CN106445229A - Ultra-narrow-bezel graphene touch sensor and fabrication method thereof - Google Patents
Ultra-narrow-bezel graphene touch sensor and fabrication method thereof Download PDFInfo
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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Abstract
The invention discloses an ultra-narrow-bezel graphene touch sensor and a fabrication method thereof. The fabrication method comprises the following steps of 1) performing electrode preparation: a, performing sputtering coating of a metal bezel electrode layer on the surface of a substrate by using a magnetron sputtering method; and b, etching out electrodes suitable for a narrow bezel or an ultra-narrow bezel on the metal bezel electrode layer by using a photolithography process, wherein the electrodes include a bezel electrode and a pin electrode extending to an internal sensing region; 2) performing adhesive film/graphene film processing: stripping off a graphene part on the adhesive film by utilizing a graphic stripping process to enable the outer edge of the graphene film to be exposed out of a bezel region matched with the bezel electrode; and 3) performing combination to form the graphene touch sensor: a, transferring the adhesive film/the graphene film treated in the step 2) to the surface of the substrate in the step 1) by alignment, enabling the bezel electrode to fall in the bezel region, lapping the graphene film with the pin electrode, and removing the adhesive film; and b, patterning the graphene film to form a window region, and performing processes of lamination, cutting and the like to obtain the touch sensor.
Description
Technical field
The present invention relates to a kind of ultra-narrow frame touch sensing and preparation method thereof, for handset touch panel etc., belong to tactile
Touch screen research field.
Background technology
Touch screen (Touch panel) is also called contact panel, is a vicariouss liquid that can receive the input signals such as contact
Crystal device, when contacting the graphic button on screen, the haptic feedback system on screen can be according to the journey of preprogramming
Formula drives various hookup mechanisms, is substituted for mechanical push button panel, and produces by liquid crystal display picture lively
Visual and sound effects.Samuel doctor Hurst invented a touch sensor in 1971, and this sensor is exactly touch screen
Blank.After 3 years, he devises the transparent touch screen of first item.1977, touch screen technology was greatly improved, always
Still it is being widely used and is developing rapidly to today.Handset touch panel is divided into two kinds：Touch screens and capacitance plate, currently a popular
Touch screen majority be all lens screen it is simply that pure flat resistance and minute surface capacitance plate, Nokia's majority is all touch screens, capacitance plate
It is represented as iphone.Resistance touch screen is commonly called as " soft screen ", is used for the mobile phone of Windows Mobile system；Electric capacity touch screen is commonly called as
" hard screen ", the such as machine such as iPhone and G1 adopts this screen matter.
Touch sensing is the core component of touchscreen, mainly utilizes at present and arranges metal lead wire on transparent ITO conducting film,
ITO conducting film is used for touch sensible, and metal lead wire is used for conducting the signal of telecommunication, thus realizing touch-control sensing.Touch sensing is divided into
Visible area and metal lead wire area, visible area touches the position of screen display shadow as mobile phone screen etc., and metal lead wire area is arranged
In the periphery of ITO conducting film, during application, typically blocked by opaque material, be then presented on the non-inductive position of Mobile phone screen periphery.But
It is that ITO conductive film high-temp resisting high-humidity resisting effect is poor, and bending resistance is poor, therefore, a lot of scientists are seeking a kind of more preferable material
Material.The electric conductivity of transparent graphene conductive film and sensitivity are high, with advancing by leaps and bounds of Graphene electrically conducting transparent my slight skill art
Development, the further ripe, production cost of production line relatively before reduce.Graphene conductive film touch sensing is born therewith.
The applied research in touch sensing field for the graphene film for many years, but current Graphene touch-control product begins
Reliable, batch production and application, mainly current Graphene touch sensing basic structure and manufacture method cannot be realized eventually
There is limitation, reliability of technology is low, producing line efficiency and yield are low, and traditional electrode manufacturing process cannot do narrow frame or
Also there is important technical room for improvement in person's ultra-narrow frame, mainly traditional electrode manufacturing process.At present, Graphene touch screen electrode
Predominantly silver paste, is printed on graphene film surface by the method for silk screen printing, then goes out lines with laser ablation, so exists
The following problem：
1. the ag paste electrode adhesive force being printed on graphene film surface poor it is impossible to be surveyed by 3M adhesive tape standard hundred lattice
Examination；
2. silk screen printing silver paste adds that the technique of laser ablation lines cannot do narrow frame or ultra-narrow frame, because laser
Etching lines are thicker, and width is in 30 microns, and gold-tinted processing procedure has gap, and gold-tinted can accomplish 15 microns；
3. dust can be produced during conventional laser etching metal/silver paste, graphene film can not can be straight as ito film
Connect and wiped with non-dust cloth or use adhesive tape binding dust, therefore minimizing cleaning process is also very crucial, can improve producing line efficiency and product
The outward appearance of product and function yield.
