CN106405826B - 一种双光路成像的振镜扫描系统及扫描方法 - Google Patents
一种双光路成像的振镜扫描系统及扫描方法 Download PDFInfo
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Families Citing this family (8)
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JP6419893B1 (ja) | 2017-06-02 | 2018-11-07 | 浜松ホトニクス株式会社 | 半導体検査装置 |
CN108007365B (zh) * | 2017-11-21 | 2020-02-11 | 大族激光科技产业集团股份有限公司 | 三维测量系统及使用方法 |
CN108672921A (zh) * | 2018-06-30 | 2018-10-19 | 东莞市镭达激光智能科技有限公司 | 一种透振镜片真同轴成像系统及其操作方法 |
CN109363767B (zh) * | 2018-09-22 | 2024-03-29 | 上海市激光技术研究所有限公司 | 一种激光输出装置及调整方法 |
CN109525762A (zh) * | 2018-12-05 | 2019-03-26 | 深圳英微智能科技有限公司 | 大幅面图像获取方法及设备 |
CN111854632B (zh) * | 2020-06-22 | 2021-12-14 | 新拓三维技术(深圳)有限公司 | 一种高速运动物体的图像测量方法及计算机可读存储介质 |
CN113520594B (zh) * | 2021-05-31 | 2023-08-08 | 浙江大学 | 一种双光路3d成像模组的装配方法 |
CN114760403A (zh) * | 2022-04-21 | 2022-07-15 | 中国科学技术大学 | 一种图像获取系统和方法 |
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