CN114280327B - High-sensitivity acceleration measurement method and sensor based on optical fiber optical tweezers - Google Patents
High-sensitivity acceleration measurement method and sensor based on optical fiber optical tweezers Download PDFInfo
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- CN114280327B CN114280327B CN202111525384.5A CN202111525384A CN114280327B CN 114280327 B CN114280327 B CN 114280327B CN 202111525384 A CN202111525384 A CN 202111525384A CN 114280327 B CN114280327 B CN 114280327B
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Abstract
The application discloses a high-sensitivity acceleration measurement method and a sensor based on optical fiber tweezers, which are used for applying certain fluid traction force to polystyrene microspheres captured by the optical tweezers, measuring the displacement of the polystyrene microspheres by a four-quadrant photoelectric detector and calibrating the relation between the displacement and the received power of the microspheres; when the microsphere is placed in an acceleration environment, the microsphere displacement caused by the environment acceleration is obtained according to the relation between the displacement of the calibrated microsphere and the received light power, the light power corresponding to the offset displacement caused by the environment acceleration is obtained, and then the environment acceleration is obtained by dividing the light power by the mass of the microsphere. The application utilizes the optical fiber optical tweezers technology and the microfluidic technology to stably capture the microspheres in the microfluidic channel in a non-contact manner, and selects the proper tapered optical fiber based on the finite difference numerical calculation of the time domain, thereby realizing the microminiaturization, high sensitivity, high precision and low cost measurement of the acceleration of the microspheres.
Description
Technical Field
The application belongs to the technical field of acceleration measurement, and particularly relates to a high-sensitivity acceleration measurement method and a sensor based on optical fiber optical tweezers.
Background
Light has energy and momentum, classical optics mainly takes electromagnetic radiation as a research object, and the development of modern optics takes the interaction of light and substances as important research content. The application of the laser in the 60 th century also makes the optical tweezers technology available. The optical tweezers technology is widely applied to aspects of actively controlling particles, capturing tiny particles, measuring tiny acting force, tiny devices and the like in recent modern practical application. The optical tweezers technology utilizes the radiation pressure effect of laser, and a three-dimensional potential well formed by a beam of highly converged laser can realize non-contact and non-damage accurate control on tiny particles (submicron to tens of microns). At present, the method is widely applied to the fields of physics, chemistry, medicine, life science, material science, nano technology and the like. The optical tweezers technology is widely applied to aspects of actively controlling particles, capturing tiny particles, measuring tiny acting force, tiny devices and the like in recent modern practical application.
Microfluidic refers to the science and technology involved in systems that use micro channels with dimensions of tens to hundreds of microns to process or manipulate micro fluids, and different micro processing methods are selected according to the materials used, the main processing methods being photolithography techniques from the microelectronics industry and soft lithography techniques with surface patterning, by which two materials after micro channels are etched, two materials are typically bonded by high temperature, high pressure or high voltage methods to make a complete microfluidic microchannel. Microfluidic technology is playing an increasingly important role in the application fields of organic synthesis, microreactors, chemical analysis, biomedicine and the like.
In the prior art, a scientist measures and researches atomic acceleration based on the action of optical power, a complex optical path structure is adopted, and miniaturization and low cost of a sensor are difficult to realize. And when the acceleration of atoms is detected, the acceleration caused by unbalanced force is difficult to accurately measure due to the fact that the mass and the volume of the atoms are too small.
Disclosure of Invention
The application mainly aims to overcome the defects and shortcomings of the prior art and provides a high-sensitivity acceleration measurement method based on optical fiber tweezers.
Another object of the present application is to provide a high-sensitivity acceleration sensor based on optical fiber tweezers, which uses the high-sensitivity acceleration measurement method based on optical fiber tweezers.
