CN106439020A - Rectangular sealing device in vacuum environment and sealing method - Google Patents
Rectangular sealing device in vacuum environment and sealing method Download PDFInfo
- Publication number
- CN106439020A CN106439020A CN201610862031.7A CN201610862031A CN106439020A CN 106439020 A CN106439020 A CN 106439020A CN 201610862031 A CN201610862031 A CN 201610862031A CN 106439020 A CN106439020 A CN 106439020A
- Authority
- CN
- China
- Prior art keywords
- sealing
- rectangle
- sealed
- sealing structure
- rectangular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
Abstract
The invention discloses a rectangular sealing device in a vacuum environment and a sealing method. The device comprises a rectangular upper flange (1), a rectangular lower flange (2), a rectangular sealing box body (3), a rectangular overall profile sealing structure (4), a pressing screw (5), a sealing system mounting screw (6) and a rectangular section sealing system (7), wherein the rectangular section sealing system (7) is accommodated in the rectangular sealing box body (3), and is fixed by the sealing system mounting screw (6); and the rectangular upper flange (1) and the rectangular lower flange (2) are matched by the rectangular overall profile sealing structure (4), and are pressed by the pressing screw (5). The rectangular sealing device solves such problems as low utilization rate of internal space, large external size, high weight and inconvenience for movement and placement in a sealing device, is excellent in sealing effect, and reaches a helium leakage rate of above 5*10-11 Pam 3/s.
Description
Technical field
The present invention relates to the present invention relates to Sealing Technology in vacuum environment, is particularly suited for needing to provide rectangular seal knot
The rectangular seal device of structure and encapsulating method.
Background technology
There is various needs in vacuum ring in vacuum environment processing, manufacture or the space flight load that runs in space environment
The system of normal operation, such as motion controller, information gathering, process, transmitter etc. in border.On the one hand, these systems
May be due to normally running the problems such as failure, electric discharge under extreme vacuum environment, on the other hand, system is in vacuum environment
The material of generation of deflating in middle running is unfavorable for that vacuum environment is cleaned, or aging by the equal acceleration system of mass loss, therefore
Need effectively to be sealed for these systems, which is isolated with vacuum system, all such system is referred to as system to be sealed below
System.For example in the vacuum environment of semiconductor fabrication processes, the various electronic systems included by controller and electronic devices and components exist
10-2Pa～102There is electric discharge potential safety hazard in the coarse vacuum operated within range of Pa；Meanwhile, the electronics being exposed in vacuum environment
The gas that system and electronic devices and components deflation are produced and particulate matter can pollute processing environment, and impact semiconductor machining is normally transported
OK.Therefore, it is to ensure normal operation of these systems to be sealed in vacuum environment, needs to design appropriate vacuum sealing knot
Structure, system to be sealed and vacuum working environment are effectively isolated.
It is rectangular configuration that system to be sealed under vacuum such as electronic system is most, using traditional circle in prior art
Shown in cylindrical seal device, such as Fig. 1 (a), when system to be sealed is square-section, such as above-mentioned electronic system,
Shown in its fit structure top view such as Fig. 1 (b), the system to be sealed 22 of square-section is cut installed in circular as can be seen from Figure
When in the sealing device 111 in face, the space availability ratio in sealing device 111 is relatively low, and the shape of system to be sealed 22 is limited
In sealing device diameter of section.For example when the rectangular system of pair cross-section 150mm*120mm is sealed using containers of circular cross section, sealing
Container section diameter have to be larger than 190.2mm, and section utilization rate is less than 62%.Therefore traditional cylindrical seal device is not applied to
Sealing in the system to be sealed 22 of square-section.
For sealing device inner space utilization rate is improved, and ensure sealing effectiveness, prior art is using square shown in Fig. 2
Box body coordinates circular flange to constitute sealing device, sealing structure circular contour symmetrical structure still for ease of processing, can with offer
The sealing effectiveness for leaning on.When the problem of the structure is that quadrangle box and circular flange coordinate, the utilization rate of flange face is worse, flange
The seal groove inward flange diameter in face reserves seal groove and bolt installing space rear flange at least above quadrangle box diagonal cross section
Face diameter is much larger than the quadrangle box length of side.The quadrangle box of such as pair cross-section 150mm*120mm, reserves seal groove and bolt is installed
The circular section sealing flange of diameter 210mm, section utilization rate 52% are at least needed after the surplus of hole.Meanwhile, sealing flange thickness is big
In quadrangle box wall thickness, the top-heavy less stable of the heavier sealing device of flange, and weight is larger, is not easy to placement；Most
Afterwards, it is to improve space availability ratio in quadrangle box, system outline to be sealed is also constrained by quadrangle box.
Content of the invention
Based on above-mentioned problem of the prior art, the present invention proposes the rectangular seal device in a kind of vacuum environment, including square
Shape upper flange 1, rectangle lower flange 2, rectangular seal box body 3, the sealing structure 4 of rectangle overall profile, housing screw 5, to be sealed
System mounting screw 6, square-section system 7 to be sealed, wherein, square-section system 7 to be sealed is contained in rectangular seal box body
3, and fixed using system mounting screw 6 to be sealed, rectangle upper flange 1 and rectangle lower flange 2 are via the close of rectangle overall profile
Seal structure 4 is matched, is compressed by housing screw 5.
Preferably, the corner of the sealing structure 4 of rectangle overall profile, using transition arc structure.
Preferably, transition arc radius are more than 10mm.
Preferably, the sealing structure 4 of rectangle overall profile is using right angle tip to pushing up sealing structure, two 90 ° of right angle
The tight metallic gasket 9 of 8 pairs, tip top pressure, metallic gasket 9 is using the one kind in annealing oxygen-free copper, aluminum, silver.
Preferably, the sealing structure 4 of rectangle overall profile adopts the mutual pressure sealing structure of hypotenuse, the right angle at two 90 ° of right angles
Side 10 is by 11 crimp of tinsel, and tinsel 11 is using the one kind in annealing oxygen-free copper, aluminum, silver, stannum, indium, gold.
Preferably, the sealing structure 4 of rectangle overall profile adopts plane pressing sealing structure, and the plane is by sealing ring 12
Crimp in the seal groove 13, for high vacuum seal, sealing ring 12 is from annealing oxygen-free copper, aluminum, silver, stannum, indium, gold, liquid
One kind in state metal, is provided better than 5 × 10‐11Pam3The sealing property of/s, requires for sealing device leak rate relatively low close
Envelope, sealing ring 12 is from elastomeric material or polymeric material.
Preferably, the shape of cross section of seal groove 13 is rectangular channel, dovetail groove, half slot, the one kind in triangular groove, sealing
The cross sectional shape of circle 12 is rectangle, the one kind in square, I shape.
A kind of method for square-section system 7 to be sealed being sealed using aforesaid rectangular seal device, including S1
System 7 to be sealed for square-section is put in rectangular seal box body 3, S2 adopts system mounting screw 6 to be sealed by system to be sealed
System 7 is fixed, and rectangle upper flange 1, rectangle lower flange 2 are fixed by housing screw 5.
Preferably, S2 includes：In the sealing structure 4 of rectangle overall profile to top sealing structure sophisticated using right angle, put
Metallic gasket 9 is put, using system mounting screw 6 to be sealed, system to be sealed 7 has been fixed, by rectangle upper flange 1, rectangle purgation
Blue 2 are fixed by housing screw 5, from there through the tight metallic gasket 9 of two 90 ° of 8 pairs, the tip in right angle top pressures, reach sealing；?
When the sealing structure 4 of rectangle overall profile is using hypotenuse mutual pressure sealing structure, tinsel 11 is placed, pacified using system to be sealed
System to be sealed 7 is fixed by cartridge screw 6, and rectangle upper flange 1, rectangle lower flange 2 are fixed by housing screw 5, from there through
11 crimp of tinsel is reached sealing by the right-angle side 10 at two 90 ° of right angles；Adopt in the sealing structure 4 of rectangle overall profile
During with plane pressing sealing structure, sealing ring 12 is placed, using system mounting screw 6 to be sealed, system to be sealed 7 is fixed,
Rectangle upper flange 1, rectangle lower flange 2 are fixed by housing screw 5, from there through plane by sealing ring 12 in seal groove 13
Crimp, reaches sealing.
Preferably, S2 includes：In the sealing structure 4 of rectangle overall profile to top sealing structure sophisticated using right angle, adopt
With system mounting screw 6 to be sealed, system to be sealed 7 is fixed, metallic gasket 9 is placed, by rectangle upper flange 1, rectangle purgation
Blue 2 are fixed by housing screw 5, from there through the tight metallic gasket 9 of two 90 ° of 8 pairs, the tip in right angle top pressures, reach sealing；?
When the sealing structure 4 of rectangle overall profile is using hypotenuse mutual pressure sealing structure, will be to be sealed using system mounting screw 6 to be sealed
System 7 is fixed, and places tinsel 11, and rectangle upper flange 1, rectangle lower flange 2 are fixed by housing screw 5, from there through
11 crimp of tinsel is reached sealing by the right-angle side 10 at two 90 ° of right angles；Adopt in the sealing structure 4 of rectangle overall profile
During with plane pressing sealing structure, using system mounting screw 6 to be sealed, system to be sealed 7 is fixed, sealing ring 12 is placed,
Rectangle upper flange 1, rectangle lower flange 2 are fixed by housing screw 5, from there through plane by sealing ring 12 in seal groove 13
Crimp, reaches sealing.
A kind of rectangular seal for being applied to rectangular seal device in vacuum environment proposed by the invention, is mainly used in
Solve following technical problem：(1) isolating problem between system to be sealed and the vacuum environment in vacuum environment is solved, on the one hand
Guarantee that system to be sealed is normally run in vacuum environment, on the other hand prevent system to be sealed from deflating in vacuum environment generation
Gas and particulate matter contamination vacuum system；(2) by design rectangular seal, the previous cylindrical seal device of solution,
The sealing device inner space that square box-round flange sealing device is brought when sealing to square-section system to be sealed utilizes
Rate is low, and sealing device external volume is big, weight big, be not easy to the problems such as moving and dispose.Four side of rectangular box is respectively to be sealed
After system reserves the installation surplus of 2mm, seal box body section utilization rate is more than 90%；(3) by rational design of Sealing Structure,
Stress distribution inequality present in the sealing structure sealing of rectangle is overcome to be easily caused leakage, difficulty of processing major end item rate is low to ask
Topic, designed nonmetallic sealing device integrally no substantially shows leakage to nitrogen, and experimental verification metal sealing device helium leak rate is better than 5
×10-11Pam3/s.
Using the rectangular vacuum sealing device of the present invention, the Seal Design of rectangular seal is solved the problems, such as, improve close
Effectively utilizes space in seal apparatus, previous cylindrical seal device, square box-round flange sealing device are treated to square-section
When sealing system is sealed, 50%～60% section utilization rate brings up to 90%, solves sealing device external volume big, heavy
The problems such as amount is heavy, it is mobile to be not easy to and disposes.Secondly, the present invention is directed to present in rectangular seal sealing at right angle corner
Stress distribution inequality is easily caused leakage, and the low problem of difficulty of processing major end item rate is designed adjustment to sealing surface, proposes
Arc structure is crossed, solves the leakage problem at right angle corner.Finally, the present invention proposes three kinds and is more suitable for square after improvement
The encapsulation scheme of shape sealing structure：Right angle tip to push up sealing structure, the mutual pressure sealing structure of hypotenuse, plane pressing sealing structure,
Encapsulation scheme described in experimental verification no substantially shows leakage to nitrogen when completing sealing using nonmetallic materials, is completed using metal material
During sealing, helium leak rate is better than 5 × 10-11Pam3/s.
Description of the drawings
Fig. 1 is：A kind of sealing device schematic diagram of prior art；
Fig. 2 is：Another kind of sealing device schematic diagram of prior art；
Fig. 3 is：The rectangular seal device of the present invention；
Fig. 4 is：The sealing structure of the rectangular seal device of the present invention is that right angle tip shows to the cross section for pushing up sealing structure
It is intended to；
Fig. 5 is：The sealing structure of rectangular seal device shown in the present invention is illustrated for the cross section of the mutual pressure sealing structure of hypotenuse
Figure；
Fig. 6 is：The sealing structure of rectangular seal device shown in the present invention is illustrated for the cross section of plane pressing sealing structure
Figure.
Specific embodiment
Below in conjunction with drawings and Examples, the present invention is made with detailed description：
The present invention proposes the rectangular seal device in a kind of vacuum environment, and the sealing box body comprising square-section, rectangle cut
A series of rectangular seal on the sealing flange in face, and series of rectangular flanges, for the close of rectangular vacuum sealing device
Envelope, designed nonmetallic sealing device integrally no substantially shows leakage to nitrogen, and experimental verification metal sealing device helium leak rate is better than 5
×10‐11Pam3/s.The rectangular seal is divided into metal sealing and two big class of nonmetallic sealing, and metal sealing adopts metal
The sealing ring of material, such as annealing oxygen-free copper, aluminum, silver, stannum, indium, gold, liquid metal etc., nonmetallic sealing using various rubber,
The materials such as polymer complete sealing as sealing ring：Shape metallic leak-proof structure mainly includes the right angle tip of rectangle overall profile to top
Sealing structure, the mutual pressure sealing structure of hypotenuse of rectangle overall profile, the plane pressing sealing structure of rectangle overall profile；Nonmetallic
Sealing structure is mainly the plane pressing sealing structure of various rectangle overall profile.Shape metallic leak-proof structure is required for sealing property
Height, and be not introduced into the cleaning of Organic Pollution, in high-performance sealed；Nonmetallic sealing structure be used for quick, repeat in sealing.
Due to the right-angle structure of rectangular seal, stress distribution is different from traditional circular seal, and therefore the present invention is to sealing
The outline of structure, sealing surface, sealing ring etc. are all designed so as to still can reach under existing processing conditionss good close
Envelope effect.
Specifically, the rectangular seal device in a kind of vacuum environment of present invention proposition, the sealing box body comprising square-section,
A series of rectangular seal on the sealing flange of square-section, and series of rectangular flanges, for rectangular vacuum sealing dress
The sealing that puts.As shown in figure 3, Fig. 3 (a) is the outside drawing of rectangular seal device of the present invention, mainly by rectangle upper flange 1,
Rectangle lower flange 2, rectangular seal box body 3 constitute, and Fig. 3 (b) is the top view inside rectangular seal device of the present invention, in figure
Sealing structure 4, housing screw 5 comprising rectangle overall profile, system mounting screw 6, square-section to be sealed system to be sealed
7.Fig. 3 (b) can substantially see, the inner space that the sealing box body 3 of square-section is treated sealing system 7 and has optimum utilizes
Rate, Fig. 1 and Fig. 2 of hinge structure, not only increase sealing device inner space utilization rate, external volume is reduced, with
When also reduce the installation difficulty of system to be sealed.In a preferred embodiment, the sealing device of the present invention is suitable for square-section
System to be sealed 7 sealing, also be adapted for the sealing of other shapes interface system to be sealed.
Leakage, difficulty of processing major end item rate are easily caused for stress distribution inequality present in rectangular seal sealing
Low problem, the present invention is designed with caution to sealing structure.First, the leak source of rectangular seal is easily at right angle corner
Produce, therefore as shown in Fig. 3 (b), the present invention instead of the right angle corner of rectangular configuration using transition arc structure, on the one hand divide
Scattered stress concentration, on the other hand reduces difficulty of processing, improves sealing reliability.Transition arc radius regard concrete sealing structure chi
Depending on very little, it is proposed that more than 10mm.Secondly, the present invention is designed reducing difficulty of processing to sealing structure, and is added by actual
It is sophisticated to pushing up sealing structure, the mutual means of press seals of hypotenuse that the right angle that sealing reliability is higher, pretightning force is appropriate is chosen in work and leak detection experiment
Structure, plane pressing sealing structure realize device sealing, three of the above sealing structure be sealing property preferably, cleannes higher
Metal sealing, its compression ability stronger, sealing ring adopt various metal materials.Below by respectively to three kinds of embodiment structures
It is described.
Right angle tip is illustrated in figure 4 to sealing structure is pushed up, by the tight metal gasket of two 90 ° of 8 pairs, the tip in right angle top pressures
Piece 9 reaches the effect of sealing.In rectangular seal, the present invention is the reliability for improving 8 sealing of tip using 90 ° of sophisticated generations
For 70 ° of tips in seal standard, experiment shows that the structure is more suitable in rectangular seal.Metallic gasket 9 can be adopted and be moved back
The metal materials such as fiery oxygen-free copper, aluminum, silver.
The mutual pressure sealing structure of hypotenuse is illustrated in figure 5, tinsel 11 is extruded by change by the right-angle side 10 at two 90 ° of right angles
Shape, reaches sealing effectiveness.As right-angle side opposing right angles tip stability is more preferable, it is not easy to deform, at the same processing request and plus
Work difficulty is relatively small, and therefore the structure is also applied for rectangular seal.Tinsel 11 can using annealing oxygen-free copper, aluminum, silver,
The metal materials such as stannum, indium, gold.
Plane pressing sealing structure is illustrated in figure 6, by plane crimp in the seal groove 13 by sealing ring 12, is reached
To sealing effectiveness, in figure is not limited to the present invention, other shapes seal groove, such as dovetail groove, semicircle by taking rectangular channel as an example
Groove, triangular groove etc. are all can apply in the sealing structure, and the cross sectional shape of sealing ring 12 is selected also dependent on practical situation
Take, for example rectangle, square, I shape etc..For high vacuum seal, it is proposed that metal material selected by sealing ring 12, such as annealing nothing
Oxygen copper, aluminum, silver, stannum, indium, gold, liquid metal etc., metal sealing needs larger pretightning force, can provide better than 5 × 10‐ 11Pam3The sealing property of/s.If require relatively low, optional various nonmetallic sealing rings to sealing device leak rate, for example various
Elastomeric material, polymeric material etc., nonmetallic materials sealing needs less pretightning force, and can reuse, and is easy to peace
Dress and dismounting.
The above, the only present invention preferably specific embodiment, but protection scope of the present invention is not limited thereto,
Any those familiar with the art the invention discloses technical scope in, the change or replacement that can readily occur in,
Should all be included within the scope of the present invention.Therefore, protection scope of the present invention should be described with the protection model of claim
Enclose and be defined.
Claims (10)
1. the rectangular seal device in a kind of vacuum environment, including rectangle upper flange (1), rectangle lower flange (2), rectangular seal box
Body (3), the sealing structure (4) of rectangle overall profile, housing screw (5), system mounting screw to be sealed (6), square-section are treated
Sealing system (7), wherein, square-section system to be sealed (7) is contained in rectangular seal box body (3), and adopts system to be sealed
Mounting screw (6) is fixing, and rectangle upper flange (1) and rectangle lower flange (2) match via the sealing structure (4) of rectangle overall profile
Close, compressed by housing screw (5).
2. rectangular seal device as claimed in claim 1, it is characterised in that the turning of sealing structure (4) of rectangle overall profile
At angle, using transition arc structure.
3. rectangular seal device as claimed in claim 2, it is characterised in that transition arc radius are more than 10mm.
4. rectangular seal device as claimed in claim 1, it is characterised in that the sealing structure (4) of rectangle overall profile is adopted
Right angle tip is to pushing up sealing structure, and two 90 ° of right angle tip (8) is to the tight metallic gasket of top pressure (9), and metallic gasket (9) is adopted
One kind in annealing oxygen-free copper, aluminum, silver.
5. rectangular seal device as claimed in claim 1, it is characterised in that the sealing structure (4) of rectangle overall profile is adopted
The mutual pressure sealing structure of hypotenuse, the right-angle side (10) at two 90 ° of right angles is by tinsel (11) crimp, and tinsel (11) is using moving back
One kind in fiery oxygen-free copper, aluminum, silver, stannum, indium, gold.
6. rectangular seal device as claimed in claim 1, it is characterised in that the sealing structure (4) of rectangle overall profile is adopted
Plane pressing sealing structure, the plane is by sealing ring (12) in the interior crimp of seal groove (13), for high vacuum seal, close
Seal (12) is provided better than 5 × 10 from the one kind in annealing oxygen-free copper, aluminum, silver, stannum, indium, gold, liquid metal‐11Pam3/s
Sealing property, relatively low sealing is required for sealing device leak rate, sealing ring (12) is from elastomeric material or polymeric material
Material.
7. rectangular seal device as claimed in claim 6, it is characterised in that the shape of cross section of seal groove (13) is rectangle
One kind in groove, dovetail groove, half slot, triangular groove, the cross sectional shape of sealing ring (12) is rectangle, in square, I shape one
Kind.
8. the rectangular seal device any one of a kind of employing claim 17 enters to square-section system to be sealed (7)
The method of row sealing, including：
S1, system (7) to be sealed for square-section are put in rectangular seal box body (3)；
S2, using system mounting screw (6) to be sealed, system to be sealed (7) is fixing, by rectangle upper flange (1), rectangle purgation
Blue (2) are fixing by housing screw (5).
9. method as claimed in claim 8, it is characterised in that S2 includes：Adopt in the sealing structure (4) of rectangle overall profile
When right angle tip is to pushing up sealing structure, metallic gasket (9) is placed, using system mounting screw (6) to be sealed by system to be sealed
System (7) is fixing, will be fixing by housing screw (5) to rectangle upper flange (1), rectangle lower flange (2), from there through two 90 °
The 8 pairs of top pressures in right angle tip are tight metallic gasket (9), reach sealing；Mutually pressed using hypotenuse in the sealing structure (4) of rectangle overall profile
During sealing structure, tinsel (11) is placed, using system mounting screw (6) to be sealed, system to be sealed (7) is fixing, by square
Shape upper flange (1), rectangle lower flange (2) are fixing by housing screw (5), from there through the right-angle side (10) at two 90 ° of right angles
By tinsel (11) crimp, sealing is reached；Plane pressing sealing structure is adopted in the sealing structure (4) of rectangle overall profile
When, sealing ring (12) is placed, using system mounting screw (6) to be sealed, system to be sealed (7) is fixing, by rectangle upper flange
(1), rectangle lower flange (2) is fixing by housing screw (5), squeezes sealing ring (12) from there through plane in seal groove (13)
Compressive strain, reaches sealing.
10. method as claimed in claim 8, it is characterised in that S2 includes：Adopt in the sealing structure (4) of rectangle overall profile
During with right angle tip to pushing up sealing structure, using system mounting screw (6) to be sealed, system to be sealed (7) is fixing, place
Metallic gasket (9), will be fixing by housing screw (5) to rectangle upper flange (1), rectangle lower flange (2), from there through two 90 °
Right angle tip (8) to the tight metallic gasket of top pressure (9), reach sealing；Hypotenuse is adopted in the sealing structure (4) of rectangle overall profile
Mutually during pressure sealing structure, using system mounting screw (6) to be sealed, system to be sealed (7) is fixing, place tinsel (11,
Will be fixing by housing screw (5) to rectangle upper flange (1), rectangle lower flange (2), from there through the right-angle side at two 90 ° of right angles
(10) by tinsel (11) crimp, sealing is reached；Sealed using plane compression in the sealing structure (4) of rectangle overall profile
During structure, using system mounting screw (6) to be sealed, system to be sealed (7) is fixing, sealing ring (12) is placed, by rectangle
Flange (1), rectangle lower flange (2) are fixing by housing screw (5), from there through plane by sealing ring (12) in seal groove (13)
Interior crimp, reaches sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610862031.7A CN106439020B (en) | 2016-09-28 | 2016-09-28 | Rectangular seal device and encapsulating method in a kind of vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610862031.7A CN106439020B (en) | 2016-09-28 | 2016-09-28 | Rectangular seal device and encapsulating method in a kind of vacuum environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106439020A true CN106439020A (en) | 2017-02-22 |
| CN106439020B CN106439020B (en) | 2018-10-02 |
Family
ID=58170929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610862031.7A Active CN106439020B (en) | 2016-09-28 | 2016-09-28 | Rectangular seal device and encapsulating method in a kind of vacuum environment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106439020B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108461378A (en) * | 2018-01-16 | 2018-08-28 | 北京市北分仪器技术有限责任公司 | A kind of vacuum cavity |
| CN109268500A (en) * | 2018-12-10 | 2019-01-25 | 清华大学 | A kind of slab construction sealing ring and sealing structure |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2856602Y (en) * | 2005-12-22 | 2007-01-10 | 宝胜集团有限公司 | Novel sealing structure for airtight |
| US20100301253A1 (en) * | 2009-05-26 | 2010-12-02 | Aaron Andrew Perrault | Valve seat apparatus for use with fluid valves |
| CN202851945U (en) * | 2012-07-16 | 2013-04-03 | 成都凯天电子股份有限公司 | Self-tightening type metal C-shaped sealing ring |
| CN103775791A (en) * | 2014-02-24 | 2014-05-07 | 马要武 | High-air-tightness electromechanical device shell |
| CN105578849A (en) * | 2016-03-11 | 2016-05-11 | 中国科学院光电研究院 | Sealed-type heat-dissipating device and manufacturing method thereof |
| CN105636389A (en) * | 2016-03-11 | 2016-06-01 | 中国科学院光电研究院 | Vacuum seal structure and manufacturing method thereof |
| CN206175653U (en) * | 2016-09-28 | 2017-05-17 | 中国科学院光电研究院 | Rectangular sealing device |
-
2016
- 2016-09-28 CN CN201610862031.7A patent/CN106439020B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2856602Y (en) * | 2005-12-22 | 2007-01-10 | 宝胜集团有限公司 | Novel sealing structure for airtight |
| US20100301253A1 (en) * | 2009-05-26 | 2010-12-02 | Aaron Andrew Perrault | Valve seat apparatus for use with fluid valves |
| CN202851945U (en) * | 2012-07-16 | 2013-04-03 | 成都凯天电子股份有限公司 | Self-tightening type metal C-shaped sealing ring |
| CN103775791A (en) * | 2014-02-24 | 2014-05-07 | 马要武 | High-air-tightness electromechanical device shell |
| CN105578849A (en) * | 2016-03-11 | 2016-05-11 | 中国科学院光电研究院 | Sealed-type heat-dissipating device and manufacturing method thereof |
| CN105636389A (en) * | 2016-03-11 | 2016-06-01 | 中国科学院光电研究院 | Vacuum seal structure and manufacturing method thereof |
| CN206175653U (en) * | 2016-09-28 | 2017-05-17 | 中国科学院光电研究院 | Rectangular sealing device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108461378A (en) * | 2018-01-16 | 2018-08-28 | 北京市北分仪器技术有限责任公司 | A kind of vacuum cavity |
| CN108461378B (en) * | 2018-01-16 | 2023-11-10 | 北京市北分仪器技术有限责任公司 | Vacuum cavity |
| CN109268500A (en) * | 2018-12-10 | 2019-01-25 | 清华大学 | A kind of slab construction sealing ring and sealing structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106439020B (en) | 2018-10-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206175653U (en) | Rectangular sealing device | |
| CN104444484A (en) | Plate carrying device | |
| CN106439020A (en) | Rectangular sealing device in vacuum environment and sealing method | |
| CN103016693B (en) | A kind of reducer shell junction plane sealing configuration | |
| CN104564646A (en) | Sealing device for plunger pump and plunger pump | |
| CN106286831B (en) | Elastic metallic rectangular seal device and encapsulating method in a kind of vacuum environment | |
| CN204039357U (en) | A kind of waste oil high efficiente callback device | |
| CN102836572B (en) | Double-cavity dynamic compression column for chromatographic separation | |
| CN205978434U (en) | Take sealing device of glass bell jar | |
| CN204371642U (en) | A kind of plunger Sealing used for pump and plunger pump | |
| CN204124820U (en) | Corrugated flexible strengthens sucker | |
| CN206221654U (en) | A kind of elastic metallic rectangular seal device | |
| CN205719425U (en) | Bearing sealed ring experiments of sealing performance device | |
| CN204477291U (en) | Pressure container manhole lid pressure self-sealing device | |
| CN204725105U (en) | The pressurization erecting device of flashboard copper sheathing | |
| CN207065079U (en) | Full-automatic SF6 gases recovery charge and discharge device | |
| CN210339551U (en) | A sucking disc device that is used for work piece to transport to have from closing function | |
| CN202274098U (en) | Movable sealing plate for circular cooler | |
| CN206235433U (en) | A kind of catalyst converter air-tightness detection device | |
| CN207858124U (en) | Device of tyre is sealed suitable for the segmentation on channel steel or I-steel moulding bed | |
| CN204878732U (en) | Axial press the sealing device | |
| CN107720655A (en) | A kind of pressing device | |
| CN203880077U (en) | Bracket sealing device for liquid medium large-diameter high-pressure container | |
| CN203942382U (en) | A kind of electric moto used in compressor wiring construction with sealability | |
| CN203375024U (en) | Pipeline flange |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Zhang Luosha Inventor after: Wu Xiaobin Inventor after: Wang Kuibo Inventor after: Chen Jinxin Inventor after: Luo Yan Inventor after: Xie Wanlu Inventor after: Zhou Yi Inventor after: Wang Yu Inventor after: Cui Huirong Inventor before: Wu Xiaobin Inventor before: Zhang Luosha Inventor before: Wang Kuibo Inventor before: Chen Jinxin Inventor before: Luo Yan Inventor before: Xie Wanlu Inventor before: Zhou Yi Inventor before: Wang Yu Inventor before: Cui Huirong |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200803 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences Effective date of registration: 20200803 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |