CN107010823A - A kind of OMCTS vaporising devices for preform outside deposition - Google Patents
A kind of OMCTS vaporising devices for preform outside deposition Download PDFInfo
- Publication number
- CN107010823A CN107010823A CN201710352234.6A CN201710352234A CN107010823A CN 107010823 A CN107010823 A CN 107010823A CN 201710352234 A CN201710352234 A CN 201710352234A CN 107010823 A CN107010823 A CN 107010823A
- Authority
- CN
- China
- Prior art keywords
- omcts
- evaporator
- heat
- vaporising devices
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 230000008021 deposition Effects 0.000 title claims abstract description 18
- 229920006395 saturated elastomer Polymers 0.000 claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 20
- 238000004321 preservation Methods 0.000 claims abstract description 17
- 239000012530 fluid Substances 0.000 claims abstract description 15
- 238000009413 insulation Methods 0.000 claims abstract description 11
- 238000001704 evaporation Methods 0.000 claims abstract description 4
- 230000008020 evaporation Effects 0.000 claims abstract description 4
- 238000005485 electric heating Methods 0.000 claims description 8
- 229920002545 silicone oil Polymers 0.000 claims description 8
- 239000012159 carrier gas Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000005253 cladding Methods 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000002309 gasification Methods 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 5
- 238000005137 deposition process Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000003019 stabilising effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- 238000000151 deposition Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- WSPOQKCOERDWJQ-UHFFFAOYSA-N 2-methyl-1,3,5,7,2,4,6,8-tetraoxatetrasilocane Chemical compound C[SiH]1O[SiH2]O[SiH2]O[SiH2]O1 WSPOQKCOERDWJQ-UHFFFAOYSA-N 0.000 description 1
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007701 flash-distillation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004153 renaturation Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of OMCTS vaporising devices for preform outside deposition, it is characterized in that including heat-preservation cylinder, insulation tube inner chamber is installed on heating element heater and fills conductive fluid, closed evaporator is also installed in insulation tube inner chamber, the lower end of the evaporator is connected by intake line with OMCTS feed flows source, and the upper end of the evaporator is connected by output pipe with saturated vapor output end.The beneficial effects of the present invention are：1st, set evaporator with oil immersed type heating the gasification of OMCTS liquid stabilisings can be made to be saturated vapor, volume type evaporation is formed in evaporator so that the temperature and pressure fluctuation of saturated vapor is small, and stability is high；The 2nd, temperature-sensitive galvanic couple and pressure sensor are set, can dynamically detect heating-up temperature and saturated vapour pressure, be controlled better the temperature and pressure of saturated vapor, stability is further improved；3rd, the characteristics of present invention also has output-consistence and be reproducible, is improved the precision of prefabricated rods deposition process.
Description
Technical field
Dress is evaporated the present invention relates to a kind of OMCTS (octamethylcy-clotetrasiloxane) for preform outside deposition
Put, belong to prefabricated fiber rod depositing technical field of processing equipment.
Background technology
It is outside during preform is a mostly important ring in fiber manufacturing link, existing preform technique
The outer method of the pipe of deposition is high due to sedimentation rate, requires low to raw material, may be used as making large size prefabricated rod enjoying always and chases after
Hold in both hands.Some nearest years, because the transformation efficiency of octamethylcy-clotetrasiloxane is high, the energy is saved, so especially being praised highly.Utilize eight
What the mother metal loosening body that the outer method of the pipe of methyl cyclotetrasiloxane technique prepares optical fiber was utilized is Pintsch process principle, high-purity
Octamethylcy-clotetrasiloxane is depressed in saturated vapor and is admitted to the gaseous form of certain temperature under certain proportioning in blowtorch, is sprayed
Pintsch process after a certain proportion of hydrogen-oxygen, combustion reaction is passed through in lamp simultaneously into the silica dust of diameter very little, due to heat
The last quartz glass target rod surface for being deposited on rotation of the effect of gushing, blowtorch is constantly moved back and forth so that dust is constantly deposited, thus
A porous dust loosening body is formed in the axial direction, then is melted after the techniques such as follow-up sintering and shortened transparent preform into.
