CN106404174A - High-flux birefringence interferometric imaging spectrometer device and imaging method - Google Patents
High-flux birefringence interferometric imaging spectrometer device and imaging method Download PDFInfo
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- CN106404174A CN106404174A CN201610809243.9A CN201610809243A CN106404174A CN 106404174 A CN106404174 A CN 106404174A CN 201610809243 A CN201610809243 A CN 201610809243A CN 106404174 A CN106404174 A CN 106404174A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 34
- 230000004907 flux Effects 0.000 claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 238000001228 spectrum Methods 0.000 claims abstract description 11
- 230000003595 spectral effect Effects 0.000 claims abstract description 7
- 230000010287 polarization Effects 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 3
- 238000013075 data extraction Methods 0.000 claims description 3
- 238000000701 chemical imaging Methods 0.000 claims 2
- 238000011084 recovery Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention discloses a high-flux birefringence interferometric imaging spectrometer device and an imaging method thereof. The spectrometer device comprises a pre-imaging objective lens, a diaphragm, a collimating objective lens, a first parallel splitting polarizing prism, a first Wollaston prism, a second Wollaston prism, a second parallel splitting polarizing prism, an imaging objective lens and a detector which are arranged sequentially in an optical axis-sharing manner. Incident light from a target forms interference on the detector; the detector obtains the interference image information of the target; and Fourier transform spectrum restoration processing is performed, so that the spectral information of the target can be obtained. Compared with a traditional birefringence interferometric imaging system, the device of the invention is provided with the parallel splitting polarizing prisms, so that the luminous flux of the device can be improved by more than 50%, the signal-to-noise ratio of the system can be improved, and the improvement of spectrum recovery precision can be facilitated.
Description
Technical field
The invention belongs to optical imaging field and in particular to a kind of high flux birefringence interference imaging spectrometer apparatus and its
Imaging method.
Background technology
High light spectrum image-forming technology is interfered to pass through the interference light intensity letter adding interferometer to obtain imageable target in imaging systems
Breath, restores the multispectral datacube of imageable target, has high light flux, high spatial resolution and height using Fourier transformation
The advantage of spectral resolution, has very big application potential in fields such as remotely sensed image, resource exploration, environmental monitorings.Luminous flux
It is an important instrument index in high light spectrum image-forming, improves luminous flux and can improve system signal noise ratio, be conducive to improving light
Recovery of spectrum precision.
In recent years, both at home and abroad such high light spectrum image-forming technology is studied.Wherein, the height based on Sagnac interferometer
Flux interference imaging spectral technology, such technical scheme loses at least half of luminous flux；Based on Wollaston prism interferometer device
Technical scheme, luminous flux is generally less than 25%；Based on the birefringence mode inteference imaging spectrometer of Savart prism, luminous flux one
As be less than 25%, the therefore more difficult lifting of optical mechanical system signal to noise ratio.
Content of the invention
It is an object of the invention to provide a kind of high flux birefringence interference imaging spectrometer apparatus and its imaging method, profit
Improve luminous flux with parallel beam splitter ahrens prism, solve luminous flux loss in traditional birefringence interference imaging spectral technology scheme
Larger technical problem.
The technical solution realizing the object of the invention is：A kind of high flux birefringence interference imaging spectrometer apparatus, bag
Include the preposition image-forming objective lens that common optical axis sets gradually, diaphragm, collimator objective, the first parallel beam splitter ahrens prism, first
Wollaston prism, the 2nd Wollaston prism, the second parallel beam splitter ahrens prism, image-forming objective lens and detector, described each
Optical element is contour with respect to imaging device base.
Incident beam from target is imaged on diaphragm by preposition image-forming objective lens, then passes through collimator objective, is formed
Collimated beam, incides the first parallel beam splitter ahrens prism with collimated beam form, and the first parallel beam splitter ahrens prism is by incidence
Light beam is divided into the orthogonal two bunch polarized light of plane of polarization, and the polarization parallel light output of two bunch, wherein a branch of edge incidence side
To propagation, another Shu Ze has a translation with respect to former direction, forms shear difference；This two lines polarized beam is through first
Wollaston prism is divided into two separately the o light of certain angle and e light respectively, and this four articles of light beams are through the 2nd Wollaston
After prism, o light is changed into e light, and e light is changed into o light, and four bundles light is parallel to each other；After the second parallel beam splitter ahrens prism, every
Linearly polarized light beam is divided into the orthogonal two bunch polarized light of plane of polarization, and forms shear difference；This eight light beams are through imaging
Object lens post-concentration interferes on detector target surface.
Based on the imaging method of described birefringence interference imaging spectrometer apparatus, method and step is as follows：
The first step, the incident beam from target is imaged on diaphragm by preposition image-forming objective lens, then passes through collimator objective, shape
Become collimated beam, the first parallel beam splitter ahrens prism is incided with collimated beam form, the first parallel beam splitter ahrens prism is accurate
Collimated optical beam resolves into the orthogonal two bunch polarized light of two plane of polarizations, and the polarization parallel light output of two bunch, wherein a branch of
Propagate along incident direction, another Shu Ze has a translation with respect to former direction, form shear difference.
Second step, above-mentioned two bunch polarized light are broken down into separate certain angle respectively through a Wollaston prism
O light and e light, totally four polarized beams.
3rd step, four bars of polarized beams retrodeviate polarization state through the 2nd Wollaston prism and change, and o light is changed into e light, e
Light is changed into o light, and this four light beams are parallel to each other simultaneously.
4th step, four articles of line polarized lights in the 3rd step are all divided through the second parallel beam splitter ahrens prism, every light beam
Solution becomes the orthogonal two bunch polarized light of two plane of polarizations, and the direction of propagation is parallel and has certain shear difference, forms eight lines
Polarized beam.
5th step, above-mentioned eight linearly polarized light beams interfere on detector target surface through image-forming objective lens post-concentration, by
Detector obtains the interference image information of target, carries out data extraction to interference image information, then through spectrum recovering process is
Restore the spectral information of target.
Compared with prior art, its remarkable advantage is the present invention：（1）Introduce parallel beam splitter ahrens prism, compared to biography
The birefringence interference imaging spectrum system of system, luminous flux brings up to more than 50%.
（2）The superposition of interference information improves system signal noise ratio, is conducive to improving spectrum recovering precision.
Brief description
Fig. 1 is the structural representation of high flux birefringence interference imaging spectrometer apparatus of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in further detail.
In conjunction with Fig. 1, a kind of high flux birefringence interference imaging spectrometer apparatus it is characterised in that：Including common optical axis successively
Setting preposition image-forming objective lens 1, diaphragm 2, collimator objective 3, the first parallel beam splitter ahrens prism 4, a Wollaston prism 5,
2nd Wollaston prism 6, the second parallel beam splitter ahrens prism 7, image-forming objective lens 8 and detector 9, described each optical element phase
Contour for imaging device base.
By goal setting in front of image-forming objective lens 1, the incident beam from target is imaged on light by preposition image-forming objective lens 1
On door screen 2, then pass through collimator objective 3, form collimated beam, the first parallel beam splitter ahrens prism is incided with collimated beam form
4, incident beam is divided into the orthogonal two bunch polarized light of plane of polarization by the first parallel beam splitter ahrens prism 4, and two bunch are inclined
The parallel light that shakes exports, and wherein a branch of another Shu Ze has a translation with respect to former direction along incident direction propagation, forms shear difference；
This two lines polarized beam is divided into two articles of separately the o light of certain angle and e light respectively through a Wollaston prism 5, this
Article four, light beam o light after the 2nd Wollaston prism 6 is changed into e light, and e light is changed into o light, and four bundles light is parallel to each other；Through
After two parallel beam splitter ahrens prisms 7, every linearly polarized light beam is divided into the orthogonal two bunch polarized light of plane of polarization, and is formed
Shear difference；This eight light beams interfere on detector 9 target surface through image-forming objective lens 8 post-concentration.
Above-mentioned first parallel beam splitter ahrens prism 4 and the second parallel beam splitter ahrens prism 7 are each along optical axis（I.e. x-axis）To z
Axle negative direction rotates.
The first piece prism optical axis of a described Wollaston prism 5 and second rib of the 2nd Wollaston prism 6
Mirror optical axis is parallel.
Based on the imaging method of birefringence interference imaging spectrometer apparatus, method and step is as follows：
The first step, the incident beam from target is imaged on diaphragm 2 by preposition image-forming objective lens 1, then passes through collimator objective
3, form collimated beam, the first parallel beam splitter ahrens prism 4, the first parallel beam splitter ahrens prism are incided with collimated beam form
4 collimated beams resolve into the orthogonal two bunch polarized light of two plane of polarizations, and the polarization parallel light output of two bunch, wherein
A branch of another Shu Ze has a translation with respect to former direction along incident direction propagation, forms shear difference；
Second step, above-mentioned two bunch polarized light are broken down into the o of separate certain angle respectively through a Wollaston prism 5
Light and e light, totally four polarized beams；
3rd step, four bars of polarized beams retrodeviate polarization state through the 2nd Wollaston prism 6 and change, and o light is changed into e light, e light
It is changed into o light, this four light beams are parallel to each other simultaneously；
4th step, four articles of line polarized lights in the 3rd step are all broken down into through the second parallel beam splitter ahrens prism 7, every light beam
Article two, the orthogonal two bunch polarized light of plane of polarization, the direction of propagation is parallel and has certain shear difference, forms eight linear polarizations
Light beam；
5th step, above-mentioned eight linearly polarized light beams interfere on detector 9 target surface through image-forming objective lens 8 post-concentration, by visiting
Survey the interference image information that device 9 obtains target, data extraction is carried out to interference image information, then process through spectrum recovering i.e. multiple
Former go out target spectral information.
Claims (4)
1. a kind of high flux birefringence interference imaging spectrometer apparatus it is characterised in that：Including common optical axis set gradually preposition
Image-forming objective lens（1）, diaphragm（2）, collimator objective（3）, the first parallel beam splitter ahrens prism（4）, a Wollaston prism（5）、
2nd Wollaston prism（6）, the second parallel beam splitter ahrens prism（7）, image-forming objective lens（8）And detector（9）, described each light
Learn element contour with respect to imaging device base；
Incident beam from target passes through preposition image-forming objective lens（1）It is imaged on diaphragm（2）On, then pass through collimator objective（3）,
Form collimated beam, the first parallel beam splitter ahrens prism is incided with collimated beam form（4）, the first parallel beam splitter ahrens prism
（4）Incident beam is divided into the orthogonal two bunch polarized light of plane of polarization, and the polarization parallel light output of two bunch, wherein a branch of
Propagate along incident direction, another Shu Ze has a translation with respect to former direction, form shear difference；This two lines polarized beam is through
One Wollaston prism（5）It is divided into two separately the o light of certain angles and e light respectively, this four light beams are through second
Wollaston prism（6）O light is changed into e light afterwards, and e light is changed into o light, and four bundles light is parallel to each other；Through the second parallel beam splitter polarisation
Prism（7）Afterwards, every linearly polarized light beam is divided into the orthogonal two bunch polarized light of plane of polarization, and forms shear difference；This eight
Bar light beam is through image-forming objective lens（8）Post-concentration is in detector（9）Interfere on target surface.
2. birefringence interference imaging spectral imaging device according to claim 1 it is characterised in that：Above-mentioned first parallel point
Bundle ahrens prism（4）With the second parallel beam splitter ahrens prism（7）Each along the rotation of optical axis direction z-axis negative direction.
3. birefringence interference imaging spectral imaging device according to claim 1 it is characterised in that：Described first
Wollaston prism（5）First piece prism optical axis and the 2nd Wollaston prism（6）Second prism optical axis parallel.
4. the imaging method based on the birefringence interference imaging spectrometer apparatus described in claim 1 is it is characterised in that method walks
Suddenly as follows：
The first step, the incident beam from target passes through preposition image-forming objective lens（1）It is imaged on diaphragm（2）On, then pass through collimation
Object lens（3）, form collimated beam, the first parallel beam splitter ahrens prism incided with collimated beam form（4）, the first parallel beam splitter
Ahrens prism（4）Collimated beam is resolved into the orthogonal two bunch polarized light of two plane of polarizations, and two bunch polarized light are put down
Row output, wherein a branch of another Shu Ze has a translation with respect to former direction along incident direction propagation, forms shear difference；
Second step, above-mentioned two bunch polarized light are through a Wollaston prism（5）It is broken down into separate certain angle respectively
O light and e light, totally four polarized beams；
3rd step, four bars of polarized beams are through the 2nd Wollaston prism（6）Retrodeviate polarization state to change, o light is changed into e light, e
Light is changed into o light, and this four light beams are parallel to each other simultaneously；
4th step, four articles of line polarized lights in the 3rd step are through the second parallel beam splitter ahrens prism（7）, every light beam is all decomposed
The orthogonal two bunch polarized light of two plane of polarizations of one-tenth, the direction of propagation is parallel and has certain shear difference, forms eight lines inclined
Shake light beam；
5th step, above-mentioned eight linearly polarized light beams are through image-forming objective lens（8）Post-concentration is in detector（9）Interfere on target surface,
By detector（9）Obtain the interference image information of target, data extraction is carried out to interference image information, then at spectrum recovering
Reason restores the spectral information of target.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110030921A (en) * | 2019-05-14 | 2019-07-19 | 北方工业大学 | Shearing-quantity-adjustable transmission-type dual-frequency laser differential interference measuring device and method |
| CN112654859A (en) * | 2018-09-04 | 2021-04-13 | 科磊股份有限公司 | Multi-wavelength interferometry for defect classification |
| CN114459342A (en) * | 2022-01-25 | 2022-05-10 | 华南师范大学 | Coaxial and off-axis digital holographic switching device based on parallel beam splitting prism |
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| EP1598647A1 (en) * | 2004-05-19 | 2005-11-23 | Eldim Sa | Interferometer and fourier transform spectrometer |
| CN101046409A (en) * | 2007-03-16 | 2007-10-03 | 西安交通大学 | Static birefringent polarizing inteference imaging spectrometer |
| CN101059370A (en) * | 2007-05-11 | 2007-10-24 | 西安交通大学 | High flux, high detection sensitivity minitype polarization interference imaging spectrometer |
| US20120268745A1 (en) * | 2011-04-20 | 2012-10-25 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Ultra-compact snapshot imaging fourier transform spectrometer |
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2016
- 2016-09-07 CN CN201610809243.9A patent/CN106404174A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1598647A1 (en) * | 2004-05-19 | 2005-11-23 | Eldim Sa | Interferometer and fourier transform spectrometer |
| CN101046409A (en) * | 2007-03-16 | 2007-10-03 | 西安交通大学 | Static birefringent polarizing inteference imaging spectrometer |
| CN101059370A (en) * | 2007-05-11 | 2007-10-24 | 西安交通大学 | High flux, high detection sensitivity minitype polarization interference imaging spectrometer |
| US20120268745A1 (en) * | 2011-04-20 | 2012-10-25 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Ultra-compact snapshot imaging fourier transform spectrometer |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112654859A (en) * | 2018-09-04 | 2021-04-13 | 科磊股份有限公司 | Multi-wavelength interferometry for defect classification |
| CN112654859B (en) * | 2018-09-04 | 2022-05-13 | 科磊股份有限公司 | Inspection system and method for defect classification |
| CN110030921A (en) * | 2019-05-14 | 2019-07-19 | 北方工业大学 | Shearing-quantity-adjustable transmission-type dual-frequency laser differential interference measuring device and method |
| CN114459342A (en) * | 2022-01-25 | 2022-05-10 | 华南师范大学 | Coaxial and off-axis digital holographic switching device based on parallel beam splitting prism |
| CN114459342B (en) * | 2022-01-25 | 2023-07-04 | 华南师范大学 | On-axis and off-axis digital holographic switching device based on parallel beam splitting prism |
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