CN106471599A - 用于x射线管的流体注射器和通过液体金属注射来提供液体阳极的方法 - Google Patents
用于x射线管的流体注射器和通过液体金属注射来提供液体阳极的方法 Download PDFInfo
- Publication number
- CN106471599A CN106471599A CN201480080644.4A CN201480080644A CN106471599A CN 106471599 A CN106471599 A CN 106471599A CN 201480080644 A CN201480080644 A CN 201480080644A CN 106471599 A CN106471599 A CN 106471599A
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- fluid
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Links
- 239000012530 fluid Substances 0.000 title claims abstract description 123
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- 238000003860 storage Methods 0.000 claims abstract description 7
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- 238000005452 bending Methods 0.000 claims description 14
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- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 229910000807 Ga alloy Inorganic materials 0.000 claims description 2
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/08—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape of pulsating nature, e.g. delivering liquid in successive separate quantities ; Fluidic oscillators
- B05B1/083—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape of pulsating nature, e.g. delivering liquid in successive separate quantities ; Fluidic oscillators the pulsating mechanism comprising movable parts
- B05B1/086—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape of pulsating nature, e.g. delivering liquid in successive separate quantities ; Fluidic oscillators the pulsating mechanism comprising movable parts with a resiliently deformable element, e.g. sleeve
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
- B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
- B05B17/0669—Excitation frequencies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H01J2235/082—Fluids, e.g. liquids, gases
Landscapes
- X-Ray Techniques (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/RU2014/000522 WO2016010448A1 (en) | 2014-07-17 | 2014-07-17 | Fluid injector for x-ray tubes and method to provide a liquid anode by liquid metal injection |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106471599A true CN106471599A (zh) | 2017-03-01 |
CN106471599B CN106471599B (zh) | 2018-05-22 |
Family
ID=52596585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201480080644.4A Active CN106471599B (zh) | 2014-07-17 | 2014-07-17 | 用于x射线管的流体注射器和通过液体金属注射来提供液体阳极的方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10192711B2 (zh) |
EP (1) | EP3170194B1 (zh) |
JP (1) | JP2017522697A (zh) |
CN (1) | CN106471599B (zh) |
WO (1) | WO2016010448A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110574138A (zh) * | 2017-04-05 | 2019-12-13 | 伊克斯拉姆公司 | 蒸气监测 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3214635A1 (en) * | 2016-03-01 | 2017-09-06 | Excillum AB | Liquid target x-ray source with jet mixing tool |
US10748736B2 (en) | 2017-10-18 | 2020-08-18 | Kla-Tencor Corporation | Liquid metal rotating anode X-ray source for semiconductor metrology |
IT201800002053A1 (it) * | 2018-01-26 | 2019-07-26 | Graf S P A | Testina per la stampa tridimensionale di metallo fuso |
US11719652B2 (en) | 2020-02-04 | 2023-08-08 | Kla Corporation | Semiconductor metrology and inspection based on an x-ray source with an electron emitter array |
US11882642B2 (en) | 2021-12-29 | 2024-01-23 | Innovicum Technology Ab | Particle based X-ray source |
WO2023128856A1 (en) * | 2021-12-29 | 2023-07-06 | Innovicum Technology Ab | Particle based x-ray source |
CN115103499B (zh) * | 2022-06-09 | 2024-03-22 | 大连理工大学 | 一种水下镓铟锡液态金属成丝放电爆炸装置及方法 |
US11955308B1 (en) | 2022-09-22 | 2024-04-09 | Kla Corporation | Water cooled, air bearing based rotating anode x-ray illumination source |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10130070A1 (de) * | 2001-06-21 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit Flüssigmetall-Target |
