CN106336112B - A kind of unstrpped gas transfer unit and doper for MCVD - Google Patents
A kind of unstrpped gas transfer unit and doper for MCVD Download PDFInfo
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- CN106336112B CN106336112B CN201610696838.8A CN201610696838A CN106336112B CN 106336112 B CN106336112 B CN 106336112B CN 201610696838 A CN201610696838 A CN 201610696838A CN 106336112 B CN106336112 B CN 106336112B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
The invention discloses a kind of unstrpped gas transfer units for MCVD, including the feedstock transportation pipeline being set in METAL HEATING PROCESS casing pipe, METAL HEATING PROCESS casing is set in pure quartz glass casing pipe, and the material of each gas pipeline is corrosion-resistant stainless steel material in feedstock transportation pipeline.The pipeline for conveying all unstrpped gases is placed in METAL HEATING PROCESS casing synchronous heat preservation by the present invention, then output simultaneously is into reaction tube, unstrpped gas temperature is accurately controlled, is uniformly mixed unstrpped gas as early as possible, improves the uniformity that vapour deposition process prepares rear-earth-doped prefabricated rods；Each gas pipeline is corrosion-resistant stainless steel material, so that feedstock transportation pipeline can be resistant to high temperature and can bear the corrosivity of etchant gas, and corrosion-resistant stainless steel material ductility is good, frangible unlike glass pipe；The process environments for preparing rare-earth-doped fiber precast rod are effectively improved, the performance of preform is improved.The present invention also provides the corresponding dopers for being used for MCVD.
Description
Technical field
The invention belongs to optical fiber cable preparation technical fields, defeated more particularly, to a kind of unstrpped gas for MCVD
Send component and doper.
Background technique
The technology of preparing of existing fiber prefabricated rods includes improving chemical vapor deposition (Modified Chemical Vapour
Deposition, MCVD), Outside Vapor deposition (Outside Chemical Vapour Deposition, OVD), axial gas
Mutually deposition (Vapour phase Axial Deposition, VAD), plasma chemical vapor deposition (Plasma activated
Chemical Vapour Deposition, PCVD) etc..MCVD technique therein is widely used in spy due to flexibility height
The preparation of kind preform, the especially preparation of rare-earth-doped fiber precast rod.Rare earth element etc. is added to axis pair
Claim to form rare earth doped fiber in the sandwich layer or covering of the optical fiber of waveguiding structure.The type optical fiber can be applied to laser, light amplification
In the light sources such as device and Transmission system.The preparation of rare earth doped fiber and the preparation method step of ordinary optic fibre are integrally similar, and
The preform with doping core area is first prepared, then wire drawing is carried out on wire-drawer-tower and coats to form optical fiber, but mix rare earth
There are significant differences with other types optical fiber during prefabricated rods sandwich layer adulterates for optical fiber.
The MCVD method for preparing rare-earth-doped fiber precast rod is broadly divided into liquid phase doping methods and gas phase doping method.Liquid phase doping
Method is the process for preparing rare-earth-doped fiber precast rod and using earliest, it is to deposit to tie in reaction tube by MCVD technique
The loose sedimentary of structure, the sedimentary of this short texture is immersed in the solution containing rare earth ion, sedimentary is adsorbed
Rare earth ion in solution, then using techniques such as dehydration, vitrifyings by rare earth ion doped into reaction tube.Gas phase doping
Method is a kind of process that developed in recent years, it is but the core area rare earth material by MCVD process deposits covering
Deposition is taken in MCVD reaction tube in a manner of gas by the Rare Earth Chelate containing rare earth element or chloride, In
Under the action of pipe external heat source, silicon, phosphorus for being passed through with MCVD etc. generate oxidation reaction together, migrate and deposit to reaction tube,
Directly form doping core area.Compared to liquid phase doping methods, the technique of gas phase doping method is easier, deposits the section of prefabricated rods more
Finely, doping concentration can be flexibly controlled, uniformity is good, and core diameter is changeable.
For the raw material such as silicon Si, phosphorus P, Rare Earth Chelate needs to be gasified in 100 DEG C or more of high temperature,
Simultaneously because there are a certain amount of etchant gas in pipeline, thus the high temperature resistant of transfer unit, the high temperature resistant of sealing and pipeline,
Corrosion resistance characteristic is particularly important, particularly the temperature of transfer unit determine Rare Earth Chelate can mode on demand enter
Deposition region, the leakproofness of transfer unit and the corrosion resistance of pipeline determine the loss of subsequent rare-earth-doped fiber precast rod.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of unstrpped gas for MCVD is defeated
Component and doper are sent, can be realized during the conveying and doping of the unstrpped gas of MCVD pipeline high temperature resistant and corrosion resistant
Characteristic, and it is able to achieve the uniform mixing of unstrpped gas, improve the quality of preform.
To achieve the goals above, according to one aspect of the present invention, it is defeated to provide a kind of unstrpped gas for MCVD
Component is sent, the METAL HEATING PROCESS casing and pure quartz glass casing including feedstock transportation pipeline, with heating function, wherein described
Feedstock transportation pipeline is set in the METAL HEATING PROCESS casing pipe with heating function, the METAL HEATING PROCESS set with heating function
Pipe is set in the pure quartz glass casing pipe, and the material of each gas pipeline is corrosion resistant in the feedstock transportation pipeline
Lose stainless steel material.
In one embodiment of the present of invention, the feedstock transportation pipeline includes for conveying the output gas from rare earth material cabinet
Rare earth material cabinet output gas pipeline, the Rare Earth Chelate pipeline for conveying Rare Earth Chelate, for conveying Al2Cl6Raw material
Al2Cl6Pipeline, the MCVD gas pipeline for conveying gas needed for MCVD and for conveying SiCl4With the SiCl of POCl34With
POCl3 pipeline.
In one embodiment of the present of invention, the METAL HEATING PROCESS casing with heating function includes metal sleeve, heating dress
It sets and temperature measurement and regulating system, temperature measurement is used to measure the temperature of metal sleeve with regulating system, and according to
The temperature of the metal sleeve measured adjusts the heating device and heats to the metal sleeve.
In one embodiment of the present of invention, the heating device is the uniform gapless heating being wrapped on metal sleeve
Band.
In one embodiment of the present of invention, the positional relationship of each gas pipeline in the feedstock transportation pipeline are as follows: described
Rare Earth Chelate pipeline is located at middle, remaining four root canal road is looped around the Rare Earth Chelate pipeline periphery, wherein chelate
Pipeline stretches out about 2.5-5.4cm or so than remaining four root canal road.
It is another aspect of this invention to provide that additionally providing a kind of doper for MCVD, including above-mentioned raw materials gas
Transfer unit, to be flexible coupling between the feedstock transportation component and reaction tube and MCVD lathe, and the feedstock transportation component with
It is to be flexible coupling between heater box.
In one embodiment of the present of invention, unstrpped gas is converged in heater box after coming out from each expects pipe and is kept the temperature then through institute
State each independent pipeline output in feedstock transportation pipeline, in each expects pipe and the feedstock transportation pipeline each independent pipeline it
Between connected for welding or valve.
In one embodiment of the present of invention, the pure quartz glass casing and MCVD lathe are sealed by gland, institute
The connection of pure quartz glass casing and the MCVD lathe is stated using two rubber rings resistant to high temperature, described two rubber rings are used
It is fixed in the pure quartz glass casing, and keeps the pure quartz glass casing coaxial with chuck.
In one embodiment of the present of invention, the output end of the feedstock transportation pipeline is passed through in reaction tube, the reaction tube
Pass through seal with elastometic washer between the MCVD lathe.
In one embodiment of the present of invention, the chuck axis coaxle of the axis of the heater box and the MCVD lathe, institute
It states heater box to be placed on sliding rail, the unstrpped gas transfer unit is flexible coupling with heater box using scalable steel band, the heating
Case and unstrpped gas transfer unit can move back and forth along chuck axis.
