CN106337166B - Precipitation equipment microwave transmission unit - Google Patents
Precipitation equipment microwave transmission unit Download PDFInfo
- Publication number
- CN106337166B CN106337166B CN201610527970.6A CN201610527970A CN106337166B CN 106337166 B CN106337166 B CN 106337166B CN 201610527970 A CN201610527970 A CN 201610527970A CN 106337166 B CN106337166 B CN 106337166B
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- Prior art keywords
- microwave
- dielectric
- transmission unit
- face
- precipitation equipment
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3471—Introduction of auxiliary energy into the plasma
Abstract
The present invention relates to precipitation equipment microwave transmission units, including：Waveguide pipe is connected to microwave generator；Communication portion, in order to make microwave by by be incorporated into the waveguide pipe；And transport part, in order to make microwave transmission be incorporated into the chamber in the chamber of precipitation equipment.The dielectric has width identical with the guided wave road of the waveguide pipe.
Description
Technical field
The present invention relates in order to transmit the precipitation equipment microwave transmission unit of microwave in substrate deposition film.
Background technology
Precipitation equipment is substantially to utilize chemical vapor deposition (CVD, Chemical for the device in substrate deposition film
Vapor Deposition) and physical vapour deposition (PVD) (PVD, Physical Vapor Depositon) execution depositing operation.?
In this precipitation equipment, there is sputtering (Sputtering) device using physical vapour deposition (PVD) execution depositing operation.
Sputter equipment is to be used in manufacture display device, semiconductor device, solar cell, organic light emission illumination dress
Whens setting equal, the film of Metal diaphragm, metal-oxide film etc. is formed in substrate using physical vapour deposition (PVD).This sputtering
Device executes depositing operation with following method：If in particle of target (Target) surface collision with energy, therefore from
The intended particle deposition substrate that target falls off.In this case, the target is made of the material for being used to form film.Cause
This, the intended particle to fall off from the target is also made of the material for being used to form film.
This sputter equipment is, since high voltage, high energy consumption occurring during executing depositing operation, because of high electricity
Pressure, high energy consumption have what the film for being deposited on substrate was damaged.In order to solve this problem, to being filled using the sputtering of microwave
It sets and is developed.
Fig. 1 is the schematically sectional view of microwave transmission unit according to prior art.
Referring to Fig.1, microwave transmission unit 100 is for the chamber (not shown) confession to precipitation equipment according to prior art
Answer microwave.Microwave transmission unit 100 includes waveguide pipe 110, dielectric 120 and transport part 130 according to prior art.
The waveguide pipe 110 is connected to microwave generator (not shown).Microwave is along being formed in inside the waveguide pipe 110
Guided wave road 111 to 120 side of the dielectric move.
The dielectric 120 realizes the function for the window (Window) for making microwave pass through.The dielectric 120 is incorporated into institute
Waveguide pipe 110 is stated, so that the dielectric 120 is arranged inside the waveguide pipe 110.In this case, with first axle side
Dielectric 120 described in width 111W to (X-direction) compared to the guided wave road 111 forms the width 120W of bigger, and then inserts
Enter and is incorporated into inside the waveguide pipe 110.
The transport part 130 is located at described between waveguide pipe 110 and the chamber.The transport part 130 is to the chamber
The microwave that room transmission passes through the dielectric 120.
Herein, microwave transmission unit 100 is according to prior art, and the dielectric 120 is compared to the guided wave road
111 width 111W forms the width 120W of bigger, therefore is formed in the dielectric 120 and be located at 111 outside of the guided wave road
Projecting member 121.Therefore, microwave transmission unit 100 is according to prior art, positioned at 111 outside of the guided wave road
Eddy generation in projecting member 121 not only reduces the efficiency of transmission to microwave accordingly, and there is also because of the microwave stagnated and in institute
State the dangerous problem that thermal damage occurs for projecting member 121.Because of this problem, microwave transmission unit according to prior art
100 are difficult to carry out high power transmission to the chamber, and reduce the stability to plasma, and exist to reduce and convey in mesh
The problem of uniformity of target microwave.
Invention content
(solving the problems, such as)
The present invention is to propose to solve the above-mentioned problems, and the present invention is to provide for prevent from occurring in dielectric
The precipitation equipment microwave transmission unit of vortex.
(means solved the problems, such as)
In order to reach purpose as described above, the present invention includes following composition.
Precipitation equipment according to the present invention may include with microwave transmission unit：Microwave generator generates microwave；Waveguide pipe,
It is connected to the microwave generator；Communication portion, in order to make microwave by by be incorporated into the waveguide pipe；And transport part, in order to make
Microwave transmission is incorporated into the chamber in the chamber of precipitation equipment, and the waveguide pipe may include thering is first with the first axis direction
The guided wave road of width, the communication portion may include：For the dielectric by microwave；And the shield member for preventing microwave from entering,
The dielectric includes being contacted with the first joint face of the guided wave road, and first joint face is with first axis direction
Form first width so that first joint face and the guided wave road have on the basis of first axis direction it is identical
Width.
Precipitation equipment according to the present invention may include with microwave transmission unit：Waveguide pipe is connected to microwave generator；It conveys
Portion is incorporated into the waveguide pipe, so that microwave passes through；Transport part, in order to make microwave transmission in the chamber of precipitation equipment tie in
The chamber, the waveguide pipe may include that the guided wave road for having the first width with the first axis direction, the communication portion may include using
In the dielectric by microwave, the dielectric can form first width with the first axis direction so that the dielectric with
There is width identical with the guided wave road on the basis of first axis direction.
(The effect of invention)
Following effect can be obtained according to the present invention.
The present invention can prevent that the vortex to microwave occurs in the dielectric, and then can not only improve the transmission to microwave
Efficiency, additionally it is possible to prevent that thermal damage occurs in dielectric.
The present invention can realize high power transmission to microwave, while can improve the stability to plasma and convey in mesh
The uniformity of target microwave.
Description of the drawings
Fig. 1 is the schematically sectional view of microwave transmission unit according to prior art.
Fig. 2 is microwave transmission unit according to the present invention schematically block diagram.
Fig. 3 to Fig. 5 is the schematically sectional view of microwave transmission unit according to the present invention.
Fig. 6 is the schematically sectional view of the communication portion in microwave transmission unit according to the present invention.
Fig. 7 is the schematically sectional view according to the microwave transmission unit of variant embodiment of the present invention.
Fig. 8 is the schematically sectional stereogram of microwave transmission unit according to the present invention.
Fig. 9 to Figure 11 is in microwave transmission unit according to the present invention for illustrating the general of target and the relationship of outlet opening
Read figure.
Figure 12 is the schematically sectional stereogram according to the microwave transmission unit of another variant embodiment of the present invention.
Figure 13 to Figure 15 is in the microwave transmission unit for invent another variant embodiment at all for illustrating the general of reflecting part
The property read sectional view.
Figure 16 is the schematically sectional view of the communication portion in the microwave transmission unit according to another variant embodiment of the present invention.
Figure 17 and Figure 18 is in microwave transmission unit according to the present invention for illustrating the reality according to microwave injection direction
Apply the conceptual sectional view of example.
Figure 19 is to introduce the curve graph of the embodiment of the present invention.
(reference sign)
1：Precipitation equipment microwave transmission unit 2：Waveguide pipe
3：Communication portion 4：Transport part
5：Reflecting part 21：Guided wave road
22：Inflow face 31：Dielectric
32：Shield member 33：Joint element
41：Outlet opening 51：First reflection component
52：Second reflection component 200：Chamber
300：Target 310：Target face
Specific implementation method
Hereinafter, the embodiment of precipitation equipment microwave transmission unit according to the present invention is explained in detail with reference to the accompanying drawings.
With reference to Fig. 2 and Fig. 3, precipitation equipment according to the present invention is arranged with microwave transmission unit 1 in precipitation equipment, the deposition
Device executes the depositing operation for forming film in substrate.The precipitation equipment is using microwave (Microwave) in substrate
The device of film is formed, such as can be the sputter equipment using microwave.Precipitation equipment according to the present invention is filled with microwave transmission
1 execution is set by microwave transmission in the function of the chamber 200 of the precipitation equipment.
For this purpose, precipitation equipment microwave transmission unit 1 according to the present invention includes：It is connected to the guided wave of microwave generator 10
Pipe 2；In order to make microwave by by be incorporated into the communication portion 3 of waveguide pipe 2；And in order to make microwave transmission be tied in the chamber 200
Together in the transport part 4 of the chamber 200.
The waveguide pipe 2 is between the microwave generator 10 and the transport part 4.The waveguide pipe 2 includes being used for
The guided wave road 21 of mobile microwave.Because 2 inside of waveguide pipe described in the guided wave road 21 forms hollow form.It is generated by the microwave
Device 10 be injected into after the microwave of the guided wave road 21 is moved along the guided wave road 21 be supplied to by the transport part 4 it is described
Chamber 200.It is internally provided with target 300 in the chamber 200.The target 300 is made of the material for being used to form film.
The communication portion 3 in order to make microwave by by be incorporated into the waveguide pipe 2.The communication portion 3 can be combined in described
Waveguide pipe 2, so that the communication portion 3 is between the microwave generator 10 and the waveguide pipe 2.In this case, institute
It can be vacuum state to state guided wave road 21.The communication portion 3 also can be combined in the waveguide pipe 2, so that the communication portion 3 is located at
Between the waveguide pipe 2 and the transport part 4.In this case, the guided wave road 21 can be normal pressure state.
The communication portion 3 includes for the dielectric 31 by microwave.
The dielectric 31 has the first width (H1) with the first axis direction (X-direction).In this case, described to lead
Wave paths 21 have first width (H1) with described with the first axis direction (X-direction).That is, the dielectric 31 and described leading
Wave paths 21 are with first axis direction (X-direction) width having the same.Accordingly, it is passed with microwave according to precipitation equipment of the present invention
Defeated device 1 is not have projecting member 121 (Fig. 1 is shown) when compared with prior art, and then with the first axis direction (X
Axis direction) on the basis of there is no changes of section between the guided wave road 21 and the dielectric 31, therefore can prevent in the electricity
The vortex to microwave occurs in medium 31.Therefore, precipitation equipment microwave transmission unit 1 according to the present invention can not only improve
To the efficiency of transmission of microwave, additionally it is possible to prevent that thermal damage occurs in the dielectric 31 because of the microwave of stagnation.Accordingly, according to
The precipitation equipment microwave transmission unit 1 of the present invention is that can realize the high power transmission to the chamber 200, while can also
It is enough to improve the stability to plasma and convey in the uniformity of the microwave of the target 300.
The dielectric 31 can be by including aluminium oxide (Al2O3) mixture constitute.For example, the dielectric 31 can be by wrapping
Include the mixture shape of the mixture of 99.9% or more aluminium oxide or the silica (SiO2) in aluminium oxide mixing 4%~6%
At.The dielectric 31 is whole can to form rectangular shape.The dielectric 31 is arranged in the waveguide pipe 2 and the transport part
In the case of between 4, the dielectric 31 has the thickness of 4mm or more, to bear the pressure between normal pressure state and vacuum state
Force difference.The thickness of the dielectric 31 is upper phase direction when on the basis of Fig. 3.
With reference to Fig. 2 to Fig. 5, the dielectric 31 may include the first joint face 311.First joint face 311 is in institute
State the face that the guided wave road 21 is contacted in dielectric 31.First joint face 311 is formed as the first axis direction (X-axis
Direction) there is first width (H1).Accordingly, first joint face 311 and the guided wave road 21 are mutually having the same
Width.Therefore precipitation equipment microwave transmission unit 1 according to the present invention can realize the high power biography to the chamber 200
It is defeated, while the stability to plasma can also be improved and conveyed in the uniformity of the microwave of the target 300.
The dielectric 31 may include second joint face 312.Second joint face 312 is in the dielectric 31
In with for the opposite face of first joint face 311.Second joint face 312 can be formed with the first axis direction (X-axis
Direction) on the basis of have width identical with first joint face 311.Second joint face 312 can also be formed with described
There is the width different from first joint face 311 on the basis of first axis direction (X-direction).
For example, second joint face 312 can be formed on the basis of first axis direction (X-direction) as shown in Figure 4
There is narrower width compared to first joint face 311.In this case, the dielectric 31 can be formed is led by described
The shape that wave duct 2 becomes smaller to the direction size of the transport part 4.In this case, second joint face 312 and institute are connected
The side for stating the dielectric 31 of the first joint face 311, on the basis of the inner face of the guided wave road 21 to inward side to constituted fix
Inclination angle (A) and tiltable formed.The inclination angle (A) can be at 45 degree or less.
For example, second joint face 312 can shape phase on the basis of first axis direction (X-direction) as shown in Figure 5
Than having the width of bigger in first joint face 311.In this case, the dielectric 31 can be formed by the guided wave
Direction size increased shape of the pipe 2 to the transport part 4.In this case, second joint face 312 and described is connected
The side of the dielectric 31 of first joint face 311 is to be constituted fixation in outward direction on the basis of the inner face of the guided wave road 21
Inclination angle (A) and tiltable formed.The inclination angle (A) can also be at 45 degree or less.
With reference to Fig. 2 to Fig. 6, the communication portion 3 may include shield member 32.
The shield member 32 can prevent microwave from entering.The shield member 32 is with first axis direction (X-direction)
On the basis of prevent microwave to the outside of first joint face 311 move.Accordingly, the communication portion 3 makes microwave only pass through described
First joint face 311 enters the inside of the dielectric 31 and then by the dielectric 31, and then can prevent in the electricity
The vortex to microwave occurs in medium 31.The shield member 32 can be formed by the metal material for not making microwave pass through.For example, institute
Stating shield member 32 can be by a kind of formation in nichrome (Inconel), STS316, STS304.
The shield member 32 may include the container 321 for accommodating the dielectric 31.The container 321 can pass through
Lead to the shield member 32.The dielectric 31 is inserted into the container 321, so that the dielectric 31 is located at the screen
It covers inside component 32.In the state that the dielectric 31 is accommodated in the container 321, the shield member 32 is combinable
In the waveguide pipe 2, so that 311 comprehensive engagement of the first joint face is in the guided wave road 21.Accordingly, the shield member 32
It can induce microwave and enter the inside of the dielectric 31 by first joint face 311, therefore the biography to microwave can be improved
Defeated efficiency.Accordingly, to the dielectric 31 do not have shield member 32 in the state of with the first axis direction (X-direction) phase
Comparative example than the width for forming bigger in the width of the guided wave road 21；And the dielectric 31 is inserted in the shield member
32 embodiments that identical with guided wave road 21 width is formed with the first axis direction (X-direction) simulated as a result, can be true
Recognize the efficiency of transmission for microwave, it is 260% to compare when being classified as 100% then embodiment.
The shield member 32 can form the shape of inner hollow because of the container 321.The container 321 can be formed
Corresponding to the shape of the dielectric 31.
For example, as shown in Figure 4 on the basis of first axis direction (X-direction), the dielectric 31 is formed by described
In the case of the shape that waveguide pipe 2 becomes smaller to the direction size of the transport part 4, the container 321 may be formed at by described
The shape that waveguide pipe 2 becomes smaller to the direction size of the transport part 4.
For example, as shown in Figure 5 on the basis of first axis direction (X-direction), the dielectric 31 is formed by described
In the case of the shape that waveguide pipe 2 becomes larger to the direction size of the transport part 4, the container 321 may be formed at described lead
The shape that wave duct 2 becomes larger to the direction size of the transport part 4.
For example, as shown in Figure 3 on the basis of first axis direction (X-direction), the dielectric 31 is formed by described
In the case of the shape that waveguide pipe 2 does not change to the direction width of the transport part 4, the container 321 can be formed by institute
State the shape that waveguide pipe 2 does not change to the direction width of the transport part 4.
Though not shown in drawing, the communication portion 3 may include seal member.In the feelings that the guided wave road 21 is vacuum state
Under condition, the gap between the salable shield member 32 of the seal member and the waveguide pipe 2, so that the guided wave road 21
Keep vacuum state.In this case, the seal member can intervene in the shield member 32 and the waveguide pipe 2 it
Between.In the case where the chamber 200 is vacuum state and the guided wave road 21 is normal pressure state, the seal member can
The gap between the shield member 32 and the transport part 4 is sealed, so that the chamber 200 keeps vacuum state.At this
In the case of, the seal member can be intervened between the shield member 32 and the transport part 4.The seal member can be
O-ring.
With reference to Fig. 6, the communication portion 3 may include joint element 33.
The joint element 33 is between the shield member 32 and the dielectric 31.The joint element 33 can make
The dielectric 31 for being inserted in the container 321 is incorporated into the shield member 32.Accordingly, complete with first joint face 311
Face can be held strongly against the dielectric 31 in the state of being contacted with the guided wave road 21.In addition, the joint element 33 seals
Between the dielectric 31 and shield member 32, and then pass through the gap energy between the dielectric 31 and the shield member 32
Enough prevent vacuum leak (Leak).
The joint element 33 can be formed by the material for not absorbing microwave.For example, the joint element 33 can be by not containing
The material for absorbing the substances such as the lead (Pb) of microwave is formed.Accordingly, precipitation equipment according to the present invention microwave transmission unit 1
For that can prevent the joint element 33 from absorbing microwave and the deformations such as melt to temperature rise.Therefore, deposition according to the present invention
Device microwave transmission unit 1 can keep the dielectric 31 to be incorporated into the state of the shield member 32, while can protect
Hold the sealing force in the gap between the dielectric 31 and the shield member 32.
The joint element 33 can form the shape of the peripheral surface around the dielectric 31.In this case, described
Dielectric 31 is located inside the joint element 33.The joint element 33 can form the width of bigger compared to the dielectric 31
Degree, and then make the dielectric 31 and the guided wave road 211 that mutually there is phase on the basis of first axis direction (X-direction)
Same width.
With reference to Fig. 7, the communication portion 3 of embodiment, the dielectric 31 can be formed with described first according to a modification of this invention
There is on the basis of axis direction (X-direction) compared to the guided wave road 21 width of bigger.In this case, the shielding part
The dielectric 31 described in 313 zoning of first joint face 311 and faying face of part 32, and then with the first axis direction (X-axis
Direction) on the basis of make first joint face 311 and the guided wave road 21 mutually width having the same.The faying face 313
It is located at the outside of first joint face 311 on the basis of first axis direction (X-direction).
Accordingly, precipitation equipment according to the present invention microwave transmission unit 1, can not only be with the first axis direction (X-axis
Direction) on the basis of induction microwave pass through the entrance dielectric of the first joint face 311 of the dielectric 31 without changes of section
Inside 31, additionally it is possible to realize sealing force by the faying face 313 of the dielectric 31.Therefore, precipitation equipment according to the present invention
The efficiency of transmission to microwave can be improved using the dielectric 31 with microwave transmission unit 1, while vacuum can be prevented
Leakage.
The dielectric 31 may include the insertion groove 314 for being inserted into the shield member 32.The shield member 32 is inserted
Enter the insertion groove 314, and then the shield member 32 described in 313 zoning of first joint face 311 and the faying face.
Therefore, precipitation equipment according to the present invention microwave transmission unit 1 is compared with using the joint element 33 (being shown in Fig. 6)
When, the efficiency of transmission and sealing force to microwave can be improved with simple construction.The insertion groove 314 may be formed at the electricity and be situated between
From the one side recess predetermined depth for forming first joint face 311 in matter 31.Accordingly, if the shield member 32 is inserted in institute
Insertion groove 314 is stated, then shield member 32 is supported the state that can keep being inserted in the insertion groove 314 by the dielectric 31.
Multiple shield members 32 are also can be inserted into the dielectric 31.In this case, in the dielectric 31
Multiple insertion grooves 314 can be formed.Multiple shield members 32 are inserted into the dielectric 31, so that multiple screens
It covers component 32 and is spaced first width (H1) on the basis of first axis direction (X-direction).Accordingly, first connection
It face 311 can be by multiple 32 zonings of the shield member at being led with described on the basis of first axis direction (X-direction)
21 identical first width (H1) of wave paths.In this case, multiple insertion grooves 314 may be formed at the first axle side
Spaced position on the basis of to (X-direction).
With reference to Fig. 2 to Fig. 8, the transport part 4 is in order to make microwave transmission be incorporated into the chamber in the chamber 200
200.The transport part 4 can be combined in the chamber 200 to be communicated in chamber interior 210.The waveguide pipe 2 can be combined in described
Transport part 4, so that the waveguide pipe 2 is located at the other side of the chamber 200 on the basis of the transport part 4.That is, the transmission
Portion 4 is between the waveguide pipe 2 and the chamber 200.
The transport part 4 may include for the outlet opening 41 by microwave.Microwave is transmitted by the outlet opening 41
To the chamber 200.The outlet opening 41 can penetrate through the transport part 4.It is located at the microwave generator 10 in the communication portion 3
And between the waveguide pipe 2 in the case of, the microwave for flowing into the transport part 4 is directly provided from the waveguide pipe 2.Upper
In the case of communication portion 3 is stated between the waveguide pipe 2 and the transport part 4, the microwave for flowing into the transport part 4 is in institute
State what waveguide pipe 2 was provided by the dielectric 31.
The outlet opening 41 can form one end 41a towards the chamber interior 210 with first axis direction (X-axis side
To) narrower the second width (H2) is formed compared to first width (H1).In this case, the outlet opening 41 can shape
At crack (Slit) shape.Accordingly, precipitation equipment microwave transmission unit 1 according to the present invention is prevented by the outlet opening 41
Intended particle is flowed into 31 side of the dielectric, and then can prevent reduction pair according to intended particle is deposited in the dielectric 31
The efficiency of transmission of microwave.
With reference to Fig. 8 to Figure 11, the outlet opening 41, which can be formed, to be had on the basis of the second axis direction (Y direction) than described
The length 310L longer lengths 41L of the target face 310 of target 300.The target face 310 means in the target 300
Towards the opposite face of the outlet opening 41 of the transport part 4 in face.The target face 310 is configured according to the target 300 described
The direction of chamber interior 210 can be comparable to the length of the target 300 or the face of width.Accordingly, according to the present invention heavy
Product device microwave transmission unit 1 is that the field regions generated to the periphery of the target 300 can be improved by the outlet opening 41
The uniformity of the microwave of domain transmission.Second axis direction (Y direction) can be hung down to first axis direction (X-direction)
Straight axis direction.
For example, as shown in Figure 9 in the setting of chamber interior 210 there are one in the case of target 300, the outlet opening 41 can shape
At the length 310L longer lengths 41L having on the basis of second axis direction (Y direction) than the target face 310.
In the case where the target 300 forms the cylindrical shape of cylinder type, the outlet opening 41 can be formed with the second axis direction (Y
Axis direction) with the length 310L longer lengths 41L than the target face 310.
For example, as shown in Figure 10 in more than 210 a target 300 of the chamber interior with second axis direction (Y direction)
In the case of spaced setting, the outlet opening 41 can be formed on the basis of second axis direction (Y direction) have than
The length 310L of the target face 310 and the length of the spaced gap length addition of multiple target faces 310 are longer
Length 41L.In this case, the target face 310 can be comparable to the face of the width of the target 300.
For example, multiple with the vertical direction configuration in the direction configured to Figure 10 in the chamber interior 210 as shown in figure 11
In the case of target 300, the outlet opening 41, which can be formed, to be had on the basis of second axis direction (Y direction) than described
The length 310L longer lengths 41L of longest target face 310 in target face 310.
The transport part 4 is set as, to one end 41a of the chamber interior 210 from the mesh in the outlet opening 41
The distance D (Fig. 9 is shown) that mark face 310 is isolated can be in 20mm or more.It may be alternatively provided as in the transport part 4 to the chamber interior
20mm or more is isolated from the target face 310 in 210 one end.
2 and Figure 13 referring to Fig.1, precipitation equipment microwave transmission unit 1 according to the present invention may include that reflecting part 5 (is being schemed
13 show).
The microwave that the reflecting part 5 is injected to 200 lateral reflection of the chamber from the microwave generator 10.In this case
Under, the microwave generator 10 is incorporated into the upper waveguide pipe 2, so that microwave is with injection direction, (ID arrow directions are shown in Figure 13
Go out) flow into the waveguide pipe 2.Configured with the reflecting part 5, the injection direction (scheming by ID arrow directions
13 show) it is to supplying direction (SD arrow directions are shown in Figure 13) vertical direction, which is in the transport part
4 supply the direction of microwave to the chamber 200.The reflecting part 5 can be formed by the strong conductor of heat resistance.
The reflecting part 5 can be reflected from the microwave generator 10 to the supply direction (SD arrow directions) along described
The microwave of injection direction (ID arrow directions) injection.Accordingly, precipitation equipment microwave transmission unit 1 according to the present invention is to increase
The microwave for flowing into the waveguide pipe 2 greatly is supplied to the amount of the chamber 200, and then can improve the transmission effect to microwave
Rate.In addition, precipitation equipment according to the present invention microwave transmission unit 1, using the reflecting part 5 can improve by it is described go out
The uniformity for the microwave that oral pore 41 is transmitted to the field region generated on 300 periphery of the target.
It is above-mentioned can be from the curve graph of following figure 19 it is recognised that the Figure 19, which is shown, makes the injection direction (ID arrow directions)
And in the state that the supply direction (SD arrow directions) configures the microwave generator 10 mutual vertically, in applicable comparative example
And the result of discharge voltage is measured in the precipitation equipment of embodiment respectively.Herein, the transmitting device of comparative example is as follows：Do not having
In the state of reflecting part 5 dielectric 31 (being shown in Fig. 3) with first axis direction (X-direction) compared to the guided wave
The width on road 21 forms the width of bigger.Embodiment is to be applicable in the precipitation equipment of following transmitting device：With reflecting part 5
The dielectric 31 (being shown in Fig. 3) forms width identical as the guided wave road 21 with first axis direction (X-direction) simultaneously
The precipitation equipment of the transmitting device of degree.Vertical pivot is the size of discharge voltage in the curve graph shown in following figure 19, and horizontal axis is micro-
The size of wave power.
From the curve graph of Figure 19 it is recognised that comparative example be when not transmitting microwave discharge voltage in 250V shapes below
Under state, discharge voltage is substantially reduced to 225V when transmitting the microwave of 1kW.That is, comparative example because microwave transmission discharge voltage substantially
Reduce 25V.With above-mentioned difference the microwave of 1kW is transmitted in the state that embodiment is that discharge voltage is 250V when not transmitting microwave
When discharge voltage be substantially reduced to 200V.That is, embodiment is because transmission microwave discharge voltage substantially reduces 50V.If transmission
Microwave, then microwave cause electron cyclotron resonace (ECR, Electron Cyclotron Resonance) anti-in field region
It answers, and then occurs electron temperature successively and increase, ionize increase, plasma density increase, discharge current increase i.e. discharge voltage
Reduce etc., therefore it is to judge the index of microwave transmission efficiency that discharge voltage, which reduces ratio,.I.e., it is meant that discharge voltage reduces ratio
More big then microwave transmission efficiency is higher.Therefore, discharge voltage is more greatly reduced compared to comparative example in embodiment, so as to
Efficiency of transmission can more be improved compared to Comparative Example by knowing, in addition, it is recognised that comparative example is that can apply from table 1
The maximum power of the microwave added is 1kW, and the maximum power for the microwave that embodiment can apply unlike this is 2kW.Therefore compared to than
It can apply more powerful microwave compared with example embodiment, therefore more increase discharge voltage you reduce ratio, and then can more carry
High microwave transmission efficiency.
Accordingly, precipitation equipment according to the present invention microwave transmission unit 1 makes the width of the dielectric 31 be led with described
Wave paths 21 it is of same size, while being applicable in the reflecting part 5, and then microwave transmission efficiency can be improved.In addition, according to the present invention
Precipitation equipment microwave transmission unit 1 be the high power transmission, it can be achieved that the chamber 200, while utilize the reflection
The uniformity of the microwave transmitted to the field region generated on the periphery of the target 300 by the outlet opening 41 is improved in portion 5,
The stability and uniformity to plasma can be improved in turn.
Referring to Fig.1 2 to Figure 15, the reflecting part 5 may include the first reflection component 51.
First reflection component 51 is incorporated into the waveguide pipe 2, so that first reflection component 51 is located at described lead
Wave paths 21.First reflection component 51 can be to supply direction (SD arrow directions) lateral reflection from the microwave generator 10
The microwave injected to the injection direction (ID arrow directions).
First reflection component 51 may include the first reflecting surface 511 for microwave reflection.First reflecting surface 511
It is formed in first reflection component 51 towards the side of the microwave generator 10.First reflection component 51 can be formed
More then become smaller shape towards supply direction (SD arrow directions) size.
Make on the basis of the injection direction (ID arrow directions) for example, the first reflection component 51 as shown in figure 13 can be formed
Section formed it is triangular shaped.In this case, first reflecting surface 511 is with the injection direction (ID arrow directions)
Inclined inclined surface can be formed.
For example, first reflection component 51 can be formed more towards the injection direction (ID arrow directions) as shown in figure 14
Then more protruded to supply direction (SD arrow directions) side.In this case, the guided wave road 21 is anti-according to described first
Penetrating face 511 can form more that then size becomes smaller towards the injection direction (ID arrow directions).
Though not shown in drawing, first reflection component 51 can also be formed is with the injection direction (ID arrow directions)
Baseline cross-section is the other shapes such as half-oval shaped, semi-circular shape.
Referring to Fig.1 5, the reflecting part 5 may include second reflection component 52.
Second reflection component 52 is connected to the waveguide pipe 2, so that second reflection component 52 is with the injection
Direction (ID arrow directions) is located at from the position that first reflection component 51 is isolated.Second reflection component 52 can be to described
The microwave that supply direction lateral reflection is injected from the microwave generator 10 along the injection direction (ID arrow directions).Described
Two reflection components 52 may include the second reflecting surface 521 for microwave reflection.Second reflecting surface 521 is formed in described second
Towards the side of first reflection component 51 in reflection component 52.Second reflection component 52 can be formed more towards the confession
The shape for answering direction (SD arrow directions) size but to become smaller.
Second reflecting surface 512 can be formed with supply direction (SD arrow directions) size than first reflecting surface
511 biggers.Accordingly, second reflecting surface 521 can be reflected to the supply direction (SD arrow directions) with the injection direction
The microwave that (ID arrow directions) passes through first reflecting surface, 511 upside.Therefore precipitation equipment according to the present invention is passed with microwave
Defeated device 1 can more improve microwave transmission efficiency.
The formation of second reflecting surface 521 makes second reflection component 52 than first reflection component 51 more to described
Direction (SD arrow directions) protrusion is supplied, and then it is bigger than first reflecting surface 511 to form size.Second reflection component
52 can also form shape identical with first reflection component 51.Though being not shown, second reflection component 52 also may be used
Form the shape different from first reflection component 51.
In addition, the reflecting part 5 is applicable to following all embodiments：Reflecting part 5 is incorporated into the waveguide pipe 2, with
The communication portion 3 is set to be located at the embodiment between the microwave generator 10 (being shown in Figure 13) and the waveguide pipe 2；And it is described
Reflecting part 5 is incorporated into the waveguide pipe 2, so that the communication portion 3 is between the waveguide pipe 2 and the transport part 4.
2 and Figure 16 referring to Fig.1, to make the communication portion 3 be located at the microwave generator 10 (Fig. 2 shows) and described leading
In the case of being incorporated into the waveguide pipe 2 between wave duct 2, the dielectric 31, which can be formed, makes first joint face 311 have
There is the identical area with the inflow face of the waveguide pipe 2 22 (Figure 12 is shown).The inflow face 22 is flowed in the waveguide pipe 2
Enter the face of the microwave.Accordingly, first joint face 311, which can be realized, is, width 311W (shown in Figure 16) length 311L (
Figure 16 is shown) it is all identical as the width of the waveguide pipe 2 and length.
Referring to Fig.1 7, the microwave generator 10 can be combined in the waveguide pipe 2, so that the microwave is with injection direction
(ID arrow directions) flows into waveguide pipe 2, wherein the injection direction (ID arrow directions) is perpendicular to the supply direction (SD arrows
Head direction).In this case, the injection direction (ID arrow directions) is parallel to the target face 310 of the target 300
Direction.The target face 310 is by the target 300 towards the face of the waveguide pipe 2.That is, the microwave generator 10 can match
Set the side in the direction for being parallel to the target face 310.
