CN106370311A - Temperature measuring device and measuring method for thermal analyzer - Google Patents
Temperature measuring device and measuring method for thermal analyzer Download PDFInfo
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- CN106370311A CN106370311A CN201610921802.5A CN201610921802A CN106370311A CN 106370311 A CN106370311 A CN 106370311A CN 201610921802 A CN201610921802 A CN 201610921802A CN 106370311 A CN106370311 A CN 106370311A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
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Abstract
The invention relates to a temperature measuring device and measuring method for a thermal analyzer. The method comprises: a sensor array for absorbing infrared radiation energy and an image sensor are arranged inside a sealed heating furnace, the sensor array transmits a collected infrared radiation signal to a signal processor to form infrared thermogram information and transmits the information to a computer; the image sensor arranged inside the sealed heating furnace transmits collected image information inside the heating furnace to the computer by an acquisition card; and the computer carries out information fusion processing on the received infrared thermogram information and the image information collected by the image sensor to obtain new temperature data, and the temperature distribution situation inside the heating furnace is displayed based on the new temperature data. According to the invention, a defect caused by contact type temperature measuring is overcome; and the temperature environment can be measured precisely and the temperature measuring range can be extended. The temperature measuring device and measuring method can be widely applied to temperature measuring of an overall temperature filed in sealed vacuum space, especially to a vacuum occasion needing precise measurement of the overall environment temperature.
Description
Technical field
The present invention relates to a kind of temperature measuring equipment and measuring method, especially with regard to one kind in measurement airtight vacuum space
Bulk temperature field in application the temperature measuring equipment for thermal analyzer and measuring method.
Background technology
Existing temperature measurement technology has contact and contactless two kinds.Contact temperature-measuring method includes expansion type and surveys
Temperature, electricity quantity type thermometric and several big class such as contact photoelectric, thermocolour thermometric.Contact thermometry measurement when need with testee or
Medium is fully contacted, and general measure is measurand and the equilibrium temperature of sensor, can have one to dut temperature in measurement
Fixed interference.Contactless temperature-measuring method does not need to contact with measurand, thus without interference with temperature field, dynamic response characteristic one
As also fine, but measurand apparent condition can be subject to or measure medium physical parameter and be affected.Non-contact temperature measuring method master
Including radiant type thermometric, spectrographic method thermometric, laser interference formula thermometric and sound wave temp measuring method etc..
Mainly use thermocouple temperature measurement method in existing thermal-analysis instrumentation temperature survey, this method is a kind of
Contact temperature-measuring method, can record experiment and carry out required temperature value, but, so also there is lacking of contact temperature-measuring
Point measurement is measurand and the equilibrium temperature of sensor, can have certain interference to dut temperature in measurement.In addition,
This method can only obtain the temperature of any it is impossible to obtain bulk temperature situation in thermal-analysis instrumentation.
Content of the invention
For the problems referred to above, it is an object of the invention to provide a kind of temperature measuring equipment for thermal analyzer and measurement side
Method, the shortcoming which overcoming contact temperature-measuring, can accurately measure overall temperature environment, expand temperature measurement range.
For achieving the above object, the present invention takes a kind of technical scheme below: thermometry for thermal analyzer,
It is characterized in that, comprise the following steps: 1) be provided with airtight heating stove absorb infrared energy sensor array and
Imageing sensor, the sensor array absorbing infrared energy transmits the infrared radiation signal collecting to heating furnace
Signal processor, carry out image information process, form Infrared Thermogram information and simultaneously transmit to computer；2) in airtight heating
In stove, the imageing sensor of setting transmits the acquired card of image information in the heating furnace collecting to computer；3) computer will
The image information of the Infrared Thermogram information receiving and imageing sensor collection carries out use processing, obtains new temperature
Data, shows the temperature distribution state in heating furnace by this new temperature data.
Further, described step 3) in, use processing process is as follows: 3.1) relation between temperature and color is entered
Rower is fixed, sets up the corresponding relation of Infrared Thermogram and temperature；3.2) by the sensor array absorbing infrared energy and letter
Number processor obtains the first width Infrared Thermogram, obtains this infrared thermal imagery in figure according to the corresponding relation of Infrared Thermogram and temperature
Temperature value corresponding to each pixel is t1；3.3) the second width figure is obtained by ccd thermal-flame image detector and capture card
Picture, this image is the image in visible-range, and the Wien according to planck formula approximately obtains optical imagery color and temperature
Relation, and then obtain the temperature value t corresponding to each pixel in the second width image2；3.4) adopt the temperature of linear weighted function
Data fusion method, by corresponding for first width each pixel of infrared thermal imagery in figure temperature value t1With second each pixel of width in figure
The corresponding temperature value t of point2Merged, obtained each pixel in image after the first width Infrared Thermogram and the second width image co-registration
The corresponding temperature value t of point3；3.5) utilize step 3.1) corresponding relation of mid-infrared thermography and temperature, according to each temperature value t3
Obtain corresponding pixel, then form the figure after the first width Infrared Thermogram and the second width image co-registration by this pixels all
Picture, and then obtain representing the color fusion image of heating in-furnace temperature information, and shown by display.
Further, described step 3.1) in, detailed process is: 3.1.1) adopt existing high-precision small-sized blackbody furnace to be mark
Quasi- airtight heating stove, controls standard airtight heating stove to reach different temperature, simultaneously using the sensing absorbing infrared energy
Device array obtains the Infrared Thermogram under different temperatures；3.1.2) infrared by each obtained using existing image partition method
Thermography is all split, and obtains some pixels；3.1.3) extract the gray value of each pixel, and then obtain one group of temperature and image
The corresponding data of gray scale；3.1.4) storing step 3.1.3) in corresponding data, form the corresponding pass of Infrared Thermogram and temperature
System；When carrying out temperature survey, its corresponding temperature value can be found according to corresponding Infrared Thermogram gray value.
Further, described step 3.3) in, optical imagery color is as follows with the relation of temperature:
In formula, λr、λg、λbIt is respectively the wavelength corresponding to tri- passage dichroism peak of curves of r, g, b；re、ge、bePoint
Not Wei ccd thermal-flame image detector image end fluorescent material trichromatic coefficients；c2For constant, c2=0.01438833m k, m
For rice, k is Kelvin；And:
ptb(λr) for r passage radiation filtering spectrum, ptb(λb) for b passage radiation filtering spectrum, ptb(λg) for g passage spoke
Penetrate filtering spectrum.
Further, described step 3.4) in, temperature value t3=ut1+vt2, u is temperature value t1Credibility, v be temperature value t2
Credibility.
Further, by described temperature value t1Credibility u, temperature value t2Credibility v be reduced to a letter of temperature respectively
Number, to be embodied the change of corresponding credibility by the linear function of temperature, the linear function of temperature is respectively as follows:
In formula, tmaxFor maximum temperature set in advance.
A kind of temperature measuring equipment for thermal analyzer realizing said method it is characterised in that: this device include inhale
Receive sensor array, imageing sensor, signal processor, capture card, computer and the display of infrared energy；Described biography
Sensor array and imageing sensor are arranged at the crucible interior sidewall surface of airtight heating stove；And described sensor array passes through to connect
Line with positioned at described airtight heating stove outside described signal processor electrically connect, described image sensor pass through connecting line and position
Described capture card electrical connection outside in described airtight heating stove；Described sensor array transmits infrared radiation signal to described
Signal processor, described signal processor transmits after the infrared radiation signal receiving process to described computer, described figure
As image information in described airtight heating stove is transmitted to described computer by sensor through described capture card；Described computer will connect
Obtain temperature field after the signal processing receiving, and transmit and carry out image to described display and show.
Further, the connecting line between described sensor array and described signal processor, and described image sensor
Connecting line and described capture card between all passes through the furnace wall of described airtight heating stove, and between described connecting line and described furnace wall
Using sealing member sealing.
Further, the described sensor array absorbing infrared energy is using the infrared focus plane being made up of thermal detector
Array.
Further, described image sensor adopts ccd thermal-flame image detector.
Due to taking above technical scheme, it has the advantage that the 1, present invention using in airtight heating stove to the present invention
Setting absorbs the sensor array of infrared energy and imageing sensor to carrying out contactless temperature-measuring in heating furnace, it is to avoid
The shortcoming of contact temperature-measuring, simultaneously during thermal analysis experiment, the profiling temperatures in heating furnace constantly change, this
Plant contactless temp measuring method and can observe the profiling temperatures monitored in thermal analyzer heating furnace by real-time online, not only can
The in-furnace temperature of adjustment heating in time, finds instrument failure, experiment fault in time, and more thermal analysis experiment provides visual temperature
Degree view data so that experimental temperature environment can be with observed and recorded, the improvement for thermal analysis experiment from now on and the development side of providing
Just.2nd, present invention employs radiation thermometry it is achieved that tested thermal field is not disturbed in measurement, do not affect thermal field distribution, have higher
Accuracy of measurement.3rd, the present invention adopts real-time online to observe the profiling temperatures in monitoring thermal analyzer heating furnace, not only
Heating in-furnace temperature can be adjusted in time, in time find instrument failure, experiment fault, more thermal analysis experiment provide visual
Temperature pattern data is so that experimental temperature environment can be with observed and recorded.4 present invention incorporates infrared radiation temperature and spectrum are surveyed
Warm method, expands temperature measurement range, and the temperature that can be widely used in measuring the bulk temperature field in airtight vacuum space is surveyed
Amount, especially suitable for the vacuum occasion needing accurate measurement integrated environment temperature.
Brief description
Fig. 1 is that in the present invention, radiation image and optical imagery obtain process schematic；
Fig. 2 is temperature pattern fusion process schematic diagram in the present invention；
Fig. 3 is the image schematic diagram after merging in the embodiment of the present invention.
Specific embodiment
When the heating furnace environment of thermal analyzer is vacuum, heat is propagated in thermal-radiating mode.Heat radiation be object by
In the phenomenon with temperature and radiated electromagnetic wave.When temperature is relatively low, mainly radiated with sightless infrared light, when temperature is
In heat radiation when 300 DEG C, wavelength the strongest is in ultrared.When the temperature of object raises, outside emittance increases, correspondingly
Radiation spectrum moves to the short direction of wavelength.When object temperature 500 DEG C with up to 800 DEG C when, ripple the strongest in heat radiation
Long component is in visible region.In Furnace Production Process, with the change of temperature, the electromagnetic wave of radiation changes.Therefore,
The temperature conditionss that the present invention is reflected for the electromagnetic wave of two kinds of wavelength in whole process are studied, and are obtained according to two ways
The information fusion obtaining, thus obtain accurate temperature information.With reference to the accompanying drawings and examples detailed retouching is carried out to the present invention
State.
As shown in figure 1, the present invention provides a kind of temperature measuring equipment for thermal analyzer, it includes absorbing infra-red radiation
The sensor array 1 of energy, imageing sensor 2, signal processor 3, capture card 4, computer 5 and display 6.Sensor array
1 and imageing sensor 2 be arranged at the crucible interior sidewall surface of airtight heating stove 7, and sensor array 1 passes through connecting line and is located at
Signal processor 3 outside airtight heating stove 7 electrically connects, and imageing sensor 2 passes through connecting line and outside airtight heating stove 7
Capture card 4 electrically connect, connecting line pass through airtight heating stove 7 furnace wall, and between connecting line and furnace wall adopt sealing member seal.
Sensor array 1 transmits infrared radiation signal to signal processor 3, and signal processor 3 is by the infrared radiation signal receiving
Transmit after process to computer 5, imageing sensor 2 transmits acquired for image information in airtight heating stove 7 card 4 to computer 5.
Computer 5 obtains temperature field by after the signal processing receiving, and transmits and carry out image to display 6 and show, according to image face
Color judges the temperature in airtight heating stove, realizes the measurement to temperature.
In above-described embodiment, the sensor array 1 absorbing infrared energy can be red using be made up of thermal detector
Outer focal plane arrays (FPA).Infrared radiation signal is converted into after the signal of telecommunication transmitting to signal processor 3 by thermal detector, at amplification
Manage, be converted into video standard signal, obtain Infrared Thermogram, and view data is transmitted to computer 5.
In the various embodiments described above, imageing sensor 2 can (require during installation to visit using ccd thermal-flame image detector
The probe surveying device can observe as big as possible area of space in burner hearth).Ccd thermal-flame detector gathers the image in stove
Information, and transmitted view data to computer 5 by capture card 4.
As shown in Figure 1 and Figure 2, the present invention also provides a kind of thermometry for thermal analyzer, and the method is a kind of
The method of measurement temperature in the way of surveying emittance, mainly for the integral loop of thermal analyzer or similar closed environment
The measurement of border temperature, in conjunction with infrared radiation temperature and spectroscopic temperature measurement method, thus expanding temperature measurement range, has temperature to be applied to
The temperature survey of degree change procedure.The present invention comprises the following steps:
1) it is provided with sensor array 1 and the imageing sensor 2 for absorbing infrared energy in airtight heating stove,
Absorb infrared energy sensor array 1 infrared radiation signal collecting is transmitted to heating furnace outside signal processing
Device 3, carries out image information process, forms Infrared Thermogram information and transmits to computer 5.
2) in airtight heating stove the imageing sensor 2 of setting by image information (i.e. heating furnace in the heating furnace collecting
Interior optical field of view information) acquired card 4 transmits to computer 5.
3) image information that the Infrared Thermogram receiving information and imageing sensor 2 gather is entered row information by computer 5
Fusion treatment, is obtained new temperature data, is shown the detailed shape of the Temperature Distribution in heating furnace by this new temperature data
Condition.
Above-mentioned steps 3) in, as shown in Fig. 2 use processing process is as follows:
3.1) relation between temperature and color is demarcated, thus setting up the corresponding pass of Infrared Thermogram and temperature
System.
3.1.1) using having high-precision small-sized blackbody furnace for standard airtight heating stove, standard airtight heating stove is controlled to divide
It is clipped to and reaches different temperature, the infrared heat under different temperatures is obtained using the sensor array 1 absorbing infrared energy simultaneously
As figure.
3.1.2) using existing image partition method, each width Infrared Thermogram obtaining all is split, obtained some
Pixel；
3.1.3) extract the gray value of each pixel, and then obtain the corresponding data of one group of temperature and gradation of image.
3.1.4) storing step 3.1.3) in corresponding data, form the corresponding relation of Infrared Thermogram and temperature；Entering
During trip temperature measurement, its corresponding temperature value can be found according to corresponding Infrared Thermogram gray value.
3.2) the first width Infrared Thermogram is obtained by the sensor array 1 and signal processor 3 absorbing infrared energy,
Temperature value according to corresponding to the corresponding relation of Infrared Thermogram and temperature obtains this each pixel of infrared thermal imagery in figure is t1；
Temperature value t1It is by the temperature value gathering longer wavelengths of infra-red radiation information acquisition.
3.3) the second width image is obtained by ccd thermal-flame image detector and capture card 4, this image is visible-range
Interior image, the Wien according to planck formula approximately obtains the relation of optical imagery color and temperature, and then obtains the second width
Temperature value t corresponding to each pixel in image2；Temperature value t2For analyzing the temperature that longer wavelengths of visible optical information obtains
Value；
Wherein, optical imagery color is as follows with the relation of temperature:
In formula, λr、λg、λbIt is respectively the wavelength corresponding to tri- passage dichroism peak of curves of r, g, b；re、ge、bePoint
Not Wei ccd thermal-flame image detector image end fluorescent material trichromatic coefficients；c2For constant, c2=0.01438833m k, m
For rice, k is Kelvin；
And,ptb(λr) for r passage radiation filtering spectrum, ptb(λb) lead to for b
The radiation filtering spectrum in road, ptb(λg) for g passage radiation filtering spectrum.
3.4) adopt the temperature data fusion method of linear weighted function, first width each pixel of infrared thermal imagery in figure is corresponded to
Temperature value t1Temperature value t corresponding with second each pixel of width in figure2Merged, obtain the first width Infrared Thermogram with
Temperature value t corresponding to each pixel in image after second width image co-registration3.
3.5) utilize step 3.1) corresponding relation of mid-infrared thermography and temperature, according to each temperature value t3Obtain corresponding
Pixel, then form the image after the first width Infrared Thermogram and the second width image co-registration by this pixels all, and then obtain
The color fusion image of heating in-furnace temperature information can be represented, and shown by display.
Above-mentioned steps 3.4) in, t3=ut1+vt2, u is temperature value t1Credibility, v be temperature value t2Credibility；Due to
In transient process from low temperature to high temperature for the temperature, the radiation wavelength in heating furnace is also slowly transitioned into long wave from shortwave, therefore by
Absorb the temperature value t that the sensor array 1 of infrared energy records1Credibility u is gradually lowered, and is recorded by imageing sensor 2
Temperature value t2Credibility v gradually rises.Therefore credibility u, v is reduced to respectively the linear function of temperature, respectively by corresponding temperature
The linear function of degree embodies the change of corresponding credibility；The linear function of temperature is respectively as follows:
In formula, tmaxFor maximum temperature set in advance in thermal analysis experiment.
Embodiment:
The final color fusion image obtaining of the present invention had both contained the infra-red radiation information in heating furnace, contained light again
Information, that is, contain the electromagnetic wave of two kinds of main radiation in heating process.In-furnace temperature situation can be characterized well.For example,
As shown in figure 3, when temperature is relatively low, obtaining infrared image, middle elliptical section is divided into yellow, and surrounding is orange, different colours generation
The different temperature of table.When temperature raises, the electromagnetic wave of radiation is mainly represented with visible ray form, in the optical imagery obtaining,
Middle oval part and surrounding are respectively red and orange, and the interior furnace wall being heated to uniform temperature can be considered light source, different
Color reflects different temperature.The image merging, the high part of temperature shows with red tone, the low part of temperature is with blueness
Tone shows, combines the integrated information of thermal infrared images and visible images in stove, intuitively shows the temperature in stove
Degree.
The various embodiments described above are merely to illustrate the present invention, and the structure of each part, size, set location and shape are all permissible
It is varied from, on the basis of technical solution of the present invention, all improvement individual part being carried out according to the principle of the invention and waiting
With converting, all should not exclude outside protection scope of the present invention.
Claims (10)
1. a kind of thermometry for thermal analyzer is it is characterised in that comprise the following steps:
1) it is provided with sensor array and the imageing sensor absorbing infrared energy in airtight heating stove, absorb infrared spoke
Penetrate energy sensor array the infrared radiation signal collecting is transmitted to heating furnace outside signal processor, carry out image
Information process-, forms Infrared Thermogram information and transmits to computer；
2) in airtight heating stove setting imageing sensor by the acquired card of image information in the heating furnace collecting transmit to
Computer；
3) computer carries out the image information of the Infrared Thermogram receiving information and imageing sensor collection at information fusion
Reason, obtains new temperature data, shows the temperature distribution state in heating furnace by this new temperature data.
2. as claimed in claim 1 a kind of thermometry for thermal analyzer it is characterised in that: described step 3)
In, use processing process is as follows:
3.1) relation between temperature and color is demarcated, set up the corresponding relation of Infrared Thermogram and temperature；
3.2) the first width Infrared Thermogram is obtained by the sensor array absorbing infrared energy and signal processor, according to red
It is t that the corresponding relation of outer thermography and temperature obtains this temperature value corresponding to each pixel of infrared thermal imagery in figure1；
3.3) the second width image is obtained by ccd thermal-flame image detector and capture card, this image is in visible-range
Image, the Wien according to planck formula approximately obtains the relation of optical imagery color and temperature, and then obtains the second width image
In temperature value t corresponding to each pixel2；
3.4) adopt the temperature data fusion method of linear weighted function, by corresponding for first width each pixel of infrared thermal imagery in figure temperature
Angle value t1Temperature value t corresponding with second each pixel of width in figure2Merged, obtained the first width Infrared Thermogram and second
Temperature value t corresponding to each pixel in image after width image co-registration3；
3.5) utilize step 3.1) corresponding relation of mid-infrared thermography and temperature, according to each temperature value t3Obtain corresponding pixel
Point, then form the image after the first width Infrared Thermogram and the second width image co-registration by this pixels all, and then obtain energy table
Show the color fusion image of heating in-furnace temperature information, and shown by display.
3. as claimed in claim 2 a kind of thermometry for thermal analyzer it is characterised in that: described step 3.1)
In, detailed process is:
3.1.1) using having high-precision small-sized blackbody furnace for standard airtight heating stove, standard airtight heating stove is controlled to reach not
Same temperature, obtains the Infrared Thermogram under different temperatures using the sensor array absorbing infrared energy simultaneously；
3.1.2) using existing image partition method, each width Infrared Thermogram obtaining all is split, obtained some pictures
Element；
3.1.3) extract the gray value of each pixel, and then obtain the corresponding data of one group of temperature and gradation of image；
3.1.4) storing step 3.1.3) in corresponding data, form the corresponding relation of Infrared Thermogram and temperature；Carrying out temperature
During degree measurement, its corresponding temperature value can be found according to corresponding Infrared Thermogram gray value.
4. as claimed in claim 2 a kind of thermometry for thermal analyzer it is characterised in that: described step 3.3)
In, optical imagery color is as follows with the relation of temperature:
In formula, λr、λg、λbIt is respectively the wavelength corresponding to tri- passage dichroism peak of curves of r, g, b；re、ge、beIt is respectively
Ccd thermal-flame image detector images the fluorescent material trichromatic coefficients at end；c2For constant, c2=0.01438833m k, m are rice,
K is Kelvin；And:
ptb(λr) for r passage radiation filtering spectrum, ptb(λb) for b passage radiation filtering spectrum, ptb(λg) for g passage radiation filter
Wave spectrum.
5. as claimed in claim 2 a kind of thermometry for thermal analyzer it is characterised in that: described step 3.4)
In, temperature value t3=ut1+vt2, u is temperature value t1Credibility, v be temperature value t2Credibility.
6. as claimed in claim 5 a kind of thermometry for thermal analyzer it is characterised in that: by described temperature value
t1Credibility u, temperature value t2Credibility v be reduced to the linear function of temperature respectively, to be embodied by the linear function of temperature
The change of corresponding credibility, the linear function of temperature is respectively as follows:
In formula, tmaxFor maximum temperature set in advance.
7. a kind of temperature measuring equipment for thermal analyzer realized as claim 1 to 6 any one methods described, its feature
It is: this device includes absorbing the sensor array of infrared energy, imageing sensor, signal processor, capture card, calculating
Machine and display；Described sensor array and imageing sensor are arranged at the crucible interior sidewall surface of airtight heating stove；And it is described
Sensor array pass through connecting line with positioned at described airtight heating stove outside described signal processor electrically connect, described image biography
Sensor pass through connecting line with positioned at described airtight heating stove outside described capture card electrically connect；Described sensor array will be infrared
Radiation signal transmits to described signal processor, described signal processor by transmit after the infrared radiation signal receiving process to
Described computer, image information in described airtight heating stove is transmitted to described calculating by described image sensor through described capture card
Machine；Described computer obtains temperature field by after the signal processing receiving, and transmits and carry out image to described display and show.
8. as claimed in claim 7 a kind of temperature measuring equipment for thermal analyzer it is characterised in that: described sensor array
Arrange the connecting line and described signal processor between, and the connecting line between described image sensor and described capture card is all worn
Cross the furnace wall of described airtight heating stove, and between described connecting line and described furnace wall, adopt sealing member to seal.
9. as claimed in claim 7 a kind of temperature measuring equipment for thermal analyzer it is characterised in that: described absorb infrared
The sensor array of emittance is using the infrared focal plane array being made up of thermal detector.
10. as claimed in claim 7 a kind of temperature measuring equipment for thermal analyzer it is characterised in that: described image pass
Sensor adopts ccd thermal-flame image detector.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113449127A (en) * | 2020-03-27 | 2021-09-28 | 杭州海康微影传感科技有限公司 | Temperature measurement file generation method, display method and device |
| CN113804305A (en) * | 2021-09-14 | 2021-12-17 | 新疆有色金属工业（集团）有限责任公司 | Electric arc furnace flame temperature measurement method and system based on visual perception |
| CN117405262A (en) * | 2023-12-15 | 2024-01-16 | 常州泰斯科电子有限公司 | Multi-point temperature acquisition method of temperature tester |
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