Outside pipe lasting offer certain pressure and high-purity silica of prestox ring four of temperature are needed during method deposition preform
Alkane saturated vapor, the raising of the saturated vapor is completed by OMCTS evaporators.Existing OMCTS evaporators are mainly adopted
With the pattern of flash distillation, be exactly by the silicon tetrachloride of liquid and germanium tetrachloride drop on the metal tube or metallic plate of high heat it is fast
Speed gasifies to provide steam.Though the evaporator is simple in construction, gasification is fast, and the temperature and pressure fluctuation of vaporization is larger, not easily-controllable
System, the uniformity and repeatability of processing is poor, thus the precision of influence prefabricated rods deposition process.
The content of the invention
The technical problems to be solved by the invention are that the not enough one kind that provides existed for above-mentioned prior art is used for light
The OMCTS vaporising devices of fine prefabricated rods outside deposition, its not only gasification efficiency height, and the temperature and pressure of gasification is controllable is defeated
The uniformity and stability gone out is good.
The technical scheme that the present invention is used by solution the problem of set forth above for：Include heat-preservation cylinder, be incubated tube inner chamber
It is installed on heating element heater and fills conductive fluid, closed evaporator, the lower end of the evaporator is also installed in insulation tube inner chamber
It is connected by intake line with OMCTS feed flows source, the upper end of the evaporator passes through output pipe and saturated vapor output end
It is connected.
By such scheme, described intake line stretches out heat-preservation cylinder and passes through stop valve and fluid flowmeter and OMCTS feed flows
Source is connected.
By such scheme, described intake line stretches out heat-preservation cylinder and passes through another road stop valve and fluid flowmeter and carrier gas
(nitrogen or oxygen) source of the gas is connected.
By such scheme, it is installed in described heat-preservation cylinder in temperature-sensitive galvanic couple, described evaporator and installs pressure sensor.
By such scheme, described output pipe stretches out heat-preservation cylinder and is connected by stop valve with saturated gas output end.
By such scheme, heating element, heating element outer cladding are provided with outside the output pipe of described stretching heat-preservation cylinder
Heat-insulation layer.
By such scheme, described conductive fluid is heat conduction silicone oil.
By such scheme, described stop valve is pneumatic diaphragm valve.
By such scheme, described heating element heater is electric heating tube, and electric heating tube is uniformly distributed in around evaporator, temperature-sensitive
Galvanic couple is arranged between electric heating tube and evaporator, and silicone oil heating-up temperature is 180 DEG C~250 DEG C.
By such scheme, saturated vapour pressure is controlled between absolute pressure 0.5bar~3bar in described evaporator,
Described evaporator is made up of heat-conducting metal copper or aluminium.
The present invention the course of work be：The liquid OMCTS of input passes through after fluid flowmeter, passes through pneumatic diaphragm valve 2
And the carrier gas (nitrogen or oxygen) controlled with pneumatic diaphragm valve 3 is mixed into liquid in evaporator, evaporator in high temperature
Lower evaporation forms high temperature saturated vapor, and high temperature saturated vapor is sent to blowtorch by output channel and the control of pneumatic diaphragm valve 10 and carried out
Deposition, high-temperature steam output channel needs to be heated and be incubated by heating unit.Control process is mainly steaming as needed
Hair amount, by controlling heating silicone oil temperature and saturated vapour pressure to realize the output of high accuracy and high stability.
The beneficial effects of the present invention are：1st, the heating of evaporator oil immersed type is set to make the gasification of OMCTS liquid stabilisings
For saturated vapor, volume type evaporation is formed in evaporator so that the temperature and pressure fluctuation of saturated vapor is small, and stability is high；
The 2nd, temperature-sensitive galvanic couple and pressure sensor are set, can dynamically detect heating-up temperature and saturated vapour pressure, make saturated vapor
Temperature and pressure is controlled better, and stability is further improved；3rd, the present invention also has output-consistence and again
The characteristics of renaturation is good, is improved the precision of prefabricated rods deposition process.
Brief description of the drawings
Fig. 1 is the sectional structure chart of one embodiment of the invention.
Embodiment
Below in conjunction with drawings and examples, the present invention is described in further detail.
Include the heat-preservation cylinder 5 of box, be installed on closed evaporator 7 in insulation tube inner chamber, described evaporator is by leading
Thermometal copper or aluminium are made, and conductive fluid 6 is filled in insulation tube inner chamber, and described conductive fluid is heat conduction silicone oil；In insulation tube inner chamber
Heating element heater 9 is also installed on, described heating element heater is electric heating tube, and electric heating tube is uniformly distributed in around evaporator.In electricity
Temperature-sensitive galvanic couple 10 is installed between heating tube and evaporator, for the detection of silicone oil temperature, silicone oil heating and temperature control is 200 DEG C
Between~220 DEG C.Pressure sensor 13 is installed in evaporator, the pressure for detecting the saturated vapor 8 in evaporator is described
Saturated vapour pressure control is between absolute pressure 0.5bar~3bar in evaporator.The lower end connection input pipe of the evaporator
Road, intake line stretches out heat-preservation cylinder and is connected by stop valve 2 and fluid flowmeter 1 with OMCTS feed flows source, while stretching out insulation
The intake line of cylinder also passes through another road stop valve 4 and fluid flowmeter and carrier gas (nitrogen or oxygen) flowmeter 3 and source of the gas
It is connected.Fluid flowmeter scope：10g/min to 100g/min, carrier gas flux meter scope：0 arrives 30L/min.Described cut-off
Valve is pneumatic diaphragm valve；The upper end connection output pipe of the evaporator, described output pipe stretches out heat-preservation cylinder and passes through cut-off
Valve 11 is connected with saturated vapor output end, and saturated vapor output end is connected with blowtorch.Heating member is provided with outside output pipe
Part 12, heating element outer cladding heat-insulation layer can carry out heating regulation to the saturated vapor of output when needed.
Claims (10)
1. a kind of OMCTS vaporising devices for preform outside deposition, it is characterised in that include heat-preservation cylinder, heat-preservation cylinder
Inner chamber is installed on heating element heater and fills conductive fluid, and closed evaporator is also installed in insulation tube inner chamber, the evaporator
Lower end is connected by intake line with OMCTS feed flows source, and the upper end of the evaporator is defeated with saturated vapor by output pipe
Go out end to be connected.
2. the OMCTS vaporising devices for preform outside deposition as described in claim 1, it is characterised in that described
Intake line stretches out heat-preservation cylinder and is connected by stop valve and fluid flowmeter with OMCTS feed flows source.
3. the OMCTS vaporising devices for preform outside deposition as described in claim 2, it is characterised in that described
Intake line stretches out heat-preservation cylinder and is connected by another road stop valve and fluid flowmeter with carrier gas source of the gas.
4. the OMCTS vaporising devices for preform outside deposition as described in claim 1 or 3, it is characterised in that institute
It is installed in the heat-preservation cylinder stated in temperature-sensitive galvanic couple, described evaporator and installs pressure sensor.
5. the OMCTS vaporising devices for preform outside deposition stated by claim 1, it is characterised in that described is defeated
Go out pipeline stretching heat-preservation cylinder by stop valve with saturated gas output end to be connected.
6. the OMCTS vaporising devices for preform outside deposition as described in claim 5, it is characterised in that described
Heating element, heating element outer cladding heat-insulation layer are provided with outside the output pipe for stretching out heat-preservation cylinder.
7. the OMCTS vaporising devices for preform outside deposition as described in claim 1 or 3, it is characterised in that institute
The conductive fluid stated is heat conduction silicone oil.
8. the OMCTS vaporising devices for preform outside deposition as described in Claims 2 or 3 or 5, it is characterised in that
Described stop valve is pneumatic diaphragm valve.
9. the OMCTS vaporising devices for preform outside deposition as described in claim 4, it is characterised in that described
Heating element heater is electric heating tube, and electric heating tube is uniformly distributed in around evaporator, and temperature-sensitive galvanic couple is arranged in electric heating tube and evaporation
Between tank, silicone oil heating-up temperature is 180 DEG C~250 DEG C.
10. the OMCTS vaporising devices for preform outside deposition as described in claim 4, it is characterised in that described
Evaporator in saturated vapour pressure control between absolute pressure 0.5bar~3bar, described evaporator is by heat-conducting metal copper
Or aluminium is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710352234.6A CN107010823A (en) | 2017-05-18 | 2017-05-18 | A kind of OMCTS vaporising devices for preform outside deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710352234.6A CN107010823A (en) | 2017-05-18 | 2017-05-18 | A kind of OMCTS vaporising devices for preform outside deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107010823A true CN107010823A (en) | 2017-08-04 |
Family
ID=59449181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710352234.6A Pending CN107010823A (en) | 2017-05-18 | 2017-05-18 | A kind of OMCTS vaporising devices for preform outside deposition |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107010823A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109485249A (en) * | 2018-12-21 | 2019-03-19 | 江苏通鼎光棒有限公司 | A kind of evaporation cabinet feed supplementing device being used to prepare preform |
| CN112028466A (en) * | 2020-09-01 | 2020-12-04 | 长飞光纤光缆股份有限公司 | Organic silicon raw material evaporation device for preparing optical fiber perform |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0635460A2 (en) * | 1993-07-22 | 1995-01-25 | Sumitomo Electric Industries, Ltd. | Gas producing apparatus and method and apparatus for manufacturing optical waveguide and optical fiber preform |
| EP0800489A1 (en) * | 1994-12-30 | 1997-10-15 | Corning Incorporated | Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds |
| CN1240410A (en) * | 1996-12-16 | 2000-01-05 | 康宁股份有限公司 | Organometallics for lightwave optical circuit applications |
| CN1490267A (en) * | 2003-07-14 | 2004-04-21 | 烽火通信科技股份有限公司 | Method for manufacturing rare earth extended fibre-optical prefabricated bar |
| CN103359927A (en) * | 2013-07-22 | 2013-10-23 | 中国科学院西安光学精密机械研究所 | Doping device and doping method for optical fiber preform |
| CN103502163A (en) * | 2011-04-28 | 2014-01-08 | 康宁股份有限公司 | Methods and apparatuses for reducing gelation of glass precursor materials during vaporization |
| CN103755135A (en) * | 2013-12-25 | 2014-04-30 | 中天科技精密材料有限公司 | Efficient preparation method of external coating layer of optical fiber preform and equipment thereof |
| CN103803790A (en) * | 2013-12-25 | 2014-05-21 | 中天科技精密材料有限公司 | High-precision germanium tetrachloride (GeCl4) supplying method and high-precision germanium tetrachloride supplying equipment |
| CN104803597A (en) * | 2015-04-20 | 2015-07-29 | 通鼎互联信息股份有限公司 | Feeding system for optical fiber preform production |
| CN206828385U (en) * | 2017-05-18 | 2018-01-02 | 长飞光纤潜江有限公司 | A kind of OMCTS vaporising devices for preform outside deposition |
-
2017
- 2017-05-18 CN CN201710352234.6A patent/CN107010823A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0635460A2 (en) * | 1993-07-22 | 1995-01-25 | Sumitomo Electric Industries, Ltd. | Gas producing apparatus and method and apparatus for manufacturing optical waveguide and optical fiber preform |
| EP0800489A1 (en) * | 1994-12-30 | 1997-10-15 | Corning Incorporated | Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds |
| CN1240410A (en) * | 1996-12-16 | 2000-01-05 | 康宁股份有限公司 | Organometallics for lightwave optical circuit applications |
| CN1490267A (en) * | 2003-07-14 | 2004-04-21 | 烽火通信科技股份有限公司 | Method for manufacturing rare earth extended fibre-optical prefabricated bar |
| CN103502163A (en) * | 2011-04-28 | 2014-01-08 | 康宁股份有限公司 | Methods and apparatuses for reducing gelation of glass precursor materials during vaporization |
| CN103359927A (en) * | 2013-07-22 | 2013-10-23 | 中国科学院西安光学精密机械研究所 | Doping device and doping method for optical fiber preform |
| CN103755135A (en) * | 2013-12-25 | 2014-04-30 | 中天科技精密材料有限公司 | Efficient preparation method of external coating layer of optical fiber preform and equipment thereof |
| CN103803790A (en) * | 2013-12-25 | 2014-05-21 | 中天科技精密材料有限公司 | High-precision germanium tetrachloride (GeCl4) supplying method and high-precision germanium tetrachloride supplying equipment |
| CN104803597A (en) * | 2015-04-20 | 2015-07-29 | 通鼎互联信息股份有限公司 | Feeding system for optical fiber preform production |
| CN206828385U (en) * | 2017-05-18 | 2018-01-02 | 长飞光纤潜江有限公司 | A kind of OMCTS vaporising devices for preform outside deposition |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109485249A (en) * | 2018-12-21 | 2019-03-19 | 江苏通鼎光棒有限公司 | A kind of evaporation cabinet feed supplementing device being used to prepare preform |
| CN112028466A (en) * | 2020-09-01 | 2020-12-04 | 长飞光纤光缆股份有限公司 | Organic silicon raw material evaporation device for preparing optical fiber perform |
| CN112028466B (en) * | 2020-09-01 | 2021-08-31 | 长飞光纤光缆股份有限公司 | Organic silicon raw material evaporation device for preparing optical fiber perform |
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Application publication date: 20170804 |