CN106380228B - Flattening heat treatment process for flaky ceramic - Google Patents
Flattening heat treatment process for flaky ceramic Download PDFInfo
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- CN106380228B CN106380228B CN201610743542.7A CN201610743542A CN106380228B CN 106380228 B CN106380228 B CN 106380228B CN 201610743542 A CN201610743542 A CN 201610743542A CN 106380228 B CN106380228 B CN 106380228B
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- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/08—Apparatus or processes for treating or working the shaped or preshaped articles for reshaping the surface, e.g. smoothing, roughening, corrugating, making screw-threads
- B28B11/10—Apparatus or processes for treating or working the shaped or preshaped articles for reshaping the surface, e.g. smoothing, roughening, corrugating, making screw-threads by using presses
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Abstract
The invention relates to a flaky ceramic flattening heat treatment tool and a heat treatment process, relates to the technical field of flaky ceramic heat treatment, and mainly aims to improve the product percent of pass and reduce the production cost. The flaky ceramic flattening heat treatment process comprises the steps of placing flaky ceramic to be flattened in an accommodating groove, enabling a pressing cover to pass through an opening of the accommodating groove, enabling the lower end face of the pressing cover to be pressed on the flaky ceramic to be flattened, namely, installing the flaky ceramic to be flattened in a flaky ceramic flattening heat treatment tool, and applying pressure through a balancing weight; transferring the tool with the to-be-leveled sheet ceramic inside into a heat treatment furnace for heat treatment to enable the to-be-leveled sheet ceramic to deform and flatten; and cooling the tool with the sheet ceramic to be flattened to obtain the finished sheet ceramic. Therefore, the flaky ceramic with warping deformation after sintering treatment or surface treatment can be flattened, the use requirement is met, and the product percent of pass of the flaky ceramic is improved.
Description
Technical Field
The invention relates to the technical field of heat treatment of flaky ceramics, in particular to a flattening heat treatment tool and a flattening heat treatment process for flaky ceramics.
Background
The flaky ceramic is a substrate for preparing a ceramic substrate, and the ceramic substrate prepared from the flaky ceramic has excellent electrical insulation performance, high heat conduction characteristic, excellent solderability and high adhesion strength, can be etched into various patterns like a Printed Circuit Board (PCB), and has great current carrying capacity. Therefore, the ceramic substrate has become a basic material for high-power electronic circuit structure technology and interconnection technology.
At present, a laminated sintering method is commonly used in the processing technology of the sheet ceramic, a certain number of ceramic sheets to be sintered are laminated and then sintered, the material performance of the sheet ceramic obtained after sintering is densified, and the densified sheet ceramic is used as a finished product to manufacture a ceramic substrate.
In the process of implementing the invention, the inventor finds that at least the following problems exist in the prior art:
during sintering, the ceramic wafer to be sintered can deform more or less, particularly, the ceramic wafer to be sintered on the upper part of the stacking layer has the most serious warping deformation and can be treated as a waste product, the product qualification rate and the production period are influenced, and a certain degree of resource waste is caused. .
In addition, in order to meet the requirements of circuits on the surface roughness of the flaky ceramic, surface treatment such as grinding, polishing and the like is required after the ceramic is sintered, and due to the influence of grinding and polishing stress, the flaky ceramic has a certain degree of warping and deformation after grinding and polishing, so that the yield of products is reduced.
Disclosure of Invention
In view of the above, the invention provides a sheet ceramic flattening heat treatment tool and a heat treatment process, and mainly aims to improve the product yield and reduce the production cost.
In order to achieve the purpose, the invention mainly provides the following technical scheme:
on one hand, the embodiment of the invention provides a sheet ceramic flattening heat treatment tool, which is characterized by comprising:
the top of the accommodating groove is opened and is used for placing laminated flaky ceramics to be flattened;
and the outer contour dimension of the lower end surface of the pressing cover for heat treatment is smaller than or equal to the outer contour dimension of the top opening of the accommodating groove for heat treatment, and the pressing cover is used for extending into the opening of the accommodating groove to press the flaky ceramic to be flattened.
On the other hand, the embodiment of the invention provides a flattening heat treatment process for a sheet ceramic subjected to surface treatment and warping deformation, the flattening heat treatment process for the sheet ceramic subjected to surface treatment is used for flattening heat treatment of the sheet ceramic to be flattened subjected to surface treatment into a finished sheet ceramic, wherein the sheet ceramic subjected to surface treatment and to be flattened is warped and deformed, and the flattening heat treatment process for the sheet ceramic comprises the following steps:
placing the surface-treated flaky ceramic to be flattened in an accommodating groove for heat treatment, and enabling a pressing cover to pass through an opening of the accommodating groove to press the lower end face on the surface-treated flaky ceramic to be flattened, namely, installing the surface-treated flaky ceramic to be flattened in a flaky ceramic flattening heat treatment tool;
transferring the tool with the surface-treated flaky ceramic to be flattened into a heat treatment furnace for heat treatment to flatten the surface-treated flaky ceramic;
and cooling the tool with the surface-treated flaky ceramic to be flattened to obtain the finished flaky ceramic.
On the other hand, the embodiment of the invention provides a flattening heat treatment process for sintered flaky ceramics with warp deformation, which uses the above-mentioned flattening heat treatment tool for flaky ceramics to be flattened after sintering to obtain finished flaky ceramics, wherein the sintered flaky ceramics to be flattened are warp deformation, and the flattening heat treatment process for flaky ceramics comprises:
placing the sintered flaky ceramic to be flattened into a containing groove for heat treatment, and enabling a pressing cover to pass through an opening of the containing groove, so that the lower end face of the pressing cover is pressed on the flaky ceramic to be flattened, namely, the sintered flaky ceramic to be flattened is arranged in a flaky ceramic flattening heat treatment tool;
transferring the tool with the sintered flaky ceramic to be flattened into a heat treatment furnace for heat treatment to flatten the deformation of the sintered flaky ceramic to be flattened;
and cooling the tool with the sintered flaky ceramic to be flattened inside to obtain the finished flaky ceramic.
By means of the technical scheme, the sheet ceramic flattening heat treatment tool and the heat treatment process provided by the technical scheme of the invention at least have the following advantages:
according to the technical scheme provided by the embodiment of the invention, the sintered or surface-treated flaky ceramic to be flattened is stacked in the accommodating groove for heat treatment of the flaky ceramic tool, then the abutting cover is pressed on the stacked flaky ceramic to be flattened, and then the flaky ceramic to be flattened is deformed through heat treatment, so that the flaky ceramic to be flattened tends to be flattened, therefore, the sintered or surface-treated warped and deformed flaky ceramic can be flattened, the use requirement is met, and the product percent of pass of the flaky ceramic is improved.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
fig. 1 is a schematic cross-sectional structural view of a sheet-shaped ceramic flattening heat treatment tool according to a first embodiment of the present invention;
FIG. 2 is a schematic flow chart of a flattening heat treatment process for a sheet ceramic according to the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention for achieving the predetermined objects, the following detailed description will be given to the specific implementation, structure, features and effects of the heat treatment tool and the heat treatment process for flattening sheet ceramics according to the present invention with reference to the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "an embodiment" refers to not necessarily the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
Example one
As shown in fig. 1, a sheet-shaped ceramic planarization heat treatment tool according to an embodiment of the present invention includes:
10 a heat treatment accommodating groove, wherein the top of the heat treatment accommodating groove is opened and is used for placing laminated flaky ceramics X100 to be flattened;
20, the outer contour dimension of the lower end surface of the pressing cover is smaller than or equal to the outer contour dimension of the top opening of the accommodating groove 10 for heat treatment, and the pressing cover is used for extending into the opening of the accommodating groove to press the to-be-flattened flaky ceramic X100 downwards.
The depth of the inside of the accommodating groove is determined according to the height of the sintered flaky ceramics to be flattened, which are required to be stacked, and the depth of the inside of the accommodating groove is greater than the height of the stacked sintered flaky ceramics to be flattened; the accommodating groove and the pressing cover for heat treatment can be made of high-temperature resistant materials: for example, the alumina material has a purity of not less than 99 wt%.
According to the technical scheme provided by the embodiment of the invention, the sintered or surface-treated flaky ceramic to be flattened is stacked in the accommodating groove for heat treatment of the flaky ceramic tool, then the abutting cover is used for pressing the stacked flaky ceramic to be flattened, and then the flaky ceramic to be flattened is deformed through heat treatment, so that the flaky ceramic to be flattened tends to be flattened, therefore, the sintered or surface-treated warped and deformed flaky ceramic is flattened, the use requirement is met, and the product percent of pass of the flaky ceramic is improved.
After the sintered or surface-treated flaky ceramic to be flattened is placed in a flaky ceramic flattening heat treatment tool and subjected to high-temperature heat treatment, the flaky ceramic to be flattened is easily adhered to the bottom surface of the accommodating groove for heat treatment and is not easy to take out due to the heat treatment abutting cover pressed on the flaky ceramic to be flattened; in order to facilitate taking out the sheet ceramic subjected to high-temperature treatment from the accommodating groove for heat treatment, as shown in fig. 1, in the accommodating groove 10 for heat treatment of the flattening heat treatment tool for sheet ceramic in the above embodiment, the accommodating groove comprises a hollow cylinder 11 and a bottom plate 12 detachably clamped in the hollow cylinder 11. The shape of the central hole of the cylinder body is matched with that of the bottom plate, and the bottom plate is installed into the cylinder body from an opening at one end of the cylinder body; the central hole of the cylinder body is a vertical hole with the same aperture; the bottom plate is in clearance fit with the central hole of the cylinder body, and the bottom plate is clamped in the cylinder body under the action of friction force. The laminated sintered flaky ceramic to be flattened is stacked on the bottom plate, after heat treatment, the flaky ceramic to be flattened becomes finished flaky ceramic, and an operator can press the finished flaky ceramic to ensure that the finished flaky ceramic and the bottom plate slide in the hollow cylinder and are separated from the hollow cylinder, so that the finished flaky ceramic and the bottom plate are separated; or the operator can press the bottom plate to enable the finished flaky ceramic and the bottom plate to slide in the hollow cylinder and be separated from the hollow cylinder, so that the finished flaky ceramic and the bottom plate can be separated conveniently.
In the heating treatment of the laminated to-be-flattened flaky ceramic after sintering or surface treatment, the warped to-be-flattened flaky ceramic is deformed, the edges of the laminated to-be-flattened flaky ceramic are possibly not on the same vertical plane after deformation, and part of the edges of the to-be-flattened flaky ceramic are sagged during deformation. During the deformation can take place for the flattening lamellar pottery of warping, treating that the flattening lamellar pottery can receive the groove footpath wall restriction that holds the recess all around, make the edge of the range upon range of the lamellar pottery of treating the flattening of back deformation in same vertical plane.
In the specific production, the sintered or surface-treated to-be-flattened sheet ceramics have different appearance specifications and different thickness dimensions, and the pressing force which needs to be applied to the to-be-flattened sheet ceramics is different for the pressing cover, the higher the stacking layer number of the stacked to-be-flattened sheet ceramics is, the thicker the to-be-flattened sheet ceramics is, the greater the buckling deformation degree of the to-be-flattened sheet ceramics is, the greater the weight required by the pressing cover is, and in order to adapt to the to-be-flattened sheet ceramics of different specifications, as shown in fig. 1, the above sheet ceramic flattening heat treatment tool, the pressing cover 20 includes a pressing cover 21 and a balancing weight 22; the lower pressing end of the pressing cover 21 is used for extending into the opening of the accommodating groove, and the balancing weight 22 is pressed on the pressing cover 21. The balancing weight has multiple specifications, is applicable to increasing different counter weight pressures respectively. In addition, the accommodating groove and the gland for heat treatment are in direct contact with the sintered flaky ceramic to be flattened, the flaky ceramic to be flattened can be made of an aluminum oxide material, the purity of the flaky ceramic to be flattened can reach the standard, the counterweight block is not in direct contact with the gland and the sintered flaky ceramic to be flattened, only deformation and diffusion volatilization are needed at high temperature, and the requirement on the purity is also avoided.
In order to enable the pressing cover to apply consistent pressure and stress to the to-be-flattened sheet ceramic and achieve a balanced flattening effect in different batches of production processes, as shown in fig. 1, in the sheet ceramic flattening heat treatment tool, the balancing weight 22 is pressed on the top surface of the pressing cover 21, and the shape of the balancing weight 22 is matched with that of the top surface of the pressing cover 21, namely, the outer contour of the balancing weight can coincide with the edge of the top surface of the pressing cover so as to judge the alignment between the pressing cover and the balancing weight.
The gland can specifically adopt the following shape: the top surface of the gland is circular or matched with the shape of the flaky ceramic to be flattened.
In order to enable the pressing cover and the balancing weight to uniformly bear force on the flaky ceramic to be flattened, the contour size shape of the lower end face of the pressing cover is larger than or equal to the size shape of the pressed surface of the flaky ceramic to be flattened. The lower end face of the pressing cover is a plane, and during leveling, the lower end face can be completely pressed on the pressed surface, so that the flaky ceramic to be leveled is uniformly stressed. In order to enable the pressing cover to move along with the laminated sheet-shaped ceramic to be flattened, as shown in fig. 1, in the above sheet-shaped ceramic flattening heat treatment tool, a side surface 13 of the accommodating groove 10 for heat treatment is perpendicular to a bottom surface 14 of the accommodating groove 10, an outer diameter of a pressing end 21a of the pressing cover 20 is matched with an inner diameter of the accommodating groove 10, the side surface 13 of the accommodating groove 10 serves as a slideway of the pressing end 21a of the pressing cover, and when the pressing end 21a of the pressing cover 20 extends into an opening of the accommodating groove, the lower end surface of the end portion of the pressing end 21a is always parallel to the bottom surface 14. Specifically, the bottom surface of the accommodating groove and the lower end surface of the end part of the pressing end are both planes, and the surface roughness is enabled to reach below 0.3um after processing; the side surface of the containing groove and the side surface of the pressing end are processed, so that the surface roughness reaches below 1.6 um.
Example two
The second embodiment of the present invention provides a flattening heat treatment process for a warped and deformed sheet ceramic after surface treatment, which may use the sheet ceramic flattening heat treatment tool described in the first embodiment, and the sheet ceramic flattening heat treatment tool described in the second embodiment may directly use the sheet ceramic flattening heat treatment tool described in the first embodiment, and specific implementation structures may refer to the relevant contents described in the first embodiment, and are not described herein again. The flaky ceramic flattening heat treatment process is used for carrying out flattening heat treatment on a surface-treated flaky ceramic to be flattened to obtain a finished flaky ceramic, wherein the surface treatment specifically comprises the following conditions that 1, single-side grinding treatment is carried out on the sintered flaky ceramic (the flaky ceramic for carrying out the single-side grinding treatment on the sintered flaky ceramic is formed); 2. carrying out double-sided grinding treatment on the sintered flaky ceramic (forming the flaky ceramic which is subjected to double-sided grinding treatment on the sintered flaky ceramic); 3. performing single-side polishing treatment on the surface of the sintered flaky ceramic (forming the flaky ceramic with the single-side polishing treatment on the surface of the sintered flaky ceramic); 4. and (4) carrying out double-sided polishing treatment on the surface of the sintered flaky ceramic (forming the flaky ceramic with the surface of the sintered flaky ceramic subjected to double-sided polishing treatment). Carrying out surface treatment on the sintered flaky ceramic to be flattened, wherein the surface treatment comprises grinding, polishing and other surface treatments according to the surface roughness requirement of the sintered flaky ceramic to be flattened, so that the surface roughness of the flaky ceramic can be improved, and the warping degree can be reduced; however, at the same time, the ultrathin flaky ceramic after surface treatment is warped due to the presence of the internal processing stress of the flaky ceramic.
As shown in fig. 2, the process of the sheet ceramic planarization heat treatment includes:
100a, placing the to-be-flattened flaky ceramic with the surface treated in a containing groove for heat treatment, and passing a pressing cover through an opening of the containing groove to press the lower end face on the to-be-flattened flaky ceramic with the surface treated, namely, installing the to-be-flattened flaky ceramic with the surface treated in a flaky ceramic flattening heat treatment tool;
when the lower end face of the abutting cover presses on the flaky ceramic to be flattened after surface treatment, a lower pressure is applied to the laminated flaky ceramic to be flattened after surface treatment under the action of the gravity of the abutting cover;
specifically, the abutting cover comprises a pressing cover and a balancing weight; the lower pressing end of the pressing cover is used for extending into the opening of the containing groove, the weight of the balancing weight on the pressing cover is selected and pressed, and under the action of the gravity of the pressing cover and the balancing weight, required lower pressure can be applied to the to-be-flattened flaky ceramic after the laminated surface treatment.
200a, transferring the tool with the surface-treated flaky ceramic to be flattened into a heat treatment furnace for heat treatment to flatten the surface-treated flaky ceramic to be flattened;
during heat treatment, for example, when a sintering kiln such as a muffle furnace, a shuttle furnace or a push plate furnace is used to heat the to-be-flattened flaky ceramic subjected to surface treatment to a certain temperature range, the to-be-flattened flaky ceramic subjected to surface treatment may creep and deform, and under the action of gravity of the pressing cover, the warped and deformed flaky ceramic tends to be subjected to flattening deformation.
300a, cooling the tool with the surface-treated flaky ceramic to be flattened to obtain the finished flaky ceramic.
After cooling, the flaky ceramic to be flattened after the surface treatment is subjected to heat treatment is gradually shaped, and the flatness is high.
According to the technical scheme provided by the embodiment of the invention, the surface-treated flaky ceramic to be flattened is stacked in the accommodating groove for heat treatment of the flaky ceramic tool, then the abutting cover is pressed on the stacked flaky ceramic to be flattened, and then the flaky ceramic to be flattened after surface treatment can be deformed through heat treatment, so that the flaky ceramic to be flattened tends to be flattened, therefore, the flaky ceramic after surface treatment and warping deformation can be flattened to meet the use requirement, and the product percent of pass of the flaky ceramic is improved.
Specifically, before the step of placing the surface-treated to-be-planarized sheet ceramic in the accommodating groove for heat treatment, the method further includes: and carrying out ultrasonic cleaning on the surface of the to-be-flattened flaky ceramic after surface treatment so as to remove stains on the surface of the flaky ceramic.
In a specific implementation, in the above sheet ceramic flattening heat treatment process, the step of placing the surface-treated sheet ceramic to be flattened in the accommodating groove for heat treatment specifically includes: a plurality of sheet-like ceramics are laminated in the accommodating recess for heat treatment, and the lamination height is 10mm or less.
In the process of laminating the to-be-flattened flaky ceramic after surface treatment, the flaky ceramic is not easy to laminate neatly and is easy to scatter in transportation, and further, the flattened heat treatment process of the flaky ceramic wraps the hot melting winding belt around the outer wall of the laminated flaky ceramic. The winding belt is melted by heat, namely the winding belt is melted after being heated to a certain temperature, such as above 500 ℃; the hot melting winding belt can adopt transparent adhesive tape, and the transparent adhesive tape is adhered to the periphery of the stacked ceramic.
In a specific implementation, in the above-mentioned sheet-shaped ceramic planarization heat treatment process, the pressing cover includes a pressing cover and a weight block;
the lower pressing end of the pressing cover is used for extending into the opening of the accommodating groove, and the balancing weight is pressed on the pressing cover;
and the pressure of the lower end face of the gland on the flaky ceramic to be flattened is 0.01-0.05 MPa by selecting the weight of the balancing weight pressed on the gland.
In order to enable the surface-treated to-be-flattened sheet ceramic to be relatively completely flattened in the heat treatment process and simultaneously improve the heating energy efficiency, a gradient heating mode can be adopted, and the tool with the surface-treated to-be-flattened sheet ceramic inside is moved into a heat treatment furnace for heat treatment, and the method specifically comprises the following steps:
heating to T at a rate of 1-5 ℃/min1C, centigrade degree;
at a rate of 0.5 to 3 ℃/min from T1Raising the temperature to T2C, centigrade degree;
heating the mixture from T at a rate of 0.2 to 1 ℃/min2Raising the temperature to T3In degrees Celsius and at T3Keeping 60-120Min at the temperature;
wherein, T1300 ℃ or higher, 600 ℃ or lower, T2Greater than or equal to 700 ℃, less than or equal to 900 ℃, T3Greater than or equal to 1000 ℃ and less than or equal to 1300 ℃.
The frock cooling to the inside treating flattening slice pottery that is equipped with after surface treatment specifically is:
reducing the temperature to T at a cooling rate of 3-5 ℃/min4In degrees centigrade, then naturally cooling, wherein T4Greater than or equal to 400 ℃ and less than or equal to 800 ℃.
In the slow cooling mode, the cooling rate is not too high, and the cooling by adopting the mode can reduce the cracking risk of the to-be-flattened flaky ceramic caused by too fast cooling, improve the strength of the to-be-flattened flaky ceramic and improve the product quality.
EXAMPLE III
Compared with the flattening heat treatment process for the flaky ceramic in the second embodiment, the flattened flaky ceramic in the second embodiment is not ground and polished and is a sintered flaky ceramic blank, and the warpage of the sintered flaky ceramic to be flattened is larger than that of the flaky ceramic to be flattened after surface treatment in the second embodiment; the sheet ceramic planarization heat treatment tool provided in the first embodiment can be directly used in the sheet ceramic planarization heat treatment tool described in the third embodiment, and specific implementation structures can refer to relevant contents described in the first embodiment, and are not described herein again. The flattening heat treatment process of the flaky ceramic is used for flattening heat treatment of the flaky ceramic to be flattened, which is subjected to buckling deformation after sintering, into finished flaky ceramic, and as shown in fig. 2, the flattening heat treatment process of the flaky ceramic comprises the following steps:
100b, placing the sintered flaky ceramic to be flattened in an accommodating groove for heat treatment, and enabling a pressing cover to pass through an opening of the accommodating groove to press the lower end face of the pressing cover on the flaky ceramic to be flattened, namely, installing the sintered flaky ceramic to be flattened in a flaky ceramic flattening heat treatment tool;
when the lower end face of the abutting cover presses on the flaky ceramic to be flattened, a lower pressure is applied to the laminated sintered flaky ceramic to be flattened under the action of the gravity of the abutting cover;
specifically, the abutting cover comprises a pressing cover and a balancing weight; the lower pressing end of the pressing cover is used for extending into the opening of the containing groove, the weight of the balancing weight on the pressing cover is selected and pressed, and under the action of the gravity of the pressing cover and the balancing weight, required lower pressure can be applied to the laminated sintered flaky ceramic to be flattened.
200b, transferring the tool with the sintered flaky ceramic to be flattened into a heat treatment furnace for heat treatment, so that the sintered flaky ceramic to be flattened deforms and is flattened;
the sintered flaky ceramic to be flattened is heated to a certain temperature range in heating treatment, for example, a sintering kiln such as a muffle furnace, a shuttle furnace or a push plate furnace is used, the sintered flaky ceramic to be flattened is subjected to creep deformation to generate deformation, and the warped and deformed flaky ceramic tends to be subjected to flattening deformation under the action of gravity of the abutting cover.
300b, cooling the tool with the sintered flaky ceramic to be flattened inside to obtain the finished flaky ceramic.
After cooling, the heat-treated flaky ceramic to be flattened is gradually shaped, and the flatness is higher.
According to the technical scheme provided by the embodiment of the invention, the sintered flaky ceramic to be flattened is stacked in the accommodating groove for heat treatment of the flaky ceramic tool, the abutting cover is pressed on the stacked flaky ceramic to be flattened, and then the sintered flaky ceramic to be flattened is deformed through heat treatment, so that the sintered flaky ceramic to be flattened tends to be flattened, therefore, the flaky ceramic warped and deformed after the sintering process is flattened to meet the use requirement, and the product percent of pass of the flaky ceramic is improved.
Specifically, before the sintered flaky ceramic to be planarized is placed in the accommodating groove for heat treatment, the method further includes: and carrying out scraping, sand blasting or ultrasonic cleaning treatment on the isolated sand and the stain on the surface of the sintered flaky ceramic to be flattened so as to remove residual sand, stain and the like on the surface of the sintered flaky ceramic to be flattened.
In a specific implementation, in the above sheet ceramic flattening heat treatment process, the step of placing the sintered sheet ceramic to be flattened in the accommodating groove for heat treatment specifically includes: a plurality of sheet-like ceramics are laminated in the accommodating recess for heat treatment, and the lamination height is not more than 35 mm.
In stacking the sintered sheet ceramics to be flattened, the stacking is not easy to be aligned, and the sheets are easy to be scattered during transportation, and therefore, the outer wall of the stacked sheet ceramics is wrapped with the hot-melt winding tape around the circumference. The winding belt is melted by heat, namely the winding belt is melted after being heated to a certain temperature, such as above 500 ℃; the hot melting winding belt can adopt transparent adhesive tape, and the transparent adhesive tape is adhered to the periphery of the stacked ceramic.
In a specific implementation, in the above-mentioned sheet-shaped ceramic planarization heat treatment process, the pressing cover includes a pressing cover and a weight block; the lower pressing end of the pressing cover is used for extending into the opening of the accommodating groove, and the balancing weight is pressed on the pressing cover; and the pressure of the lower end face of the gland on the flaky ceramic to be flattened is 0.05-0.2 MPa by selecting the weight of the balancing weight pressed on the gland.
In order to ensure that the sintered flaky ceramic to be flattened is relatively completely flattened in the heat treatment process and the heating energy efficiency is improved, a gradient heating mode can be adopted, and the tool with the flaky ceramic to be flattened arranged inside is moved into a heat treatment furnace for heat treatment, and the method specifically comprises the following steps:
heating to T at a rate of 1-5 ℃/min5C, centigrade degree;
at a rate of 0.5 to 3 ℃/min from T5Raising the temperature to T6C, centigrade degree;
heating the mixture from T at a rate of 0.2 to 1 ℃/min6Raising the temperature to T7In degrees Celsius and at T7Keeping 60-120Min at the temperature;
wherein, T5300 ℃ or higher, 600 ℃ or lower, T6700 ℃ or higher, 1100 ℃ or lower, T7The high-temperature creep temperature of the ceramic sheet to be flattened is 0-100 ℃.
For the flaky ceramics to be flattened made of different materials, the specific process parameters are as follows:
firstly, the flaky ceramic to be flattened is an alumina flaky ceramic, and the high-temperature creep temperature of the flaky ceramic is 1300-1400 ℃;
secondly, the flaky ceramic to be flattened is zirconia (3Y-TZP) flaky ceramic, and the high-temperature creep temperature of the flaky ceramic is 1200-1400 ℃;
thirdly, the flaky ceramic to be flattened is Zirconia Toughened Alumina (ZTA) flaky ceramic, and the high-temperature creep temperature of the flaky ceramic is 1430-1500 ℃.
The frock cooling to the inside treating the planarization slice pottery that is equipped with after the sintering specifically is:
reducing the temperature to T at a cooling rate of 3-5 ℃/min8In degrees centigrade, then naturally cooling, wherein T8Greater than or equal to 400 ℃ and less than or equal to 800 ℃.
In the slow cooling mode, the cooling rate is not too high, and the cooling by adopting the mode can reduce the cracking risk of the to-be-flattened flaky ceramic caused by too fast cooling, improve the strength of the to-be-flattened flaky ceramic and improve the product quality.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
It will be appreciated that the relevant features of the devices described above may be referred to one another. In addition, "first", "second", and the like in the above embodiments are for distinguishing the embodiments, and do not represent merits of the embodiments.
In the description provided herein, numerous specific details are set forth. It is understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various inventive aspects. However, the disclosed apparatus should not be construed to reflect the intent as follows: that the invention as claimed requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
Those skilled in the art will appreciate that the components of the apparatus of the embodiments may be adapted and arranged in one or more arrangements different from the embodiments. The components of the embodiments may be combined into one component and, in addition, they may be divided into a plurality of sub-components. All of the features disclosed in this specification (including any accompanying claims, abstract and drawings), and all of the components of any apparatus so disclosed, may be combined in any combination, except combinations where at least some of such features are mutually exclusive. Each feature disclosed in this specification (including any accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise.
Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features included in other embodiments, rather than other features, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments. For example, in the following claims, any of the claimed embodiments may be used in any combination. The various component embodiments of the present invention may be implemented in hardware, or in a combination thereof.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or components not listed in a claim. The word "a" or "an" preceding a component or element does not exclude the presence of a plurality of such components or elements. The invention may be implemented by means of an apparatus comprising several distinct elements. In the claims enumerating several means, several of these means may be embodied by one and the same item. The usage of the words first, second and third, etcetera do not indicate any ordering. These words may be interpreted as names.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modification, equivalent change and modification made to the above embodiment according to the technical spirit of the present invention are still within the scope of the technical solution of the present invention.
Claims (14)
1. The utility model provides a slice pottery planarization heat treatment process to warpage after surface treatment uses slice pottery planarization heat treatment frock, treats flattening slice pottery after with surface treatment, and the flattening heat treatment is finished product slice pottery, and wherein treating flattening slice pottery after surface treatment is warpage, its characterized in that, slice pottery planarization heat treatment frock includes:
the top of the accommodating groove is opened and is used for placing laminated flaky ceramics to be flattened;
the outer contour dimension of the lower end face of the heat treatment pressing cover is smaller than or equal to the outer contour dimension of the top opening of the accommodating groove for heat treatment, and the heat treatment pressing cover is used for extending into the opening of the accommodating groove to press the flaky ceramic to be flattened;
the flattening heat treatment process for the flaky ceramic comprises the following steps:
placing the surface-treated flaky ceramic to be flattened in an accommodating groove for heat treatment, passing a pressing cover through an opening of the accommodating groove, pressing the lower end face on the surface-treated flaky ceramic to be flattened, namely, the flaky ceramic to be flattened after surface treatment is arranged in the flaky ceramic flattening heat treatment tool, wherein the pressing cover comprises a pressing cover and a balancing weight, the lower pressing end of the pressing cover extends into the opening of the containing groove, the weight block is pressed on the pressing cover, the pressure of the lower end surface of the pressing cover on the flaky ceramic to be flattened is 0.01-0.05 MPa by selecting the weight of the weight block pressed on the pressing cover, the accommodating groove for heat treatment comprises a hollow cylinder and a bottom plate detachably clamped in the hollow cylinder, and the bottom plate is clamped in the cylinder;
transferring the tool with the surface-treated flaky ceramic to be flattened into a heat treatment furnace for heat treatment to flatten the surface-treated flaky ceramic;
cooling a tool with the surface-treated flaky ceramic to be flattened, stacking the stacked sintered flaky ceramic to be flattened on a bottom plate, pressing the finished flaky ceramic after heat treatment to enable the finished flaky ceramic and the bottom plate to slide in a hollow cylinder and be separated from the hollow cylinder, and separating the finished flaky ceramic from the bottom plate to obtain the finished flaky ceramic; or pressing the bottom plate to enable the finished flaky ceramic and the bottom plate to slide in the hollow cylinder and separate from the hollow cylinder so as to separate the finished flaky ceramic and the bottom plate and obtain the finished flaky ceramic.
2. The process of claim 1, wherein the ceramic sheet is subjected to a flattening heat treatment,
the surface-treated flaky ceramic to be planarized comprises:
the sintered flaky ceramic is subjected to single-side grinding treatment; or
The sintered flaky ceramic is subjected to double-sided grinding treatment; or
The sintered flaky ceramic surface is subjected to single-side polishing treatment; or
And carrying out double-sided polishing treatment on the surface of the sintered flaky ceramic.
3. The process of claim 1, wherein the ceramic sheet is subjected to a flattening heat treatment,
the tool with the surface-treated to-be-flattened flaky ceramic inside is moved into a heat treatment furnace for heat treatment, and the method specifically comprises the following steps:
heating to T at a rate of 1-5 ℃/min1C, centigrade degree;
at a rate of 0.5 to 3 ℃/min from T1Raising the temperature to T2C, centigrade degree;
heating the mixture from T at a rate of 0.2 to 1 ℃/min2Raising the temperature to T3In degrees Celsius and at T3Keeping 60-120Min at the temperature;
wherein, T1300 ℃ or higher, 600 ℃ or lower, T2Greater than or equal to 700 ℃, less than or equal to 900 ℃, T3Greater than or equal to 1000 ℃, less than or equal toAt 1300 degrees celsius.
4. The process of claim 1, wherein the ceramic sheet is subjected to a flattening heat treatment,
the accommodating groove for heat treatment comprises a hollow cylinder body and a bottom plate detachably clamped in the hollow cylinder body.
5. The process of claim 1, wherein the ceramic sheet is subjected to a flattening heat treatment,
the pressing cover comprises a pressing cover and a balancing weight;
the lower pressing end of the pressing cover is used for extending into the opening of the containing groove, and the balancing weight is pressed on the pressing cover.
6. The process of claim 5, wherein the ceramic wafer is subjected to a flattening heat treatment,
the contour dimension and shape of the lower end surface of the gland are more than or equal to the dimension and shape of the pressed surface of the flaky ceramic to be flattened.
7. The process of claim 1, wherein the ceramic sheet is subjected to a flattening heat treatment,
the side surface of the accommodating groove for heat treatment is vertical to the bottom surface of the accommodating groove, the outer diameter size of the lower pressing end of the pressing cover is matched with the inner diameter size of the accommodating groove, the side surface of the accommodating groove is used as a slideway of the lower pressing end of the pressing cover,
when the lower pressing end of the pressing cover extends into the opening of the accommodating groove, the lower end face of the end part of the lower pressing end is always parallel to the bottom face.
8. The utility model provides a slice pottery planarization heat treatment process to warping deformation after sintering uses slice pottery planarization heat treatment frock, treats the flattening slice pottery after with the sintering, and the flattening heat treatment is finished product slice pottery, and wherein, treat that the flattening slice pottery after the sintering is warping deformation, its characterized in that, slice pottery planarization heat treatment frock includes:
the top of the accommodating groove is opened and is used for placing laminated flaky ceramics to be flattened;
the outer contour dimension of the lower end face of the heat treatment pressing cover is smaller than or equal to the outer contour dimension of the top opening of the accommodating groove for heat treatment, and the heat treatment pressing cover is used for extending into the opening of the accommodating groove to press the flaky ceramic to be flattened;
the flattening heat treatment process of the flaky ceramic comprises the following steps:
placing sintered flaky ceramics to be flattened into a containing groove for heat treatment, and enabling a pressing cover to pass through an opening of the containing groove to enable the lower end face of the pressing cover to be pressed on the flaky ceramics to be flattened, namely, installing the sintered flaky ceramics to be flattened into a flaky ceramic flattening heat treatment tool, wherein the pressing cover comprises a pressing cover and a balancing weight, the lower pressing end of the pressing cover extends into the opening of the containing groove, the balancing weight is pressed on the pressing cover, and the pressure of the lower end face of the pressing cover on the flaky ceramics to be flattened is 0.05-0.2 Mpa by selecting the weight of the balancing weight pressed on the pressing cover, wherein the containing groove for heat treatment comprises a through cylinder body and a bottom plate which is detachably clamped in the through cylinder body, and the bottom plate is clamped in the cylinder body;
transferring the tool with the sintered flaky ceramic to be flattened into a heat treatment furnace for heat treatment to flatten the deformation of the sintered flaky ceramic to be flattened;
cooling a tool filled with sintered flaky ceramics to be flattened, stacking the stacked sintered flaky ceramics to be flattened on a bottom plate, pressing finished flaky ceramics after heat treatment to ensure that the finished flaky ceramics and the bottom plate slide in a hollow cylinder and are separated from the cylinder, and separating the finished flaky ceramics from the bottom plate to obtain the finished flaky ceramics; or pressing the bottom plate to enable the finished flaky ceramic and the bottom plate to slide in the hollow cylinder and separate from the hollow cylinder so as to separate the finished flaky ceramic and the bottom plate and obtain the finished flaky ceramic.
9. The process of claim 8, wherein the ceramic wafer is subjected to a flattening heat treatment,
the tool with the sintered flaky ceramic to be flattened is moved into a heat treatment furnace for heat treatment, and the method specifically comprises the following steps:
heating to T at a rate of 1-5 ℃/min5C, centigrade degree;
at a rate of 0.5 to 3 ℃/min from T5Raising the temperature to T6C, centigrade degree;
heating the mixture from T at a rate of 0.2 to 1 ℃/min6Raising the temperature to T7In degrees Celsius and at T7Keeping 60-120Min at the temperature;
wherein, T5300 ℃ or higher, 600 ℃ or lower, T6700 ℃ or higher, 1100 ℃ or lower, T7The high-temperature creep temperature of the ceramic sheet to be flattened is 0-100 ℃.
10. The process of claim 9, wherein the ceramic wafer is subjected to a flattening heat treatment,
the sintered flaky ceramic to be flattened is an alumina flaky ceramic, and the high-temperature creep temperature of the sintered flaky ceramic is 1300-1400 ℃; or the like, or, alternatively,
the sintered flaky ceramic to be flattened is zirconia (3Y-TZP) flaky ceramic, and the high-temperature creep temperature of the flaky ceramic is 1200-1400 ℃; or the like, or, alternatively,
the sintered flaky ceramic to be flattened is Zirconia Toughened Alumina (ZTA) flaky ceramic, and the high-temperature creep temperature of the flaky ceramic is 1430-1500 ℃.
11. The process of claim 8, wherein the ceramic wafer is subjected to a flattening heat treatment,
the accommodating groove for heat treatment comprises a hollow cylinder body and a bottom plate detachably clamped in the hollow cylinder body.
12. The process of claim 8, wherein the ceramic wafer is subjected to a flattening heat treatment,
the pressing cover comprises a pressing cover and a balancing weight;
the lower pressing end of the pressing cover is used for extending into the opening of the containing groove, and the balancing weight is pressed on the pressing cover.
13. The process of claim 12, wherein the ceramic wafer is subjected to a flattening heat treatment,
the contour dimension and shape of the lower end surface of the gland are more than or equal to the dimension and shape of the pressed surface of the flaky ceramic to be flattened.
14. The process of claim 8, wherein the ceramic wafer is subjected to a flattening heat treatment,
the side surface of the accommodating groove for heat treatment is vertical to the bottom surface of the accommodating groove, the outer diameter size of the lower pressing end of the pressing cover is matched with the inner diameter size of the accommodating groove, the side surface of the accommodating groove is used as a slideway of the lower pressing end of the pressing cover,
when the lower pressing end of the pressing cover extends into the opening of the accommodating groove, the lower end face of the end part of the lower pressing end is always parallel to the bottom face.
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| CN107658230A (en) * | 2017-08-30 | 2018-02-02 | 广东风华高新科技股份有限公司 | A kind of regulation and control method of ceramic chips and ltcc substrate surface roughness |
| CN111554961B (en) * | 2020-04-03 | 2023-12-15 | 佳禾智能科技股份有限公司 | Device for activating double faced adhesive tape |
| CN116141475B (en) * | 2023-04-04 | 2023-07-18 | 合肥中航天成电子科技有限公司 | Ceramic flatness improvement method |
| CN117245460B (en) * | 2023-11-15 | 2024-02-02 | 苏州博志金钻科技有限责任公司 | Surface treatment method and device for ceramic grinding sheet |
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