CN106444892A - Temperature control system and optical console - Google Patents

Temperature control system and optical console Download PDF

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Publication number
CN106444892A
CN106444892A CN201610817247.1A CN201610817247A CN106444892A CN 106444892 A CN106444892 A CN 106444892A CN 201610817247 A CN201610817247 A CN 201610817247A CN 106444892 A CN106444892 A CN 106444892A
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CN
China
Prior art keywords
temperature control
control system
refrigeration
temperature
heat
Prior art date
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Granted
Application number
CN201610817247.1A
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Chinese (zh)
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CN106444892B (en
Inventor
马传贺
陈晔
安雪娥
王宇
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East China Normal University
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East China Normal University
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Priority to CN201610817247.1A priority Critical patent/CN106444892B/en
Publication of CN106444892A publication Critical patent/CN106444892A/en
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Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/1917Control of temperature characterised by the use of electric means using digital means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B21/00Machines, plants or systems, using electric or magnetic effects
    • F25B21/02Machines, plants or systems, using electric or magnetic effects using Peltier effect; using Nernst-Ettinghausen effect
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2321/00Details of machines, plants or systems, using electric or magnetic effects
    • F25B2321/02Details of machines, plants or systems, using electric or magnetic effects using Peltier effects; using Nernst-Ettinghausen effects
    • F25B2321/021Control thereof
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2321/00Details of machines, plants or systems, using electric or magnetic effects
    • F25B2321/02Details of machines, plants or systems, using electric or magnetic effects using Peltier effects; using Nernst-Ettinghausen effects
    • F25B2321/025Removal of heat
    • F25B2321/0251Removal of heat by a gas
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Abstract

The invention provides a temperature control system and an optical console having the same temperature control system. The temperature control system comprises a refrigeration unit, a temperature controller and a switching power supply. The temperature controller controls the switching power supply to drive the refrigeration unit to carry out refrigeration or heating. The refrigeration unit comprises a copper heat radiation support plate, a first refrigeration sheet, a first heat insulation pad, an annular heat spacer, a temperature control copper block, a second refrigeration sheet, a second heat insulation pad and a heat radiation block. The two refrigeration sheets and the copper heat radiation support plate are used to cooperatively buffer temperature control, the conventional technical problem that the accumulated heat is high and the refrigeration is hard is solved, the temperature changing rate is greatly improved, the testing time is saved, the usage is convenient, and the low temperature refrigeration effect is good.

Description

Temperature control system and optics control station
Technical field
The present invention relates to semiconductor temperature field, control with comprising its optics particularly to a kind of temperature control system Platform.
Background technology
Scientific research institutions and colleges and universities the experiment test stage it is often necessary to control semiconductor device(As laser instrument and the sun Can battery)Temperature to test its photoelectric characteristic under constant temperature or temperature match curing conditions, so targetedly research and development improve.
Due to researching and developing the improvement stage, in order to obtain preferably device performance, it usually needs meticulously convert combined material Component, temperature, humidity and pressure parameter.The result that each parameter is combined in conversion is miscellaneous testing sample, moreover existing Temperature control system alternating temperature slow(Test period is longer), ultimately result in test job extremely tedious.
Content of the invention
The technical problem to be solved in the present invention is to overcome the temperature control system ramp rates of prior art slow Defect, provides a kind of temperature control system and the optics control station comprising it, and not only alternating temperature is rapid for this temperature control system, and Have the advantages that stable temperature control is higher.
The present invention is to solve above-mentioned technical problem by following technical proposals:
A kind of temperature control system, its feature is, this temperature control system includes a refrigeration unit, a temperature control Device and a Switching Power Supply, this temperature controller can control this Switching Power Supply to drive this refrigeration unit refrigeration or heat,
This refrigeration unit includes a copper radiating support plate, the first cooling piece, the first heat insulating mattress, annular heat piece, a control Warm copper billet, the second cooling piece, the second heat insulating mattress, radiating block,
This first cooling piece heat face and chill surface successively respectively with this copper radiating support plate and this temperature control copper billet thermal conductive contact, This first cooling piece is arranged in the groove of this first heat insulating mattress, and this first heat insulating mattress is embedded at this copper radiating support plate and this control Between warm copper billet, this annular heat piece is covered in the side surface of this temperature control copper billet,
The chill surface of this second cooling piece and heat face successively respectively with this copper radiating support plate and this radiating block thermal conductive contact, this Second cooling piece is arranged in the groove of this second heat insulating mattress, and this second heat insulating mattress is embedded at this copper radiating support plate and this radiating Between block.