In order to achieve the above purpose, the present application adopts the following technical scheme:
the application provides a high-sensitivity acceleration measurement method based on optical fiber tweezers, which is characterized by comprising the following steps of:
introducing polystyrene microsphere suspension into the microfluidic channel by a liquid injection device;
forming optical tweezers by laser through a conical optical fiber, and capturing polystyrene microspheres flowing through a microfluidic channel;
stopping the liquid injection device, and enabling the polystyrene microspheres to form a light spot on the center of the target surface of the four-quadrant photoelectric detector under the action of the imaging system;
starting the liquid injection device, setting a certain range of flow speed, and applying fluid traction force to the polystyrene microspheres, wherein the polystyrene microspheres deviate from the center of the target surface of the four-quadrant photoelectric detector;
obtaining the magnitude of the corresponding fluid traction force according to the flow velocity, and measuring the deviation displacement of the polystyrene microsphere according to the relation coefficient of the output voltage, the voltage and the position of the known four-image photoelectric limit detector, so as to calibrate the corresponding relation between different deviation displacements and the magnitude of the fluid traction force or the optical power;
stopping the liquid injection device, and returning the polystyrene microspheres to the initial balance position;
when the polystyrene microsphere is in an acceleration environment, the polystyrene microsphere deviates from an initial balance position under the action of the environmental acceleration, the corresponding optical power of the deviation displacement caused by the environmental acceleration is obtained according to the corresponding relation between the different deviation displacements and the traction force or the optical power of the fluid, and the environmental acceleration is obtained by dividing the optical power by the mass of the polystyrene microsphere.
The application provides a high-sensitivity acceleration sensor based on optical fiber tweezers, which is applied to the high-sensitivity acceleration measuring method based on the optical fiber tweezers, and comprises a microfluidic channel substrate, a microfluidic channel top plate, a conical optical fiber, a laser, a liquid injection device, a catheter, an imaging system and a four-quadrant photoelectric detector;
the microfluidic channel substrate is fixedly connected with the microfluidic channel top plate; the micro-flow channel substrate is provided with an optical fiber groove and a micro-flow channel groove, and the tail end of the optical fiber groove is communicated with the micro-flow channel groove;
the liquid injection device is connected with the inlet of the microfluidic channel groove through a conduit, and polystyrene microsphere suspension is arranged in the liquid injection device;
the laser is connected with the conical optical fiber, the conical optical fiber is arranged in the optical fiber groove, and one end of the cone is close to the microfluidic channel groove;
the imaging system is used for imaging the polystyrene microspheres in the microfluidic channel to the target surface of the four-quadrant photoelectric detector;
the four-quadrant photoelectric detector is used for measuring displacement of the polystyrene microsphere in the microfluidic channel groove.
As an optimal technical scheme, the micro-flow channel top plate is connected with the micro-flow channel substrate in a manner of pressing by a hot press.
As an optimal technical scheme, the microfluidic channel top plate is provided with microfluidic holes serving as microfluidic channel outlet and inlet openings at positions corresponding to two ends of the microfluidic channel groove, and the liquid injection device is connected with the microfluidic holes through a conduit.
As an optimized technical scheme, the microfluidic channel substrate is provided with an optical fiber groove and a microfluidic channel groove, and the tail end of the optical fiber groove is communicated with the microfluidic channel groove, specifically:
two intersecting microfluidic channel grooves and an optical fiber groove are etched on the microfluidic channel substrate in a laser engraving mode, the optical fiber groove is arranged on an angular bisector of the intersecting microfluidic channel grooves, and one end of the optical fiber groove is communicated with an intersection point of the microfluidic channel grooves; the thickness of the microfluidic channel substrate is 1mm, and the depths of the optical fiber grooves and the microfluidic channel grooves are 125 mu m.
As a preferable technical scheme, the device also comprises an LED light source and a CCD imaging system, wherein the LED light source is used for observing the capturing condition of the polystyrene microspheres in the microfluidic channel groove.
As a preferable technical scheme, the tapered optical fiber and the laser are used for forming optical tweezers; the conical end face of the conical optical fiber is formed by a curveThe bottom surface of the conical end surface is 125 mu m in diameter and 1562.5 mu m in height, which is obtained by rotating around the x axis; the wavelength of the laser output laser is 980nm.
As a preferable technical scheme, the flow velocity range of the liquid output by the liquid injection device in the microfluidic channel groove is set to be 20-2000 mu m/s.
