CN104793786A - Manufacturing method for graphene touch screen sensor - Google Patents
Manufacturing method for graphene touch screen sensor Download PDFInfo
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- CN104793786A CN104793786A CN201510136075.7A CN201510136075A CN104793786A CN 104793786 A CN104793786 A CN 104793786A CN 201510136075 A CN201510136075 A CN 201510136075A CN 104793786 A CN104793786 A CN 104793786A
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Abstract
The invention discloses a manufacturing method for a graphene touch screen sensor. The method comprises the steps that a substrate transferred with graphene thin film serves as an object, the graphene thin film in an electrode printing area is removed in advance, a graphene overlapping area is only reserved, the overlapping area is the superposed area of the electrode printing area and the graphene thin film, the electrode printing area without the graphene thin film is printed with metal electrode paste, and the sensor is formed after patterning is conducted. According to the manufacturing method for the graphene touch screen sensor, the graphene thin film in the electrode printing area is removed in advance, the graphene overlapping area is only reserved, and then a lead metal electrode printing method is adopted, so that a printing electrode is only overlapped to graphene only on a minimal overlapping area, good electric connection or ohmic contact can be achieved, most of the metal electrode makes contact with the substrate, and the problem that the printing adhesive force of the metal paste on the graphene thin film is poor is solved.
Description
Technical field
The present invention relates to touch panel sensor field, particularly, relate to a kind of manufacture method of Graphene touch panel sensor.
Background technology
In current phone touch-screen manufacturing, ITO(tin indium oxide) be main screen body sensor conductive material.ITO conductive film conventional on market adopts coating process to make ITO be deposited on plastics (normally PET(polyethylene terephthalate)) or glass baseplate on make, the metal species conductive materials such as silver slurry, copper slurry are directly printed subsequently on ITO conductive film, form sensor, now, the conductive metal film printed and ito thin film adhesion better, can meet the technical requirement that touch panel sensor manufactures.
Graphene is the monoatomic layer two dimensional crystal of carbon atom by the tightly packed one-tenth of hexagonal structure, except having the excellent characteristic such as optics, calorifics, mechanics, the charge carrier of Graphene shows the behavior being similar to photon, intrinsic mobility can reach 2 × 105 cm2/ (VS), and the electrical properties of this excellence makes it have huge using value in conductive film field.Current, replace ITO with Graphene, plastics or glass make conductive film, become the trend of touch-screen conductive film development, and achieved larger progress in touch sensing field.Copy the touch panel sensor manufacture craft of ito thin film, lead district metal electrode sizing to be directly printed on graphene film and to toast, graphene film structure may be individual layer, may be bilayer also may be more multi-layered, because follow that layer graphene of metal electrode sizing contact and lower layer graphene or substrate caking power poor, make metal electrode sizing and printing surface overall adhesion bad, easily cause coming off of metal electrode under external force, cause broken string, the manufacturing property requirement of touch panel sensor cannot be met.
Summary of the invention
The object of the invention is to, for the problems referred to above, propose a kind of manufacture method of Graphene touch panel sensor, to solve the problem of the printing poor adhesive force of metal paste on graphene film.
For achieving the above object, the technical solution used in the present invention is:
A kind of manufacture method of Graphene touch panel sensor, the substrate of graphene film is had for object with transfer, in advance the graphene film in electrode print district is removed, only retain Graphene overlap, described overlap is the region that electrode print district overlaps with graphene film, print metal electrode sizing in the electrode print district eliminating graphene film, after patterning, form sensor.
Preferably, described transfer has the substrate in the substrate of graphene film to be plastics or substrate of glass.
Preferably, described manufacture method specifically comprises the following steps:
Step one, to have shifted the substrate of graphene film for object, with around target for benchmark, adopt figure stripping technology to be removed by the Graphene in electrode print district, manifested base material, only retained Graphene overlap;
Step 2, the surface of graphene film and base material to be cleaned;
Step 3, utilize screen process press by metal electrode sizing printing to the substrate surface areas being removed Graphene, and guarantee that this metal electrode sizing can snap into graphene edge;
Step 4, metal electrode sizing carried out to baking and form metal electric polar region;
Step 5, be that benchmark carries out laser ablation patterning to metal electric polar region with target, namely obtain linear metal electrode by the mode of laser pipeline purging.
Preferably, the width of described Graphene overlap is 0.1mm-1mm.
Preferably, the width of described Graphene overlap is 0.3mm-0.5mm.