CN1466860A (zh) * | 2000-07-28 | 2004-01-07 | 产生x-光或euv辐射的方法和装置 | |
WO2005096341A1 (de) * | 2004-03-30 | 2005-10-13 | Yxlon International Security Gmbh | Anodenmodul für eine flüssigmetallanoden-röntgenquelle sowie röntgenstrahler mit einem anodenmodul |
US20060017026A1 (en) * | 2004-07-23 | 2006-01-26 | Xtreme Technologies Gmbh | Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation |
CN102369587A (zh) * | 2009-04-03 | 2012-03-07 | 伊克斯拉姆公司 | 在x射线产生中液体金属靶的供应 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3836805A (en) | 1973-05-21 | 1974-09-17 | Philips Corp | Rotating anode x-ray tube |
DE3429799A1 (de) | 1984-08-13 | 1986-02-20 | Siemens Ag | Drehanoden-roentgenroehre |
AU1241401A (en) * | 1999-10-27 | 2001-05-08 | Jmar Research, Inc. | Method and radiation generating system using microtargets |
US6711233B2 (en) * | 2000-07-28 | 2004-03-23 | Jettec Ab | Method and apparatus for generating X-ray or EUV radiation |
DE10147473C2 (de) | 2001-09-25 | 2003-09-25 | Siemens Ag | Drehanodenröntgenröhre |
DE102004013618B4 (de) | 2004-03-19 | 2007-07-26 | Yxlon International Security Gmbh | Verfahren zum Betrieb einer magnetohydrodynamischen Pumpe, Flüssigmetallanode für eine Röntgenquelle sowie Röntgenstrahler |
DE102006017904B4 (de) * | 2006-04-13 | 2008-07-03 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von extrem ultravioletter Strahlung aus einem energiestrahlerzeugten Plasma mit hoher Konversionseffizienz und minimaler Kontamination |
SE530094C2 (sv) | 2006-05-11 | 2008-02-26 | Jettec Ab | Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans |
US7929667B1 (en) | 2008-10-02 | 2011-04-19 | Kla-Tencor Corporation | High brightness X-ray metrology |
KR101540681B1 (ko) * | 2009-01-26 | 2015-07-30 | 엑실룸 에이비 | 엑스레이 윈도우 |
JP2013140771A (ja) * | 2011-12-09 | 2013-07-18 | Gigaphoton Inc | ターゲット供給装置 |
-
2014
- 2014-07-17 CN CN201480080644.4A patent/CN106471599B/zh active Active
- 2014-07-17 EP EP14841371.9A patent/EP3170194B1/en active Active
- 2014-07-17 WO PCT/RU2014/000522 patent/WO2016010448A1/en active Application Filing
- 2014-07-17 US US15/326,162 patent/US10192711B2/en active Active
- 2014-07-17 JP JP2017502867A patent/JP2017522697A/ja not_active Ceased
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1466860A (zh) * | 2000-07-28 | 2004-01-07 | 产生x-光或euv辐射的方法和装置 | |
DE10130070A1 (de) * | 2001-06-21 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit Flüssigmetall-Target |
WO2005096341A1 (de) * | 2004-03-30 | 2005-10-13 | Yxlon International Security Gmbh | Anodenmodul für eine flüssigmetallanoden-röntgenquelle sowie röntgenstrahler mit einem anodenmodul |
US20060017026A1 (en) * | 2004-07-23 | 2006-01-26 | Xtreme Technologies Gmbh | Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation |
CN102369587A (zh) * | 2009-04-03 | 2012-03-07 | 伊克斯拉姆公司 | 在x射线产生中液体金属靶的供应 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110574138A (zh) * | 2017-04-05 | 2019-12-13 | 伊克斯拉姆公司 | 蒸气监测 |
CN110574138B (zh) * | 2017-04-05 | 2022-01-07 | 伊克斯拉姆公司 | 蒸气监测 |
Also Published As
Publication number | Publication date |
---|---|
US20170221670A1 (en) | 2017-08-03 |
CN106471599B (zh) | 2018-05-22 |
EP3170194B1 (en) | 2019-05-22 |
US10192711B2 (en) | 2019-01-29 |
WO2016010448A1 (en) | 2016-01-21 |
JP2017522697A (ja) | 2017-08-10 |
EP3170194A1 (en) | 2017-05-24 |
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TR01 | Transfer of patent right |
Effective date of registration: 20190108 Address after: Erlangen, Germany Patentee after: SIEMENS HEALTHCARE GmbH Address before: Munich, Germany Patentee before: Siemens AG |
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TR01 | Transfer of patent right |
Effective date of registration: 20240902 Address after: German Phu F Haim Patentee after: Siemens Medical AG Country or region after: Germany Address before: Erlangen, Germany Patentee before: SIEMENS HEALTHCARE GmbH Country or region before: Germany |
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