It is preferred that this refrigeration unit also includes one for the radiator fan for the cooling of this radiating block, this radiator fan Lower surface is fixedly connected with this radiating block, and the upper surface of this radiator fan has a dismountable netted isolation cover, this radiating Fan can suck cold air and by this netted isolation cover discharge hot-air by the fin clearance of this radiating block.In ultra-clean chamber Experiment is indoor, can show after tested, not only can be in 3min(Minute)The interior ice that 25 DEG C of water becomes 2.5 DEG C, can also be 2.5min(Minute)Interior water is warming up to 70 DEG C from 25 DEG C.
It is preferred that this temperature control system includes one for the water pump for this temperature control copper billet refrigeration, this temperature control copper billet There is a water inlet and an outlet, this water inlet and this outlet are all detachably connected with and have O-ring seal Pipe joint, this water pump is interconnected with those pipe joints by silica gel tube.
It is preferred that the internal array of this temperature control copper billet has multiple transverse flow channels being interconnected and longitudinal runner, those are horizontal To the port of runner and the port of those longitudinal runners all by bolt seal, those pipe joints are the thread gage with those bolts Lattice parameter identical male connector.Transverse flow channels and longitudinal runner can be processed it is also possible to make using lathe bore process Use casting technique integral manufacturing.Screw thread specifications parameter is identical to refer to that tooth form, pitch are identical with helical pitch, in order to those pipe joints and Those bolts carry out place-exchange or replace replacement.
It is preferred that this temperature control system also includes a displacement regulating platform, it is solid that this copper radiating support plate passes through bolt Due to this displacement regulating platform.
It is preferred that this temperature control system also includes a ship type switch with six foot third gear functions, this temperature control Utensil processed heats input, heats outfan, refrigeration input and refrigeration outfan, the O shelves positive pole of this ship type switch and negative Pole is electrically connected with the positive pole of this Switching Power Supply and negative pole respectively, and this heats one grade of positive pole that input switched with this ship type and is electrically connected Connect, the positive pole of this refrigeration outfan and the first cooling piece is all electrically connected with one grade of negative pole of this ship type switch, this refrigeration input, The positive pole of the second cooling piece, the positive pole of this radiator fan, the positive pole of this water pump are all electrically connected with two grades of positive poles of this ship type switch, This heats outfan, the negative pole of the first cooling piece, the negative pole of the second cooling piece, the negative pole of this radiator fan, the negative pole of this water pump All electrically connect with two grades of negative poles of this ship type switch.
It is preferred that the component of the component of this Switching Power Supply and this temperature controller is integrated in same pcb board, should Switching Power Supply includes a voltage transformation unit, a rectification unit, a filter unit and the voltage regulation unit being sequentially connected electrically; This temperature controller includes wireless transmit/receive units, a temperature collecting cell, a signal processing unit and one to be had Enable the H-bridge circuit controlling with direction logic, this H-bridge circuit has an Enable Pin, a logical control end in a left side and a right side and leads to Control end;This wireless transmit/receive units, this temperature collecting cell, this Enable Pin, this left side lead to the logical control end in control end and this right side all with This signal processing unit electrically connects, and this voltage regulation unit is used for powering for this H-bridge circuit.
A kind of optics control station, its feature is, this optics control station includes temperature control system as above, should Optics control station also includes one and leads hot linked temperature control corner device with this temperature control copper billet, and this temperature control corner device includes phase mutual conductance Thermo-contact a heat-conducting block and an epitaxial wafer, this epitaxial wafer include successively an interconnective substrate layer, a sacrifice layer, one Stress is double-deck and a shaping layer, and this stress is double-deck to include one first lattice layer and one second lattice layer, this first lattice layer, this Two lattice layers and this sacrifice layer are connected with each other successively,
This epitaxial wafer etching forms an interconnective light guide section and a hinge, and this hinge is by the double-deck etching of this stress Form, this light guide section is had angle with the surface shape of this epitaxial wafer under the stress deformation effect of this hinge, this temperature control System can change the first lattice layer and the lattice mismatch of the second lattice layer.Except being turned using the temperature control of above-mentioned semiconductor structure Angle device, can also using the different two kinds of sheet metals mutual face contact for producing hinge of thermal coefficient of expansion, and then form simple Easy-to-use metal temperature control corner device.
On the basis of meeting common sense in the field, above-mentioned each optimum condition, can combination in any, obtain final product each preferable reality of the present invention Example.
The positive effect of the present invention is:Work in coordination with buffering control by using two panels cooling piece and copper radiating support plate Temperature, overcomes conventional high accumulation of heat, the technical barrier of difficult refrigeration, Cooling rate can be greatly improved, and then save the testing time, no Only easy to use, and low temperature refrigeration is preferable.
Brief description
Fig. 1 is the structural representation of the refrigeration unit of temperature control system of the embodiment of the present invention 1;
Fig. 2 is the explosive view of the refrigeration unit of Fig. 1;
Fig. 3 is the circuit connection diagram of the temperature control system of the embodiment of the present invention 1;
Fig. 4 is the structural representation of the optics control station of the embodiment of the present invention 1;
Fig. 5 is the structural representation of the temperature control corner device of optics control station of Fig. 4;
Fig. 6 is the Switching Power Supply of temperature control system of the embodiment of the present invention 2 and the circuit diagram of temperature controller.
Description of reference numerals:
The temperature control system of embodiment 1 and optics control station:
Refrigeration unit:10 bronze medal radiating support plates:11
First cooling piece:12 first heat insulating mattress:13
Annular heat piece:14 temperature control copper billets:15
Second cooling piece:16 second heat insulating mattress:17
Radiating block:18 radiator fans:19
Temperature controller:20 heat input:21
Heat outfan:22 refrigeration inputs:23
Refrigeration outfan:24 Switching Power Supplies:30
Ship type switchs:40 1 grades:41
Two grades:42 heat-conducting blocks:50
Epitaxial wafer:60 light guide sections:61
Hinge:62 water pumps:100
Bolt:101 water inlets:110
Outlet:111 O-ring seals:113
Pipe joint:114 bolts:115
Netted isolation cover:190 screw mandrels:191
Thermocouple:210 O shelves:400
The temperature control system of embodiment 2:
First and door:A1 second and door:A2
3rd and door:A3 the 4th and door:A4
Filter unit:C1 second filter unit:C2
Rectification unit:D1 ~ D4 first binding post:E1
Second binding post:E2 the 3rd binding post:E3
4th binding post:E4 electric fuse:F1
First not gate:O1 second not gate:O2
Plug:P1 key switch:S1
First audion:Q1 second audion:Q2
3rd audion:Q3 the 4th audion:Q4
First resistor:R1 voltage transformation unit:T1
Temperature collecting cell:U1 wireless transmit/receive units:W1
Voltage regulation unit:IC1 signal processing unit:IC2
First light emitting diode:The left logical control end of LED1:DIR-L
Right logical control end:DIR-R Enable Pin:ENABLE
Specific embodiment
Name a preferred embodiment, and combine accompanying drawing to become apparent from intactly illustrating the present invention.
Embodiment 1
The structure of the temperature control system of the present embodiment is as follows:
Understood incorporated by reference to Fig. 1-3, the temperature control system of the present embodiment includes 10, the temperature control of a refrigeration unit Device 20 processed and a Switching Power Supply 30, this temperature controller 20 can control this Switching Power Supply 30 to drive this refrigeration unit 10 to freeze Or heat,
This refrigeration unit 10 includes a copper radiating support plate 11, the first cooling piece 12, the first heat insulating mattress 13, annular heat piece 14th, temperature control copper billet 15, the second cooling piece 16, the second heat insulating mattress 17, a radiating block 18,
This first cooling piece 12 heat face and chill surface is led with this copper radiating support plate 11 and this temperature control copper billet 15 successively respectively Thermo-contact, this first cooling piece 12 is arranged in the groove of this first heat insulating mattress 13, and this first heat insulating mattress 13 is embedded at this copper and dissipates Between hot gripper shoe 11 and this temperature control copper billet 15, this annular heat piece 14 is covered in the side surface of this temperature control copper billet 15,
The chill surface of this second cooling piece 16 and heat face successively respectively with this copper radiating support plate 11 and this radiating block 18 heat conduction Contact, this second cooling piece 16 is arranged in the groove of this second heat insulating mattress 17, and this second heat insulating mattress 17 is embedded at the radiating of this copper Between gripper shoe 11 and this radiating block 18.
For further improving radiating effect, this refrigeration unit 10 can also include one for lowering the temperature for this radiating block 18 Radiator fan 19, the lower surface of this radiator fan 19 is fixedly connected with this radiating block 18, when specifically connecting, it is possible to use screw mandrel 191 are fixed, and the upper surface of this radiator fan 19 has a dismountable netted isolation cover 190, to prevent from revolving at a high speed The blade scratching fingers turning or skin, this radiator fan 19 can suck cold air by the fin clearance of this radiating block 18 and lead to Cross this netted isolation cover 190 and discharge hot-air.Using this gas flow, in refrigeration mode, can not only be quickly by this copper The waste heat on radiating support plate 11 surface is taken away, and will not produce the thermal agitation of the sample to temperature control copper billet 15 surface for the thermal current.
In order to realize the condensation effect less than 20 DEG C, this temperature control system can be designed to also to include one and be used for For the water pump 100 of this temperature control copper billet 15 refrigeration, understood incorporated by reference to Fig. 1-2, this temperature control copper billet 15 has a water inlet 110 With an outlet 111, this water inlet 110 and this outlet 111 are all detachably connected with the pipe with O-ring seal 113 Joint 114, this water pump 100 is interconnected with those pipe joints 114 by silica gel tube.Those pipe joints 114 with silica gel tube phase One end even is designed to cross half channel-shaped, has both been easy to be loaded and unloaded with Phillips screwdriver, can reduce consumptive material and the weight of pipe joint 114 again Amount.
In order to lift refrigeration uniformity and temperature-controlled precision, the internal array of this temperature control copper billet 15 has multiple horizontal strokes being interconnected To runner and longitudinal runner, the port of the port of those transverse flow channels and those longitudinal runners is all sealed by bolt 115, those Pipe joint 114 is the screw thread specifications parameter identical male connector with those bolts 115.
In order to accurate coupling light, this temperature control system also includes a displacement regulating platform, and this displacement is adjusted Platform can be fixed on this position for three-dimensional optical adjusting bracket or five dimension optical adjusting brackets, this copper radiating support plate 11 by bolt 101 Move regulating platform.Five dimension optical adjusting brackets can adjust height and the inclination angle of the sample being arranged on temperature control copper billet 15, light of being more convenient for Line is coupled into grating spectrograph.
Understood incorporated by reference to Fig. 3, this temperature control system also includes a ship type with six foot third gear functions and opens Close 40, this temperature controller 20 have heat input 21, heat outfan 22, refrigeration input 23 and refrigeration outfan 24, O shelves 400 positive pole of this ship type switch 40 and negative pole are electrically connected with the positive pole of this Switching Power Supply 30 and negative pole respectively, and this heats input End 21 is electrically connected with one grade of 41 positive pole of this ship type switch 40, the positive pole of this refrigeration outfan 24 and the first cooling piece 12 all with this One grade of 41 negative pole electrical connection of ship type switch 40, this refrigeration input 23, the positive pole of the second cooling piece 16, this radiator fan 19 Positive pole, the positive pole of this water pump 100 are all electrically connected with two grade of 42 positive pole of this ship type switch 40, and this heats outfan 22, first system The negative pole of cold 12, the negative pole of the second cooling piece 16, the negative pole of this radiator fan 19, this water pump 100 negative pole all with this ship type Two grade of 42 negative pole electrical connection of switch 40.
The operation principle of the temperature control system of the present embodiment and technique effect are as follows:
Firstth, improve Cooling rate and saved the testing time, by using two panels cooling piece and copper radiating support plate association With buffering temperature control, overcome conventional high accumulation of heat, the technical barrier of difficult refrigeration.
Secondth, safety is easy-to-use, and under conditions of ensureing ventilation and heat performance, netted isolation cover 190 can prevent from revolving at a high speed The blade scratching fingers turning or skin, so safety;Easily copper radiating support plate 11 can be fixed on position using bolt 101 Move regulating platform, switch 40 using the ship type with six foot third gear functions, single mode dual control circuit can be designed, facilitate single chill formula Switching and single heat pattern between.
3rd, not only freeze uniformly and also temperature control accurately, array has multiple transverse flow channels being interconnected and longitudinal runner The uniformity of refrigeration can be improved;Pipe joint 114 and bolt 115 are designed to unified screw thread specification, not only can mutually change For improving temperature-controlled precision, more can optionally wash away any runner so that eliminating particle thing, prevent flow blockage.
Understood incorporated by reference to Fig. 4-5, the optics control station of the present embodiment includes temperature control system as above, Also include one and lead hot linked temperature control corner device with this temperature control copper billet 15, this temperature control corner device includes mutual thermal conductive contact One heat-conducting block 50 and an epitaxial wafer 60, this epitaxial wafer 60 include successively an interconnective substrate layer, a sacrifice layer, one should Power is double-deck and a shaping layer, and this stress is double-deck to include one first lattice layer and one second lattice layer, this first lattice layer, this second Lattice layer and this sacrifice layer are connected with each other successively,
Understood incorporated by reference to Fig. 5, this epitaxial wafer 60 etching forms an interconnective light guide section 61 and a hinge 62, This hinge 62 is formed by the double-deck etching of this stress, this light guide section 61 under the stress deformation effect of this hinge 62 with this extension The surface shape of piece 60 has angle, and in Figure 5, this angle is 90 °.Certainly, different size can be made by semiconductor technology Hinge, and then make there are different angle intermediate values(Ө)Temperature control corner device.This temperature control system can be by system Mode that is cold and heating changes the first lattice layer and the lattice mismatch of the second lattice layer, to reach this angle of change(Ө± ɛ), and then the final purpose changing outgoing radiation direction.
Embodiment 2
The structure of the temperature control system of the present embodiment is as follows:
The temperature control system of the temperature control system of the present embodiment and embodiment 1 has more similarity, these similar it Place repeats no more, different from the temperature control system of embodiment 1, is understood incorporated by reference to Fig. 6, the circuit elements of this Switching Power Supply 30 The component of part and this temperature controller 20 is integrated in same pcb board, and this Switching Power Supply 30 includes being sequentially connected electrically Voltage transformation unit T1, rectification unit D1 ~ D4, a filter unit C1 and a voltage regulation unit IC1;This temperature controller 20 wraps Include a wireless transmit/receive units W1, temperature collecting cell U1, a signal processing unit IC2 and one and there is enable control With the H-bridge circuit of direction logic, this H-bridge circuit has Enable Pin ENABLE, a left side leads to control end DIR-L and a right side Logical control end DIR-R;This wireless transmit/receive units W1, this temperature collecting cell U1, this Enable Pin ENABLE, this left side lead to control end DIR-L and this right side are led to control end DIR-R and are all electrically connected with this signal processing unit IC2, and this voltage regulation unit IC1 is used for as this H bridge Circuit is powered.Understood incorporated by reference to Fig. 2, this temperature collecting cell U1 is electrically connected with thermocouple 210, for gathering thermocouple The analog voltage signal of 210 detections is simultaneously converted to digital voltage signal, in order to the IC2 process of this signal processing unit.
Herein it is to be appreciated that filter unit C1 is not limited to 0.1 μ F electric capacity that the present embodiment adopted and 6800 μ F electric capacity simultaneously Connection design or LC filter circuit, can also be LC π type filter circuit, can be more RC π type filter circuit, be obtained with this The effect of obtain more stable voltage waveform.For the ease of using and improving instrument performance, understood incorporated by reference to Fig. 6, this switch Power supply 30 can also include a plug P1, an electric fuse F1 and the key switch S1 being serially connected, and lifts electricity with this Road safety and the convenience of start and stop.The acceptable second filter unit C2 in parallel of the outfan of this voltage regulation unit IC1, and in parallel Comprise first resistor R1 and the break-make indicating circuit of the first LED 1.The outfan of this voltage regulation unit IC1 is acceptable First binding post E1 and the second binding post E2 is set, in order to for the second cooling piece 16, this radiator fan 19 and this water pump 100 power supplies.This H-bridge circuit include first with door A1, second and door A2, the 3rd and door A3, the 4th and door A4, the first not gate O1, Second not gate O2, the first audion Q1, the second audion Q2, the 3rd audion Q3, the 4th audion Q4, said elements connect pass It is to enable, for having, the H-bridge circuit controlling with direction logic, two outfans of this H-bridge circuit are respectively provided with the 3rd binding post E3 and the 4th binding post E4, for powering for the first cooling piece 12 and the cold and hot pattern that automatically switches.
The operation principle of the temperature control system of the present embodiment and technique effect are as follows:
There is wireless remote control and the accurate function of temperature control, by configuring wireless transmit/receive units W1, mobile terminal or electricity can be passed through Brain is opened and is arranged the parameter of temperature control system, removes operator from and frequently travels to and fro between refrigeration unit 10 and temperature controller 20 Between, and go to manipulate the turnaround time of the knob of temperature controller 20, further increasing testing efficiency;The drawing of H-bridge circuit Enter, can automatically switch refrigeration mode and heating mode, so that the temperature difference is accurate in the range of ± 0.1 DEG C, temperature control accurately and makes With convenient.
Although the foregoing describing the specific embodiment of the present invention, it will be appreciated by those of skill in the art that these It is merely illustrative of, protection scope of the present invention is defined by the appended claims.Those skilled in the art is not carrying on the back On the premise of the principle and essence of the present invention, various changes or modifications can be made to these embodiments, but these changes Each fall within protection scope of the present invention with modification.

Claims (8)

1. a kind of temperature control system is it is characterised in that this temperature control system includes a refrigeration unit, a temperature control Device processed and a Switching Power Supply, this temperature controller can control this Switching Power Supply to drive this refrigeration unit refrigeration or heat,
This refrigeration unit includes a copper radiating support plate, the first cooling piece, the first heat insulating mattress, annular heat piece, a control Warm copper billet, the second cooling piece, the second heat insulating mattress, radiating block,
This first cooling piece heat face and chill surface successively respectively with this copper radiating support plate and this temperature control copper billet thermal conductive contact, This first cooling piece is arranged in the groove of this first heat insulating mattress, and this first heat insulating mattress is embedded at this copper radiating support plate and this control Between warm copper billet, this annular heat piece is covered in the side surface of this temperature control copper billet,
The chill surface of this second cooling piece and heat face successively respectively with this copper radiating support plate and this radiating block thermal conductive contact, this Second cooling piece is arranged in the groove of this second heat insulating mattress, and this second heat insulating mattress is embedded at this copper radiating support plate and this radiating Between block.
2. temperature control system as claimed in claim 1 is it is characterised in that this refrigeration unit also includes one for dissipating for this The radiator fan of hot block cooling, the lower surface of this radiator fan is fixedly connected with this radiating block, the upper table mask of this radiator fan There is a dismountable netted isolation cover, this radiator fan can suck cold air by the fin clearance of this radiating block and pass through Hot-air discharged by this netted isolation cover.
3. the temperature control system as described in any one in claim 1-2 is it is characterised in that this temperature control system includes There is one for the water pump for this temperature control copper billet refrigeration, this temperature control copper billet has a water inlet and an outlet, this water inlet Mouth and this outlet are all detachably connected with the pipe joint with O-ring seal, and this water pump is connect with those pipes by silica gel tube Head is interconnected.
4. temperature control system as claimed in claim 3 it is characterised in that the internal array of this temperature control copper billet have multiple mutually The transverse flow channels of connection and longitudinal runner, the port of the port of those transverse flow channels and those longitudinal runners is all close by bolt Envelope, those pipe joints are the screw thread specifications parameter identical male connector with those bolts.
5. temperature control system as claimed in claim 3 is it is characterised in that this temperature control system also includes a displacement Regulating platform, this copper radiating support plate is secured by bolts in this displacement regulating platform.
6. temperature control system as claimed in claim 3 is it is characterised in that this temperature control system also includes one has The ship type switch of six foot third gear functions, this temperature controller has and heats input, heats outfan, refrigeration input and refrigeration Outfan, the O shelves positive pole of this ship type switch and negative pole are electrically connected with the positive pole of this Switching Power Supply and negative pole respectively, and this heats input End is electrically connected with one grade of positive pole of this ship type switch, and the positive pole of this refrigeration outfan and the first cooling piece is all switched with this ship type The electrical connection of one grade of negative pole, this refrigeration input, the positive pole of the second cooling piece, the positive pole of this radiator fan, this water pump positive pole equal With this ship type switch two grades of positive poles electrically connect, this heat outfan, the negative pole of the first cooling piece, the negative pole of the second cooling piece, The negative pole of this radiator fan, the negative pole of this water pump are all electrically connected with two grades of negative poles of this ship type switch.
7. temperature control system as claimed in claim 3 is it is characterised in that the component of this Switching Power Supply and this temperature control The component of device processed is integrated in same pcb board,
A voltage transformation unit that this Switching Power Supply includes being sequentially connected electrically, a rectification unit, a filter unit and one are steady Pressure unit;
This temperature controller includes wireless transmit/receive units, a temperature collecting cell, a signal processing unit and one Have and enable the H-bridge circuit controlling with direction logic, this H-bridge circuit has an Enable Pin, a left side leads to control end and one Right logical control end;
This wireless transmit/receive units, this temperature collecting cell, this Enable Pin, this left side lead to the logical control end in control end and this right side all with this letter The electrical connection of number processing unit, this voltage regulation unit is used for powering for this H-bridge circuit.
8. a kind of optics control station is it is characterised in that this optics control station includes described in any one in claim 1-7 Temperature control system, this optics control station also includes one and leads hot linked temperature control corner device with this temperature control copper billet, and this temperature control turns Angle device includes a heat-conducting block of mutual thermal conductive contact and an epitaxial wafer, and this epitaxial wafer includes an interconnective lining successively Bottom, a sacrifice layer, a stress bilayer and a shaping layer, this stress is double-deck to include one first lattice layer and one second lattice layer, This first lattice layer, this second lattice layer and this sacrifice layer are connected with each other successively,
This epitaxial wafer etching forms an interconnective light guide section and a hinge, and this hinge is by the double-deck etching of this stress Form, this light guide section is had angle with the surface shape of this epitaxial wafer under the stress deformation effect of this hinge, this temperature control System can change the first lattice layer and the lattice mismatch of the second lattice layer.
CN201610817247.1A 2016-09-12 2016-09-12 Temperature control system and optics console Expired - Fee Related CN106444892B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610817247.1A CN106444892B (en) 2016-09-12 2016-09-12 Temperature control system and optics console

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610817247.1A CN106444892B (en) 2016-09-12 2016-09-12 Temperature control system and optics console

Publications (2)

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CN111474967A (en) * 2020-04-29 2020-07-31 苏州东方克洛托光电技术有限公司 Dynamic temperature control device for improving environmental adaptability of digital micromirror

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CN111474967A (en) * 2020-04-29 2020-07-31 苏州东方克洛托光电技术有限公司 Dynamic temperature control device for improving environmental adaptability of digital micromirror

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