CN106286831A - Elastic metallic rectangular seal device in a kind of vacuum environment and encapsulating method - Google Patents
Elastic metallic rectangular seal device in a kind of vacuum environment and encapsulating method Download PDFInfo
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- CN106286831A CN106286831A CN201610862026.6A CN201610862026A CN106286831A CN 106286831 A CN106286831 A CN 106286831A CN 201610862026 A CN201610862026 A CN 201610862026A CN 106286831 A CN106286831 A CN 106286831A
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- seal
- sealing ring
- sealed
- type elastic
- elastic metal
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- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000007789 sealing Methods 0.000 claims abstract description 151
- 239000002184 metal Substances 0.000 claims abstract description 74
- 229910052751 metal Inorganic materials 0.000 claims abstract description 74
- 238000003825 pressing Methods 0.000 claims abstract description 3
- 230000007704 transition Effects 0.000 claims description 9
- 238000007142 ring opening reaction Methods 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000007514 turning Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 abstract description 4
- 238000009434 installation Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 11
- 238000012545 processing Methods 0.000 description 6
- 238000012795 verification Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 241000233855 Orchidaceae Species 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004899 motility Effects 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0887—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by elastic deformation of the packing
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Gasket Seals (AREA)
Abstract
The invention discloses the elastic metallic rectangular seal device in a kind of vacuum environment and encapsulating method thereof, this device includes rectangle upper flange (1), rectangle lower flange (2), rectangular seal box body (3), the sealing structure of rectangle overall profile, housing screw, system to be sealed installs screw, square-section system to be sealed, wherein, square-section system to be sealed is contained in rectangular seal box body (3), and use system to be sealed installation screw to fix, rectangle upper flange (1) and rectangle lower flange (2) match via the sealing structure of rectangle overall profile, compressed by housing screw, realize sealing, it is characterized in that, the sealing structure of rectangle overall profile uses elastic metallic pressing sealing structure, by plane by elastic metal sealing ring crimp in seal groove (5), reach sealing effectiveness.The present invention uses elastic metallic to complete to seal, and required pretightning force is little, and under same equal pressure, needed for opposing solid metal o-ring, hold-down bolt quantity is few, easy for installation, it is adaptable to the rectangular vacuum device that sealed section is bigger seals, and sealing ring can be reused.
Description
Technical field
The present invention relates to the Sealing Technology in vacuum environment, be particularly suited for needing provide pretightning force less and be repeated several times
The sealing device of the rectangular seal used and encapsulating method.
Background technology
There are various needs at vacuum ring in vacuum environment processing, the space flight load manufacturing or running in space environment
System properly functioning in border, such as motion controller, information gathering, process, transmitter etc..On the one hand, these systems
May cannot be properly functioning due to problems such as inefficacy, electric discharges under extreme vacuum environment, on the other hand, system is in vacuum environment
The material produced of exitting in middle running is unfavorable for that vacuum environment cleans, or is all accelerated system aging by mass loss, therefore
Need effectively to seal for these systems, it is isolated with vacuum system, the most all such system is referred to as system to be sealed
System.Such as in the vacuum environment of semiconductor fabrication processes, various electronic systems and electronic devices and components that controller is comprised exist
10‐2Pa～102There is electric discharge potential safety hazard in the coarse vacuum operated within range of Pa；Meanwhile, the electronics being exposed in vacuum environment
Gas and particulate matter that system and electronic devices and components venting produce can pollute processing environment, affect semiconductor machining and normally transport
OK.Therefore, for ensureing properly functioning in vacuum environment of these systems to be sealed, need to design suitable vacuum and seal knot
Structure, is effectively isolated system to be sealed with vacuum working environment.
System to be sealed under vacuum such as electronic system majority is rectangular configuration, uses traditional in preceding embodiment
Cylindrical seal device, as shown in Fig. 1 (a), when system to be sealed is square-section, the most above-mentioned electronics system
System, shown in its fit structure top view such as Fig. 1 (b), the system to be sealed 22 of square-section is arranged on circle as can be seen from Figure
Time in the sealing device 111 of tee section, the space availability ratio in sealing device 111 is relatively low, and the shape of system to be sealed 22
It is limited to sealing device diameter of section.Such as when the rectangular system of pair cross-section 150mm*120mm uses containers of circular cross section to seal,
Sealing container section diameter and have to be larger than 190.2mm, cross section utilization rate is less than 62%.The most traditional cylindrical seal device is not
It is applicable to the sealing of the system to be sealed 22 of square-section.
For improving sealing device inner space utilization rate, and ensureing sealing effectiveness, preceding embodiment 2 uses shown in Fig. 2
Quadrangle box coordinates circular flange to constitute sealing device, seals structure still for ease of the circular contour symmetrical structure of processing, to carry
For reliable sealing effectiveness.This structure has a problem in that when quadrangle box and circular flange coordinate, the utilization rate of flange face is worse,
The seal groove inward flange diameter of flange face is at least above quadrangle box diagonal cross section, after reserving seal groove and bolt installing space
Flange face diameter is much larger than the quadrangle box length of side.The such as quadrangle box of pair cross-section 150mm*120mm, reserves seal groove and bolt
The circular section sealing flange of diameter 210mm, cross section utilization rate 52% is at least needed after installing hole surplus.Meanwhile, sealing flange is thick
Degree is relatively big more than quadrangle box wall thickness, the top-heavy less stable of sealing device that flange is heavier, and weight, is not easy to peace
Put；Finally, for space availability ratio in raising quadrangle box, system outline to be sealed is also retrained by quadrangle box.
Previously the embodiment of rectangular seal used sealing surface to extrude solid wire ring or solid gasket deformation realizes sealing.This
Method is relatively big as leak rate during sealing ring according to nonmetallic materials, and nonmetallic materials discharge quantity in vacuum environment is relatively big,
Affect vacuum system cleannes；Then need bigger pretightning force as sealing ring according to metal material, and metal o-ring is not
Can reuse, motility is poor.
Summary of the invention
Based on above-mentioned problem of the prior art, the present invention proposes the elastic metallic rectangular seal dress in a kind of vacuum environment
Put, including rectangle upper flange (1), rectangle lower flange (2), rectangular seal box body (3), the sealing structure of rectangle overall profile, pressure
Tight screw, system to be sealed install screw, square-section system to be sealed, and wherein, square-section system to be sealed is contained in square
Shape seals box body (3), and uses system to be sealed installation screw to fix, and rectangle upper flange (1) and rectangle lower flange (2) are via square
The sealing structure of shape overall profile matches, is compressed by housing screw, it is achieved seal, and the sealing structure of rectangle overall profile uses
Elastic metallic pressing sealing structure, by plane by elastic metal sealing ring crimp in seal groove (5).
Preferably, the corner of the sealing structure of rectangle overall profile, use transition arc structure.
Preferably, transition arc radius is more than 20mm.
Preferably, elastic metal sealing ring plated surface soft metal layer.
Preferably, elastic metal sealing ring uses O type elastic metallic rectangular seal, O type elastic metal sealing ring (4)
Cross section is annular hollow structure, does not has selectivity, seal groove (5) both sides, bottom surface to carry out fillet process to pressure direction.
Preferably, elastic metal sealing ring uses c-type elastic metallic rectangular seal, uses one layer of c-type elastic metallic
Sealing ring (6) seals, and c-type elastic metal sealing ring (6) opening is towards vacuum end.
Preferably, elastic metal sealing ring uses c-type elastic metallic rectangular seal, uses double-deck c-type elastic metallic
Sealing ring seals structure, and double-layer seal groove is divided into interior seal groove (8) and external seal groove (10), is respectively mounted interior c-type elastic metallic
Sealing ring (7) and outer c-type elastic metal sealing ring (9), two sealing ring opening directions are contrary.
A kind of aforementioned flexible metal rectangular sealing device is used to carry out the method sealed, including:
S1, puts into system to be sealed for square-section in rectangular seal box body (3)；
S2 uses system to be sealed to install screw and system to be sealed is fixed, by rectangle upper flange (1), rectangle lower flange
(2) fixed by housing screw.
Preferably, S2 includes:
O type elastic metal sealing ring (4) is positioned over seal groove (5), uses system to be sealed screw to be installed by be sealed
System is fixed, and rectangle upper flange (1), rectangle lower flange (2) is fixed by housing screw, from there through plane, O type is elastic
Metal o-ring (4) crimp in seal groove (5), reaches to seal；Or, only in the face of inner vacuum external pressure or outer
Under portion's evacuated interior pressure a kind of operating mode therein, seal request can be met only with one layer of sealing, by c-type elastic metallic square
Shape seals structure and is positioned over seal groove (5), and c-type elastic metal sealing ring (6) opening, towards vacuum end, uses system to be sealed to pacify
System to be sealed is fixed by cartridge screw, rectangle upper flange (1), rectangle lower flange (2) is fixed by housing screw, from there through
Plane, by c-type elastic metal sealing ring (6) crimp in seal groove (5), reaches to seal；Or, at needs in the face of internal
Under vacuum external pressure or two kinds of operating modes of external vacuum internal pressure, double-deck c-type elastic metal sealing ring is used to seal structure,
It is respectively mounted interior c-type elastic metal sealing ring (7) in interior seal groove (8) and external seal groove (10) and outer c-type elastic metallic seals
Circle (9), two sealing ring opening directions are contrary, to meet inner vacuum external pressure and two kinds of operating modes of external vacuum internal pressure
Conversion requirements, use system to be sealed install screw system to be sealed is fixed, by rectangle upper flange (1), rectangle lower flange
(2) fixed by housing screw, from there through plane by c-type elastic metal sealing ring (7) and outer c-type elastic metal sealing ring
(9) crimp in interior seal groove (8) and external seal groove (10) respectively, reaches to seal.
Preferably, S2 includes: uses system to be sealed to install screw and system to be sealed is fixed, by close for O type elastic metallic
Seal (4) is positioned over seal groove (5), rectangle upper flange (1), rectangle lower flange (2) is fixed by housing screw, from there through
Plane, by O type elastic metal sealing ring (4) crimp in seal groove (5), reaches to seal；Or, use system to be sealed
Screw is installed system to be sealed fixed, only in the face of inner vacuum external pressure or external vacuum internal pressure one therein
Under operating mode, seal request can be met only with one layer of sealing, c-type elastic metallic rectangular seal is positioned over seal groove
(5), c-type elastic metal sealing ring (6) opening is towards vacuum end, by rectangle upper flange (1), rectangle lower flange (2) by compressing
Screw is fixed, and from there through plane by c-type elastic metal sealing ring (6) crimp in seal groove (5), reaches to seal；Or
Person, uses system to be sealed to install screw and system to be sealed is fixed, at needs in the face of inner vacuum external pressure or outside true
Under empty two kinds of operating modes of internal pressure, double-deck c-type elastic metal sealing ring is used to seal structure, at interior seal groove (8) and external seal
Interior c-type elastic metal sealing ring (7) and outer c-type elastic metal sealing ring (9), two sealing ring openings it are respectively mounted in groove (10)
In opposite direction, to meet inner vacuum external pressure and the conversion requirements of two kinds of operating modes of external vacuum internal pressure, by rectangle
Flange (1), rectangle lower flange (2) are fixed by housing screw, from there through plane by c-type elastic metal sealing ring (7) and outer C
Type elastic metal sealing ring (9) crimp in interior seal groove (8) and external seal groove (10) respectively, reaches to seal.
The present invention proposes a kind of elastic metallic rectangular seal device being applied in vacuum environment, be mainly used in solve with
Lower technical problem: (1) completes effective sealing of rectangular seal device, and its helium leak rate of experimental verification is better than 5 × 10‐11Pam3/s；
(2) experimental verification elastic metallic sealing device is the fullest under inner vacuum external pressure and two kinds of operating modes of external vacuum internal pressure
Foot 5 × 10‐11Pam3The leak rate requirement of/s；(3) solve common metal sealing ring and seal required pretightning force greatly, and sealing ring cannot
Reusable problem.
Use the rectangular seal of the present invention, improve and effectively utilize space in sealing device；The present invention is directed to square
Present in shape sealing sealing structure, at right angle corner, stress distribution inequality is easily caused leakage, and difficulty of processing major end item rate is low
Sealing surface is designed adjusting by problem, proposes transition arc structure, solves the leakage problem at right angle corner；The present invention adopts
Complete the sealing of rectangular seal device with elastic metallic, described in experiment test, elastic metallic sealing device is outside inner vacuum
5 × 10 all it are provided that under pressure and two kinds of operating modes of external vacuum internal pressure‐11Pam3The leak rate of/s；The present invention uses elastic gold
Having belonged to sealing, required pretightning force is little, and under same equal pressure, needed for opposing solid metal o-ring, hold-down bolt quantity is few, installs
Convenient, it is adaptable to the rectangular vacuum device that sealed section is bigger seals, and sealing ring can be reused.
Accompanying drawing explanation
Fig. 1 is: a kind of sealing device schematic diagram of prior art；
Fig. 2 is: the another kind of sealing device schematic diagram of prior art；
Fig. 3 is: the outside drawing of elastic metallic rectangular seal device of the present invention；
Fig. 4 (a), Fig. 4 (b) be: the elastic metallic rectangular seal of elastic metallic rectangular seal device of the present invention
Schematic diagram；
Fig. 5 is: rectangular seal device shown in the present invention uses the sealed structural representation of O type elastic metal sealing ring；
Fig. 6 is: rectangular seal device shown in the present invention uses the sealing structural representation of one layer of c-type elastic metal sealing ring
Figure；
Fig. 7 is: rectangular seal device shown in the present invention uses the sealing structural representation of double-deck c-type elastic metal sealing ring
Figure.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is made with detailed description:
The present invention proposes the elastic metallic rectangular seal device in a kind of vacuum environment, comprises the seal box of square-section
Body, the sealing flange of square-section, and the elastic metallic rectangular seal on rectangular flange, seal dress for rectangular vacuum
The sealing put, designed its helium leak rate of elastic metallic sealing device experimental verification is better than 5 × 10‐11Pam3/ s, required pretightning force
Little, can reuse.Described Rectangular Elastic metal o-ring cross section is c-type and two kinds of the O type of hollow of hollow.Close for realizing
Seal apparatus is all provided that 5 × 10 under inner vacuum external pressure and two kinds of operating modes of external vacuum internal pressure‐11Pam3The leakage of/s
Rate, c-type elastic metallic seals and uses double-layer sealing structure, sealing surface is processed adjacent two seals groove, C in two seals groove
RunddichtringO opening is mounted opposite, to meet the leakage under inner vacuum external pressure and two kinds of operating modes of external vacuum internal pressure
Rate requirement.O type elastic metal sealing ring is less relative to c-type elastic metal sealing ring to pressure direction sensitivity, and experimental verification is originally
Invent to be sealed by monolayer and also achieve good sealing effectiveness.
In a preferred embodiment, the present invention proposes the elastic metallic rectangular seal device in a kind of vacuum environment, comprises square
Sealing box body, the sealing flange of square-section of tee section, and the elastic metallic rectangular seal on rectangular flange.Such as figure
Shown in 3, Fig. 3 is the outside drawing of elastic metallic rectangular seal device of the present invention, mainly by rectangle upper flange 1, rectangle purgation
Orchid 2, rectangular seal box body 3 form.Elastic metallic rectangular seal is joined by the sealing structure between upper flange 1, lower flange 2
Closing, bolt presses realizes.
For rectangular seal seal present in stress distribution inequality be easily caused leakage, difficulty of processing major end item rate
The problem such as low, the present invention designs with caution to sealing structure.First, the leak source of rectangular seal is easily at right angle corner
Producing, the present invention uses transition arc structure to instead of the right angle corner of rectangular configuration, on the one hand dispersive stress concentration degree, another
Aspect reduces difficulty of processing, improves sealing reliability.As shown in Fig. 4 (a), the turning of seal groove 5 uses arc transition, transition circle
Arc radius is depending on concrete sealing physical dimension, it is contemplated that elastic metal sealing ring process reliability at transition arc, builds
View knuckle radius is more than 20mm.Secondly, seal the present invention for elastic metallic and both sides, seal groove bottom surface are carried out fillet process, as
Shown in Fig. 4 (b).Higher sealing device is required, it is proposed that at the soft gold of elastic metal sealing ring plated surface finally, for sealing property
Belong to layer, such as silver, to overcome the low micro-leakage caused of sealing surface surface flatness.
Shown in O type elastic metallic rectangular seal such as Fig. 4 (b) of the present invention, O type elastic metal sealing ring 4 is transversal
Face is annular hollow structure, and pressure direction is not had selectivity, both may be used for inner vacuum external pressure operating mode, can be used for again
External vacuum internal pressure operating mode, therefore monolayer O type elastic metal sealing ring can complete to seal.Both sides, seal groove 5 bottom surface are entered
Row fillet processes.
If c-type elastic metallic rectangular seal of the present invention is as it is shown in figure 5, sealing device is only operated in inner vacuum
Time under external pressure or external vacuum internal pressure one of which operating mode, seal request can be met only with one layer of sealing, close
Making c-type elastic metal sealing ring opening towards vacuum end during envelope, embodiment illustrated in fig. 5 is applicable to the sealing container of inner vacuum.
O type elastic metal sealing ring relatively, the pretightning force that c-type elastic metal sealing ring needs is less, conveniently dismantles and reuses.
If sealing device need to meet inner vacuum external pressure or two kinds of operating modes of external vacuum internal pressure simultaneously, then advise
Use the double-layer sealing structure shown in Fig. 7.Double-layer seal groove is divided into interior seal groove 8 and external seal groove 10, and inside is respectively mounted interior C
Type elastic metal sealing ring 7 and outer c-type elastic metal sealing ring 9, two sealing ring opening directions are contrary, to meet inner vacuum
External pressure and the conversion requirements of two kinds of operating modes of external vacuum internal pressure.
The above, the only present invention preferably detailed description of the invention, but protection scope of the present invention is not limited thereto,
Any those familiar with the art in the technical scope that the invention discloses, the change that can readily occur in or replacement,
All should contain within protection scope of the present invention.Therefore, protection scope of the present invention answers the described protection model with claim
Enclose and be as the criterion.
Claims (10)
1. the elastic metallic rectangular seal device in vacuum environment, including rectangle upper flange (1), rectangle lower flange (2), square
Shape seals box body (3), the sealing structure of rectangle overall profile, housing screw, system to be sealed installs screw, square-section is treated close
Envelope system, wherein, square-section system to be sealed is contained in rectangular seal box body (3), and uses system to be sealed to install screw
Fixing, rectangle upper flange (1) and rectangle lower flange (2) match, by housing screw via the sealing structure of rectangle overall profile
Compressing, it is achieved seal, the sealing structure of described rectangle overall profile uses elastic metallic pressing sealing structure, and will by plane
Elastic metal sealing ring crimp in seal groove (5).
2. rectangular seal device as claimed in claim 1, it is characterised in that the turning of the sealing structure of rectangle overall profile
Place, uses transition arc structure.
3. rectangular seal device as claimed in claim 2, it is characterised in that transition arc radius is more than 20mm.
4. rectangular seal device as claimed in claim 1, it is characterised in that elastic metal sealing ring plated surface soft metal layer.
5. rectangular seal device as claimed in claim 1, it is characterised in that elastic metal sealing ring uses O type elastic metallic
Rectangular seal, O type elastic metal sealing ring (4) cross section is annular hollow structure, does not has selectivity to pressure direction, close
Sealing groove (5) both sides, bottom surface carry out fillet process.
6. rectangular seal device as claimed in claim 1, it is characterised in that elastic metal sealing ring uses c-type elastic metallic
Rectangular seal, uses one layer of c-type elastic metal sealing ring (6) to seal, and c-type elastic metal sealing ring (6) opening is towards very
Dead end.
7. rectangular seal device as claimed in claim 1, it is characterised in that elastic metal sealing ring uses c-type elastic metallic
Rectangular seal, uses double-deck c-type elastic metal sealing ring to seal structure, and double-layer seal groove is divided into interior seal groove (8) and outward
Seal groove (10), is respectively mounted interior c-type elastic metal sealing ring (7) and outer c-type elastic metal sealing ring (9), two sealing rings
Opening direction is contrary.
8. use the elastic metallic rectangular seal device according to any one of claim 17 to carry out the method sealed, bag
Include:
S1, puts into system to be sealed for square-section in rectangular seal box body (3)；
S2, uses system to be sealed to install screw and system to be sealed is fixed, rectangle upper flange (1), rectangle lower flange (2) are led to
Cross housing screw to fix.
9. method as claimed in claim 8, it is characterised in that described S2 includes:
O type elastic metal sealing ring (4) is positioned over seal groove (5), uses system to be sealed screw to be installed by system to be sealed
Fixing, rectangle upper flange (1), rectangle lower flange (2) are fixed by housing screw, from there through plane by O type elastic metallic
Sealing ring (4) crimp in seal groove (5), reaches to seal；
Or, only under inner vacuum external pressure or external vacuum internal pressure a kind of operating mode therein, only with one
Layer seals can meet seal request, and c-type elastic metallic rectangular seal is positioned over seal groove (5), and c-type elastic metallic is close
Seal (6) opening towards vacuum end, use system to be sealed install screw system to be sealed is fixed, by rectangle upper flange (1),
Rectangle lower flange (2) is fixed by housing screw, from there through plane by c-type elastic metal sealing ring (6) in seal groove (5)
Crimp, reaches to seal；
Or, at needs under inner vacuum external pressure or two kinds of operating modes of external vacuum internal pressure, use double-deck c-type bullet
Property metal o-ring seal structure, in interior seal groove (8) and external seal groove (10), be respectively mounted interior c-type elastic metal sealing ring
And outer c-type elastic metal sealing ring (9) (7), two sealing ring opening directions are contrary, to meet inner vacuum external pressure and outer
The conversion requirements of portion's two kinds of operating modes of evacuated interior pressure, uses system to be sealed to install screw and system to be sealed is fixed, by square
Shape upper flange (1), rectangle lower flange (2) are fixed by housing screw, from there through plane by c-type elastic metal sealing ring (7)
With the crimp in interior seal groove (8) and external seal groove (10) respectively of outer c-type elastic metal sealing ring (9), reach to seal.
10. method as claimed in claim 8, it is characterised in that S2 includes: use system to be sealed to install screw by be sealed
System is fixed, and O type elastic metal sealing ring (4) is positioned over seal groove (5), by rectangle upper flange (1), rectangle lower flange (2)
Fixed by housing screw, from there through plane by O type elastic metal sealing ring (4) crimp in seal groove (5), reach
Seal；
Or, use system to be sealed that screw is installed and system to be sealed fixed, only in the face of inner vacuum external pressure or outer
Under portion's evacuated interior pressure a kind of operating mode therein, seal request can be met only with one layer of sealing, by c-type elastic metallic square
Shape seals structure and is positioned over seal groove (5), c-type elastic metal sealing ring (6) opening towards vacuum end, by rectangle upper flange (1),
Rectangle lower flange (2) is fixed by housing screw, from there through plane by c-type elastic metal sealing ring (6) in seal groove (5)
Crimp, reaches to seal；
Or, use system to be sealed that screw is installed and system to be sealed fixed, faced by needs inner vacuum external pressure or
Under two kinds of operating modes of external vacuum internal pressure, use double-deck c-type elastic metal sealing ring to seal structure, at interior seal groove (8) and
Interior c-type elastic metal sealing ring (7) and outer c-type elastic metal sealing ring (9), two sealings it are respectively mounted in external seal groove (10)
Circle opening direction is contrary, to meet inner vacuum external pressure and the conversion requirements of two kinds of operating modes of external vacuum internal pressure, and will
Rectangle upper flange (1), rectangle lower flange (2) are fixed by housing screw, from there through plane by c-type elastic metal sealing ring
(7) and outer c-type elastic metal sealing ring (9) crimp in interior seal groove (8) and external seal groove (10) respectively, reach close
Envelope.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610862026.6A CN106286831B (en) | 2016-09-28 | 2016-09-28 | Elastic metallic rectangular seal device and encapsulating method in a kind of vacuum environment |
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| CN201610862026.6A CN106286831B (en) | 2016-09-28 | 2016-09-28 | Elastic metallic rectangular seal device and encapsulating method in a kind of vacuum environment |
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| CN106286831B CN106286831B (en) | 2018-07-03 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108253139A (en) * | 2017-12-20 | 2018-07-06 | 北京控制工程研究所 | A kind of highly reliable flat seal modular construction |
| CN110869653A (en) * | 2017-07-06 | 2020-03-06 | 安珀动力能源公司 | Grease channel for reducing gas permeation into vacuum chamber |
| CN112255005A (en) * | 2020-09-27 | 2021-01-22 | 中国科学院空间应用工程与技术中心 | Radial buckling metal sealing deep space sampling packaging device and leakage rate monitoring packaging system |
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| US20100301253A1 (en) * | 2009-05-26 | 2010-12-02 | Aaron Andrew Perrault | Valve seat apparatus for use with fluid valves |
| CN202851945U (en) * | 2012-07-16 | 2013-04-03 | 成都凯天电子股份有限公司 | Self-tightening type metal C-shaped sealing ring |
| CN103775791A (en) * | 2014-02-24 | 2014-05-07 | 马要武 | High-air-tightness electromechanical device shell |
| CN105578849A (en) * | 2016-03-11 | 2016-05-11 | 中国科学院光电研究院 | Sealed-type heat-dissipating device and manufacturing method thereof |
| CN105636389A (en) * | 2016-03-11 | 2016-06-01 | 中国科学院光电研究院 | Vacuum seal structure and manufacturing method thereof |
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| CN112255005B (en) * | 2020-09-27 | 2021-09-14 | 中国科学院空间应用工程与技术中心 | Radial buckling metal sealing deep space sampling packaging device and leakage rate monitoring packaging system |
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