Problems above result in graphene film touch sensing at aspects such as reliability, ultra-narrow frame, productions
There are problems, limit the extension of graphene film application technology.
Content of the invention
Present invention aims to the deficiencies in the prior art, there is provided a kind of narrow frame or ultra-narrow frame Graphene touch
The preparation method of control sensor；
It is a further object of the present invention to provide a kind of Graphene touch sensing with ultra-narrow frame.
The purpose of the present invention to implement by the following technical programs：
A kind of preparation method of ultra-narrow frame Graphene touch sensing, comprises the steps：
1) preparation of electrode
A. in substrate surface magnetron sputtering method jet-plating metallization border electrode layer；
B. metal edge frame electrode layer is etched the electrode being applied to narrow frame or ultra-narrow frame, electrode package with gold-tinted technique
Include border electrode and the pin electrode of internally sensing unit extension；
2) contain the process of glued membrane/graphene film：
To be partially stripped containing the graphene film on glued membrane using figure stripping technology, make the outer rim of graphene film spill with
The frame region that border electrode is adapted；
3) combination forms Graphene touch sensing
A. by step 2) in handle well be transferred to step 1 containing glued membrane/Graphene para-position) in substrate surface, make frame
Electrode falls into frame region, and graphene film is overlapped with pin electrode, removes and contains glued membrane；
B. patterned Graphene thin film forms viewfinder area, then is fabricated to touch sensing through operations such as laminating, cuttings.
Preferably, described step 1) in step b in, etch target position in the lump；Described step 2) in, also using figure
Shape stripping technology produces target position in the lump.Using target, be conducive to more accurately fitting.
Preferably, described step 1) in, described base material be PE (polyethylene) film, PET (polyethylene terephthalate) film,
OPP (oriented polypropylene (OPP)) film, PP (polypropylene) film, PVC (polrvinyl chloride) film, blooming OCA, AR protecting film, perfluorinated sulfonic acid tree
Adipose membrane, PI film, COC (cyclenes hydrocarbon type copolymer) film, PPS (polyphenylene sulfide) film, lucite or glass, preferably PET film；
The thickness of described base material is 20 μm -200 μm, for example：20μm、30μm、50μm、60μm、70μm、80μm、90μm、
100 μm, 120 μm, 150 μm, 170 μm, 180 μm, 200 μm, etc.；It is preferably 50 μm -125 μm, for example：50μm、60μm、70μm、
75 μm, 80 μm, 85 μm, 90 μm, 100 μm, 110 μm, 115 μm, 120 μm, 125 μm, etc..
OCA (Optically Clear Adhesive) is used for the extraordinary viscose glue of cementing transparent optical element (as camera lens etc.)
Agent, OCA optical cement is one of raw material of important touch screen.It is that optics acrylic glue is made no base material, then go to the bottom upper
Layer, then one layer of release film of respectively fitting, are a kind of two-sided glue bands of no matrix material.It is the most preferably gluing of touch screen
Agent.
Perfluorinated sulfonic resin (Nafion-H) is the currently known super acids of strong solid, has heat resistance good, chemical
The features such as stability and high mechanical strength.
Preferably, described step 1) in, the material of described metal edge frame electrode layer is gold, silver, copper, aluminum, nickel, chromium, molybdenum or
The metal simple-substance of platinum or alloy.
Preferably, described step 1) in, the thickness of described metal edge frame electrode layer is 50nm-5 μm, preferably 100nm-
500nm.
Preferably, described step 2) in, described graphene film is single-layer graphene or multi-layer graphene is constituted, preferred single layer
Graphene.Graphene can be doped or undoped.
