CN106435509B - A kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment - Google Patents
A kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment Download PDFInfo
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- CN106435509B CN106435509B CN201611155536.6A CN201611155536A CN106435509B CN 106435509 B CN106435509 B CN 106435509B CN 201611155536 A CN201611155536 A CN 201611155536A CN 106435509 B CN106435509 B CN 106435509B
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- ultrahigh vacuum
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
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- General Chemical & Material Sciences (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The present invention relates to material Preparation equipment fields, in particular to a kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment.A kind of ultrahigh vacuum catalytic unit includes for transmitting the ultrahigh vacuum sample transferring device of cluster, the quadrupole mass spectrometer for the catalytic unit of gas phase catalysis and for detecting catalysate.The outlet end of ultrahigh vacuum sample transferring device is connected to the input end of catalytic unit, and the outlet end of catalytic unit is connected to quadrupole mass spectrometer input end.The device can the gas phase catalysis performance under vacuum conditions to cluster be measured in real time, the true catalytic performance of clean cluster particle can be obtained and its catalytic mechanism is studied.
Description
Technical field
The present invention relates to material Preparation equipment fields, in particular to a kind of ultrahigh vacuum catalytic unit and cluster
Depositing device.
Background technique
Metal, oxidate nano cluster cause the variation of electronics, band structure due to quantum size effect.Pass through control
The functional material of different purposes, such as biomedicine, gas sensing, photocatalysis may be implemented in the preparation of nanocluster size.It is right
In the preparation of nanocluster, usually there are hydrothermal synthesis method and gas phase Cluster deposition method.Compared to hydrothermal synthesis, gas phase cluster
The nanocluster of deposition method preparation have size it is controllable, without other miscellaneous phases, the features such as method is simple.
In Cluster deposition equipment, ultrahigh vacuum catalytic unit is the catalytic performance of the on-line checking cluster in ultrahigh-vacuum system.
But traditional ultrahigh vacuum catalytic unit needs artificial transfer cluster, increases operating procedure, while affecting the pure of cluster
Degree, and then influence the detection of the catalytic performance of cluster.
Summary of the invention
It, being capable of the catalysis to cluster rapidly and efficiently the purpose of the present invention is to provide a kind of ultrahigh vacuum catalytic unit
Performance is detected, so as to cluster catalytic performance and mechanism analyze.
Another object of the present invention can quickly generate cluster and carry out in time to cluster in a kind of Cluster deposition equipment
Online catalysis, detection, analysis, reduce experimental procedure, have saved experiment manpower and time.
The embodiment of the present invention is achieved in that
A kind of ultrahigh vacuum catalytic unit, including for transmitting cluster ultrahigh vacuum sample transferring device, be used for gas phase catalysis
Catalytic unit and quadrupole mass spectrometer for detecting catalysate.The outlet end of ultrahigh vacuum sample transferring device and catalytic unit
Input end connection, the outlet end of catalytic unit is connected to quadrupole mass spectrometer input end.
In preferred embodiments of the present invention, catalytic unit described above includes catalytic unit ontology, heating device, sample
Pedestal and external heating power supply.External power supply is located at catalytic unit body exterior, and sample base is set in catalytic unit ontology.
One end of heating device is connect with sample base, and the other end of heating device is connect with external heating power supply.
In preferred embodiments of the present invention, above-mentioned catalytic unit further includes external power supply instrument and for measuring cluster
The electronic transport measuring device of electrology characteristic.External power supply instrument is set to catalytic unit body exterior.The one of electronic transport measuring device
End is connect with sample base, and the other end of electronic transport measuring device is connect with external power supply instrument.
Ultrahigh vacuum sample transferring device includes transmission lever, settling chamber, and the transmission lever is connected to the settling chamber.
In preferred embodiments of the present invention, above-mentioned transmission lever includes the first telescopic rod, the second telescopic rod, substrate folder, institute
State the closed at one end of the first telescopic rod, the other end is sheathed on one end of second telescopic rod, second telescopic rod it is another
End is connected with substrate folder.
In preferred embodiments of the present invention, above-mentioned transmission lever further includes substrate slice, and substrate slice is flexibly connected with substrate folder.
In preferred embodiments of the present invention, above-mentioned settling chamber include for observing the observation window of Cluster deposition, deposit cavity,
Observation window mirror is set to the outside of deposit cavity.
In preferred embodiments of the present invention, above-mentioned ultrahigh vacuum catalytic unit further includes gate valve.Gate valve, which is located at, urges
Makeup is set between magnetic force transfer device.
In preferred embodiments of the present invention, above-mentioned ultrahigh vacuum catalytic unit further includes flowmeter.Flowmeter is set to
At the gas access of catalytic unit.
A kind of Cluster deposition equipment, including cluster generation device, quality detection device and above-mentioned ultrahigh vacuum catalysis dress
It sets.
The beneficial effect of the embodiment of the present invention is: ultrahigh vacuum catalytic unit of the invention will be deposited to by sample transferring device
Cluster is sent into catalytic unit and is catalyzed on substrate slice.Directly the catalyst prepared is urged online under ultrahigh vacuum
Change performance detection, saves operating time and manpower, while can preferably study the catalytic mechanism of cluster, cluster is being catalyzed
The property of catalysis and the gas by mass spectrograph detection generation is carried out in device to the gas of the introducing of flowmeter control, judgement is urged
The effect of change and the mechanism of research catalysis.It is catalyzed and detects while carrying out, subsequent detecting step is simplified, when having saved
Between.Cluster deposition equipment with above-mentioned ultrahigh vacuum catalytic unit generates cluster, catalysis detection is integrated in one.It simplifies
Operating procedure needed for cluster preparation and catalytic performance research, can reach the automation apparatus of height, save needed for research
Manpower and material resources and time.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the structural schematic diagram of cluster ultrahigh vacuum catalytic unit provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of transmission lever provided in an embodiment of the present invention.
Icon: 100- ultrahigh vacuum catalytic unit；110- ultrahigh vacuum sample transferring device；120- catalytic unit；140- quadrupole
Mass spectrograph；111- transmission lever；The settling chamber 130-；The first telescopic rod of 115-；The second telescopic rod of 117-；119- substrate folder；118- lining
Egative film 160- flowmeter；The first iron core of 121-；The second iron core of 125-；123- the last the first magnetosphere；127- the last the second magnetosphere；135- is seen
Examine window；131- deposit cavity；137- catalytic unit ontology；139- heating device；136- sample base；Heating power supply outside 138-；
150- gate valve；126- electronic transport measuring device；124- external power supply instrument.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example a variety of different can configure to arrange and design.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present invention, it should be noted that term " first ", " second ", " third " etc. are only used for distinguishing and retouch
It states, is not understood to indicate or imply relative importance.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" connection ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, it can also be indirect by intermediary
It is connected, can be the connection inside two elements.For the ordinary skill in the art, on being understood with concrete condition
State the concrete meaning of term in the present invention.
With reference to the accompanying drawing, it elaborates to some embodiments of the present invention.In the absence of conflict, following
Feature in embodiment and embodiment can be combined with each other.
Referring to Fig.1, the present embodiment provides a kind of ultrahigh vacuum catalytic units 100 comprising transmits the ultrahigh vacuum of cluster
Sample transferring device 110, the quadrupole mass spectrometer 140 for the catalytic unit 120 of gas phase catalysis and for detecting catalysate.Superelevation
The outlet end of vacuum sample transferring device 110 is connected to the input end of catalytic unit 120, the outlet end of catalytic unit 120 and quadrupole matter
The connection of 140 input end of spectrometer.
Further, ultrahigh vacuum sample transferring device 110 includes transmission lever 111, settling chamber 130.Transmission lever 111 is telescopic
Into, leave settling chamber 130.When needing the cluster deposited delivering into catalytic unit 120 constantly, transmission lever 111 extends,
When cluster is catalyzed in catalytic unit 120, catalytic unit 120 is exited in transmission lever contraction.
Further, referring to fig. 2, transmission lever 111 include the first telescopic rod 115,117 substrate of the second telescopic rod folder 119 with
And substrate slice 118.One end of first telescopic rod 115 is closed using stainless steel, and the other end of the first telescopic rod 115 is sheathed on second
The other end of one end of telescopic rod 117, second telescopic rod 117 is connect with substrate folder 119.First telescopic rod 115 is stainless
Steel is made.The first iron core 121, the second iron core 125, the first telescopic rod are equipped between first telescopic rod 115 and the second telescopic rod 117
115 periphery is arranged with the last the first magnetosphere 123 opposite with the first iron core 121, and the periphery of the first telescopic rod 115 is arranged with and the
Opposite the last the second magnetosphere 127 of two iron cores 125.Therefore, the last the first magnetic in the last the first magnetosphere 123 penetrates stainless steel and the first iron
Core 121 forms strong magnetic field.Allow and drives internal the first iron core 121 fortune when pushing the last the first magnetosphere 123
It is dynamic, and then push the movement of the second telescopic rod 117.
Meanwhile substrate folder 119 is flexibly connected with substrate slice 118.When change the last the first magnetosphere 123 and the last the second magnetosphere 127
Relative position when, by magnetic force signal can control substrate folder 119 folding.When the last the first magnetosphere 123 and the last the second magnetosphere
127 it is relatively close when, substrate folder 119 closes up, promptly substrate slice 118, when the last the first magnetosphere 123 and the last the second magnetosphere 127 relatively
When separate, substrate folder 119 unclamps substrate slices 118.
Further, settling chamber 130 includes observation window 135, deposit cavity 131.When cluster carries out settling chamber, transmission lever will be served as a contrast
Egative film 118 is sent into deposit cavity 131, then on Cluster deposition to substrate slice 118.Observation window 135 is set to the outer of deposit cavity 131
Portion.For detecting the Cluster deposition of catalytic performance the case where depositing on substrate slice 118.It is flexible using first after the completion of deposition
Substrate slice 118 is transferred in 136 sample bases in catalytic unit 120 by the effect of bar 115 and the second telescopic rod 117, is passed through
Mobile the last the first magnetosphere 123 the second telescopic rod 117 leave catalytic unit 120 to return in deposit cavity 131.With deliver into
Gas carries out catalysis reaction.After catalysis is completed, identical method is by the sample in 136 sample bases in catalytic unit 120
Product are fetched.Deposition, conveying, catalysis, detection process, until experiment terminates are re-started again.And observation window 135 is for observing deposition
The position of substrate slice 118 in chamber 131, angle information.
Further, referring again to Fig. 1, gate valve is provided between catalytic unit 120 and ultrahigh vacuum sample transferring device 110
150.Gate valve 150 is for separating catalytic unit 120 and ultrahigh vacuum sample transferring device 110.When cluster passes sample dress in ultrahigh vacuum
It sets and closes gate valve 150 when deposition on 110 substrate slice 118, guarantee that cluster to be catalyzed is completely deposited at substrate slice 118
On, and then guarantee the quantity of cluster to be catalyzed, reduce operating procedure.It is promoted in it will be catalyzed reaction as the cluster of catalyst
When catalytic unit 120, gate valve 150 is opened, it is ensured that all clusters, which are admitted in catalytic unit 120, be catalyzed instead
It answers.
Further, catalytic unit 120 include catalytic unit ontology 137, heating device 139, sample base 136 and
External heating power supply 138.External heating power supply 138 is located at outside catalytic unit ontology 137, one end of heating device 139 and outer
Portion's heating power supply 138 connects.Heating device 139 is heated by external heating power supply 138, and then the group that heating deposition is good
Cluster promotes the progress of catalysis reaction, accelerates the rate of catalysis reaction.Preferably, heating device 139 can be added using resistance wire
Heat.Temperature range is between 25 DEG C to 600 DEG C.
It is set in catalytic unit ontology 137 by sample base 136, the other end and sample base 136 of heating device 139
Connection.After substrate slice 118, which is passed bar 111, is transmitted to catalytic unit 120, substrate folder 119 unclamps substrate slice 118, so that lining
Egative film 118 is located in sample base 136, then shrinks transmission lever 111, away from catalytic unit 120, and closes and inserts
Plate valve 150 opens external heating power supply 138, is passed through gas and carries out catalysis reaction.
It should be noted that in other embodiments, the positional relationship that heating device 139 and catalytic unit ontology 137 obtain
It is not limited in this one kind of the present embodiment introduction, heating device 139 may also be disposed on the interlayer of 137 material of catalytic unit ontology
In or catalytic unit ontology 137 inner wall, can play heat effect.
Further, catalytic unit ontology 137 further includes external power supply instrument 124 and for measuring cluster electrology characteristic
Electronic transport measuring device 126.External power supply instrument 124 is set to outside catalytic unit ontology 137.Electronic transport measuring device 126
One end connect with sample base 136, the other end of electronic transport measuring device 126 is connect with external power supply instrument 124.
Electron transport refers to that carrier receives scattering or collision or downloads the characteristics of motion of stream in outer field action.External electrical
After source instrument 124 is powered, so that electronic transport measuring device 126 is also energized, and then the electrology characteristic of cluster is detected.
Further, referring to Fig. 1, the outlet end of catalytic unit 120 is connect with the input end of quadrupole mass spectrometer 140.When defeated
It is fed into the catalysis of the gas in catalytic unit 120 after the reaction was completed, newly-generated gas enters quadrupole mass spectrometer 140.Quadrupole
It is anti-to apply radio frequency by four rod-shaped electrodes mass selector for forming in pairs among two teams' electrode for mass spectrograph 140
Phase alternating voltage.When the voltage in pole bar is designated, the too small ion of quality will receive very big voltage influence, to carry out
Very fierce concussion leads to touch pole bar losing charge and being taken away by vacuum system；The excessive ion of quality is because cannot be by
To enough electrical field draws, eventually leads to and touch pole bar or fly out electric field and mass selector can not be passed through.And it meets the requirements
The ion with specific charge-mass ratio stable receiver can be reached by electric field.According to the demand of client, four-electrode spectrum is set
The relevant parameter of instrument 140 detects the newly-generated gas of cluster catalysis.Judge the catalytic effect of cluster while the group of research
The catalytic mechanism of cluster.
Further, ultrahigh vacuum catalytic unit 100 further includes flowmeter 160, and flowmeter 160 is set to catalytic unit 120
Gas access at.The flow that catalytic unit 120 is flowed into for controlling gas to be catalyzed, so that into catalytic unit 120
Gas sufficiently can carry out catalysis with cluster and react.Avoid because flow is too fast and cause not contact portion gas with cluster and
Without catalysis reaction or insufficient contact catalysis reaction is carried out insufficient.Finally, lead to that quadrupole can be passed through
The actual quantity of the gas of electric field as defined in mass spectrograph 140 is less than theoretical value, and then causes to analyze result inaccuracy.It influences subsequent
Research to cluster catalytic performance and catalytic mechanism.Meanwhile avoiding flow excessively slow, detection time is wasted, production is in turn resulted in
The raising of cost.
The working principle of the present embodiment ultrahigh vacuum catalytic unit 100:
Gate valve 150 is closed, substrate folder 119 catches substrate slice 118, the last the first magnetosphere 123 pushed, so that the second telescopic rod
117 are driven by the first telescopic rod 115 into settling chamber 130, so that substrate slice 118 is transported into deposit cavity 131.Group
Cluster is deposited on substrate slice 118, observes substrate slice 118 in the position of deposit cavity 131, angle by observation window 135.It opens
Gate valve 150 and further pushes the last the first magnetosphere 123, and the second telescopic rod 117 is sent into catalysis chamber device 120.Then
Change the relative position of the last the first magnetosphere 123 and the last the second magnetosphere 127, so that substrate folder 119 is unfolded so that substrate slice 118 is steady
Be placed in sample base 136, and transmission lever is retracted, simultaneously closes off gate valve.Flowmeter 160 is opened to input gas
In catalytic unit 120, meanwhile, heating device 139 is opened, cluster, and catalyzed gas are heated.Gas after being catalyzed is passed through
Quadrupole mass spectrometer 140 carries out analysis detection.And external power supply instrument 124 is connected, so that electronic transport measuring device 126 works.
The present embodiment further includes a kind of Cluster deposition equipment comprising cluster process units, above-mentioned ultrahigh vacuum catalysis
Device.The outlet end of cluster process units is connected to the input end of the magnetic force transfer device of cluster ultrahigh vacuum catalytic unit, group
The cluster that cluster process units is produced, which enters in ultrahigh vacuum sample transferring device, to be deposited, and catalytic unit is then admitted to, and is led to
Enter gas, gas occurs catalysis with cluster and reacts, finally rolls into a ball the gas that catalysis reaction has occurred by quadrupole mass spectrometer
The research of cluster catalytic performance.
In conclusion the present invention, which passes through, transports it into catalytic unit using transmission lever for the cluster deposited on substrate slice
It is interior, meanwhile, it is passed through gas and heats, reacted so that gas carries out catalysis with the nanocluster of deposition, then by the gas after catalysis
Body is passed through quadrupole mass spectrometer and carries out analysis detection, and then evaluates the catalytic performance and research catalytic mechanism of cluster.Behaviour is saved
Make time and manpower, while can preferably study the catalytic mechanism of cluster, cluster convection current in ultrahigh vacuum catalytic unit
Meter control introducing gas carry out be catalyzed and by mass spectrograph detection generate gas property, judge be catalyzed effect with
And the mechanism of research catalysis.It is catalyzed and detects while carrying out, simplify subsequent detecting step, saved the time.With upper
The Cluster deposition equipment for stating ultrahigh vacuum catalytic unit generates cluster, quality selects, catalysis detection is integrated in one.It simplifies
Operating procedure needed for cluster preparation and catalytic performance research, can reach the automation apparatus of height, save needed for research
Manpower and material resources and time.
It is merely a preferred embodiment of the present invention, is not intended to restrict the invention, for the technology of this field described in upper
For personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (8)
1. a kind of ultrahigh vacuum catalytic unit, which is characterized in that including for transmitting cluster ultrahigh vacuum sample transferring device, be used for
The catalytic unit of gas phase catalysis and quadrupole mass spectrometer for detecting catalysate；The outlet end of ultrahigh vacuum sample transferring device
It is connected to the input end of catalytic unit, the outlet end of catalytic unit is connected to quadrupole mass spectrometer input end；
The catalytic unit includes catalytic unit ontology, heating device, sample base and external heating power supply, the external electrical
Source is located at the catalytic unit body exterior, and the sample base is set in the catalytic unit ontology, the heating device
One end is connect with the sample base, and the other end of the heating device is connect with the external heating power supply；
The catalytic unit further includes external power supply instrument and the electronic transport measuring device for measuring cluster electrology characteristic, institute
External power supply instrument is stated set on the catalytic unit body exterior, one end of the electronic transport measuring device and the sample base
Connection, the other end of the electronic transport measuring device are connect with the external power supply instrument.
2. ultrahigh vacuum catalytic unit according to claim 1, which is characterized in that the ultrahigh vacuum sample transferring device includes
Transmission lever, settling chamber, the transmission lever are connected to the settling chamber.
3. ultrahigh vacuum catalytic unit according to claim 2, which is characterized in that the transmission lever includes first flexible
Bar, the second telescopic rod, substrate folder, first telescopic rod it is closed at one end, the other end is sheathed on the one of second telescopic rod
End, the other end of second telescopic rod and substrate folder connect.
4. ultrahigh vacuum catalytic unit as claimed in claim 3, which is characterized in that the transmission lever further includes substrate slice, described
Substrate slice is flexibly connected with substrate folder.
5. ultrahigh vacuum catalytic unit according to claim 2, which is characterized in that the settling chamber further includes for observing
Observation window, the deposit cavity of Cluster deposition, the observation window are set to the outside of the deposit cavity.
6. ultrahigh vacuum catalytic unit according to claim 1, which is characterized in that the ultrahigh vacuum catalytic unit also wraps
Gate valve is included, the gate valve is between the catalytic unit and the ultrahigh vacuum sample transferring device.
7. ultrahigh vacuum catalytic unit according to claim 1, which is characterized in that the ultrahigh vacuum catalytic unit also wraps
Flowmeter is included, the flowmeter is set at the gas access of the catalytic unit.
8. a kind of Cluster deposition equipment, which is characterized in that including cluster generation device, and such as claim 1-7 any one
The ultrahigh vacuum catalytic unit.
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| CN201611155536.6A CN106435509B (en) | 2016-12-14 | 2016-12-14 | A kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment |
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| CN201611155536.6A CN106435509B (en) | 2016-12-14 | 2016-12-14 | A kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment |
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| CN106435509B true CN106435509B (en) | 2019-03-15 |
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| CN105717189A (en) * | 2016-02-17 | 2016-06-29 | 上海交通大学 | Device for in-situ detection of catalytic reaction intermediate and product and detection method |
| CN206376002U (en) * | 2016-12-14 | 2017-08-04 | 盐城工学院 | A kind of ultrahigh vacuum catalytic unit and Cluster deposition equipment |
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| CN2350764Y (en) * | 1998-11-04 | 1999-11-24 | 中国科学院大连化学物理研究所 | Chemical reactor matched withs surface analyzing apparatus |
| CN2837831Y (en) * | 2005-11-11 | 2006-11-15 | 中国科学院物理研究所 | Ultra-high vacuum in-situ growth, characterization and test system |
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| CN106435509A (en) | 2017-02-22 |
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