to claim 1 or 2, it is characterised in that: hair Sheet glass is frosted glass plate made of the JGS1 silica glass material using saturating ultraviolet light.
4. day blind ultraviolet imaging enhancer spatial resolution test device according to claim 3, it is characterised in that: resolution ratio Testing target is using USAF1951 resolving power test target made of JGS1 silica glass material photoetching, through wave band 185nm-2500nm.
5. a kind of day blind ultraviolet imaging enhancer spatial resolution test method, it is characterised in that: the following steps are included:
1) power supply is opened, to ultraviolet source and the blind ultraviolet imaging enhancer power supply of tested day, waits 10 minutes, allows ultraviolet source and day Blind ultraviolet imaging enhancer is in stable state;
2) diaphragm is adjusted, keeps clear aperature maximum, while the mobile support for being loaded with ultraviolet source in orbit, mentions high resolution bathymetric Try target image brightness;
3) it is moved between optical imaging system output end and image intensifier using virgin paper sheet, target picture is allowed to be presented on virgin paper sheet On, target image sharpness situation of change is observed, the position of target image planes is slightly sentenced;
4) movement in orbit is loaded with the support of day blind ultraviolet imaging enhancer, locates the cathode plane of day blind ultraviolet imaging enhancer tentatively In target image planes;
5) it is packed into ultraviolet narrow band filter, adjusts diaphragm to suitably sized;
6) ultraviolet imaging enhancer cathode shading protective cover is removed;
7) multidimensional adjusting bracket one is adjusted, is moved forward and backward day blind ultraviolet imaging enhancer, while observing on image intensifier fluorescent screen Target picture, accurate adjustment day blind ultraviolet imaging enhancer position, until image clearly, the multidimensional adjusting bracket one is that carry day blind ultraviolet The multidimensional adjusting bracket of image intensifier;
8) movement is loaded with microscopical support, observes the target image sharpness situation of change on fluorescent screen by eyepiece, coarse adjustment is aobvious The position of micro mirror;
9) mobile multidimensional adjusting bracket two, is moved forward and backward microscope, while observing the target picture on fluorescent screen, accurate adjustment by eyepiece Microscopical position, until image clearly, the multidimensional adjusting bracket two is to carry microscopical multidimensional adjusting bracket;
10) multidimensional adjusting bracket one is adjusted again, is moved forward and backward ultraviolet imaging enhancer, while adjusting multidimensional adjusting bracket two, is passed through Eyepiece observes the target on fluorescent screen as situation of change;
11) step 10) is repeated several times, the numerical value corresponding to the minimal graph group that obtains by microscope is image intensifier Spatial resolution.
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CN110346120B (en) * 2019-08-05 2021-03-09 北方夜视技术股份有限公司 System and method for testing strong light resolution and dynamic range of automatic gate control image intensifier
CN110375962B (en) * 2019-08-15 2024-05-31 中科院南京天文仪器有限公司 Device and method for calibrating focal plane of optical system based on front-end cluster illumination

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Patentee before: XI'AN INSTITUTE OF OPTICS AND PRECISION MECHANICS OF CAS