Preferably, to have shifted the substrate of graphene film for object in described step one, the graphene film number of plies that described substrate is shifted is 1-10 layer.
Preferably, in described step one, figure stripping technology comprises, and laser direct-writing, mask plate are in conjunction with plasma etching and peelable glue precoating; Namely the Graphene in electrode print district is directly removed with laser by described laser direct-writing; Namely described mask plate hides one piece of mask plate at material surface in conjunction with plasma etching, the Graphene in the region then falling not have mask plate to hide with plasma etching; Namely described peelable glue precoating prints peelable glue in electrode print district in advance, shifts graphene film after oven dry, then peelable glue is taken off the electrode print district just leaving and do not have Graphene.
Preferably, the metal electrode sizing in described step 3 comprises gold paste, silver slurry, aluminum paste, silver-bearing copper slurry or copper slurry.
Preferably, the temperature range of toasting in described step 4 is 80-230 degree, and the time interval of baking is 10-120min.
Preferably, the temperature range of toasting in described step 4 is 110-140 degree, and the time interval of baking is 30-60min.
Technical scheme of the present invention has following beneficial effect:
Technical scheme of the present invention, first electrode print district graphene film is removed, only retain Graphene overlap, adopt the method for lead-in wire metal electrode printing subsequently, make to print electrode and only on minimum overlap joint area, snap into Graphene, realize good electric connection (Ohmic contact).Make metal electrode major part and substrate contact, solve the problem of the printing poor adhesive force of metal paste on graphene film.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is the structural representation after the Graphene in part removal electrode print district in Graphene touch panel sensor manufacture method;
Fig. 2 is the structural representation behind the formation metal electric polar region in Graphene touch panel sensor manufacture method.
By reference to the accompanying drawings, in the embodiment of the present invention, Reference numeral is as follows:
1-window touch area; 2-electrode print district; 3-target; 4-Graphene overlap; 5-metal electric polar region.
Embodiment
Below in conjunction with accompanying drawing, the preferred embodiments of the present invention are described, should be appreciated that preferred embodiment described herein is only for instruction and explanation of the present invention, is not intended to limit the present invention.
Embodiment one,
A kind of manufacture method of Graphene touch panel sensor, the substrate of graphene film is had for object with transfer, in advance the graphene film in electrode print district is removed, only retain Graphene overlap, overlap is the region that electrode print district overlaps with graphene film, print metal electrode sizing in the electrode print district eliminating graphene film, after patterning, form sensor.
Wherein, transfer has the substrate in the substrate of graphene film to be plastics or substrate of glass.
Manufacture method specifically comprises the following steps:
As depicted in figs. 1 and 2, whole in Fig. 1 in dotted line are electrode print district, and wherein shadow region is the region of removing Graphene, and what in dotted line, shadow region was is Graphene overlap.Metal electric polar region 5 in Fig. 2 i.e. the chromatography metal electrode sizing in electrode print district 2.
Step one, to have shifted the substrate of graphene film for object, with around target for benchmark, adopt figure stripping technology to be removed by the Graphene in electrode print district, manifested base material, only retained Graphene overlap;
Step 2, the surface of graphene film and base material to be cleaned;
Step 3, utilize screen process press by metal electrode sizing printing to the substrate surface areas being removed Graphene, and guarantee that this metal electrode sizing can snap into graphene edge; Namely overlap joint contacts in the mode partially overlapped, to form good electric connection (Ohmic contact);
Step 4, metal electrode sizing carried out to baking and form metal electric polar region; It is made electrically and on adhesion to meet sensor back segment process requirements;
Step 5, be that benchmark carries out laser ablation patterning to metal electric polar region with target, namely obtain linear metal electrode by the mode of laser pipeline purging.Obtain linear metal electrode by the mode of laser pipeline purging exactly, then form touch panel sensor through following process.
Wherein, the width of Graphene overlap is 0.1mm-1mm.The width of preferred Graphene overlap is 0.3mm-0.5mm.
To have shifted the substrate of graphene film for object in step one, the graphene film number of plies that substrate is shifted is 1-10 layer.In step one, figure stripping technology comprises, and laser direct-writing, mask plate are in conjunction with plasma etching and peelable glue precoating; Namely the Graphene in electrode print district is directly removed with laser by described laser direct-writing; Namely described mask plate hides one piece of mask plate at material surface in conjunction with plasma etching, the Graphene in the region then falling not have mask plate to hide with plasma etching; Namely described peelable glue precoating prints peelable glue in electrode print district in advance, shifts graphene film after oven dry, then peelable glue is taken off the electrode print district just leaving and do not have Graphene.
