CN106435509A - Ultrahigh vacuum catalysis device and cluster deposition equipment - Google Patents
Ultrahigh vacuum catalysis device and cluster deposition equipment Download PDFInfo
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- CN106435509A CN106435509A CN201611155536.6A CN201611155536A CN106435509A CN 106435509 A CN106435509 A CN 106435509A CN 201611155536 A CN201611155536 A CN 201611155536A CN 106435509 A CN106435509 A CN 106435509A
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- catalytic unit
- ultrahigh vacuum
- cluster
- catalysis
- catalytic
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
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- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention relates to the field of material preparation equipment, and in particular relates to an ultrahigh vacuum catalysis device and cluster deposition equipment. The ultrahigh vacuum catalysis device comprises an ultrahigh vacuum sample transferring device for transferring clusters, a catalysis device for carrying out gas-phase catalysis and a quadrupole mass-spectrometer for detecting a catalysis product. An outlet end of the ultrahigh vacuum sample transferring device is communicated with an inlet end of the catalysis device; an outlet end of the catalysis device is communicated with an inlet end of the quadrupole mass-spectrometer. The device provided by the invention can be used for carrying out real-time detection on gas-phase catalysis performance of the clusters under a vacuum environment; the real catalysis performance of clean cluster particles can be obtained, and a catalysis mechanism of the clean cluster particles is researched.
Description
Technical field
The present invention relates to material Preparation equipment field, in particular to a kind of ultrahigh vacuum catalytic unit and cluster
Depositing device.
Background technology
Metal, oxidate nano cluster cause the change of electronics, band structure due to quantum size effect.By control
The preparation of nanocluster size, it is possible to achieve the functional material of different purposes, such as biomedicine, gas sensing, photocatalysis etc..Right
In the preparation of nanocluster, generally there are hydrothermal synthesis method and gas phase Cluster deposition method.Compared to Hydrothermal Synthesiss, gas phase cluster
Nanocluster prepared by deposition process has the features such as size is controlled, no other dephasigns, and method is simple.
In Cluster deposition equipment, ultrahigh vacuum catalytic unit is the catalytic performance of on-line checking cluster in ultrahigh-vacuum system.
But traditional ultrahigh vacuum catalytic unit needs artificial transfer cluster, increased operating procedure, while have impact on the pure of cluster
Degree, and then affect the detection of the catalytic performance of cluster.
Content of the invention
It is an object of the invention to provide a kind of ultrahigh vacuum catalytic unit, the catalysis to cluster which can be rapidly and efficiently
Performance is detected, to be analyzed to the catalytic performance of cluster and mechanism.
Another object of the present invention is in a kind of Cluster deposition equipment, and which can quickly generate cluster and in time cluster be carried out
Online catalysis, detection, analysis, reduce experimental procedure, have saved experiment manpower and time.
Embodiments of the invention are realized in：
A kind of ultrahigh vacuum catalytic unit, including the ultrahigh vacuum sample transferring device for transmitting cluster, for gas phase catalysis
Catalytic unit and the quadrupole mass spectrometer for detecting catalysate.The port of export of ultrahigh vacuum sample transferring device and catalytic unit
Entrance point connection, the port of export of catalytic unit connected with quadrupole mass spectrometer entrance point.
In preferred embodiments of the present invention, catalytic unit described above includes catalytic unit body, heater, sample
Base and external heat power supply.External power source is located at catalytic unit body exterior, and sample base is internal located at catalytic unit sheet.
One end of heater is connected with sample base, and the other end of heater is connected with external heat power supply.
In preferred embodiments of the present invention, above-mentioned catalytic unit also includes external power source instrument and for measuring cluster
The electronic transport measurement apparatus of electrology characteristic.External power source instrument is located at catalytic unit body exterior.The one of electronic transport measurement apparatus
End is connected with sample base, and the other end of electronic transport measurement apparatus is connected with external power source instrument.
Ultrahigh vacuum sample transferring device includes transmission lever, settling chamber, and the transmission lever is connected with the settling chamber.
In preferred embodiments of the present invention, above-mentioned transmission lever includes the first expansion link, the second expansion link, substrate folder, institute
State one end closing of the first expansion link, the other end is sheathed on one end of second expansion link, second expansion link another
End is connected with substrate folder.
In preferred embodiments of the present invention, above-mentioned transmission lever also includes substrate slice, and substrate slice is flexibly connected with substrate folder.
In preferred embodiments of the present invention, above-mentioned settling chamber include for observe Cluster deposition observation window, deposit cavity,
Observation window mirror is located at the outside of deposit cavity.
In preferred embodiments of the present invention, above-mentioned ultrahigh vacuum catalytic unit also includes push-pull valve.Push-pull valve is located at and urges
Between gasifying device and magnetic force transfer device.
In preferred embodiments of the present invention, above-mentioned ultrahigh vacuum catalytic unit also includes effusion meter.Effusion meter is arranged at
At the gas access of catalytic unit.
A kind of Cluster deposition equipment, including cluster generator, quality detection device and above-mentioned ultrahigh vacuum catalysis dress
Put.
The beneficial effect of the embodiment of the present invention is：The ultrahigh vacuum catalytic unit of the present invention will be deposited to by sample transferring device
On substrate slice, cluster is sent in catalytic unit and is catalyzed.Directly the catalyst for preparing is urged online under ultrahigh vacuum
Change performance detection, operating time and manpower has been saved, while the catalytic mechanism of cluster preferably can be studied, cluster is in catalysis
It is catalyzed and is detected by mass spectrograph the property of the gas for generating in device to the gas of the introducing of effusion meter control, judges to urge
The effect of change and the mechanism of research catalysis.Catalysis and detection are carried out simultaneously, simplify follow-up detecting step, when having saved
Between.Cluster deposition equipment with above-mentioned ultrahigh vacuum catalytic unit, cluster generation, catalysis detection are integrated in one.Simplify
The operating procedure that prepared by cluster and catalytic performance research is required, can reach the automation apparatus of height, save needed for research
Manpower and materials and time.
Description of the drawings
In order to be illustrated more clearly that the technical scheme of the embodiment of the present invention, below by to be used attached needed for embodiment
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, and it is right to be therefore not construed as
The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other related accompanying drawings.
Fig. 1 is the structural representation of cluster ultrahigh vacuum catalytic unit provided in an embodiment of the present invention；
Fig. 2 is the structural representation of transmission lever provided in an embodiment of the present invention.
Icon：100- ultrahigh vacuum catalytic unit；110- ultrahigh vacuum sample transferring device；120- catalytic unit；140- is quadrupole
Mass spectrograph；111- transmission lever；130- settling chamber；The first expansion link of 115-；The second expansion link of 117-；119- substrate is pressed from both sides；118- is served as a contrast
Egative film 160- effusion meter；The first iron core of 121-；The second iron core of 125-；123- the last the first magnetosphere；127- the last the second magnetosphere；135- sees
Examine window；131- deposit cavity；137- catalytic unit body；139- heater；136- sample base；138- external heat power supply；
150- push-pull valve；126- electronic transport measurement apparatus；124- external power source instrument.
Specific embodiment
Purpose, technical scheme and advantage for making the embodiment of the present invention is clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
The a part of embodiment of the present invention, rather than whole embodiments.The present invention generally described and illustrated in accompanying drawing herein is implemented
The component of example a variety of can be configured to arrange and design.
Therefore, the detailed description of embodiments of the invention below to providing in the accompanying drawings is not intended to limit claimed
The scope of the present invention, but be merely representative of the selected embodiment of the present invention.Based on the embodiment in the present invention, this area is common
The every other embodiment obtained under the premise of creative work is not made by technical staff, belongs to the model of present invention protection
Enclose.
It should be noted that：Similar label and letter represent similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then which need not be defined further and explain in subsequent accompanying drawing.
In describing the invention, it should be noted that term " first ", " second ", " the 3rd " etc. are only used for differentiation and retouch
State, and it is not intended that indicating or hint relative importance.
In describing the invention, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" connection ", " being connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or one
The connection of body ground；Can be mechanically connected, or electrically connect；Can be joined directly together, it is also possible to indirect by intermediary
It is connected, can is the connection of two element internals.For the ordinary skill in the art, can be with concrete condition understanding
State term concrete meaning in the present invention.
Below in conjunction with the accompanying drawings, some embodiments of the present invention are elaborated.In the case of not conflicting, following
Feature in embodiment and embodiment can be mutually combined.
With reference to Fig. 1, the present embodiment provides a kind of ultrahigh vacuum catalytic unit 100, and which includes the ultrahigh vacuum for transmitting cluster
Sample transferring device 110, the catalytic unit 120 for gas phase catalysis and the quadrupole mass spectrometer 140 for detecting catalysate.Superelevation
The port of export of vacuum sample transferring device 110 is connected with the entrance point of catalytic unit 120, the port of export of catalytic unit 120 and quadrupole matter
140 entrance point of spectrometer is connected.
Further, ultrahigh vacuum sample transferring device 110 includes transmission lever 111, settling chamber 130.Transmission lever 111 is telescopic
Enter, leave settling chamber 130.When needing for the cluster for having deposited to deliver into catalytic unit 120 constantly, transmission lever 111 extends,
When cluster is catalyzed in catalytic unit 120, transmission lever is shunk and exits catalytic unit 120.
Further, referring to Fig. 2, transmission lever 111 include the first expansion link 115,117 substrate of the second expansion link folder 119 with
And substrate slice 118.One end of first expansion link 115 is closed using rustless steel, and the other end of the first expansion link 115 is sheathed on second
One end of expansion link 117, the other end of second expansion link 117 is connected with substrate folder 119.First expansion link 115 is stainless
Steel is made.The first iron core 121, the second iron core 125, the first expansion link is provided between first expansion link 115 and the second expansion link 117
115 periphery is arranged with the last the first magnetosphere 123 relative with the first iron core 121, and the periphery of the first expansion link 115 is arranged with and
Relative the last the second magnetosphere 127 of two iron cores 125.Therefore, the last the first magnetic in the last the first magnetosphere 123 is through rustless steel and the first ferrum
Core 121 defines strong magnetic field.Allow when the last the first magnetosphere 123 are promoted, drive the first iron core 121 of inside to transport
Dynamic, and then promote the second expansion link 117 to move.
Meanwhile, substrate folder 119 is flexibly connected with substrate slice 118.When change the last the first magnetosphere 123 and the last the second magnetosphere 127
Relative position when, by magnetic force signal can control substrate folder 119 folding.When the last the first magnetosphere 123 and the last the second magnetosphere
127 relatively close when, substrate folder 119 closes up, promptly substrate slice 118, when the last the first magnetosphere 123 is relative with the last the second magnetosphere 127
Away from when, substrate folder 119 unclamp substrate slices 118.
Further, settling chamber 130 includes observation window 135, deposit cavity 131.When cluster carries out settling chamber, transmission lever will be served as a contrast
Egative film 118 is sent in deposit cavity 131, and then Cluster deposition is on substrate slice 118.Observation window 135 is located at the outer of deposit cavity 131
Portion.For detecting situation that the Cluster deposition of catalytic performance is deposited on substrate slice 118.After the completion of deposition, flexible using first
The effect of bar 115 and the second expansion link 117 is transferred to substrate slice 118 in 136 sample base in catalytic unit 120, passes through
Mobile the last the first magnetosphere 123 is so that the second expansion link 117 leaves catalytic unit 120 and returns in deposit cavity 131.With deliver into
Gas carries out catalytic reaction.After catalysis is completed, identical method is by the sample in 136 sample base in catalytic unit 120
Product are fetched.Deposition is re-started again, and conveying, catalysis, detection process, until experiment terminates.And observation window 135 is used for observing deposition
The position of the substrate slice 118 in chamber 131, angle information.
Further, Fig. 1 is referred again to, between catalytic unit 120 and ultrahigh vacuum sample transferring device 110, is provided with push-pull valve
150.Push-pull valve 150 is used for separating catalytic unit 120 and ultrahigh vacuum sample transferring device 110.When cluster passes sample dress in ultrahigh vacuum
Push-pull valve 150 is closed when putting deposition on 110 substrate slice 118, it is ensured that cluster to be catalyzed is completely deposited at substrate slice 118
On, and then ensure the quantity of cluster to be catalyzed, reduce operating procedure.Cluster in catalytic reaction as catalyst is being advanced
When catalytic unit 120, push-pull valve 150 is opened, it is ensured that all of cluster is admitted in catalytic unit 120 to be carried out being catalyzed instead
Should.
Further, catalytic unit 120 include catalytic unit body 137, heater 139, sample base 136 and
External heat power supply 138.External heat power supply 138 be located at catalytic unit body 137 outside, one end of heater 139 with outer
Portion's heating power supply 138 connects.By external heat power supply 138, heater 139 is heated, and then the good group of heating deposition
Cluster, promotes the carrying out of catalytic reaction, accelerates the speed of catalytic reaction.Preferably, heater 139 can be added using resistance wire
Heat.Temperature range is between 25 DEG C to 600 DEG C.
By sample base 136 in the catalytic unit body 137, the other end of heater 139 and sample base 136
Connection.After substrate slice 118 is passed bar 111 and is delivered to catalytic unit 120, substrate folder 119 unclamps substrate slice 118 so that lining
Egative film 118 is located in sample base 136, is then shunk transmission lever 111 so as to leave catalytic unit 120, and close slotting
Plate valve 150, opens external heat power supply 138, and being passed through gas carries out catalytic reaction.
It should be noted that in other embodiments, the position relationship that heater 139 is obtained with catalytic unit body 137
It is not limited in this one kind of the present embodiment introduction, heater 139 may also be disposed on the interlayer of 137 material of catalytic unit body
In or catalytic unit body 137 inwall, can all play heat effect.
Further, catalytic unit body 137 also includes external power source instrument 124 and for measuring cluster electrology characteristic
Electronic transport measurement apparatus 126.External power source instrument 124 is outside catalytic unit body 137.Electronic transport measurement apparatus 126
One end be connected with sample base 136, the other end of electronic transport measurement apparatus 126 is connected with external power source instrument 124.
Electron transport refers to that carrier receives scattering or collision or downloads the characteristics of motion of stream in outer field action.External electrical
After source instrument 124 is energized so that electronic transport measurement apparatus 126 are also energized, and then detect the electrology characteristic of cluster.
Further, referring to Fig. 1, the port of export of catalytic unit 120 is connected with the entrance point of quadrupole mass spectrometer 140.When defeated
After the completion of the catalytic reaction of the gas being fed in catalytic unit 120, newly-generated gas enters quadrupole mass spectrometer 140.Quadrupole
Mass spectrograph 140 applies radio frequency anti-by four rod-shaped electrodes one group and the mass selector that constitutes two-by-two in the middle of two teams' electrode
Phase alternating voltage.When the voltage in pole bar is designated, the too small ion of quality can be subject to very big voltage influence, so as to carry out
Very fierce concussion, causes to touch pole bar losing electric charge and being taken away by vacuum system；The excessive ion of quality is because can not receive
To enough electrical field draw, ultimately result in and touch pole bar or fly out electric field and mass selector cannot be passed through.And meet the requirements
The ion with specific charge-mass ratio can be stable receptor is reached by electric field.Four-electrode spectrum is arranged according to the demand of client
The relevant parameter of instrument 140, detects to the newly-generated gas of cluster catalysis.The catalytic effect of cluster is judged while the group of research
The catalytic mechanism of cluster.
Further, ultrahigh vacuum catalytic unit 100 also includes effusion meter 160, and effusion meter 160 is located at catalytic unit 120
Gas access at.For controlling gas to be catalyzed to flow into the flow of catalytic unit 120 so that enter catalytic unit 120
Gas fully can carry out catalytic reaction with cluster.Avoid causing because flow is too fast not contacting portion gas with cluster and
Do not carry out catalytic reaction, or insufficient contact so that catalytic reaction carry out insufficient.Finally, cause to pass through quadrupole
The actual quantity of the gas of the electric field that mass spectrograph 140 specifies is less than theoretical value, and then causes analysis result inaccurate.Impact is follow-up
Research to cluster catalytic performance and catalytic mechanism.Simultaneously, it is to avoid flow is excessively slow, detection time is wasted, in turn results in production
The raising of cost.
The operation principle of the present embodiment ultrahigh vacuum catalytic unit 100：
Push-pull valve 150 is closed, substrate folder 119 is caught substrate slice 118, promotes the last the first magnetosphere 123 so that the second expansion link
117 are driven in entrance settling chamber 130 by the first expansion link 115, and then cause substrate slice 118 to be transported into deposit cavity 131.Group
Cluster is deposited on substrate slice 118, observes substrate slice 118 in the position of deposit cavity 131, angle by observation window 135.Open
Push-pull valve 150 further, promotes the last the first magnetosphere 123, and the second expansion link 117 is sent in catalysis chamber device 120.Then
Change the relative position of the last the first magnetosphere 123 and the last the second magnetosphere 127 so that substrate folder 119 launches to cause substrate slice 118 steady
Be placed in sample base 136, and transmission lever is retracted, simultaneously closes off push-pull valve.Open effusion meter 160 to be input into gas
In catalytic unit 120, meanwhile, heater 139 is opened, heats cluster, and catalyzed gas.Gas after being catalyzed is passed through
Quadrupole mass spectrometer 140 is analyzed detection.And connect external power source instrument 124 so that electronic transport measurement apparatus 126 work.
The present embodiment also includes a kind of Cluster deposition equipment, and which includes cluster process units, above-mentioned ultrahigh vacuum catalysis
Device.The port of export of cluster process units is connected with the entrance point of the magnetic force transfer device of cluster ultrahigh vacuum catalytic unit, group
The cluster that cluster process units is produced is entered and is deposited in ultrahigh vacuum sample transferring device, is then admitted to catalytic unit, is led to
Enter gas, gas is occurred catalytic reaction with cluster, finally the gas that catalytic reaction has occurred rolled into a ball by quadrupole mass spectrometer
The research of cluster catalytic performance.
In sum, the present invention is by transporting it into catalytic unit by the cluster for depositing on substrate slice using transmission lever
Interior, meanwhile, it is passed through gas and heats so that gas carries out catalytic reaction with the nanocluster of deposition, then by the gas after catalysis
Body is passed through quadrupole mass spectrometer and is analyzed detection, and then evaluates catalytic performance and the research catalytic mechanism of cluster.Behaviour is saved
Make time and manpower, while the catalytic mechanism of cluster preferably can be studied, cluster convection current in the ultrahigh vacuum catalytic unit
Gauge control introducing gas be catalyzed and by mass spectrograph detect generate gas property, judge catalysis effect with
And the mechanism of research catalysis.Catalysis and detection are carried out simultaneously, are simplified follow-up detecting step, have been saved the time.With upper
The Cluster deposition equipment of ultrahigh vacuum catalytic unit is stated, cluster generation, quality selection, catalysis detection are integrated in one.Simplify
The operating procedure that prepared by cluster and catalytic performance research is required, can reach the automation apparatus of height, save needed for research
Manpower and materials and time.
Upper described only the preferred embodiments of the present invention, are not limited to the present invention, for the technology of this area
For personnel, the present invention can have various modifications and variations.All within the spirit and principles in the present invention, made any repair
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of ultrahigh vacuum catalytic unit, it is characterised in that include for transmit cluster ultrahigh vacuum sample transferring device, for
The catalytic unit of gas phase catalysis and the quadrupole mass spectrometer for detecting catalysate；The port of export of ultrahigh vacuum sample transferring device
Connect with the entrance point of catalytic unit, the port of export of catalytic unit is connected with quadrupole mass spectrometer entrance point.
2. ultrahigh vacuum catalytic unit according to claim 1, it is characterised in that the catalytic unit includes catalytic unit
Body, heater, sample base and external heat power supply, the external power source is located at the catalytic unit body exterior,
The sample base is internal located at the catalytic unit sheet, and one end of the heater is connected with the sample base, described
The other end of heater is connected with the external heat power supply.
3. ultrahigh vacuum catalytic unit according to claim 2, it is characterised in that the catalytic unit also includes external electrical
Source instrument and the electronic transport measurement apparatus for measuring cluster electrology characteristic, the external power source instrument is located at the catalysis dress
Put body exterior, one end of the electronic transport measurement apparatus is connected with the sample base, the electronic transport measurement apparatus another
One end is connected with the external power source instrument.
4. ultrahigh vacuum catalytic unit according to claim 1, it is characterised in that the ultrahigh vacuum sample transferring device includes
Transmission lever, settling chamber, the transmission lever is connected with the settling chamber.
5. ultrahigh vacuum catalytic unit according to claim 4, it is characterised in that the transmission lever includes that first stretches
Bar, the second expansion link, substrate folder, one end closing of first expansion link, the other end is sheathed on the one of second expansion link
End, the other end of second expansion link is connected with substrate folder.
6. the ultrahigh vacuum catalytic unit described in claim 5, it is characterised in that the transmission lever also includes substrate slice, described
Substrate slice is flexibly connected with substrate folder.
7. ultrahigh vacuum catalytic unit according to claim 4, it is characterised in that the settling chamber is also included for observing
The observation window of Cluster deposition, deposit cavity, the observation window is located at the outside of the deposit cavity.
8. ultrahigh vacuum catalytic unit according to claim 1, it is characterised in that the ultrahigh vacuum catalytic unit is also wrapped
Push-pull valve is included, the push-pull valve is Wei Yu the catalytic unit and the ultrahigh vacuum sample transferring device between.
9. ultrahigh vacuum catalytic unit according to claim 1, it is characterised in that the ultrahigh vacuum catalytic unit is also wrapped
Effusion meter is included, the effusion meter is arranged at the gas access of the catalytic unit.
10. a kind of Cluster deposition equipment, it is characterised in that including cluster generator, quality detection device and as right will
Seek the ultrahigh vacuum catalytic unit described in 1-9 any one.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201611155536.6A CN106435509B (en) | 2016-12-14 | 2016-12-14 | A kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611155536.6A CN106435509B (en) | 2016-12-14 | 2016-12-14 | A kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment |
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| CN106435509B CN106435509B (en) | 2019-03-15 |
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| CN105628978A (en) * | 2014-11-04 | 2016-06-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | Ultrahigh vacuum sample transfer device and transfer method |
| CN105717189A (en) * | 2016-02-17 | 2016-06-29 | 上海交通大学 | Device for in-situ detection of catalytic reaction intermediate and product and detection method |
| CN206376002U (en) * | 2016-12-14 | 2017-08-04 | 盐城工学院 | A kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment |
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2016
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| CN2350764Y (en) * | 1998-11-04 | 1999-11-24 | 中国科学院大连化学物理研究所 | Chemical reactor matched withs surface analyzing apparatus |
| CN2837831Y (en) * | 2005-11-11 | 2006-11-15 | 中国科学院物理研究所 | Ultra-high vacuum in-situ growth, characterization and test system |
| CN101013119A (en) * | 2007-02-14 | 2007-08-08 | 西北工业大学 | Dynamic on-line analysis system for chemical gas phase reaction process |
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| CN103789738A (en) * | 2014-01-15 | 2014-05-14 | 盐城工学院 | WO3 cluster beam deposition system and method for preparing WO3 thin film by using WO3 cluster beam deposition system |
| CN105628978A (en) * | 2014-11-04 | 2016-06-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | Ultrahigh vacuum sample transfer device and transfer method |
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| Publication number | Publication date |
|---|---|
| CN106435509B (en) | 2019-03-15 |
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