CN106365459A - Chemically thinning method for liquid crystal glass substrate - Google Patents

Chemically thinning method for liquid crystal glass substrate Download PDF

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Publication number
CN106365459A
CN106365459A CN201610715828.4A CN201610715828A CN106365459A CN 106365459 A CN106365459 A CN 106365459A CN 201610715828 A CN201610715828 A CN 201610715828A CN 106365459 A CN106365459 A CN 106365459A
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China
Prior art keywords
thinning
liquid crystal
crystal glass
substrate
acid solution
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CN201610715828.4A
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Inventor
王肖南
曾雁滨
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Ganzhou Di Jing Electro-Optical Technology Inc (us) 62 Martin Road Concord Massachusetts 017
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Ganzhou Di Jing Electro-Optical Technology Inc (us) 62 Martin Road Concord Massachusetts 017
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Priority to CN201610715828.4A priority Critical patent/CN106365459A/en
Publication of CN106365459A publication Critical patent/CN106365459A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching

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  • Chemical & Material Sciences (AREA)
  • Liquid Crystal (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention belongs to the field of liquid crystal glass substrate thinning. For solving the technical problems of non-uniform substrate thickness, low product yield, long production time and low production efficiency in the prior art, the invention provides a chemically thinning method for a liquid crystal glass substrate. The method includes the steps of: 1) preparation of a thinning acid solution: successively adding a certain amount of hydrofluoric acid and pure water to a sealed and acid-resistant container, wherein the mass percentages of the hydrofluoric acid and the pure water are respectively 2-20% and 80-98%; 2) thinning the liquid crystal glass substrate; 3) acid pickling of the thinned substrate: performing primary cleaning to the thinned substrate in an apparatus filled with a normal temperature hydrochloric acid solution being 2-8% in mass percentage; and 4) water washing of the thinned substrate. The method has the following advantages: 1) the method has less adverse influence on the surface of the product and the substrate is uniform in thickness; and 2) the method is short in production time and has high productivity by means of the chemically thinning in a multiple-sheet vertical soaking manner.

Description

A kind of liquid crystal glass base chemistry thinning method
Technical field
The invention belongs to liquid crystal glass base thinning field, specifically related to a kind of liquid crystal glass base immersion type chemistry thinning Method.
Background technology
Liquid crystal display is one of now widely used flat faced display (fpd), has low in energy consumption, slim body, weight The feature such as light.With the development of lcd technology, all kinds of liquid crystal displays in order to reach image show apparent, need to be to liquid-crystalline glasses Substrate carries out thinning, and the thining method being usually used has two kinds, and one kind is physical method, is polished grinding using polishing powder Mill, this method thinning time is long, the bad control of precision, and product yield is low;Another kind of method is thin using the chemistry of etching solution Change method, this method thinning time is short, and equipment investment is little, and product yield is high, and the simple low cost of composition of reducer, gradually becomes Dominant technical approach for thinning glass substrate.
The chemical thinning method of existing use etching solution, etching solution is very fast to the etch-rate of substrate, and etch quantity is not allowed easily-controllable System is it is impossible to be controlled to substrate thickness well;The surface of liquid crystal glass base can produce a large amount of concave points and cut, or even makes Becoming thinning glass substrate uneven, thus have impact on the yields of LCDs, increased production cost so that follow-up grind Time is long, low production efficiency.
Content of the invention
It is an object of the invention to provide a kind of liquid crystal glass base formula chemistry thinning method, effectively solving prior art glass During substrate attenuation, liquid crystal glass base is in uneven thickness, and the yields of product is not high, and the production time is long, and production efficiency is low Technological deficiency.
In order to reach object above, the present invention adopts the following technical scheme that
A kind of liquid crystal glass base chemistry thinning method, its step is as follows:
Step one. thinning acid solution is prepared: sequentially adds a certain amount of Fluohydric acid. and pure in an airtight, acidproof container Water, mass fraction is respectively Fluohydric acid.: 2%~20%, pure water: 98%~80%;After the completion of thinning acid solution is prepared, open bubbling Make thinning acid cycle mix homogeneously, thinning acid solution can be come into operation by bubbling circulation mixing at least more than one hour, and will Thinning acid solution is heated to 20 DEG C~40 DEG C;
Step 2. the thinning of liquid crystal glass base: by the thinning preparing in step one acid solution injection device, and make to set For agitating bubble to maintain in the range of 60l/h~220l/h, temperature maintains in the range of 20 DEG C~40 DEG C;And make thinning acid solution liquid Position controls the 10cm above liquid crystal glass base, and liquid crystal glass base is uprightly placed in a device;Thinning speed is double with substrate Persistently etch under conditions of 2~25 μm/min of face treating capacity, until it reaches required thickness;At present, liquid crystal glass base thinning Thickness afterwards is generally 0.25mm-0.6mm.
Step 3. the pickling after substrate thinning: by the substrate after the completion of thinning in step 2 be placed in mass fraction be 2%~ Tentatively cleaned in 8% room temperature hydrochloric acid solution device, and opened the bubbling in the range of 15l/h~50l/h, scavenging period control System is in 3min~10min;Its objective is that the glass dust that substrate edges do not come off soaks to separate, keep flush edge shape State;Ensure that substrate cleans up with thinning acid solution chemical reactant.
Step 4. the washing after substrate thinning: by step 3 preliminary clean after the completion of liquid crystal glass base move on to into Room temperature pure water device is carried out to liquid crystal glass base, and opens the bubbling in the range of 15l/h~50l/h, scavenging period control System, in 3min~10min, makes glass substrate clean up completely.
The invention has the beneficial effects as follows:
1. the present invention is bad to product surface less, and its substrate thickness is than more uniform;
2. the present invention adopts glass substrate multi-disc upright immersion type chemical reduction mode, and it is short to have a production time, and production capacity is high Feature, the liquid crystal glass base chemical reduction output time is short, and production efficiency is high, and production capacity is high;
3. method of the present invention, under the conditions of can be used for enterprise's existing equipment, is not required to additionally increase equipment, will not increase The cost of enterprise, reduces the waste of resource;
4. method of the present invention, can be carried out secondary using enterprise's existing acid solution processing system to spent acid impurity screening Or repeatedly recycling use, entreprise cost will not be increased.
Brief description
Fig. 1 is the process chart of the present invention.
Specific embodiment
The present invention is further illustrated with reference to the accompanying drawings and examples.
Embodiment 1
Method using carrying out thinning to liquid crystal glass base after Fluohydric acid. stock solution dilute, its step is as follows
Step one. thinning acid solution is prepared: sequentially adds a certain amount of water and Fluohydric acid. stock solution in airtight, acidproof container Mixing, mass fraction is respectively Fluohydric acid.: 2%, pure water: 98%, bubbling makes its mix homogeneously, and bubbling mixing at least wants one hour More than thinning acid solution can be come into operation, and be heated to 36 DEG C~40 DEG C;
Step 2. the thinning of liquid crystal glass base: by the thinning preparing in step one acid solution injection device, and make to set For agitating bubble to maintain in the range of 60l/h~200l/h, temperature maintains in the range of 36 DEG C~40 DEG C.And keep thinning acid solution Control the 10cm position above product, equipment uses acid solution amount taking healthy and free from worry 650mm*550mmtft-lcd glass substrate as a example 1100l, the thickness that thinning is reached required for being thinned to 2 μm~3 μm/min speed.
Step 3. the pickling after substrate thinning: by the substrate after the completion of thinning in step 2 be placed in mass fraction 2%~ Tentatively cleaned in 8% room temperature hydrochloric acid solution device, and opened the bubbling in the range of 15l/h~50l/h, scavenging period control In 3min~10min, 1. its purpose is that the glass dust that substrate edges do not come off soaks separation to keep flush edge to system State, is 2. to ensure that substrate cleans up with thinning acid solution chemical reactant.
Step 4. the washing after substrate thinning: by step 3 preliminary clean after the completion of liquid crystal glass base move on to into Room temperature pure water device is carried out to glass substrate, and opens the bubbling in the range of 15l/h~50l/h, and scavenging period controls In 3min~10min, the hydrochloric acid solution on liquid crystal glass base surface is made to clean up completely.
Embodiment 2
Step one. thinning acid solution is prepared: sequentially adds a certain amount of water and Fluohydric acid. stock solution in airtight, acidproof container Mixing, mass fraction is respectively Fluohydric acid.: 10%, pure water: 90%, bubbling makes its mix homogeneously, and bubbling mixing at least wants one little When more than thinning acid solution can be come into operation, and be heated to 36 DEG C~40 DEG C;
Step 2. the thinning of liquid crystal glass base: by the thinning preparing in step one acid solution injection device, and make to set For agitating bubble to maintain in the range of 60l/h~200l/h, temperature maintains in the range of 36 DEG C~40 DEG C.And keep thinning acid solution At the 10cm above product, equipment uses acid solution to Liquid level taking healthy and free from worry 650mm*550mmtft-lcd glass substrate as a example Amount 1100l, the thickness that thinning is reached required for being thinned to 6~9 μm/min speed.
Step 3. the pickling after substrate thinning: by the substrate after the completion of thinning in step 2 be placed in mass fraction 2%~ Tentatively cleaned in 8% room temperature hydrochloric acid solution device, and opened the bubbling in the range of 15l/h~50l/h, scavenging period control In 3min~10min, 1. its purpose is that the glass dust that substrate edges do not come off soaks separation to keep flush edge to system State, is 2. to ensure that substrate cleans up with thinning acid solution chemical reactant.
Step 4. the washing after substrate thinning: by step 3 preliminary clean after the completion of liquid crystal glass base move on to into Room temperature pure water device is carried out to liquid crystal glass base, and opens the bubbling in the range of 15l/h~50l/h, scavenging period control System, in 3min~10min, makes the hydrochloric acid solution of glass baseplate surface clean up completely.
Embodiment 3
Step one. thinning acid solution is prepared: sequentially adds a certain amount of water and Fluohydric acid. stock solution in airtight, acidproof container Mixing, mass fraction is respectively Fluohydric acid.: 20%, pure water: 80%, bubbling makes its mix homogeneously, and bubbling mixing at least wants one little When more than thinning acid solution can be come into operation, and be heated to 36 DEG C~40 DEG C;
Step 2. the thinning of liquid crystal glass base: by the thinning preparing in step one acid solution injection device, and make to set For agitating bubble to maintain in the range of 60l/h~200l/h, temperature maintains in the range of 36 DEG C~40 DEG C.And keep thinning acid solution At the 10cm above product, equipment uses acid solution to Liquid level taking healthy and free from worry 650mm*550mmtft-lcd glass substrate as a example Amount 1100l, the thickness reaching required for being thinned to 15~25 μm/min speed.
Step 3. the pickling after substrate thinning: by the substrate after the completion of thinning in step 2 be placed in mass fraction 2%~ Tentatively cleaned in 8% room temperature hydrochloric acid solution device, and opened the bubbling in the range of 15l/h~50l/h, scavenging period control In 3min~10min, 1. its purpose is that the glass dust that substrate edges do not come off soaks separation to keep flush edge to system State, is 2. to ensure that substrate cleans up with thinning acid solution chemical reactant
Step 4. the washing after substrate thinning: by step 3 preliminary clean after the completion of liquid crystal glass base move on to into Room temperature pure water device is carried out to glass substrate, and opens the bubbling in the range of 15l/h~50l/h, and scavenging period controls In 3min~10min, the hydrochloric acid solution on liquid crystal glass base surface is made to clean up completely.
Embodiment 4
Step one. thinning acid solution is prepared: sequentially adds a certain amount of water and Fluohydric acid. stock solution in airtight, acidproof container Mixing, mass fraction is respectively Fluohydric acid.: 20%, pure water: 80%, bubbling makes its mix homogeneously, and bubbling mixing at least wants one little When more than thinning acid solution can be come into operation, and be heated to 20 DEG C~25 DEG C;
Step 2. the thinning of liquid crystal glass base: by the thinning preparing in step one acid solution injection device, and make to set For agitating bubble to maintain in the range of 60l/h~200l/h, temperature maintains in the range of 20 DEG C~25 DEG C.And keep thinning acid solution At the 10cm above product, equipment uses acid solution to Liquid level taking healthy and free from worry 650mm*550mmtft-lcd glass substrate as a example Amount 1100l, the thickness reaching required for being thinned to 6~11 μm/min speed.
Step 3. the pickling after substrate thinning: by the substrate after the completion of thinning in step 2 be placed in mass fraction 2%~ Tentatively cleaned in 8% room temperature hydrochloric acid solution device, and opened the bubbling in the range of 15l/h~50l/h, scavenging period control In 3min~10min, 1. its purpose is that the glass dust that substrate edges do not come off soaks separation to keep flush edge to system State, is 2. to ensure that substrate cleans up with thinning acid solution chemical reactant.
Step 4. the washing after substrate thinning: by step 3 preliminary clean after the completion of liquid crystal glass base move on to into Room temperature pure water device is carried out to glass substrate, and opens the bubbling in the range of 15l/h~50l/h, and scavenging period controls In 3min~10min, the hydrochloric acid solution on liquid crystal glass base surface is made to clean up completely.
Embodiment described above only have expressed the preferred embodiment of the present invention, and its description is more concrete and detailed, but simultaneously Therefore the restriction to the scope of the claims of the present invention can not be interpreted as.It should be pointed out that for those of ordinary skill in the art For, without departing from the inventive concept of the premise, some deformation, improvement and replacement can also be made, these broadly fall into this Bright protection domain.Therefore, the protection domain of patent of the present invention should be defined by claims.

Claims (4)

1. a kind of liquid crystal glass base chemistry thinning method is it is characterised in that its step is as follows:
Step one. thinning acid solution is prepared: sequentially adds a certain amount of Fluohydric acid. and pure water, matter in an airtight, acidproof container Amount fraction is respectively Fluohydric acid.: 2%~20%, pure water: 98%~80%;
Step 2. the thinning of liquid crystal glass base: by the thinning preparing in step one acid solution injection device, and make equipment rouse Bubble of taking offence maintains in the range of 60l/h~220l/h, and temperature maintains in the range of 20 DEG C~40 DEG C;And make thinning acid solution liquid level control At system 10cm above liquid crystal glass base, thinning speed is persistently lost with conditions of substrate 2~25 μm/min of double treatment amount Carve, until it reaches required thickness;
Step 3. the pickling after substrate thinning: it is 2%~8% that the substrate after the completion of thinning in step 2 is placed in mass fraction Room temperature hydrochloric acid solution device in tentatively cleaned, and open the bubbling in the range of 15l/h~50l/h, scavenging period controls In 3min~10min;
Step 4. the washing after substrate thinning: the liquid crystal glass base after the completion of cleaning preliminary in step 3 is moved on to into room temperature Pure water device is carried out to liquid crystal glass base, and opens the bubbling in the range of 15l/h~50l/h, and scavenging period controls In 3min~10min.
2. liquid crystal glass base chemistry thinning method according to claim 1 is it is characterised in that in step one, thinning is sour After the completion of liquid is prepared, opening bubbling makes thinning acid cycle mix homogeneously, and bubbling circulation mixing at least more than a hour can be by Thinning acid solution comes into operation, and thinning acid solution is heated to 20 DEG C~40 DEG C.
3. liquid crystal glass base according to claim 1 chemistry thinning method is it is characterised in that in step 2, liquid crystal glass Thickness after glass substrate thinning is 0.25mm-0.6mm.
4. liquid crystal glass base chemistry thinning method according to claim 1 is it is characterised in that liquid crystal glass base is setting Uprightly place in standby.
CN201610715828.4A 2016-08-24 2016-08-24 Chemically thinning method for liquid crystal glass substrate Pending CN106365459A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107032627A (en) * 2017-06-05 2017-08-11 深圳市方胜光学材料科技有限公司 A kind of ultra-thin glass diaphragm manufacturing process
CN107817923A (en) * 2017-12-11 2018-03-20 江西沃格光电股份有限公司 The thining method of display panel, embedded type touch control panel and preparation method thereof
CN111558248A (en) * 2020-04-28 2020-08-21 苏州晋昌胶粘制品有限公司 Cleaning device of high-efficiency filter recovery system
CN112174540A (en) * 2020-10-09 2021-01-05 厦门天马微电子有限公司 Thinning method of glass substrate and manufacturing method of display panel
CN115594409A (en) * 2022-10-19 2023-01-13 湖北优尼科光电技术股份有限公司(Cn) Pretreatment liquid for liquid crystal display screen, preparation method and pretreatment process

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103880294A (en) * 2014-02-17 2014-06-25 苏州凯利昂光电科技有限公司 Chemical etching thinning method of oversized ultrathin liquid crystal display panel
JP2016028002A (en) * 2014-07-11 2016-02-25 東京応化工業株式会社 Method for processing glass, glass etching solution, and glass substrate
CN105593182A (en) * 2013-07-25 2016-05-18 康宁股份有限公司 Methods of treating glass surfaces

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105593182A (en) * 2013-07-25 2016-05-18 康宁股份有限公司 Methods of treating glass surfaces
CN103880294A (en) * 2014-02-17 2014-06-25 苏州凯利昂光电科技有限公司 Chemical etching thinning method of oversized ultrathin liquid crystal display panel
JP2016028002A (en) * 2014-07-11 2016-02-25 東京応化工業株式会社 Method for processing glass, glass etching solution, and glass substrate

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107032627A (en) * 2017-06-05 2017-08-11 深圳市方胜光学材料科技有限公司 A kind of ultra-thin glass diaphragm manufacturing process
CN107817923A (en) * 2017-12-11 2018-03-20 江西沃格光电股份有限公司 The thining method of display panel, embedded type touch control panel and preparation method thereof
CN107817923B (en) * 2017-12-11 2021-03-23 江西沃格光电股份有限公司 Thinning method of display panel, embedded touch panel and preparation method of embedded touch panel
CN111558248A (en) * 2020-04-28 2020-08-21 苏州晋昌胶粘制品有限公司 Cleaning device of high-efficiency filter recovery system
CN112174540A (en) * 2020-10-09 2021-01-05 厦门天马微电子有限公司 Thinning method of glass substrate and manufacturing method of display panel
CN115594409A (en) * 2022-10-19 2023-01-13 湖北优尼科光电技术股份有限公司(Cn) Pretreatment liquid for liquid crystal display screen, preparation method and pretreatment process
CN115594409B (en) * 2022-10-19 2023-12-12 湖北优尼科光电技术股份有限公司 Pretreatment liquid for liquid crystal display screen, preparation method and pretreatment process

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