Metal electrode sizing in step 3 comprises gold paste, silver slurry, aluminum paste, silver-bearing copper slurry or copper slurry.
The temperature range of toasting in step 4 is 80-230 degree, and the time interval of baking is 10-120min.Preferably, the temperature range of baking is 110-140 degree, and the time interval of baking is 30-60min.
Embodiment two,
The concrete preparation process of the present embodiment Graphene touch panel sensor is as follows:
(1) to have shifted the PET base material of 2 layer graphene films for object, so that around four targets are for benchmark, employing laser direct-writing technique, removes the Graphene in electrode print district, manifests base material, retain Graphene overlap.
(2) mode of pressure gas drifting dust is utilized to clean the surface of graphene film;
(3) utilize screen process press silver to be starched chromatography to the substrate surface areas being removed Graphene, and guarantee that this metal electrode sizing can snap into the edge of Graphene, lap width is 0.5mm, thus forms good electric connection;
(4) adopt dustless baking oven to toast silver slurry, baking temperature is 135 degree, and baking time is 60 minutes, makes it electrically and on adhesion meet sensor back segment process requirements;
(5) be that benchmark carries out laser ablation patterning to silver electrode district with target, first CAD electrode pattern is imported in laser etching machine system, then set the parameter that laser is strafed, comprise power, speed etc. and can carry out etch patterning, then form touch panel sensor through following process.
Embodiment three
The concrete preparation process of the present embodiment Graphene touch panel sensor is as follows:
(1) to have shifted the glass baseplate of 1 layer graphene film for object, so that around four targets are for benchmark, the Graphene in electrode print district, in conjunction with plasma etching industrial, is removed, is manifested base material by employing mask plate, retains Graphene overlap.
(2) mode of pressure gas drifting dust is utilized to clean the surface of graphene film;
(3) utilize screen process press by gold paste chromatography to the substrate surface areas being removed Graphene, and guarantee that this metal electrode sizing can snap into the edge of Graphene, lap width is 0.4mm, thus forms good electric connection;
(4) adopt dustless baking oven to toast gold paste, baking temperature is 140 degree, and baking time is 80 minutes, makes it electrically and on adhesion meet sensor back segment process requirements;
(5) be that benchmark carries out laser ablation patterning to gold electrode district with target, first CAD electrode pattern is imported in laser etching machine system, then set the parameter that laser is strafed, comprise power, speed etc. and can carry out etch patterning, then form touch panel sensor through following process.
Embodiment four
The concrete preparation process of the present embodiment Graphene touch panel sensor is as follows:
(1) to have shifted the PET base material of 2 layer graphene films for object, so that around four targets are for benchmark, employing peelable glue pre-coat process, removes the Graphene in electrode print district, manifests base material, retain Graphene overlap.
(2) mode of pressure gas drifting dust is utilized to clean the surface of graphene film;
(3) utilize screen process press silver to be starched chromatography to the substrate surface areas being removed Graphene, and guarantee that this metal electrode sizing can snap into the edge of Graphene, lap width is 0.3mm, thus forms good electric connection;
(4) adopt dustless baking oven to toast silver slurry, baking temperature is 110 degree, and baking time is 60 minutes, makes it electrically and on adhesion meet sensor back segment process requirements;
(5) be that benchmark carries out laser ablation patterning to silver electrode district with target, first CAD electrode pattern is imported in laser etching machine system, then set the parameter that laser is strafed, comprise power, speed etc. and can carry out etch patterning, then form touch panel sensor through following process.
Embodiment five
The concrete preparation process of the present embodiment Graphene touch panel sensor is as follows:
(1) to have shifted the PET base material of 3 layer graphene films for object, so that around four targets are for benchmark, employing peelable glue pre-coat process, removes the Graphene in electrode print district, manifests base material, retain Graphene overlap.
(2) mode of dust-binding machine binding dust is utilized to clean the surface of graphene film;
(3) utilize screen process press by aluminum paste chromatography to the substrate surface areas being removed Graphene, and guarantee that this metal electrode sizing can snap into the edge of Graphene, lap width is 0.3mm, thus forms good electric connection;
(4) adopt dustless baking oven to toast aluminum paste, baking temperature is 120 degree, and baking time is 60 minutes, makes it electrically and on adhesion meet sensor back segment process requirements;
(5) be that benchmark carries out laser ablation patterning to aluminium silver electrode district with target, first CAD electrode pattern is imported in laser etching machine system, then set the parameter that laser is strafed, comprise power, speed etc. and can carry out etch patterning, then form touch panel sensor through following process.
