CN104909557A - MCVD (modified chemical vapor deposition) device for preparing rare earth doped optical fiber performs - Google Patents

MCVD (modified chemical vapor deposition) device for preparing rare earth doped optical fiber performs Download PDF

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Publication number
CN104909557A
CN104909557A CN201510318681.0A CN201510318681A CN104909557A CN 104909557 A CN104909557 A CN 104909557A CN 201510318681 A CN201510318681 A CN 201510318681A CN 104909557 A CN104909557 A CN 104909557A
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rare
earth
mcvd
batch
glass
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CN201510318681.0A
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Inventor
陈苏
杨玉诚
韦会峰
汪洪海
曹蓓蓓
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Yangtze Optical Fibre and Cable Co Ltd
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Yangtze Optical Fibre and Cable Co Ltd
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Priority to CN201510318681.0A priority Critical patent/CN104909557A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807Reactant delivery systems, e.g. reactant deposition burners

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

The invention discloses an MCVD (modified chemical vapor deposition) device for preparing rare earth doped optical fiber performs. The device comprises a raw material storage component, a raw material conveying component and a reaction area, wherein the raw material storage component comprises a material tank for storing rare earth organic compound raw materials, and the material tank is made of quartz glass or silicate glass. Each pipeline of the raw material conveying component is made of quartz glass or silicate glass. The device disclosed by the invention can be used for improving the corrosion resistance of gas-phase rare earth doped pipelines, is easy to maintain and cost-saving, and has high-temperature-resistant and corrosion-resistant gas storage and conveying components, so that a situation that the pipelines are corroded by raw materials can be avoided, and the pollution to raw materials can be avoided, thereby improving the process environment for preparing rare earth doped fibers by using a gas phase method, and enhancing the properties of the prepared rare earth doped fibers.

