CN106289970A - A kind of chip external force resistance test device and method of testing thereof - Google Patents
A kind of chip external force resistance test device and method of testing thereof Download PDFInfo
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- CN106289970A CN106289970A CN201610614003.3A CN201610614003A CN106289970A CN 106289970 A CN106289970 A CN 106289970A CN 201610614003 A CN201610614003 A CN 201610614003A CN 106289970 A CN106289970 A CN 106289970A
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- external force
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/005—Electromagnetic means
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The embodiment of the invention discloses a kind of chip external force resistance test device, including: chip fixed component, external force apply parts and thrust measurement parts；Wherein, described chip is fixed in described chip fixed component, and described external force applies parts and is positioned at the side in described chip substrate face, and described external force applying parts are plane towards the side in described chip substrate face, and this plane is parallel with described chip substrate face；Described external force applies parts and connects described thrust measurement parts, described external force applying parts for being pushed to described chip substrate face when driving, and described thrust measurement parts are used for measuring described external force applying parts and push the thrust size that described chip substrate face makes to be applied to during the impaired fracture of described chip on described external force applying parts to.The invention also discloses a kind of chip external force resistance method of testing.The chip external force resistance device and method that the embodiment of the present invention provides, can test out the chip mill stricture of vagina impact on chip external force resistance ability, and test data are more accurate.
Description
Technical field
The present invention relates to chip external force resistance field of measuring technique, particularly relate to a kind of chip external force resistance test device and survey thereof
Method for testing.
Background technology
Semiconductor crystal wafer (Wafer) module needs to scratch disk wear down into one single chip one by one in processing procedure, is subtracting
During thin, the upper texture producing different depth of chip back (also known as substrate surface) can be made, may result in the resistance against physical of chip
External force ability is poor.Traditional mechanical strength test is that point pressure mode is tested, and this kind of method is to apply for chip certain point
Pressure.Traditional point pressure method of testing is: first lain on platform by chip；Above chip, certain point applies certain strength
External force, and keep the regular hour, then remove external force, and check that chip is the most impaired, as shown in Figure 1.This point pressure
The shortcoming of measuring method is: 1, higher to the flatness requirement of platform, as inadequate in platform flatness, then the data tested out inclined
Difference is bigger；If 2 chip areas are relatively big, simply point is stressed, and the degree of accuracy of test data will not；3, the method cannot be surveyed
Try out the texture influence degree to chip external force resistance ability.Therefore, this traditional method actually cannot Validity Test knockout
The sheet back side texture influence degree to chip resistance against physical external force ability.
Summary of the invention
The embodiment of the present invention proposes a kind of chip external force resistance test device and method of testing thereof, to solve existing test core
The method of sheet resistance against physical external force ability cannot go out chip back texture chip resistance against physical external force ability affected journey by Validity Test
The problem of degree.
For achieving the above object, embodiments providing a kind of chip external force resistance test device, described device includes:
Chip fixed component, external force apply parts and thrust measurement parts；Wherein,
Described chip is fixed in described chip fixed component, and described external force applies parts and is positioned at described chip substrate face
Side, it is plane that described external force applies parts towards the side in described chip substrate face, and this plane and described chip substrate face
Parallel；
Described external force applies parts and connects described thrust measurement parts, and described external force applies parts for being pushed away when driving
To described chip substrate face, described thrust measurement parts are used for measuring described external force and apply parts and push described chip substrate face to and make
It is applied to described external force during the impaired fracture of described chip and applies the thrust size on parts.
Alternatively, wherein, described external force applies the parts width towards the plane in described chip substrate face more than described core
The width of sheet substrate surface, described external force applies the parts plane towards described chip substrate face near described chip substrate Middle face
One end straight.
Alternatively, device also include: motor；
The area that described chip substrate face contacts with described external force applying parts is more than or equal to described chip substrate face
/ 3rd of area, described external force applies parts and is pushed to described chip substrate face by described step motor drive until described core
The impaired fracture of sheet.
Alternatively, described device also includes: positioning element；
Described external force apply parts include that push broach, described Chip Vertical are fixed in described chip fixed component, described in push away
The lower of cutter is defined along height by described positioning element.
Alternatively, wherein, the lower of described push broach is less than or equal to 2/3rds of described chip height along height.
The embodiment of the present invention additionally provides a kind of chip external force resistance method of testing, and described method includes:
Described chip is fixed in chip fixed component；
Arranging external force in side, described chip substrate face and apply parts, described external force applies parts towards described chip substrate
The side in face is plane, makes described plane parallel with described chip substrate face；
Described external force applying parts are connected to thrust measurement parts, make described external force apply parts and push described chip lining to
Bottom surface is until the impaired fracture of described chip；
Big by being applied to the thrust of described external force applying parts described in described thrust measurement component retrieval during chip fracture
Little.
Alternatively, wherein, described external force is set and applies the parts width towards the plane in described chip substrate face more than institute
State the width in chip substrate face, described external force is set and applies parts and serve as a contrast near described chip towards the plane in described chip substrate face
One end in the middle part of bottom surface is straight.
Alternatively, wherein, the area making described chip substrate face contact with described external force applying parts is more than or equal to
/ 3rd of described chip substrate face area, use external force described in step motor drive to apply parts and push described chip substrate to
Face is until the impaired fracture of described chip.
Alternatively, wherein, described external force applies parts and includes push broach, and described Chip Vertical is fixed on chip fixture apparatus
On, the height on the lower edge of described push broach is limited by described positioning element.
Alternatively, wherein, the lower edge of described push broach is highly set smaller than or equal to described chip height three/
Two.
The chip external force resistance that the embodiment of the present invention provides tests device and method of testing thereof, can test out chip mill stricture of vagina to core
The impact of sheet external force resistance ability, and test data are more accurate.
Accompanying drawing explanation
Fig. 1 is the chip point pressure method of testing schematic diagram of prior art；
Fig. 2 is the chip external force resistance test device front schematic view of the embodiment of the present invention one；
Fig. 3 is the left view schematic diagram of the test device of embodiment one；
Fig. 4 is the chip external force resistance test device front schematic view of the embodiment of the present invention two；
Fig. 5 is the left view schematic diagram of the test device of embodiment two；
Fig. 6 is the chip external force resistance test device front schematic view of the embodiment of the present invention three；
Fig. 7 is the left view schematic diagram of the test device of embodiment three；
Fig. 8 is the fixing mutual relation figure with push mechanism of chip of embodiment four；
Fig. 9 is the method flow schematic diagram of the embodiment of the present invention.
Label declaration: 1 chip fixed component；2 external force apply the positioning element of parts (such as push broach)；3——
The substrate surface of chip.
The realization of the object of the invention, functional characteristics and advantage will in conjunction with the embodiments, are described further referring to the drawings.
Detailed description of the invention
Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Below in conjunction with drawings and Examples, technical scheme is described in detail.
If it should be noted that do not conflict, each feature in the embodiment of the present invention and embodiment can mutually be tied
Close, all within protection scope of the present invention.Although it addition, show logical order in flow charts, but in some situation
Under, can be to be different from the step shown or described by order execution herein.
The chip external force resistance survey formula device realizing each embodiment of the present invention is described referring now to accompanying drawing.Retouch in follow-up
In stating, use suffix the saying only for the beneficially present invention being used for representing such as " module ", " parts " or " unit " of element
Bright, itself do not have specific meaning.Therefore, " module " can mixedly use with " parts ".
Embodiments providing a kind of chip external force resistance test device, described device includes: chip fixed component, outer
Power applies parts and thrust measurement parts；Wherein,
Described chip is fixed in described chip fixed component, and described external force applies parts and is positioned at described chip substrate face
Side, it is plane that described external force applies parts towards the side in described chip substrate face, and this plane and described chip substrate face
Parallel；
Described external force applies parts and connects described thrust measurement parts, and described external force applies parts for being pushed away when driving
To described chip substrate face, described thrust measurement parts are used for measuring described external force and apply parts and push described chip substrate face to and make
It is applied to described external force during the impaired fracture of described chip and applies the thrust size on parts.
Alternatively, wherein, described external force applies the parts width towards the plane in described chip substrate face more than described core
The width of sheet substrate surface, described external force applies the parts plane towards described chip substrate face near described chip substrate Middle face
One end straight.
Alternatively, described device also includes: motor；Described chip substrate face applies parts with described external force and contacts
Area more than or equal to described chip substrate face area 1/3rd, described external force apply parts driven by described motor
Dynamic push described chip substrate face to until the impaired fracture of described chip.
Alternatively, described device also includes: positioning element；Described external force applies parts and includes push broach, described Chip Vertical
Being fixed in described chip fixed component, described positioning element is arranged on the top of described chip fixed component, described push broach
Lower along being highly defined by described positioning element.
Alternatively, wherein, the lower of described push broach is less than or equal to 2/3rds of described chip height along height.
The chip external force resistance device that the embodiment of the present invention provides, can test out the chip mill stricture of vagina shadow to chip external force resistance ability
Ring, and test data are more accurate.
The present invention is described in detail below by several specific embodiments.
Embodiment one,
The present invention can be realized by push broach.As shown in Figure 2,3, Chip Vertical to be measured is fixed on chip fixed component 1
On, this chip fixture apparatus can be chip fixed platform, chip fixation kit etc., as long as can be by fixing for Chip Vertical
Can.
In the present embodiment, for purposes of illustration only, as in figure 2 it is shown, the front of vertical fixing chip is positioned at towards reader, push broach
The back side 3 (substrate surface) of chip, the width of push broach is more than the width of chip；Position by highly controlling chi or altitude location parts 2
The height of push broach.
Preferably, in the described chip fixed component that about 1/3rd of chip height to be measured are fixing, by highly controlling
Chi, by under push broach along High definition at about 2/3rds of chip height, when the substrate surface of chip is pushed in such push broach to, push broach
The area contacted with each other with chip substrate face is approximately equal to 1/3rd of chip substrate face area.
Push broach connects thrust measurement parts (not shown), push broach is gradually pushed away by motor (not shown)
To the substrate surface (i.e. texture face) of described chip, until the impaired fracture of described chip, obtain the thrust being now applied to push broach, i.e.
The ability of this chip substrate face texture external force resistance can be obtained.
Embodiment two,
As the alternative of embodiment one, as shown in Figure 4,5, push broach could alternatively be the applying of other shapes of external force
Parts, as long as the side of object chip substrate surface 3 is plane, this plane lower along straight, should by altitude location parts 2 location
External force applies the height on edge under parts.Chip is still that and is vertically fixed in chip fixed component 1, similar to embodiment one.
Embodiment three,
Fig. 6,7 show that another kind of location external force applies the set-up mode of the positioning element 2 of the height of parts (or push broach),
Other is identical with embodiment one, two, no longer applies and states.
Embodiment four,
Fig. 8 shows the mode of another kind of fixed chip, and external force applies the pushing direction signal of parts (or push broach)
Figure.Unlike the embodiments above, chip can also be horizontally fixed in chip fixed component, and chip substrate face is deeply fixed
Element portion accounts for 1/3rd of the area in chip substrate face, and external force applies parts or push broach, can push institute from top to bottom to
Stating chip, it is plane that external force applies parts or push broach with described chip contacting portion, and area accounts for the area in chip substrate face
1/3rd.Under the driving of motor, the substrate surface of chip is gradually pushed in external force applying parts or push broach to, until chip is subject to
Damage fracture, measure and be now applied to external force applying parts or the active force of push broach, equally obtain the substrate surface texture of chip
The ability of external force resistance.
Correspondingly, the present invention also provides for a kind of chip external force resistance method of testing, said method comprising the steps of:
Step 10: described chip is fixed on chip fixture apparatus；
Step 11: arrange external force in side, described chip substrate face and apply parts, described external force applies parts towards described
The side in chip substrate face is plane, makes described plane parallel with described chip substrate face；
Step 12: described external force applying parts are connected to thrust measurement parts, makes described external force apply parts and pushes institute to
State chip substrate face until the impaired fracture of described chip；
Step 13: be applied to described external force applying unit during fracture impaired by chip described in described thrust measurement component retrieval
The thrust size of part.
Alternatively, described external force is set in above-mentioned steps 12 and applies the parts width towards the plane in described chip substrate face
Degree, more than the width in described chip substrate face, arranges described external force and applies the parts plane towards described chip substrate face near institute
The one end stating chip substrate Middle face is straight.
Alternatively, in above-mentioned steps 12, described chip substrate face is made to apply, with described external force, the area that parts contact
More than or equal to 1/3rd of described chip substrate face area, use external force described in step motor drive to apply parts and push institute to
State chip substrate face until the impaired fracture of described chip.
Alternatively, described external force applying parts include that push broach, described step 10 include: described Chip Vertical is fixed on core
In sheet fixing device, limited the height on the lower edge of described push broach by positioning element.
Alternatively, the lower edge of described push broach highly it is set smaller than or is equal to 2/3rds of described chip height.
The chip external force resistance method of testing that the embodiment of the present invention provides, can test out chip mill stricture of vagina to chip external force resistance ability
Impact, and test data more accurate.
It should be noted that in this article, term " includes ", " comprising " or its any other variant are intended to non-row
Comprising of his property, so that include that the process of a series of key element, method, article or device not only include those key elements, and
And also include other key elements being not expressly set out, or also include intrinsic for this process, method, article or device
Key element.In the case of there is no more restriction, statement " including ... " key element limited, it is not excluded that including this
The process of key element, method, article or device there is also other identical element.
The invention described above embodiment sequence number, just to describing, does not represent the quality of embodiment.
These are only the preferred embodiments of the present invention, not thereby limit the scope of the claims of the present invention, every utilize this
Equivalent structure or equivalence flow process that bright description and accompanying drawing content are made convert, or are directly or indirectly used in other relevant skills
Art field, is the most in like manner included in the scope of patent protection of the present invention.
Claims (10)
1. a chip external force resistance test device, it is characterised in that described device includes: chip fixed component, external force applying unit
Part and thrust measurement parts；Wherein,
Described chip is fixed in described chip fixed component, and described external force applies parts and is positioned at the one of described chip substrate face
Side, described external force applying parts are plane towards the side in described chip substrate face, and this plane is put down with described chip substrate face
OK；
Described external force applies parts and connects described thrust measurement parts, and described external force applies parts for being pushed to institute when driving
Stating chip substrate face, described thrust measurement parts are used for measuring described external force and apply parts and push described chip substrate face to and make described
It is applied to described external force during the impaired fracture of chip and applies the thrust size on parts.
2. device as claimed in claim 1, it is characterised in that wherein,
Described external force applies the parts width towards the plane in described chip substrate face more than the width in described chip substrate face, institute
State external force applying parts straight near one end of described chip substrate Middle face towards the plane in described chip substrate face.
3. device as claimed in claim 1, it is characterised in that also include: motor；
The area that described chip substrate face contacts with described external force applying parts is more than or equal to described chip substrate face area
1/3rd, described external force apply parts pushed to described chip substrate face by described step motor drive until described chip is subject to
Damage fracture.
4. the device as described in any one of claims 1 to 3, it is characterised in that also include: positioning element；
Described external force applies parts and includes that push broach, described Chip Vertical are fixed in described chip fixed component, described push broach
Lower along being highly defined by described positioning element.
5. device as claimed in claim 4, it is characterised in that wherein,
The lower of described push broach is less than or equal to 2/3rds of described chip height along height.
6. a chip external force resistance method of testing, it is characterised in that described method includes:
Described chip is fixed in chip fixed component；
Arranging external force in side, described chip substrate face and apply parts, described external force applies parts towards described chip substrate face
Side is plane, makes described plane parallel with described chip substrate face；
Described external force applying parts are connected to thrust measurement parts, make described external force apply parts and push described chip substrate face to
Until the impaired fracture of described chip；
The thrust size of parts is applied by being applied to described external force described in described thrust measurement component retrieval during chip fracture.
7. method as claimed in claim 6, it is characterised in that wherein,
Described external force is set and applies the parts width towards the plane in described chip substrate face more than the width in described chip substrate face
Degree, arranges described external force and applies parts and hold level with both hands near the one of described chip substrate Middle face towards the plane in described chip substrate face
Directly.
8. method as claimed in claim 6, it is characterised in that wherein,
Make the area that described chip substrate face contacts with described external force applying parts more than or equal to face, described chip substrate face
Long-pending 1/3rd, use external force described in step motor drive to apply parts and push described chip substrate face to until described chip is subject to
Damage fracture.
9. the method as described in claim 6～8, it is characterised in that wherein,
Described external force applies parts and includes push broach, is fixed on chip fixture apparatus by described Chip Vertical, by described location
Parts limit the height on the lower edge of described push broach.
10. method as claimed in claim 9, it is characterised in that wherein,
The lower edge of described push broach is highly set smaller than or equal to 2/3rds of described chip height.
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| CN201610614003.3A CN106289970B (en) | 2016-07-28 | 2016-07-28 | A kind of chip external force resistance test device and its test method |
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| CN201610614003.3A CN106289970B (en) | 2016-07-28 | 2016-07-28 | A kind of chip external force resistance test device and its test method |
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| CN111426554A (en) * | 2020-03-23 | 2020-07-17 | 天津大学 | Semiconductor chip high temperature shear test anchor clamps |
| CN114034540A (en) * | 2021-06-21 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | Chip performance testing method and device |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN106289970B (en) | 2019-11-29 |
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