CN108461378A - A kind of vacuum cavity - Google Patents
A kind of vacuum cavity Download PDFInfo
- Publication number
- CN108461378A CN108461378A CN201810041931.4A CN201810041931A CN108461378A CN 108461378 A CN108461378 A CN 108461378A CN 201810041931 A CN201810041931 A CN 201810041931A CN 108461378 A CN108461378 A CN 108461378A
- Authority
- CN
- China
- Prior art keywords
- chamber
- knife
- step edge
- cover board
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 239000010935 stainless steel Substances 0.000 claims abstract description 9
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 9
- 238000003801 milling Methods 0.000 claims abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 238000003466 welding Methods 0.000 abstract description 10
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 238000003672 processing method Methods 0.000 abstract description 3
- 238000007789 sealing Methods 0.000 description 9
- 230000003068 static effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Vacuum Packaging (AREA)
Abstract
The invention discloses a kind of vacuum cavities, it includes chamber and the cover board above the chamber, the cover board is fixedly connected with the chamber by connecting flange, the chamber rectangular chamber made of stainless steel entirety milling, the step edge of a knife I of annular is formed on the upper surface of the chamber, it is formed on the cover board corresponding with the positions step edge of a knife I and is equipped with metal seal between annular the step edge of a knife II, the step edge of a knife I and the step edge of a knife II.The present invention avoids the deformation generated when the vacuum leak and welding that excessive welding gap generates by the processing method of global formation chamber, to ensure that the vacuum degree of whole part and the assembly precision of internal part, rectangular chamber structure is made in chamber simultaneously, contribute to content in the indoor assembly of chamber and setting, the edge seal to metal seal is realized by step edge of a knife I and step edge of a knife II between chamber upper surface and cover board, substantially increases the high/low temperature adaptability of vacuum cavity.
Description
Technical field
The present invention relates to mass spectrometry arts, and in particular to a kind of vacuum cavity.
Background technology
In today of science and technology rapid development, many scientific instrument are required for working under certain vacuum environment with equipment,
Vacuum cavity provides vacuum environment for sensitive component, ensures its normal work, therefore, vacuum cavity is designed in order to whole
The core of a Vacuum System Design.
Currently, existing vacuum cavity design shape is varied, material is based on stainless steel, aluminium alloy, titanium alloy.Aluminium
Weight alloy is light, processing cost is low, but can not use edge seal mode since its quality is softer, can only use seal with elastometic washer
Mode；The vacuum cavity advantage of aluminum alloy material is convenient for disassembly and assembly, and shortcoming is can only to use seal with elastometic washer, sealing side
Formula is single, and aluminum alloy material and rubber ring have prodigious deflation rate, and thermal adaptability is poor, can not use melting Welding, because
This narrow application range.Titanium alloy is light-weight but high processing costs, and welding difficulty is big, welding manner is limited, is not used to rectangular true
Cavity body is processed.Stainless steel material gas efficiency is low, good mechanical property, and fusion weld excellent performance, and processing cost is low, true
It is widely used in cavity body design.
Vacuum cavity on internal and international designs based on cylindrical shape, internal components can not vertical cylinder it is axially mounted,
Can only be axially mounted along cylinder, space is more narrow, and assembly is inconvenient.
Invention content
For in the prior art above insufficient, a kind of versatility height of present invention offer, suitable a variety of rigging position demands
Vacuum cavity.
A kind of vacuum cavity comprising chamber and the cover board above the chamber, the cover board are logical with the chamber
It crosses connecting flange to be fixedly connected, the chamber rectangular chamber made of stainless steel entirety milling, on the upper surface of the chamber
The step edge of a knife I of annular is formed, the step knife of annular is formed on the cover board corresponding with the positions step edge of a knife I
Mouth II, is equipped with metal seal between the step edge of a knife I and the step edge of a knife II.
Indoor two side position of chamber fixes a boss respectively, and an arc-shaped clamp device is arranged between two boss,
The device for hooping includes semicircular arc collet and semicircular arc card holder, and the two of the semicircular arc collet and semicircular arc card holder
End is fixedly connected by fastener with the boss respectively.
The semicircular arc collet is set to the bottom of the chamber, and both ends are fixedly connected with two boss respectively.
It is parallel in the chamber to be equipped at least two device for hooping being set in distance, the both ends of the device for hooping
Correspondence is fixed on the boss.
The metal seal is oxygenless copper washer.
The step edge of a knife I of the chamber is set to the upper surface inner side of the chamber.
The R values of step edge of a knife II around the corner on the cover board are that the R values of the step edge of a knife I around the corner add step
Gap.The every bit uniform force that can ensure when cutting copper washer on the step edge of a knife is done so, best static seal is reached
Effect.
At least one side wall of the chamber is equipped with vacuum feedthroughs hole, perpendicular with device for hooping clip direction
The chamber one side wall on also set up a suction nozzle.
The chamber is more than or equal to 18mm with the connecting flange thickness on the cover board.
In order to achieve the above objectives, the present invention adopts the following technical scheme that：
Technical solution of the present invention has the following advantages that：
A. the present invention avoids the leakage and welding that excessive welding gap generates by the processing method of global formation chamber
When the deformation that generates, to ensure that the assembly precision of internal part, while rectangular chamber structure is made in chamber, contribute in
It is tolerant in the indoor distribution of chamber and setting, between chamber upper surface and cover board passing through step edge of a knife I and step edge of a knife II realizes
Edge seal to metal seal substantially increases the high/low temperature adaptability and vacuum degree of vacuum cavity.
B. the arc-shaped clamp device that the present invention is provided with boss and is fixedly connected with boss in two side position of the inside of chamber,
The static seal of rectangular vacuum chamber and cover board designs so that the internal part assembly of instrument and equipment is more convenient, and assembly space is big, can
The manual installation, it can be achieved that multiple tiny parts and inner walls is measured, is had great advantage compared with cylindrical shape vacuum cavity, together
When, arc-shaped clamp device is easy to implement the fixation of cylindric content.
C. the cavity in the present invention uses the rectangular vacuum cavity of stainless steel, can use rubber ring and metal sealing
Etc. a variety of static seal modes, design method is various, applied widely.
Description of the drawings
It, below will be to needed in specific implementation mode in order to illustrate more clearly of the specific embodiment of the invention
Attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is some embodiments of the present invention, for this field
For those of ordinary skill, without creative efforts, other drawings may also be obtained based on these drawings.
Fig. 1 is the chamber structure schematic diagram of vacuum cavity provided by the present invention；
Fig. 2 is cross section structure schematic diagram shown in Fig. 1；
Fig. 3 is vertical view shown in Fig. 1；
Fig. 4 is covering plate structure schematic diagram shown in the present invention；
Fig. 5 is the cross section structure schematic diagram of cover board shown in Fig. 4；
Fig. 6 is the structural schematic diagram that content is installed in structure of the invention；
Fig. 7 is the vertical view of structure shown in Fig. 6.
Reference sign：
1- chambers；2- cover boards；3- connecting flanges；4- step edges of a knife I；5- step edges of a knife II；6- metal seals；7- is convex
Platform；8- device for hooping, 81- semicircular arc collets, 82- semicircular arc card holders；9- vacuum feedthroughs hole；10- suction nozzles；20- contents
Object component；30- pipelines；40- pipe flanges.
Specific implementation mode
Technical scheme of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
The every other embodiment that personnel are obtained without making creative work, shall fall within the protection scope of the present invention.
As depicted in figs. 1 and 2, the present invention provides a kind of vacuum cavities comprising chamber 1 and above chamber 1
Cover board 2, cover board 2 are fixedly connected with chamber 1 by connecting flange 3, the rectangular chamber made of stainless steel entirety milling of chamber 1,
By chamber design can certainly be rectangular configuration according to content, 3 thickness of connecting flange on chamber 1 and cover board 2 is more than etc.
In 18mm.The step edge of a knife I4 of annular, cover board corresponding with the step positions edge of a knife I4 2 are formed on the upper surface of chamber 1
On form annular step edge of a knife II5, step edge of a knife I4 and step edge of a knife II5 between be equipped with metal seal 6, gold here
It is preferably oxygenless copper washer to belong to sealing element 6.
When the present invention avoids the leakage and welding that excessive welding gap generates by the processing method of global formation chamber
Chamber to ensure that the assembly precision of internal part, while being made rectangular chamber structure, contributes to content by the deformation of generation
Object passes through step edge of a knife I and the II realizations pair of the step edge of a knife in the indoor distribution of chamber and setting between chamber upper surface and cover board
The edge seal of metal seal substantially increases the high/low temperature adaptability and vacuum degree of vacuum cavity.
Meanwhile in order to preferably carry out accurate installation and fixed to the indoor object of chamber, the present invention also in chamber 1 two
Side position fixes a boss 7 respectively, and an arc-shaped clamp device 8 is arranged between two boss 7, and device for hooping 8 includes semicircular arc bottom
The both ends of support 81 and semicircular arc card holder 82, semicircular arc collet 81 and semicircular arc card holder 82 are convex with two by fastener respectively
Platform 7 is fixedly connected, and is referred to shown in Fig. 2 and Fig. 3.Semicircular arc collet 81 is preferably set to the bottom of chamber 1 in wherein Fig. 2
Portion, both ends are fixedly connected with two boss 7, can be fixed by welding manner respectively, semicircular arc collet 81 and semi arch
Shape card holder 82 should be formed with the surface of content and be fitted closely, and the both ends of semicircular arc card holder 82 are bolted on boss
On.
The present invention can be equipped at least two device for hooping 8 being set in distance, device for hooping 8 along parallel in chamber 1
Both ends correspond to be fixed on boss 7, as shown in figure 5, content can be fixed by two or more device for hooping.
As shown in Fig. 1, Fig. 6 and Fig. 7, vacuum feedthroughs hole 9 is equipped at least one side wall of chamber 1, vacuum feedthroughs can
To be mounted in vacuum feedthroughs hole 9, to realize that content component 20 and extraneous electrical connection, the vacuum on vacuum cavity draw
Line can also be designed according to different needs on each face of cavity；In the one side wall of the chamber 1 perpendicular with 8 clip direction of device for hooping
On also set up a suction nozzle 10.Suction nozzle 10 realizes that the gas circuit between vacuum section and ambient atmosphere is converted；As shown in figure 4,
Pipeline 30 is arranged in rectangular vacuum cavity lower part, and the connection of vacuum pump and cavity is realized with pipe flange 40, is content component
20 provide vacuum environment；Vacuum cavity uses the vacuum sealing mode that step seals, and cover board 2 and vacuum cavity 1 mill out step knife
Mouthful, after trip bolt, oxygenless copper washer is cut out fresh metal and realizes static seal by upper and lower two edges of a knife.
The step edge of a knife I4 of chamber 1 in the present invention is preferably disposed on the upper surface inner side of chamber 1.Meanwhile such as Fig. 4
Shown in Fig. 5, the R values of step edge of a knife II5 around the corner on cover board 2 are that the R values of step edge of a knife I4 around the corner add step
Gap.The every bit uniform force that can ensure when cutting copper washer on the step edge of a knife is done so, best static seal is reached
Effect
Rectangular vacuum cavity pair can be realized by principles such as the punching of the above vacuum cavity side wall, the positioning of coaxial elements, limits
In requiring, concentricity is high, verticality is high, form parts installation positioning.
The sealing means that the step edge of a knife hobs copper washer can make rectangular vacuum cavity obtain the vacuum degree of ultrahigh vacuum.Its
Advantage is the temperature range that vacuum system can be made to be resistant to -45 DEG C~+200 DEG C.
If in the vacuum system of less demanding to low temperature tolerant, step edge of a knife I can be stayed by the diameter of rubber seal
Height installs rubber seal, does not stay the edge of a knife that will seal facing cut on the cover board and puts down or mill out rubber seal positioning slot, ensures sealing
Vacuum sealing can be realized 25% or so in circle decrement, and the vacuum system of this sealing means is -20 DEG C~+150 DEG C tolerable
Temperature range, can equally reach ultrahigh vacuum.
If vacuum cavity content has demand for heat, it can directly be punched in chamber corresponding position, be inserted into and carry stainless steel
The heating rod of shell.
Cavity is used the rectangular vacuum cavity of stainless steel by the present invention, rubber ring and metal sealing etc. can be used more
Kind static seal mode, design method is various, applied widely.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
Variation is still in the protection scope of this invention.
Claims (9)
1. a kind of vacuum cavity comprising chamber (1) and the cover board (2) above the chamber (1), the cover board (2) with
The chamber (1) is fixedly connected by connecting flange (3), which is characterized in that the chamber (1) is formed by stainless steel entirety milling
Rectangular chamber, the step edge of a knife I (4) of annular is formed on the upper surface of the chamber (1), with step edge of a knife I (4) position
Set the step edge of a knife II (5) that annular is formed on the corresponding cover board (2), the step edge of a knife I (4) and the step knife
Metal seal (6) is equipped between mouth II (5).
2. vacuum cavity according to claim 1, which is characterized in that two side positions in the chamber (1) are fixed respectively
An arc-shaped clamp device (8) is arranged between two boss (7) in one boss (7), and the device for hooping (8) includes semicircular arc
The both ends of collet (81) and semicircular arc card holder (82), the semicircular arc collet (81) and semicircular arc card holder (82) lead to respectively
Fastener is crossed to be fixedly connected with the boss (7).
3. vacuum cavity according to claim 2, which is characterized in that the semicircular arc collet (81) is set to the chamber
The bottom of room (1), both ends are fixedly connected with two boss (7) respectively.
4. vacuum cavity according to claim 3, which is characterized in that parallel in the chamber (1) to be equipped at least two and be in
The spaced device for hooping (8), the both ends of the device for hooping (8), which correspond to, to be fixed on the boss (7).
5. vacuum cavity according to claim 1, which is characterized in that the metal seal (6) is oxygenless copper washer.
6. vacuum cavity according to claim 1, which is characterized in that the step edge of a knife I (4) of the chamber (1) is set to
The upper surface inner side of the chamber (1).
7. vacuum cavity according to claim 1, which is characterized in that the step edge of a knife II (5) on the cover board (2) is being turned
R values at angle are that the R values of the step edge of a knife I (4) around the corner add step clearance.
8. according to any vacuum cavities of claim 2-7, which is characterized in that at least one side wall of the chamber (1)
It is equipped with vacuum feedthroughs hole (9), in the one side wall of the chamber (1) perpendicular with the device for hooping (8) clip direction
Also set up a suction nozzle (10).
9. vacuum cavity according to claim 8, which is characterized in that the chamber (1) and the connection on the cover board (2)
Flange (3) thickness is more than or equal to 18mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810041931.4A CN108461378B (en) | 2018-01-16 | 2018-01-16 | Vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810041931.4A CN108461378B (en) | 2018-01-16 | 2018-01-16 | Vacuum cavity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108461378A true CN108461378A (en) | 2018-08-28 |
| CN108461378B CN108461378B (en) | 2023-11-10 |
Family
ID=63221016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810041931.4A Active CN108461378B (en) | 2018-01-16 | 2018-01-16 | Vacuum cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108461378B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111447723A (en) * | 2020-04-09 | 2020-07-24 | 西北核技术研究院 | Knife edge sealing type quick-release flange assembly applied to accelerator vacuum system |
| CN116133225A (en) * | 2022-09-08 | 2023-05-16 | 中国科学院近代物理研究所 | Manufacturing method of ultrathin-wall metal lining vacuum chamber |
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|---|---|---|---|---|
| CN2830802Y (en) * | 2005-08-12 | 2006-10-25 | 日扬科技股份有限公司 | High vacuum knife-edge sealing structure |
| CN103456757A (en) * | 2013-07-22 | 2013-12-18 | 中国科学院光电技术研究所 | All-metal sealed EMCCD camera refrigeration dewar |
| CN103775791A (en) * | 2014-02-24 | 2014-05-07 | 马要武 | High-air-tightness electromechanical device shell |
| CN205870341U (en) * | 2016-07-01 | 2017-01-11 | 四川经纬灵仪科技有限公司 | A tool assembly for super pressurization spare of tubulose |
| CN106439020A (en) * | 2016-09-28 | 2017-02-22 | 中国科学院光电研究院 | Rectangular sealing device in vacuum environment and sealing method |
| CN206703397U (en) * | 2017-04-24 | 2017-12-05 | 青岛鸿铭机械有限责任公司 | The device for hooping that foaming machine machine barrel is connected with mould |
| CN207781534U (en) * | 2018-01-16 | 2018-08-28 | 北京市北分仪器技术有限责任公司 | A kind of vacuum cavity |
-
2018
- 2018-01-16 CN CN201810041931.4A patent/CN108461378B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2830802Y (en) * | 2005-08-12 | 2006-10-25 | 日扬科技股份有限公司 | High vacuum knife-edge sealing structure |
| CN103456757A (en) * | 2013-07-22 | 2013-12-18 | 中国科学院光电技术研究所 | All-metal sealed EMCCD camera refrigeration dewar |
| CN103775791A (en) * | 2014-02-24 | 2014-05-07 | 马要武 | High-air-tightness electromechanical device shell |
| CN205870341U (en) * | 2016-07-01 | 2017-01-11 | 四川经纬灵仪科技有限公司 | A tool assembly for super pressurization spare of tubulose |
| CN106439020A (en) * | 2016-09-28 | 2017-02-22 | 中国科学院光电研究院 | Rectangular sealing device in vacuum environment and sealing method |
| CN206703397U (en) * | 2017-04-24 | 2017-12-05 | 青岛鸿铭机械有限责任公司 | The device for hooping that foaming machine machine barrel is connected with mould |
| CN207781534U (en) * | 2018-01-16 | 2018-08-28 | 北京市北分仪器技术有限责任公司 | A kind of vacuum cavity |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111447723A (en) * | 2020-04-09 | 2020-07-24 | 西北核技术研究院 | Knife edge sealing type quick-release flange assembly applied to accelerator vacuum system |
| CN111447723B (en) * | 2020-04-09 | 2022-06-03 | 西北核技术研究院 | Knife edge sealing type quick-release flange assembly applied to accelerator vacuum system |
| CN116133225A (en) * | 2022-09-08 | 2023-05-16 | 中国科学院近代物理研究所 | Manufacturing method of ultrathin-wall metal lining vacuum chamber |
| CN116133225B (en) * | 2022-09-08 | 2023-08-04 | 中国科学院近代物理研究所 | Manufacturing method of ultrathin-wall metal lining vacuum chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108461378B (en) | 2023-11-10 |
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