As a preferable technical scheme, the refractive index of the polystyrene microsphere is 1.615, and the diameter of the polystyrene microsphere is 50 μm.
As a preferable technical scheme, the imaging system comprises a 780nm laser and an imaging light path; the 780nm laser is used for outputting laser with the wavelength of 780nm and irradiating the polystyrene microsphere to generate scattered light; the imaging light path is used for focusing the scattered light spot and imaging the scattered light spot to a target surface of the four-quadrant photoelectric detector. Compared with the prior art, the application has the following advantages and beneficial effects:
(1) The application utilizes the optical fiber optical tweezers technology and the microfluidic technology to stably capture the microspheres in the microfluidic channel in a non-contact manner, thereby realizing microminiaturization, high sensitivity, high precision and low cost measurement of the acceleration of the microspheres.
(2) Based on time domain finite difference numerical calculation, the method selects a proper tapered optical fiber, captures the target microsphere by combining an optical fiber technology with an optical tweezers technology, and improves the measured precision value with weak and high precision by utilizing the optical power.
(3) The application captures the microsphere at a balance position by using the fiber optic tweezers technology. Compared with other means, the optical power precision value is higher, so that the measuring precision of the application is obviously higher than that of other existing products;
drawings
FIG. 1 is a flow chart of a high sensitivity acceleration measurement method based on fiber optic tweezers according to an embodiment of the present application;
FIG. 2 is a flow chart of tapered fiber drawing in accordance with an embodiment of the present application;
FIG. 3 is a schematic view of the configuration of the tapered end face of a tapered optical fiber according to an embodiment of the present application;
FIG. 4 is a schematic view of a micro-fluidic channel substrate according to an embodiment of the present application;
FIG. 5 is a schematic view of a micro-channel substrate and a micro-channel cover plate according to an embodiment of the present application;
FIG. 6 is a schematic diagram of a fiber optic tweezer capturing polystyrene microspheres in a microfluidic channel slot in an embodiment of the present application;
FIG. 7 is a schematic diagram of a fiber optic tweezers capturing polystyrene microspheres and imaging the polystyrene microspheres onto a four-quadrant photodetector target surface by an imaging device in an embodiment of the present application;
reference numerals illustrate: 11. an optical fiber; 12. a discharge tip of the optical fiber fusion splicer; 13. a tapered optical fiber; 21. a microfluidic channel substrate; 22. an optical fiber groove; 23. a microfluidic channel slot; 24. a laser engraving machine; 31. a microfluidic channel top plate; 41. a liquid injection device; 42. a conduit; 43. microflow holes; 44. polystyrene microspheres; 45. 980nm laser; 51. an LED light source; 52. a CCD imaging system; 53. a four-quadrant photodetector; 54. 780nm laser; 55. a beam splitting prism I; 56. a lens I; 57. a filter; 58. a beam-splitting prism II; 59. a lens II; 60. a lens three; 61. a lens four; .
Detailed Description
In order to enable those skilled in the art to better understand the present application, the following description will make clear and complete descriptions of the technical solutions according to the embodiments of the present application with reference to the accompanying drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
Examples
As shown in fig. 1, the present embodiment provides a high-sensitivity acceleration measurement method based on optical fiber tweezers, which includes the following steps:
s1, starting an LED light source and a CCD imaging system, and observing the environment in a microfluidic channel groove in real time;
s2, introducing polystyrene microsphere suspension into the microfluidic channel groove through a liquid injection device (an injection pump is adopted in the embodiment);
in this example, the initial flow rate was set to 100 μm/s and the diameter of the polystyrene microspheres was 50. Mu.m.
S3, forming optical tweezers by laser through a conical optical fiber, and capturing polystyrene microspheres flowing through a microfluidic channel;
in this embodiment, a laser with an output laser wavelength of 980nm and a power fixed at 20mW is used to connect a tapered optical fiber, where the tapered optical fiber is formed by drawing an end face of a single-mode optical fiber with a diameter of 125 μm by using a discharge tip of an optical fiber fusion splicer, and the end face is tapered to form a tapered end face as shown in fig. 4. The end face is obtained by FDTD simulation optimization, and the end face is formed by curvesRotation about the x-axis is obtained. The range of x value in the curve is 0-1562.5 mu m, the range of y value is 0-62.5 mu m, the end face can focus 980nm wavelength laser, and an optical tweezer potential well is formed at the focus.
