KR101660449B1 - Method for manufacturing of graphite workpiece - Google Patents

Method for manufacturing of graphite workpiece Download PDF

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Publication number
KR101660449B1
KR101660449B1 KR1020150119666A KR20150119666A KR101660449B1 KR 101660449 B1 KR101660449 B1 KR 101660449B1 KR 1020150119666 A KR1020150119666 A KR 1020150119666A KR 20150119666 A KR20150119666 A KR 20150119666A KR 101660449 B1 KR101660449 B1 KR 101660449B1
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KR
South Korea
Prior art keywords
workpiece
machining
graphite
raw material
height
Prior art date
Application number
KR1020150119666A
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Korean (ko)
Inventor
김동환
이동일
한규상
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(주)코멕스카본
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Priority to KR1020150119666A priority Critical patent/KR101660449B1/en
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Publication of KR101660449B1 publication Critical patent/KR101660449B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/20—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by planing, e.g. channelling by means of planing tools
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/522—Graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/422—Carbon
    • C04B2235/425—Graphite

Abstract

The present invention relates to a method of manufacturing a graphite workpiece and, more specifically, relates to a method of processing a graphite crucible and a reflector outer part using a raw graphite material. As such, the method to manufacture the graphite workpiece reduces production costs as two workpieces are able to be manufactured by a raw graphite material. The method of manufacturing a graphite workpiece comprises: a step of designing; a step of arranging a raw material; a step of processing an inside of a first workpiece; a step of processing a hole part; a step of processing an inside of a second workpiece; a step of processing an outer surface of the first workpiece; and a step of separating the first and second workpieces.

Description

TECHNICAL FIELD [0001] The present invention relates to a method for manufacturing a graphite workpiece,

The present invention relates to a method of manufacturing a graphite workpiece, and more particularly, to a manufacturing method capable of processing a graphite crucible and a reflector outer in a single graphite raw material.

Graphite products are being used in a wide variety of industrial fields, such as semiconductors where technological innovation is taking place, new environment-friendly energy fields, molds requiring precision, and nuclear power fields requiring high reliability.

Isotropic graphite in graphite is easy to design because it has no characteristic difference according to the cutting direction and can be used stably even at an ultra-high temperature of 2000 ° C or more as a heat-resistant material, has excellent thermal shock resistance and cracking property due to small thermal expansion and high thermal conductivity And is excellent in electrical conductivity and chemical resistance.

In particular, graphite is a lightweight material having a small bulk density and light weight as compared with a metal material, and is excellent in workability, so that it can be easily used in products requiring precision machining.

As a method of processing the graphite raw material, there is a machining method using a cutting tool. In Fig. 1, a graphite workpiece is manufactured using a cutting tool.

Referring to FIG. 1, a crucible 110 and a reflector outer 120, which are workpieces, respectively, can be manufactured from the graphite raw material 100, and only one workpiece can be manufactured from one graphite raw material 100 .

That is, a crucible having a height h2, an outside diameter W2, and an inside diameter w2 can be manufactured from one graphite raw material 100 having a height h3 and a width W as shown in the drawing, the reflector outer 120 having the outer diameter W1 and the inner diameter w1 can be manufactured. However, it is not possible to simultaneously manufacture the workpieces of the crucible and the reflector outer. This is because the sum of the height h2 of the crucible 110 to be manufactured and the height h1 of the reflector outer is greater than the height h3 of the graphite raw material 100.

When the graphite raw material 100 is cut and processed, the fine powder to be cut off during the processing of the workpiece is discarded, resulting in an increase in the production cost and an economic loss.

Therefore, if it is possible to process as many workpieces as possible from one raw material, it is necessary to study suitable processing methods because the production cost can be reduced and the economic effect is great.

Korean Patent Publication No. 2015-0036179 Korean Patent Publication No. 2009-0088391

As a result of efforts to solve these problems, the present inventors have completed the present invention by developing a processing method capable of producing two kinds of workpieces from one graphite raw material.

It is therefore an object of the present invention to provide a process for producing a graphite workpiece capable of producing two kinds of workpieces from one graphite raw material.

The objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, the present invention provides a method of manufacturing a semiconductor device, which includes a first workpiece processed to have a first height h1, a first inner diameter w1, a first outer diameter W1, Designing a second workpiece processed to have a height (h2), a second inner diameter (w2) and a second outer diameter (W2) to be machined in the graphite raw material at a third height (h3); A raw material disposing step of disposing the graphite raw material in a rotary machine tool; A first machining step for machining the inner space of the first workpiece using a cutting tool; A hole machining step of cutting the bottom surface of the first workpiece to form a hole portion; A second machining inner work step of machining the inner holding space of the second work through the hole portion; A first workpiece outer surface machining step of cutting the outer surface of the first workpiece; And a workpiece separating step of separating the first workpiece and the second workpiece from each other, wherein the third height h3 is greater than the sum of the first height h1 and the second height h2 Characterized in that in the design step, the first work piece is disposed on the second work piece, and the bottom surface of the first work piece is designed to be disposed in the inner diameter of the second work piece. A method of manufacturing a workpiece is provided.

In a preferred embodiment, the method further comprises planarizing the surface of the graphite raw material by roughing prior to the first machining step.

In a preferred embodiment, the first machining step includes: roughing the inside of the first workpiece using a roughing tool; And finishing the interior of the first workpiece using a finishing tool.

In a preferred embodiment, the second processing inner work step and the first outer work surface machining step are machined using a "B" shaped cutting tool with a diamond tip.

In a preferred embodiment, the method further includes a workpiece finishing step of finishing each of the first workpiece and the second workpiece after the workpiece separation step to finish the work.

In a preferred embodiment, the first workpiece is a reflector outer and the second workpiece is a crucible.

The present invention has the following excellent effects.

First, according to the method for producing a graphite workpiece of the present invention, since two kinds of workpieces can be manufactured from one graphite raw material, the production cost can be reduced.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram illustrating the manufacture of a conventional graphite workpiece.
2 is a view for explaining a design step in a method of manufacturing a graphite workpiece according to an embodiment of the present invention.
3 is a view for explaining a method of manufacturing a graphite workpiece according to an embodiment of the present invention.
4 is a view showing a cutting tool for machining a graphite workpiece.
5 is a view for explaining a workpiece separation step in a method of manufacturing a graphite workpiece according to an embodiment of the present invention.

Although the terms used in the present invention have been selected as general terms that are widely used at present, there are some terms selected arbitrarily by the applicant in a specific case. In this case, the meaning described or used in the detailed description part of the invention The meaning must be grasped.

Hereinafter, the technical structure of the present invention will be described in detail with reference to preferred embodiments shown in the accompanying drawings.

However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Like reference numerals designate like elements throughout the specification.

FIG. 2 is a view for explaining a designing step in a method of manufacturing a graphite workpiece according to an embodiment of the present invention, FIG. 3 is a view for explaining a method of manufacturing a graphite workpiece according to an embodiment of the present invention, 4 is a view showing a cutting tool for machining a graphite workpiece, and FIG. 5 is a view for explaining a workpiece separation step in a method of manufacturing a graphite workpiece according to an embodiment of the present invention.

A method of manufacturing a graphite workpiece according to an embodiment of the present invention includes a step of designing, a step of arranging a raw material, a step of machining a first workpiece, a step of machining a hole, a step of machining a second workpiece, And a workpiece separation step. A step of planarizing the surface of the graphite raw material by roughing before the first processing step of the first workpiece, a step of finishing each of the first workpiece and the second workpiece after the workpiece separation step, Step < / RTI >

Here, it is a matter of course that a variety of workpieces can be processed by using the method for manufacturing a graphite workpiece according to the present invention. In an embodiment of the present invention, the reflector outer is used as the first workpiece, The crucible was designed and manufactured.

2 and 3, in the designing step, the workpiece to be processed using the graphite raw material 100, that is, the reflector outer 110 and the crucible 120 are designed to be machined.

The reflector outer 110 is designed to have a first height h1, a first inner diameter w1, a first outer diameter W1 and a hole portion 111 formed on the bottom surface, Is designed to have a second height (h2), a second inner diameter (w2) and a second outer diameter (W2), and is designed to be machined from one graphite raw material (100).

The reflector outer 110 is disposed above the crucible 120 so that the bottom surface of the reflector outer 110 is disposed within the inner diameter W2 of the crucible 120. [ According to this design, even if the height h3 of the graphite raw material is smaller than the sum of the first height h1 of the reflector outer and the second height h2 of the crucible, .

Next, in the step of arranging the raw materials, the graphite raw material 100 is placed in a rotary machine tool. When the design is completed, the graphite raw material 100 is arranged on a rotating machine tool such as a CNC lathe, and the finished design program is input to the CNC lathe. A variety of machines can be used as the rotary machine tool. In the present invention, a CNC lathe capable of machining a workpiece automatically by a program is used.

The CNC lathe is equipped with various cutting tools and performs a process of roughing the surface of the graphite raw material 100 before roughing the workpiece.

Subsequently, in the first machining step, the inner work of the reflector outer 110, which is the first work, is performed. At this time, the graphite raw material 100 is machined using an inner diameter cutting tool in a state of rotating on the CNC lathe. First, the inside of the reflector outer 110 is roughed with a rough tool, The inside of the reflector outer 110 is finely finished.

Then, in the hole forming step, the bottom surface of the reflector outer 110 is cut to form a hole 111.

Subsequently, the hole machining step is performed and then the second machining step is performed. At this time, the cutting tool is replaced in order to perform the internal space of the crucible 120, which is the second workpiece.

FIG. 4 shows a cutting tool 130 for performing an internal accommodation space of the crucible 120. Referring to FIG. 4, the cutting tool 130 has a "C" shape in which the cutting tool bodies 131, 132 are combined, and can be used by attaching and detaching bodies having various lengths according to the machining length of the workpiece . A diamond tip 133 is provided at an end of the cutter main body 132 to precisely process the graphite raw material 100.

In the second processing step, the inner space of the crucible 120 is processed through the hole 111 by using the replacement cutting tool 130.

At this time, in the processing using the cutting tool 130, only a predetermined length is processed in the downward direction of the internal accommodation space of the crucible 120, and then the work is performed in the lateral direction. In the crucible 120, The surface is machined.

Next, a first workpiece outer surface machining step for cutting the outer surface of the reflector outer 110 as the first workpiece is performed. At this time, the cutting tool is replaced, and the inner surface of the crucible 120 together with the outer surface of the reflector outer 110 is replaced with a second cutting tool 140 having a length enough to cut .

That is, the inner surface of the crucible 120 is processed by starting the outer surface of the reflector outer 110 by using the second cutting tool 140 in a downward direction.

After the above-described second processing of the workpiece and the processing of the first surface of the workpiece are performed, the first workpiece and the second workpiece are separated from each other.

Referring to FIG. 5, it can be seen that the reflector outer 110, which is the first work, and the crucible 120, which is the second work, are separated.

Subsequently, after the workpiece separation step in which the reflector outer 110 and the crucible 120 are separated, each of the separated workpieces is finished to complete the processing.

The first height h1, the first inner diameter w1, the first outer diameter W1, and the outer diameter of the outer surface of the reflector outer 110 and the crucible 120, The crucible 120 having the second height h2, the second inside diameter w2 and the second outside diameter W2 is completed together with the reflector outer 110 having the hole portion to be formed.

As described above, according to the method for manufacturing a graphite workpiece according to an embodiment of the present invention, two kinds of workpieces, that is, the reflector outer 110 and the crucible 120 are manufactured simultaneously from one graphite raw material 100 The production cost can be reduced.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation in the present invention. Various changes and modifications will be possible.

100: graphite raw material 110: reflector outer
120: crucible 130, 140: cutting tool
131: Diamond tip

Claims (6)

The first height h1, the first inner diameter w1, the first outer diameter W1 and the first workpiece processed to have a hole portion formed on the bottom surface thereof are provided with a second height h2, a second inner diameter w2 ) And the second outer diameter (W2) is designed to be processed in the graphite raw material of the third height (h3);
A raw material disposing step of disposing the graphite raw material in a rotary machine tool;
A first machining step for machining the inner space of the first workpiece using a cutting tool;
A hole machining step of cutting the bottom surface of the first workpiece to form a hole portion;
A second machining inner work step of machining the inner holding space of the second work through the hole portion;
A first workpiece outer surface machining step of cutting the outer surface of the first workpiece; And
And a workpiece separating step of separating the first workpiece and the second workpiece,
The third height h3 is less than the sum of the first height h1 and the second height h2,
Wherein the first workpiece is placed on the second workpiece in the designing step and the bottom surface of the first workpiece is designed to be placed in the inner diameter of the second workpiece. Way. The method according to claim 1,
And planarizing the surface of the graphite raw material by roughing prior to the first machining step of the workpiece. The method according to claim 1,
The first machining step includes a step
Roughing the inside of the first work using a roughing tool; And
And finishing the inside of the first workpiece using a finishing tool. ≪ RTI ID = 0.0 > 8. < / RTI > 4. The method according to any one of claims 1 to 3,
Wherein the second machining step and the first machining step are machined using a cutting tool having a diamond tip. 5. The method of claim 4,
And a workpiece finishing step of finishing each of the first workpiece and the second workpiece after the workpiece separating step to finish the workpiece. 4. The method according to any one of claims 1 to 3,
Wherein the first workpiece is a reflector outer and the second workpiece is a crucible.
KR1020150119666A 2015-08-25 2015-08-25 Method for manufacturing of graphite workpiece KR101660449B1 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108044809A (en) * 2017-12-04 2018-05-18 佛山市南海区精鹰机械有限公司 Rectangle graphite crucible NC Milling center
CN109483752A (en) * 2018-11-19 2019-03-19 中国航空工业集团公司洛阳电光设备研究所 A kind of method for processing forming of loose state ceramic part
CN116460986A (en) * 2023-04-23 2023-07-21 石家庄中正碳素有限公司 Graphite crucible machining equipment
CN108044809B (en) * 2017-12-04 2024-04-30 佛山市南海区精鹰机械有限公司 Numerical control milling center for rectangular graphite crucible

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000035618A1 (en) * 1998-12-15 2000-06-22 Erwin Junker Maschinenfabrik Gmbh Method and tool holder for turning inside contours of workpieces
KR20090088391A (en) 2007-08-21 2009-08-19 후난 킹보 카본-카본 컴포지트 컴퍼니 리미티드 A c/c composite crucible and a producing method thereof
US20110011228A1 (en) * 2008-03-19 2011-01-20 Japan Super Quartz Corporation Method and apparatus for cutting vitreous silica crucible
KR20120127808A (en) * 2011-05-16 2012-11-26 (주)세렉트론 Method of recycling crucible for melting and crucible manufactured by the same
KR20130023595A (en) * 2011-08-29 2013-03-08 (주)세미머티리얼즈 Bulk cutting device used for graphite crucible fabricating
KR20150036179A (en) 2012-07-04 2015-04-07 토요 탄소 가부시키가이샤 Crucible consisting of carbon, and method for manufacturing same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000035618A1 (en) * 1998-12-15 2000-06-22 Erwin Junker Maschinenfabrik Gmbh Method and tool holder for turning inside contours of workpieces
KR20090088391A (en) 2007-08-21 2009-08-19 후난 킹보 카본-카본 컴포지트 컴퍼니 리미티드 A c/c composite crucible and a producing method thereof
US20110011228A1 (en) * 2008-03-19 2011-01-20 Japan Super Quartz Corporation Method and apparatus for cutting vitreous silica crucible
KR20120127808A (en) * 2011-05-16 2012-11-26 (주)세렉트론 Method of recycling crucible for melting and crucible manufactured by the same
KR20130023595A (en) * 2011-08-29 2013-03-08 (주)세미머티리얼즈 Bulk cutting device used for graphite crucible fabricating
KR20150036179A (en) 2012-07-04 2015-04-07 토요 탄소 가부시키가이샤 Crucible consisting of carbon, and method for manufacturing same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108044809A (en) * 2017-12-04 2018-05-18 佛山市南海区精鹰机械有限公司 Rectangle graphite crucible NC Milling center
CN108044809B (en) * 2017-12-04 2024-04-30 佛山市南海区精鹰机械有限公司 Numerical control milling center for rectangular graphite crucible
CN109483752A (en) * 2018-11-19 2019-03-19 中国航空工业集团公司洛阳电光设备研究所 A kind of method for processing forming of loose state ceramic part
CN116460986A (en) * 2023-04-23 2023-07-21 石家庄中正碳素有限公司 Graphite crucible machining equipment

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