CN106442278A - Measurement device and measurement method for scattered light intensity distribution of single particle beam - Google Patents
Measurement device and measurement method for scattered light intensity distribution of single particle beam Download PDFInfo
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- CN106442278A CN106442278A CN201610840673.7A CN201610840673A CN106442278A CN 106442278 A CN106442278 A CN 106442278A CN 201610840673 A CN201610840673 A CN 201610840673A CN 106442278 A CN106442278 A CN 106442278A
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- 238000005259 measurement Methods 0.000 title claims abstract description 69
- 239000002245 particle Substances 0.000 title claims abstract description 34
- 238000009826 distribution Methods 0.000 title claims abstract description 29
- 238000000691 measurement method Methods 0.000 title abstract description 4
- 230000003287 optical effect Effects 0.000 claims abstract description 76
- 101000694017 Homo sapiens Sodium channel protein type 5 subunit alpha Proteins 0.000 claims abstract description 37
- 239000002131 composite material Substances 0.000 claims abstract description 19
- 239000000523 sample Substances 0.000 claims description 89
- 239000007788 liquid Substances 0.000 claims description 63
- 239000012530 fluid Substances 0.000 claims description 56
- 238000000034 method Methods 0.000 claims description 29
- 238000001514 detection method Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- 230000013011 mating Effects 0.000 claims description 17
- 239000004531 microgranule Substances 0.000 claims description 14
- 239000004568 cement Substances 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 6
- 239000012895 dilution Substances 0.000 claims description 6
- 238000010790 dilution Methods 0.000 claims description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 6
- 238000001459 lithography Methods 0.000 claims description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 6
- -1 polydimethylsiloxane Polymers 0.000 claims description 6
- 238000007711 solidification Methods 0.000 claims description 6
- 230000008023 solidification Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 3
- 239000005662 Paraffin oil Substances 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 3
- 229910021641 deionized water Inorganic materials 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims description 3
- 230000002459 sustained effect Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 239000003921 oil Substances 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 abstract 2
- 238000000684 flow cytometry Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 239000011859 microparticle Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 108091006146 Channels Proteins 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000003759 clinical diagnosis Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000029052 metamorphosis Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
- G01N15/1436—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement the optical arrangement forming an integrated apparatus with the sample container, e.g. a flow cell
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- G01N2015/1022—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
Abstract
The invention discloses a measurement device for scattered light intensity distribution of a single particle beam. The measurement device comprises a light source, a spectral optical path, a light receiving and detecting component and a micro-flow control chip component, wherein the light source comprises a main measurement light source, an auxiliary measurement light source and a system adjustment light source; the spectral optical path comprises a spectroscope and a PIN tube; the light receiving and detecting component comprises a 90-degree off-axis parabolic mirror, a telescope group, a diaphragm, a light filter, an ICCD detector, a signal detecting and generating circuit, a composite light filter, a PMT detector, an oscillometer and a computer; and the micro-flow control chip component comprises a micro-flow control chip, an optical screen, a three-axis adjusting tool and a micro-flow pump. Moreover, the invention also discloses a measurement method for the scattered light intensity distribution of the single particle beam.
Description
Technical field
The present invention relates to optics and fields of measurement, more particularly to a kind of measurement apparatus of single-particle beam scattered light intensity distribution
And measuring method.
Background technology
In liquid, counting micro particles and grain diameter measurement play an important role in clinical diagnosises, industry and environment measuring.Wherein, flow
Formula cell art is the Multi-parameter Measurement Method that Bio-clinical quick diagnosis and field of cell analysis are commonly used.Testing sample suspension is in sheath
Pass through nozzle under the constraint of liquid, form unicellular liquor stream, and by incident laser radiation.Photomultiplier tube receives dissipating of sample microgranule
Penetrate light or fluorescence signal, detection data is analyzed process by computer.Compared with integrally measuring with population, flow cytometry
More accurate result can be obtained.However, the sample size that flow cytometry needs is larger, instrument is complicated, operation and maintenance is inconvenient.
Compare traditional counting and measurement side due to carrying out counting micro particles using micro-fluidic chip with the method for grain diameter measurement
Method has very low sample consumption, can greatly shorten time of measuring, simplify operation and be easy to make portable equipment and be applied to
The advantages of on-the-spot test, existing research worker proposes the flow cytometry measure device and method based on microfluidic chip technology.
In measurement process, sample microgranule is limited in by microchannel center flow by fluid, makes sample form simple grain subflow, thus
Avoid channel block, sample is glued the problems such as glutinous or absorption, sample overlap by conduit wall.
However, the existing flow cytometry measure device based on micro-fluidic chip is mostly flat in two dimension simply by sheath fluid
On face, sample stream is limited, thus sample stream can not be made to become cylindrical fluid, and sample microgranule easily deviates sample stream
Central axis, have impact on measuring accuracy.Further, since employ photomultiplier tube as light receiving element, thus limit
The measurement angle of scattered light is it is impossible to realize the measurement of scattered light intensity distribution.
Content of the invention
The present invention is directed to the defect of prior art, there is provided a kind of single-particle beam scatterometry dress based on micro-fluidic chip
Put and its measuring method, it can measure the scattered light intensity distribution of single microgranule in the single-particle beam flow through microchannel in real time, and surveys
Amount speed is fast, high precision.