Preferably, described step 2) in, described figure stripping technology adopts laser direct-writing technique or mask plate combination etc.
Ion etch process.
The Graphene part of material surface is directly cleared away by described laser direct-writing with laser；Described mask plate combine etc. from
Son etching covers one piece of mask plate in material surface, then falls not having the graphite in the region of mask plate covering with plasma etching
Alkene.
Preferably, described step 3) in, described containing glued membrane adopt silicone pressure sensitive glued membrane, PMMA, PI, PU or heat release glue
Band, preferably silicone pressure sensitive glued membrane；
Preferably, the described thickness containing glued membrane is 40 μm -250 μm, for example：40μm、50μm、60μm、70μm、80μm、90μ
m、100μm、110μm、120μm、130μm、140μm、150μm、160μm、180μm、200μm、210μm、220μm、230μm、240
μm, 250 μm, etc.；It is preferably 75 μm -150 μm, for example：75μm、80μm、85μm、90μm、100μm、105μm、120μm、125μ
M, 130 μm, 140 μm, 150 μm, etc..Get over Bao Yuehao containing glued membrane in theory, but in fact, in order to reach preferable effect, thickness
Optimal at 75 μm -150 μm.
Preferably, described step 3) in, described minimizing technology containing glued membrane adopts viscosity reduction handling process.Described transfer process ginseng
See the transfer method of the Graphene disclosed in patent No. 201410238058.X.
Preferably, described step 3) in, described patterning adopts laser-induced thermal etching Graphene.
Preferably, described step 3) in, described Graphene is 0.1mm-2mm with the peak width of pin overlap joint, for example：
0.1mm、0.2mm、0.3mm、0.4mm、0.5mm、0.6mm、0.7mm、0.8mm、1.0mm、1.2mm、1.3mm、1.5mm、
1.6mm, 1.7mm, 1.9mm, 2.0mm, etc.；Preferably 0.5mm-1mm, for example：0.5mm、0.6mm、0.7mm、0.8mm、0.9mm、
1.0mm, etc..
Using the inventive method, ultra-narrow frame Graphene touch sensing can be prepared, including graphene film and electrode,
Described electrode is made up of border electrode and pin, and described pin is overlapped on the edge of graphene film, the electric level live width of border electrode
Within 20 μm, preferably 10 μm；Graphene is 0.1mm-2mm, preferably 0.5mm-1mm with the peak width of pin overlap joint.
Beneficial effect of the present invention：
The drawbacks of narrow frame or ultra-narrow frame and graphene film touch sensing cannot be made for existing process
Problem in manufacture process, the present invention proposes solution, is combined with gold-tinted technique by magnetron sputtering and obtains metal electrode
Frame, is retransferred graphene film and is overlapped with electrode, mainly have advantages below compared with prior art：
One is the metal edge frame electrode that can obtain narrow frame or ultra-narrow frame, and the electric level live width of border electrode is 20 μm
Within, Graphene is 0.1mm-2mm with the peak width of pin overlap joint；
Two is to solve the problems, such as that ag paste electrode adhesive force on Graphene is poor, at present, Graphene touch screen electrode
Predominantly silver paste, is printed on graphene film surface by the method for silk screen printing, then goes out lines with laser ablation, silver paste is direct
It is printed on the problem that graphenic surface can lead to adhesive force, and using first preparing metal electrode in the present invention, retransfer Graphene
Method, due to metal electrode directly with base material contact, cleverly evaded the problem of adhesive force between electrode and Graphene；
Three is to be prevented effectively from the dust producing during laser ablation metal/silver paste, improves outward appearance and function yield.
Magnetron sputtering is combined, with gold-tinted technique, the method obtaining metal edge frame simultaneously, can completely and Graphene sensor processing procedure and graphite
Alkene technique separates, and efficiency adds laser ablation silver paste efficiency high than existing silk screen printing, you can to improve producing line efficiency.
The formation of electrode can be processed with graphene film and carry out respectively simultaneously by the inventive method, then combines,
Shorten the activity duration of monolithic touch sensing, provide, to the efficiency of line production, the space that can shorten, be conducive to industry
Change large-scale production.
Brief description
Fig. 1 is the schematic diagram of metal edge frame electrode layer and alignment target on substrate surface sputter in the inventive method；
Fig. 2 for forming the schematic diagram of electrode in substrate surface after gold-tinted technique etching in the inventive method；
Fig. 3 is the schematic diagram separating frame region in the inventive method on the graphene film containing glued membrane/graphene film；
Fig. 4 is para-position shifting process flow chart described in the inventive method；
Wherein, 1- metal edge frame electrode layer, 11- border electrode, 12- pin electrode, 2- base material, 3- contains glued membrane, 4- graphite
Alkene film, 41- frame region, 42- alignment target (graphene film), 5- alignment target (on base material).
Specific embodiment
Below in conjunction with accompanying drawing, the preferred embodiments of the present invention are illustrated it will be appreciated that preferred reality described herein
Apply example to be merely to illustrate and explain the present invention, be not intended to limit the present invention.
Embodiment 1：
1st, shown in Figure 1, adopting thickness on magnetron sputtering method sputter on pet base material 2 surface is the elemental copper of 100nm,
Form border electrode layer 1 and alignment target 5；
2nd, shown in Figure 2, with gold-tinted technique, copper bound frame electrode layer 1 is etched into the border electrode 11 that live width is 20 μm,
Prepare internal region simultaneously and stretch out the pin electrode 12 for connecting graphene film；
3rd, shown in Figure 3, using laser direct-writing technique, by transfer, the single-layer graphene on silicone pressure sensitive glued membrane 3 is thin
Film 4 is partially stripped, and spills the frame region 41 being adapted with border electrode, separates alignment target 42, Graphene is thin simultaneously
Film first passes through chemical doping in advance and processes；
4th, silicone pressure sensitive glued membrane 3/ graphene film 4 in step 3 is transferred to the pet in step 2 with make-up machine para-position
Surface 2, makes border electrode 11 fall into the frame region 41 separating on graphene film, graphene film 4 is only taken with pin electrode 12
Connect and form good Ohmic contact, recycle viscosity reduction technique to remove silicone pressure sensitive glued membrane 3, form base material 2/ graphene film
4+ electrode 11,12；
5th, the touch-control that can be fabricated to narrow frame through operations such as laser-induced thermal etching Graphene figure, laminating OCA, cuttings again passes
Sensor.
Embodiment 2：
1st, shown in Figure 1, adopting thickness on magnetron sputtering method sputter on glass baseplate 2 surface is the elemental gold of 150nm,
Form border electrode layer 1 and alignment target 5；
2nd, shown in Figure 2, with gold-tinted technique, golden-rimmed frame electrode layer 1 is etched into the frame electricity of the ultra-narrow of only 10 μm of live width
Pole 11, prepares internal region simultaneously and stretches out the pin electrode 12 for connecting graphene film；
3rd, shown in Figure 3, the single layer graphene film on silicone pressure sensitive glued membrane 3 will be shifted using laser direct-writing technique
4 are partially stripped, and only spill the frame region 41 being adapted with gold electrode, separate alignment target 42, graphene film simultaneously
First pass through chemical doping in advance to process；
4th, shown in Figure 4, silicone pressure sensitive glued membrane 3/ graphene film 4 in step 3 is transferred to make-up machine para-position
Glass baseplate 2 surface in step 2, makes border electrode 11 fall into the frame region 41 separating on graphene film, graphene film 4
Only form good Ohmic contact with pin electrode 12 overlap joint, viscosity reduction removes silicone pressure sensitive glued membrane 3；
5th, repeat step 4 transfer second layer graphene film is to glass substrate surface；
6th, the touch-control of ultra-narrow frame can be fabricated to again through operations such as laser-induced thermal etching Graphene figure, laminating OCA, cuttings
Sensor.
Embodiment 3：
1st, shown in Figure 1, adopting thickness on magnetron sputtering method sputter on pet base material 2 surface is the Kufil of 150nm
Gold, forms border electrode layer 1 and alignment target 5；
2nd, shown in Figure 2, with gold-tinted technique, Kufil border electrode layer 1 is etched into the ultra-narrow of only 12 μm of live width
Border electrode 11, prepares internal region simultaneously and stretches out the pin electrode 12 for connecting graphene film；
3rd, shown in Figure 3, with reference to plasma etching industrial, transfer there is being is the monolayer on PMMA glued membrane 3 using mask plate
Graphene film 4 is partially stripped, and only spills the frame region 41 being adapted with Kufil electrode, separates alignment target simultaneously
42, graphene film first passes through chemical doping in advance and processes；
4th, shown in Figure 4, PMMA glued membrane 3/ graphene film 4 in step 3 is transferred in step 2 with make-up machine para-position
Pet base material 2 surface, so that border electrode 11 is fallen in the frame region 41 that graphene film separates, graphene film 4 only with pin
Electrode 12 overlap joint forms good Ohmic contact, and viscosity reduction removes PMMA glued membrane 3；
5th, repeat step 4 transfer second layer graphene film is to pet substrate surface；
6th, the touch-control of ultra-narrow frame can be fabricated to again through operations such as laser-induced thermal etching Graphene figure, laminating OCA, cuttings
Sensor.
Embodiment 4：
1st, shown in Figure 1, adopt the molybdenum aluminum molybdenum that thickness on magnetron sputtering method sputter is 150nm to close on COC base material 2 surface
Gold, forms border electrode layer 1 and alignment target 5；
2nd, shown in Figure 2, with gold-tinted technique, molybdenum aluminium molybdenum alloys frame region is etched into the narrow side that live width is 18 μm
Frame electrode 11, prepares internal region simultaneously and stretches out the pin electrode for connecting graphene film；
3rd, shown in Figure 3, single layer graphene film 4 part on PMMA glued membrane 3 will be shifted using laser direct-writing technique
Peel off, only spill the frame region 41 being adapted with molybdenum aluminium molybdenum alloys electrode, separate alignment target 42, graphene film simultaneously
First pass through chemical doping in advance to process；
4th, shown in Figure 4, PMMA glued membrane 3/ graphene film 4 in step 3 is transferred in step 2 with make-up machine para-position
COC substrate surface, so that border electrode 11 is fallen in the frame region 41 that graphene film separates, graphene film 4 only with pin
Electrode 12 overlap joint forms good Ohmic contact, and viscosity reduction removes PMMA glued membrane 3；
5th, repeat step 4 transfer second layer graphene film is to COC substrate surface；
6th, the touch-control that can be fabricated to narrow frame through operations such as laser-induced thermal etching Graphene figure, laminating OCA, cuttings again passes
Sensor.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, although with reference to aforementioned reality
Apply example the present invention has been described in detail, for a person skilled in the art, it still can be to aforementioned each enforcement
Technical scheme described in example is modified, or carries out equivalent to wherein some technical characteristics.All essences in the present invention
Within god and principle, any modification, equivalent substitution and improvement made etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of preparation method of ultra-narrow frame Graphene touch sensing it is characterised in that：Comprise the steps：
1) preparation of electrode
A. in substrate surface magnetron sputtering method jet-plating metallization border electrode layer；
B. metal edge frame electrode layer is etched, with gold-tinted technique, the electrode being applied to narrow frame or ultra-narrow frame, electrode includes side
The pin electrode that frame electrode and internally sensing unit extend；
2) contain the process of glued membrane/graphene film：
To be partially stripped containing the graphene film on glued membrane using figure stripping technology, so that the outer rim of graphene film is spilt and frame
The frame region that electrode is adapted；
3) combination forms Graphene touch sensing
A. by step 2) in handle well be transferred to step 1 containing glued membrane/Graphene para-position) in substrate surface, make border electrode
Fall into frame region, graphene film is overlapped with pin electrode, removes and contains glued membrane；
B. patterned Graphene thin film forms viewfinder area, then is fabricated to touch sensing through operations such as laminating, cuttings.
2. ultra-narrow frame Graphene touch sensing according to claim 1 preparation method it is characterised in that：Described step
In step b in rapid 1), etch target position in the lump；Described step 2) in, also produced in the lump using figure stripping technology
Target position.
3. ultra-narrow frame Graphene touch sensing according to claim 1 preparation method it is characterised in that：Described step
In rapid 1), described base material is PE film, PET film, OPP film, PP film, PVC film, blooming OCA, AR protecting film, perfluorinated sulfonic resin
Film, PI film, COC film, PPS film, lucite or glass, preferably PET；
Preferably, the thickness of described base material is 20 μm -200 μm, preferably 50 μm -125 μm.
