CN106989703B - A kind of gamut lubrication film thickness supersonic detection device and method - Google Patents
A kind of gamut lubrication film thickness supersonic detection device and method Download PDFInfo
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- CN106989703B CN106989703B CN201710376266.XA CN201710376266A CN106989703B CN 106989703 B CN106989703 B CN 106989703B CN 201710376266 A CN201710376266 A CN 201710376266A CN 106989703 B CN106989703 B CN 106989703B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
Abstract
The invention discloses a kind of gamut lubrication film thickness supersonic detection device and methods, using ultrasonic wave on lubricant layer the feature of the amplitude spectrum of sound pressure reflection coefficient and phase spectrum to the measurement accuracy complementation of different range lubricating film, for the lubricating film of different-thickness range, the exact value that the ultrasonic wave amplitude spectrum of sound pressure reflection coefficient and phase spectrum on lubricant layer obtain each range lubrication film thickness is respectively adopted, this method can realize the precise measurement of gamut lubrication film thickness by the ultrasonic sensor of single centre frequency, convenience can be provided for the on-line monitoring of tribology element lubricating status.
Description
Technical field
The invention belongs to lubricating status detection technique fields, and in particular to a kind of gamut lubrication film thickness ultrasound detection dress
It sets and method.
Background technique
The tribology element such as bearing, gear, sealing separates mutually move two surface of friction pair by lubricating film, keeps away
Exempt from the direct contact between surface of friction pair, lubricating status determines the secondary greasy property of friction, bearing capacity, running stability
It is the key point of tribology element with the capacity such as service life.The detection of tribology element lubrication film thickness can be lubrication reason
Real example data are provided by research, and provide the information of quantification for the monitoring of tribology element lubricating status, there is important theory
And engineering significance.
Lubrication film thickness detection method mainly has electrical measuring method, flash spotting and supercritical ultrasonics technology at present.Wherein, electrical measuring method needs to sense
Device is contacted with lubricating film upper and lower surface, and it is a kind of that the formation that can learn component structure and lubricating film to the sassafras that rubs, which generates, which to be destroyed and interfere,
Invasive approach；Flash ranging rule needs measurand to provide a transparent window for translucent material or for sensor, can not apply
It is detected in the lubrication film thickness of actual metal material tribology element；Supercritical ultrasonics technology has good straightline propagation special due to ultrasonic wave
Property and strong penetrability, can be applied to the actual metal material sassafras that rubs and learn the detection of element lubrication film thickness, be a kind of excellent non-Jie
Enter formula film thickness detection means, the film thickness detection technique is in recent years by more research and application.
Lubrication film thickness supersonic detection method is divided into ultrasonic wave time-of-flight method, ultrasonic wave according to the difference according to detection model
Resonance method, ultrasonic wave spring model method.Different methods is suitble to the detection of different film thickness ranges, for the biography of single centre frequency
For sensor, there are an indeterminacy areas between ultrasonic resonance method and ultrasonic wave spring model method, moisten in sliding bearing
The applications such as synovial thickness on-line checking, lubrication film thickness range from several microns to micron ranges up to a hundred in change, passing
System in the detection method of sound pressure reflection coefficient amplitude spectrum, is sensed merely by ultrasonic wave on lubricant layer using single centre frequency
Device cannot achieve all standing precise measurement of lubricating film detection range.A kind of solution of engineering is to learn member in the large size sassafras that rubs
The ultrasonic sensor of two different center frequencies is installed in the adjacent position of part, wherein each centre frequency sensor is corresponding different
Detection zone, two different center frequency sensors, which cooperate, completes the detection of gamut lubrication film thickness.However, stringent
For, the measurement position of two centre frequency sensors is not consistent, using the film thickness at two measuring point of immediate vicinity as same
Measuring point as a result, this mode large size rub sassafras learn element application in still receive, but it is small-sized rub sassafras learn element lubrication film thickness
On-line monitoring in can undoubtedly introduce relatively large deviation.Furthermore the detection that gamut lubrication film thickness is completed in two sensor cooperations must
It so can exponentially increase the cost of film thickness detection device.
Therefore, no matter right develop a kind of detection method that gamut lubrication film thickness is accurately detected by single centre frequency
In improve actually rub sassafras learn element lubrication film thickness on-line checking precision still for reduction film thickness supersonic detection device at
This is all of great significance.