S4, stopping the injection pump, wherein the polystyrene microsphere is positioned at an initial balance position, and forming a light spot on the center of the target surface of the four-quadrant photoelectric detector by the polystyrene microsphere under the action of an imaging system;
in the embodiment, a laser with the power fixed at 10 mu W and the output laser wavelength of 780nm is used as detection light, the four-quadrant photoelectric detector receives 780nm laser scattered from the microsphere and finely adjusts the position of the four-quadrant photoelectric detector, so that a scattered 780nm laser spot is positioned at the center of the four-quadrant photoelectric detector;
s5, starting the injection pump, setting a certain range of flow speed, and applying fluid traction force to the polystyrene microspheres, wherein the polystyrene microspheres deviate from the center of the target surface of the four-quadrant photoelectric detector;
in this embodiment, the flow rate of the liquid injection device is set to be in the range of 20 μm/s to 2000 μm/s, and the polystyrene microsphere suspension is slowly pushed to apply a fluid traction force to the polystyrene microsphere, wherein the fluid traction force makes the polystyrene microsphere deviate from an initial equilibrium position, and the magnitude of the fluid traction force is equal to the optical power applied to the polystyrene microsphere by the optical tweezers, and the traction force is in the range of 8.55pN to 855.14pN according to Stokes equation.
S6, receiving and measuring 780nm laser scattered by the polystyrene microsphere through a four-quadrant photoelectric detector, wherein illumination received by each quadrant and output current are in a direct proportion relation from the center to the periphery, and according to the relation coefficient of output voltage, voltage and position of the known four-quadrant photoelectric limit detector, the deviation displacement of the polystyrene microsphere can be measured, so that the corresponding relation between different deviation displacements and fluid traction force or optical power can be calibrated; the power range is the same as the traction range and is 8.55 pN-855.14 pN;
s7, stopping the injection pump to enable the fluid to be in a static state, and capturing the polystyrene microsphere by the optical fiber forceps to return to an initial balance position;
s8, when the whole device is in an acceleration environment, the polystyrene microsphere deviates from an initial equilibrium position under the action of the environmental acceleration, the optical power corresponding to the deviation displacement caused by the environmental acceleration is obtained according to the corresponding relation between different deviation displacements and the fluid traction force or the optical power, the environmental acceleration is obtained by dividing the optical power corresponding to the deviation displacement caused by the environmental acceleration by the mass of the polystyrene microsphere, and the environmental acceleration is calculated to be 0.12m/S according to the calculation 2 ～12.45m/s 2 Between which are located
As shown in fig. 2, 3, 4, 5, 6 and 7, in another embodiment of the present application, there is further provided a high-sensitivity acceleration sensor based on optical fiber tweezers, to which the high-sensitivity acceleration measurement method based on optical fiber tweezers of the above embodiment can be applied, including a microfluidic channel substrate 21, a microfluidic channel top plate 31, a tapered optical fiber 13, a 980nm laser 45, a liquid injection device 41 (in this embodiment, an injection pump is used), a catheter 42, an imaging system, a four-quadrant photodetector 53, a 780nm laser 54, a CCD imaging system 52 and an LED light source 51;
the microfluidic channel substrate 21 is fixedly connected with the microfluidic channel top plate 31 in a pressing manner by a hot press; two intersecting microfluidic channel grooves 23 and an optical fiber groove 22 are etched on the microfluidic channel substrate 21 through a laser engraving machine 24, the optical fiber groove 22 is arranged on an angular bisector of the intersecting microfluidic channel grooves 23, and one end of the optical fiber groove 22 is communicated with an intersection point of the microfluidic channel grooves 23, as shown in fig. 5;
the thickness of the microfluidic channel substrate 21 is 1mm, and the depths of the optical fiber grooves 22 and the microfluidic channel grooves 23 are 125 mu m;
the microfluidic top plate 31 is provided with microfluidic holes 43 as microfluidic channel outlet openings at positions corresponding to both ends of the microfluidic channel groove 23, and the liquid injection device 41 is connected to the microfluidic holes 43 at the inlet of the microfluidic channel groove 23 via a conduit. The liquid injection device 41 is internally provided with polystyrene microsphere suspension; the flow rate range of the liquid output by the liquid injection device 41 in the micro-flow channel groove 23 is set to 20-2000 mu m/s; the refractive index of the polystyrene microsphere 44 is 1.615, and the diameter of the polystyrene microsphere 44 is 50 μm.
The output power of the 980nm laser 45 is fixed to be 20mW and is connected with the tapered optical fiber 13, the tapered optical fiber 13 is arranged in the optical fiber groove 22, and one end of the taper is close to the micro-flow channel groove 23; as shown in fig. 4, the tapered optical fiber 13 is formed by drawing an end surface of a 125 μm diameter single-mode optical fiber 11 by an optical fiber fusion splicer discharge tip 12, and the end surface is tapered to form a tapered end surface as shown in fig. 3. The end face is obtained by FDTD simulation optimization, and the end face is formed by curvesRotation about the x-axis is obtained. The range of x value in the curve is 0-1562.5 μm, the range of y value is 0-62.5 μm, the end face can focus 980nm wavelength laser, and an optical tweezer potential well is formed at the focus to capture polystyrene microsphere 44, as shown in figure 6.
As shown in fig. 7, the CCD imaging system 52 and the LED light source 51 use a beam-splitting prism two 58, a lens two 59, a lens three 60 and a lens four 61 to image the polystyrene particle microsphere 44 in the microfluidic channel groove 23 to the CCD imaging system 52, and observe the capturing condition of the microsphere in real time.
The output power of the 780nm laser 54 is fixed to 10 mu W, and is used for outputting laser with the wavelength of 780nm and irradiating the polystyrene microsphere 44 to generate scattered light, wherein the scattered light is used for observing the position of the polystyrene microsphere 44; as shown in fig. 7, the scattered light is focused on the target surface of the four-quadrant photodetector 53 by using the imaging light path constructed by the beam-splitting prism one 55, the lens one 56 and the filter 57, and the four-quadrant photodetector 53 is used for collecting 780nm laser light scattered from the polystyrene microsphere 44 and measuring the displacement of the polystyrene microsphere 44 in the microfluidic channel groove 23.
The above examples are preferred embodiments of the present application, but the embodiments of the present application are not limited to the above examples, and any other changes, modifications, substitutions, combinations, and simplifications that do not depart from the spirit and principle of the present application should be made in the equivalent manner, and the embodiments are included in the protection scope of the present application.
Claims (9)
1. The high-sensitivity acceleration sensor based on the optical fiber tweezers is characterized by being applied to a high-sensitivity acceleration measurement method based on the optical fiber tweezers, and comprising a microfluidic channel substrate, a microfluidic channel top plate, tapered optical fibers, a laser, a liquid injection device, a catheter, an imaging system and a four-quadrant photoelectric detector;
the microfluidic channel substrate is fixedly connected with the microfluidic channel top plate; the micro-flow channel substrate is provided with an optical fiber groove and two intersecting micro-flow channel grooves, the optical fiber groove is arranged on an angular bisector of the intersecting micro-flow channel grooves, and one end of the optical fiber groove is communicated with an intersection point of the micro-flow channel grooves;
the liquid injection device is connected with the inlet of the microfluidic channel groove through a conduit, and polystyrene microsphere suspension is arranged in the liquid injection device;
the laser is connected with the conical optical fiber, the conical optical fiber is arranged in the optical fiber groove, and one end of the cone is close to the microfluidic channel groove; the end face of one conical end of the conical optical fiber is formed by a curveThe bottom surface of the conical end face is 125 μm in diameter and 1562.5 μm in height by rotating around the x axis; the wavelength of the laser output laser is 980nm;
the imaging system is used for imaging the polystyrene microspheres in the microfluidic channel to the target surface of the four-quadrant photoelectric detector;
the four-quadrant photoelectric detector is used for measuring the displacement of the polystyrene microsphere in the microfluidic channel groove;
the high-sensitivity acceleration measurement method based on the optical fiber optical tweezers comprises the following steps:
introducing polystyrene microsphere suspension into the microfluidic channel by a liquid injection device;
forming optical tweezers by laser through a conical optical fiber, and capturing polystyrene microspheres flowing through a microfluidic channel;
stopping the liquid injection device, and enabling the polystyrene microspheres to form a light spot on the center of the target surface of the four-quadrant photoelectric detector under the action of the imaging system;
starting the liquid injection device, setting a certain range of flow speed, and applying fluid traction force to the polystyrene microspheres, wherein the polystyrene microspheres deviate from the center of the target surface of the four-quadrant photoelectric detector;
obtaining the magnitude of the corresponding fluid traction force according to the flow velocity, and measuring the deviation displacement of the polystyrene microsphere according to the relation coefficient of the output voltage, the voltage and the position of the known four-image photoelectric limit detector, so as to calibrate the corresponding relation between different deviation displacements and the magnitude of the fluid traction force or the optical power;
stopping the liquid injection device, and returning the polystyrene microspheres to the initial balance position;
when the polystyrene microsphere is in an acceleration environment, the polystyrene microsphere deviates from an initial balance position under the action of the environmental acceleration, the corresponding optical power of the deviation displacement caused by the environmental acceleration is obtained according to the corresponding relation between the different deviation displacements and the traction force or the optical power of the fluid, and the environmental acceleration is obtained by dividing the optical power by the mass of the polystyrene microsphere.
2. The high-sensitivity acceleration sensor based on the optical fiber tweezers of claim 1, wherein the micro-channel top plate is connected with the micro-channel substrate by a hot press bonding mode.
3. The high-sensitivity acceleration sensor based on the fiber optical tweezers according to claim 1, wherein the microfluidic channel top plate is provided with a microfluidic hole serving as an inlet and an outlet of the microfluidic channel slot at positions corresponding to two ends of the microfluidic channel slot, and the liquid injection device is connected with the microfluidic hole through a conduit.
4. The high-sensitivity acceleration sensor based on the optical fiber tweezers according to claim 1, wherein the micro-flow channel substrate is provided with an optical fiber groove and a micro-flow channel groove, and the tail end of the optical fiber groove is communicated with the micro-flow channel groove, specifically:
the thickness of the microfluidic channel substrate is 1mm, and the depths of the optical fiber grooves and the microfluidic channel grooves are 125 mu m.
5. The high sensitivity acceleration sensor based on fiber optic tweezers of claim 1, further comprising an LED light source and a CCD imaging system for observing the capture of the polystyrene microspheres in the microfluidic channel grooves.
6. The high sensitivity acceleration sensor of claim 1, wherein the tapered fiber and the laser are used to form an optical tweezer; the diameter of the bottom surface of the conical end surface is 125 mu m, and the height is 1562.5 mu m; the wavelength of the laser output laser is 980nm.
7. The high-sensitivity acceleration sensor based on the fiber optical tweezers according to claim 1, wherein the flow velocity range of the liquid output by the liquid injection device in the microfluidic channel groove is set to 20-2000 μm/s.
8. The high sensitivity acceleration sensor based on fiber optic tweezers of claim 1, wherein the polystyrene microsphere has a refractive index of 1.615, and the polystyrene microsphere has a diameter of 50 μm.
9. The high sensitivity acceleration sensor based on fiber optic tweezers of claim 1, wherein the imaging system comprises a 780nm laser and an imaging optical path; the 780nm laser is used for outputting laser with the wavelength of 780nm and irradiating the polystyrene microsphere to generate scattered light; the imaging light path is used for focusing the scattered light spot and imaging the scattered light spot to a target surface of the four-quadrant photoelectric detector.
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