CN106500641A - The thermal deformation error compensating method of articulated coordinate machine - Google Patents

The thermal deformation error compensating method of articulated coordinate machine Download PDF

Info

Publication number
CN106500641A
CN106500641A CN201610917354.1A CN201610917354A CN106500641A CN 106500641 A CN106500641 A CN 106500641A CN 201610917354 A CN201610917354 A CN 201610917354A CN 106500641 A CN106500641 A CN 106500641A
Authority
CN
China
Prior art keywords
temperature
error
coordinate machine
articulated coordinate
structural parameters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610917354.1A
Other languages
Chinese (zh)
Other versions
CN106500641B (en
Inventor
祝连庆
冯超鹏
潘志康
郭阳宽
董明利
娄小平
李伟仙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Information Science and Technology University
Original Assignee
Beijing Information Science and Technology University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Information Science and Technology University filed Critical Beijing Information Science and Technology University
Priority to CN201610917354.1A priority Critical patent/CN106500641B/en
Publication of CN106500641A publication Critical patent/CN106500641A/en
Application granted granted Critical
Publication of CN106500641B publication Critical patent/CN106500641B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points

Abstract

The invention provides a kind of thermal deformation error compensating method of articulated coordinate machine, comprises the steps：1) mathematical model of the temperature to the structure parameters influence of articulated coordinate machine is set up；2) articulated coordinate machine is placed in the thermostatic chamber of temperature-controllable, room temperature is set as that 15 ° wait 2 hours；3) its special calibrating plate for designing is measured with articulated coordinate machine；4) temperature of regulating thermostatic room to 20 °, waits and again scaling board being measured afterwards for 2 hours；5) continue to heat up, one group of measurement experiment is carried out every 5 °, until temperature is raised to 40 °；6) error of each group of data is calculated according to the nominal value of its special calibrating plate, calibrates the structural parameters at a temperature of each with the method for articulated coordinate machine structural parameters self-calibration；7) in thermostatic chamber respectively under different thermogrades, again scaling board is measured, is verified with this compensation effect to f (T).

Description

The thermal deformation error compensating method of articulated coordinate machine
Technical field
The present invention relates to the technique for temperature compensation of coordinate measuring machine, the hot shape of more particularly to a kind of articulated coordinate machine Become error compensating method.
Background technology
Articulated coordinate machine is a kind of three coordinate measuring machine of the nonopiate formula of multiple degrees of freedom, and generally there are 6 freedom Degree.It copies human synovial, is in series by six rotary joints by three measurement arms and a gauge head.Orthogonal with traditional Formula three coordinate measuring machine is compared, and articulated coordinate machine has the spies such as measurement range is big, convenient, flexible, frame for movement is simple Point.But, because articulated coordinate machine is frequently used in the industry spot such as workshop, operating ambient temperature differs greatly.Receive ring The impact of border temperature, articulated coordinate machine can occur thermal deformation, there is error so as to cause measurement result.Articulated type coordinate Measuring machine can play amplification, the caused error because of thermal deformation to error as accurate coordinate measure tool, cascaded structure Can not be ignored.The compensation that thermal deformation error is carried out to articulated coordinate machine, can effectively improve the essence of measurement result Degree.
Some documents that delivered successively in recent years propose different methods and become error to the heat of articulated coordinate machine Compensate：《Joint three coordinate measuring machine temperature error correction technique research》The measurement arm of articulated coordinate machine is simplified Into slender rod piece model, its thermal deformation error is modified with the one-dimensional linear expansion coefficient of material；《Articulated coordinate machine Thermal deformation errors modeling and correction research》The thermal deformation errors of articulated coordinate machine are studied, and based on nerve Network algorithm is modified to error model；《Articulated coordinate machine thermal deformation errors and correction》Reversely passed with single hidden layer band Broadcast the thermal deformation errors model that feedforward neural network establishes articulated coordinate machine, and the having for model by experimental verification Effect property.Research focuses mostly in terms of simulation analysis, model simplifying, for the thermal deformation error research of whole machine less.
Accordingly, it would be desirable to study a kind of side that the thermal deformation error of the whole machine of articulated coordinate machine can be compensated Method.
Content of the invention
It is an object of the invention to provide a kind of thermal deformation error compensating method of articulated coordinate machine, including as follows Step：1) mathematical model of the temperature to the structure parameters influence of articulated coordinate machine is set up：
Wherein, Δ ai、Δdi、Δαi、Δθi, Δ I be respectively joint length, measurement arm lengths, joint torsion angle, joint The anglec of rotation and the error of gauge head length, fai(T)、fdi(T)、fαi(T)、fI(T)、fθi(T) it is temperature error function；2) by joint Formula coordinate measuring machine is placed in the thermostatic chamber of temperature-controllable, and room temperature is set as that 15 ° wait 2 hours；3) articulated type measurement of coordinates is used Machine is measured to its special calibrating plate for designing, and carries out 100 measurements to the specified taper hole on its special calibrating plate in each position, Multiple different attitudes are used in measurement as far as possible；4) temperature of regulating thermostatic room to 20 °, waits 2 hours afterwards again to mark Fixed board is measured；5) continue to heat up, one group of measurement experiment is carried out every 5 °, until temperature is raised to 40 °；6) according to its special calibrating The nominal value of plate calculates the error of each group of data, is calibrated respectively with the method for articulated coordinate machine structural parameters self-calibration Structural parameters at individual temperature.According to the standard value of articulated coordinate machine structural parameters, at a temperature of calculating each respectively Structural parameters error, is fitted to temperature error function with the method for fitting of a polynomial, obtains corresponding error function f (T)； 7) in thermostatic chamber respectively under different thermogrades, again scaling board is measured, to specifying cone on each position Hole carries out 30 measurements, structural parameters is modified with the f (T) for fitting above and obtains corresponding structure ginseng at a temperature of each Number, calculates revised coordinate figure with revised structural parameters, calculates the measurement of articulated coordinate machine before and after revising Resultant error, is verified with this compensation effect to f (T).
Preferably, the error function model is：F (T)=kT3+mT2+nT+b.Wherein k, m, n, b are to be fitted normal Number.
Preferably, the step 7) thermograde be 17 °, 23 °, 28 °, 33 ° and 38 °.
Preferably, the step 7) thermograde be 15 °, 18 °, 21 °, 24 ° and 27 °.
Preferably, the step 7) thermograde be 15 °, 18 °, 23 °, 30 ° and 37 °.
It should be appreciated that aforementioned description substantially and follow-up description in detail are exemplary illustration and explanation, should not It is used as the restriction to claimed content of the invention.
Description of the drawings
With reference to the accompanying drawing that encloses, the present invention more purpose, function and advantages are by by the as follows of embodiment of the present invention Description is illustrated, wherein：
Fig. 1 schematically shows the structural representation of articulated coordinate machine.
Fig. 2 is the structural representation of its special calibrating plate used in the present invention.
Fig. 3 is its special calibrating plate of the invention putting position schematic diagram in use.
Specific embodiment
By reference to one exemplary embodiment, the purpose of the present invention and function and the side for realizing these purposes and function Method will be illustrated.However, the present invention is not limited to one exemplary embodiment disclosed below；Can by multi-form come Which is realized.The essence of description is only to aid in the detail of the various equivalent modifications Integrated Understanding present invention.
Hereinafter, embodiments of the invention will be described with reference to the drawings.In the accompanying drawings, identical reference represents identical Or similar part, or same or like step.
Schematic diagrams of the Fig. 1 for articulated coordinate machine.Articulated coordinate machine 100 includes：Pedestal 110, three sections of surveys Amount arm 107,108,109, cradle head 101,102,103,104,105,106 and gauge head 111.On pedestal 110, by three sections Six rotatable joints, 101,102,103,104,105, the 106 Special composition open chain knot of the measurement series connection of arm 107,108,109 Structure, the end of the open-chain structure is the gauge head 111 of measuring machine.
The thermal deformation error that temperature is caused to articulated coordinate machine is converted into temperature to articulated coordinate machine Structural parameters impact.Founding mathematical models are as follows：
Wherein, Δ ai、Δdi、Δαi、Δθi, Δ I be respectively joint length, measurement arm lengths, joint torsion angle, joint The anglec of rotation and the error of gauge head length.fai(T)、fdi(T)、fαi(T)、fI(T)、fθi(T) it is temperature error function.
Articulated coordinate machine is placed in the thermostatic chamber of temperature-controllable, room temperature is set as 15 °.Wait 2 hours with On make articulated coordinate machine and room temperature reach thermal balance, with articulated coordinate machine to design its special calibrating plate carry out Measurement, scaling board is as shown in Figure 2.In order to cover whole measurement space as far as possible, the putting position of scaling board is as shown in Figure 3. 100 measurements are carried out to the specified taper hole on its special calibrating plate in each position, use multiple different appearances in measurement as far as possible State.The temperature of regulating thermostatic room to 20 °, waits and again scaling board being measured afterwards for 2 hours afterwards.Continue to heat up, every 5 ° carry out one group of measurement experiment, until temperature is raised to 40 °.After completing experiment, 7 groups of experiments for corresponding to different temperatures respectively are obtained Data.Table 1 is same point some experimental data at different temperatures.
1 same point of table some experimental data at different temperatures
Nominal value according to its special calibrating plate calculates the error of each group of data, uses articulated coordinate machine structural parameters The method of self-calibration calibrates the structural parameters at a temperature of each.According to the standard value of articulated coordinate machine structural parameters, Structural parameters error each at a temperature of is calculated respectively.Temperature error function is fitted with the method for fitting of a polynomial, is obtained Arrive corresponding error function f (T).Error function model is：F (T)=kT3+mT2+nT+b.Wherein k, m, n, b are to be fitted normal Number.
Again scaling board is measured under 17 °, 23 °, 28 °, 33 ° and 38 ° in thermostatic chamber respectively, in each position Put to specifying taper hole to carry out 30 measurements.Structural parameters are modified with the f (T) for fitting above at a temperature of obtaining each Corresponding structural parameters, calculate revised coordinate figure with revised structural parameters.Calculate articulated type coordinate before and after revising The measuring result error of measuring machine, is verified with this compensation effect to f (T).
Again scaling board is measured under 15 °, 18 °, 21 °, 24 ° and 27 ° in thermostatic chamber respectively, in each position Put to specifying taper hole to carry out 30 measurements.Structural parameters are modified with the f (T) for fitting above at a temperature of obtaining each Corresponding structural parameters, calculate revised coordinate figure with revised structural parameters.Calculate articulated type coordinate before and after revising The measuring result error of measuring machine, is verified with this compensation effect to f (T).
Again scaling board is measured under 15 °, 18 °, 23 °, 30 ° and 37 ° in thermostatic chamber respectively, in each position Put to specifying taper hole to carry out 30 measurements.Structural parameters are modified with the f (T) for fitting above at a temperature of obtaining each Corresponding structural parameters, calculate revised coordinate figure with revised structural parameters.Calculate articulated type coordinate before and after revising The measuring result error of measuring machine, is verified with this compensation effect to f (T).
In conjunction with the explanation and practice of the present invention for disclosing here, the other embodiment of the present invention is for those skilled in the art All will be readily apparent and understand.Illustrate and embodiment be to be considered only as exemplary, the present invention true scope and purport equal It is defined in the claims.

Claims (5)

1. a kind of thermal deformation error compensating method of articulated coordinate machine, comprises the steps：
1) mathematical model of the temperature to the structure parameters influence of articulated coordinate machine is set up：
Δa i = f a i ( T ) Δd i = f d i ( T ) Δα i = f α i ( T ) Δθ i = f θ i ( T ) Δ I = f I ( T )
Wherein, Δ ai、Δdi、Δαi、Δθi, Δ l be respectively joint length, measurement arm lengths, joint torsion angle, joint rotation angles With the error of gauge head length, fai(T)、fdi(T)、fαi(T)、fl(T)、fθi(T) it is temperature error function；
2) articulated coordinate machine is placed in the thermostatic chamber of temperature-controllable, room temperature is set as that 15 ° wait 2 hours；
3) its special calibrating plate for designing is measured with articulated coordinate machine, in each position on its special calibrating plate Specified taper hole carries out 100 measurements, uses multiple different attitudes in measurement as far as possible；
4) temperature of regulating thermostatic room to 20 °, waits and again scaling board being measured afterwards for 2 hours；
5) continue to heat up, one group of measurement experiment is carried out every 5 °, until temperature is raised to 40 °；
6) error of each group of data is calculated according to the nominal value of its special calibrating plate, with articulated coordinate machine structural parameters certainly The method of demarcation calibrates the structural parameters at a temperature of each.According to the standard value of articulated coordinate machine structural parameters, point The structural parameters error at a temperature of each is not calculated, temperature error function is fitted with the method for fitting of a polynomial, is obtained Corresponding error function f (T)；
7) in thermostatic chamber respectively under different thermogrades, again scaling board is measured, to referring on each position Determining taper hole carries out 30 measurements, structural parameters is modified with the f (T) for fitting above at a temperature of obtaining each and is tied accordingly Structure parameter, calculates revised coordinate figure with revised structural parameters, calculates articulated coordinate machine before and after revising Measuring result error, is verified with this compensation effect to f (T).
2. error compensating method according to claim 1, wherein described error function model is：F (T)=kT3+mT2+nT+ b.Wherein k, m, n, b are constant to be fitted.
3. error compensating method according to claim 1, wherein described step 7) thermograde be 17 °, 23 °, 28 °, 33 ° and 38 °.
4. error compensating method according to claim 1, wherein described step 7) thermograde be 15 °, 18 °, 21 °, 24 ° and 27 °.
5. error compensating method according to claim 1, wherein described step 7) thermograde be 15 °, 18 °, 23 °, 30 ° and 37 °.
CN201610917354.1A 2016-10-21 2016-10-21 The thermal deformation error compensating method of articulated coordinate machine Active CN106500641B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610917354.1A CN106500641B (en) 2016-10-21 2016-10-21 The thermal deformation error compensating method of articulated coordinate machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610917354.1A CN106500641B (en) 2016-10-21 2016-10-21 The thermal deformation error compensating method of articulated coordinate machine

Publications (2)

Publication Number Publication Date
CN106500641A true CN106500641A (en) 2017-03-15
CN106500641B CN106500641B (en) 2018-12-14

Family

ID=58318167

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610917354.1A Active CN106500641B (en) 2016-10-21 2016-10-21 The thermal deformation error compensating method of articulated coordinate machine

Country Status (1)

Country Link
CN (1) CN106500641B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107607070A (en) * 2017-09-28 2018-01-19 中国计量大学 A kind of articulated arm coordinate measuring machine thermal deformation errors recognize bearing calibration
CN110174074A (en) * 2019-06-27 2019-08-27 南京工程学院 A kind of measuring device and method for industrial robot thermal deformation error compensation
CN110587604A (en) * 2019-09-10 2019-12-20 广东技术师范大学 Method for constructing measuring arm calibration system
CN112861317A (en) * 2021-01-11 2021-05-28 合肥工业大学 Kinematic modeling method for joint type coordinate measuring machine for compensating inclination error of rotating shaft

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070163136A1 (en) * 2004-01-14 2007-07-19 Homer Eaton Automated robotic measuring system
CN101825453A (en) * 2010-05-13 2010-09-08 天津大学 Temperature error compensation method for three-coordinate measuring machine with cylindrical-coordinate system
CN101825454A (en) * 2010-05-13 2010-09-08 天津大学 Method for compensating temperature errors based on bidirectional measurement
CN103954245A (en) * 2014-03-21 2014-07-30 北京信息科技大学 Precision calibration plate for articulated coordinate measuring machine
CN105203055A (en) * 2015-09-18 2015-12-30 北京信息科技大学 Dynamic error compensation method for joint-type coordinate measuring machine

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070163136A1 (en) * 2004-01-14 2007-07-19 Homer Eaton Automated robotic measuring system
CN101825453A (en) * 2010-05-13 2010-09-08 天津大学 Temperature error compensation method for three-coordinate measuring machine with cylindrical-coordinate system
CN101825454A (en) * 2010-05-13 2010-09-08 天津大学 Method for compensating temperature errors based on bidirectional measurement
CN103954245A (en) * 2014-03-21 2014-07-30 北京信息科技大学 Precision calibration plate for articulated coordinate measuring machine
CN105203055A (en) * 2015-09-18 2015-12-30 北京信息科技大学 Dynamic error compensation method for joint-type coordinate measuring machine

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
于波: "关节三坐标测量机温度误差修正技术研究", 《中国优秀硕士学位论文全文数据库 工程科技II辑》 *
林铿: "关节臂式坐标测量机的误差分析与补偿研究", 《中国优秀硕士学位论文全文数据库 工程科技II辑》 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107607070A (en) * 2017-09-28 2018-01-19 中国计量大学 A kind of articulated arm coordinate measuring machine thermal deformation errors recognize bearing calibration
CN110174074A (en) * 2019-06-27 2019-08-27 南京工程学院 A kind of measuring device and method for industrial robot thermal deformation error compensation
CN110174074B (en) * 2019-06-27 2024-02-02 南京工程学院 Measuring device and method for thermal deformation error compensation of industrial robot
CN110587604A (en) * 2019-09-10 2019-12-20 广东技术师范大学 Method for constructing measuring arm calibration system
CN112861317A (en) * 2021-01-11 2021-05-28 合肥工业大学 Kinematic modeling method for joint type coordinate measuring machine for compensating inclination error of rotating shaft
CN112861317B (en) * 2021-01-11 2022-09-30 合肥工业大学 Kinematic modeling method for joint type coordinate measuring machine for compensating inclination error of rotating shaft

Also Published As

Publication number Publication date
CN106500641B (en) 2018-12-14

Similar Documents

Publication Publication Date Title
CN106500641A (en) The thermal deformation error compensating method of articulated coordinate machine
CN100533087C (en) Error compensation method of high-precision pressure sensor
CN108406771B (en) Robot self-calibration method
CN110375694B (en) Self-calibration method for circular grating angle measurement error based on portable articulated coordinate measuring machine
CN107042528A (en) A kind of Kinematic Calibration system and method for industrial robot
WO2009001504A1 (en) Method for calibrating parameter of articulated coordinate measuring apparatus
JP2015514205A (en) Method and apparatus for inspecting a workpiece
WO2018200668A1 (en) Force/torque sensor temperature compensation
CN104102836B (en) A kind of quick robust state estimation method of electric system
CN108152325B (en) Method for calibrating heat conductivity instrument based on heat shield plate method
CN105066808B (en) A kind of industrial robot kinematics parameter simple calibrating device and its scaling method
CN107607070A (en) A kind of articulated arm coordinate measuring machine thermal deformation errors recognize bearing calibration
CN112461406B (en) Calibration method based on fiber grating type temperature sensor
CN109323796A (en) A kind of full warm area range pressure sensor scaling method
CN111618662A (en) Method for testing thermal error characteristics of complete machine tool
Wang et al. Complete relative pose error model for robot calibration
CN111666659A (en) Modeling method for thermal error of complete machine tool
Miura et al. Comparative evaluation of estimation of hole plate measurement uncertainty via Monte Carlo simulation
CN110568153A (en) Temperature and humidity nonlinear compensation method based on adaptive order adjustment nonlinear model
Härtig et al. Laser tracker performance quantification for the measurement of involute profile and helix measurements
CN110095427A (en) Moisture Meter measurement error method for self-calibrating, device and system, storage medium
CN114441133B (en) Pose calibration method and equipment for attack angle-double-rotating-shaft mechanism for wind tunnel test
JP2853500B2 (en) Temperature compensation device for coordinate measuring machine
WO2017068240A3 (en) A method and a system for generating data for calibrating a robot
CN114062135B (en) Rock strain data correction method for high-temperature triaxial tester

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant