CN106350166A - 一种硅片切割用易分解型切削液的制备方法 - Google Patents

一种硅片切割用易分解型切削液的制备方法 Download PDF

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CN106350166A
CN106350166A CN201610714957.1A CN201610714957A CN106350166A CN 106350166 A CN106350166 A CN 106350166A CN 201610714957 A CN201610714957 A CN 201610714957A CN 106350166 A CN106350166 A CN 106350166A
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cutting fluid
oil
sodium
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吕凤岗
程林
曹来福
戴珍旭
胡正田
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Anhui Energy Technology Co Ltd
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Abstract

一种硅片切割用易分解型切削液，涉及硅材料加工技术领域，由以下重量份的原料制成：石蜡基油60‑80份、八角油6‑8份、桉树油3‑5份、硝酸钾5‑7份、硝酸钠2‑4份、三乙醇胺1‑3份、甘油2‑4份、聚乙二醇1‑3份、蓖麻油酸1‑3份、十二烷酸2‑4份、表面活性剂2‑4份、氢氧化钠1‑3份、硅酸钠2‑4份、链烷醇酰胺2‑4份、硼酸脂2‑4份、二氯甲烷6‑8份、三氯乙烯5‑7份、硅粉组合物8‑10份。本发明的有益效果是：本发明选用的原料均为廉价易得的产品，制备出的切削废液，颜色透明，不遮挡切割视线，内部本身含有的分解组分，可以对切削液进行预先分解，不会强力的附着于硅片表面，解决的切削废液附着力强的问题，便于后续硅片的清洗，同时环保健康，便于推广及使用。

Description

一种硅片切割用易分解型切削液的制备方法
技术领域
本发明涉及硅材料加工技术领域，具体涉及一种硅片切割用易分解型切削液的制备方法。
背景技术
硅材料，是重要的半导体材料，化学元素符号Si，电子工业上使用的硅应具有高纯度和优良的电学和机械等性能，硅是产量最大、应用最广的半导体材料，它的产量和用量标志着一个国家的电子工业水平，单晶硅在太阳能电池中的应用，高纯的单晶硅是重要的半导体材料。在光伏技术和微小型半导体逆变器技术飞速发展的今天，利用硅单晶所生产的太阳能电池可以直接把太阳能转化为光能，实现了迈向绿色能源革命的开始。
硅片是硅材料存在的一种物理形式，在正常的应用中，硅片，是制作集成电路的重要材料，通过对硅片进行光刻、离子注入等手段，可以制成各种半导体器件。用硅片制成的芯片有着惊人的运算能力，科学技术的发展不断推动着半导体的发展，自动化和计算机等技术发展，使硅片这种高技术产品的造价已降到十分低廉的程度，然而硅片在加工时，不同的工艺节点都会使得硅片加工出现瑕疵。
硅片加工时，是通过相应的硅碇进行切割成的片状物品，这种硅碇通常在切割时，为了保证其相应的切割精度及平整度，通常都需要使用一些润滑类的添加剂，保证其精度，但是实际在使用中，大多数都是采用普通的切削液进行替代，这种普通切削液在使用时，由于其难容化工原料的存在，造成后续精加工清洗相对困难，对硅片的本身性质有一定的影响，使用并不合理。
发明内容：
本发明所要解决的技术问题在于提供一种原料易得，配方合理精确，使用效果好的硅片切割用易分解型切削液的制备方法。
本发明所要解决的技术问题采用以下技术方案来实现：
一种硅片切割用易分解型切削液，其特征在于，由以下原料制成：
石蜡基油60-80份、八角油6-8份、桉树油3-5份、硝酸钾5-7份、硝酸钠2-4份、三乙醇胺1-3份、甘油2-4份、聚乙二醇1-3份、蓖麻油酸1-3份、十二烷酸2-4份、表面活性剂2-4份、氢氧化钠1-3份、硅酸钠2-4份、链烷醇酰胺2-4份、硼酸脂2-4份、二氯甲烷6-8份、三氯乙烯5-7份、硅粉组合物8-10份。
各原料的优选分离为：石蜡基油70份、八角油7份、桉树油4份、硝酸钾6份、硝酸钠3份、三乙醇胺2份、甘油3份、聚乙二醇2份、蓖麻油酸2份、十二烷酸3份、表面活性剂3份、氢氧化钠2份、硅酸钠3份、链烷醇酰胺3份、硼酸脂3份、二氯甲烷7份、三氯乙烯6份、硅粉组合物9份。
所述的的硅粉组合物石油焦6g、硅石粉15g、氯化钠1g、白炭黑6g和硅藻土6g进行150-170℃的高温条件下，研磨混合后，得到的颗粒细度为5-7um的颗粒混合物，冷却后出料包装得到。
本发明的另一目的是制备本发明中硅片切割用易分解型切削液的方法，其特征在于，包括以下步骤：
1)取硝酸钾、硝酸钠、三乙醇胺、甘油和聚乙二醇放入反应釜中，升温至65-70℃，然后将石蜡基油、八角油和桉树油加入其中，搅拌2-3h后，冷却后，出料备用；
2)将原料中的蓖麻油酸、十二烷酸、表面活性剂、氢氧化钠、硅酸钠、链烷醇酰胺、硼酸脂和二氯甲烷预混合后，进行常温搅拌后，得到辅助液，备用；
3)取一搅拌罐，将原料中的二氯甲烷和三氯乙烯加入其中，然后升温至35-45℃，搅拌1-2h后，将步骤2中的原料加入其中，升温至60-80℃，继续搅拌30-40min后，降温至20-25℃，将步骤1中的物料加入其中，再次持续搅拌3-5h后，出料；
4)将原料中的硅粉组合物混合于步骤3中的物料中，充分搅拌直至均匀后，即可得到，其外观为透明溶液，无异味，密度为(20℃)kg/m3：1050-1080，PH值为9-10。
本发明的有益效果是：本发明配方选取科学合理，选用的原料均为廉价易得的产品，制备出的切削废液，颜色透明，不遮挡切割视线，内部本身含有的分解组分，可以对切削液进行预先分解，不会强力的附着于硅片表面，解决的切削废液附着力强的问题，便于后续硅片的清洗，同时环保健康，便于推广及使用。
具体实施方式
为了使本发明实现的技术手段、创作特征、达成目的与功效易于明白了解，下面结合具体实施例，进一步阐述本发明。
实施例1
称取：石蜡基油60kg、八角油6kg、桉树油3kg、硝酸钾5kg、硝酸钠2kg、三乙醇胺1kg、甘油2kg、聚乙二醇1kg、蓖麻油酸1kg、十二烷酸2kg、表面活性剂2kg、氢氧化钠1kg、硅酸钠2kg、链烷醇酰胺2kg、硼酸脂2kg、二氯甲烷6kg、三氯乙烯5kg、硅粉组合物8kg；
实施例2
称取：石蜡基油70kg、八角油7kg、桉树油4kg、硝酸钾6kg、硝酸钠3kg、三乙醇胺2kg、甘油3kg、聚乙二醇2kg、蓖麻油酸2kg、十二烷酸3kg、表面活性剂3kg、氢氧化钠2kg、硅酸钠3kg、链烷醇酰胺3kg、硼酸脂3kg、二氯甲烷7kg、三氯乙烯6kg、硅粉组合物9kg；
制备上述实施例1或2的方法为：
1)取硝酸钾、硝酸钠、三乙醇胺、甘油和聚乙二醇放入反应釜中，升温至65-70℃，然后将石蜡基油、八角油和桉树油加入其中，搅拌2-3h后，冷却后，出料备用；
2)将原料中的蓖麻油酸、十二烷酸、表面活性剂、氢氧化钠、硅酸钠、链烷醇酰胺、硼酸脂和二氯甲烷预混合后，进行常温搅拌后，得到辅助液，备用；
3)取一搅拌罐，将原料中的二氯甲烷和三氯乙烯加入其中，然后升温至35-45℃，搅拌1-2h后，将步骤2中的原料加入其中，升温至60-80℃，继续搅拌30-40min后，降温至20-25℃，将步骤1中的物料加入其中，再次持续搅拌3-5h后，出料；
4)将原料中的硅粉组合物混合于步骤3中的物料中，充分搅拌直至均匀后，即可得到，其外观为透明溶液，无异味，密度为(20℃)kg/m3：1050-1080，PH值为9-10。
以上显示和描述了本发明的基本原理和主要特征和本发明的优点。本行业的技术人员应该了解，本发明不受上述实施例的限制，上述实施例和说明书中描述的只是说明本发明的原理，在不脱离本发明精神和范围的前提下，本发明还会有各种变化和改进，这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定。

Claims (4)

1.一种硅片切割用易分解型切削液，其特征在于，由以下原料制成：
石蜡基油60-80份、八角油6-8份、桉树油3-5份、硝酸钾5-7份、硝酸钠2-4份、三乙醇胺1-3份、甘油2-4份、聚乙二醇1-3份、蓖麻油酸1-3份、十二烷酸2-4份、表面活性剂2-4份、氢氧化钠1-3份、硅酸钠2-4份、链烷醇酰胺2-4份、硼酸脂2-4份、二氯甲烷6-8份、三氯乙烯5-7份、硅粉组合物8-10份。
2.根据权利要求1所述的一种硅片切割用易分解型切削液，其特征在于，各原料的优选分离为：石蜡基油70份、八角油7份、桉树油4份、硝酸钾6份、硝酸钠3份、三乙醇胺2份、甘油3份、聚乙二醇2份、蓖麻油酸2份、十二烷酸3份、表面活性剂3份、氢氧化钠2份、硅酸钠3份、链烷醇酰胺3份、硼酸脂3份、二氯甲烷7份、三氯乙烯6份、硅粉组合物9份。
3.根据权利要求1所述的一种硅片切割用易分解型切削液，其特征在于：所述的的硅粉组合物石油焦6g、硅石粉15g、氯化钠1g、白炭黑6g和硅藻土6g进行150-170℃的高温条件下，研磨混合后，得到的颗粒细度为5-7um的颗粒混合物，冷却后出料包装得到。
4.制备上述权利要求1或2的方法，其特征在于，包括以下制备步骤：
1)取硝酸钾、硝酸钠、三乙醇胺、甘油和聚乙二醇放入反应釜中，升温至65-70℃，然后将石蜡基油、八角油和桉树油加入其中，搅拌2-3h后，冷却后，出料备用；
2)将原料中的蓖麻油酸、十二烷酸、表面活性剂、氢氧化钠、硅酸钠、链烷醇酰胺、硼酸脂和二氯甲烷预混合后，进行常温搅拌后，得到辅助液，备用；
3)取一搅拌罐，将原料中的二氯甲烷和三氯乙烯加入其中，然后升温至35-45℃，搅拌1-2h后，将步骤2中的原料加入其中，升温至60-80℃，继续搅拌30-40min后，降温至20-25℃，将步骤1中的物料加入其中，再次持续搅拌3-5h后，出料；
4)将原料中的硅粉组合物混合于步骤3中的物料中，充分搅拌直至均匀后，即可得到，其外观为透明溶液，无异味，密度为(20℃)kg/m3：1050-1080，PH值为9-10。
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Publication number Priority date Publication date Assignee Title
CN102102008A (zh) * 2009-12-18 2011-06-22 安集微电子（上海）有限公司 一种水基玻璃磨削液及其使用方法
CN104293467A (zh) * 2014-09-30 2015-01-21 苏州长盛机电有限公司 一种铝合金用微乳化切削液及其制备方法
CN104611116A (zh) * 2015-01-29 2015-05-13 安徽铖友汽车零部件制造有限公司 一种微乳化切削液

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102102008A (zh) * 2009-12-18 2011-06-22 安集微电子（上海）有限公司 一种水基玻璃磨削液及其使用方法
CN104293467A (zh) * 2014-09-30 2015-01-21 苏州长盛机电有限公司 一种铝合金用微乳化切削液及其制备方法
CN104611116A (zh) * 2015-01-29 2015-05-13 安徽铖友汽车零部件制造有限公司 一种微乳化切削液

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