CN106289669A - Gas leakage detection device based on Low coherence optical fiber microphone and method - Google Patents
Gas leakage detection device based on Low coherence optical fiber microphone and method Download PDFInfo
- Publication number
- CN106289669A CN106289669A CN201610634691.XA CN201610634691A CN106289669A CN 106289669 A CN106289669 A CN 106289669A CN 201610634691 A CN201610634691 A CN 201610634691A CN 106289669 A CN106289669 A CN 106289669A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- bonder
- gas leakage
- signal
- leakage detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/24—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The present invention discloses a kind of gas leakage detection device based on Low coherence optical fiber microphone, including ASE light source, isolator, bonder A, postpones optical fiber, bonder B, optical fiber microphone probe, photodetector A, photodetector B, signal acquiring system, Signal Analysis System based on LabVIEW；The invention also discloses a kind of gas leakage detection method: light sends from ASE light source, arrive optical fiber microphone probe vibration film surface and return again to two photodetectors, convert optical signal into the signal of telecommunication and transmit to signal acquiring system process；LabVIEW software is used to be demodulated this signal analyzing, it is thus achieved that the characteristic frequency spectrum information of gas leakage.The present invention measures sensitivity and resolution is high, can finely show the frequency domain distribution of gas leakage acoustic emission signal, simple in construction, and cost of manufacture is low, and capacity of resisting disturbance is strong, passive solution mode design simplified system, it is achieved that bigger range of dynamic measurement.
Description
Technical field
The invention belongs to low-coherence measuring and gas leak detection technical field, be specifically related to based on the passive demodulation of Low coherence
The gas leakage detection device of formula optical fiber microphone and method.
Background technology
In contemporary industry, the safe storage of inflammable, explosive, poisonous chemical gas and conveying are most important.Gas tank and gas transmission
Pipeline is to store and the capital equipment of conveying gas, the corrosion of the aging chemical gas in addition of life-time service, gas tank and gas pipeline
It is susceptible to reveal and cause security incident or cause environmental pollution, therefore, gas tank and gas pipeline gas is leaked and carries out height
Effect monitoring in real time is a particularly important link.
At present, the method for detected gas leakage can be divided into based on hardware, based on software and non-technical type side by technological property
Method, wherein non-technical type method rely primarily on human or animal listen, see, the organoleptic detection gas leakage such as news, this type of method time-consumingly consumes
Power, subjectivity is strong, inefficient, it is impossible to meet the application demand of quickly detection.Major part detection method is based on hardware at present
With the development and application of the combination of software, especially optical fiber sensing technology, because it has, detection efficiency is high, speed is fast, accuracy is high
Receive much concern Deng outstanding advantages.As a example by monitoring leak from oil gas pipe, can be by detection pipeline discharge pressure, flow, temperature
Isoparametric change or detection are revealed noise and are judged, as installed big quantity sensor discretely according to certain intervals along pipeline
(such as phase modulation-type sensor), detects let out by the acoustical signal of leak holes both sides sensor acquisition carries out relevant treatment
Dew.Along with the development of optical fiber sensing technology, occur in that continuous distributed fiberoptic sensor carries out revealing sound detection and location.
" gas pipeline leakage detection method based on distributed fiberoptic sensor " uses distributed fiber grating (FBG) sensor technology
(wavelength-modulated method), changes as detection according to (Chen Zhigang, Zhang Laibin, imperial court using the optical grating reflection ripple that pipeline leakage causes
Sunshine, etc. gas pipeline leakage detection method [J] based on distributed fiberoptic sensor. sensor and micro-system, 2007,26
(7): 108-110.).
Above-mentioned existing detection technique many employings distributed method, need to be fixedly installed in sensor leakage surface, need connection
Closing and use modulation-demodulation technique, system structure and measurement operation are complex, and range of dynamic measurement is limited, relatively costly, measure
System rejection to disturbance ability, sensitivity, accuracy and resolution need to improve further.
Summary of the invention
The problem existed for existing gas leakage detection method, an object of the present invention is to provide a kind of based on low
The gas leakage detection device of coherent optical-fiber mike, this device includes: ASE light source, isolator, bonder A, postpone optical fiber,
Bonder B, optical fiber microphone probe, photodetector A, photodetector B, signal acquiring system, signal based on LabVIEW
Analysis system；
Described isolator is directly connected with described ASE light source；
First port of described bonder A is connected with isolator, and the second port and the 3rd port are respectively by described photoelectricity
Detector A is connected with described signal acquiring system with photodetector B, and the 4th port is coupled with described by described delay optical fiber
First port of device B is connected, and fifth port directly the second port with described bonder B is connected；
3rd port of described bonder B is connected with described optical fiber microphone probe；
Described signal acquiring system is connected with described Signal Analysis System；
Described optical fiber microphone probe placement is used for obtaining gas leakage acoustic emission signal in position near measurement gas tank, should
Probe end is to be combined, with aluminum film, a kind of special polyimides-aluminum made less than the polyimide film of 1 μm by thickness to be combined
Vibrating diaphragm；Preferably, described aluminum film thickness is 100nm.
Specifically, composite membrane vibration preparation technology is as follows for this kind of special acid imide-aluminum:
(1) with silicon chip as substrate, film is mask sheet, makes mask pattern；
(2), after above-mentioned silicon chip being carried out surface process, chromium film and copper film are plated successively by magnetron sputtering method one side wherein
As etched surface protective layer, after mask process, etch by plasma etching method；
(3) plate the aluminum film of thickness 100nm at above-mentioned silicon chip another side magnetron sputtering method, on it, coating thickness is less than 1 μ
The polyimide coating of m, then carries out polyamic acid imidization；
(4), after imidization completes, the body silicon etching method silicon chip erosion to mask layer one side is used.
Wherein it is preferred to, described polyamic acid imidization is as follows:
A. in less than 100 DEG C drying；
B. silicon chip is positioned in high temperature furnace, keeps 2h with 155 DEG C, then be warming up to 180 DEG C of holding 1h；
C. hot setting, 210 DEG C are dried 30min, then are warming up to 240 DEG C of holding 30min, then are warming up to 270 DEG C of holdings
30min, then it is warming up to 300 DEG C of holding 1h, finally it is warming up to 350 DEG C and keeps 1h.
Specifically, described bonder A is 3 × 3 bonders, and described bonder B is 2 × 2 bonders.
Specifically, described optical fiber microphone is popped one's head in by optical fiber collimator, glass capillary and polyimides-aluminum complex vibration
Film is constituted.
Another object of the present invention is to provide a kind of uses above-mentioned gas leak detection apparatus to carry out gas leakage detection
Method, the method comprises the following steps:
(1) this device is positioned near leak detection body；
(2) use Low coherence, broadband ASE source emissioning light, enter bonder A through isolator and be divided into three-beam, Yi Shujing
Enter bonder B, a branch of bonder B that is directly entered after postponing optical fiber delay, then be divided into two-beam through bonder B, the most a branch of
Enter optical fiber microphone probe and reach end polyimides-aluminum composite membrane vibration, after film reflects, enter bonder B be divided into two bundles
Light, the most a branch of is directly entered bonder A, and another enters bonder A after restrainting delayed optical fiber delay, and this two-beam is at bonder
A interferes and is divided into three-beam, a branch of is stopped by isolator, and another two bundles are connect by photodetector A and photodetector B respectively
Receive；
(3) optical signal of reception is converted into the signal of telecommunication and transmits to signal by photodetector A and photodetector B respectively
Acquisition system processes；
(4) above-mentioned signal acquiring system will process signal transmission extremely Signal Analysis System based on LabVIEW, and to this letter
Number it is demodulated analyzing, it is thus achieved that the characteristic frequency spectrum information of gas leakage.
Based on the present invention, by being analyzed the acoustic emission signal of gas tank gas leakage, applicant show that leak holes is high
The gas acoustic emission signal of speed ejection has time domain continuity, and spectrum distribution scope is relatively wide (0～100KHz), identical intrinsic pressure
Under, different leak holes sizes have certain impact to the maximal rate of gas leakage, signal amplitude also can respective change, but sound field
Frequency domain characteristic does not haves significant change, and the intrinsic pressure the biggest factor affecting gas leakage speed that is only of gas tank, i.e. at leak holes chi
Very little certain in the case of, along with the increase that gas tank is intrinsic pressure, acoustic emission signal amplitude increases therewith.Applicant is drawn by the present invention
Be summarized as follows about gas leakage sound emission signal characteristic:
(1), during the leakage of gas tank gas, at leakage, acoustical signal is continuous print, and spectrum distribution scope is wider；
(2) increasing along with gas tank leak holes size, acoustical signal amplitude increases；
(3) along with the intrinsic pressure increase of gas tank, acoustical signal amplitude increases.
Compared with existing gas leakage detection technique, the present invention has the advantage that
1. using Low coherence ASE light source and general single mode fiber device, simple in construction, preparation cost is low；Light path itself is right
The low-frequency excitations such as noise, temperature, stress are insensitive, and system rejection to disturbance is very capable, can substantially distinguish gas leakage signal and miscellaneous
Tone signal, systemic resolution and the stability of optical source wavelength, the fluctuation of light source power, optical fiber the factor such as disturbance the most unrelated.
2. detection light light path uses Low coherence optical fiber differential Mach Zeng De and Sai Ge nanogram mixed interference instrument structure, nothing first
Need manipulator, it is achieved that the passive demodulation of acoustic emission signal, greatly simplifie detecting system, use this passive demodulation method to survey
Amount vibrating diaphragm vibration information, measurement dynamic range is big.
3. optical fiber microphone probe uses the special polyimides-aluminum composite membrane vibration of applicant's designed, designed, and this film was both
High sensitivity, high band resolution and resistance to high power light radiation demand can be met, film surface high reflectance need can be met again.Optical fiber
Collimator can eliminate the transmitting impact of fiber end face to greatest extent.Optical fiber microphone the most of the present invention probe has high sensitive
Degree and resolution.
4., than traditional Distributed probing, optical fiber microphone of the present invention is without contacting with detection bodies, at certain distance model
Enclose the frequency domain distribution that can finely show gas leakage acoustic emission signal, it is simple to practical operation.
Accompanying drawing explanation
Fig. 1 is the present embodiment gas leakage detection device based on Low coherence optical fiber microphone structural representation.
Fig. 2 is the present embodiment gas leakage detection device light transmission path schematic diagram.
Fig. 3 is the present embodiment optical fiber microphone sonde configuration schematic diagram.
Fig. 4 is the film mask pattern schematic diagram that the present embodiment polyimides-aluminum composite membrane vibration preparation technology uses.
Fig. 5 is the ICP etching machine corrosion process signal that the present embodiment polyimides-aluminum composite membrane vibration preparation technology uses
Figure.
Fig. 6 is the present embodiment gas leakage characteristic frequency spectrum figure.
Reference: 1, ASE light source；2, signal acquiring system；3, computer (signal analysis system based on LabVIEW
System)；4, isolator；5, photodetector A；6, photodetector B；7, bonder A；8, optical fiber is postponed；9, bonder B；10, light
Fine microphone probe；101, optical fiber collimator；102, glass capillary；103, polyimides-aluminum composite membrane vibration；11, corrosion
Gas；12, Cu film；13, Cr film；14、SiO2；15, A1 film；16, polyamide；A, gas tank；B, leak holes.
Detailed description of the invention
Below in conjunction with the accompanying drawings, describe a specific embodiment of the present invention in detail, but the claim of the present invention is not done
Any restriction.
As shown in Figure 1, Figure 3, the present embodiment gas leakage detection device light channel structure uses Low coherence optical fiber differential interference
Mach Zeng De and Sai Ge nanogram mixed interference instrument structure, including ASE light source 1 (operation wavelength 1525～1565nm, 13mw), isolation
Device 4,3 × 3 bonder A 7, delay optical fiber 8 (length 1.5Km), 2 × 2 bonder B 9, optical fiber microphone probe 10, light electrical resistivity survey
Survey device A 5, photodetector B 6 (GT322D type, Zhong electricity group the 44th institute), signal acquiring system 2, computer
(Signal Analysis System based on LabVIEW) 3；Wherein: isolator 4 is directly connected with ASE light source 1；The of 3 × 3 bonder A 7
Single port is with isolator 4 by being connected, and the second port and the 3rd port are respectively by photodetector A5 and photodetector B 6
Being connected with signal acquiring system 2, the 4th port is connected with first port of 2 × 2 bonder B 9 by postponing optical fiber 8, the 5th end
Mouth is directly connected with second port of 2 × 2 bonder B 9；3rd port of 2 × 2 bonder B 9 and optical fiber microphone probe 10
It is connected；Signal acquiring system 2 is connected with computer 3.
Optical fiber microphone probe 10 is by optical fiber collimator 101, glass capillary 102 and a kind of application being positioned at probe end
Special polyimides-aluminum the composite membrane vibration 103 of people's designed, designed is constituted, and this composite membrane vibration is less than the polyamides of 1 μm by thickness
The aluminum film of imines film and thickness 100nm combines and makes, and is prepared by technique acquisition:
(1) with 3 inch silicon wafer as substrate, using film is mask sheet, makes mask pattern；Adobe software is used to paint
Pattern, wherein annulus is used for fixing diaphragm and probe pipe, and diaphragm specification is divided into two kinds, diameter 4.4mm and 6.8mm, such as Fig. 4 institute
Show.
(2), after above-mentioned silicon chip being carried out surface process, the chromium gold of 20nm is plated successively by magnetron sputtering method one side wherein
Belong to the copper metal film protective layer as etched surface of film and 100nm；Mask process is carried out, it may be assumed that on metal film all first in this face
The last photoresist of even painting, then carry out uv-exposure process with above-mentioned film, finally develop；By plasma etching method by this face
The metal film of uncured photoresist etches away；
(3) the green aluminum film of a layer thickness 100nm is again plated with magnetron sputtering method at above-mentioned silicon chip another side, then at aluminum film
One layer of polyamic acid solution of surface even spread, thickness is less than 1 μm, then carries out polyamic acid imidization, and imidization has
Body is:
The first step: in less than 100 DEG C drying, time 15min；
Second step: be positioned in high temperature furnace by silicon chip, keeps 2h with 155 DEG C, then is warming up to 180 DEG C of holding 1h；
3rd step: hot setting, 210 DEG C are dried 30min, then are warming up to 240 DEG C of holding 30min, then are warming up to 270 DEG C of holdings
30min, then it is warming up to 300 DEG C of holding 1h, finally it is warming up to 350 DEG C and keeps 1h.
(4) as it is shown in figure 5, use IPC etching machine to carry out body silicon etching (dry etching), with etchant gas C to there being mask
Laminated silicon chip performs etching, total time about 200min, prepares polyimides of the present invention-aluminum composite membrane vibration.
The present embodiment gas leakage detection device leak hunting principle and process as follows:
(1) this device is positioned near gas tank A.
(2) using Low coherence, broadband ASE light source 1, light sends from ASE light source 1, enters bonder A 4 through isolator 4, point
Becoming three-beam, a branch of delayed optical fiber 8 enters bonder B 9, a branch of bonder B 9 that is directly entered after postponing, then through bonder B
9 are divided into two-beam, and the most a branch of entrance optical fiber microphone probe 10 reaches end polyimides-aluminum composite membrane vibration 103, through film
Entering bonder B 9 after reflection and be divided into two-beam, a branch of bonder A 7 that is directly entered, a branch of delayed optical fiber 8 enters after postponing
Bonder A 7, this two-beam is divided into three-beam at bonder A, a branch of is stopped by isolator 4, and another two bundles are respectively by photodetection
Device A5 and photodetector B 6 receives.
(3) as in figure 2 it is shown, in above process, light sends from light source, returns to optical fiber microphone probe vibration film surface again
The light transmission path returning two photodetectors has four: D-L-D, D-L-F, F-L-D, F-L-F.Due to owing to using
Wideband light source, in four road light, D-L-D and F-L-F two-way optical path difference is too big, is unsatisfactory for interference condition, it is impossible to interfere, only
D-L-F with F-L-D two-way light is by identical light path, and the sequencing simply arriving optical fiber microphone film surface is different, meets
Interference condition, it is possible to interfere, utilizes the time difference that time delay optical fiber 8 is brought, and interference signal is received by two photodetectors
After be converted into the signal of telecommunication, and transmit and process to signal acquiring system 2, the signal of telecommunication of photodetector output contains to be let out by gas
The vibration information of the optical fiber microphone composite membrane vibration that leakage acoustic emission signal causes.
(4) LabVIEW software is used signal to be demodulated analyzing the feature of the acoustic emission signal showing that gas leak frequently
Spectrum information, and it is shown in computer 3 interface, it is illustrated in figure 6 the gas leakage characteristic frequency spectrum that the detection of this device obtains, it was demonstrated that should
There is leak holes in gas tank A, and the gas acoustic emission signal that this leak produces has time domain continuity, and spectrum distribution scope is relatively
Extensively, its signal amplitude changes along with the intrinsic pressure change of gas tank, can substantially distinguish gas leakage signal and other noise signals.
In sum, the present embodiment device is revealed for detected gas has high measurement sensitivity and resolution, is
System capacity of resisting disturbance is strong, can measurement dynamic range big.
It is understood that above with respect to the specific descriptions of the present invention, be merely to illustrate the present invention and be not limited to this
Technical scheme described by inventive embodiments.It will be understood by those within the art that, still the present invention can be carried out
Amendment or equivalent, to reach identical technique effect；As long as meet use needs, all protection scope of the present invention it
In.
Claims (7)
1. gas leakage detection device based on Low coherence optical fiber microphone, it is characterised in that including: ASE light source, isolator, coupling
Clutch A, delay optical fiber, bonder B, optical fiber microphone probe, photodetector A, photodetector B, signal acquiring system, base
Signal Analysis System in LabVIEW；Wherein:
Described isolator is directly connected with described ASE light source；
First port of described bonder A is connected with isolator, and the second port and the 3rd port are respectively by described photodetection
Device A is connected with described signal acquiring system with photodetector B, and the 4th port is by described delay optical fiber and described bonder B
The first port be connected, fifth port directly the second port with described bonder B is connected；
3rd port of described bonder B is connected with described optical fiber microphone probe；
Described optical fiber microphone probe placement is used for obtaining gas leakage acoustic emission signal in position near measurement gas tank, this probe
End is to be combined, less than the polyimide film of 1 μm, the polyimides-aluminum composite membrane vibration made by thickness with aluminum film；
Described signal acquiring system is connected with described Signal Analysis System based on LabVIEW.
Gas leakage detection device based on Low coherence optical fiber microphone the most according to claim 1, it is characterised in that: institute
Stating bonder A is 3 × 3 bonders, and described bonder B is 2 × 2 bonders.
Gas leakage detection device based on Low coherence optical fiber microphone the most according to claim 1, it is characterised in that: institute
Stating aluminum film thickness is 100nm.
Gas leakage detection device based on Low coherence optical fiber microphone the most according to claim 1, it is characterised in that institute
Composite membrane vibration preparation technology is as follows to state polyimides-aluminum:
(1) with silicon chip as substrate, film is mask sheet, makes mask pattern；
(2), after above-mentioned silicon chip being carried out surface process, chromium film and copper film conduct are plated successively by magnetron sputtering method one side wherein
Etched surface protective layer, after mask process, etches by plasma etching method；
(3) plate the aluminum film of thickness 100nm at above-mentioned silicon chip another side magnetron sputtering method, on it, coating thickness is less than 1 μm
Polyimide coating, then carries out polyamic acid imidization；
(4), after imidization completes, the body silicon etching method silicon chip erosion to mask aspect is used.
Gas leakage detection device based on Low coherence optical fiber microphone the most according to claim 4, it is characterised in that institute
State polyamic acid imidization as follows:
(1) in less than 100 DEG C drying；
(2) silicon chip is positioned in high temperature furnace, keeps 2h with 155 DEG C, then be warming up to 180 DEG C of holding 1h；
(3) hot setting, 210 DEG C are dried 30min, then are warming up to 240 DEG C of holding 30min, then are warming up to 270 DEG C of holding 30min, then
It is warming up to 300 DEG C and keeps 1h, be finally warming up to 350 DEG C and keep 1h.
Gas leakage detection device based on Low coherence optical fiber microphone the most according to claim 1, it is characterised in that: institute
State optical fiber microphone probe to be made up of optical fiber collimator, glass capillary and polyimides-aluminum composite membrane vibration.
7. use the method that the gas leakage detection device described in any one of claim 1～6 carries out gas leakage detection,
It is characterized in that comprising the following steps:
(1) this device is positioned near leak detection body；
(2) ASE source emissioning light, enters bonder A through isolator and is divided into three-beam, enters coupling after a branch of delayed optical fiber delay
Clutch B, a branch of bonder B that is directly entered, then it is divided into two-beam through bonder B, the most a branch of entrance optical fiber microphone probe reaches
To end polyimides-aluminum composite membrane vibration, after film reflects, enter bonder B be divided into two-beam, the most a branch of be directly entered
Bonder A, enters bonder A after another delayed optical fiber delay of bundle, and this two-beam interferes at bonder A and is divided into three beams
Light, a branch of is stopped by isolator, and another two bundles are received by photodetector A and photodetector B respectively；
(3) optical signal of reception is converted into the signal of telecommunication and transmits to signals collecting by photodetector A and photodetector B respectively
System processes；
(4) above-mentioned signal acquiring system will process the signal transmission Signal Analysis System as LabVIEW, and carries out this signal
Demodulation analysis, it is thus achieved that the characteristic frequency spectrum information of gas leakage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610634691.XA CN106289669B (en) | 2016-08-04 | 2016-08-04 | Gas leakage detection device and method based on Low coherence optical fiber microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610634691.XA CN106289669B (en) | 2016-08-04 | 2016-08-04 | Gas leakage detection device and method based on Low coherence optical fiber microphone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106289669A true CN106289669A (en) | 2017-01-04 |
| CN106289669B CN106289669B (en) | 2019-04-26 |
Family
ID=57665433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610634691.XA Expired - Fee Related CN106289669B (en) | 2016-08-04 | 2016-08-04 | Gas leakage detection device and method based on Low coherence optical fiber microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106289669B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107524922A (en) * | 2017-09-30 | 2017-12-29 | 必必优（深圳）科技有限公司 | A kind of pipe leakage infrasonic wave detection apparatus, system and method |
| CN110056784A (en) * | 2019-05-24 | 2019-07-26 | 昆仑杰信（北京）科技有限责任公司 | A kind of round-the-clock leakage monitoring of compressed gas and instant alarming photoelectric detecting system |
| CN111416268A (en) * | 2020-03-23 | 2020-07-14 | 天津大学 | Optical fiber microphone of laser annular cavity |
| CN112161931A (en) * | 2020-09-04 | 2021-01-01 | 大连理工大学 | High-sensitivity optical fiber photoacoustic gas detection system and method |
| CN117307988A (en) * | 2023-11-30 | 2023-12-29 | 山东省科学院激光研究所 | Large dynamic optical fiber sensor and system for pipeline leakage detection |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07306114A (en) * | 1994-05-10 | 1995-11-21 | Hitachi Ltd | Acoustic-type leakage detecting method and apparatus |
| CN101504312A (en) * | 2009-03-16 | 2009-08-12 | 北京航空航天大学 | Optical-fiber acoustic sensor for sound detection |
| CN101729145A (en) * | 2009-11-06 | 2010-06-09 | 山东大学 | DFB fiber laser type fiber-optic microphone and distributive array device thereof |
| CN101778328A (en) * | 2010-01-26 | 2010-07-14 | 北京邮电大学 | Optical fiber microphone |
| CN101808264A (en) * | 2010-02-10 | 2010-08-18 | 中国科学院半导体研究所 | Optical fiber laser microphone |
| CN103439268A (en) * | 2013-09-05 | 2013-12-11 | 安徽大学 | High-sensitivity diaphragm type photoacoustic spectrum sensor based on self-mixing |
| CN103759804A (en) * | 2014-01-23 | 2014-04-30 | 安徽大学 | Method and device for optical fiber white light differential interference non-contact vibration measurement |
| CN103792201A (en) * | 2014-02-26 | 2014-05-14 | 安徽大学 | Light pressure sensor for detecting multi-component gas and detection method thereof |
| CN105424605A (en) * | 2015-11-18 | 2016-03-23 | 安徽大学 | Photoacoustic spectrometry measuring device and method based on low-coherence optical fiber differential interference non-contact vibration measurement |
-
2016
- 2016-08-04 CN CN201610634691.XA patent/CN106289669B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07306114A (en) * | 1994-05-10 | 1995-11-21 | Hitachi Ltd | Acoustic-type leakage detecting method and apparatus |
| CN101504312A (en) * | 2009-03-16 | 2009-08-12 | 北京航空航天大学 | Optical-fiber acoustic sensor for sound detection |
| CN101729145A (en) * | 2009-11-06 | 2010-06-09 | 山东大学 | DFB fiber laser type fiber-optic microphone and distributive array device thereof |
| CN101778328A (en) * | 2010-01-26 | 2010-07-14 | 北京邮电大学 | Optical fiber microphone |
| CN101808264A (en) * | 2010-02-10 | 2010-08-18 | 中国科学院半导体研究所 | Optical fiber laser microphone |
| CN103439268A (en) * | 2013-09-05 | 2013-12-11 | 安徽大学 | High-sensitivity diaphragm type photoacoustic spectrum sensor based on self-mixing |
| CN103759804A (en) * | 2014-01-23 | 2014-04-30 | 安徽大学 | Method and device for optical fiber white light differential interference non-contact vibration measurement |
| CN103792201A (en) * | 2014-02-26 | 2014-05-14 | 安徽大学 | Light pressure sensor for detecting multi-component gas and detection method thereof |
| CN105424605A (en) * | 2015-11-18 | 2016-03-23 | 安徽大学 | Photoacoustic spectrometry measuring device and method based on low-coherence optical fiber differential interference non-contact vibration measurement |
Non-Patent Citations (1)
| Title |
|---|
| 姜萌、冯巧玲、魏宇峰等: "小型化光声光谱气体传感器研究进展", 《激光与光电子学进展》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107524922A (en) * | 2017-09-30 | 2017-12-29 | 必必优（深圳）科技有限公司 | A kind of pipe leakage infrasonic wave detection apparatus, system and method |
| CN110056784A (en) * | 2019-05-24 | 2019-07-26 | 昆仑杰信（北京）科技有限责任公司 | A kind of round-the-clock leakage monitoring of compressed gas and instant alarming photoelectric detecting system |
| CN111416268A (en) * | 2020-03-23 | 2020-07-14 | 天津大学 | Optical fiber microphone of laser annular cavity |
| CN111416268B (en) * | 2020-03-23 | 2023-10-24 | 天津大学 | Optical fiber microphone with laser ring cavity |
| CN112161931A (en) * | 2020-09-04 | 2021-01-01 | 大连理工大学 | High-sensitivity optical fiber photoacoustic gas detection system and method |
| CN112161931B (en) * | 2020-09-04 | 2022-02-15 | 大连理工大学 | High-sensitivity optical fiber photoacoustic gas detection system and method |
| CN117307988A (en) * | 2023-11-30 | 2023-12-29 | 山东省科学院激光研究所 | Large dynamic optical fiber sensor and system for pipeline leakage detection |
| CN117307988B (en) * | 2023-11-30 | 2024-03-05 | 山东省科学院激光研究所 | Large dynamic optical fiber sensor and system for pipeline leakage detection |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106289669B (en) | 2019-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106289669B (en) | Gas leakage detection device and method based on Low coherence optical fiber microphone | |
| US8346492B2 (en) | Integrated acoustic leak detection system using intrusive and non-intrusive sensors | |
| CN106989703B (en) | A kind of gamut lubrication film thickness supersonic detection device and method | |
| WO2017166801A1 (en) | Device and method for distributed strain temperature simultanious measurement based on optical frequency domain reflection | |
| CN103245454B (en) | Non-intrusive pipeline real-time monitoring, prewarning and fault locating method | |
| CA2893281C (en) | System and method for ultrasonic metering using an orifice meter fitting | |
| CN102183229B (en) | Ultrasonic detection method of scale thickness in pipeline | |
| CN107655552B (en) | A kind of Ultrasonic water meter flow velocity modification method for propagating the time difference and drift error based on non-measured section | |
| CN102944613A (en) | Detecting and positioning system for optical fiber acoustic emission | |
| CN105627107B (en) | A kind of fluid line leaks single-sensor Modal Acoustic Emission time-frequency localization method | |
| Hicke et al. | Condition monitoring of industrial infrastructures using distributed fibre optic acoustic sensors | |
| CN106813108A (en) | A kind of leakage locating method based on speed difference | |
| Adsul et al. | Development of leakage detection system | |
| CN107389144A (en) | A kind of downhole fluid flow-measuring method and flowmeter | |
| Zheng et al. | A beamforming-based joint estimation method for gas pipeline leak localization | |
| CN204086134U (en) | A kind of corrosive pipeline detector | |
| CN106452570A (en) | Optical fiber fault detection system and detection method based on optical fiber phase mediation principle | |
| CN110161115B (en) | Gas component detection method and system based on sound velocity frequency dispersion intensity change rate | |
| CN109030622A (en) | A kind of highly sensitive flexible eddy current array sensor and its monitoring method | |
| CN109188219A (en) | Built-in GIS shelf depreciation ultrasonic wave and light pulse combined detection system and method | |
| CN106483329A (en) | Water pipe flow rate measuring device based on interference-type optical fiber sensing and method | |
| JP2001021384A (en) | Separation detection method by optical fiber sensor | |
| CN110595519A (en) | Pre-buried metallization optical fiber sensor's anticorrosive gas pipeline | |
| CN104279424B (en) | Detection and the method and system of display pipes structural failure situation | |
| US20190017864A1 (en) | Omnidirectional optical fiber bragg gratings for ultrasonic guided wave sensing and associate source location methods |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190426 Termination date: 20210804 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |