CN206221654U - A kind of elastic metallic rectangular seal device - Google Patents
A kind of elastic metallic rectangular seal device Download PDFInfo
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- CN206221654U CN206221654U CN201621090563.5U CN201621090563U CN206221654U CN 206221654 U CN206221654 U CN 206221654U CN 201621090563 U CN201621090563 U CN 201621090563U CN 206221654 U CN206221654 U CN 206221654U
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Abstract
The utility model discloses the elastic metallic rectangular seal device in a kind of vacuum environment, including rectangle upper flange (1), rectangle lower flange (2), rectangular seal box body (3), the sealing structure of rectangle overall profile, housing screw, system mounting screw to be sealed, square-section system to be sealed, wherein, square-section system to be sealed is contained in rectangular seal box body (3), and fixed using system mounting screw to be sealed, rectangle upper flange (1) and rectangle lower flange (2) are engaged via the sealing structure of rectangle overall profile, compressed by housing screw, realize sealing, it is characterized in that, the sealing structure of rectangle overall profile uses elastic metallic pressing sealing structure, by plane by elastic metal sealing ring in seal groove (5) interior crimp, reach sealing effectiveness.The utility model completes sealing using elastic metallic, required pretightning force is small, and hold-down bolt quantity needed for opposing solid metal o-ring is few under equal pressure, easy for installation, can be reused suitable for the rectangular vacuum device sealing that sealed section is larger, and sealing ring.
Description
Technical field
The utility model is related to the Sealing Technology in vacuum environment, is particularly suited for needing offer pretightning force smaller and multiple
The sealing device of reusable rectangular seal.
Background technology
There are various needs in vacuum ring in vacuum environment processing, manufacture or the space flight load run in space environment
The system of normal operation, such as motion controller, information gathering, treatment, transmitter etc. in border.On the one hand, these systems
May be under extreme vacuum environment due to cannot normally be run the problems such as failing, discharge, on the other hand, system is in vacuum environment
The material of generation of being deflated in middle running is unfavorable for that vacuum environment is cleaned, or aging by the equal acceleration system of mass loss, therefore
Need effectively to be sealed for these systems, it is isolated with vacuum system, such system is referred to as system to be sealed below
System.For example in the vacuum environment of semiconductor fabrication processes, the various electronic systems and electronic component that controller is included exist
10‐2Pa~102There is electric discharge potential safety hazard in the low vacuum operated within range of Pa；Meanwhile, the electronics in vacuum environment
The gas and particulate matter that system and electronic component deflation are produced can pollute processing environment, and influence semiconductor machining is normally transported
OK.Therefore, to ensure normal operation of these systems to be sealed in vacuum environment, it is necessary to design appropriate vacuum sealing knot
Structure, system to be sealed and vacuum working environment are effectively isolated.
System to be sealed such as electronic system majority under vacuum is rectangular configuration, using traditional in preceding embodiment
Shown in cylindrical seal device, such as Fig. 1 (a), when system to be sealed is square-section, such as above-mentioned electronics system
System, shown in its fit structure top view such as Fig. 1 (b), the system to be sealed 22 of square-section is arranged on circle as can be seen from Figure
When in the sealing device 11 of tee section, the space availability ratio in sealing device 11 is relatively low, and the shape of system to be sealed 22 is received
It is limited to sealing device diameter of section.It is for example when the rectangular system of pair cross-section 150mm*120mm is sealed using containers of circular cross section, close
Envelope container section diameter have to be larger than 190.2mm, and section utilization rate is less than 62%.Therefore traditional cylindrical seal device is uncomfortable
For the sealing of the system to be sealed 22 of square-section.
To improve sealing device inner space utilization rate, and ensure sealing effectiveness, preceding embodiment 2 is using shown in Fig. 2
Quadrangle box coordinate circular flange constitute sealing device, sealing structure still for ease of processing circular contour symmetrical structure, to carry
For reliable sealing effectiveness.When the problem of the structure is quadrangle box and circular flange cooperation, the utilization rate of flange face is worse,
The seal groove inward flange diameter of flange face at least above quadrangle box diagonal cross section, after reserving seal groove and bolt installing space
Flange face diameter is much larger than the quadrangle box length of side.Such as quadrangle box of pair cross-section 150mm*120mm, reserves seal groove and bolt
The circular section sealing flange of diameter 210mm, section utilization rate 52% are at least needed after mounting hole surplus.Meanwhile, sealing flange is thick
Degree is more than quadrangle box wall thickness, the top-heavy less stable of the heavier sealing device of flange, and weight is larger, is not easy to peace
Put；Finally, to improve space availability ratio in quadrangle box, system outline to be sealed is also constrained by quadrangle box.
The embodiment of previous rectangular seal extrudes solid wire ring using sealing surface or sealing is realized in solid gasket deformation.It is this
Method according to nonmetallic materials as sealing ring when leak rate it is larger, and nonmetallic materials discharge quantity in vacuum environment is larger,
Influence vacuum system cleannes；Larger pretightning force is then needed as sealing ring according to metal material, and metal o-ring is not
Can reuse, flexibility is poor.
Utility model content
Based on above-mentioned problem of the prior art, the utility model proposes the elastic metallic rectangular seal in a kind of vacuum environment
Device, including rectangle upper flange 1, rectangle lower flange 2, rectangular seal box body 3, the sealing structure of rectangle overall profile, compression spiral shell
Nail, system mounting screw to be sealed, square-section system to be sealed, wherein, it is close that square-section system to be sealed is contained in rectangle
Jacket body 3, and fixed using system mounting screw to be sealed, rectangle upper flange 1 and rectangle lower flange 2 are via rectangle overall profile
Sealing structure be engaged, by housing screw compress, realize sealing, it is characterised in that the sealing structure of rectangle overall profile is adopted
Elastic metallic pressing sealing structure is used, by plane by elastic metal sealing ring crimp in seal groove 5, sealing effect is reached
Really.
Preferably, the corner of the sealing structure of rectangle overall profile, using transition arc structure.
Preferably, transition arc radius are more than 20mm.
Preferably, elastic metal sealing ring plated surface soft metal layer.
Preferably, elastic metal sealing ring uses O-shaped elastic metallic rectangular seal, and O-shaped elastic metal sealing ring 4 is horizontal
Section is annular hollow structure, and to pressure direction without selectivity, the bottom surface both sides of seal groove 5 carry out fillet treatment.
Preferably, elastic metal sealing ring uses c-type elastic metallic rectangular seal, using one layer of c-type elastic metallic
Sealing ring 6 is sealed, and c-type elastic metal sealing ring 6 is open towards vacuum end.
Preferably, elastic metal sealing ring uses c-type elastic metallic rectangular seal, using double-deck c-type elastic metallic
Sealing ring sealing structure, double-layer seal groove is divided into interior sealing groove 8 and external seal groove 10, is respectively mounted interior c-type elastic metallic sealing
Circle 7 and outer c-type elastic metal sealing ring 9, two sealing ring opening directions are opposite.
The utility model proposes a kind of elastic metallic rectangular seal device being applied in vacuum environment, it is mainly used in solution
Certainly following technical problem：(1) effective sealing of rectangular seal device is completed, its helium leak rate of experimental verification is better than 5 × 10‐ 11Pam3/s；(2) experimental verification elastic metallic sealing device internally two kinds of works of vacuum external pressure and external vacuum internal pressure
5 × 10 are satisfied by under condition‐11Pam3The leak rate requirement of/s；(3) pretightning force needed for solving the sealing of common metal sealing ring is big and close
Seal cannot reusable problem.
Using rectangular seal of the present utility model, the effective utilization space in sealing device is improve；This practicality is new
Type is easily caused leakage, difficulty of processing great achievement for stress distribution inequality at right angle corner present in rectangular seal sealing
The low problem of product rate is designed adjustment to sealing surface, proposes transition arc structure, solves the leakage problem at right angle corner；
The utility model completes the sealing of rectangular seal device using elastic metallic, and elastic metallic sealing device exists described in experiment test
5 × 10 can be provided under two kinds of operating modes of inner vacuum external pressure and external vacuum internal pressure‐11Pam3The leak rate of/s；This reality
Completed to seal with new use elastic metallic, required pretightning force is small, is pressed needed for opposing solid metal o-ring under equal pressure
Tight bolt quantity is few, easy for installation, it is adaptable to the larger rectangular vacuum device sealing of sealed section, and sealing ring can be repeated
Use.
Brief description of the drawings
Fig. 1 is：A kind of sealing device schematic diagram of prior art；
Fig. 2 is：Another sealing device schematic diagram of prior art；
Fig. 3 is：The outside drawing of elastic metallic rectangular seal device described in the utility model；
Fig. 4 (a), Fig. 4 (b) are：The elastic metallic rectangular seal of elastic metallic rectangular seal device described in the utility model
Structural representation；
Fig. 5 is：Rectangular seal device shown in the utility model is illustrated using the sealing structure of O-shaped elastic metal sealing ring
Figure；
Fig. 6 is：Rectangular seal device shown in the utility model is shown using the sealing structure of one layer of c-type elastic metal sealing ring
It is intended to；
Fig. 7 is：Rectangular seal device shown in the utility model is shown using the sealing structure of double-deck c-type elastic metal sealing ring
It is intended to.
Specific embodiment
The utility model is made with detailed description below in conjunction with drawings and Examples：
The utility model proposes the elastic metallic rectangular seal device in a kind of vacuum environment, comprising the close of square-section
Jacket body, the sealing flange of square-section, and the elastic metallic rectangular seal on rectangular flange, it is close for rectangular vacuum
The sealing of seal apparatus, its helium leak rate of designed elastic metallic sealing device experimental verification is better than 5 × 10‐11Pam3/ s, it is required pre-
Clamp force is small, can reuse.The Rectangular Elastic metal o-ring cross section is hollow c-type and hollow O-shaped two kinds.It is reality
Existing sealing device internally can provide 5 × 10 under two kinds of operating modes of vacuum external pressure and external vacuum internal pressure‐11Pam3/s
Leak rate, c-type elastic metallic sealing use double-layer sealing structure, adjacent two seals groove, two seals are processed on sealing surface
C-type sealing ring opening is mounted opposite in groove, to meet two kinds of operating modes of vacuum external pressure and external vacuum internal pressure internally
Under leak rate requirement.O-shaped elastic metal sealing ring is smaller with respect to c-type elastic metal sealing ring to pressure direction susceptibility, experiment
Checking the utility model is sealed by individual layer and also achieves good sealing effectiveness.
In a preferred embodiment, the utility model proposes the elastic metallic rectangular seal device in a kind of vacuum environment, bag
Sealing box body containing square-section, the sealing flange of square-section, and the elastic metallic rectangular seal on rectangular flange.
As shown in figure 3, Fig. 3 is the outside drawing of elastic metallic rectangular seal device described in the utility model, mainly by rectangle upper flange 1,
Rectangle lower flange 2, rectangular seal box body 3 are constituted.Elastic metallic rectangular seal is by close between upper flange 1, lower flange 2
Seal structure coordinates, and bolt presses are realized.
Leakage, difficulty of processing major end item rate are easily caused for stress distribution inequality present in rectangular seal sealing
Low problem, the utility model is designed sealing structure with caution.First, the leak source of rectangular seal is easily turned at right angle
Produced at angle, the utility model instead of the right angle corner of rectangular configuration, one side dispersive stress collection using transition arc structure
Moderate, on the other hand reduces difficulty of processing, improves sealing reliability.The turning of seal groove 5 uses circular arc mistake as shown in Fig. 4 (a)
Cross, transition arc radius are depending on specific sealing structure size, it is contemplated that processing of the elastic metal sealing ring at transition arc
Reliability, it is proposed that knuckle radius is more than 20mm.Secondly, the utility model is sealed for elastic metallic to enter sealing groove bottom both sides
Row fillet treatment, shown in such as Fig. 4 (b).Finally, for sealing property requirement sealing device higher, it is proposed that close in elastic metallic
Seal plated surface soft metal layer, such as silver, to overcome the low micro-leakage for causing of sealing surface surface flatness.
Shown in O-shaped elastic metallic rectangular seal such as Fig. 4 (b) described in the utility model, O-shaped elastic metal sealing ring 4
Cross section is annular hollow structure, to pressure direction without selectivity, both can be used for inner vacuum external pressure operating mode, again may be used
For external vacuum internal pressure operating mode, therefore the O-shaped elastic metal sealing ring of individual layer can complete sealing.The bottom surface two of seal groove 5
While carrying out fillet treatment.
If c-type elastic metallic rectangular seal described in the utility model is as shown in figure 5, sealing device is only operated in inside
When under vacuum external pressure or external vacuum internal pressure one of which operating mode, can meet sealing only with one layer of sealing will
Ask, c-type elastic metal sealing ring opening towards vacuum end is made during sealing, embodiment illustrated in fig. 5 is applied to the sealing of inner vacuum
Container.Relatively O-shaped elastic metal sealing ring, the pretightning force that c-type elastic metal sealing ring needs is smaller, and convenient dismounting and repetition make
With.
If sealing device need to simultaneously meet two kinds of operating modes of inner vacuum external pressure or external vacuum internal pressure, advise
Using the double-layer sealing structure shown in Fig. 7.Double-layer seal groove is divided into interior sealing groove 8 and external seal groove 10, and inside is respectively mounted interior C
Type elastic metal sealing ring 7 and outer c-type elastic metal sealing ring 9, two sealing ring opening directions are conversely, to meet inner vacuum
Two kinds of conversion requirements of operating mode of external pressure and external vacuum internal pressure.
The above, only the utility model preferably specific embodiment, but protection domain of the present utility model is not
This is confined to, any one skilled in the art can readily occur in the technical scope that the utility model is disclosed
Change or replacement, should all cover within protection domain of the present utility model.Therefore, protection domain of the present utility model answers institute
State and be defined by scope of the claims.
Claims (7)
1. a kind of elastic metallic rectangular seal device in vacuum environment, including rectangle upper flange (1), rectangle lower flange (2), square
Shape sealing box body (3), the sealing structure of rectangle overall profile, housing screw, system mounting screw to be sealed, square-section treat close
Envelope system, wherein, square-section system to be sealed is contained in rectangular seal box body (3), and uses system mounting screw to be sealed
Fixed, rectangle upper flange (1) and rectangle lower flange (2) be engaged via the sealing structure of rectangle overall profile, by housing screw
Compress, realize sealing, it is characterised in that the sealing structure of rectangle overall profile uses elastic metallic pressing sealing structure, passes through
Elastic metal sealing ring in seal groove (5) interior crimp, is reached sealing effectiveness by plane.
2. rectangular seal device as claimed in claim 1, it is characterised in that the turning of the sealing structure of rectangle overall profile
Place, using transition arc structure.
3. rectangular seal device as claimed in claim 2, it is characterised in that transition arc radius are more than 20mm.
4. rectangular seal device as claimed in claim 1, it is characterised in that elastic metal sealing ring plated surface soft metal layer.
5. rectangular seal device as claimed in claim 1, it is characterised in that elastic metal sealing ring uses O-shaped elastic metallic
Rectangular seal, O-shaped elastic metal sealing ring (4) cross section is annular hollow structure, close to pressure direction without selectivity
Sealing groove (5) bottom surface both sides carry out fillet treatment.
6. rectangular seal device as claimed in claim 1, it is characterised in that elastic metal sealing ring uses c-type elastic metallic
Rectangular seal, is sealed using one layer of c-type elastic metal sealing ring (6), and c-type elastic metal sealing ring (6) opening is towards true
Dead end.
7. rectangular seal device as claimed in claim 1, it is characterised in that elastic metal sealing ring uses c-type elastic metallic
Rectangular seal, using double-deck c-type elastic metal sealing ring sealing structure, double-layer seal groove is divided into interior sealing groove (8) and outer
Seal groove (10), is respectively mounted interior c-type elastic metal sealing ring (7) and outer c-type elastic metal sealing ring (9), two sealing rings
Opening direction is opposite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621090563.5U CN206221654U (en) | 2016-09-28 | 2016-09-28 | A kind of elastic metallic rectangular seal device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621090563.5U CN206221654U (en) | 2016-09-28 | 2016-09-28 | A kind of elastic metallic rectangular seal device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206221654U true CN206221654U (en) | 2017-06-06 |
Family
ID=58782368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621090563.5U Active CN206221654U (en) | 2016-09-28 | 2016-09-28 | A kind of elastic metallic rectangular seal device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206221654U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106286831A (en) * | 2016-09-28 | 2017-01-04 | 中国科学院光电研究院 | Elastic metallic rectangular seal device in a kind of vacuum environment and encapsulating method |
| CN115750953A (en) * | 2022-11-11 | 2023-03-07 | 中国空气动力研究与发展中心超高速空气动力研究所 | High-temperature ultrahigh-pressure plane sealing structure and application method thereof |
-
2016
- 2016-09-28 CN CN201621090563.5U patent/CN206221654U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106286831A (en) * | 2016-09-28 | 2017-01-04 | 中国科学院光电研究院 | Elastic metallic rectangular seal device in a kind of vacuum environment and encapsulating method |
| CN106286831B (en) * | 2016-09-28 | 2018-07-03 | 中国科学院光电研究院 | Elastic metallic rectangular seal device and encapsulating method in a kind of vacuum environment |
| CN115750953A (en) * | 2022-11-11 | 2023-03-07 | 中国空气动力研究与发展中心超高速空气动力研究所 | High-temperature ultrahigh-pressure plane sealing structure and application method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200807 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences Effective date of registration: 20200807 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
|
| TR01 | Transfer of patent right |