CN106475728A - A kind of repairing and reusing method of column handle on tantalum ring - Google Patents
A kind of repairing and reusing method of column handle on tantalum ring Download PDFInfo
- Publication number
- CN106475728A CN106475728A CN201510522995.2A CN201510522995A CN106475728A CN 106475728 A CN106475728 A CN 106475728A CN 201510522995 A CN201510522995 A CN 201510522995A CN 106475728 A CN106475728 A CN 106475728A
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- China
- Prior art keywords
- knob
- finished product
- semi
- tantalum ring
- repairing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P6/00—Restoring or reconditioning objects
Abstract
The invention provides on a kind of tantalum ring column handle repairing and reusing method, including step：1) part for mutually being welded the knob on tantalum ring and knob with tantalum ring is separated from tantalum ring, obtains semi-finished product knob, makes to form the first default allowance between the base diameter of semi-finished product knob and the base diameter of finished product knob；2) attachment on semi-finished product knob surface is removed；3) bottom of semi-finished product knob is lathed with the second preset thickness for presetting allowance and preset diameters, forms roughing knob；4) pickling is carried out to the surface of roughing knob, removes residuals, obtain finished product knob.The repairing and reusing method of the present invention makes tantalum ring separate with knob by processing, carries out repair process, it is achieved that the repairing and reusing of knob, so as to reduce the production cost of semiconductor after accessory knob is extracted.
Description
Technical field
A kind of the present invention relates to technical field of semiconductors, more particularly, it relates to column handle on tantalum ring
Repairing and reusing method.
Background technology
Produced in semiconductor PVD (abbreviation of Physical Vapor Deposition, physical vapour deposition (PVD))
Need in journey using tantalum ring.When can not can enter after use after tantalum ring covers in coating process, sputters away
Row scraps process.Column handle (hereinafter referred to as knob) is an accessory on tantalum ring, is welded on tantalum
On ring, while knob surface has and thicker covers thing, it is impossible to recycle, generally by knob together with tantalum ring
Scrap process.
So, need using the new tantalum ring for being welded with knob, increased the production cost of semiconductor.
In sum, the repairing and reusing of knob how is realized, to reduce the production cost of semiconductor, is
Current those skilled in the art's technical problem urgently to be resolved hurrily.
Content of the invention
In view of this, it is an object of the invention to provide on a kind of tantalum ring column handle repairing and reusing side
Method, to realize the repairing and reusing of knob, so as to reduce the production cost of semiconductor.
In order to achieve the above object, the present invention provides following technical scheme：
On a kind of tantalum ring, the repairing and reusing method of column handle, comprises the following steps：
1) part for mutually welding the knob on the tantalum ring and knob with the tantalum ring is from the tantalum ring
On separate, obtain semi-finished product knob, make the base diameter of the semi-finished product knob and finished product knob
Base diameter between formed first preset allowance；
2) attachment on the semi-finished product knob surface is removed；
3) bottom of the semi-finished product knob is lathed with the second preset thickness for presetting allowance
And preset diameters, form roughing knob；
4) pickling is carried out to the surface of the roughing knob, removes residuals, obtain finished product knob.
Preferably, in above-mentioned repairing and reusing method, the step 1) linear cutting equipment is specifically utilized by institute
State semi-finished product knob to cut down from the tantalum ring, the semi-finished product knob is realized with the tantalum ring
Separate.
Preferably, in above-mentioned repairing and reusing method, the step 1) the tantalum ring is fixed on the line
Before cutting equipment, first with the circular arc location-plate with the semi-finished product knob location fit to described
Semi-finished product knob is positioned.
Preferably, in above-mentioned repairing and reusing method, the step 1) also include step before：
The tantalum ring arc section with a semi-finished product knob is cut from the tantalum ring, the tantalum ring
The length of arc section is 55-65mm.
Preferably, in above-mentioned repairing and reusing method, the step 2) especially by blasting treatment mode
Attachment on the semi-finished product knob surface is removed.
Preferably, in above-mentioned repairing and reusing method, the base diameter of the finished product knob is 25.4mm,
Bottom thickness is 1.27mm；
The base diameter of the semi-finished product knob is 28-32mm.
Preferably, in above-mentioned repairing and reusing method, the step 4) after, also include：By described become
Product knob is welded on finished product tantalum ring.
It can be seen from above-mentioned technical scheme that, on the tantalum ring that the present invention is provided, the reparation of column handle is sharp again
With method, first the semi-finished product knob on tantalum ring is removed；Then will be attached on semi-finished product knob surface
Thing removal；Then the bottom of semi-finished product knob is lathed with the second default thickness for presetting allowance
Degree and preset diameters, form roughing knob；Finally the surface to roughing knob carries out pickling, goes
Removal of residue matter, obtains finished product knob.
In summary, on the tantalum ring of the present invention, the repairing and reusing method of column handle makes tantalum ring by processing
Separate with knob, repair process is carried out after accessory knob is extracted, it is achieved that the repairing and reusing of knob,
So as to reduce the production cost of semiconductor.
Description of the drawings
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to reality
Apply accompanying drawing to be used needed for example or description of the prior art to be briefly described, it should be apparent that, below
Accompanying drawing in description is some embodiments of the present invention, for those of ordinary skill in the art, not
On the premise of paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is that the flow process of the repairing and reusing method of column handle on tantalum ring provided in an embodiment of the present invention is shown
It is intended to.
Specific embodiment
A kind of repairing and reusing method of column handle on tantalum ring is embodiments provided, can be realized
The repairing and reusing of knob, so as to reduce the production cost of semiconductor.
Purpose, technical scheme and advantage for making the embodiment of the present invention is clearer, below in conjunction with this
Accompanying drawing in bright embodiment, is clearly and completely described to the technical scheme in the embodiment of the present invention,
Obviously, described embodiment is a part of embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained under the premise of creative work is not made
The every other embodiment for obtaining, belongs to the scope of protection of the invention.
It should be noted that for the ease of description, column handle is abbreviated as knob by the present invention, and which is also referred to as
For fixed handle, column ridge, fix for the installation of ring such as tantalum ring.
Accompanying drawing 1 is refer to, the repairing and reusing method of column handle on tantalum ring provided in an embodiment of the present invention,
Comprise the following steps：
S1, the part for mutually being welded the knob on tantalum ring and knob with tantalum ring are separated from tantalum ring,
Semi-finished product knob is obtained, makes shape between the base diameter of semi-finished product knob and the base diameter of finished product knob
First is become to preset allowance；
When the base diameter of the finished product knob for needing to obtain is 25.4mm, when bottom thickness is 1.27mm,
In the step, the base diameter of the semi-finished product knob for separating is 28-32mm.Specifically, make partly to become
The base diameter of product knob is 30mm, now first presets allowance for (30-25.4)/2=2.3mm.
Certainly, according to the finished product knob of different size, the base diameter of above-mentioned semi-finished product knob and first is preset
Allowance can also be other numerical value, and the present invention is not specifically limited to this.
Preferably, under semi-finished product knob is specifically cut from tantalum ring by step S1 using linear cutting equipment
Come, realize semi-finished product knob and separate with tantalum ring.The present embodiment by wire cutting by semi-finished product knob from
Remove on tantalum ring, machining accuracy is higher, while the production cycle is shortened, said processing cost.Ability
Field technique personnel are it is understood that can also pass through manually to cut using cutter or adopt lathe by half
Finished product knob is separated from tantalum ring.
Further, in order to ensure the accuracy of cutting position, tantalum ring is fixed cutting on line by step S1
Before equipment, first with the circular arc location-plate with semi-finished product knob location fit to semi-finished product knob
Positioned.The present embodiment using the fixture of linear cutting equipment there is circular arc location-plate, can be half-and-half
The fixed position of finished product knob is defined, so as to improve machining accuracy.Certainly, the present invention is acceptable
Semi-finished product knob is positioned using two flat boards.
S2, by semi-finished product knob surface attachment remove；
Preferably, step S2 is by the attachment on semi-finished product knob surface by way of blasting treatment
Remove.The present invention passes through high pressure gas by carrying out blasting treatment to semi-finished product knob using special sand grains
Pressure is sprayed and is polished off the attachment on its surface on semi-finished product knob surface, so as to ensure that semi-finished product
The roughness and cleannes on knob surface.
Interchangeable, step S2 may also take on other modes and remove the attachment on semi-finished product knob surface
Thing is removed, and such as by the way of pickling, is now needed to not having appendiculate region to protect.
S3, by the bottom of semi-finished product knob be lathed with second preset allowance preset thickness and
Preset diameters, form roughing knob；The step is used for by semi-finished product knob bottom more than Workpiece Turning
Remove, obtain the roughing knob closer to finished product knob size.This second preset allowance be
The thickness that 0.2mm-0.5mm, specially pickling can be removed.
S4, the surface to roughing knob carry out pickling, remove residuals, obtain finished product knob；
The step passes through pickling, and the surface clean of roughing knob is clean, so as to reach finished product knob
Surface requirements.
In summary, on the tantalum ring of the present invention, the repairing and reusing method of column handle makes tantalum ring by processing
Separate with knob, repair process is carried out after accessory knob is extracted, it is achieved that the repairing and reusing of knob,
So as to reduce the production cost of semiconductor.
Additionally, the processing cost of the repairing and reusing method of the present invention is relatively low, can with less cost,
Knob will be continuing with after knob extraction, repair process.
For the ease of processing, before above-mentioned steps S1, also include step：Will be with a semi-finished product knob
Tantalum ring arc section cut from tantalum ring, the length of tantalum ring arc section is 55-65mm.The present invention is by tantalum
Before ring is fixed on linear cutting equipment, first tantalum ring cutting is broken, make, on each section of tantalum ring arc section, there is one
Semi-finished product knob, now tantalum ring arc section is shorter, and specifically, the length of each section of tantalum ring arc section is
60mm, is easy to fix, simultaneously facilitates the wire cutting to semi-finished product knob, improve working (machining) efficiency.This
Invention can not also include above-mentioned steps, directly whole tantalum ring is fixed on linear cutting equipment.
In order to optimize technique scheme further, also include after above-mentioned steps S4：By finished product knob
It is welded on finished product tantalum ring.So, directly the knob of recycling is integrated on tantalum ring, without the need for single
Solely knob is preserved, eliminate outer package device.
In this specification, each embodiment is described by the way of going forward one by one, and each embodiment is stressed
The difference with other embodiment, between each embodiment identical similar portion mutually referring to.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or use
The present invention.Multiple modifications to these embodiments will be aobvious and easy for those skilled in the art
See, generic principles defined herein can without departing from the spirit or scope of the present invention,
Realize in other embodiments.Therefore, the present invention is not intended to be limited to the embodiments shown herein,
And it is to fit to the most wide scope consistent with principles disclosed herein and features of novelty.
Claims (7)
1. on a kind of tantalum ring column handle repairing and reusing method, it is characterised in that comprise the following steps：
1) part for mutually welding the knob on the tantalum ring and knob with the tantalum ring is from the tantalum ring
On separate, obtain semi-finished product knob, make the base diameter of the semi-finished product knob and finished product knob
Base diameter between formed first preset allowance；
2) attachment on the semi-finished product knob surface is removed；
3) bottom of the semi-finished product knob is lathed with the second preset thickness for presetting allowance
And preset diameters, form roughing knob；
4) pickling is carried out to the surface of the roughing knob, removes residuals, obtain finished product knob.
2. repairing and reusing method as claimed in claim 1, it is characterised in that the step 1) tool
The semi-finished product knob is cut down from the tantalum ring by body using linear cutting equipment, realizes described partly becoming
Product knob is separated with the tantalum ring.
3. repairing and reusing method as claimed in claim 2, it is characterised in that the step 1) will
Before the tantalum ring is fixed on the linear cutting equipment, first with the semi-finished product knob location fit
Circular arc location-plate the semi-finished product knob is positioned.
4. the repairing and reusing method as described in any one of claim 1-3, it is characterised in that the step
Also include step before rapid 1)：
The tantalum ring arc section with a semi-finished product knob is cut from the tantalum ring, the tantalum ring
The length of arc section is 55-65mm.
5. repairing and reusing method as claimed in claim 4, it is characterised in that the step 2) tool
Attachment on the semi-finished product knob surface is removed by way of blasting treatment by body.
6. repairing and reusing method as claimed in claim 4, it is characterised in that the finished product knob
Base diameter be 25.4mm, bottom thickness be 1.27mm；
The base diameter of the semi-finished product knob is 28-32mm.
7. repairing and reusing method as claimed in claim 4, it is characterised in that the step 4) it
Afterwards, also include：The finished product knob is welded on finished product tantalum ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510522995.2A CN106475728B (en) | 2015-08-24 | 2015-08-24 | A kind of repairing and reusing method of column handle on tantalum ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510522995.2A CN106475728B (en) | 2015-08-24 | 2015-08-24 | A kind of repairing and reusing method of column handle on tantalum ring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106475728A true CN106475728A (en) | 2017-03-08 |
| CN106475728B CN106475728B (en) | 2018-05-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510522995.2A Active CN106475728B (en) | 2015-08-24 | 2015-08-24 | A kind of repairing and reusing method of column handle on tantalum ring |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115319399A (en) * | 2022-08-26 | 2022-11-11 | 宁波江丰电子材料股份有限公司 | Method for repairing semiconductor sputtering tantalum ring |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3058842A (en) * | 1958-12-29 | 1962-10-16 | Ibm | Evaporation method |
| CN101920435B (en) * | 2010-08-20 | 2012-01-11 | 宁夏东方钽业股份有限公司 | Preparation process of sputtering tantalum ring |
| CN101920437B (en) * | 2010-08-20 | 2011-09-07 | 宁夏东方钽业股份有限公司 | Flat knurling process for sputtering inner and outer surfaces of tantalum ring |
| CN102049568B (en) * | 2010-10-29 | 2012-12-05 | 宁波江丰电子材料有限公司 | Machining device for tantalum ring fixing component |
| CN104746021A (en) * | 2013-12-31 | 2015-07-01 | 宁波江丰电子材料股份有限公司 | Ring piece structure and manufacturing method thereof |
-
2015
- 2015-08-24 CN CN201510522995.2A patent/CN106475728B/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115319399A (en) * | 2022-08-26 | 2022-11-11 | 宁波江丰电子材料股份有限公司 | Method for repairing semiconductor sputtering tantalum ring |
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| Publication number | Publication date |
|---|---|
| CN106475728B (en) | 2018-05-18 |
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