CN106500641B - The thermal deformation error compensating method of articulated coordinate machine - Google Patents
The thermal deformation error compensating method of articulated coordinate machine Download PDFInfo
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- CN106500641B CN106500641B CN201610917354.1A CN201610917354A CN106500641B CN 106500641 B CN106500641 B CN 106500641B CN 201610917354 A CN201610917354 A CN 201610917354A CN 106500641 B CN106500641 B CN 106500641B
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- temperature
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- coordinate machine
- articulated coordinate
- structural parameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
Abstract
The present invention provides a kind of thermal deformation error compensating method of articulated coordinate machine, include the following steps: 1) to establish temperature to the mathematical model of the structure parameters influence of articulated coordinate machine；2) articulated coordinate machine is placed in the thermostatic chamber of temperature-controllable, room temperature is set as 15 ° and waits 2 hours；3) it is measured with special calibrating plate of the articulated coordinate machine to design；4) temperature of regulating thermostatic room again measures scaling board after waiting 2 hours to 20 °；5) continue to heat up, every 5 ° of progress, one group of measurement experiment, until temperature is raised to 40 °；6) error that each group of data is calculated according to the nominal value of special calibrating plate calibrates the structural parameters at each temperature with the method for articulated coordinate machine structural parameters self-calibration；7) in thermostatic chamber respectively under different temperature gradients, scaling board is measured again, compensation effect of f (T) is verified with this.
Description
Technical field
The present invention relates to the technique for temperature compensation of coordinate measuring machine, in particular to the hot shape of a kind of articulated coordinate machine
Become error compensating method.
Background technique
Articulated coordinate machine is a kind of three coordinate measuring machine of nonopiate formula of multiple degrees of freedom, usually has 6 freedom
Degree.It copies human synovial, is connected in series by three measurement arms and a gauge head by six rotary joints.With it is traditional orthogonal
Formula three coordinate measuring machine is compared, and articulated coordinate machine has the spies such as measurement range is big, convenient, flexible, mechanical structure is simple
Point.But because articulated coordinate machine is frequently used in the industry spots such as workshop, operating ambient temperature differs greatly.By ring
Thermal deformation can occur for the influence of border temperature, articulated coordinate machine, and so as to cause measurement result, there are errors.Articulated type coordinate
Measuring machine can play amplification to error as accurate coordinate measure tool, cascaded structure, because of error caused by thermal deformation
It is that cannot be neglected.The compensation that thermal deformation error is carried out to articulated coordinate machine, can effectively improve the essence of measurement result
Degree.
The some documents delivered successively in recent years propose different methods to the thermal change error of articulated coordinate machine
Compensate: " research of joint three coordinate measuring machine temperature error correction technique " simplifies the measurement arm of articulated coordinate machine
At slender rod piece model, its thermal deformation error is modified with the one-dimensional linear expansion coefficient of material；" articulated coordinate machine
Thermal deformation errors modeling and amendment research " thermal deformation errors of articulated coordinate machine are studied, and based on nerve
Network algorithm is modified error model；" articulated coordinate machine thermal deformation errors and amendment " is reversely passed with single hidden layer band
The thermal deformation errors model that feedforward neural network establishes articulated coordinate machine is broadcast, and passes through having for model of experimental verification
Effect property.Focus mostly on simulation analysis, model simplification etc. are studied, it is less for the thermal deformation error research of complete machine.
Therefore, it is necessary to study it is a kind of being capable of the side that compensates of the thermal deformation error to articulated coordinate machine complete machine
Method.
Summary of the invention
The purpose of the present invention is to provide a kind of thermal deformation error compensating method of articulated coordinate machine, including it is as follows
Step: 1) temperature is established to the mathematical model of the structure parameters influence of articulated coordinate machine:
Wherein, Δ ai、Δdi、Δαi、Δθi, Δ I be respectively joint length, measurement arm lengths, joint torsion angle, joint
The error of rotation angle and gauge head length, fai(T)、fdi(T)、fαi(T)、fI(T)、fθiIt (T) is temperature error function；2) by joint
Formula coordinate measuring machine is placed in the thermostatic chamber of temperature-controllable, and room temperature is set as 15 ° and waits 2 hours；3) articulated type measurement of coordinates is used
Machine measures the special calibrating plate of design, carries out 100 measurements to the specified taper hole on special calibrating plate in each position,
A variety of different postures are used as far as possible in measurement；4) temperature of regulating thermostatic room is to 20 °, again to mark after waiting 2 hours
Fixed board measures；5) continue to heat up, every 5 ° of progress, one group of measurement experiment, until temperature is raised to 40 °；6) according to special calibrating
The nominal value of plate calculates the error of each group of data, is calibrated respectively with the method for articulated coordinate machine structural parameters self-calibration
Structural parameters at a temperature.According to the standard value of articulated coordinate machine structural parameters, calculate separately at each temperature
Structural parameters error is fitted temperature error function with the method for fitting of a polynomial, obtains corresponding error function f (T)；
7) in thermostatic chamber respectively under different temperature gradients, scaling board is measured again, to specified cone on each position
Hole carries out 30 measurements, is modified to obtain corresponding structure at each temperature to structural parameters with the f (T) fitted above and joins
Number calculates revised coordinate value with revised structural parameters, calculates the measurement of amendment front and back articulated coordinate machine
Resultant error verifies the compensation effect of f (T) with this.
Preferably, the error function model are as follows: f (T)=kT3+mT2+nT+b.Wherein k, m, n, b are to be fitted normal
Number.
Preferably, the temperature gradient of the step 7) is 17 °, 23 °, 28 °, 33 ° and 38 °.
Preferably, the temperature gradient of the step 7) is 15 °, 18 °, 21 °, 24 ° and 27 °.
Preferably, the temperature gradient of the step 7) is 15 °, 18 °, 23 °, 30 ° and 37 °.
It should be appreciated that aforementioned description substantially and subsequent detailed description are exemplary illustration and explanation, it should not
As the limitation to the claimed content of the present invention.
Detailed description of the invention
With reference to the attached drawing of accompanying, the more purposes of the present invention, function and advantage are by the as follows of embodiment through the invention
Description is illustrated, in which:
Fig. 1 schematically shows the structural schematic diagram of articulated coordinate machine.
Fig. 2 is the structural schematic diagram of special calibrating plate used in the present invention.
Fig. 3 is the placement position schematic diagram of special calibrating plate of the invention in use.
Specific embodiment
By reference to exemplary embodiment, the purpose of the present invention and function and the side for realizing these purposes and function
Method will be illustrated.However, the present invention is not limited to exemplary embodiment as disclosed below；Can by different form come
It is realized.The essence of specification is only to aid in those skilled in the relevant arts' Integrated Understanding detail of the invention.
Hereinafter, the embodiment of the present invention will be described with reference to the drawings.In the accompanying drawings, identical appended drawing reference represents identical
Or similar component or same or like step.
Fig. 1 is the schematic diagram of articulated coordinate machine.Articulated coordinate machine 100 includes: pedestal 110, three sections of surveys
Measure arm 107,108,109, cradle head 101,102,103,104,105,106 and gauge head 111.On pedestal 110, by three sections
It measures the concatenated six rotatable joints 101,102,103,104,105,106 of arm 107,108,109 and constitutes space open chain knot
Structure, the end of the open-chain structure are the gauge heads 111 of measuring machine.
Temperature thermal deformation error caused by articulated coordinate machine is converted into temperature to articulated coordinate machine
Structural parameters influence.Founding mathematical models are as follows:
Wherein, Δ ai、Δdi、Δαi、Δθi, Δ I be respectively joint length, measurement arm lengths, joint torsion angle, joint
The error of rotation angle and gauge head length.fai(T)、fdi(T)、fαi(T)、fI(T)、fθiIt (T) is temperature error function.
Articulated coordinate machine is placed in the thermostatic chamber of temperature-controllable, room temperature is set as 15 °.Wait 2 hours with
On so that articulated coordinate machine and room temperature is reached thermal balance, carried out with special calibrating plate of the articulated coordinate machine to design
Measurement, scaling board are as shown in Fig. 2.In order to cover entire measurement space as far as possible, the placement position of scaling board is as shown in Figure 3.
100 measurements are carried out to the specified taper hole on special calibrating plate in each position, use a variety of different appearances as far as possible in measurement
State.The temperature of regulating thermostatic room again measures scaling board after waiting 2 hours to 20 ° later.Continue to heat up, every
5 ° of progress, one group of measurement experiment, until temperature is raised to 40 °.After completing experiment, 7 groups of experiments for respectively corresponding different temperatures are obtained
Data.Table 1 is some experimental data of the same point at different temperatures.
The some experimental data of the same point of table 1 at different temperatures
The error that each group of data is calculated according to the nominal value of special calibrating plate, with articulated coordinate machine structural parameters
The method of self-calibration calibrates the structural parameters at each temperature.According to the standard value of articulated coordinate machine structural parameters,
Calculate separately the structural parameters error at each temperature.Temperature error function is fitted with the method for fitting of a polynomial, is obtained
To corresponding error function f (T).Error function model are as follows: f (T)=kT3+mT2+nT+b.Wherein k, m, n, b are to be fitted normal
Number.
Scaling board is measured again under 17 °, 23 °, 28 °, 33 ° and 38 ° respectively in thermostatic chamber, in each position
It sets and 30 measurements is carried out to specified taper hole.Structural parameters are modified to obtain at each temperature with the f (T) fitted above
Corresponding structural parameters calculate revised coordinate value with revised structural parameters.Calculate amendment front and back articulated type coordinate
The measuring result error of measuring machine verifies the compensation effect of f (T) with this.
