CN106291319A - The fixing means of a kind of chip-scale sample for capturing focus and device - Google Patents
The fixing means of a kind of chip-scale sample for capturing focus and device Download PDFInfo
- Publication number
- CN106291319A CN106291319A CN201610633204.8A CN201610633204A CN106291319A CN 106291319 A CN106291319 A CN 106291319A CN 201610633204 A CN201610633204 A CN 201610633204A CN 106291319 A CN106291319 A CN 106291319A
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- Prior art keywords
- chip
- scale sample
- scale
- groove
- sample
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2898—Sample preparation, e.g. removing encapsulation, etching
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The present invention relates to fixing means and the device of a kind of chip-scale sample for capturing focus, its method comprises the following steps, S1, adds up and measure the size of the different encapsulation chip-scale samples needing to carry out focus crawl；S2, microscope slide processes more than 1 from different encapsulation chip-scale sample shape and quantity is identical and size matches groove and/or hole；The different encapsulation chip-scale samples handled well are placed in corresponding groove and/or hole by S3；S4 also fills slice shape foam with fixing encapsulation chip-scale sample, or stick on microscope slide with fillet adhesive tape with fixing encapsulation chip-scale sample at the top of encapsulation chip-scale sample between side and groove and/or the sidewall of hole of encapsulation chip-scale sample.Present invention, avoiding loaded down with trivial details traditional sample fixing in the problems such as the harm that may cause of the mode of operation such as heating gluing, certainty of measurement be low and difficulty is big.
Description
Technical field
The present invention relates to fixing means and the device of a kind of chip, be specifically related to a kind of chip-scale sample for capturing focus
The fixing means of product and device.
Background technology
It is a step particularly important in IC failure analysis that focus (Hotspot) captures, and the most conventional grabs from the sample back side
The method that during focus, sample is placed is typically: the large-size sample to wafer level or intercepting, typically with adhesive tape by its edge
It is bonded on the hollow out support of board configuration with fixing, thus facilitates follow-up focus grasping manipulation；To processed encapsulation core
Chip level sample (general size is less) or the reduced size sample (such as ＜ 1 × 1cm2) intercepted, generally use PUR to be glued
On transparent microscope slide, then microscope slide is fixed on support to carry out test operation.
As it has been described above, when the small sample grabbing focus from the back side is fixed, there are some drawbacks: the chip-scale sample of encapsulation
After product process, the back side is connected with lead-in wire sometimes, if directly paste be fixed on hollow out support may electric leakage, and sample front pin and
Frame pedestal contrast in light microscopy field is the most close, is difficult to offer a clear explanation when lower pin pressurizes, which increases test
Difficulty, reduce efficiency and the accuracy of test；The reduced size sample of the chip-scale sample of encapsulation or intercepting (as ＜ 1 ×
Common fixation methods 1cm2) needs to use PUR to be sticked on transparent microscope slide, and this needs to heat it (generally
Temperature is at about 200 DEG C), this heat effect (may the most likely aggravate the evil of failpoint to sample generation is potentially hazardous
Change).Fixing with PUR or test after terminating, the cull that sample adheres to could effectively need to be removed with acetone.Acetone is to people
Body has bigger harm, and this operation there is also certain risk.
Summary of the invention
The technical problem to be solved be to provide a kind of convenience, safety, measurement accuracy high for capturing heat
The fixing means of the chip-scale sample of point and device.
The technical scheme is that consolidating of a kind of chip-scale sample for capturing focus
Determine method, comprise the following steps,
S1, adds up and measures the size of the different encapsulation chip-scale samples needing to carry out focus crawl；
S2, processes and different encapsulation chip-scale sample shape and that quantity is identical and size matches is recessed on microscope slide
Groove and/or hole；
The different encapsulation chip-scale samples handled well are placed in corresponding groove and/or hole by S3；
S4, fills slice shape foam with solid between side and groove and/or the sidewall of hole of encapsulation chip-scale sample
Surely encapsulation chip-scale sample, or stick on microscope slide with fillet adhesive tape with fixing envelope at the top of encapsulation chip-scale sample
Cored chip level sample；
S5, is bonded at the microscope slide being fixed with encapsulation chip-scale sample in the hollow out stand base of board configuration, and fixes
Stand base, can carry out focus and capture test.
The invention has the beneficial effects as follows: the fixing means of a kind of chip-scale sample for capturing focus of the present invention is to survey
Test agent is fixed on microscope slide, be then fixed on equipment by microscope slide and carry out focus crawl, it is to avoid loaded down with trivial details traditional sample
The problems such as harm that during product are fixing, the mode of operation such as heating gluing may cause, certainty of measurement be low and difficulty is big, the present invention is the simplest
Single method secures small sample well, provides one for fixing when focus captures of encapsulation chip-scale small sample
Simple effective general fixing means.
On the basis of technique scheme, the present invention can also do following improvement.
Further, the size of described groove and/or hole is more than the size of described encapsulation chip-scale sample.
Further, described groove and/or hole are square structure.
Further, the length of groove and/or hole and wide long and wide each big 1mm than corresponding encapsulation chip-scale sample.
Further, when being machined with groove on microscope slide, the inwall of described groove is shiny surface.
Above-mentioned further scheme is used to provide the benefit that: the inwall of groove is shiny surface, decreases the refraction etc. of light
Phenomenon, can improve the precision of measurement.
Fixing means based on above-mentioned a kind of chip-scale sample for capturing focus, the present invention also provides for a kind of for grabbing
Take the fixing device of the chip-scale sample of focus.
A kind of fixing device of the chip-scale sample for capturing focus, including microscope slide, described microscope slide be provided with
Different encapsulation chip-scale sample shape are identical with quantity and size matches groove and/or hole；Described groove and/or hole
Side be equipped with the slice shape foams for fixing different encapsulation chip-scale samples, or described groove and/or the edge of hole
It is equipped with the fillet adhesive tape for fixing different encapsulation chip-scale samples.
The invention has the beneficial effects as follows: the fixing device of a kind of chip-scale sample for capturing focus of the present invention is to survey
Test agent is fixed on the microscope slide of installation position, be then fixed on equipment by microscope slide and carry out focus crawl, it is to avoid numerous
The problems such as harm that during trivial traditional sample is fixing, the mode of operation such as heating gluing may cause, certainty of measurement be low and difficulty is big,
The present invention crosses simple method and secures small sample well, for encapsulation chip-scale small sample fixing when focus captures
Provide a kind of simple effective general fixing device.
On the basis of technique scheme, the present invention can also do following improvement.
Further, the size of described groove and/or hole is more than the size of described encapsulation chip-scale sample.
Further, described groove and/or hole are square structure.
Further, the length of groove and/or hole and width and the length of corresponding encapsulation chip-scale sample and each big 1mm of width.
Further, when microscope slide is provided with groove, the inwall of described groove is shiny surface.
Above-mentioned further scheme is used to provide the benefit that: the inwall of groove is shiny surface, decreases the refraction etc. of light
Phenomenon, can improve the precision of measurement.
Accompanying drawing explanation
Fig. 1 is the flow chart of the fixing means of a kind of chip-scale sample for capturing focus of the present invention；
Fig. 2 is the joint figure of the fixing device of a kind of chip-scale sample for capturing focus of the present invention.
In accompanying drawing, the list of parts representated by each label is as follows:
1, microscope slide, 2, groove, 3, hole, 4, slice shape foam, 5, fillet adhesive tape.
Detailed description of the invention
Being described principle and the feature of the present invention below in conjunction with accompanying drawing, example is served only for explaining the present invention, and
Non-for limiting the scope of the present invention.
As it is shown in figure 1, the fixing means of a kind of chip-scale sample for capturing focus, comprise the following steps,
S1, adds up and measures the size of the different encapsulation chip-scale samples needing to carry out focus crawl；
S2, processes and different encapsulation chip-scale sample shape and that quantity is identical and size matches is recessed on microscope slide
Groove and/or hole；
The different encapsulation chip-scale samples handled well are placed in corresponding groove and/or hole by S3；
S4, fills slice shape foam with solid between side and groove and/or the sidewall of hole of encapsulation chip-scale sample
Surely encapsulation chip-scale sample, or stick on microscope slide with fillet adhesive tape with fixing envelope at the top of encapsulation chip-scale sample
Cored chip level sample；
S5, is bonded at the microscope slide being fixed with encapsulation chip-scale sample in the hollow out stand base of board configuration, and fixes
Stand base, can carry out focus and capture test.
In this specific embodiment, the size of described groove and/or hole is more than the size of described encapsulation chip-scale sample.
Described groove and/or hole are square structure.The length of groove and/or hole and wide than the long of corresponding encapsulation chip-scale sample and
Wide each big 1mm.When being machined with groove on microscope slide, the inwall of described groove is shiny surface.The inwall of groove is shiny surface,
The phenomenons such as the refraction decreasing light, can improve the precision of measurement.
In a kind of fixing means of chip-scale sample for capturing focus of the present invention, encapsulation chip-scale sample not with
Hollow out stand base directly contacts, it is to avoid the traditional encapsulation chip-scale sample back side causes the feelings of electric leakage because being connected with lead-in wire
Condition；Improve encapsulation chip-scale sample front pin and hollow out stand base contrast extremely phase in light microscopy field simultaneously
Near and cause the pressurization of lower pin time difficulty offers a clear explanation, the difficulty tested is big and testing efficiency and the low problem of accuracy.
In a kind of fixing means of chip-scale sample for capturing focus of the present invention, the different encapsulation cores that will handle well
Chip level sample is placed in corresponding groove and/or hole, and at side and the groove of encapsulation chip-scale sample and/or hole
Between sidewall, filling slice shape foam is with fixing encapsulation chip-scale sample, or with narrow at the top of encapsulation chip-scale sample
Bar adhesive tape sticks on microscope slide with fixing encapsulation chip-scale sample, it is to avoid traditional because using PUR to be sticked at transparent load
On slide and carry out heating and the failpoint that causes deteriorates, it also avoid because using acetone to remove after test completes remaining simultaneously
PUR and cause the acetone risk to the harm of human body of residual.
The fixing means of a kind of chip-scale sample for capturing focus of the present invention is that test sample is fixed on microscope slide
On, then microscope slide is fixed on equipment and carries out focus crawl, it is to avoid heating gluing etc. during loaded down with trivial details traditional sample is fixing
The problem such as harm that mode of operation may cause, certainty of measurement be low and difficulty is big, the present invention crosses simple method and fixes well
Small sample, provides a kind of simple effective general fix for fixing when focus captures of encapsulation chip-scale small sample
Method.
Fixing means based on above-mentioned a kind of chip-scale sample for capturing focus, the present invention also provides for a kind of for grabbing
Take the fixing device of the chip-scale sample of focus.
As in figure 2 it is shown, the fixing device of a kind of chip-scale sample for capturing focus, including microscope slide 1, described load glass
Sheet 1 is provided with and different encapsulation chip-scale sample shape and quantity is identical and size matches groove 2 and/or hole 3；Described
The side of groove 2 and/or hole 3 is equipped with the slice shape foam 4 for fixing different encapsulation chip-scale samples, or described groove
2 and/or the edge of hole 3 be equipped with the fillet adhesive tapes 5 for fixing different encapsulation chip-scale samples.
In this specific embodiment, the size of described groove 2 and/or hole 3 is more than the chi of described encapsulation chip-scale sample
Very little.Described groove 2 and/or hole 3 are square structure.The length of groove 2 and/or hole 3 and wide and corresponding encapsulation chip-scale sample
The length of product and each big 1mm of width.When microscope slide 1 is provided with groove 2, the inwall of described groove 2 is shiny surface.Groove 2 interior
Wall is shiny surface, the phenomenon such as refraction decreasing light, can improve the precision of measurement.
In a kind of fixing device of chip-scale sample for capturing focus of the present invention, the different encapsulation cores that will handle well
In corresponding groove that chip level sample is placed on microscope slide and/or hole, and at the side of encapsulation chip-scale sample and groove
And/or fill slice shape foam between the sidewall of hole with fixing encapsulation chip-scale sample, or the top at encapsulation chip-scale sample
Edge of portion sticks on microscope slide with fillet adhesive tape with fixing encapsulation chip-scale sample, it is to avoid traditional because using the PUR will
It sticks on transparent microscope slide and carries out heating and the failpoint that causes deteriorates, and it also avoid because using acetone to remove test simultaneously
Remaining PUR after completing and cause the acetone risk to the harm of human body of residual.
The fixing device of a kind of chip-scale sample for capturing focus of the present invention is that test sample has been fixed on installation
On the microscope slide of position, then microscope slide is fixed on equipment and carries out focus crawl, it is to avoid during loaded down with trivial details traditional sample is fixing
The problems such as harm that the heating mode of operation such as gluing may cause, certainty of measurement be low and difficulty is big, the present invention crosses simple method
Secure small sample well, provide for encapsulation fixing when focus captures of chip-scale small sample a kind of simple the most effective
General fixing device.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all spirit in the present invention and
Within principle, any modification, equivalent substitution and improvement etc. made, should be included within the scope of the present invention.
Claims (10)
1. the fixing means being used for capturing the chip-scale sample of focus, it is characterised in that: comprise the following steps,
S1, adds up and measures the size of the different encapsulation chip-scale samples needing to carry out focus crawl；
S2, processes and different encapsulation chip-scale sample shape and quantity is identical and size matches groove on microscope slide
And/or hole；
The different encapsulation chip-scale samples handled well are placed in corresponding groove and/or hole by S3；
S4, fills slice shape foam with fixing envelope between side and groove and/or the sidewall of hole of encapsulation chip-scale sample
Cored chip level sample, or stick on microscope slide with fillet adhesive tape with fixing encapsulation core at the top of encapsulation chip-scale sample
Chip level sample；
S5, is bonded at the microscope slide being fixed with encapsulation chip-scale sample in the hollow out stand base of board configuration, and fixed support
Pedestal, can carry out focus and capture test.
The fixing means of a kind of chip-scale sample for capturing focus the most according to claim 1, it is characterised in that: institute
State the size size more than described encapsulation chip-scale sample of groove and/or hole.
The fixing means of a kind of chip-scale sample for capturing focus the most according to claim 1 and 2, its feature exists
In: described groove and/or hole are square structure.
The fixing means of a kind of chip-scale sample for capturing focus the most according to claim 3, it is characterised in that: recessed
The length of groove and/or hole and wide long and wide each big 1mm than corresponding encapsulation chip-scale sample.
The fixing means of a kind of chip-scale sample for capturing focus the most according to claim 1 and 2, its feature exists
In: when being machined with groove on microscope slide, the inwall of described groove is shiny surface.
6. the fixing device being used for capturing the chip-scale sample of focus, it is characterised in that: include microscope slide, described microscope slide
It is provided with and different encapsulation chip-scale sample shape and quantity is identical and size matches groove and/or hole；Described groove
And/or the side of hole is equipped with the slice shape foams for fixing different encapsulation chip-scale samples, or described groove and/or hole
The edge in hole is equipped with the fillet adhesive tape for fixing different encapsulation chip-scale samples.
The fixing device of a kind of chip-scale sample for capturing focus the most according to claim 6, it is characterised in that: institute
State the size size more than described encapsulation chip-scale sample of groove and/or hole.
8., according to the fixing device of a kind of chip-scale sample for capturing focus described in claim 6 or 7, its feature exists
In: described groove and/or hole are square structure.
The fixing device of a kind of chip-scale sample for capturing focus the most according to claim 8, it is characterised in that: recessed
The length of groove and/or hole and width and the length of corresponding encapsulation chip-scale sample and each big 1mm of width.
10., according to the fixing device of a kind of chip-scale sample for capturing focus described in claim 6 or 7, its feature exists
In: when being provided with groove when microscope slide, the inwall of described groove is shiny surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610633204.8A CN106291319A (en) | 2016-08-04 | 2016-08-04 | The fixing means of a kind of chip-scale sample for capturing focus and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610633204.8A CN106291319A (en) | 2016-08-04 | 2016-08-04 | The fixing means of a kind of chip-scale sample for capturing focus and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106291319A true CN106291319A (en) | 2017-01-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610633204.8A Pending CN106291319A (en) | 2016-08-04 | 2016-08-04 | The fixing means of a kind of chip-scale sample for capturing focus and device |
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| CN (1) | CN106291319A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108776292A (en) * | 2018-05-31 | 2018-11-09 | 上海华岭集成电路技术股份有限公司 | A kind of miniature wafer Multi-station parallel test method |
| CN111175646A (en) * | 2020-02-20 | 2020-05-19 | 中国科学院半导体研究所 | Chip clamp |
| CN111913091A (en) * | 2020-07-31 | 2020-11-10 | 上海华力集成电路制造有限公司 | Sample fixing device |
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| CN103645352A (en) * | 2013-11-22 | 2014-03-19 | 上海华力微电子有限公司 | Micro-size chip fixing device |
| CN105334445A (en) * | 2014-06-18 | 2016-02-17 | 上海华力微电子有限公司 | Back failure positioning method of chip |
| CN105413546A (en) * | 2015-12-14 | 2016-03-23 | 沈阳理工大学 | Micro-fluidic mixing process and device |
| CN205281007U (en) * | 2015-12-29 | 2016-06-01 | 北京索莱宝科技有限公司 | Anticreep slide glass |
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Patent Citations (5)
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| CN102053034A (en) * | 2009-10-30 | 2011-05-11 | 中芯国际集成电路制造(上海)有限公司 | Test sample bearing device |
| CN103645352A (en) * | 2013-11-22 | 2014-03-19 | 上海华力微电子有限公司 | Micro-size chip fixing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108776292A (en) * | 2018-05-31 | 2018-11-09 | 上海华岭集成电路技术股份有限公司 | A kind of miniature wafer Multi-station parallel test method |
| CN111175646A (en) * | 2020-02-20 | 2020-05-19 | 中国科学院半导体研究所 | Chip clamp |
| CN111913091A (en) * | 2020-07-31 | 2020-11-10 | 上海华力集成电路制造有限公司 | Sample fixing device |
| CN111913091B (en) * | 2020-07-31 | 2023-06-13 | 上海华力集成电路制造有限公司 | Sample fixing device |
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Application publication date: 20170104 |
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