CN106336112A - MCVD (Modified chemical vapour deposition) raw material gas conveying component and doping device - Google Patents
MCVD (Modified chemical vapour deposition) raw material gas conveying component and doping device Download PDFInfo
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- CN106336112A CN106336112A CN201610696838.8A CN201610696838A CN106336112A CN 106336112 A CN106336112 A CN 106336112A CN 201610696838 A CN201610696838 A CN 201610696838A CN 106336112 A CN106336112 A CN 106336112A
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- mcvd
- pipeline
- sleeve pipe
- gas
- rare earth
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
The present invention discloses a MCVD (modified chemical vapour deposition) raw material gas conveying component comprising material conveying pipes, the material conveying pipes are arranged in the interior of a metal heating sleeve pipe, the metal heating sleeve pipe is arranged in a high pure quartz glass sleeve pipe, and each gas pipeline of the material conveying pipes is prepared from a corrosion resistant stainless steel material. The gas pipelines for conveying all raw material gases are placed in the metal heating sleeve pipe for synchronous heat insulation, and then simultaneously outputted to a reaction tube, and temperature of the raw material gases can be accurately controlled, so that the raw material gases can be mixed evenly as soon as possible, the uniformity of a rare earth doped preform rod prepared by vapor deposition method can be improved; and each gas pipeline of the material conveying pipes is prepared from the corrosion resistant stainless steel material, so that the material conveying pipes can resist high temperature and can withstand corrosion of corrosive gases, and the corrosion resistant stainless steel material has good ductility, and is not as fragile as a glass pipe; technical environment for preparation of the rare earth doped preform rod can be effectively improved, and the performance of an optical fiber perform rod can be improved. The invention also provides a corresponding doping device for MCVD.
Description
Technical field
The invention belongs to optical fiber cable preparing technical field, defeated more particularly, to a kind of unstrpped gas for mcvd
Send part and doper.
Background technology
The technology of preparing of existing fiber prefabricated rods includes improving chemical vapor deposition (modified chemical vapour
Deposition, mcvd), Outside Vapor deposition (outside chemical vapour deposition, ovd), axial gas
Mutually deposition (vapour phase axial deposition, vad), PCVD (plasma activated
Chemical vapour deposition, pcvd) etc..Mcvd technology therein is high due to flexibility, is widely used in spy
Plant the preparation of preform, the especially preparation of rare-earth-doped fiber precast rod.Rare earth element etc. is added to axle pair
Form rare earth doped fiber in the sandwich layer of optical fiber of title waveguiding structure or covering.This type optical fiber can be applicable to laser instrument, light amplification
In the light sources such as device and Transmission system.The preparation of rare earth doped fiber and the preparation method step global similarity of ordinary optic fibre, be also
First prepare the preform with doping core area, then wire drawing coating is carried out on wire-drawer-tower and forms optical fiber, but mix rare earth
There is significant difference with other types optical fiber during the doping of prefabricated rods sandwich layer in optical fiber.
The mcvd method preparing rare-earth-doped fiber precast rod is broadly divided into liquid phase doping methods and gas phase doping method.Liquid phase doping
Method is to prepare the process that rare-earth-doped fiber precast rod adopts earliest, and it is to deposit knot by mcvd technique in reaction tube
The loose sedimentary of structure, the sedimentary of this short texture is immersed in the solution containing rare earth ion, so that sedimentary is adsorbed
Rare earth ion in solution, then again through dehydration, the technique such as vitrifying by rare earth ion doped enter reaction tube in.Gas phase doping
Method is a kind of process that developed in recent years, and it is by mcvd process deposits covering, but core area rare earth material
Deposition be by by the Rare Earth Chelate containing rare earth element or chloride with gas by way of take in mcvd reaction tube,
In the presence of pipe external heat source, produce oxidation reaction together with the silicon that is passed through with mcvd, phosphorus etc., migrate and deposit to reaction tube,
Directly form doping core area.Compared to liquid phase doping methods, the technique of gas phase doping method is easier, and the section of deposition prefabricated rods is more
Finely, doping content can flexibly be controlled, uniformity is good, and core diameter is changeable.
For the raw material such as silicon si, phosphorus p, Rare Earth Chelate needs the high temperature more than 100 DEG C could be gasified,
Simultaneously because there is a certain amount of etchant gas in pipeline, therefore transfer unit high temperature resistant, sealing and pipeline high temperature resistant,
Corrosion resistance characteristic is particularly important, and especially can the temperature of transfer unit determine Rare Earth Chelate and mode on demand enter into
Deposition region, the sealing of transfer unit and the corrosion resistance of pipeline determine the loss of follow-up rare-earth-doped fiber precast rod.
Content of the invention
Disadvantages described above for prior art or Improvement requirement, the invention provides a kind of unstrpped gas for mcvd is defeated
Send part and doper, during being capable of the conveying of the unstrpped gas of mcvd and adulterating, pipeline is high temperature resistant and corrosion resistant
Characteristic, and enable the uniform mixing of unstrpped gas, improve the quality of preform.
To achieve these goals, according to one aspect of the present invention, there is provided a kind of unstrpped gas for mcvd is defeated
Send part, including feedstock transportation pipeline, the METAL HEATING PROCESS sleeve pipe with heating function and pure quartz glass sleeve pipe, wherein said
Feedstock transportation pipeline is arranged in the described METAL HEATING PROCESS sleeve pipe pipe with heating function, the described METAL HEATING PROCESS set with heating function
Pipe is arranged in described pure quartz glass sleeve pipe pipe, and in described feedstock transportation pipeline, the material of each gas pipeline is corrosion resistant
Erosion stainless steel.
In one embodiment of the present of invention, described feedstock transportation pipeline includes exporting gas from rare earth material cabinet for conveying
Rare earth material cabinet output gas pipeline, for conveying the Rare Earth Chelate pipeline of Rare Earth Chelate, be used for conveying al2cl6Raw material
al2cl6Pipeline, for conveying the mcvd gas pipeline of mcvd desired gas and be used for conveying sicl4Sicl with pocl34With
Pocl3 pipeline.
In one embodiment of the present of invention, the described METAL HEATING PROCESS sleeve pipe with heating function includes metal sleeve, heating dress
Put and temperature survey and regulating system, described temperature survey and regulating system are used for measuring the temperature of metal sleeve, and according to
Described in the temperature adjustment of the metal sleeve recording, heater heats to described metal sleeve.
In one embodiment of the present of invention, described heater is the uniformly gapless heating being wrapped on metal sleeve
Band.
In one embodiment of the present of invention, in described feedstock transportation pipeline, the position relationship of each gas pipeline is: described
Rare Earth Chelate pipeline is located at middle, and remaining four pipeline is looped around described Rare Earth Chelate pipeline periphery, wherein chelate
Pipeline stretches out about 2.5-5.4cm than remaining four pipeline.
It is another aspect of this invention to provide that additionally providing a kind of doper for mcvd, including above-mentioned raw materials gas
Transfer unit, between described feedstock transportation part and reaction tube and mcvd lathe be flexible coupling, and described feedstock transportation part with
It is to be flexible coupling between heater box.
In one embodiment of the present of invention, unstrpped gas out converges to afterwards heater box from each expects pipe and is incubated and then through institute
State each independent pipeline output in feedstock transportation pipeline, described each expects pipe and each independent pipeline in described feedstock transportation pipeline it
Between connect for welding or valve.
In one embodiment of the present of invention, by gland, described pure quartz glass sleeve pipe is sealed with mcvd lathe, institute
State the two resistant to elevated temperatures rubber rings that are connected by of pure quartz glass sleeve pipe and described mcvd lathe, described two rubber rings are used
In fixing to described pure quartz glass sleeve pipe, and make described pure quartz glass sleeve pipe coaxial with chuck.
In one embodiment of the present of invention, the output end of described feedstock transportation pipeline is passed through in reaction tube, described reaction tube
Pass through seal with elastometic washer and described mcvd lathe between.
In one embodiment of the present of invention, the chuck axis coaxle of the axis of described heater box and described mcvd lathe, institute
State heater box to be placed on slide rail, described unstrpped gas transfer unit and heater box are flexible coupling using scalable steel band, described heating
Case and unstrpped gas transfer unit can move back and forth along chuck axis.
Compared with prior art, the invention has the following beneficial effects:
The pipeline conveying all unstrpped gases can be placed in metal and add by the 1st, the unstrpped gas transfer unit that the present invention provides
Synchronously it is incubated in thermal sleeve, then simultaneously exports to reaction tube, can with precise control unstrpped gas temperature, and can make former
Material gas mixing such that it is able to improve the uniformity of the rear-earth-doped prefabricated rods of vapor phase method as early as possible；Both avoided traditional gas
In phase method the cold air such as si, p to the condensation of Rare Earth Chelate gas moreover it is possible to make reacting gas fill before reaching deposition region
The mixing dividing, to reach uniform deposition, improves the quality of preform；
2nd, in the unstrpped gas transfer unit that the present invention provides, in described feedstock transportation pipeline, each gas pipeline is corrosion resistant
Erosion stainless steel so that feedstock transportation pipeline can be resistant to high temperature and can bear the corrosivity of etchant gas, and corrosion-resistant not
Rust steel matter ductility is good, will not be frangible as glass pipe；
3rd, the unstrpped gas transfer unit that the present invention provides, the described METAL HEATING PROCESS sleeve pipe with heating function is arranged at institute
State in pure quartz glass sleeve pipe, it is to avoid the pollution that METAL HEATING PROCESS sleeve pipe and heater etc. are likely to result in；
4th, provided by the present invention for, in the doper of mcvd, unstrpped gas transfer unit adopts pure quartz glass sleeve
Plus the mode that is flexible coupling, not only take into account the free of contamination characteristic of glass tube high-temperature-resistant and anti-corrosion but also overcome the frangible characteristic of glass tube；
5th, provided by the present invention for the doper of mcvd, simple and effective, vapour deposition process preparation can be effectively improved and mix
The process environments of rare earth doped fiber prefabricated rods, the performance of rare-earth-doped fiber precast rod prepared by raising, and reliability and durability, can significantly drop
The maintenance cost of low equipment.
Brief description
Fig. 1 is the structural representation of the unstrpped gas transfer unit being used for mcvd in the embodiment of the present invention；
Fig. 2 is the structural representation of the doper being used for mcvd in the embodiment of the present invention；
In all of the figs, identical reference is used for representing identical element or structure, wherein:
1- pure quartz glass sleeve pipe 2- rare earth material cabinet output gas pipeline 3- Rare Earth Chelate pipeline 4- is al2cl6Pipe
The METAL HEATING PROCESS sleeve pipe 7-sicl with heating function for the road 5-mcvd gas pipeline 6-4Anti- with pocl3 pipeline 8- reaction tube 9-
Answer seal of tube rubber ring 10-mcvd chuck linking part 11- conveying glass tube the first sealing rubber ring 12-mcvd lathe
13- conveying glass tube the second sealing rubber ring 14- feedstock transportation part and heater box part 15- heater box 16- that is flexible coupling are former
Material gas.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with drawings and Examples, right
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only in order to explain the present invention, and
It is not used in the restriction present invention.As long as additionally, involved technical characteristic in each embodiment of invention described below
The conflict of not constituting each other just can be mutually combined.
As shown in figure 1, the invention provides a kind of unstrpped gas transfer unit for mcvd, including feed line
Road, the METAL HEATING PROCESS sleeve pipe 6 with heating function and pure quartz glass sleeve pipe 1, wherein said feedstock transportation pipeline is arranged at
In the described METAL HEATING PROCESS sleeve pipe 6 with heating function is managed, the described METAL HEATING PROCESS sleeve pipe with heating function is arranged at described high-purity
In quartz glass sleeve 1 is managed, in described feedstock transportation pipeline, the material of each gas pipeline is corrosion-resistant stainless steel material.
The described METAL HEATING PROCESS sleeve pipe 6 with heating function is arranged in described pure quartz glass sleeve pipe 1, it is to avoid metal
The pollution that heating muff and heater etc. are likely to result in.
Described feedstock transportation pipeline is for conveying raw material and the gas needed for mcvd, specifically, as shown in figure 1, including
Export the rare earth material cabinet output gas pipeline 2 of gas (such as oxygen helium etc.) from rare earth material cabinet, be used for conveying for conveying
The Rare Earth Chelate pipeline 3 of Rare Earth Chelate, it is used for conveying al2cl6The al of raw material2cl6Pipeline 4, it is used for conveying gas needed for mcvd
The mcvd gas pipeline 5 of body (such as oxygen, helium, freon, chlorine etc.) and be used for conveying sicl4Sicl with pocl34
With pocl3 pipeline 7.And each gas pipeline is delivered in reaction tube according to the position of each in figure freely in feedstock transportation pipeline,
Wherein said Rare Earth Chelate pipeline is located at middle, and remaining four pipeline is looped around described Rare Earth Chelate pipeline periphery, its
Middle chelating conduit stretches out about 2.5-5.4cm than remaining four pipeline..
Specifically, in embodiments of the present invention, in described feedstock transportation pipeline, each gas pipeline is coated with oxygen for undercoating
Change the corrosion-resistant stainless steel material of chromium, wherein chromium oxide adopts plating mode, thickness is 10 microns.By applying in pipeline
Layer is coated with chromium oxide, so that feedstock transportation pipeline is can be resistant to high temperature and can bear corruption using the high-temperature-resistant and anti-corrosion characteristic of chromium oxide
The corrosivity of erosion gas.And corrosion-resistant stainless steel material ductility is good, will not be frangible as glass pipe.
The described METAL HEATING PROCESS sleeve pipe 6 with heating function includes metal sleeve, heater and temperature survey and regulation
System, described temperature survey and regulating system are used for measuring the temperature of metal sleeve, and the temperature according to the metal sleeve recording
Adjust described heater described metal sleeve to be heated such that it is able to protect to the unstrpped gas of conveying in real time
Temperature.Feedstock transportation pipe temperature can be risen to 250 DEG C by described heater.Specifically, the material of described metal sleeve can be
Steel, iron, copper etc., generally choose stainless steel material in engineering.
Specifically, described heater can be the uniformly gapless heating tape being wrapped on metal sleeve, heating tape
Can be made up of the nickel-chromium resistance wire that outer layer is coated with dielectric film, a diameter of 0.3mm of silk of this resistance wire about, and string diameter error is little
In 1*10-2Mm, nickel-chromium resistance wire quick heating, thermal effect are high, temperature is uniform and not oxidizable.By the thermoelectricity being positioned in metal sleeve
Couple temperature measures.Thermocouple adopts platinum rhodium 30 thermocouple, and this thermocouple temperature measurement closely, is suitable for long-term at relatively high temperatures
Measure and anti-oxidant.Typically not greater than 250 DEG C of the maximum temperature that this heating apparatus requires, therefore it is well positioned to meet requirement.
In embodiments of the present invention, described metal sleeve is in output par, c 2cm shorter than quartz glass sleeve, output par, c
Gas pipeline and quartz glass sleeve be connected by high temperature resistant five hole rubber rings, each gas pipeline stretches out rubber ring 1mm.
The caliber that described each gas pipeline (stainless steel anticorrosion pipeline) is is 1/8 inch, and quartz glass sleeve is thickness 1mm external diameter
The quartz ampoule of 17mm.Because the sublimation temperature of Rare Earth Chelate is between 100 DEG C to 200 DEG C, therefore require Rare Earth Chelate gas
Be held at before being delivered to conversion zone one relatively high at a temperature of (between 160 DEG C to 220 DEG C), and traditional gas phase
Sicl in doping method4With pocl3 and supplemental oxygen, helium temperature generally at 40 DEG C about, when with Rare Earth Chelate gas
Easily cause Rare Earth Chelate when mixing in reaction tube to sublimate, cause sandwich layer to have solid particle.The present invention passes through sicl4With
Pocl3 and supplemental oxygen, helium, Rare Earth Chelate etc. synchronously preheat or insulation is so as to first reach needed for Rare Earth Chelate
The temperature asked remixes, and chelate both can have been avoided to sublimate moreover it is possible to make reacting gas sufficiently mix before reaching deposition region,
To reach uniform deposition, improve the quality of preform.
Further, as shown in Fig. 2 the embodiment of the present invention additionally provides a kind of doper for mcvd, it includes
Above-mentioned raw materials gas delivery components, are to be flexible coupling between described feedstock transportation part and reaction tube and mcvd lathe, and described former
For being flexible coupling between material transfer unit and heater box 15.
Wherein, unstrpped gas 16 out converges to afterwards heater box 15 from each expects pipe and is incubated and then through described feed line
Each independent pipeline output in road, is welding or valve between each independent pipeline in described each expects pipe and described feedstock transportation pipeline
Door connects.
Specifically, for being flexible coupling between feedstock transportation part and reaction tube 8 and mcvd lathe 12, can be incited somebody to action by gland
Described pure quartz glass sleeve pipe 1 and mcvd lathe 12 seal, described pure quartz glass sleeve pipe 1 and described mcvd lathe 12
It is connected by two resistant to elevated temperatures rubber rings, described two rubber rings are used for described pure quartz glass sleeve pipe 1 is fixed, and make
Described pure quartz glass sleeve pipe 1 is coaxial with chuck.For example in fig. 2, by convey glass tube the first sealing rubber ring 11 with
Conveying glass tube the second sealing rubber ring 13 connects described pure quartz glass sleeve pipe 1 and described mcvd lathe 12.
Specifically, the part 14 that is flexible coupling between described feedstock transportation part and heater box 15 is to feedstock transportation part
Scalable steel band and rubber seal that quartz glass sleeve and heater box 15 are flexible coupling, wherein telescopic steel belt and heater box
15 carry out Hard link using screw, and heater box 15 is the cavity with heater for the steel, telescopic steel belt and quartz glass sleeve
It is connected by rubber ring and steel gland.Being connected by of described quartz glass sleeve and heater box is flexible coupling, and its benefit is quartz
Glass bushing solves the characteristic such as high temperature corrosion-resisting is pollution-free of feedstock transportation pipeline, but glass bushing is frangible, if directly
Quartz glass sleeve is clipped in heater box by rubber ring, then easily makes when heater box is not completely the same with chuck axis
Become the broken of quartz glass sleeve, the normal conveying of unstrpped gas and the resistance to height of quartz glass sleeve can be taken into account using being flexible coupling
The corrosion-resistant anti-pollution characteristic of temperature.
The output end of described feedstock transportation pipeline is passed through in reaction tube 8, the card of described reaction tube 8 and described mcvd lathe 12
Sealed by reaction tube sealing rubber ring 9 between disk linkage part 10.
Because transfer unit needs to be inserted in reaction tube 8 in deposition, deposition then needs to be pulled out, therefore after terminating
Need to make the axis coaxle with the chuck of described mcvd lathe for the axis of described heater box 15, and described heater box 15 is placed in slide rail
On, heater box 15 can move back and forth along chuck axis.So that transfer unit and heater box 15 can be on guide rails
Ceaselessly move back and forth.If be directly connected to heater box 15 using quartz glass sleeve, easily quartz ampoule is being inserted instead
During pipe, quartz ampoule should be fractureed, because heater box 15 and chuck are independent two parts, impossible in process of production
Always fully coaxial.Both ensure that the free of contamination spy of quartz glass sleeve corrosion-and high-temp-resistant using being flexible coupling in the present invention
Property, overcome its frangible characteristic so that equipment is reliability and durability again.
As it will be easily appreciated by one skilled in the art that all any modifications made within the spirit and principles in the present invention, etc.
With replacement and improvement etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of unstrpped gas transfer unit for mcvd is it is characterised in that include feedstock transportation pipeline, with heating function
METAL HEATING PROCESS sleeve pipe and pure quartz glass sleeve pipe, wherein said feedstock transportation pipeline is arranged at the described gold with heating function
Belong in heating muff pipe, the described METAL HEATING PROCESS sleeve pipe with heating function is arranged in described pure quartz glass sleeve pipe pipe, institute
The material stating each gas pipeline in feedstock transportation pipeline is corrosion-resistant stainless steel material.
2. it is used for as claimed in claim 1 the unstrpped gas transfer unit of mcvd it is characterised in that described feedstock transportation pipeline
Export gas pipeline, be used for conveying the dilute of Rare Earth Chelate including the rare earth material cabinet exporting gas for conveying from rare earth material cabinet
Soil chelates conduit, is used for conveying al2cl6The al of raw material2cl6Pipeline, the mcvd gas pipeline for conveying mcvd desired gas
And be used for conveying sicl4Sicl with pocl34With pocl3 pipeline.
3. it is used for the unstrpped gas transfer unit of mcvd as claimed in claim 1 or 2 it is characterised in that described band heats work(
The METAL HEATING PROCESS sleeve pipe of energy includes metal sleeve, heater and temperature survey and regulating system, described temperature survey and tune
Section system is used for measuring the temperature of metal sleeve, and according to the temperature adjustment of the metal sleeve recording heater to described
Metal sleeve is heated.
4. it is used for as claimed in claim 1 or 2 the unstrpped gas transfer unit of mcvd it is characterised in that described heater
For the uniformly gapless heating tape being wrapped on metal sleeve.
5. it is used for as claimed in claim 1 or 2 the unstrpped gas transfer unit of mcvd it is characterised in that described feedstock transportation
In pipeline, the position relationship of each gas pipeline is: described Rare Earth Chelate pipeline be located at middle, remaining four pipe ring around
In described Rare Earth Chelate pipeline periphery, wherein chelating conduit stretches out about 2.5-5.4cm than remaining four pipeline.
6. a kind of doper for mcvd is it is characterised in that include the unstrpped gas as described in claim 1 to 5 one
Transfer unit, between described feedstock transportation part and reaction tube and mcvd lathe be flexible coupling, and described feedstock transportation part with
It is to be flexible coupling between heater box.
7. it is used for the doper of mcvd as claimed in claim 6 it is characterised in that unstrpped gas is out converged afterwards from each expects pipe
Gather and be incubated in heater box and then through each in described feedstock transportation pipeline independent pipeline output, described each expects pipe and described raw material
It is welding or valve connection between each independent pipeline in conveyance conduit.
8. the doper for mcvd as claimed in claims 6 or 7 is it is characterised in that by gland by described high-purity stone
English glass bushing is sealed with mcvd lathe, and described pure quartz glass sleeve pipe is connected by two resistance to height with described mcvd lathe
The rubber ring of temperature, described two rubber rings are used for described pure quartz glass sleeve pipe is fixed, and make described pure quartz glass
Sleeve pipe is coaxial with chuck.
9. the doper for mcvd as claimed in claims 6 or 7 it is characterised in that described feedstock transportation pipeline defeated
Go out end to be passed through in reaction tube, between described reaction tube and described mcvd lathe, pass through seal with elastometic washer.
10. the doper for mcvd as claimed in claims 6 or 7 is it is characterised in that the axis of described heater box and institute
State the chuck axis coaxle of mcvd lathe, described heater box is placed on slide rail, described unstrpped gas transfer unit is adopted with heater box
It is flexible coupling with scalable steel band, described heater box and unstrpped gas transfer unit can move back and forth along chuck axis.
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| CN201610696838.8A CN106336112B (en) | 2016-08-22 | 2016-08-22 | A kind of unstrpped gas transfer unit and doper for MCVD |
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| CN111116038A (en) * | 2020-01-13 | 2020-05-08 | 成都翱翔拓创光电科技合伙企业(有限合伙) | Gas phase doping device and method for preparing rare earth doped optical fiber preform |
| CN111377607A (en) * | 2020-04-24 | 2020-07-07 | 黄宏琪 | A conveyor that is used for tombarthite and codoping agent raw materials steam of MCVD |
| CN111423109A (en) * | 2020-04-01 | 2020-07-17 | 中国工程物理研究院激光聚变研究中心 | Preparation method of rare earth chelate feed gas for gas phase doping, rare earth doped optical fiber preform and preparation method thereof |
| CN111499180A (en) * | 2020-05-19 | 2020-08-07 | 武汉光盛通光电科技有限公司 | Injection pipe device and equipment for vapor phase high-temperature doping rod making |
| CN112499957A (en) * | 2020-12-18 | 2021-03-16 | 长飞光纤光缆股份有限公司 | Multi-channel rotary chuck of PCVD lathe |
| CN113431963A (en) * | 2021-06-24 | 2021-09-24 | 长飞光纤光缆股份有限公司 | Chelate conveying pipeline |
| CN117585896A (en) * | 2024-01-18 | 2024-02-23 | 武汉光盛通光电科技有限公司 | Spiral mixed gas flow high-temperature injection pipe for rare earth gas phase doping |
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