CN106315210B - A kind of film magazine access arrangement and method - Google Patents
A kind of film magazine access arrangement and method Download PDFInfo
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- CN106315210B CN106315210B CN201510406186.5A CN201510406186A CN106315210B CN 106315210 B CN106315210 B CN 106315210B CN 201510406186 A CN201510406186 A CN 201510406186A CN 106315210 B CN106315210 B CN 106315210B
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Abstract
The present invention provides a kind of film magazine access arrangement and method, the film magazine access arrangement includes: the first support frame, for placing film magazine；Film magazine inlet and outlet, setting storage or the work station for taking out film magazine；Buffer area, the station with multiple dynamic operations, for the film magazine dynamic transport from station of the dynamic transport from the film magazine that the film magazine import and export is placed in buffer area or by buffer area to film magazine import and export；Manipulator carries film magazine between buffer area and the first support frame.The present invention provides a kind of film magazine access arrangement and methods, and the station by the way that dynamic operation is arranged in buffer area transmits film magazine, and the waiting time of user is greatly saved.
Description
Technical field
The present invention relates to field of semiconductor manufacture, especially a kind of film magazine access arrangement and method.
Background technique
Semiconductor devices manufacture usually has several hundred road techniques, and per pass technique is all completed by specific equipment, in order to meet
The high yield of semiconductor manufacturing industry and efficient demand, silicon wafer and film magazine need powerful management system and intelligentized film magazine
Access, the automation of handling of goods and materials are inevitable trend, and film magazine access arrangement is the access of semiconductor workshop inner sheet box and management
Equipment, for 12 cun of standard or 8 cun of silicon wafer film magazines access and management.
A kind of film magazine access arrangement with cache module is proposed in United States Patent (USP) US2008/0041694, can be passed through
Software systems carry out pre-operation, i.e., by predicting that next step process film magazine to be used is placed into buffer zone in advance
In, such manipulator can be picked and placed in cache module, can save the waiting time of user.
The structure chart of above-mentioned United States Patent (USP) is as shown in Figure 1, the film magazine access arrangement includes a cache module 60, caching mould
Block 60 has the following problems: film magazine access arrangement needs powerful software systems as support, if held some without manufacture
It is then not suitable in the case where row system or material management system；Another defect is exactly, in user, OHT (Overhead
Transfer System) or after film magazine is placed on cache module by AGV (Automated Guided Vehicle), due to upper
State the cache module in United States Patent (USP) be it is static, film magazine can only be then placed in film magazine access arrangement by manipulator 40
Or taken out from film magazine access arrangement, very the consuming time, do not have flexibility.
Summary of the invention
The purpose of the present invention is to provide a kind of novel film magazine access arrangements with dynamic buffering device, with effectively
The transmission efficiency for improving film magazine avoids user or other transporting equipments invalid waiting time.
In order to achieve the above object, the present invention provides a kind of film magazine access arrangements, comprising:
First support frame, for placing film magazine；
Film magazine inlet and outlet, setting storage or the work station for taking out film magazine；
Buffer area, the station with multiple dynamic operations are placed on for dynamic transport from the film magazine import and export slow
Deposit film magazine in area or by the film magazine dynamic transport at the station of buffer area to film magazine import and export；
Manipulator carries film magazine between buffer area and the first support frame.
Further, the work station of the film magazine import and export setting storage or the dynamic operation for taking out film magazine, film magazine
Disengaging buffer area is realized by moving between the work station and the station of buffer area.
Further, the film magazine access arrangement further includes drive module, drives manipulator to be transported by the drive module
It is dynamic, and drive the station dynamic operation of buffer area.
Further, the buffer area includes import buffer area and outlet buffer area, and the import buffer area is for keeping in
The film magazine placed from film magazine import and export, the outlet buffer area are used to export the film magazine exported in buffer area to film magazine and pass in and out
For taking out at mouthful.
Further, the import buffer area and outlet buffer area are separately positioned.
Further, the import buffer area and outlet buffer area are linear structure.
Further, the import buffer area and outlet buffer area are overlapped setting.
Further, the buffer area is linear structure.
Further, the buffer area includes transmitting device and support device, and the transmitting device is arranged in support device
On, by the film magazine in transmitting device transmission buffer area, the manipulator is removed between transmitting device and the first support frame
Transport film magazine.
Further, the transmitting device is roller bearing.
Further, it is provided with roller bearing at the work station of the film magazine inlet and outlet, passes through the rolling at the work station
The scrolling realization film magazine of roller bearing at the station of axis and buffer area passes in and out buffer area.
Further, the quantity of roller bearing is multiple, the work at the work station and at any station of buffer area
Make multiple roller bearings at station and at any station of buffer area while moving or being simultaneously stopped.
Further, the film magazine access arrangement further includes lifting rotation mechanism, and the lifting rotation mechanism is arranged in piece
At the work station of box inlet and outlet and/or at the station of buffer area, to be placed on liter by going up and down the lifting rotation mechanism
Film magazine on drop rotating mechanism is fallen on the roller bearing at the lifting rotation mechanism, should by rotating the lifting rotation mechanism adjustment
The posture of film magazine in lifting rotation mechanism.
Further, the film magazine access arrangement further includes first position sensor, the first position sensor setting
At the work station of film magazine inlet and outlet, for detecting the film magazine storage configuration at the work station, the first position is passed
Sensor is additionally arranged in support device, first position sensor is provided at each station of the buffer area, for detecting
Film magazine storage configuration at the station of the buffer area.
Further, the transmitting device is belt.
Further, the buffer area is circulation elevator structure, and the buffer area includes multiple third support frames, Duo Gesuo
It states third support frame and is spaced two-by-two and be arranged and enclose and be set as ring structure, the work station imported and exported by the manipulator in film magazine
Carriers box works as previous third by drive module driving to realize the disengaging of film magazine back and forth in place and third support frame
Support frame is moved to the position of adjacent next third support frame.
Further, the film magazine access arrangement further includes the second support frame, by being arranged in the film magazine import and export
Second support frame places the work station of film magazine to be formed.
Further, the film magazine access arrangement further includes control system, and the control system is connect with drive module.
Further, the control system includes operation panel and controller, and the operation panel is connect with controller, institute
Controller is stated to connect with drive module.
Further, the film magazine access arrangement further includes second position sensor, the second position sensor setting
On the first support frame.
Further, the film magazine access arrangement further includes identification module, and the identification module includes label and card reader,
The label is arranged on film magazine, and the card reader is arranged on the first support frame.
Further, the label is RFID label tag or bar coded sticker.
Further, the film magazine access arrangement further includes external frame, and first support frame is fixed on external frame
On.
Further, the film magazine access arrangement further includes manipulator guide rail, and the manipulator guide rail is fixed on external frame
On frame, the manipulator is slidably connected with manipulator guide rail.
Further, the manipulator guide rail includes horizontal guide rail and vertical guide rail, and the horizontal guide rail is fixed on outside
On frame, the vertical guide rail is slidably connected in the horizontal direction with horizontal guide rail.
Further, the film magazine access arrangement further includes air cleaning unit, and the air cleaning unit setting is outside
On portion's frame.
Further, the air cleaning unit is FFU filter element.
Further, the manipulator is standard machinery stationary machine hand or vacuum adsorption type manipulator.
Further, the film magazine access arrangement further includes positioning mechanism, and film magazine is felt relieved by the positioning mechanism, is fixed
Position.
The present invention also provides a kind of film magazine access methods, are accessed using above-mentioned film magazine access arrangement, comprising:
When depositing film magazine, on station that film magazine is placed on buffer area from the work station that the film magazine is imported and exported, choosing
A station for selecting buffer area is robot work position, is delivered to film magazine by the station of the buffer area of dynamic operation and sets
At fixed robot work position, the film magazine on robot work position is carried on the first support frame by the manipulator；
When taking film magazine, selecting a station in buffer area is robot work position, will be placed by the manipulator
It is moved at robot work position in the film magazine on the first support frame, it should by the station of manipulator or the buffer area of dynamic operation
Film magazine is sent at the work station of film magazine inlet and outlet.
Compared with prior art, the present invention provides a kind of film magazine access arrangement and methods, by being arranged in buffer area
The station of dynamic operation realizes the transport to film magazine, and the waiting time of user is greatly saved, and passes through the station of dynamic operation
Transmission and can be worked at the same time film magazine by Manipulator Transportation film magazine, this not only saves the time and also improves film magazine access and set
Standby operating flexibility；The film magazine access arrangement structure is simple, convenient for operation, supports, reduces without complicated software systems
Cost.
Detailed description of the invention
Fig. 1 is the cross-sectional view for the film magazine access arrangement that the prior art provides；
Fig. 2 is the cross-sectional view for the film magazine access arrangement that the embodiment of the present invention one provides；
Fig. 3 is the A-A of film magazine access arrangement that provides of the embodiment of the present invention one to top view；
Fig. 4 is the schematic diagram of film magazine access arrangement cache module when depositing film magazine provided by Embodiment 2 of the present invention；
Fig. 5 is the schematic diagram of film magazine access arrangement cache module when taking film magazine provided by Embodiment 2 of the present invention.
In figure, 10: film magazine inlet and outlet, 20: the first support frames, 30: air cleaning unit, 40: manipulator, 50: manipulator
Guide rail, 60: buffer area, 70: operation panel, 80: film magazine, 90: external frame, 601: support device, 602: transmitting device, 603:
Lifting rotation structure, 604: first position sensor, 620: the second support frames, 621: third support frame, 622: drive module.
Specific embodiment
A specific embodiment of the invention is described in more detail below in conjunction with schematic diagram.According to following description and
Claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and
Using non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
As shown in figures 2-3, the embodiment of the present invention one provides a kind of film magazine access arrangement, can be used for semiconductor workshop
The access of interior 8 cun or 12 cun silicon wafer film magazines, for film magazine 80 for storing silicon wafer, the specification of film magazine 80 can be standard FOUP (Front
Opening Unified Pod, front open type wafer box), FOSB, SMIF (Standard Mechanical Imterface)
Pod, 12 cun of film magazines are generally standard FOUP, and 8 cun of film magazines can be SMIF pod, or off-gauge product, the film magazine
Access arrangement includes:
First support frame 20, for placing film magazine 80；
Film magazine inlet and outlet 10, setting storage or the work station for taking out film magazine 80, film magazine inlet and outlet 10 set for film magazine access
The standby interactive interface with user or other transporting equipments, other transporting equipments include OHT and AGV etc.；
Buffer area 60, the station with multiple dynamic operations are placed from film magazine inlet and outlet 10 for dynamic transport
Film magazine 80 in buffer area or by 80 dynamic transport of film magazine at the station of buffer area to film magazine inlet and outlet 10, in this reality
It applies in example, the buffer area 60 includes transmitting device 602 and support device 601, and the transmitting device 602 is arranged in support device
On 601, by the film magazine in the 602 transmission buffer area 60 of transmitting device, the manipulator 40 is in transmitting device 602 and first
Film magazine is carried between support frame 20, the transmitting device 602 is roller bearing or belt；
Manipulator 40 carries film magazine 80 between buffer area 60 and the first support frame 20；
Drive module (is not shown) in figures 2-3, drives manipulator 40 to move by the drive module, and drive
The station dynamic operation of buffer area 60, in the present embodiment, film magazine 80 is stored or is taken out in setting at the film magazine inlet and outlet 10
The work station of dynamic operation also drives the work station dynamic operation at film magazine inlet and outlet 10, piece by the drive module
Box realizes disengaging buffer area 60 by moving between the station of the work station and buffer area 60；
Lifting rotation mechanism 603 is arranged at the work station of film magazine inlet and outlet 10 and/or at the station of buffer area 60,
In the present embodiment, the transmitting device 602 is roller bearing, is also equipped with roller bearing at the work station of the film magazine inlet and outlet 10,
Buffer area 60 is passed in and out by the scrolling realization film magazine of the roller bearing at the station of roller bearing and buffer area 60 at the work station, is led to
It crosses and goes up and down the lifting rotation mechanism 603 film magazine being placed in lifting rotation mechanism 603 is made to fall in the lifting rotation mechanism
On roller bearing at 603, the posture of film magazine 80 in the lifting rotation mechanism 603 is adjusted by rotating the lifting rotation mechanism 603；
First position sensor 604 is arranged at the work station of film magazine inlet and outlet 10, for detecting the work station
The film magazine storage configuration at place, the first position sensor 604 are additionally arranged in support device 601, the buffer area 60 it is every
First position sensor 604 is provided at a station, the film magazine storage configuration at station for detecting the buffer area 60,
In addition, first position sensor 604 is preferably photoelectric sensor in the present embodiment, photoelectric sensor setting imports and exports 10 in film magazine
Work station at side and support device 601 side；
Second support frame 620, by the way that the second support frame 620 is arranged to form placement film magazine at film magazine inlet and outlet 10
Work station；
Control system, the control system are connect with drive module, and transmitting device 602 is connect with the control system, are led to
The start and stop of the control system control transmitting device 602 are crossed to control the transmission of film magazine, in the present embodiment, the control system
Including operation panel 70 and controller, the operation panel 70 is connect with controller, and the controller is connect with drive module, behaviour
Make panel 70 and provide interface for user, user can control equipment by control panel, order and issue and information
It obtains, operation panel can may be touch tablet computer for PC industrial personal computer；
Second position sensor (not shown), the second position sensor are arranged on the first support frame 20, this implementation
Second position sensor is preferably also photoelectric sensor in example, and the side of the first support frame 20 is arranged in photoelectric sensor；
Identification module, the identification module include label and card reader, and the label is arranged on film magazine 80, the card reading
Device is arranged on the first support frame 20, and label described in the present embodiment is not RFID label tag or bar code (Barcode) label, but not
It is limited to both labels；
External frame 90, first support frame 20 are fixed in external frame 90；
Air cleaning unit 30, the air cleaning unit 30 are arranged in external frame 90, and air filter unit 30 is
Film magazine access arrangement provides clean gas flow, keeps clean internal environment, air filter unit 30 can be FFU filter element
It can be other cleaning equipments, filter element can be matched according to different lustration classes (class100 or class10)
It sets；
Manipulator guide rail 50, the manipulator guide rail 50 are fixed in external frame 90, the manipulator 40 and manipulator
Guide rail 50 is slidably connected, and in the present embodiment, the manipulator guide rail 50 includes horizontal guide rail and vertical guide rail, and the level is led
Rail is fixed in external frame 90, and the vertical guide rail is slidably connected in the horizontal direction with horizontal guide rail, the manipulator 40
For standard machinery stationary machine hand or vacuum adsorption type manipulator, crawl position can be the top or bottom of film magazine 80；
Positioning mechanism, by the positioning mechanism by the centering of film magazine 80, positioning, in the present embodiment, positioning mechanism is to set
Several multiple protrusions in lifting rotation mechanism 603 are set, film magazine 80 are felt relieved by the protrusion, positioning.
As shown in figure 3, the buffer area 60 includes import buffer area and outlet buffer area, the import buffer area is for temporary
The film magazine placed from film magazine inlet and outlet 10 is deposited, the outlet buffer area will be for that will export the output of the film magazine in buffer area 80 to piece
For taking out at box inlet and outlet 10.
In the present embodiment, the import buffer area and outlet buffer area are separately positioned, the import buffer area and outlet
The quantity of buffer area is one, and the import buffer area and outlet buffer area are linear structure, and station quantity can basis
Increase in demand or reduction.Preferably, as shown in figure 3, the first station and twelve-station are the work at film magazine inlet and outlet 10
Station, when depositing film magazine, film magazine 80 is placed at the first station, and when taking film magazine, film magazine 80 is taken away from twelve-station, one into
Mouth buffer area and one outlet buffer area are arranged in parallel, and all have five stations, import in import buffer area and outlet buffer area
The station of buffer area is second station, 3rd station, the 4th station, the 5th station and the 6th station, exports the station of buffer area
For the 7th station, eighth station, the 9th station, the tenth station and the 11st station.
In the present embodiment, at the work station and at any station of buffer area 60 quantity of roller bearing be it is multiple,
Multiple roller bearings at the work station and at any station of buffer area 60 are moved or are simultaneously stopped simultaneously, are also just realized in this way
The independence of film magazine 80 on each station is transmitted, that is, realizes at any station being operated alone for (multiple roller bearings),
It can guarantee that buffer area 60 does not have the station free time, then cooperate first position sensor 604, it can be to avoid when film magazine 80 transmits
Cause rear crash event.
In another embodiment, the import buffer area and outlet buffer area are overlapped setting, and the buffer area is straight line knot
Structure deposits film magazine and takes film magazine as long as carrying out timesharing use to it and can be realized.
In addition, in the present embodiment, for the film magazine of 12 cun of FOUP standards, to consider to save space, in buffer area 60
Film magazine is rotated by 90 ° towards opposite with when being put into.
The embodiment of the present invention one additionally provides a kind of film magazine access method, is deposited using above-mentioned film magazine access arrangement
It takes, comprising:
When depositing film magazine, film magazine 80 is placed on to the station of buffer area 60 from the work station of film magazine inlet and outlet 10
On, selecting a station of buffer area 60 is robot work position, by the station of the buffer area 60 of dynamic operation by piece
Box 80 is delivered at the robot work position of setting, is carried to the film magazine 80 on robot work position by the manipulator 40
On first support frame 20；
When taking film magazine, selecting a station in buffer area 60 is robot work position, will by the manipulator 40
The film magazine 80 being placed on the first support frame 20 moves at robot work position, passes through manipulator 40 or the buffer area of dynamic operation
The film magazine 80 is sent at the work station of film magazine inlet and outlet 10 by 60 station.In the present embodiment, when depositing film magazine, pass through institute
The roller bearing rotation at work station of the control system control drive module to drive film magazine inlet and outlet 10 is stated, and then by the work work
Film magazine 80 at position moves on the station of buffer area 60, and when taking film magazine, the roller bearing at station by driving buffer area 60 is rotated,
The film magazine 80 on the station of the buffer area 60 is imported and exported to film magazine in turn and is transmitted at 10 work station.
Specifically, the process of film magazine is deposited are as follows: firstly, revolving by the lifting that the control system is adjusted at film magazine inlet and outlet 10
The position of rotation mechanism 603, and a box film magazine 80 is placed in lifting rotation mechanism 603, on the one hand, it is convenient for user, AGV or OHT
Film magazine is placed in the lifting rotation mechanism 603 at film magazine inlet and outlet 10, on the other hand, in lifting rotation mechanism 603 is had convex
It rises, film magazine 80 can be made to place and stablized, be not easy to deviate；It is driven secondly, controlling drive module by the control system
Lifting rotation mechanism 603 at film magazine inlet and outlet 10 reduces height, until falling the film magazine 80 in the lifting rotation mechanism 603
Film magazine inlet and outlet 10 at work station (when depositing film magazine, which is the first station) roller bearing on until；Again, lead to
The first position sensor 604 for crossing second station detects whether second station has film magazine 80, if there is then waiting, if without if
Film magazine 80 can be transmitted to second station by the first station itself independent roller bearing, and so on, it is ultimately delivered to caching
At the robot work position set in area 60, the robot work position is the 6th station of 60 terminal of buffer area in the present embodiment；
Later, due to transmitting 80 off-centring of film magazine that will cause, pass through the lifting rotation mechanism 603 at the 6th station of rotation
Adjustment 80 center of film magazine is required with meeting to carry；Finally, film magazine 80 is transported on the first support frame 20 by manipulator 40.
Specifically, the process of film magazine is taken are as follows: firstly, the film magazine 80 that manipulator 40 will take out is transported to the manipulator of setting
At working position, the robot work position is the 7th station in the present embodiment, and film magazine 80 is placed on the lifting rotation of the 7th station
In mechanism 603；Secondly, film magazine 80 to be placed on to the rolling of the 7th station in turn by adjusting the height of the lifting rotation mechanism 603
On axis；Again, detect in eighth station whether have film magazine 80 by first position sensor 604, if there is then waiting, if do not had
Have, then film magazine 80 be transferred to by eighth station by independent roller bearing at the 7th station, and so on, be finally transferred to film magazine into
At the twelve-station of outlet 10；Later, 80 center of film magazine is adjusted by the lift rotating equipment 603 at twelve-station
It is whole, until being adjusted to meet when user requires；Finally, user, AGV or OHT system take out the film magazine 80 to be obtained.
It when depositing film magazine, can be operated simultaneously, i.e., transmit film magazine 80 on one side, film magazine is grabbed by manipulator 40 on one side
80, therefore the operating time can be greatlyd save, improve transmission efficiency.When taking film magazine, it is only necessary to several seconds in advance will be required batch
The secondary number of film magazine 80 is sent to film magazine access arrangement, issues the ready signal of film magazine 80, Yong Huhuo to film magazine access arrangement
Other transporting equipments of person are carried, and the time is greatly saved, improves transmission efficiency.
In the present embodiment, during disposably six box film magazine 80 of storage, it is assumed that each box is gone up and down in the first station
Time used is 1s, and the transmission time between every two station is 1s, then storing the users of six boxes, the waiting time is 12s in total.
If without dynamic buffer area 60, and the film magazine access arrangement of the mobile film magazine 80 of only one manipulator 40, then every box
Average transmission time is 15s, and user's total waiting time is about 100s, and compared with the prior art, the present invention substantially increases biography
Send efficiency.
Embodiment two
As shown in Figures 4 and 5, what is different from the first embodiment is that the buffer area 60 is circulation elevator structure, the caching mould
Block 60 includes multiple third support frames 621, and multiple third support frames 621 are spaced to be arranged and enclose two-by-two is set as ring structure,
By the manipulator 40 film magazine inlet and outlet 10 work station at and third support frame 621 on back and forth carriers box to realize
The disengaging of film magazine, by the drive module 622 driving when previous third support frame 621 is moved to adjacent next third
The position of support frame 621.
The embodiment of the present invention two additionally provides a kind of film magazine access method, is set using the above-mentioned film magazine access in embodiment two
It is standby to be accessed, comprising:
When depositing film magazine, film magazine 80 is placed on to the station of buffer area 60 from the work station of film magazine inlet and outlet 10
On, selecting a station of buffer area 60 is robot work position, by the station of the buffer area 60 of dynamic operation by piece
Box 80 is delivered at the robot work position of setting, is carried to the film magazine 80 on robot work position by the manipulator 40
On first support frame 20；
When taking film magazine, selecting a station in buffer area 60 is robot work position, will by the manipulator 40
The film magazine 80 being placed on the first support frame 20 moves at robot work position, passes through manipulator 40 or the buffer area of dynamic operation
The film magazine 80 is sent at the work station of film magazine inlet and outlet 10 by 60 station.
In the present embodiment, when depositing film magazine, drive module is controlled with driving manipulator 40 for piece by the control system
Film magazine 80 at the work station of box inlet and outlet 10 is carried at the station of buffer area 60, when taking film magazine, passes through driving manipulator
40 are carried to the film magazine 80 at the station of buffer area 60 at the work station of film magazine inlet and outlet 10.
When depositing film magazine, have an at least box film magazine after 80s on third support frame 621, drive module 622 can drive institute
There is third support frame 621 (quantity of third support frame 621 is six in embodiment two) to move clockwise or counterclockwise, at this time may be used
New film magazine 80 is placed on the second support frame 620 with one side, and the film magazine 80 on third support frame 621 is passed through into manipulator on one side
40 store to the first support frame 20, naturally it is also possible to finish in the placement of all film magazines 80 and (refer to all third support frames 621
Pile film magazine 80) after, then pass through manipulator 40 and store film magazine 80 at the first support frame 20.When taking film magazine similarly, herein
It repeats no more.In the present embodiment, drive module 622 drives all 621 clockwise movements of third support frame, when depositing film magazine,
After all film magazines 80 are placed, then passes through manipulator 40 and store film magazine 80 at the first support frame 20.
Specifically, the process of film magazine is deposited are as follows: firstly, a film magazine 80 is placed in the second support frame at film magazine inlet and outlet 10
On 620 (on the first station i.e. in embodiment two)；Secondly, the film magazine 80 is sent to the of second station by manipulator 40
On three support frames 621, drive module 622 rotate clockwise driving under, film magazine 80 is sent at 3rd station, at this point,
Third support frame 621 at 7th station is moved at second station, and the second box film magazine 80 is placed on the second support frame 620
On, and so on, it can successively transmit six box film magazines；Finally, in after 80s, the machine that will pile six box film magazines on all third support frames
Tool hand starts to remove the film magazine 80 at the 5th station and be transmitted at the first specified support frame 20, successively by all film magazines 80
It takes.
Take the process of film magazine opposite with the method for depositing film magazine.Specifically, the process of film magazine is taken are as follows: firstly, manipulator 40 will
Film magazine 80 is placed on the third support frame 621 at the 5th station；Secondly, drive module 622 drives film magazine 80 to reach the 6th work
At position, manipulator 40 can take out the second box film magazine 80 at this time, and be placed in buffer area 60, and so on, carry out placement piece
The operation of box 80；Finally, the film magazine 80 at second station is transported at the second support frame 620 by manipulator 40, to second
Film magazine 80 at support frame 620 successively can all take out remaining film magazine 80 after being removed.
Embodiment two can also be deposited other than it can save period of reservation of number on any third support frame 621
It puts, it is not necessary to be executed in sequence, provide diversified selection for user.
Compared with prior art, the present invention provides a kind of film magazine access arrangement and methods, by being arranged in buffer area
The station of dynamic operation realizes the transport to film magazine, and the waiting time of user is greatly saved, and passes through the station of dynamic operation
Transmission and can be worked at the same time film magazine by Manipulator Transportation film magazine, this not only saves the time and also improves film magazine access and set
Standby operating flexibility；The film magazine access arrangement structure is simple, convenient for operation, supports, reduces without complicated software systems
Cost.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (29)
1. a kind of film magazine access arrangement characterized by comprising
First support frame, for placing film magazine；
Film magazine inlet and outlet, setting storage or the work station for taking out film magazine；
Buffer area, the station with multiple dynamic operations, is placed on buffer area from the film magazine import and export for dynamic transport
In film magazine or by the film magazine dynamic transport at the station of buffer area to film magazine import and export；
Manipulator carries film magazine between buffer area and the first support frame；
The work station of the film magazine import and export setting storage or the dynamic operation for taking out film magazine, film magazine pass through in the work
Disengaging buffer area is realized in movement between station and the station of buffer area.
2. film magazine access arrangement as described in claim 1, which is characterized in that the film magazine access arrangement further includes driving mould
Block drives robot movement by the drive module, and drives the station dynamic operation of buffer area.
3. film magazine access arrangement as claimed in claim 2, which is characterized in that the buffer area includes import buffer area and outlet
Buffer area, the import buffer area is for the temporary film magazine placed from film magazine import and export, and the outlet buffer area will be for that will go out
Film magazine in mouth buffer area exports to film magazine import and export to take out.
4. film magazine access arrangement as claimed in claim 3, which is characterized in that the import buffer area is separated with outlet buffer area
Setting.
5. film magazine access arrangement as claimed in claim 4, which is characterized in that the import buffer area and outlet buffer area are
Linear structure.
6. film magazine access arrangement as claimed in claim 3, which is characterized in that the import buffer area and outlet buffer area are overlapped
Setting.
7. film magazine access arrangement as claimed in claim 6, which is characterized in that the buffer area is linear structure.
8. film magazine access arrangement as described in claim 5 or 7, which is characterized in that the buffer area includes transmitting device and branch
Support arrangement, the transmitting device are arranged in support device, pass through the film magazine in transmitting device transmission buffer area, the machine
Tool hand carries film magazine between transmitting device and the first support frame.
9. film magazine access arrangement as claimed in claim 8, which is characterized in that the transmitting device is roller bearing.
10. film magazine access arrangement as claimed in claim 9, which is characterized in that set at the work station of the film magazine inlet and outlet
It is equipped with roller bearing, caching is passed in and out by the scrolling realization film magazine of the roller bearing at the station of roller bearing and buffer area at the work station
Area.
11. film magazine access arrangement as claimed in claim 10, which is characterized in that at the work station and any of buffer area
The quantity of roller bearing is multiple at station, and multiple roller bearings at the work station and at any station of buffer area move simultaneously
Or it is simultaneously stopped.
12. film magazine access arrangement as claimed in claim 9, which is characterized in that the film magazine access arrangement further includes lifting rotation
Rotation mechanism, the lifting rotation mechanism are arranged at the work station of film magazine inlet and outlet and/or at the station of buffer area, pass through liter
Dropping the lifting rotation mechanism falls in the film magazine being placed in lifting rotation mechanism on the roller bearing at the lifting rotation mechanism,
The posture of film magazine in the lifting rotation mechanism is adjusted by rotating the lifting rotation mechanism.
13. film magazine access arrangement as claimed in claim 8, which is characterized in that the film magazine access arrangement further includes first
Sensor is set, the first position sensor is arranged at the work station of film magazine inlet and outlet, for detecting the work station
The film magazine storage configuration at place, the first position sensor are additionally arranged in support device, at each station of the buffer area
It is provided with first position sensor, the film magazine storage configuration at station for detecting the buffer area.
14. film magazine access arrangement as claimed in claim 8, which is characterized in that the transmitting device is belt.
15. film magazine access arrangement as claimed in claim 6, which is characterized in that the buffer area is circulation elevator structure, described
Buffer area includes multiple third support frames, and multiple third support frames are spaced to be arranged and enclose two-by-two is set as ring structure, is passed through
The manipulator at the work station that film magazine is imported and exported and on third support frame back and forth carriers box to realize the disengaging of film magazine,
By drive module driving when previous third support frame is moved to the position of adjacent next third support frame.
16. film magazine access arrangement as claimed in claim 15, which is characterized in that the film magazine access arrangement further includes second
Support, by the way that the second support frame is arranged to form the work station for placing film magazine in the film magazine import and export.
17. film magazine access arrangement as claimed in claim 2, which is characterized in that the film magazine access arrangement further includes control system
System, the control system are connect with drive module.
18. film magazine access arrangement as claimed in claim 17, which is characterized in that the control system includes operation panel and control
Device processed, the operation panel are connect with controller, and the controller is connect with drive module.
19. film magazine access arrangement as described in claim 1, which is characterized in that the film magazine access arrangement further includes second
Sensor is set, the second position sensor is arranged on the first support frame.
20. film magazine access arrangement as described in claim 1, which is characterized in that the film magazine access arrangement further includes identification mould
Block, the identification module include label and card reader, and the label is arranged on film magazine, and the card reader setting is in the first support
On frame.
21. film magazine access arrangement as claimed in claim 20, which is characterized in that the label is RFID label tag or bar code mark
Label.
22. film magazine access arrangement as described in claim 1, which is characterized in that the film magazine access arrangement further includes external frame
Frame, first support frame are fixed in external frame.
23. film magazine access arrangement as claimed in claim 22, which is characterized in that the film magazine access arrangement further includes manipulator
Guide rail, the manipulator guide rail are fixed in external frame, and the manipulator is slidably connected with manipulator guide rail.
24. film magazine access arrangement as claimed in claim 23, which is characterized in that the manipulator guide rail include horizontal guide rail and
Vertical guide rail, the horizontal guide rail are fixed in external frame, and the vertical guide rail slides in the horizontal direction with horizontal guide rail
Connection.
25. film magazine access arrangement as claimed in claim 22, which is characterized in that the film magazine access arrangement further includes that air is net
Makeup is set, and the air cleaning unit is arranged in external frame.
26. film magazine access arrangement as claimed in claim 25, which is characterized in that the air cleaning unit is that FFU filtering is single
Member.
27. film magazine access arrangement as described in claim 1, which is characterized in that the manipulator is the fixed machine of standard machinery
Tool hand or vacuum adsorption type manipulator.
28. film magazine access arrangement as described in claim 1, which is characterized in that the film magazine access arrangement further includes localization machine
Structure is felt relieved film magazine by the positioning mechanism, positioning.
29. a kind of film magazine access method is accessed using the described in any item film magazine access arrangements of such as claim 1-28,
It is characterized in that, comprising:
When depositing film magazine, on station that film magazine is placed on buffer area from the work station that the film magazine is imported and exported, selection is slow
A station for depositing area is robot work position, and film magazine is delivered to setting by the station of the buffer area of dynamic operation
At robot work position, the film magazine on robot work position is carried on the first support frame by the manipulator；
When taking film magazine, selecting a station in buffer area is robot work position, will be placed on by the manipulator
Film magazine on one support frame moves at robot work position, by the station of manipulator or the buffer area of dynamic operation by the film magazine
It is sent at the work station of film magazine inlet and outlet.
Priority Applications (1)
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| CN201510406186.5A CN106315210B (en) | 2015-07-10 | 2015-07-10 | A kind of film magazine access arrangement and method |
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| CN201510406186.5A CN106315210B (en) | 2015-07-10 | 2015-07-10 | A kind of film magazine access arrangement and method |
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| CN106315210B true CN106315210B (en) | 2019-07-23 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109171247A (en) * | 2018-10-19 | 2019-01-11 | 国网山东省电力公司烟台供电公司 | A kind of power marketing handbook takes cryopreservation device |
| CN109850502B (en) * | 2018-11-07 | 2024-01-05 | 天津中环领先材料技术有限公司 | Automatic conveying device of wafer box cleaning machine suitable for primary clean room |
| CN114435815A (en) * | 2020-11-06 | 2022-05-06 | 天津中环领先材料技术有限公司 | Automatic storage equipment and use method thereof |
| CN113548492A (en) * | 2021-06-30 | 2021-10-26 | 无锡奥特维科技股份有限公司 | Silicon wafer collecting method |
| CN113257723B (en) * | 2021-07-08 | 2022-04-22 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment |
| CN114973528A (en) * | 2022-04-27 | 2022-08-30 | 远光软件股份有限公司 | Document management and control system and method |
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