。
Table one, performance test table for Graphene touch panel sensor.
Last it is noted that the foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, although with reference to previous embodiment to invention has been detailed description, for a person skilled in the art, it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. the manufacture method of a Graphene touch panel sensor, it is characterized in that, the substrate of graphene film is had for object with transfer, in advance the graphene film in electrode print district is removed, only retain Graphene overlap, described overlap is the region that electrode print district overlaps with graphene film, prints metal electrode sizing, form sensor after patterning in the electrode print district eliminating graphene film.
2. the manufacture method of Graphene touch panel sensor according to claim 1, is characterized in that, described transfer has the substrate in the substrate of graphene film to be plastics or substrate of glass.
3. the manufacture method of Graphene touch panel sensor according to claim 2, is characterized in that, described manufacture method specifically comprises the following steps:
Step one, to have shifted the substrate of graphene film for object, with around target for benchmark, adopt figure stripping technology to be removed by the Graphene in electrode print district, manifested base material, only retained Graphene overlap;
Step 2, the surface of graphene film and base material to be cleaned;
Step 3, utilize screen process press by metal electrode sizing printing to the substrate surface areas being removed Graphene, and guarantee that this metal electrode sizing can snap into graphene edge;
Step 4, metal electrode sizing carried out to baking and form metal electric polar region;
Step 5, be that benchmark carries out laser ablation patterning to metal electric polar region with target, namely obtain linear metal electrode by the mode of laser pipeline purging.
4. the manufacture method of Graphene touch panel sensor according to claim 3, is characterized in that, the width of described Graphene overlap is 0.1mm-1mm.
5. the manufacture method of Graphene touch panel sensor according to claim 4, is characterized in that, the width of described Graphene overlap is 0.3mm-0.5mm.
6. the manufacture method of Graphene touch panel sensor according to claim 3, is characterized in that, to have shifted the substrate of graphene film for object in described step one, the graphene film number of plies that described substrate is shifted is 1-10 layer.
7. the manufacture method of Graphene touch panel sensor according to claim 3, is characterized in that, in described step one, figure stripping technology comprises, and laser direct-writing, mask plate are in conjunction with plasma etching and peelable glue precoating; Namely the Graphene in electrode print district is directly removed with laser by described laser direct-writing; Namely described mask plate hides one piece of mask plate at material surface in conjunction with plasma etching, the Graphene in the region then falling not have mask plate to hide with plasma etching; Namely described peelable glue precoating prints peelable glue in electrode print district in advance, shifts graphene film after oven dry, then peelable glue is taken off the electrode print district just leaving and do not have Graphene.
8. the manufacture method of Graphene touch panel sensor according to claim 3, is characterized in that, the metal electrode sizing in described step 3 comprises gold paste, silver slurry, aluminum paste, silver-bearing copper slurry or copper slurry.
9. the manufacture method of Graphene touch panel sensor according to claim 3, is characterized in that, the temperature range of toasting in described step 4 is 80-230 degree, and the time interval of baking is 10-120min.
10. the manufacture method of Graphene touch panel sensor according to claim 9, is characterized in that, the temperature range of toasting in described step 4 is 110-140 degree, and the time interval of baking is 30-60min.
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| CN105300574A (en) * | 2015-11-13 | 2016-02-03 | 常州二维碳素科技股份有限公司 | Graphene pressure sensor, manufacturing method thereof and purpose thereof |
| CN106445229A (en) * | 2016-09-07 | 2017-02-22 | 无锡格菲电子薄膜科技有限公司 | Ultra-narrow-bezel graphene touch sensor and fabrication method thereof |
| CN107153486A (en) * | 2017-06-05 | 2017-09-12 | 无锡格菲电子薄膜科技有限公司 | A kind of foldable touch-screen in whole face and preparation method thereof, application |
| CN108684084A (en) * | 2018-03-30 | 2018-10-19 | 重庆墨希科技有限公司 | The preparation process of graphene heating film |
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| CN108684084B (en) * | 2018-03-30 | 2021-04-23 | 重庆墨希科技有限公司 | Preparation process of graphene heating film |
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