Description

A kind of MCVD device preparing rare-earth-doped fiber precast rod
Technical field
The invention belongs to technical field of optical fiber communication, more specifically, relate to a kind of MCVD device preparing rare-earth-doped fiber precast rod.
Background technology
The technology of preparing of existing fiber prefabricated rods comprises improves chemical vapour deposition (Modified Chemical Vapour Deposition, MCVD), Outside Vapor deposition (Outside Chemical Vapour Deposition, OVD), axial vapor deposition (Vapour phase Axial Deposition, VAD), PCVD (Plasma activated Chemical Vapour Deposition, PCVD) etc.MCVD technology is wherein high due to handiness, is widely used in the preparation of special optical fiber prefabricated rods, especially the preparation of rare-earth-doped fiber precast rod.Rare earth element etc. is added in the core district of the optical fiber with rotational symmetry waveguiding structure or core district and covering and form rare earth doped fiber, there is optical amplification function, can be applicable in the light source such as laser apparatus, image intensifer and transmission system.The preparation of rare earth doped fiber and preparation method's step global similarity of ordinary optic fibre, also be first prepare the preform with doping core district, then on wire-drawer-tower, carry out wire drawing coating form optical fiber, but rare earth doped fiber exists with other types optical fiber and significantly distinguishes in preform core district doping process.
The MCVD method preparing rare-earth-doped fiber precast rod is mainly divided into liquid phase doping methods and gas phase doping method.Liquid phase doping methods prepares the processing method that rare earth doped fiber adopts the earliest, it is the settled layer loosened in reaction tube depositional texture by MCVD technique, the settled layer of this short texture is immersed in the solution containing rare earth ion, make the rare earth ion in settled layer adsorbent solution, and then through the technique such as dehydration, vitrifying by rare earth ion doped enter in reaction tubes.Gas phase doping method is a kind of processing method developing out in recent years, it is by MCVD process deposits covering, but the deposition of core district rare earth material is by taking in MCVD bushing pipe by the starting material gasification containing rare earth element, under the effect of pipe external heat source, oxidizing reaction is produced together with other starting material that MCVD passes into, move and deposit to bushing pipe inwall, directly forming doping core district.Compared to liquid phase doping methods, technique is easier, and the section of deposition prefabricated rods is meticulousr, and homogeneity is better.
Mix rare earth starting material and compare the starting material such as Si, Ge, F needed for ordinary optic fibre, the various complexity of type, and gas phase doping method processing requirement mixes the high temperature that rare earth material keeps more than 100 DEG C in transport process, therefore higher to storing, transporting container, the requirements for pipes of mixing rare earth material, pipeline is needed to have good high-temperature-resistant and anti-corrosion performance, and better stopping property.
The gas raw material conveying pipe of traditional telecommunication optical fiber preform manufacturing apparatus and the batch can of storage raw material adopt stainless steel preparation, and sour gas inevitably introduced by the starting material mixing rare earth, easily corrosion is produced to stainless steel pipes, equipment is caused damage, simultaneously because the impurity corroding rear generation also can affect raw-material purity, finally have influence on the quality of prefabricated rods.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of device enough improving gas phase doping method corrosion resistance, thus can be cost-saving, reduces maintenance of the equipment.
The present invention for achieving the above object, the invention provides a kind of MCVD device preparing rare-earth-doped fiber precast rod, comprise raw material storage parts, feedstock transportation parts and conversion zone, described raw material storage parts comprise the batch can storing rare earth organic compounds raw material, and the material of this batch can is silica glass or silicate glass.
In one embodiment of the present of invention, the material of each pipeline in described feedstock transportation parts is silica glass or silicate glass.
In one embodiment of the present of invention, be connected for welding or valve between the batch can in described raw material storage parts and each pipeline in feedstock transportation parts.
In one embodiment of the present of invention, the inner one end of MCVD bushing pipe in described conversion zone includes an inlet duct, in described feedstock transportation parts, one end of each pipeline and described inlet duct carry out frit seal, and the batch can that the other end is corresponding with each pipeline connects.
In one embodiment of the present of invention, each rare earth organic compounds raw material has independently batch can and a transport pipe, and batch can and pipeline are all provided with corresponding heating unit and feedback control system.
In one embodiment of the present of invention, described heating unit is in the external heating zone of pipeline, or embedded heater strip in the duct.
In one embodiment of the present of invention, glass feeder sleeve internal temperature can be brought up to the highest 250 DEG C by this heating unit.
In one embodiment of the present of invention, under described MCVD device busy state, the operating temperature range that each rare earth organic compounds batch can and transport pipe thereof maintain is: T m-10 DEG C ~ T m+ 2 DEG C, wherein T mrepresent the fusing point of rare earth organic compounds.
In one embodiment of the present of invention, the heating unit of described batch can and pipeline is also furnished with distributed temperature sensor, for detecting batch can and pipe surface temperature, this temperature information is collected into computer system and controls for the power of heating unit, thus realizes adjustment and the control of heating unit.
In one embodiment of the present of invention, the chemical constitution of described silicate glass by weight percentage (wt%) is: B 2o 35.5 ~ 11, Al 2o 33 ~ 9, alkalimetal oxide 5 ~ 10, alkaline earth metal oxide 0 ~ 2.5, all the other are SiO 2; The average coefficient of linear expansion of this silicate glass within the scope of 0 DEG C ~ 250 DEG C is (4.8 ~ 5.5) × 10 -6/ DEG C; Its second-order transition temperature is higher than 530 DEG C.
In one embodiment of the present of invention, the chemical constitution of described transitional glass by weight percentage (wt%) is: B 2o 315 ~ 22, Al 2o 3~ 3, alkalimetal oxide 5 ~ 9, alkaline earth metal oxide 0 ~ 4.5, all the other are SiO 2; The average coefficient of linear expansion of this transitional glass within the scope of 0 DEG C ~ 250 DEG C is (4.7 ~ 5.3) × 10 -6/ DEG C; Its second-order transition temperature is higher than 515 DEG C.
In one embodiment of the present of invention, described valve is that glass or alloy are made, and the average coefficient of linear expansion of this alloy within the scope of 0 DEG C ~ 250 DEG C is (4.6 ~ 5.5) × 10 -6/ DEG C.
Beneficial effect of the present invention is by adopting glass pipe, avoid mixing rare earth organic compounds starting material and corrosion is caused to pipeline, thus raising service life of equipment, the impurity produced because of corrosion is avoided to produce pollution to starting material, for the production of mixing rare earth prefabricated rods provides better process environments, improve the stability of device.
Accompanying drawing explanation
Fig. 1 is the MCVD apparatus structure schematic diagram that the present invention prepares rare-earth-doped fiber precast rod, wherein:
1 is batch can, 2 is the valves connecting batch can and delivery system glass pipe, 3 is delivery system glass pipes, 4 is deposition region bushing pipes, 5 is doped silica glass powders that bushing pipe inwall deposits, 6 is inlet ducts of the ingress of bushing pipe, and 7 is the rubber rings sealed between inlet duct and bushing pipe, and 8 is region exterior thermal source flame.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
As shown in Figure 1, the invention provides a kind of MCVD device preparing rare-earth-doped fiber precast rod, this MCVD device comprises raw material storage parts, feedstock transportation parts and conversion zone.Wherein, described raw material storage parts comprise batch can 1, and described feedstock transportation parts comprise glass pipe 3, and described conversion zone comprises conversion zone MCVD bushing pipe 4, and the inlet duct 6 of the ingress of bushing pipe 4.
Described batch can 1 is for storing raw material.Raw material comprises SiCl 4, O 2and the mixed gas of rare earth organic compounds, also can use GeCl 4, POCl 3and/or AlCl 3deng.Unstripped gas enters conversion zone (purity quartz glass pipe for high by transfer unit (i.e. pipeline), i.e. bushing pipe 4), control bushing pipe 4 outside wall temperature a lower temperature range, such as 1400 DEG C ~ 1600 DEG C, be deposited as silica glass powder 5, the particle size distribution range of this powder is 10nm to 1000nm, finally by the molten preform shortening solid transparent under the effect of pipe external heat source of various settling in bushing pipe 4 and pipe, and molten contracting temperature is higher than powder depositing temperature, such as, molten contracting operation bushing pipe 4 outside wall temperature is 1800 DEG C ~ 2200 DEG C.
In the present invention, the batch can 1 of described storage rare earth organic compounds raw material adopts glass material, as silica glass or silicate glass.The benefit brought is the chemical reaction that glass material can prevent between raw material and pipeline, ensures the pure of raw material to greatest extent.
Further, each pipeline in described feedstock transportation parts is glass pipe 3.The raw material that batch can is 1 li enters reaction tubes by glass pipe 3 transmission, and this glass pipe 3 is silica glass or silicate glass.Be connected for welding or valve between batch can 1 in raw material storage parts and each pipeline in feedstock transportation parts.Such as, connected by valve 2 in figure.Described valve 2 is the automatic or manual valve that glass or alloy are made, and described valve 2 adopts rubber seal to be connected or transitional glass welding with between batch can 1 or glass pipe 3, to ensure resistance to air loss.The chemical constitution of described silicate glass by weight percentage (wt%) is: B 2o 35.5 ~ 11, Al 2o 33 ~ 9, alkalimetal oxide 5 ~ 10, alkaline earth metal oxide 0 ~ 2.5, all the other are SiO 2; The average coefficient of linear expansion of this silicate glass within the scope of 0 DEG C ~ 250 DEG C is (4.8 ~ 5.5) × 10 -6/ DEG C; Its second-order transition temperature is higher than 530 DEG C.The chemical constitution of described transitional glass by weight percentage (wt%) is: B 2o 315 ~ 22, Al 2o 3~ 3, alkalimetal oxide 5 ~ 9, alkaline earth metal oxide 0 ~ 4.5, all the other are SiO 2; The average coefficient of linear expansion of this transitional glass within the scope of 0 DEG C ~ 250 DEG C is (4.7 ~ 5.3) × 10 -6/ DEG C; Its second-order transition temperature is higher than 515 DEG C.Described valve is the silicate glass similar with pipeline or alloy, and the average coefficient of linear expansion of this alloy within the scope of 0 DEG C ~ 250 DEG C is (4.6 ~ 5.5) × 10 -6/ DEG C.The difference of the average coefficient of linear expansion between transitional glass and above-mentioned silicate glass or alloy is no more than 0.8 × 10 -6/ DEG C, add conventional rare earth organic compounds, using is at most Rare Earth Chelate, and its vaporization temperature is usually between 100 DEG C to 200 DEG C, the missionary society of the actual coefficient of expansion is less than above-mentioned difference, and this design of material also ensure that the good resistance to air loss of device in transmitting procedure.In addition, owing to controlling the composition of above-mentioned silicate glass, avoid the pollution of impurity element (Fe), the background loss of the optical fiber made is decreased, because glass is more corrosion-resistant, so the maintenance of device is also easier.
Inner one end of MCVD bushing pipe 4 in described conversion zone includes an inlet duct 6, and in described feedstock transportation parts, one end of each pipeline and described inlet duct 6 carry out frit seal, and the batch can 1 that the other end is corresponding with each pipeline connects.Multiple pipeline gos deep into the ingress of MCVD bushing pipe 4, carries out frit seal, adopt rubber ring 7 to seal between inlet duct 6 and bushing pipe 4 with same inlet duct 6.
Each rare earth organic compounds raw material has independently batch can 1 and a transport pipe, and batch can 1 and pipeline are all provided with corresponding heating unit and feedback control system.
Batch can 1 and transfer unit glass pipe 3 are also provided with heating unit, as at the external heating zone of pipeline (such as resistive heating band) or heater strip (such as METAL HEATING PROCESS silk) is embedded in glass pipe 3, be used for maintaining the temperature of batch can 1 and transfer unit, ensure that the gas raw material evaporated by batch can 1 is in suitable temperature and just can maintains gaseous state and not condensation is not reunited.Glass feeder sleeve internal temperature can be brought up to the highest 250 DEG C by this heating unit, and in actual use, the temperature of evaporating required for each rare earth compound is different, and heating unit carries out independent control to the batch can 1 of each rare earth compound and transport pipe.Under MCVD device busy state, the operating temperature range that each rare earth organic compounds batch can 1 and transport pipe thereof maintain is: T m-10 DEG C ~ T m+ 2 DEG C of (T mrepresent the fusing point of rare earth organic compounds), namely working range is that the fusing point of this organic compound reduces by 10 DEG C and increases by 2 DEG C to this fusing point.Repetition test shows, instead the easy vitreous clinker of the too high raw material of temperature is unfavorable for the speed improving later stage evaporation, and the too low speed also reducing evaporation of temperature, so said temperature scope is optimum value.Batch can 1 and transfer unit heating unit are furnished with distributed temperature sensor for detecting batch can 1 and pipe surface temperature, and this temperature information is collected into computer system and controls for the power of heating unit, thus realizes adjustment and the control of heating unit.
To prepare erbium-ytterbium co-doped fiber prefabricated rods, the present invention program is described below.Rare earth organic compounds raw material is Er (thd) 3with Yb (thd) 3batch can adopts silicate glass, and transfer unit glass pipe is connected by metal automatic valve with between batch can, adopts transitional glass welding between valve and batch can or glass pipe, two kinds of raw materials are imported reaction zone Glass tubing by transfer unit glass pipe, enter silica glass bushing pipe after mixing.Described reaction zone Glass tubing can hold 4 to 8 conveying glass pipes simultaneously, in the present embodiment, and only open necessary feed conduit valve, other such as Nd (thd) 3with Sm (thd) 3material valve is closing condition.Heating and temperature controlling system temperature control scope are: Er (thd) 3batch can and transport pipe be in 160 DEG C ~ 172 DEG C, Yb (thd) 3batch can and transport pipe be in 157 DEG C ~ 169 DEG C.Silicon, phosphate use material cabinet system are that carrier gas inputs bushing pipe with oxygen.Flow is respectively silicon tetrachloride 200 ~ 500sccm, phosphorus oxychloride 100 ~ 200sccm.There is attemperator at bushing pipe two ends, and temperature is set as 200 ~ 250 DEG C.In deposition process, bushing pipe keeps rotating about the axis, and rotating speed is 40 ~ 50r/min.Bushing pipe useful length is 1000mm, and thermal source is can two pieces of lune flame heating devices 8 of folding, and in deposition process, bushing pipe internal pressure remains on scope 100 ~ 200Pa.Bushing pipe and settling thereof point 5 ~ 10 molten prefabricated rods shortening solid transparent at 2000 DEG C ~ 2200 DEG C after whole core district deposition.This prefabricated rods external diameter is 17 ~ 20mm, and core district diameter is 3 ~ 8mm, and useful length is 700mm.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.

Claims (12)

1. prepare the MCVD device of rare-earth-doped fiber precast rod for one kind, it is characterized in that, comprise raw material storage parts, feedstock transportation parts and conversion zone, described raw material storage parts comprise the batch can storing rare earth organic compounds raw material, and the material of this batch can is silica glass or silicate glass.
2. prepare the MCVD device of rare-earth-doped fiber precast rod as claimed in claim 1, it is characterized in that, the material of each pipeline in described feedstock transportation parts is silica glass or silicate glass.
3. prepare the MCVD device of rare-earth-doped fiber precast rod as claimed in claim 1 or 2, it is characterized in that, the batch can in described raw material storage parts and be welding or be connected by valve between each pipeline in feedstock transportation parts.
4. prepare the MCVD device of rare-earth-doped fiber precast rod as claimed in claim 1 or 2, it is characterized in that, the inner one end of MCVD bushing pipe in described conversion zone includes an inlet duct, in described feedstock transportation parts, one end of each pipeline and described inlet duct carry out frit seal, and the batch can that the other end is corresponding with each pipeline connects.
5. prepare the MCVD device of rare-earth-doped fiber precast rod as claimed in claim 1 or 2, it is characterized in that, each rare earth organic compounds raw material has independently batch can and a transport pipe, and batch can and pipeline are all provided with corresponding heating unit and feedback control system.
6. prepare the MCVD device of rare-earth-doped fiber precast rod as claimed in claim 5, it is characterized in that, described heating unit is in the external heating zone of pipeline, or embedded heater strip in the duct.
7. prepare the MCVD device of rare-earth-doped fiber precast rod as claimed in claim 6, it is characterized in that, glass feeder sleeve internal temperature can be brought up to the highest 250 DEG C by this heating unit.
8. prepare the MCVD device of rare-earth-doped fiber precast rod as claimed in claim 1 or 2, it is characterized in that, under described MCVD device busy state, the operating temperature range that each rare earth organic compounds batch can and transport pipe thereof maintain is: T m-10 DEG C ~ T m+ 2 DEG C, wherein T mrepresent the fusing point of rare earth organic compounds.
9. the MCVD device preparing rare-earth-doped fiber precast rod as claimed in claims 6 or 7, it is characterized in that, the heating unit of described batch can and pipeline is also furnished with distributed temperature sensor, for detecting batch can and pipe surface temperature, this temperature information is collected into computer system and controls for the power of heating unit, thus realizes adjustment and the control of heating unit.
10. prepare the MCVD device of rare-earth-doped fiber precast rod as claimed in claim 1 or 2, it is characterized in that, the chemical constitution of described silicate glass by weight percentage (wt%) is: B 2o 35.5 ~ 11, Al 2o 33 ~ 9, alkalimetal oxide 5 ~ 10, alkaline earth metal oxide 0 ~ 2.5, all the other are SiO 2; The average coefficient of linear expansion of this silicate glass within the scope of 0 DEG C ~ 250 DEG C is (4.8 ~ 5.5) × 10 -6/ DEG C; Its second-order transition temperature is higher than 530 DEG C.
The 11. MCVD devices preparing rare-earth-doped fiber precast rod as claimed in claim 3, it is characterized in that, described valve adopts rubber seal to be connected or transitional glass welding with between batch can or glass pipe, and the chemical constitution of described transitional glass by weight percentage (wt%) is: B 2o 315 ~ 22, Al 2o 3~ 3, alkalimetal oxide 5 ~ 9, alkaline earth metal oxide 0 ~ 4.5, all the other are SiO 2; The average coefficient of linear expansion of this transitional glass within the scope of 0 DEG C ~ 250 DEG C is (4.7 ~ 5.3) × 10 -6/ DEG C; Its second-order transition temperature is higher than 515 DEG C.
12. MCVD devices preparing rare-earth-doped fiber precast rod as described in claim 3 or 11, it is characterized in that, described valve is that glass or alloy are made, and the average coefficient of linear expansion of this alloy within the scope of 0 DEG C ~ 250 DEG C is (4.6 ~ 5.5) × 10 -6/ DEG C.
CN201510318681.0A 2015-06-11 2015-06-11 MCVD (modified chemical vapor deposition) device for preparing rare earth doped optical fiber performs Pending CN104909557A (en)

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Cited By (8)

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Publication number Priority date Publication date Assignee Title
CN106336112A (en) * 2016-08-22 2017-01-18 长飞光纤光缆股份有限公司 MCVD (Modified chemical vapour deposition) raw material gas conveying component and doping device
CN106495461A (en) * 2016-11-02 2017-03-15 中国电子科技集团公司第四十六研究所 A kind of rare-earth-doped fiber precast rod gas phase doping heating and heat-insulating device and doping method
CN106914243A (en) * 2015-12-28 2017-07-04 中国科学院大连化学物理研究所 A kind of preparation method of metallic element impurity Si sill catalyst and the method for methane anaerobic ethene
CN109206007A (en) * 2018-09-11 2019-01-15 武汉安扬激光技术有限责任公司 A kind of device preparing rare-earth-doped fiber precast rod
CN111116038A (en) * 2020-01-13 2020-05-08 成都翱翔拓创光电科技合伙企业(有限合伙) Gas phase doping device and method for preparing rare earth doped optical fiber preform
CN111377607A (en) * 2020-04-24 2020-07-07 黄宏琪 A conveyor that is used for tombarthite and codoping agent raw materials steam of MCVD
CN111470768A (en) * 2020-04-24 2020-07-31 黄宏琪 Automatic filling device and method for rare earth and co-doping agent
CN113431963A (en) * 2021-06-24 2021-09-24 长飞光纤光缆股份有限公司 Chelate conveying pipeline

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CN1307544A (en) * 1998-06-30 2001-08-08 Sdl股份有限公司 Method and apparatus for manufacturing a rare-earth metal doped optical fiber preform

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106914243A (en) * 2015-12-28 2017-07-04 中国科学院大连化学物理研究所 A kind of preparation method of metallic element impurity Si sill catalyst and the method for methane anaerobic ethene
CN106914243B (en) * 2015-12-28 2019-10-18 中国科学院大连化学物理研究所 A kind of method of the preparation method and methane anaerobic ethylene of metallic element impurity Si sill catalyst
CN106336112B (en) * 2016-08-22 2019-11-22 长飞光纤光缆股份有限公司 A kind of unstrpped gas transfer unit and doper for MCVD
CN106336112A (en) * 2016-08-22 2017-01-18 长飞光纤光缆股份有限公司 MCVD (Modified chemical vapour deposition) raw material gas conveying component and doping device
CN106495461A (en) * 2016-11-02 2017-03-15 中国电子科技集团公司第四十六研究所 A kind of rare-earth-doped fiber precast rod gas phase doping heating and heat-insulating device and doping method
CN109206007B (en) * 2018-09-11 2021-09-14 武汉安扬激光技术有限责任公司 Device for preparing rare earth doped optical fiber preform
CN109206007A (en) * 2018-09-11 2019-01-15 武汉安扬激光技术有限责任公司 A kind of device preparing rare-earth-doped fiber precast rod
CN111116038A (en) * 2020-01-13 2020-05-08 成都翱翔拓创光电科技合伙企业(有限合伙) Gas phase doping device and method for preparing rare earth doped optical fiber preform
CN111377607A (en) * 2020-04-24 2020-07-07 黄宏琪 A conveyor that is used for tombarthite and codoping agent raw materials steam of MCVD
CN111470768A (en) * 2020-04-24 2020-07-31 黄宏琪 Automatic filling device and method for rare earth and co-doping agent
CN111377607B (en) * 2020-04-24 2022-02-08 黄宏琪 A conveyor that is used for tombarthite and codoping agent raw materials steam of MCVD
CN111470768B (en) * 2020-04-24 2022-04-12 黄宏琪 Automatic filling device and method for rare earth and co-doping agent
CN113431963A (en) * 2021-06-24 2021-09-24 长飞光纤光缆股份有限公司 Chelate conveying pipeline

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Application publication date: 20150916