In this case, for being injected along the injection direction (ID arrow directions) from the microwave generator 10
Microwave, it should be changed to by the waveguide pipe 2 towards supply direction (the SD arrows perpendicular to the injection direction (ID arrow directions)
Head direction) moving direction.Accordingly, on the basis of the injection direction (ID arrow directions), it is transmitted in the micro- of the target face
There is larger deviation in the amount of wave.On the basis of the injection direction (ID arrow directions), closer to institute in the target face 310
Then transmit more a small amount of microwave in the part for stating microwave generator 10.In order to reduce this deviation.It may be configured with above-mentioned reflecting part 5
(Figure 13 is shown).
Referring to Fig.1 8, the microwave generator 19 also can be combined in the waveguide pipe 2, so that microwave is to be parallel to the confession
The injection direction (ID arrow directions) of direction (SD arrow directions) is answered to flow into the waveguide pipe 2.In this case, the note
Enter the direction that direction (ID arrow directions) is perpendicular to the target face 310 of the target 300.That is, the microwave generator 10 can
Configuration is in the side perpendicular to the direction of the target face 310.
In this case, for being injected along the injection direction (ID arrow directions) from the microwave generator 10
Microwave, it should from the waveguide pipe 2 along to supply direction (the arrow sides SD for being parallel to the injection direction (ID arrow directions)
To) mobile.Accordingly, on the basis of perpendicular to the injection direction (ID arrow directions), then biography can be reduced to defeated in the target
The deviation of the amount of the microwave in face 310.Therefore, it is configured perpendicular to the direction of the target face 310 in the microwave generator 10
Side in the case of, precipitation equipment microwave transmission unit 1 according to the present invention have no reflecting part 5 (Figure 13 shows
Go out) uniformity of the amount that can also improve the microwave for being transmitted in the target face 310 the advantages of.
The microwave generator 10 configure perpendicular to the side in the direction of the target face 310, it is described go out
Oral pore 41 can be formed to be become larger with supply direction (SD arrow directions) size.Accordingly, precipitation equipment according to the present invention is with micro-
Wave transmitting device 1 is to be transmitted in the target face 310 even if also can more be improved without the reflecting part 5 (Figure 13 is shown)
Microwave amount uniformity.In this case, it is by one end of the outlet opening 41 towards the target face 310, to hang down
It can directly be formed than 310 longer length of the target face in the direction of supply direction (SD arrow directions).
It is not limited by above-described embodiment and attached drawing in present invention mentioned above, in the technological thought without departing from the present invention
In the range of, various replacements, deformation and change can be carried out, and this has usual knowledge to the technical field of the invention
Technical staff is obvious.
Claims (16)
1. a kind of precipitation equipment microwave transmission unit, which is characterized in that including：
Microwave generator generates microwave；
Waveguide pipe is connected to the microwave generator；
Communication portion, in order to make microwave by by be incorporated into the waveguide pipe；And
Transport part, in order to make microwave transmission be incorporated into the chamber in the chamber of precipitation equipment,
The waveguide pipe includes the guided wave road for having the first width with the first axis direction,
The communication portion includes：For the dielectric by microwave；And the shield member for preventing microwave from entering,
The dielectric includes being contacted with the first joint face of the guided wave road, and first joint face is with the first axle
Direction forms first width, so that first joint face has with the guided wave road on the basis of first axis direction
Same widths.
2. precipitation equipment microwave transmission unit according to claim 1, which is characterized in that
The shield member includes for accommodating dielectric container, and the shield member is incorporated into the guided wave
Pipe, so as to it is contained in dielectric first joint face comprehensive engagement of the container in the guided wave road,
The dielectric is inserted into the container, so that the dielectric is located inside the shield member.
3. precipitation equipment microwave transmission unit according to claim 2, which is characterized in that
The communication portion includes the joint element between the shield member and the dielectric,
The joint element makes the dielectric junction for being inserted in the container together in the shield member.
4. precipitation equipment microwave transmission unit according to claim 1, which is characterized in that
The dielectric includes the insertion groove for being inserted into the shield member,
The shield member is inserted in the insertion groove, made on the basis of first axis direction first joint face with it is described
Guided wave road has same widths, and then the dielectric region can be divided into first joint face and be located at first joint face
The faying face in outside.
5. precipitation equipment microwave transmission unit according to claim 4, which is characterized in that
The dielectric includes multiple insertion grooves, to be inserted into multiple shield members respectively,
Multiple shield members are inserted in multiple insertion grooves respectively, so that multiple shield members are with the first axle
First width is spaced on the basis of direction.
6. precipitation equipment microwave transmission unit as claimed in any of claims 1 to 5, which is characterized in that
The transport part include for the outlet opening by microwave so that microwave transmission is to the chamber,
The outlet opening is to be formed towards one end of the chamber interior with first axis direction compared to first width
Form the second narrower width.
7. precipitation equipment microwave transmission unit as claimed in any of claims 1 to 5, which is characterized in that
The transport part include for the outlet opening by microwave so that microwave transmission is to the chamber,
The outlet opening forms on the basis of the second axis direction the length longer length having than target face, wherein described second
Axis direction is perpendicular to first axis direction, and the target face is is being arranged in the face of the target of the chamber interior towards institute
State the face of transport part.
8. precipitation equipment microwave transmission unit as claimed in any of claims 1 to 5, which is characterized in that
The transport part include for the outlet opening by microwave so that microwave transmission is to the chamber,
The outlet opening is formed on the basis of the second axis direction with more spaced than the length of target face and multiple target faces
The length longer length that gap length is added, wherein second axis direction is perpendicular to first axis direction, the target
Face is that the face in the face of multiple targets difference of the chamber interior towards the transport part is being arranged.
9. precipitation equipment microwave transmission unit as claimed in any of claims 1 to 5, which is characterized in that
The transport part include for the outlet opening by microwave so that microwave transmission is to the chamber,
Towards described outlet opening one end of the chamber interior from target face be isolated 20mm or more, wherein the target face positioned at
Towards the outlet opening in the face of the target of the chamber interior.
10. precipitation equipment microwave transmission unit as claimed in any of claims 1 to 5, which is characterized in that
The communication portion is incorporated into the waveguide pipe so that the communication portion be located at the microwave generator and the waveguide pipe it
Between,
The waveguide pipe includes flowing into the inflow face of the microwave,
The dielectric formation makes first joint face have area identical with the inflow face.
11. precipitation equipment microwave transmission unit as claimed in any of claims 1 to 5, which is characterized in that
Including being incorporated into the waveguide pipe with positioned at the first reflection component of the guided wave road.
First reflection component is incorporated into the waveguide pipe, so that microwave flows into the waveguide pipe with injection direction, wherein
The injection direction is supplied to the supply direction of the chamber perpendicular to microwave by transport part,
First reflection component is injected from the microwave generator along the injection direction to the supply direction lateral reflection
Microwave.
12. precipitation equipment microwave transmission unit according to claim 11, which is characterized in that
Including be incorporated into the waveguide pipe with positioned at the injection direction from the position that first reflection component is isolated
Two reflection components,
First reflection component includes the first reflecting surface for microwave reflection,
Second reflection component includes the second reflecting surface for microwave reflection,
Second reflecting surface forms bigger than first reflecting surface with the supply direction size.
13. precipitation equipment microwave transmission unit according to claim 11, which is characterized in that
First reflection component is more then more to the supply direction side to be protruded to the injection direction.
14. precipitation equipment microwave transmission unit as claimed in any of claims 1 to 5, which is characterized in that
The microwave generator is incorporated into the waveguide pipe, so that microwave flows into the waveguide pipe with injection direction, wherein institute
It states injection direction and is parallel to the supply direction that microwave is supplied to the chamber by the transport part.
15. precipitation equipment microwave transmission unit according to claim 14, which is characterized in that
The transport part includes for the outlet opening by microwave, so that microwave transmission is to the chamber.
The outlet opening is formed as size and increases to the supply direction.
16. a kind of precipitation equipment microwave transmission unit, which is characterized in that including：
Waveguide pipe is connected to microwave generator；
Communication portion is incorporated into the waveguide pipe, so that microwave passes through；
Transport part, in order to make microwave transmission be tied in the chamber in the chamber of precipitation equipment,
The waveguide pipe includes the guided wave road for having the first width with the first axis direction,
The communication portion include for the dielectric by microwave,
The dielectric forms first width with the first axis direction, so that the dielectric is using first axis direction as base
Standard has width identical with the guided wave road.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2015-0096452 | 2015-07-07 | ||
| KR1020150096452A KR101723190B1 (en) | 2015-07-07 | 2015-07-07 | Apparatus for Transmitting Microwave of Deposition Apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106337166A CN106337166A (en) | 2017-01-18 |
| CN106337166B true CN106337166B (en) | 2018-11-09 |
Family
ID=57826185
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610527970.6A Expired - Fee Related CN106337166B (en) | 2015-07-07 | 2016-07-06 | Precipitation equipment microwave transmission unit |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101723190B1 (en) |
| CN (1) | CN106337166B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102359919B1 (en) | 2017-01-13 | 2022-02-07 | 현대자동차 주식회사 | Planetary gear train of automatic transmission for vehicles |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6388632B1 (en) * | 1999-03-30 | 2002-05-14 | Rohm Co., Ltd. | Slot antenna used for plasma surface processing apparatus |
| CN1501546A (en) * | 2002-10-21 | 2004-06-02 | ��������ͨ���о�Ժ | Waveguide structured package and method for fabricating the same |
| CN101099419A (en) * | 2005-05-12 | 2008-01-02 | 株式会社岛津制作所 | Surface wave excitation plasma processing system |
| CN104115261A (en) * | 2012-02-14 | 2014-10-22 | 东京毅力科创株式会社 | Film formation device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS644303A (en) * | 1987-06-25 | 1989-01-09 | Ig Tech Res Inc | Extrusion forming device |
| JPH104303A (en) * | 1996-06-17 | 1998-01-06 | Toshiba Corp | Waveguide circuit |
| JP2012220359A (en) * | 2011-04-11 | 2012-11-12 | Tokyo Electron Ltd | Process monitoring device used for substrate processing apparatus, process monitoring method, and substrate processing apparatus |
| KR20140025831A (en) * | 2012-08-22 | 2014-03-05 | 현대위아 주식회사 | Constant velocity joint for prevention of leakaging grease |
-
2015
- 2015-07-07 KR KR1020150096452A patent/KR101723190B1/en active IP Right Grant
-
2016
- 2016-07-06 CN CN201610527970.6A patent/CN106337166B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6388632B1 (en) * | 1999-03-30 | 2002-05-14 | Rohm Co., Ltd. | Slot antenna used for plasma surface processing apparatus |
| CN1501546A (en) * | 2002-10-21 | 2004-06-02 | ��������ͨ���о�Ժ | Waveguide structured package and method for fabricating the same |
| CN101099419A (en) * | 2005-05-12 | 2008-01-02 | 株式会社岛津制作所 | Surface wave excitation plasma processing system |
| CN104115261A (en) * | 2012-02-14 | 2014-10-22 | 东京毅力科创株式会社 | Film formation device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101723190B1 (en) | 2017-04-04 |
| CN106337166A (en) | 2017-01-18 |
| KR20170006059A (en) | 2017-01-17 |
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