For achieving the above object, the invention provides a kind of measurement apparatus of single-particle beam scattered light intensity distribution, it includes
Light source, light splitting optical path, light-receiving and probe assembly and micro-fluidic chip assembly, described light source includes main measurement light source, auxiliary
Measurement light source and system call interception light source；Described light splitting optical path includes spectroscope and PIN pipe；Described light-receiving and probe assembly include
90 ° of off-axis parabolic mirrors, telescope microscope group, diaphragm, optical filter, ICCD detector, signal detection and circuit, compound occurs
Optical filter, PMT detector, oscillograph and computer；Described micro-fluidic chip assembly includes micro-fluidic chip, optical screen, three axles tune
Section tool and miniflow pump；Wherein, described main measurement light source, described spectroscope, described 90 ° of off-axis parabolic mirrors and described three axles
Adjust tool to be successively set in same first straight line, the laser of described main measurement light source transmitting is divided into main optical path by described spectroscope
And reference path, described main optical path overlapped with described first straight line, and described reference path is vertical with described main optical path, described PIN
Pipe is located in described reference path, described system call interception light source, described telescope microscope group, described diaphragm, described optical filter and institute
State ICCD detector to be successively set in same second straight line, described system call interception light source is reflected with described 90 ° of off axis paraboloid mirrors
Relatively, described optical screen is arranged on described three axles and adjusts tool above and be located at described 90 ° of off-axis parabolic mirrors the parabola of mirror
Focal point, described micro-fluidic chip is arranged on described three axles and adjusts in tool, and described miniflow pump is connected with described micro-fluidic chip, institute
State the left side that subsidiary light source is located at described micro-fluidic chip, described composite filter mating plate and described PMT detector are sequentially arranged in
The right side of described micro-fluidic chip, described PIN pipe, described oscillograph, described PMT detector, described signal detection and generation electricity
Road, described ICCD detector and described computer are sequentially connected.
Further, described micro-fluidic chip include annular sheath fluid input duct, linear sample liquid input duct and
Linear sprue, described linear sample liquid input duct and described linear sprue are located on same 3rd straight line, institute
State annular sheath fluid input duct symmetrical with regard to described 3rd straight line, one end of described annular sheath fluid input duct is provided with sheath fluid
Input hole, the other end of described annular sheath fluid input duct is connected with described linear sprue, described sample liquid inlet flow
Road is surrounded and connected with described sprue by described sheath fluid input duct, and described sample liquid input duct is provided with sample liquid input
Hole, described sprue is provided with delivery outlet.
Further, the diameter of described sample liquid input duct and described sheath fluid input duct is respectively less than described sprue
Diameter.
Further, the middle part of described sprue is the area of observation coverage of described micro-fluidic chip, the sight of described micro-fluidic chip
Survey face is the face of cylinder, the described face of cylinder be located in the described area of observation coverage and the axis on the described face of cylinder and described sprue axis weight
Close, the bottom surface of described micro-fluidic chip is plane.
Further, described main measurement light source and described subsidiary light source are laser instrument, described system call interception light source
For collimator.
In addition, present invention also offers a kind of measuring method of single-particle beam scattered light intensity distribution, the method includes as follows
Step：
(1) configuration system call interception light source, 90 ° of off-axis parabolic mirrors, optical screen and three axles adjust tool, and described 90 ° from axle
Parabolic mirror and described three axles adjust tool and are located along the same line, and described system call interception light source is with described 90 ° from axle parabolic
The optical axis of face reflecting mirror is parallel, and described optical screen is arranged on described three axles and adjusts tool above and be located at described 90 ° of off axis paraboloid mirrors reflection
The focal point of mirror；
(2) configuration PMT detector and oscillograph, described PMT detector is located at the right side that described three axles adjust tool, will be described
PMT detector is connected with described oscillograph, adjusts position and the direction of described PMT detector according to described oscillographic reading,
Described PMT detector is made to be directed at the focus of described 90 ° of off-axis parabolic mirrors；
(3) remove described optical screen, adjust in described three axles and micro-fluidic chip, the observation of described micro-fluidic chip are installed on tool
Facing to described 90 ° of off-axis parabolic mirrors, the area of observation coverage of described micro-fluidic chip and described 90 ° of off-axis parabolic mirrors
Optical axis in sustained height, adjust the position that tool adjusts the X-axis, Y-axis and Z axis of described micro-fluidic chips, root by described three axles
According to described oscillographic reading, the output signal of described PMT detector is made to reach maximum, after the completion of regulation, described micro-fluidic
Chip is located at the focal point of described 90 ° of off-axis parabolic mirrors；
(4) remove described system call interception light source and configure main measurement light source and spectroscope, described spectroscope is located at described master
Between measurement light source and described 90 ° of off-axis parabolic mirrors, the laser of described main measurement light source transmitting is divided by described spectroscope
For main optical path and reference path, described main optical path, described main measurement light source, described 90 ° of off-axis parabolic mirrors and described three
Axle adjusts tool and is located along the same line, and described reference path is vertical with described main optical path；
(5) adjust position and the direction of described main measurement light source according to described oscillographic reading, make described PMT detector
Output signal reach maximum, complete described main measurement light source and described 90 ° of off-axis parabolic mirrors and described micro-fluidic
The be aligned of chip is adjusted；
(6) configuration PIN pipe, described PIN pipe is located in described spectroscopical described reference path, manages described PIN simultaneously
It is connected with described oscillograph, with the light-intensity variation of the main laser of measurement light source transmitting main described in real-time monitoring；
(7) configure subsidiary light source, described subsidiary light source is located at the left side that described three axles adjust tool, adjust described
The position of subsidiary light source and direction so as to the auxiliary laser of transmitting is irradiated on the area of observation coverage of described micro-fluidic chip, and
Point of irradiation is slightly above the point of irradiation of described main measurement light source, so that described PMT detector receives by described micro-fluidic chip
The auxiliary laser by the transmitting of described subsidiary light source of scattering；
(8) adjust in described PMT detector and described three axles and configure composite filter mating plate between tool, adjust described composite filter
The position of piece and the height of described subsidiary light source, make described PMT detector be simultaneously received and are dissipated by described microflow hole chip
The described main laser by described main measurement light source transmitting penetrated and the described auxiliary laser of described subsidiary light source transmitting；
(9) configure miniflow pump, described miniflow pump is connected with described micro-fluidic chip, sheath fluid by described miniflow pump via
The sheath fluid input hole of described micro-fluidic chip pumps into described micro-fluidic chip, and sample liquid passes through described miniflow pump via described miniflow
The sample liquid input hole of control chip pumps in described micro-fluidic chip, and described sheath fluid surrounds described sample liquid, and limits described sample
The flowing of product liquid, so that described sample liquid becomes single-particle beam；
(10) when described sample liquid flows through the area of observation coverage of described micro-fluidic chip, according to two of display on described oscillograph
The distance of the light hole of the time difference of individual adjacent peak and described composite filter mating plate calculates the flow velocity of described sample liquid；
(11) configuration signal detects and circuit and ICCD detector occurs, and visits described PMT detector, described signal successively
Survey and occur circuit and described ICCD detector to connect, the receiving plane of described ICCD detector is anti-with described 90 ° of off axis paraboloid mirrors
The optical axis penetrating mirror is vertical, and described PMT detector sends light intensity signal and to described signal detection and circuit, described signal detection occurs
And occur circuit to send detection trigger to described ICCD detector, in order to start described ICCD detector, and described signal
Detect and occur time difference from the described light intensity signal of reception to transmission described detection trigger for the circuit by described sample
The flow velocity of liquid determines；
(12) configuration telescope microscope group, diaphragm and optical filter, described telescope microscope group, described diaphragm, described optical filter and
Described ICCD detector is sequentially located on same straight line, the light of described telescope microscope group and described 90 ° of off-axis parabolic mirrors
Axle is parallel and towards described 90 ° of off-axis parabolic mirrors, and described ICCD detector is connected with computer, and described ICCD detects
Device obtains the scattering pattern of sample microgranule in described sample liquid, and the scattering pattern of described sample microgranule is sent to described calculating
Machine；
(13) manually feed trigger to start described ICCD detector, thus obtaining background patterns and by described background
Pattern sends to described computer；
(14) intensity of the scattering pattern with described sample microgranule for the described computer deducts the intensity of described background patterns, obtains
Scattered light intensity distribution to single-particle beam.
Further, described micro-fluidic chip include annular sheath fluid input duct, linear sample liquid input duct and
Linear sprue, described linear sample liquid input duct and described linear sprue are located along the same line, described circle
Annular sheath fluid input duct is symmetrical with regard to described straight line, and one end of described annular sheath fluid input duct is provided with sheath fluid input hole,
The other end of described annular sheath fluid input duct is connected with described linear sprue, and described sample liquid input duct is described
Sheath fluid input duct is surrounded and is connected with described sprue, and described sample liquid input duct is provided with sample liquid input hole, described
Sprue is provided with delivery outlet.
Further, the middle part of described sprue is the area of observation coverage of described micro-fluidic chip, the sight of described micro-fluidic chip
Survey face is the face of cylinder, the described face of cylinder be located in the described area of observation coverage and the axis on the described face of cylinder and described sprue axis weight
Close, the bottom surface of described micro-fluidic chip is plane.
Further, described sheath fluid is made up of silicone oil and paraffin oil, and the refractive index of described sheath fluid is equal to described micro-fluidic core
The refractive index of piece, described sample liquid adds deionized water dilution by particle samples solution to be measured and forms, and dilution volume ratio is 1:1000
～1:10000, described sheath fluid is immiscible with described sample liquid.
Further, the manufacture method of described micro-fluidic chip comprises the following steps：
A the structure of () runner to described micro-fluidic chip emulates, to determine the size of described runner；
B (), with silicon single crystal flake for the first substrate, the first negative optical cement is coated in described first substrate, negative to described first
The plane template of the optical cement and described first substrate observation layer by the Twi-lithography technique described micro-fluidic chip of making；
C () makes the semi-cylindrical template of described observation layer with acrylic material, with the plane template of described observation layer and
Semi-cylindrical template carries out reverse mould to the first polydimethylsiloxane, and carries out baking and solidification and remove the flat of described observation layer
Face die plate and semi-cylindrical template, obtain the observation layer of described micro-fluidic chip；
D (), with silicon single crystal flake for the second substrate, the second negative optical cement is coated in described second substrate, negative to described second
The template of the optical cement and described second substrate bottom by the Twi-lithography technique described micro-fluidic chip of making；
E () carries out reverse mould with the template of described bottom to the second polydimethylsiloxane, and carry out baking and solidification and go
Except the template of described bottom, obtain the bottom of described micro-fluidic chip；
F () carries out ozone process and sealing to described bottom and described observation layer in the presence of ultraviolet, obtain complete
Described micro-fluidic chip.
The beneficial effects of the present invention is：The micro-fluidic chip of the present invention is focused on by three dimensional fluid, so that sample stream is become
Cylindrical fluid is it is achieved that the structure of single-particle beam environment and being accurately positioned；The inspection surface of micro-fluidic chip is in cylinder, reduces
Light is in chip-impact to measurement result for Air Interface refraction.Further, since present invention employs by 90 ° of off axis paraboloid mirrors
Reflecting mirror, the light-receiving assembly of telescope microscope group, diaphragm and optical filter composition, thus include large-scale scattered light measurement angle
Degree；Present invention employs subsidiary light source, composite filter mating plate, PMT detector, oscillograph it is achieved thereby that flowing through micro-fluidic core
Real-time, the accurate measurement of the scattered light intensity distribution of the single microgranule of piece.
Brief description
Fig. 1 is in measuring phases, the schematic top plan view of the measurement apparatus of single-particle beam scattered light intensity distribution of the present invention.
Fig. 2 is in the metamorphosis stage, the schematic top plan view of the measurement apparatus of particle beam scattered light intensity distribution of the present invention.
Fig. 3 is in measuring phases, the composite filter mating plate of the present invention, PMT detector and oscillographic connection diagram.
Fig. 4 is the structural representation of an angle of micro-fluidic chip of the present invention.
Fig. 5 is the structural representation of another angle of micro-fluidic chip of the present invention.
Fig. 6 is the flow chart of the measuring method of single-particle beam scattered light intensity distribution of the present invention.
Fig. 7 is the flow chart of the manufacture method of micro-fluidic chip of the present invention.
Specific embodiment
In order to preferably explain the present invention, it is further elucidated with the main contents of the present invention below in conjunction with specific embodiment, but
Present disclosure is not limited solely to following examples.
With reference to Fig. 1-3, the measurement apparatus of the single-particle beam scattered light intensity distribution of the present embodiment include：Including light source, light splitting
Light path, light-receiving and probe assembly and micro-fluidic chip assembly.
Specifically, described light source includes main measurement light source 10, subsidiary light source 11 and system call interception light source 12.Described point
Light light path includes spectroscope 20 and PIN pipe 21.Described light-receiving and probe assembly include 90 ° of off-axis parabolic mirrors 30, hope
Remote mirror microscope group 31, diaphragm 32, optical filter 33, ICCD detector 34, signal detection and generation circuit 35, composite filter mating plate 36, PMT
Detector 37, oscillograph 38 and computer 39.Described micro-fluidic chip assembly includes micro-fluidic chip 40, optical screen 41, three axles tune
Section tool 42 and miniflow pump 43.