Scaling board is measured again under 15 °, 18 °, 21 °, 24 ° and 27 ° respectively in thermostatic chamber, in each position
It sets and 30 measurements is carried out to specified taper hole.Structural parameters are modified to obtain at each temperature with the f (T) fitted above
Corresponding structural parameters calculate revised coordinate value with revised structural parameters.Calculate amendment front and back articulated type coordinate
The measuring result error of measuring machine verifies the compensation effect of f (T) with this.
Scaling board is measured again under 15 °, 18 °, 23 °, 30 ° and 37 ° respectively in thermostatic chamber, in each position
It sets and 30 measurements is carried out to specified taper hole.Structural parameters are modified to obtain at each temperature with the f (T) fitted above
Corresponding structural parameters calculate revised coordinate value with revised structural parameters.Calculate amendment front and back articulated type coordinate
The measuring result error of measuring machine verifies the compensation effect of f (T) with this.
In conjunction with the explanation and practice of the invention disclosed here, the other embodiment of the present invention is for those skilled in the art
It all will be readily apparent and understand.Illustrate and embodiment is regarded only as being exemplary, true scope of the invention and purport are equal
It is defined in the claims.
Claims (4)
1. a kind of thermal deformation error compensating method of articulated coordinate machine, includes the following steps:
1) temperature is established to the mathematical model of the structure parameters influence of articulated coordinate machine:
Wherein, Δ ai、Δdi、Δαi、Δθi, Δ I be respectively joint length, measurement arm lengths, joint torsion angle, joint rotation angles
With the error of gauge head length, fai(T)、fdi(T)、fαi(T)、fI(T)、fθiIt (T) is temperature error function；
2) articulated coordinate machine is placed in the thermostatic chamber of temperature-controllable, room temperature is set as 15 ° and waits 2 hours；
3) it is measured with special calibrating plate of the articulated coordinate machine to design, in each position on special calibrating plate
Specified taper hole carries out 100 measurements, uses a variety of different postures as far as possible in measurement；
4) temperature of regulating thermostatic room again measures scaling board after waiting 2 hours to 20 °；
5) continue to heat up, every 5 ° of progress, one group of measurement experiment, until temperature is raised to 40 °；
6) error that each group of data is calculated according to the nominal value of special calibrating plate, certainly with articulated coordinate machine structural parameters
The method of calibration calibrates the structural parameters at each temperature, according to the standard value of articulated coordinate machine structural parameters, divides
The structural parameters error at each temperature is not calculated, and temperature error function is fitted with the method for fitting of a polynomial, is obtained
Corresponding error function f (T), the error function model are as follows: f (T)=kT3+mT2+ nT+b, wherein k, m, n, b is wait be fitted
Constant；
7) in thermostatic chamber respectively under different temperature gradients, scaling board is measured again, to finger on each position
Determine taper hole and carry out 30 measurements, structural parameters are modified to obtain at each temperature with the f (T) fitted above and are tied accordingly
Structure parameter calculates revised coordinate value with revised structural parameters, calculates amendment front and back articulated coordinate machine
Measuring result error verifies the compensation effect of f (T) with this.
2. error compensating method according to claim 1, wherein the temperature gradient of the step 7) is 17 °, 23 °, 28 °,
33 ° and 38 °.
3. error compensating method according to claim 1, wherein the temperature gradient of the step 7) is 15 °, 18 °, 21 °,
24 ° and 27 °.
4. error compensating method according to claim 1, wherein the temperature gradient of the step 7) is 15 °, 18 °, 23 °,
30 ° and 37 °.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107607070A (en) * | 2017-09-28 | 2018-01-19 | 中国计量大学 | A kind of articulated arm coordinate measuring machine thermal deformation errors recognize bearing calibration |
| CN110174074B (en) * | 2019-06-27 | 2024-02-02 | 南京工程学院 | Measuring device and method for thermal deformation error compensation of industrial robot |
| CN110587604A (en) * | 2019-09-10 | 2019-12-20 | 广东技术师范大学 | Method for constructing measuring arm calibration system |
| CN112861317B (en) * | 2021-01-11 | 2022-09-30 | 合肥工业大学 | Kinematic modeling method for joint type coordinate measuring machine for compensating inclination error of rotating shaft |
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| CN101825454A (en) * | 2010-05-13 | 2010-09-08 | 天津大学 | Method for compensating temperature errors based on bidirectional measurement |
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| US7152456B2 (en) * | 2004-01-14 | 2006-12-26 | Romer Incorporated | Automated robotic measuring system |
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| CN103954245A (en) * | 2014-03-21 | 2014-07-30 | 北京信息科技大学 | Precision calibration plate for articulated coordinate measuring machine |
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