4. ultra-narrow frame Graphene touch sensing according to claim 1 preparation method it is characterised in that：Described step
In rapid 1), the material of described metal edge frame electrode layer is gold, silver, copper, aluminum, nickel, the metal simple-substance of chromium, molybdenum or platinum or alloy；Excellent
Choosing, the thickness of described metal edge frame electrode layer is 50nm-5 μm, preferably 100nm-500nm.
5. ultra-narrow frame Graphene touch sensing according to claim 1 preparation method it is characterised in that：Described step
In rapid 2), described graphene film is single-layer graphene or multi-layer graphene is constituted, preferred single layer Graphene.
It is further preferred that described figure stripping technology adopts laser direct-writing technique or mask plate to combine plasma etching work
Skill.
6. ultra-narrow frame Graphene touch sensing according to claim 1 preparation method it is characterised in that：Described step
In rapid 3), described containing glued membrane adopt silicone pressure sensitive glued membrane, PMMA, PI, PU or heat release adhesive tape, preferably organic pressure-sensitive gel
Film；
Preferably, the described thickness containing glued membrane is 40 μm -250 μm, preferably 75 μm -150 μm.
7. ultra-narrow frame Graphene touch sensing according to claim 1 preparation method it is characterised in that：Described step
In rapid 3), described minimizing technology containing glued membrane adopts viscosity reduction handling process.
8. ultra-narrow frame Graphene touch sensing according to claim 1 preparation method it is characterised in that：Described step
In rapid 3), described patterning adopts laser-induced thermal etching Graphene.
9. ultra-narrow frame Graphene touch sensing according to claim 1 preparation method it is characterised in that：Described step
In rapid 3), described Graphene is 0.1mm-2mm, preferably 0.5mm-1mm with the peak width of pin overlap joint.
10. a kind of ultra-narrow frame Graphene touch sensing it is characterised in that：Including graphene film and electrode, described electrode by
Border electrode and pin are constituted, and described pin is overlapped on the edge of graphene film, within the electric level live width of border electrode is 20 μm,
Preferably 10 μm, Graphene is 0.1mm-2mm with the peak width of pin overlap joint；Preferably 0.5mm-1mm.
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| CN108228017A (en) * | 2018-03-20 | 2018-06-29 | 江西蓝沛泰和新材料有限公司 | A kind of narrow-frame touch panel and display equipment |
| CN112873355A (en) * | 2020-12-24 | 2021-06-01 | 烟台正海科技股份有限公司 | Design method for touch screen OCA (optical clear adhesive) lamination alignment target |
| CN113207203A (en) * | 2021-04-19 | 2021-08-03 | 安徽精卓光显技术有限责任公司 | Substrate-free heating film production method |
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| CN1728071A (en) * | 2004-07-29 | 2006-02-01 | 义隆电子股份有限公司 | Capacitance type touch pad of using film, and preparing method |
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| CN103543894A (en) * | 2013-09-26 | 2014-01-29 | 广东欧珀移动通信有限公司 | Capacitive touch screen and manufacturing method thereof |
| CN103941918A (en) * | 2014-04-21 | 2014-07-23 | 无锡格菲电子薄膜科技有限公司 | Graphene thin film touch sensor and manufacturing method thereof |
| CN104016335A (en) * | 2014-05-30 | 2014-09-03 | 无锡格菲电子薄膜科技有限公司 | Graphene transfer method |
| CN104166477A (en) * | 2014-08-11 | 2014-11-26 | 深圳市宇顺电子股份有限公司 | Method for manufacturing touch control screen and touch control screen |
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| CN105589598A (en) * | 2015-12-24 | 2016-05-18 | 无锡格菲电子薄膜科技有限公司 | Manufacturing method of patterned graphene |
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Effective date of registration: 20190314 Address after: No. 518-5 Zhonghui Road, Standard Factory Building of Chang'an Industrial Park, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Applicant after: Wuxi Sixth Element Electronic Film Technology Co., Ltd. Address before: 214174 No. 518-5 Zhonghui Road, Chang'an Industrial Park, Wuxi Huishan Economic Development Zone, Jiangsu Province, Wuxi City, Jiangsu Province Applicant before: Wuxi Gefei Electronic Film Technology Co.,Ltd. |
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