Compared with prior art, the invention has the following beneficial effects:
1, the pipeline for conveying all unstrpped gases can be placed in metal and added by unstrpped gas transfer unit provided by the invention
It synchronously keeps the temperature in thermal sleeve, then simultaneously exports into reaction tube, can accurately control unstrpped gas temperature, and original can be made
Expect gas as early as possible be uniformly mixed, so as to improve the uniformity of the rear-earth-doped prefabricated rods of vapor phase method；Both traditional gas had been avoided
Condensation of the cold airs such as Xiang Fazhong Si, P to Rare Earth Chelate gas, moreover it is possible to fill reaction gas before reaching deposition region
The mixing divided improves the quality of preform to reach uniform deposition；
2, in unstrpped gas transfer unit provided by the invention, each gas pipeline is corrosion resistant in the feedstock transportation pipeline
Lose stainless steel material so that feedstock transportation pipeline can be resistant to high temperature and can bear the corrosivity of etchant gas, and it is corrosion-resistant not
Steel material ductility of becoming rusty is good, will not be frangible as glass pipe；
3, the METAL HEATING PROCESS casing with heating function is set to institute by unstrpped gas transfer unit provided by the invention
It states in pure quartz glass casing, avoids the pollution that METAL HEATING PROCESS casing and heating device etc. may cause；
4, provided by the present invention in the doper of MCVD, unstrpped gas transfer unit uses pure quartz glass casing
Add the mode that is flexible coupling, not only taken into account the free of contamination characteristic of glass tube high-temperature-resistant and anti-corrosion but also overcomes the frangible characteristic of glass tube；
5, provided by the present invention for the doper of MCVD, simple and effective can be effectively improved vapour deposition process preparation and mix
The process environments of rare earth doped fiber prefabricated rods improve the performance of prepared rare-earth-doped fiber precast rod, and reliability and durability, can significantly drop
The maintenance cost of low equipment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram in the embodiment of the present invention for the unstrpped gas transfer unit of MCVD；
Fig. 2 is the structural schematic diagram in the embodiment of the present invention for the doper of MCVD；
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1- pure quartz glass casing 2- rare earth material cabinet output gas pipeline 3- Rare Earth Chelate pipeline 4-Al2Cl6Pipeline
METAL HEATING PROCESS casing 7-SiCl of the 5-MCVD gas pipeline 6- with heating function4It is reacted with POCl3 pipeline 8- reaction tube 9-
It is defeated that seal of tube rubber ring 10-MCVD chuck linking component 11- conveys the first sealing rubber ring of glass tube 12-MCVD lathe 13-
It send the second sealing rubber ring of glass tube 14- feedstock transportation component and heater box is flexible coupling component 15- heater box 16- unstripped gas
Body.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
As shown in Figure 1, the present invention provides a kind of unstrpped gas transfer unit for MCVD, including feed line
Road, METAL HEATING PROCESS casing 6 and pure quartz glass casing 1 with heating function, wherein the feed line road is set to
In the METAL HEATING PROCESS casing 6 with heating function is managed, the METAL HEATING PROCESS casing with heating function is set to described high-purity
In quartz glass sleeve 1 is managed, the material of each gas pipeline is corrosion-resistant stainless steel material in the feedstock transportation pipeline.
The METAL HEATING PROCESS casing 6 with heating function is set in the pure quartz glass casing 1, avoids metal
The pollution that heating muff and heating device etc. may cause.
The feedstock transportation pipeline is for raw material and gas needed for conveying MCVD, specifically, as shown in Figure 1, including
For conveying the rare earth material cabinet output gas pipeline 2 of the output gas (such as oxygen helium etc.) from rare earth material cabinet, for conveying
The Rare Earth Chelate pipeline 3 of Rare Earth Chelate, for conveying Al2Cl6The Al of raw material2Cl6Pipeline 4, for conveying gas needed for MCVD
The MCVD gas pipeline 5 of body (such as oxygen, helium, freon, chlorine etc.) and for conveying SiCl4With the SiCl of POCl34
With POCl3 pipeline 7.And each gas pipeline is delivered in reaction tube according to the position respectively freely in figure in feedstock transportation pipeline,
Wherein the Rare Earth Chelate pipeline is located at middle, remaining four root canal road is looped around the Rare Earth Chelate pipeline periphery,
Middle chelating conduit stretches out about 2.5-5.4cm or so than remaining four root canal road.
Specifically, in embodiments of the present invention, each gas pipeline is that inner coating plating is aerobic in the feedstock transportation pipeline
Change the corrosion-resistant stainless steel material of chromium, wherein chromium oxide uses plating mode, with a thickness of 10 microns.By being applied in pipeline
Layer is coated with chromium oxide, makes feedstock transportation pipeline can be resistant to high temperature using the high-temperature-resistant and anti-corrosion characteristic of chromium oxide and can bear corruption
Lose the corrosivity of gas.And corrosion-resistant stainless steel material ductility is good, will not be frangible as glass pipe.
The METAL HEATING PROCESS casing 6 with heating function includes metal sleeve, heating device and temperature measurement and adjusts
System, the temperature measurement are used to measure the temperature of metal sleeve with regulating system, and according to the temperature of the metal sleeve measured
It adjusts the heating device to heat the metal sleeve, so as in real time protect the unstrpped gas of conveying
Temperature.Feedstock transportation pipe temperature can be risen to 250 DEG C by the heating device.Specifically, the material of the metal sleeve can be
Steel, iron, copper etc., usually choose stainless steel material in engineering.
Specifically, the heating device can be the uniform gapless heating tape being wrapped on metal sleeve, heating tape
The nickel-chromium resistance wire that insulating film can be coated with by outer layer is made, and the silk diameter of the resistance wire is 0.3mm or so, and string diameter error is small
In 1*10-2Mm, nickel-chromium resistance wire quick heating, thermal effect are high, temperature is uniform and not oxidizable.By the thermoelectricity being placed in metal sleeve
Couple temperature measures.Thermocouple uses 30 thermocouple of platinum rhodium, and the thermocouple temperature measurement is close, is suitble to long-term at relatively high temperatures
It measures and anti-oxidant.The maximum temperature that the heating apparatus requires is typically not greater than 250 DEG C, therefore is well positioned to meet requirement.
In embodiments of the present invention, the metal sleeve is 2cm shorter than quartz glass sleeve in output par, c, output par, c
The connection of gas pipeline and quartz glass sleeve uses five hole rubber ring of high temperature resistant, and each gas pipeline stretches out rubber ring 1mm or so.
The caliber that each gas pipeline (stainless steel anticorrosion pipeline) is is 1/8 inch, and quartz glass sleeve is thickness 1mm outer diameter
The quartz ampoule of 17mm.Since the sublimation temperature of Rare Earth Chelate is between 100 DEG C to 200 DEG C, therefore require Rare Earth Chelate gas
It is held at before being delivered to conversion zone at a relatively high temperature (between 160 DEG C to 220 DEG C), and traditional gas phase
SiCl in doping method4With POCl3 and supplemental oxygen, the temperature of helium usually at 40 DEG C or so, when with Rare Earth Chelate gas
It is easy to cause Rare Earth Chelate to sublimate when mixing in reaction tube, sandwich layer is caused to have solid particle.The present invention is by by SiCl4With
The synchronous preheating such as POCl3 and supplemental oxygen, helium, Rare Earth Chelate or heat preservation, reach it first needed for Rare Earth Chelate
The temperature asked remixes, and can both sublimate to avoid chelate, moreover it is possible to and mix reaction gas adequately before reaching deposition region,
To reach uniform deposition, the quality of preform is improved.
Further, as shown in Fig. 2, the embodiment of the invention also provides a kind of dopers for MCVD comprising
Above-mentioned raw materials gas delivery components are flexible coupling between the feedstock transportation component and reaction tube and MCVD lathe, and the original
It is to be flexible coupling between material transfer unit and heater box 15.
Wherein, unstrpped gas 16 is converged in heater box 15 after coming out from each expects pipe and is kept the temperature then through the feed line
Each independent pipeline exports in road, is welding or valve between each independent pipeline in each expects pipe and the feedstock transportation pipeline
Door connection.
Specifically, it for being flexible coupling between feedstock transportation component and reaction tube 8 and MCVD lathe 12, can be incited somebody to action by gland
The pure quartz glass casing 1 is sealed with MCVD lathe 12, the pure quartz glass casing 1 and the MCVD lathe 12
Connection uses two rubber rings resistant to high temperature, and described two rubber rings are used to fix the pure quartz glass casing 1, and make
The pure quartz glass casing 1 is coaxial with chuck.Such as in Fig. 2, by conveying the first sealing rubber ring of glass tube 11 with
Conveying the second sealing rubber ring of glass tube 13 connects the pure quartz glass casing 1 and the MCVD lathe 12.
Specifically, the component 14 that is flexible coupling between the feedstock transportation component and heater box 15 is to feedstock transportation component
The scalable steel band and rubber seal that quartz glass sleeve and heater box 15 are flexible coupling, wherein telescopic steel belt and heater box
15 carry out Hard links using screws, and heater box 15 is cavity of the steel with heating device, telescopic steel belt and quartz glass sleeve
Connection uses rubber ring and steel gland.Using being flexible coupling, benefit is quartz for the connection of the quartz glass sleeve and heater box
Glass bushing solves the characteristics such as high temperature corrosion-resisting is pollution-free of feedstock transportation pipeline, but glass bushing is frangible, if directly
Quartz glass sleeve is clipped in heater box by rubber ring, then is easy to make when heater box is not completely the same with chuck axis
At the broken of quartz glass sleeve, the resistance to height of the normal conveying and quartz glass sleeve of unstrpped gas can be taken into account using being flexible coupling
The corrosion-resistant anti-pollution characteristic of temperature.
The output end of the feedstock transportation pipeline is passed through in reaction tube 8, the card of the reaction tube 8 and the MCVD lathe 12
It is sealed between disk linkage part 10 by reaction tube sealing rubber ring 9.
Since transfer unit needs to be inserted into reaction tube 8 in deposition, then need to be pulled out after deposition, therefore
Need to make the axis coaxle of the axis of the heater box 15 and the chuck of the MCVD lathe, and the heater box 15 is placed in sliding rail
On, heater box 15 can move back and forth along chuck axis.So that transfer unit and heater box 15 can be on guide rails
Ceaselessly move back and forth.If be directly connected to using quartz glass sleeve and heater box 15, it is easy to be inserted into instead by quartz ampoule
Quartz ampoule should be fractureed during pipe, because heater box 15 and chuck are independent two parts, in process of production can not
It is always fully coaxial.The free of contamination spy of quartz glass sleeve corrosion-and high-temp-resistant is both ensured using being flexible coupling in the present invention
Property, and its frangible characteristic is overcome, so that equipment is reliability and durability.
As it will be easily appreciated by one skilled in the art that any modification done within the spirit and principles of the present invention, etc.
With replacement and improvement etc., should all be included in the protection scope of the present invention.
Claims (9)
1. a kind of unstrpped gas transfer unit for MCVD, which is characterized in that including feedstock transportation pipeline, with heating function
METAL HEATING PROCESS casing and pure quartz glass casing, wherein the feed line road is set to the gold with heating function
Belong in heating muff pipe, the METAL HEATING PROCESS casing with heating function is set in the pure quartz glass casing pipe, institute
The material for stating each gas pipeline in feedstock transportation pipeline is corrosion-resistant stainless steel material, and the pure quartz glass set is effective
In avoiding pollution caused by METAL HEATING PROCESS casing；
The positional relationship of each gas pipeline in the feedstock transportation pipeline are as follows: Rare Earth Chelate pipeline is located at middle, remaining
Four root canal roads are looped around the Rare Earth Chelate pipeline periphery, wherein the chelate pipeline stretches out 2.5- than remaining four root canal road
5.4cm。
2. being used for the unstrpped gas transfer unit of MCVD as described in claim 1, which is characterized in that the feedstock transportation pipeline
Including for conveying the output gas from rare earth material cabinet rare earth material cabinet output gas pipeline, for conveying the dilute of Rare Earth Chelate
Soil chelates conduit, for conveying Al2Cl6The Al of raw material2Cl6Pipeline, the MCVD gas pipeline for conveying gas needed for MCVD
And for conveying SiCl4With the SiCl of POCl34With POCl3 pipeline.
3. being used for the unstrpped gas transfer unit of MCVD as claimed in claim 1 or 2, which is characterized in that the band heats function
The METAL HEATING PROCESS casing of energy includes metal sleeve, heating device and temperature measurement and regulating system, and the temperature is measured and adjusted
Section system is used to measure the temperature of metal sleeve, and adjusts the heating device to described according to the temperature of the metal sleeve measured
Metal sleeve is heated.
4. being used for the unstrpped gas transfer unit of MCVD as claimed in claim 3, which is characterized in that the heating device is equal
The even gapless heating tape being wrapped on metal sleeve.
5. a kind of doper for MCVD, which is characterized in that including the unstrpped gas as described in Claims 1-4 one
Transfer unit is flexible coupling between the unstrpped gas transfer unit and reaction tube and MCVD lathe, and the feedstock transportation portion
It is to be flexible coupling between part and heater box.
6. being used for the doper of MCVD as claimed in claim 5, which is characterized in that unstrpped gas is converged after coming out from each expects pipe
Gather heat preservation in heater box then to export through independent pipeline each in the feedstock transportation pipeline, each expects pipe and the raw material
It is connected in conveyance conduit between each independent pipeline for welding or valve.
7. such as the doper described in claim 5 or 6 for MCVD, which is characterized in that by gland by high-purity stone
English glass bushing and MCVD lathe seal, and the connection of the pure quartz glass casing and the MCVD lathe uses two resistance to height
The rubber ring of temperature, described two rubber rings make the pure quartz glass for fixing to the pure quartz glass casing
Casing is coaxial with chuck.
8. being used for the doper of MCVD as claimed in claim 7, which is characterized in that the output end of the feedstock transportation pipeline
It is passed through in reaction tube, passes through seal with elastometic washer between the reaction tube and the MCVD lathe.
9. as claimed in claim 7 be used for MCVD doper, which is characterized in that the axis of the heater box with it is described
The chuck axis coaxle of MCVD lathe, the heater box are placed on sliding rail, and the unstrpped gas transfer unit and heater box use
Scalable steel band is flexible coupling, and the heater box and unstrpped gas transfer unit can move back and forth along chuck axis.
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| CN111423109A (en) * | 2020-04-01 | 2020-07-17 | 中国工程物理研究院激光聚变研究中心 | Preparation method of rare earth chelate feed gas for gas phase doping, rare earth doped optical fiber preform and preparation method thereof |
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| CN103951182A (en) * | 2014-04-17 | 2014-07-30 | 中天科技精密材料有限公司 | Method and equipment for manufacturing optical fiber perform rod casing pipe with complicated refractive index profile |
| CN104909557A (en) * | 2015-06-11 | 2015-09-16 | 长飞光纤光缆股份有限公司 | MCVD (modified chemical vapor deposition) device for preparing rare earth doped optical fiber performs |
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| RU2802736C1 (en) * | 2022-12-12 | 2023-08-31 | Общество с ограниченной ответственностью "ЛАССАРД" | Method for supplying rare earth chlorides to deposition zone for manufacturing optical fiber preparations with doped core |
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