CN106338297A - 物理量传感器、电子设备以及移动体 - Google Patents

物理量传感器、电子设备以及移动体 Download PDF

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Publication number
CN106338297A
CN106338297A CN201610514596.6A CN201610514596A CN106338297A CN 106338297 A CN106338297 A CN 106338297A CN 201610514596 A CN201610514596 A CN 201610514596A CN 106338297 A CN106338297 A CN 106338297A
Authority
CN
China
Prior art keywords
movable
electrode side
fixed
fixed part
movable electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610514596.6A
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English (en)
Chinese (zh)
Inventor
田中悟
木暮翔太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN106338297A publication Critical patent/CN106338297A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
CN201610514596.6A 2015-07-10 2016-06-30 物理量传感器、电子设备以及移动体 Pending CN106338297A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015138778A JP2017020897A (ja) 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体
JP2015-138778 2015-07-10

Publications (1)

Publication Number Publication Date
CN106338297A true CN106338297A (zh) 2017-01-18

Family

ID=57826188

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610514596.6A Pending CN106338297A (zh) 2015-07-10 2016-06-30 物理量传感器、电子设备以及移动体

Country Status (3)

Country Link
US (1) US20170074896A1 (https=)
JP (1) JP2017020897A (https=)
CN (1) CN106338297A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108692745A (zh) * 2017-04-05 2018-10-23 精工爱普生株式会社 物理量传感器、电子设备以及移动体
CN109839516A (zh) * 2017-11-28 2019-06-04 精工爱普生株式会社 物理量传感器、惯性计测装置、电子设备以及移动体
CN111735990A (zh) * 2019-01-31 2020-10-02 精工爱普生株式会社 惯性传感器、电子设备以及移动体
CN117413214A (zh) * 2021-06-10 2024-01-16 斯坦雷电气株式会社 光扫描装置、电子设备

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6926099B2 (ja) * 2016-09-23 2021-08-25 住友精密工業株式会社 センサ
GB2565295A (en) * 2017-08-07 2019-02-13 Atlantic Inertial Systems Ltd Accelerometer
JP2020085744A (ja) * 2018-11-28 2020-06-04 セイコーエプソン株式会社 加速度センサー、電子機器および移動体

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10111312A (ja) * 1996-09-27 1998-04-28 Robert Bosch Gmbh マイクロメカニックな構成エレメント
CN1580786A (zh) * 2003-08-05 2005-02-16 北京大学 一种高灵敏度谐振加速度计芯片
CN1753832A (zh) * 2003-02-28 2006-03-29 Bae系统公共有限公司 加速度计
CN1844932A (zh) * 2006-05-23 2006-10-11 北京航空航天大学 一种双轴谐振式微机械加速度计
CN101000360A (zh) * 2006-01-13 2007-07-18 台达电子工业股份有限公司 加速度计
CN101029899A (zh) * 2006-02-28 2007-09-05 株式会社电装 角速度传感器及其操作方法
CN101078736A (zh) * 2006-05-24 2007-11-28 日立金属株式会社 角速度传感器
US20100072563A1 (en) * 2008-09-22 2010-03-25 Kiyoshi Sato Substrate bonded mems sensor
CN102955046A (zh) * 2012-10-23 2013-03-06 合肥工业大学 一种单片集成cmos mems多层金属三轴电容式加速度传感器及制备方法
JP2013213735A (ja) * 2012-04-02 2013-10-17 Seiko Epson Corp 物理量センサーおよび電子機器
US20130276536A1 (en) * 2012-04-19 2013-10-24 Seiko Epson Corporation Gyro sensor and electronic apparatus
CN104297523A (zh) * 2013-07-17 2015-01-21 精工爱普生株式会社 功能元件、电子设备及移动体

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5983721A (en) * 1996-09-27 1999-11-16 Robert Bosch Gmbh Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon
JPH10111312A (ja) * 1996-09-27 1998-04-28 Robert Bosch Gmbh マイクロメカニックな構成エレメント
CN1753832A (zh) * 2003-02-28 2006-03-29 Bae系统公共有限公司 加速度计
CN1580786A (zh) * 2003-08-05 2005-02-16 北京大学 一种高灵敏度谐振加速度计芯片
CN101000360A (zh) * 2006-01-13 2007-07-18 台达电子工业股份有限公司 加速度计
CN101029899A (zh) * 2006-02-28 2007-09-05 株式会社电装 角速度传感器及其操作方法
CN1844932A (zh) * 2006-05-23 2006-10-11 北京航空航天大学 一种双轴谐振式微机械加速度计
CN101078736A (zh) * 2006-05-24 2007-11-28 日立金属株式会社 角速度传感器
US20100072563A1 (en) * 2008-09-22 2010-03-25 Kiyoshi Sato Substrate bonded mems sensor
JP2013213735A (ja) * 2012-04-02 2013-10-17 Seiko Epson Corp 物理量センサーおよび電子機器
US20130276536A1 (en) * 2012-04-19 2013-10-24 Seiko Epson Corporation Gyro sensor and electronic apparatus
CN102955046A (zh) * 2012-10-23 2013-03-06 合肥工业大学 一种单片集成cmos mems多层金属三轴电容式加速度传感器及制备方法
CN104297523A (zh) * 2013-07-17 2015-01-21 精工爱普生株式会社 功能元件、电子设备及移动体

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108692745A (zh) * 2017-04-05 2018-10-23 精工爱普生株式会社 物理量传感器、电子设备以及移动体
CN109839516A (zh) * 2017-11-28 2019-06-04 精工爱普生株式会社 物理量传感器、惯性计测装置、电子设备以及移动体
CN109839516B (zh) * 2017-11-28 2022-07-29 精工爱普生株式会社 物理量传感器、惯性计测装置、电子设备以及移动体
CN111735990A (zh) * 2019-01-31 2020-10-02 精工爱普生株式会社 惯性传感器、电子设备以及移动体
CN117413214A (zh) * 2021-06-10 2024-01-16 斯坦雷电气株式会社 光扫描装置、电子设备

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US20170074896A1 (en) 2017-03-16
JP2017020897A (ja) 2017-01-26

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Application publication date: 20170118