Wherein, described main measurement light source 10, described spectroscope 20, described 90 ° of off-axis parabolic mirrors 30 and described three
Axle adjusts tool 42 and is successively set in same first straight line, and the laser that described main measurement light source 10 is launched is divided by described spectroscope 20
For main optical path and reference path, described main optical path is overlapped with described first straight line, and described reference path is vertical with described main optical path,
Described PIN pipe 21 be located at described reference path on, described system call interception light source 12, described telescope microscope group 31, described diaphragm 32,
Described optical filter 33 and described ICCD detector 34 are successively set in same second straight line, described system call interception light source 12 and institute
State the parabola of 90 ° of off-axis parabolic mirrors 30 relatively, described optical screen (not shown) is arranged on described three axles and adjusts on tool 42
And the focal point positioned at described 90 ° of off-axis parabolic mirrors 30, described micro-fluidic chip 40 is arranged on described three axles and adjusts to be had
In 42, described miniflow pump 43 is connected with described micro-fluidic chip 40, and described subsidiary light source 11 is located at described micro-fluidic chip
40 left side, described composite filter mating plate 36 and described PMT detector 37 are sequentially arranged in the right side of described micro-fluidic chip 40, described
PIN pipe 21, described oscillograph 38, described PMT detector 37, described signal detection and generation circuit 35, described ICCD detector
34 and described computer 39 be sequentially connected.
Further, described main measurement light source 10 and described subsidiary light source 11 are laser instrument, described system call interception
Light source 12 is collimator.Described main measurement light source 10 is different with the wavelength of described subsidiary light source 11.Described main measurement light
Source 10 is provided with main measurement light source and adjusts tool 10a, and described system call interception light source 12 is provided with system call interception light source and adjusts tool 12a, institute
State PIN pipe 21 and be provided with PIN pipe and adjust and have 21a, described composite filter mating plate 36 is provided with composite filter mating plate and adjusts tool 36a, described PMT visits
Survey device 37 and be provided with PMT detector and adjust and have 37a.
In detail, with reference to Fig. 4-5, described micro-fluidic chip 40 includes annular sheath fluid input duct 401, linear sample
Liquid input duct 402 and linear sprue 403, described linear sample liquid input duct 402 and described linear sprue
403 are located along the same line, and described annular sheath fluid input duct 401 is symmetrical with regard to described straight line, and described annular sheath fluid is defeated
One end of air stream enter runner 401 is provided with sheath fluid input hole (not shown), the other end of described annular sheath fluid input duct 401 with described
Linear sprue 403 connects, described sample liquid input duct 402 surrounded by described sheath fluid input duct 401 and with described master
Runner 403 connects, and described sample liquid input duct 402 is provided with sample liquid input hole (not shown), and described sprue 403 sets
There is delivery outlet (not shown).In a preferred embodiment, the diameter of described sample liquid input duct 402 and described sheath fluid inlet flow
Road 401 diameter is respectively less than the diameter of described sprue 403.Wherein, described sheath fluid is made up of silicone oil and paraffin oil, described sheath fluid
Refractive index is equal to the refractive index of described micro-fluidic chip 40, and described sample liquid adds deionized water dilution by particle samples solution to be measured
Form, dilution volume ratio is 1:1000～1:10000, described sheath fluid is immiscible with described sample liquid.
Further, the middle part of described sprue 403 is the area of observation coverage C of described micro-fluidic chip 40, described micro-fluidic core
The inspection surface of piece is the face of cylinder, and the described face of cylinder is located in described area of observation coverage C, the axis on the described face of cylinder and described sprue
403 dead in line, the bottom surface of described micro-fluidic chip 40 is plane.
With reference to Fig. 6-7, the measuring method of the single-particle beam scattered light intensity distribution of the present embodiment includes：
Step S1：Configuration 12,90 ° of off-axis parabolic mirrors 30 of system call interception light source, optical screen (not shown) and three axles are adjusted
Section tool 42, described 90 ° of off-axis parabolic mirrors 30 and described three axles adjust tool 42 and are located along the same line, described system call interception
Light source 12 is parallel with the optical axis of described 90 ° of off-axis parabolic mirrors 30, and described optical screen is arranged on described three axles and adjusts on tool 42
And it is located at the focal point of described 90 ° of off-axis parabolic mirrors 30；
Step S2：Configuration PMT detector 37 and oscillograph 38, described PMT detector 37 is located at described three axles and adjusts tool 42
Right side, described PMT detector 37 is connected with described oscillograph 38, described PMT is adjusted according to the reading of described oscillograph 38
The position of detector 37 and direction, make described PMT detector 37 be directed at the focus of described 90 ° of off-axis parabolic mirrors 30；
Step S3：Remove described optical screen, adjust in described three axles and micro-fluidic chip 40, described micro-fluidic core are installed on tool 42
The inspection surface of piece 40 towards described 90 ° of off-axis parabolic mirrors 30, the area of observation coverage C of described micro-fluidic chip 40 with described 90 °
The optical axis of off-axis parabolic mirror 30, in sustained height, adjusts the tool 42 described micro-fluidic chip 40 of regulation by described three axles
The position of X-axis, Y-axis and Z axis, according to the reading of described oscillograph 38, makes the output signal of described PMT detector 37 reach greatly
Value, after the completion of regulation, described micro-fluidic chip 40 is located at the focal point of described 90 ° of off-axis parabolic mirrors 30；
Step S4：Remove described system call interception light source 12 and configure main measurement light source 10 and spectroscope 20, described spectroscope
20 are located between described main measurement light source 10 and described 90 ° of off-axis parabolic mirrors 30, and described spectroscope 20 is by described main survey
The laser of amount light source 10 transmitting is divided into main optical path and reference path, described main optical path, described main measurement light source 10, described 90 ° from
Axle parabolic mirror 30 and described three axles adjust tool 42 and are located along the same line, and described reference path is hung down with described main optical path
Directly；
Step S5：Reading according to described oscillograph 38 adjusts position and the direction of described main measurement light source 10, makes described
The output signal of PMT detector 37 reaches maximum, completes described main measurement light source 10 and described 90 ° of off-axis parabolic mirrors
30 and described micro-fluidic chip 40 be aligned adjust；
Step S6：Configuration PIN pipe 21, described PIN pipe 21 is located in the described reference path of described spectroscope 20, will simultaneously
Described PIN pipe 21 is connected with described oscillograph 38, with the light high-amplitude wave of the main laser of measurement light source 10 transmitting main described in real-time monitoring
Dynamic；
Step S7：Configuration subsidiary light source 11, described subsidiary light source 11 is located at the left side that described three axles adjust tool 42
Side, the position of the described subsidiary light source 11 of regulation and direction are so as to the auxiliary laser of transmitting is irradiated to described micro-fluidic chip
On 40 area of observation coverage C, and point of irradiation is slightly above the point of irradiation of described main measurement light source 10, so that described PMT detector 37 connects
Receive the auxiliary laser launched by described subsidiary light source 11 being scattered by described micro-fluidic chip 40；
Step S8：Adjust in described PMT detector 37 and described three axles and configure composite filter mating plate 36 between tool 42, adjust institute
State the position of composite filter mating plate 36 and the height of described subsidiary light source 11, make described PMT detector 37 be simultaneously received by
The described main laser launched by described main measurement light source 10 of described microflow hole chip 40 scattering and described subsidiary light source 11
The described auxiliary laser of transmitting；
Step S9：Configuration miniflow pump 43, described miniflow pump 43 is connected with described micro-fluidic chip 40, and sheath fluid passes through described
Miniflow pump 43 pumps into described micro-fluidic chip 40 via the sheath fluid input hole of described micro-fluidic chip 40, and sample liquid is passed through described micro-
Stream pump 43 pumps in described micro-fluidic chip 40 via the sample liquid input hole of described micro-fluidic chip 40, and described sheath fluid surrounds institute
State sample liquid, and limit the flowing of described sample liquid, so that described sample liquid becomes single-particle beam；
Step S10：When described sample liquid flows through the area of observation coverage of described micro-fluidic chip 40, according on described oscillograph 38
The distance of the light hole of the time difference of two adjacent peak of display and described composite filter mating plate 36 calculates described sample liquid
Flow velocity；
Step S11：Configuration signal detects and circuit 35 and ICCD detector 34 occurs, successively by described PMT detector 37,
Described signal detection and occur circuit 35 and described ICCD detector 34 to connect, the receiving plane of described ICCD detector 34 with described
The optical axis of 90 ° of off-axis parabolic mirrors 30 is vertical, and described PMT detector 37 sends light intensity signal and to described signal detection and sends out
Raw circuit 35, described signal detection and generation circuit 35 send and detect trigger to described ICCD detector 34, in order to start
Described ICCD detector 34, described signal detection and generation circuit 35 trigger to sending described detection from the described light intensity signal of reception
Time difference between signal is determined by the flow velocity of described sample liquid；
Step S12：Configuration telescope microscope group 31, diaphragm 32 and optical filter 33, described telescope microscope group 31, described diaphragm
32nd, described optical filter 33 and described ICCD detector 34 are sequentially located on same straight line, described telescope microscope group 31 with described 90 °
The optical axis of off-axis parabolic mirror 30 is parallel and towards described 90 ° of off-axis parabolic mirrors 30, by described ICCD detector
34 are connected with computer 39, and described ICCD detector 34 obtains the scattering pattern of sample microgranule in described sample liquid, and will be described
The scattering pattern of sample microgranule sends to described computer 39；
Step S13：Manually feed trigger to start described ICCD detector 34, thus obtaining background patterns and by institute
State background patterns to send to described computer 39；
Step S14：The intensity of the scattering pattern with described sample microgranule for the described computer 39 deducts described background patterns
Intensity, obtains the scattered light intensity distribution of single-particle beam.
Specifically, with reference to Fig. 7, the manufacture method of described micro-fluidic chip 40 comprises the following steps：
A the structure of () runner to described micro-fluidic chip 40 emulates, to determine the size of described runner；
B (), with silicon single crystal flake for the first substrate 50, the first negative optical cement 51 is coated in described first substrate 51, to described
First negative optical cement 51 and described first substrate 50 are by the observation layer 53 of the Twi-lithography technique described micro-fluidic chip 40 of making
Plane template；
C () makes the semi-cylindrical template of described observation layer 53 with acrylic material, with the plane mould of described observation layer 53
Plate and semi-cylindrical template carry out reverse mould to the first polydimethylsiloxane 52, and carry out baking and solidification and remove described observation
The plane template of layer 53 and semi-cylindrical template, obtain the observation layer 53 of described micro-fluidic chip 40；
D (), with silicon single crystal flake for the second substrate 60, the second negative optical cement 61 is coated in described second substrate 60, to described
The mould of the second negative optical cement 61 and described second substrate 60 bottom 63 by the Twi-lithography technique described micro-fluidic chip 40 of making
Plate；
E () carries out reverse mould with the template of described bottom 63 to the second polydimethylsiloxane 62, and carry out baking and solidification
And the template of the described bottom 63 of removal, obtain the bottom 63 of described micro-fluidic chip 40；
F () carries out ozone process and sealing to described observation layer 53 and described bottom 63 in the presence of ultraviolet, obtain
Complete described micro-fluidic chip 40.
Other unspecified parts are prior art.Although above-described embodiment is made that to the present invention and retouches in detail
State, but it be only a part of embodiment of the present invention, rather than whole embodiments, people can also according to the present embodiment without
Other embodiment is obtained, these embodiments broadly fall into the scope of the present invention under the premise of creativeness.
Claims (10)
1. a kind of measurement apparatus of single-particle beam scattered light intensity distribution, it includes light source, light splitting optical path, light-receiving and probe assembly
And micro-fluidic chip assembly it is characterised in that：
Described light source includes main measurement light source (10), subsidiary light source (11) and system call interception light source (12)；
Described light splitting optical path includes spectroscope (20) and PIN pipe (21)；
Described light-receiving and probe assembly include 90 ° of off-axis parabolic mirrors (30), telescope microscope group (31), diaphragm (32),
Optical filter (33), ICCD detector (34), signal detection and generation circuit (35), composite filter mating plate (36), PMT detector
(37), oscillograph (38) and computer (39)；
Described micro-fluidic chip assembly includes micro-fluidic chip (40), optical screen, three axles regulation tool (42) and miniflow pump (43)；
Wherein, described main measurement light source (10), described spectroscope (20), described 90 ° of off-axis parabolic mirrors (30) and described
Three axles adjust tool (42) and are successively set in same first straight line, and described main measurement light source (10) is launched by described spectroscope (20)
Laser be divided into main optical path and reference path, described main optical path is overlapped with described first straight line, described reference path and described master
Light path is vertical, and described PIN pipe (21) is located in described reference path, described system call interception light source (12), described telescope microscope group
(31), described diaphragm (32), described optical filter (33) and described ICCD detector (34) are successively set in same second straight line,
Described system call interception light source (12) is relative with the parabola of described 90 ° of off-axis parabolic mirrors (30), and described optical screen is arranged on
Described three axles adjust on tool (42) and are located at the focal point of described 90 ° of off-axis parabolic mirrors (30), described micro-fluidic chip
(40) it is arranged on described three axles to adjust in tool (42), described miniflow pump (43) is connected with described micro-fluidic chip (40), described auxiliary
Measurement light source (11) is helped to be located at left side, described composite filter mating plate (36) and the described PMT detector of described micro-fluidic chip (40)
(37) it is sequentially arranged in the right side of described micro-fluidic chip (40), described PIN pipe (21), described oscillograph (38), described PMT detect
Device (37), described signal detection and generation circuit (35), described ICCD detector (34) and described computer (39) are sequentially connected.
2. the measurement apparatus of single-particle beam scattered light intensity as claimed in claim 1 distribution are it is characterised in that described micro-fluidic core
Piece (40) includes annular sheath fluid input duct (401), linear sample liquid input duct (402) and linear sprue
(403), described linear sample liquid input duct (402) and described linear sprue (403) are located on same 3rd straight line,
Described annular sheath fluid input duct (401) is symmetrical with regard to described 3rd straight line, described annular sheath fluid input duct (401)
One end is provided with sheath fluid input hole, the other end of described annular sheath fluid input duct (401) and described linear sprue (403)
Connection, described sample liquid input duct (402) is surrounded and connected with described sprue (403) by described sheath fluid input duct (401)
Logical, described sample liquid input duct (402) is provided with sample liquid input hole, and described sprue (403) is provided with delivery outlet.
3. the measurement apparatus of single-particle beam scattered light intensity distribution as claimed in claim 2 are it is characterised in that described sample liquid is defeated
The diameter of air stream enter runner (402) and described sheath fluid input duct (401) is respectively less than the diameter of described sprue (403).
4. the measurement apparatus of single-particle beam scattered light intensity as claimed in claim 2 distribution are it is characterised in that described sprue
(403) middle part is the area of observation coverage (C) of described micro-fluidic chip (40), and the inspection surface of described micro-fluidic chip (40) is cylinder
Face, the described face of cylinder be located in the described area of observation coverage (C) and the axis on the described face of cylinder and described sprue (403) axis weight
Close, the bottom surface of described micro-fluidic chip (40) is plane.
5. the measurement apparatus of single-particle beam scattered light intensity as claimed in claim 1 distribution are it is characterised in that described main measurement light
Source (10) and described subsidiary light source (11) are laser instrument, and described system call interception light source (12) is collimator.
6. a kind of measurement apparatus using the single-particle beam scattered light intensity distribution any one of claim 1-5 carry out simple grain
The measuring method of beamlet scattered light intensity distribution is it is characterised in that comprise the following steps：
(1) configuration system call interception light source (12), 90 ° of off-axis parabolic mirrors (30), optical screen and three axles adjust tool (42), described
90 ° of off-axis parabolic mirrors (30) and described three axles adjust tool (42) and are located along the same line, described system call interception light source
(12) parallel with the optical axis of described 90 ° of off-axis parabolic mirrors (30), described optical screen is arranged on described three axles and adjusts tool (42)
Focal point that is upper and being located at described 90 ° of off-axis parabolic mirrors (30)；
(2) configuration PMT detector (37) and oscillograph (38), described PMT detector (37) is located at described three axles and adjusts tool (42)
Right side, described PMT detector (37) is connected with described oscillograph (38), institute is adjusted according to the reading of described oscillograph (38)
State position and the direction of PMT detector (37), make described PMT detector (37) be directed at described 90 ° of off-axis parabolic mirrors
(30) focus；
(3) remove described optical screen, adjust tool (42) upper installation micro-fluidic chip (40), described micro-fluidic chip in described three axles
(40) inspection surface towards described 90 ° of off-axis parabolic mirrors (30), the area of observation coverage of described micro-fluidic chip (40) with described
The optical axis of 90 ° of off-axis parabolic mirrors (30), in sustained height, adjusts tool (42) regulation by described three axles described micro-fluidic
The position of the X-axis, Y-axis and Z axis of chip (40), according to the reading of described oscillograph (38), makes the defeated of described PMT detector (37)
Go out signal and reach maximum, after the completion of regulation, described micro-fluidic chip (40) is located at described 90 ° of off-axis parabolic mirrors (30)
Focal point；
(4) remove described system call interception light source (12) and configure main measurement light source (10) and spectroscope (20), described spectroscope
(20) it is located between described main measurement light source (10) and described 90 ° of off-axis parabolic mirrors (30), described spectroscope (20) will
The laser that described main measurement light source (10) is launched is divided into main optical path and reference path, described main optical path, described main measurement light source
(10), described 90 ° of off-axis parabolic mirrors (30) and described three axles adjust tool (42) and are located along the same line, described reference light
Road is vertical with described main optical path；
(5) reading according to described oscillograph (38) adjusts position and the direction of described main measurement light source (10), so that described PMT is visited
The output signal surveying device (37) reaches maximum, completes described main measurement light source (10) and described 90 ° of off-axis parabolic mirrors
(30) and described micro-fluidic chip (40) be aligned adjust；
(6) configuration PIN pipe (21), described PIN pipe (21) is located in the described reference path of described spectroscope (20), simultaneously by institute
State PIN pipe (21) to be connected with described oscillograph (38), the light of the main laser launched with measurement light source (10) main described in real-time monitoring
High-amplitude wave moves；
(7) configuration subsidiary light source (11), described subsidiary light source (11) is located at the left side that described three axles adjust tool (42),
Adjust the position of described subsidiary light source (11) and direction so as to the auxiliary laser of transmitting is irradiated to described micro-fluidic chip
(40) on the area of observation coverage (C), and point of irradiation is slightly above the point of irradiation of described main measurement light source (10), so that described PMT detects
Device (37) receives the auxiliary laser launched by described subsidiary light source (11) being scattered by described micro-fluidic chip (40)；
(8) adjust configuration composite filter mating plate (36) between tool (42) in described PMT detector (37) and described three axles, adjust described
The position of composite filter mating plate (36) and the height of described subsidiary light source (11), make described PMT detector (37) receive simultaneously
Surveyed to being scattered by described microflow hole chip (40) by described main measurement light source (10) the described main laser launched and described auxiliary
The described auxiliary laser that amount light source (11) is launched；
(9) configuration miniflow pump (43), described miniflow pump (43) is connected with described micro-fluidic chip (40), and sheath fluid passes through described micro-
Stream pump (43) pumps into described micro-fluidic chip (40) via the sheath fluid input hole of described micro-fluidic chip (40), and sample liquid passes through institute
State miniflow pump (43) and pump in described micro-fluidic chip (40) via the sample liquid input hole of described micro-fluidic chip (40), described
The sheath fluid described sample liquid of encirclement, and limit the flowing of described sample liquid, so that described sample liquid becomes single-particle beam；
(10) when described sample liquid flows through the area of observation coverage of described micro-fluidic chip (40), according to the upper display of described oscillograph (38)
The time difference of two adjacent peak and the distance of light hole of described composite filter mating plate (36) calculate the stream of described sample liquid
Speed；
(11) configuration signal detects and circuit (35) and ICCD detector (34) occurs, successively by described PMT detector (37), institute
State signal detection and occur circuit (35) and described ICCD detector (34) connect, the receiving plane of described ICCD detector (34) and
The optical axis of described 90 ° of off-axis parabolic mirrors (30) is vertical, and described PMT detector (37) sends light intensity signal to described signal
Detect and occur circuit (35), described signal detection and generation circuit (35) to send and detect trigger to described ICCD detector
(34), in order to start described ICCD detector (34), and described signal detection and generation circuit (35) are from reception described light intensity letter
Number to send described detect trigger between time difference by described sample liquid flow velocity determine；
(12) configuration telescope microscope group (31), diaphragm (32) and optical filter (33), described telescope microscope group (31), described diaphragm
(32), described optical filter (33) and described ICCD detector (34) are sequentially located on same straight line, described telescope microscope group (31)
Parallel with the optical axis of described 90 ° of off-axis parabolic mirrors (30) and towards described 90 ° of off-axis parabolic mirrors (30), by institute
State ICCD detector (34) to be connected with computer (39), described ICCD detector (34) obtains sample microgranule in described sample liquid
Scattering pattern, and the scattering pattern of described sample microgranule is sent to described computer (39)；
(13) manually feed trigger to start described ICCD detector (34), thus obtaining background patterns and by described background
Pattern sends to described computer (39)；
(14) intensity of the scattering pattern with described sample microgranule for the described computer (39) deducts the intensity of described background patterns, obtains
Scattered light intensity distribution to single-particle beam.
7. the measuring method of single-particle beam scattered light intensity as claimed in claim 6 distribution is it is characterised in that described micro-fluidic core
Piece (40) includes annular sheath fluid input duct (401), linear sample liquid input duct (402) and linear sprue
(403), described linear sample liquid input duct (402) and described linear sprue (403) are located along the same line, described
Annular sheath fluid input duct (401) is symmetrical with regard to described straight line, and one end of described annular sheath fluid input duct (401) is provided with
Sheath fluid input hole, the other end of described annular sheath fluid input duct (401) is connected with described linear sprue (403), institute
State sample liquid input duct (402) to be surrounded and connected with described sprue (403) by described sheath fluid input duct (401), described
Sample liquid input duct (402) is provided with sample liquid input hole, and described sprue (403) is provided with delivery outlet.
8. the measuring method of single-particle beam scattered light intensity as claimed in claim 7 distribution is it is characterised in that described sprue
(403) middle part is the area of observation coverage (C) of described micro-fluidic chip (40), and the inspection surface of described micro-fluidic chip (40) is cylinder
Face, the described face of cylinder be located in the described area of observation coverage (C) and the axis on the described face of cylinder and described sprue (403) axis weight
Close, the bottom surface of described micro-fluidic chip (40) is plane.
9. the measuring method of single-particle beam scattered light intensity distribution as claimed in claim 6 is it is characterised in that described sheath fluid is by silicon
Oil and paraffin oil composition, the refractive index of described sheath fluid is equal to the refractive index of described micro-fluidic chip (40), and described sample liquid is by treating
Survey particle samples solution adds deionized water dilution and forms, and dilution volume ratio is 1:1000～1:10000, described sheath fluid and described sample
Product liquid is immiscible.
10. the measuring method of single-particle beam scattered light intensity as claimed in claim 6 distribution is it is characterised in that described micro-fluidic
The manufacture method of chip comprises the following steps：
A the structure of () runner to described micro-fluidic chip (40) emulates, to determine the size of described runner；
B (), with silicon single crystal flake for the first substrate (50), the first negative optical cement (51) is coated on described first substrate (50), to institute
State the sight that the first negative optical cement (51) and described first substrate (50) make described micro-fluidic chip (40) by Twi-lithography technique
Survey the plane template of layer (53)；
C () makes the semi-cylindrical template of described observation layer (53) with acrylic material, with the plane mould of described observation layer (53)
Plate and semi-cylindrical template carry out reverse mould to the first polydimethylsiloxane (52), and carry out baking and solidification and remove described sight
Survey plane template and the semi-cylindrical template of layer (53), obtain the observation layer (53) of described micro-fluidic chip (40)；
D (), with silicon single crystal flake for the second substrate (60), the second negative optical cement (61) is coated on described second substrate (60), to institute
State the bottom that the second negative optical cement (61) and described second substrate (60) make described micro-fluidic chip (40) by Twi-lithography technique
The template of layer (63)；
E () carries out reverse mould with the template of described bottom (63) to the second polydimethylsiloxane (62), and carry out baking and solidification
And the template of the described bottom of removal (63), obtain the bottom (63) of described micro-fluidic chip (40)；
F () carries out ozone process and sealing to described observation layer (53) and described bottom (63) in the presence of ultraviolet, obtain
Complete described micro-fluidic chip (40).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108956391A (en) * | 2018-06-12 | 2018-12-07 | 西安理工大学 | The survey meter and detection method of the gentle aerosol particle size Spectral structure of droplet in atmospheric sounding |
| CN112014418A (en) * | 2020-08-13 | 2020-12-01 | 北京大学 | Off-axis reflecting mirror assembly and method for collecting and coupling electron beam excited fluorescence |
| CN113433042A (en) * | 2021-06-25 | 2021-09-24 | 国家纳米科学中心 | Nanoparticle detection microfluidic chip and application |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5872627A (en) * | 1996-07-30 | 1999-02-16 | Bayer Corporation | Method and apparatus for detecting scattered light in an analytical instrument |
| US6252658B1 (en) * | 1998-10-16 | 2001-06-26 | Horiba, Ltd. | Particle size distribution measuring apparatus |
| US20020041376A1 (en) * | 2000-10-11 | 2002-04-11 | Horiba, Ltd. | Light scattering particle size distribution measuring apparatus and method of use |
| CN1987420A (en) * | 2006-12-30 | 2007-06-27 | 清华大学 | Microflow control chip device for multiple function detecting single particle matter |
| CN101644703A (en) * | 2008-08-08 | 2010-02-10 | 索尼株式会社 | Micro-fluidic chip, micro-particle sorting device and flow controlling method |
| US20110189714A1 (en) * | 2010-02-03 | 2011-08-04 | Ayliffe Harold E | Microfluidic cell sorter and method |
| US20130016335A1 (en) * | 2011-07-12 | 2013-01-17 | Lo Yu-Hwa | Optical space-time coding technique in microfluidic devices |
| KR20130079799A (en) * | 2012-01-03 | 2013-07-11 | 한국과학기술원 | Fabrication method of uniform submicron droplets and polymeric monodiperse particles using microfluidic flow-focusing devices with three-dimensional topography |
| CN105136744A (en) * | 2015-08-07 | 2015-12-09 | 华中科技大学 | Single particle scattering measurement apparatus based on microfluidic chip particle capturing |
| CN105136743A (en) * | 2015-08-07 | 2015-12-09 | 华中科技大学 | Single particle scattering measurement method based on microfluidic chip particle capturing |
| CN206132579U (en) * | 2016-09-22 | 2017-04-26 | 华中农业大学 | Measurement device for single -particle is restrainted scattering light intensity and is distributed |
-
2016
- 2016-09-22 CN CN201610840673.7A patent/CN106442278B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5872627A (en) * | 1996-07-30 | 1999-02-16 | Bayer Corporation | Method and apparatus for detecting scattered light in an analytical instrument |
| US6252658B1 (en) * | 1998-10-16 | 2001-06-26 | Horiba, Ltd. | Particle size distribution measuring apparatus |
| US20020041376A1 (en) * | 2000-10-11 | 2002-04-11 | Horiba, Ltd. | Light scattering particle size distribution measuring apparatus and method of use |
| CN1987420A (en) * | 2006-12-30 | 2007-06-27 | 清华大学 | Microflow control chip device for multiple function detecting single particle matter |
| CN101644703A (en) * | 2008-08-08 | 2010-02-10 | 索尼株式会社 | Micro-fluidic chip, micro-particle sorting device and flow controlling method |
| US20110189714A1 (en) * | 2010-02-03 | 2011-08-04 | Ayliffe Harold E | Microfluidic cell sorter and method |
| US20130016335A1 (en) * | 2011-07-12 | 2013-01-17 | Lo Yu-Hwa | Optical space-time coding technique in microfluidic devices |
| KR20130079799A (en) * | 2012-01-03 | 2013-07-11 | 한국과학기술원 | Fabrication method of uniform submicron droplets and polymeric monodiperse particles using microfluidic flow-focusing devices with three-dimensional topography |
| CN105136744A (en) * | 2015-08-07 | 2015-12-09 | 华中科技大学 | Single particle scattering measurement apparatus based on microfluidic chip particle capturing |
| CN105136743A (en) * | 2015-08-07 | 2015-12-09 | 华中科技大学 | Single particle scattering measurement method based on microfluidic chip particle capturing |
| CN206132579U (en) * | 2016-09-22 | 2017-04-26 | 华中农业大学 | Measurement device for single -particle is restrainted scattering light intensity and is distributed |
Non-Patent Citations (3)
| Title |
|---|
| NICOLE PAMME ET AL: "Counting and sizing of particles and particle agglomerates in a microfluidic device using laser light scattering: application to a particle-enhanced immunoassay" * |
| 丁驰竹等: "基于衍射层析理论的弱散射单颗粒粒径反演方法", 《光散射学报》 * |
| 徐佩锋等: "微流控芯片光散射检测仿真研究" * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108956391A (en) * | 2018-06-12 | 2018-12-07 | 西安理工大学 | The survey meter and detection method of the gentle aerosol particle size Spectral structure of droplet in atmospheric sounding |
| CN108956391B (en) * | 2018-06-12 | 2021-02-12 | 西安理工大学 | Detector and detection method for detecting particle size spectrum distribution of fog drops and aerosol in atmosphere |
| CN112014418A (en) * | 2020-08-13 | 2020-12-01 | 北京大学 | Off-axis reflecting mirror assembly and method for collecting and coupling electron beam excited fluorescence |
| CN113433042A (en) * | 2021-06-25 | 2021-09-24 | 国家纳米科学中心 | Nanoparticle detection microfluidic chip and application |
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|---|---|
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