CN106312778A - Double-face polishing machine for large-caliber optical element - Google Patents

Double-face polishing machine for large-caliber optical element Download PDF

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Publication number
CN106312778A
CN106312778A CN201610227367.6A CN201610227367A CN106312778A CN 106312778 A CN106312778 A CN 106312778A CN 201610227367 A CN201610227367 A CN 201610227367A CN 106312778 A CN106312778 A CN 106312778A
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CN
China
Prior art keywords
polishing
polishing disk
rotation
correction
drive motor
Prior art date
Application number
CN201610227367.6A
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Chinese (zh)
Inventor
毛卫平
张清明
刘秦江
Original Assignee
东莞市兰光光学科技有限公司
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Priority to CN201610227367.6A priority Critical patent/CN106312778A/en
Publication of CN106312778A publication Critical patent/CN106312778A/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/02Frames; Beds; Carriages
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies

Abstract

The invention discloses a double-face polishing machine for a large-caliber optical element, and belongs to the technical field of optical element machining. An upper polishing disc structure capable of swinging and rotating is adopted, an upper polishing disc carries out swing polishing and annular polishing on a workpiece at the same time, the polishing efficiency is improved, the polishing track becomes more uniform, and the problem that side treading and corner uplifting are likely to appear in the surface shape is solved; a lower polishing disc carries out annular polishing on the lower surface of the workpiece, a correction disc is adopted to carry out correction keeping on the surface shape of the lower polishing disc, the surface shape precision of the polishing discs is improved, the surface shape precision of the optical element is improved, and the small-size manufacturing error of the optical surface can be reduced; an adjustable clamp structure is adopted, adjustable technology parameters are increased, the polishing rack is further uniform, and the double-face polishing precision and the production efficiency are improved; the polishing machine is suitable for double-face polishing of the large-caliber optical element with the caliber reaching 600 mm and the special requirements for the depth of parallelism, reflective wavefront and transmission wavefront.

Description

A kind of optical elements of large caliber Twp-sided polishing machine
Technical field
The invention belongs to optical element processing technique field, particularly relate to a kind of optical elements of large caliber Twp-sided polishing machine.
Background technology
Along with optical elements of large caliber processing is carried by developing rapidly of the development of contemporary optics system, particularly device of high power laser Go out higher requirement.In addition to surface figure accuracy, the depth of parallelism, production cycle and production cost are had strict requirements, optics table Face small size foozle is the most increasingly paid close attention to by people.Optical surface small size foozle may result in the high frequency modulated of light beam With the non-linear growth of system, easily cause optic element damage and reduction light beam can focus power.
Current large-scale glass polishing machine both domestic and external uses the mode of single-sided polishing, and machining accuracy depends on the experience of operator, to behaviour Make personnel requirement high, and when processing has the optical element of transmission wavefront, can only first process one side, and another side needs protection Getting up, cause detecting transmission wavefront difficulty, working (machining) efficiency is low;Domestic existing Twp-sided polishing machine is mainly for diameter 80-300mm's In small-bore ultra thin optical element, be primarily upon production cycle and production cost, surface figure accuracy, the depth of parallelism require the highest, The requirement of the optical element twin polishing that bore is reached 600mm cannot be met.The ring pendulum that patent 2010101454338 proposes is thrown Twp-sided polishing machine, integrates ring throwing and pendulum is thrown, it is adaptable to the heavy caliber ultra thin optical required before having transmission wavefront and echo The polishing of element, but on it, dish, lower wall differ relatively big to the polishing efficiency of workpiece, need to be frequent to workpiece turn-over in the course of processing, And when upper dish swings, the linear velocity difference in center and peripheral position is relatively big, easily causes workpiece face shape and steps on limit, rake angle;Separately Outward, patent 2013202816890 proposes a kind of actively parallel-moving type Twp-sided polishing machine, integrates that translation is thrown, annular is thrown, applicable In the polishing of the heavy caliber ultra thin optical element having particular/special requirement to cutter trade, but its lower wall is easy during working long hours Generating plane shape changes, and reduces machining accuracy, need to spend additional time the lower card shape of reparation, extend the process-cycle.Additionally, Use numerical control small tool polishing mode also can realize optical elements of large caliber is processed, surface figure accuracy can be improved, but can introduce Optical surface small size foozle, reduces optical element service life and system beam quality.
The present invention is directed to processing characteristic and the defect of existing process technology of optical elements of large caliber, employing can swing and can rotation Upthrow compact disk structure, make the motion mode of polishing disk become actively, improve polishing efficiency, and polishing locus being more equal Even, solve face shape and step on limit, rake angle problem;It addition, use lower polishing card shape correcting structure, make lower polishing card shape in work Time repaired holding, improve the surface figure accuracy of lower polishing disk, reduce optical surface small size foozle;Additionally, adopt Use adjustable calipers structure, add scalable technological parameter, make polishing locus uniform further, improve large-aperture optical unit Part twin polishing precision and production efficiency, and improve optical element service life and system beam quality.
Summary of the invention
It is an object of the invention to propose a kind of optical elements of large caliber Twp-sided polishing machine, it is achieved bore is reached 600mm, to flat Before row degree, echo and transmission wavefront has the optical elements of large caliber twin polishing of particular/special requirement.The present invention use can swing and The upthrow compact disk structure of energy rotation, makes the motion mode of polishing disk become actively, improving polishing efficiency, making polishing locus more Uniformly, solve face shape and step on limit, rake angle problem;It addition, use lower polishing card shape correcting structure, make lower polishing card shape in work As time repaired holding, improve the surface figure accuracy of lower polishing disk, thus improve optical component surface shape precision, reduce optical surface Small size foozle;Additionally, use adjustable calipers structure, increase scalable technological parameter, make polishing locus equal further Even, improve optical elements of large caliber twin polishing precision and production efficiency, and improve optical element service life and system beam Quality.
The technical solution of the present invention is as follows:
A kind of optical elements of large caliber Twp-sided polishing machine, including: upper polishing disk, main fork, secondary fork, eccentric, eccentric Support, the upper polishing disk axis of rotation, upthrow cd-rom drive motor, correction dish, correction dish clamp, correction disk-drive motor, workpiece Ring, workpiece ring clamp, workpiece ring drive motor, lower polishing disk, main engine bed;Wherein, main fork, secondary fork, eccentric, The upper polishing disk swinging structure of eccentric support composition, provides oscillating motion for upper polishing disk;Main fork one end is provided with polishing The dish axis of rotation, upthrow cd-rom drive motor, upthrow cd-rom drive motor drives the upper polishing disk axis of rotation to rotate, carries for upper polishing disk For spinning motion;Correction dish is positioned in lower polishing card, spacing by correction dish clamp, and correction dish clamp are provided with correction dish Clamp drive motor, are used for driving correction dish rotation;Workpiece ring is positioned in lower polishing card, spacing by workpiece ring clamp, work It is provided with workpiece ring on part ring clamp and drives motor, be used for driving workpiece ring rotation;Main engine bed connects lower polishing disk, drives lower throwing CD rotation in the counterclockwise direction.
Described secondary fork adjustable length, one end is connected with described main fork by oscillating bearing, the other end pass through rolling bearing and Described eccentric connects;By the main fork amplitude of oscillation described in the eccentric throw scalable of the described eccentric of regulation;Described main fork scalable Length, terminal surface is provided with motor cabinet and is connected with described upthrow cd-rom drive motor, be additionally provided with through hole, and bottom surface is provided with square Bearing block, is used for placing the polishing disk axis of rotation;Described upper polishing disk axis of rotation upper end is driven with described upper polishing disk by shaft coupling Dynamic motor output end connects, and lower end is connected with upper polishing disk by having the joint of flat recess;Described upper polishing disk axis of rotation lower end Being provided with pin-and-hole, be installed with latch in pin-and-hole, latch is positioned at the flat recess of joint;Described upper polishing disk sense of rotation and described lower throwing CD rotation direction is consistent.
The diameter of described correction dish is the 8/15 of described lower polishing disk diameter, and its thickness is the 1/10 of its diameter;Described correction dish quilt Described correction dish clamp are spacing, by the position of correction dish described in regulation correction dish clamp scalable;Described correction dish is in described school Rotation under positive disk-drive motor, sense of rotation is consistent with described lower polishing disk direction.
Described workpiece ring clamp are provided with drivewheel, driven pulley and shield arm, and drivewheel drives motor to be connected with described workpiece ring, protects Armlet is provided with auxiliary wheel;Drivewheel, driven pulley and auxiliary wheel are tangent with described workpiece ring cylindrical, for 120 ° of described workpiece ring center It is uniformly distributed, holds described workpiece ring tightly;Described workpiece ring clamp are provided with XY axis adjustment device, workpiece ring position described in scalable.
The work process of the present invention is: first spill polishing fluid at upper polishing disk, is moved to by correction dish in correction dish clamp, by work Part environmental protection armlet is opened, and workpiece ring is placed on lower polishing disk, puts the workpiece in workpiece ring, spills throwing at workpiece surface Light liquid, is then placed on upper polishing disk on workpiece, and workpiece ring of closing shield arm is also locked, and regulates workpiece ring XY axis adjustment device, Make workpiece ring be in operating position, put down main fork subsequently, make the latch of polishing disk axis of rotation axle lower end be positioned at polishing disk and connect In the flat recess of head, regulate main fork, secondary oscillating bar length and eccentric, so that upper polishing disk is in operating position, open master Machine switchs, and main engine bed works, and lower polishing disk rotates, and then opens correction disk-drive motor and workpiece ring drives motor switch, school Just dish, workpiece ring rotation, after confirming to work well, opens eccentric support and upthrow cd-rom drive motor switch, makes polishing Dish swings and rotation works;Lower polishing disk carries out annular polishing to workpiece lower surface, and lower polishing card shape is carried out by correction dish simultaneously Revising and keep, workpiece is carried out swinging polishing and annular polishing by upper polishing disk the most simultaneously.
The invention have the advantage that a kind of optical elements of large caliber Twp-sided polishing machine, use and can swing and can the upper polishing disk of rotation Structure, makes polishing disk carry out workpiece swinging polishing and annular polishing simultaneously, improves polishing efficiency, and make polishing locus More uniform, the problem that the face shape of solving easily steps on limit, rake angle;Lower polishing disk carries out annular polishing to workpiece lower surface, adopts It is modified keeping to lower polishing card shape with correction dish, improves polishing disk surface figure accuracy, thus improve optical component surface shape Precision, reduces optical surface small size foozle;Use adjustable calipers structure, add scalable technological parameter, enter One step makes polishing locus uniform;Present invention achieves and bore is reached 600mm, have with transmission wavefront before the depth of parallelism, echo The optical elements of large caliber twin polishing of particular/special requirement, improves optical elements of large caliber twin polishing precision and production efficiency, also Improve optical element service life and system beam quality.
Accompanying drawing explanation
Fig. 1 is the population structure schematic diagram of the present invention;
Fig. 2 is the upper polishing disk of the present invention, correction dish, lower polishing disk correspondence position schematic diagram;
The upper polishing disk of parts and numbering: 1-in figure, the main fork of 2-, 3-pair fork, 4-eccentric, 5-eccentric support, 6- The upper polishing disk axis of rotation, 7-upthrow cd-rom drive motor, 8-correction dish, 9-correction dish clamp, 10-corrects disk-drive motor, 11- Workpiece ring, 12-workpiece ring clamp, 13-workpiece ring drives motor, polishing disk under 14-, 15-main engine bed, 16-oscillating bearing, 17- Rolling bearing, 18-motor cabinet, 19-through hole, 20-square shaft bearing, 21-shaft coupling, 22-joint, 23-pin-and-hole, 24-latch, 25-drivewheel, 26-driven pulley, 27-shield arm, 28-auxiliary wheel, 29-XY axis adjustment device, 30-workpiece.
Detailed description of the invention
Below in conjunction with embodiment, the present invention is further described.
Such as Fig. 1-2, a kind of optical elements of large caliber Twp-sided polishing machine, including: upper polishing disk 1, main fork 2, secondary fork 3, Eccentric 4, eccentric support 5, the upper polishing disk axis of rotation 6, upthrow cd-rom drive motor 7, correction dish 8, correction dish clamp 9, Correction disk-drive motor 10, workpiece ring 11, workpiece ring clamp 12, workpiece ring drive motor 13, lower polishing disk 14, main engine bed 15;Wherein, main fork 2, secondary fork 3, eccentric 4, the upper polishing disk swinging structure of eccentric support 5 composition, for upper polishing Dish provides oscillating motion;Main fork 2 one end arranges the polishing disk axis of rotation 6, upthrow cd-rom drive motor 7, and upper polishing disk drives Galvanic electricity machine 7 drives the upper polishing disk axis of rotation 6 to rotate, and provides spinning motion for upper polishing disk;Correction dish 8 is positioned at lower polishing disk 14 On face, spacing by correction dish clamp 9, correction dish clamp 9 are provided with correction dish clamp and drive motor 10, be used for driving school Just dish 8 rotation;Workpiece ring 11 is positioned on lower polishing disk 14, spacing by workpiece ring clamp 12, on workpiece ring clamp 12 It is provided with workpiece ring and drives motor 13, be used for driving workpiece ring 11 rotation;Main engine bed 15 connects lower polishing disk 14, drives lower throwing CD 14 rotation in the counterclockwise direction.
Described secondary fork 3 adjustable length, one end is connected with described main fork 2 by oscillating bearing 16, and the other end is by rolling Bearing 17 is connected with described eccentric 4;By main fork 2 amplitude of oscillation described in the eccentric throw scalable of the described eccentric 4 of regulation;Institute State main fork 2 adjustable length, terminal surface is provided with motor cabinet 18 and is connected with described upthrow cd-rom drive motor 7, be additionally provided with Through hole 19, bottom surface is provided with square shaft bearing 20, is used for placing the polishing disk axis of rotation 6;On the described upper polishing disk axis of rotation 6 End is connected with described upthrow cd-rom drive motor 7 outfan by shaft coupling 21, lower end by have flat recess joint 22 and Upper polishing disk 1 connects;The described upper polishing disk axis of rotation 6 lower end is provided with pin-and-hole 23, is installed with latch 24 in pin-and-hole, and latch is positioned at and connects In the flat recess of head;Described upper polishing disk 1 sense of rotation is consistent with described lower polishing disk 14 rotation direction.
The diameter of described correction dish 8 is the 8/15 of described lower polishing disk 14 diameter, and its thickness is the 1/10 of own diameter;Described Correction dish 8 is spacing by described correction dish clamp 9, by correction dish 8 position described in regulation correction dish clamp 9 scalable;Described Correction dish 8 is in the 10 times rotations of described correction disk-drive motor, and sense of rotation is consistent with described lower polishing disk 14 direction.
Preferably, a diameter of 1500mm of described lower polishing disk 14, material is marble;It addition, the material of correction dish is also Marble.
Described workpiece ring clamp 12 are provided with drivewheel 25, driven pulley 26 and shield arm 27, and drivewheel 25 drives with described workpiece ring Galvanic electricity machine 13 connects, and shield arm 27 is provided with auxiliary wheel 28;Drivewheel 25, driven pulley 26 and auxiliary wheel 28 and described workpiece ring 11 cylindricals are tangent, and 120 ° of corresponding described workpiece ring 11 center is uniformly distributed, and holds described workpiece ring 11 tightly;Described workpiece ring card Pincers 12 are provided with XY axis adjustment device 29, workpiece ring 11 position described in scalable.
Preferably, described upthrow cd-rom drive motor 7, correction disk-drive motor 10, workpiece ring drive motor 13 to be adjustable speed Motor, additionally eccentric support 4 and main engine bed 15 are respectively arranged with adjustable speed motor.
During work, first spill polishing fluid at lower polishing disk 14, correction dish 8 is moved in correction dish clamp 9, by workpiece environmental protection Armlet 27 is opened, and workpiece ring 11 is placed on lower polishing disk 14, workpiece 30 is put into workpiece ring 11, at workpiece 30 Upper surface spills polishing fluid, is then placed on workpiece by upper polishing disk 1, and workpiece ring of closing shield arm 27 is also locked, and regulates workpiece Ring XY axis adjustment device 29, makes workpiece ring 11 be in operating position, puts down main fork 2 subsequently, makes the polishing disk axis of rotation 6 The latch 24 of lower end is positioned at the flat recess of polishing disk joint 22, regulates main fork 2, secondary fork 3 length and eccentric 4, So that upper polishing disk 1 is in operating position, opening host switch, main engine bed 15 works, and lower polishing disk 14 rotates, then Open correction disk-drive motor 7 and workpiece ring drives motor 13 to switch, correction dish 8, workpiece ring 11 rotation, just confirm operating Chang Hou, opens eccentric support 5 and upthrow cd-rom drive motor 7 switchs, and makes polishing disk 1 swing and rotation works.Lower throwing CD 14 carries out annular polishing to workpiece 30 lower surface, and 1 shape of lower polishing disk is modified keeping by correction dish 8 simultaneously, and Workpiece 30 is carried out swinging polishing and annular polishing by upper polishing disk 1 the most simultaneously.
Experiment shows, the present invention use can swing and can the upthrow compact disk structure of rotation, make polishing disk workpiece be carried out simultaneously Swing polishing and annular polishing, improve polishing efficiency, and make polishing locus more uniform, the face shape of solving easily step on limit, The problem of rake angle;Lower polishing disk carries out annular polishing to workpiece lower surface, uses correction dish to be modified lower polishing card shape protecting Hold, improve polishing disk surface figure accuracy, thus improve optical component surface shape precision, reduce optical surface small size manufacture by mistake Difference;Use adjustable calipers structure, add scalable technological parameter, make polishing locus uniform further;Present invention achieves Bore is reached 600mm, to before the depth of parallelism, echo and transmission wavefront has the optical elements of large caliber twin polishing of particular/special requirement, Improve optical elements of large caliber twin polishing precision and production efficiency, also improve optical element service life and system beam matter Amount.
Below the present invention is discussed in detail, but those skilled in the art can carry out various changes and improvements, and do not carry on the back The scope of the present invention limited from appended claims.

Claims (4)

1. an optical elements of large caliber Twp-sided polishing machine, including: upper polishing disk, main fork, secondary fork, eccentric, bias Wheel support, the upper polishing disk axis of rotation, upthrow cd-rom drive motor, correction dish, correction dish clamp, correction disk-drive motor, work Part ring, workpiece ring clamp, workpiece ring drive motor, lower polishing disk, main engine bed;Wherein, main fork, secondary fork, eccentric, The upper polishing disk swinging structure of eccentric support composition, provides oscillating motion for upper polishing disk;Main fork one end is provided with polishing The dish axis of rotation, upthrow cd-rom drive motor, upthrow cd-rom drive motor drives the upper polishing disk axis of rotation to rotate, carries for upper polishing disk For spinning motion;Correction dish is positioned in lower polishing card, spacing by correction dish clamp, and correction dish clamp are provided with correction dish Clamp drive motor, are used for driving correction dish rotation;Workpiece ring is positioned in lower polishing card, spacing by workpiece ring clamp, work It is provided with workpiece ring on part ring clamp and drives motor, be used for driving workpiece ring rotation;Main engine bed connects lower polishing disk, drives lower throwing CD rotation in the counterclockwise direction.
Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: described secondary fork scalable Length, one end is connected with described main fork by oscillating bearing, and the other end is connected with described eccentric by rolling bearing;Pass through Regulate the main fork amplitude of oscillation described in the eccentric throw scalable of described eccentric;Described main fork adjustable length, terminal surface is provided with Motor cabinet is connected with described upthrow cd-rom drive motor, is additionally provided with through hole, and bottom surface is provided with square shaft bearing, is used for placing upthrow The CD axis of rotation;Described upper polishing disk axis of rotation upper end is connected with described upthrow cd-rom drive motor outfan by shaft coupling, under End is connected with upper polishing disk by having the joint of flat recess;Described upper polishing disk axis of rotation lower end is provided with pin-and-hole, is installed with in pin-and-hole Latch, latch is positioned at the flat recess of joint;Described upper polishing disk sense of rotation is consistent with described lower polishing disk rotation direction.
Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: the diameter of described correction dish Being the 8/15 of described lower polishing disk diameter, its thickness is the 1/10 of its diameter;Described correction dish is spacing by described correction dish clamp, Relative position by correction dish described in regulation correction dish clamp scalable with described lower polishing disk;Described correction dish is in described correction Rotation under disk-drive motor, sense of rotation is consistent with described lower polishing disk direction.
Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: described workpiece ring clamp set Having drivewheel, driven pulley and shield arm, drivewheel to drive motor to be connected with described workpiece ring, shield arm is provided with auxiliary wheel;Actively Wheel, driven pulley and auxiliary wheel are tangent with described workpiece ring cylindrical, and 120 ° of the most described workpiece ring center is uniformly distributed, and holds institute tightly State workpiece ring;Described workpiece ring clamp are provided with XY apparatus for adjusting position, the relative position of workpiece ring described in scalable and lower polishing disk.
CN201610227367.6A 2016-04-07 2016-04-07 Double-face polishing machine for large-caliber optical element CN106312778A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107415060A (en) * 2017-09-26 2017-12-01 长沙理工大学 A kind of small-bore axisymmetry optical surface element precision machining method
CN107598715A (en) * 2017-09-08 2018-01-19 中国科学院光电技术研究所 A kind of heavy caliber special-shaped level processing method
CN107855910A (en) * 2017-11-07 2018-03-30 中国兵器科学研究院宁波分院 Twp-sided polishing machine driving structure
CN108188864A (en) * 2018-02-14 2018-06-22 浙江大学 A kind of aspherical optical element automation polishing system and method
CN110977679A (en) * 2019-12-20 2020-04-10 成都精密光学工程研究中心 Processing equipment and method for full-caliber low-defect planar workpiece

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US20080090499A1 (en) * 2005-08-30 2008-04-17 Tokyo Seimitsu Co., Ltd. Pad conditioner, pad conditioning method, and polishing apparatus
CN101954613A (en) * 2010-04-13 2011-01-26 成都精密光学工程研究中心 Continuous polishing and pendulum polishing integrated double-sided polisher
CN202162705U (en) * 2011-06-21 2012-03-14 中国电子科技集团公司第二研究所 Disc dressing device of tabletop type grinding and polishing machine
CN202684694U (en) * 2012-07-03 2013-01-23 东莞市兰光光学科技有限公司 Clamping arm adjusting device of ring polisher
CN203236318U (en) * 2013-05-15 2013-10-16 成都精密光学工程研究中心 Initiative transversely moving type double-sided polishing machine
CN205703670U (en) * 2016-04-07 2016-11-23 东莞市兰光光学科技有限公司 A kind of optical elements of large caliber Twp-sided polishing machine

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Publication number Priority date Publication date Assignee Title
DE3127182C2 (en) * 1981-07-09 1987-03-19 Michael Graessner Kg, 7031 Steinenbronn, De
US20080090499A1 (en) * 2005-08-30 2008-04-17 Tokyo Seimitsu Co., Ltd. Pad conditioner, pad conditioning method, and polishing apparatus
CN101954613A (en) * 2010-04-13 2011-01-26 成都精密光学工程研究中心 Continuous polishing and pendulum polishing integrated double-sided polisher
CN202162705U (en) * 2011-06-21 2012-03-14 中国电子科技集团公司第二研究所 Disc dressing device of tabletop type grinding and polishing machine
CN202684694U (en) * 2012-07-03 2013-01-23 东莞市兰光光学科技有限公司 Clamping arm adjusting device of ring polisher
CN203236318U (en) * 2013-05-15 2013-10-16 成都精密光学工程研究中心 Initiative transversely moving type double-sided polishing machine
CN205703670U (en) * 2016-04-07 2016-11-23 东莞市兰光光学科技有限公司 A kind of optical elements of large caliber Twp-sided polishing machine

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107598715A (en) * 2017-09-08 2018-01-19 中国科学院光电技术研究所 A kind of heavy caliber special-shaped level processing method
CN107415060A (en) * 2017-09-26 2017-12-01 长沙理工大学 A kind of small-bore axisymmetry optical surface element precision machining method
CN107855910A (en) * 2017-11-07 2018-03-30 中国兵器科学研究院宁波分院 Twp-sided polishing machine driving structure
CN108188864A (en) * 2018-02-14 2018-06-22 浙江大学 A kind of aspherical optical element automation polishing system and method
CN108188864B (en) * 2018-02-14 2019-08-16 浙江大学 A kind of aspherical optical element automation polishing system and method
CN110977679A (en) * 2019-12-20 2020-04-10 成都精密光学工程研究中心 Processing equipment and method for full-caliber low-defect planar workpiece

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Application publication date: 20170111