CN106405167B - A kind of probe card for testing integrated circuit - Google Patents
A kind of probe card for testing integrated circuit Download PDFInfo
- Publication number
- CN106405167B CN106405167B CN201610708292.3A CN201610708292A CN106405167B CN 106405167 B CN106405167 B CN 106405167B CN 201610708292 A CN201610708292 A CN 201610708292A CN 106405167 B CN106405167 B CN 106405167B
- Authority
- CN
- China
- Prior art keywords
- probe
- side wall
- flexible bag
- stopper section
- bag shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
Abstract
The invention discloses a kind of probe cards for testing integrated circuit, including probe base and detection circuit board, stopper section is formed on the probe, the lower end of stopper section is resisted against on a flexible bag shell, gas is filled in the flexible bag shell, gas outlet is formed on flexible bag shell, it is hinged with hermatic door on the gas outlet, air channel is formed on the probe aperture side wall of hermatic door side, the side wall of air channel is equipped with gas push piston block, air channel is divided into ventilating zone and resets area by the gas push piston block, resetting spring is equipped in the reset area, one end of the resetting spring is pressed against on gas push piston block, the other end is pressed against on the tip inside wall of air channel；Vertical conductive sheet is plugged in the probe aperture, the upper end of the conductive sheet is movably connected in stopper section upper and lower end and is connected in detection circuit board.The configuration of the present invention is simple manufactures and easy to assembly, while being avoided that the failure of conventional probe card inner spring mechanical fatigue and causing poor contact.
Description
Technical field：
The present invention relates to the technical fields of integrated circuit detection device, are specifically related to a kind of for testing integrated circuit
Probe card.
Background technology：
Probe card is that the element of detection circuit is commonly used in semiconductor technology, is inside disposed with multiple probes, is visited
The arrangement position of needle is corresponding with the circuit configuration on the circuit board under test that this probe card to be detected.Probe card is normally placed in one
It detects on board, circuit board under test is clamped with a tool and is suppressed on probe so that circuit board under test is connected in each probe
On circuit, with probe come detect the circuit on circuit board under test whether normal operation.
Existing probe structure is generally comprised there are one sleeve, is set in sleeve there are two electrode and is connected to two electrodes
Between a spring, one of electrode is fixed on detection and board and is electrically connected detection board, another electrode then may be used
It is slidably disposed in sleeve to connect the solder joint on the circuit board under test to be detected.When circuit board under test presses probe, bullet
Spring is compressed and forces in movable electrode, this electrode is thus made to be pressed into contact and be connected with circuit board under test.Either only set
A movable electrode is set, electrode and detection board are directly connected by spring.
Probe is small element, complicated, and part makes and assembling is all not easy.Existing probe using spring as
Element is connected, and spring can cause poor contact, therefore the error in this technique after permanently because of mechanical fatigue failure etc.
Probe poor contact can often be caused and circuit board under test and detection board can not be connected.
In view of the above shortcomings, the designer, is actively subject to research and innovation, to found, one kind is new structural to be used for
The probe card for testing integrated circuit makes it with more the utility value in industry.
Invention content：
The purpose of the present invention aims to solve the problem that problem of the existing technology, provides a kind of simple in structure, manufacture and assembling side
Just, at the same be avoided that the failure of conventional probe card inner spring mechanical fatigue and cause poor contact for testing the spy of integrated circuit
Needle card.
The present invention relates to a kind of probe card for testing integrated circuit, including probe base and detection circuit board, the spies
There is probe aperture in needle stand, probe is plugged in the probe aperture, the probe of the probe exposes the upper surface of probe base, described
Stopper section is formed on probe, the upper end of the stopper section is resisted against on the side wall of probe aperture, and the lower end of stopper section is resisted against one
On flexible bag shell, gas is filled in the flexible bag shell, the side wall of flexible bag shell is tightly attached on the side wall of probe aperture, flexible bag
Gas outlet is formed on shell, and hermatic door is hinged on the gas outlet, is set between the edge side wall of the hermatic door and gas outlet
There is gasket, air channel is formed on the probe aperture side wall of hermatic door side, the side wall of air channel is equipped with gas push piston block, institute
It states gas push piston block air channel is divided into ventilating zone and resets area, the ventilating zone is connected with hermatic door, the reset area
Interior to be equipped with resetting spring, one end of the resetting spring is pressed against on gas push piston block, the other end is pressed against the end of air channel
On madial wall；
Be plugged with vertical conductive sheet in the probe aperture, the upper end bending forming of the conductive sheet have upper interconnecting piece, under
End bending forming has lower interconnecting piece, and vertical inserting groove, one end of the upper interconnecting piece are formed on the side wall of the stopper section
It is plugged in the inserting groove, vertical guide groove is formed on the side wall of inserting groove, the end of upper interconnecting piece forms protrusion
Guide pad, the guide pad sleeve is in the guide groove, and the lower end of the flexible bag shell is against there is a link block, under described
Interconnecting piece is resisted against the lower face of the link block and is linked together by contact screw with link block, and the contact screw supports
It leans against on the conductive region of detection circuit board.
By above-mentioned technical proposal, at work, probe is located in the probe aperture of probe base the present invention, the probe dew of probe
Go out the upper surface of probe base in order to be connect with to-be-measured integrated circuit.By the flexible bag shell in probe aperture bullet is provided to probe
Power, when the probe contacts circuit under test of probe, probe is extruded, and stopper section is moved into probe aperture, and stopper section squeezes elasticity
Bag shell, flexible bag shell are squeezed out by compressive deformation and by the gas in it from gas outlet, and the thrust of gas to be hinged on gas outlet
On hermatic door open, gas enter the ventilating zone of air channel and by gas push piston block push, gas push piston block towards reset area
Movement simultaneously will reset the compression of the resetting spring in area, and resetting spring stores elastic potential energy, after waiting for that a wheel integrated circuit detects,
Resetting spring, which releases energy, pushes gas push piston block to ventilating zone, and the gas in ventilating zone pushes hermatic door open and reenters bullet
Property bag shell in, flexible bag shell is full of collision by gas again, then upward stopper section, and stopper section drives probe to restore former
Thus one-time detection cycle is completed in position.In above process, inserting groove of the guide pad of the upper interconnecting piece of conductive sheet in stopper section
Guide groove in move up and down, and be kept in contact always with stopper section, the lower interconnecting piece of conductive sheet passes through contact screw and detection
Circuit board connects, so that detection circuit board is electrically connected with probe, to be detected to circuit under test.
Through the above scheme, probe card configuration of the invention is simple, manufactures and easy to assembly, and bullet is replaced by flexible bag shell
Spring provides elastic force so that electrical connection contact works well, and is avoided that the failure of conventional probe card inner spring mechanical fatigue and causes to connect
It touches bad.
As a preference of the above scheme, one layer of toughness elastic layer is coated on the outer wall of the flexible bag shell, it is described
The side wall of toughness elastic layer is tightly attached on the side wall of probe aperture, and the upper end of toughness elastic layer forms and stopper section bottom surface phase
The upper groove of cooperation, stopper section are resisted against in the upper groove, and the lower end of toughness elastic layer forms the top with the link block
The matched lower groove in face, link block are resisted against on the lower groove.By said program, stopper section and link block press up against
On the upper groove and lower groove of toughness elastic layer, the toughness power of toughness elastic layer makes stopper section and link block squeeze flexible bag
It is not easy to be punctured when shell, to ensure to detect progress working properly.
As a preference of the above scheme, there are two the air channel, two air channel phases for molding in the probe aperture
For probe aperture central axis be symmetrical arranged, the structure of two air channels is identical, on flexible bag shell molding there are two respectively with
Two corresponding gas outlets of air channel, are respectively articulated with that there are two hermatic doors on two gas outlets, and the hermatic door is molded over tough
On property elastic layer.By said program, the settings of two gas outlets, hermatic door and air channel make flexible bag shell when squeezing by
Power is uniformly and exhaust is uniform.
As a preference of the above scheme, the upper end of the probe aperture forms detection hole, the upper end of the detection hole
The upper end of the upper surface of penetration probe seat, the stopper section is resisted against on the side wall for the probe aperture that detection hole joins with probe aperture,
The upper end of stopper section forms test section, and for the detection position in detection hole, the probe of the probe includes being molded over detection
The syringe needle of several tapers of portion upper end, the syringe needle are evenly distributed on test section in a ring around the center of test section upper surface
On.
As a preference of the above scheme, guide groove of the guide pad of the upper interconnecting piece of the conductive sheet apart from stopper section
The distance of upper surface exposes the length of probe base upper surface not less than the test section upper end of probe.
As a preference of the above scheme, the position of the link block and stop block is relative to right above and below flexible bag shell
Claim.
As a preference of the above scheme, the bottom thread of contact screw is formed on the lower face of the link block
Hole forms the via of contact screw on the lower interconnecting piece of conductive sheet.
As a preference of the above scheme, inflating port and exhaust outlet are formed on the flexible bag shell.
Above description is only the general introduction of technical solution of the present invention, in order to better understand the technical means of the present invention,
And can be implemented in accordance with the contents of the specification, below with presently preferred embodiments of the present invention and after coordinating attached drawing to be described in detail such as.
Description of the drawings：
The following drawings are only intended to schematically illustrate and explain the present invention, not delimit the scope of the invention.Wherein：
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the structural schematic diagram of flexible bag shell in the present invention；
Fig. 3 is the structural schematic diagram between conductive sheet and stopper section and link block in the present invention；
Fig. 4 is the partial structural diagram of Fig. 1.
Specific implementation mode：
With reference to the accompanying drawings and examples, the specific implementation mode of the present invention is described in further detail.Implement below
Example is not limited to the scope of the present invention for illustrating the present invention.
Referring to Fig. 1, Fig. 4, a kind of probe card for testing integrated circuit of the present invention, including probe base 10 and inspection
Slowdown monitoring circuit plate 20, the probe base 10 is interior to have probe aperture 11, and probe 30, the probe of the probe are plugged in the probe aperture
31 expose the upper surface of probe base 10, and probe 30 includes test section 32, and the upper end of probe aperture 11 forms detection hole 12, the inspection
The upper surface of the upper end penetration probe seat 10 of gaging hole, the test section 32 are located in detection hole 12, and the probe 31 of probe 30 includes
It is molded over the syringe needle 311 of several tapers of 32 upper end of test section, the syringe needle surrounds the center of 32 upper surface of test section in a ring
It is evenly distributed on test section 32.
Referring to Fig. 1, Fig. 2, stopper section 33 is formed on the probe 30, the upper end of the stopper section is resisted against detection hole 12
On the side wall of the probe aperture 11 joined with probe aperture 11, the upper end of stopper section 33 forms the test section 32, stopper section 33
Lower end is resisted against on a flexible bag shell 40, and gas 41 is filled in the flexible bag shell, and the side wall of flexible bag shell 40 is tightly attached to spy
On the side wall of pin hole 11, inflating port 42 and exhaust outlet 43 are formed on flexible bag shell 40, gas outlet is formed on flexible bag shell 40
44, hermatic door 50 is hinged on the gas outlet, and gasket 51 is equipped between the edge side wall and gas outlet 44 of the hermatic door,
Air channel 13 is formed on 11 side wall of probe aperture of 50 side of hermatic door, the side wall of air channel is equipped with gas push piston block 60, institute
It states gas push piston block air channel 13 is divided into ventilating zone 131 and resets area 132, the ventilating zone 131 is connected with hermatic door 50
It is logical, resetting spring 70 is equipped in the reset area 132, one end of the resetting spring is pressed against on gas push piston block 60, is another
Side pressure leans against on the tip inside wall of air channel 13.
Referring to Fig. 1, Fig. 3, vertical conductive sheet 80 is plugged in the probe aperture 11, the upper end of the conductive sheet is bent into
Type has upper interconnecting piece 81, lower end bending forming to have lower interconnecting piece 82, and vertical grafting is formed on the side wall of the stopper section 33
One end of slot 331, the upper interconnecting piece 81 is plugged in the inserting groove 331, and vertical lead is formed on the side wall of inserting groove
To slot 332, the end of upper interconnecting piece 81 forms the guide pad 811 of protrusion, and the guide pad sleeve is in the guide groove 332
Interior, the lower end of the flexible bag shell 40 is against there is a link block 90, and the position of the link block and stop block 33 is relative to elasticity
Bag shell 40 is symmetrical above and below, and the lower interconnecting piece 82 is resisted against the lower face of link block 90 and passes through contact screw 91 with link block 90
It links together, the contact screw is resisted against on the conductive region of detection circuit board 20, is molded on the lower face of link block 90
There is the bottom thread hole 92 of contact screw 91, the via 821 of contact screw 91 is formed on the lower interconnecting piece 82 of conductive sheet 80.
Referring to Fig. 1, Fig. 2, one layer of toughness elastic layer 100, the toughness bullet are coated on the outer wall of the flexible bag shell 40
The side wall of power layer is tightly attached on the side wall of probe aperture 11, and the upper end of toughness elastic layer 100 forms and 33 bottom surface of the stopper section
Matched upper groove 101, stopper section 33 are resisted against in the upper groove 101, and the lower end of toughness elastic layer 100 forms and institute
The matched lower groove 102 in top surface of link block 90 is stated, link block 90 is resisted against on the lower groove 102.
Referring to Fig. 1, there are two the air channels 13 for molding in the probe aperture 11, and two air channels 13 are relative to probe aperture
11 central axis is symmetrical arranged, and the structure of two air channels 13 is identical, on flexible bag shell 40 molding there are two respectively with two
13 corresponding gas outlet 44 of air channel is respectively articulated on two gas outlets there are two hermatic door 50, and the hermatic door is molded over
On toughness elastic layer 100.
Referring to Fig. 1, on the guide groove 332 of the guide pad 811 of the upper interconnecting piece 81 of the conductive sheet 80 apart from stopper section 33
The distance of end face exposes the length of 10 upper surface of probe base not less than 32 upper end of test section of probe 30.
In the specific implementation, probe 30 is located in the probe aperture 11 of probe base 10 present invention, and the probe 31 of probe 30 exposes
The upper surface of probe base 10 with to-be-measured integrated circuit in order to connecting.Probe 30 is carried by the flexible bag shell 40 in probe aperture 11
For elastic force, when the 31 contact measured circuit of probe of probe 30, probe 31 is extruded, and stopper section 33 is moved into probe aperture 11,
Stopper section 33 squeezes flexible bag shell 40, and flexible bag shell 40 is squeezed out by compressive deformation and by the gas 41 in it from gas outlet 44, gas
The thrust of body 41 makes the hermatic door being hinged on gas outlet 44 50 open, and gas 41 enters the ventilating zone 131 of air channel 13 simultaneously
Gas push piston block 60 is pushed, gas push piston block 60 towards the movement of reset area 132 and presses the resetting spring 70 resetted in area 132
Contracting, resetting spring 70 store elastic potential energy, and after waiting for that a wheel integrated circuit detects, resetting spring 70 releases energy pushes away work by gas
Chock 60 is pushed to ventilating zone 131, and the gas 41 in ventilating zone 131 is pushed hermatic door 50 open and reentered in flexible bag shell 40,
Flexible bag shell 40 is full of collision by gas 41 again, then upward stopper section 33, and stopper section 33 drives probe 31 to restore former
Thus one-time detection cycle is completed in position.
In above process, the inserting groove 331 of the guide pad 811 of the upper interconnecting piece 81 of conductive sheet 80 in stopper section 33 is led
It moves up and down into slot 332, and is kept in contact always with stopper section 33, the lower interconnecting piece 82 of conductive sheet 80 passes through contact screw 91
It is connect with detection circuit board 20, so that detection circuit board 20 is electrically connected with probe 30, to be detected to circuit under test.
In conclusion the probe card configuration of the present invention is simple, manufacture and easy to assembly, spring is replaced by flexible bag shell 40
There is provided elastic force so that electrical connection contact works well, and is avoided that the failure of conventional probe card inner spring mechanical fatigue and causes to contact
It is bad.
Probe card provided by the present invention for testing integrated circuit, only specific implementation mode of the invention, but this
The protection domain of invention is not limited thereto, any one skilled in the art the invention discloses technical scope
It is interior, it can easily think of the change or the replacement, should all cover within the scope of the present invention.Therefore, protection scope of the present invention is answered
It is subject to the scope of the claims.
Claims (7)
1. a kind of probe card for testing integrated circuit, including probe base (10) and detection circuit board (20), the probe base
(10) there is probe aperture (11) in, probe (30) is plugged in the probe aperture (11), the probe (31) of the probe, which exposes, to be visited
The upper surface of needle stand (10), it is characterised in that：
Stopper section (33) is formed on the probe (30), the upper end of the stopper section is resisted against on the side wall of probe aperture (11),
The lower end of stopper section (33) is resisted against on a flexible bag shell (40), and gas (41), flexible bag shell are filled in the flexible bag shell
(40) side wall is tightly attached on the side wall of probe aperture (11), and gas outlet (44), the gas outlet are formed on flexible bag shell (40)
On be hinged with hermatic door (50), between the edge side wall of the hermatic door and gas outlet (44) be equipped with gasket (51), hermatic door
(50) air channel (13) is formed on probe aperture (11) side wall of side, the side wall of air channel is equipped with gas push piston block (60),
The gas push piston block by air channel (13) be divided into ventilating zone (131) and reset area (132), the ventilating zone (131) with it is close
Closure door (50) is connected, and resetting spring (70) is equipped in the reset area (132), one end of the resetting spring is pressed against gas and pushes away
On piston block (60), the other end is pressed against on the tip inside wall of air channel (13)；
It is plugged with vertical conductive sheet (80) in the probe aperture (11), the upper end bending forming of the conductive sheet has upper interconnecting piece
(81), lower end bending forming has lower interconnecting piece (82), and vertical inserting groove is formed on the side wall of the stopper section (33)
(331), one end of the upper interconnecting piece (81) is plugged in the inserting groove (331), and it is vertical to be formed on the side wall of inserting groove
Guide groove (332), the end of upper interconnecting piece (81) forms the guide pad (811) of protrusion, and the guide pad sleeve is described
In guide groove (332), the lower end of the flexible bag shell (40) is against having a link block (90), the lower interconnecting piece (82) to be resisted against
The lower face of the link block (90) is simultaneously linked together with link block (90) by contact screw (91), and the contact screw supports
On the conductive region for leaning against detection circuit board (20)；
Inflating port (42) and exhaust outlet (43) are formed on the flexible bag shell (40).
2. the probe card according to claim 1 for testing integrated circuit, it is characterised in that：The flexible bag shell (40)
Outer wall on be coated with one layer of toughness elastic layer (100), the side wall of the toughness elastic layer is tightly attached to the side wall of probe aperture (11)
On, the upper end of toughness elastic layer (100) forms and the matched upper groove in the stopper section (33) bottom surface (101), stopper section
(33) it is resisted against in the upper groove (101), the lower end of toughness elastic layer (100) forms the top surface with the link block (90)
Matched lower groove (102), link block (90) are resisted against on the lower groove (102).
3. the probe card according to claim 2 for testing integrated circuit, it is characterised in that：On the probe aperture (11)
There are two the air channel (13), two air channels to be symmetrical arranged relative to the central axis of probe aperture (11) for molding, and two logical
The structure of air drain (13) is identical, and there are two gas outlets corresponding with two air channel (13) respectively for molding on flexible bag shell (40)
(44), it is respectively articulated on two gas outlets there are two hermatic door (50), the hermatic door is molded on toughness elastic layer (100).
4. the probe card according to claim 1 for testing integrated circuit, it is characterised in that：The probe aperture (11)
Upper end forms detection hole (12), the upper surface of the upper end penetration probe seat (10) of the detection hole, the stopper section (33)
Upper end is resisted against detection hole (12) on the side wall of the probe aperture (11) of probe aperture (11) handing-over, and the upper end of stopper section (33) is molded
There is test section (32), for the detection position in detection hole (12), the probe (31) of the probe (30) includes being molded over detection
The syringe needle (311) of several tapers of portion (32) upper end, the syringe needle are uniform in a ring around the center of test section (32) upper surface
It is distributed on test section (32).
5. the probe card according to claim 4 for testing integrated circuit, it is characterised in that：The conductive sheet (80)
The distance of guide groove (332) upper surface of the guide pad (811) of upper interconnecting piece (81) apart from stopper section (33) is not less than probe
(30) expose the length of probe base (10) upper surface in test section (32) upper end.
6. the probe card according to claim 1 for testing integrated circuit, it is characterised in that：The link block (90) with
The position of stop block (33) is symmetrical above and below relative to flexible bag shell (40).
7. the probe card for testing integrated circuit according to claim 1 or 6, it is characterised in that：The link block
(90) form the bottom thread hole (92) of contact screw (91) on lower face, on the lower interconnecting piece (82) of conductive sheet (80) at
Type has the via (821) of contact screw (91).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610708292.3A CN106405167B (en) | 2016-08-23 | 2016-08-23 | A kind of probe card for testing integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610708292.3A CN106405167B (en) | 2016-08-23 | 2016-08-23 | A kind of probe card for testing integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106405167A CN106405167A (en) | 2017-02-15 |
| CN106405167B true CN106405167B (en) | 2018-11-02 |
Family
ID=58004268
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610708292.3A Active CN106405167B (en) | 2016-08-23 | 2016-08-23 | A kind of probe card for testing integrated circuit |
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| CN (1) | CN106405167B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10698002B2 (en) * | 2017-10-02 | 2020-06-30 | Formfactor Beaverton, Inc. | Probe systems for testing a device under test |
| CN109839522B (en) * | 2017-11-24 | 2021-06-18 | 中华精测科技股份有限公司 | Probe card device and signal switching module thereof |
| CN111122925A (en) * | 2019-12-24 | 2020-05-08 | 杭州易正科技有限公司 | Easy maintenance's test probe seat |
| CN112379135B (en) * | 2020-07-01 | 2022-03-11 | 强一半导体（苏州）有限公司 | Probe card loaded double air inlet channel device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2723871B2 (en) * | 1995-12-21 | 1998-03-09 | 山形日本電気株式会社 | Electrical connection unit |
| JP2001083178A (en) * | 1999-09-13 | 2001-03-30 | Nec Corp | Contact probe and probe device |
| CN101788576A (en) * | 2009-01-22 | 2010-07-28 | 恩益禧电子股份有限公司 | The electrical test electrical test method of device and electronic installation |
| TW201107758A (en) * | 2009-03-12 | 2011-03-01 | Tokyo Electron Ltd | Probe card |
| CN105929208A (en) * | 2016-06-20 | 2016-09-07 | 东莞市联洲知识产权运营管理有限公司 | Test probe card used for detecting integrated circuit |
-
2016
- 2016-08-23 CN CN201610708292.3A patent/CN106405167B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2723871B2 (en) * | 1995-12-21 | 1998-03-09 | 山形日本電気株式会社 | Electrical connection unit |
| JP2001083178A (en) * | 1999-09-13 | 2001-03-30 | Nec Corp | Contact probe and probe device |
| CN101788576A (en) * | 2009-01-22 | 2010-07-28 | 恩益禧电子股份有限公司 | The electrical test electrical test method of device and electronic installation |
| TW201107758A (en) * | 2009-03-12 | 2011-03-01 | Tokyo Electron Ltd | Probe card |
| CN105929208A (en) * | 2016-06-20 | 2016-09-07 | 东莞市联洲知识产权运营管理有限公司 | Test probe card used for detecting integrated circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106405167A (en) | 2017-02-15 |
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