Summary of the invention
The purpose of the present invention is to overcome the above shortcomings and to provide a kind of supersonic detection device of gamut lubrication film thickness and
Method makes full use of ultrasonic wave in lubricant layer in conjunction with the amplitude spectrum and phase spectrum of ultrasonic wave sound pressure reflection coefficient on lubricant layer
The amplitude and phase of upper sound pressure reflection coefficient realize lubrication film thickness to the feature of the sensibility complementation of different-thickness range lubricating film
Spend gamut precise measurement.
In order to achieve the above object, a kind of gamut lubrication film thickness supersonic detection device, including ultrasonic sensor surpass
Sonic sensor connects impulse ejection receiving instrument by coaxial cable, and impulse ejection receiving instrument connects oscillography by coaxial cable
Device, oscillograph connect PC by USB.
A kind of gamut lubrication film thickness supersonic detection method, comprising the following steps:
Step 1, selecting centre frequency is the ultrasound piezoelectric element of 10MHz as ultrasonic sensor, is pasted
The back side of the sassafras that rubs element；
Step 2 obtains ultrasonic wave sound pressure reflection coefficient amplitude on lubricant layer by lubrication film thickness supersonic detection device
Spectrum and phase spectrum.
Step 3, using the amplitude spectrum and phase spectrum of sound pressure reflection coefficient of the ultrasonic wave on lubricant layer, for film thickness model
Enclose the lubricating film for 0-10 μm, using ultrasonic wave on lubricant layer sound pressure reflection coefficient amplitude spectrum, pass through ultrasonic wave spring model
Method obtains its accurate film thickness value；The lubricating film for being 45 μm~+∞ for film thickness range, using ultrasonic wave, acoustic pressure is anti-on lubricant layer
Coefficient amplitude spectrum is penetrated, its accurate lubrication film thickness value is obtained by ultrasonic resonance method；
Step 4 is 10 μm~45 μm of lubricating film for film thickness range, using ultrasonic wave on lubricant layer sound pressure reflection
Coefficient phase spectrum, obtains its accurate film thickness value using the phase value of sound pressure reflection coefficient.
In the step 2, the acquisition pattern of the amplitude spectrum of sound pressure reflection coefficient on lubricant layer are as follows: measurement ultrasonic wave first
In the otdr signal that the sassafras to be measured that rubs learns element and Air Interface as reference signal, converted by high-precision Fourier transformation
At frequency-region signal, the amplitude spectrum and phase spectrum that signal obtains reference signal respectively are reflected by the frequency domain；Then ultrasonic wave is measured
Otdr signal on lubricant layer obtains the frequency domain amplitude spectrum and phase spectrum of the reflection signal by same mode；Most
The amplitude spectrum that ultrasonic wave is reflected to signal on lubricant layer afterwards obtains sound pressure reflection coefficient divided by the amplitude spectrum of reference reflection signal
Amplitude spectrum；By the phase spectrum of reference signal subtract ultrasonic wave reflected on lubricant layer signal phase spectrum obtain ultrasonic wave lubricating
The phase spectrum of sound pressure reflection coefficient on layer.
In the step 3, the amplitude spectrum and phase spectrum of ultrasonic wave sound pressure reflection coefficient on lubricant layer, when lubricant layer two
When the material difference of side, the ultrasonic wave amplitude spectrum of sound pressure reflection coefficient and phase spectrum analytical expression on lubricant layer are respectively as follows:
Wherein, | R (f) | it is sound pressure reflection coefficient amplitude spectrum；R12It is ultrasonic wave in incident layer and the reflection for lubricating bed boundary
Coefficient；R23It is ultrasonic wave in lubricant layer and the reflection coefficient for transmiting bed boundary；F is ultrasonic frequency；H is lubricant layer thickness；c2
The velocity of sound for being ultrasonic wave in lubricant layer；ΦRIt (f) is pressure reflection coefficient phase spectrum.
In the step 3, the lubricating film for being 0-10 μm for film thickness range, using ultrasonic wave, acoustic pressure is anti-on lubricant layer
The amplitude spectrum for penetrating coefficient obtains its accurate film thickness value, solution formula by ultrasonic wave spring model method are as follows:
Wherein, Z1For the acoustic impedance of ultrasonic wave incident layer medium；Z3For the acoustic impedance of transmission ultrasonic wave layer medium；ρ2For profit
The density of slip layer medium；ω is ultrasonic angular frequency.
In the step 3, for film thickness range be 45 μm~+∞ lubricating film, using ultrasonic wave on lubricant layer acoustic pressure
Reflection coefficient amplitude spectrum obtains its accurate lubrication film thickness value, solution formula by ultrasonic resonance method are as follows:
Wherein, frequency interval of the Δ f between the adjacent minimum of sound pressure reflection coefficient.
Be 10 μm~45 μm of lubricating film for film thickness range in the step 4, using ultrasonic wave on lubricant layer sound
Reflection coefficient phase spectrum is pressed, its accurate film thickness value is obtained by the relationship of pressure reflection coefficient phase spectrum and film thickness, lubricates film thickness
Degree and the phase of sound pressure reflection coefficient and the analytical function relationship of ultrasonic frequency are as follows:
Compared with prior art, the present invention by by 10MHz ultrasound piezoelectric component affixing in tribology element to be measured
The back side obtains reflection signal of the ultrasonic wave on lubricant layer under the excitation of impulse ejection receiving instrument, reflects signal through oscillograph
It is transferred in PC and is handled after acquisition, the present apparatus passes through while obtaining the amplitude spectrum and phase spectrum of sound pressure reflection coefficient, can be real
The now precise measurement of single centre frequency sensor gamut lubrication film thickness.
The present invention using ultrasonic wave on lubricant layer the amplitude spectrum of sound pressure reflection coefficient and phase spectrum to different range film thickness
Ultrasonic wave is respectively adopted on lubricant layer according to different lubrication film thickness ranges in the feature of the sensibility complementation of measurement accuracy
Amplitude spectrum and phase spectrum obtain the exact value of lubrication film thickness, in conjunction with sound pressure reflection coefficient amplitude spectrum and phase spectrum realize it is complete
The detection of range lubrication film thickness, it is excellent non-that the on-line monitoring that this method can learn element lubricating status for the sassafras that rubs provide one kind
Insertion type detection means.
Detailed description of the invention:
Fig. 1 is a kind of gamut lubrication film thickness supersonic detection device schematic diagram
Fig. 2 is ultrasound piezoelectric component structure schematic diagram used
Fig. 3 is otdr signal of the ultrasonic wave on lubricant layer
Fig. 4 ultrasonic wave sound pressure reflection coefficient amplitude spectrum and phase spectrum and ultrasonic frequency and lubricant layer thickness on lubricant layer
The relationship of product
Fig. 5 is high-precision lubrication film thickness simulated experiment platform
Fig. 6 is the method for the present invention measured value and setting film thickness value comparing result
In figure, 1, ultrasonic sensor；2, ultrasonic pulse emits receiving instrument；3, oscillograph；4,PC；5, piezoelectricity controls
Device；6, spiral micrometer；7, piezoelectric actuator；8, clamping device.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings.
Referring to Fig. 1, a kind of gamut lubrication film thickness supersonic detection device includes ultrasonic sensor 1, supersonic sensing
Device connects impulse ejection receiving instrument 2 by coaxial cable, and impulse ejection receiving instrument 2 connects oscillograph 3, oscillography by coaxial cable
Device 3 connects PC4 by USB interface.
Selecting centre frequency is the ultrasound piezoelectric element of 10MHz as ultrasonic sensor, contour structures such as Fig. 2 institute
Show.Ultrasound piezoelectric element is pasted by adhesive and learns the back side of element in the sassafras to be measured that rubs.The positive and negative anodes of coaxial cable are welded
It connects on the positive and negative anodes of ultrasound piezoelectric element, ultrasound piezoelectric element and coaxial cable is packaged by epoxy resin.
Otdr signal of the ultrasonic wave on lubricant layer is obtained by lubrication film thickness supersonic detection device, as shown in Figure 3.
Ultrasonic wave is reflected letter by the amplitude spectrum and phase spectrum for obtaining frequency-region signal respectively by high-precision Fourier transformation on lubricant layer
Number amplitude spectrum divided by reference signal amplitude spectrum obtain ultrasonic wave sound pressure reflection coefficient on lubricant layer amplitude spectrum；It will refer to
The phase spectrum of signal subtracts phase spectrum acquisition ultrasonic wave sound pressure reflection on lubricant layer that ultrasonic wave reflects signal on lubricant layer
The phase spectrum of coefficient.
Fig. 4 illustrates ultrasonic wave and the amplitude spectrum of sound pressure reflection coefficient and phase spectrum and lubricant layer thickness and surpasses on lubricant layer
The relationship of frequency of sound wave product.For the lubricating film with a thickness of 1-10 μm, spring-loaded floating die is utilized by sound pressure reflection coefficient amplitude spectrum
The exact value of type method formula acquisition lubrication film thickness:
For the lubricating film with a thickness of 45 μm or more, by ultrasonic wave, sound pressure reflection coefficient amplitude spectrum is utilized on lubricant layer
The exact value of ultrasonic resonance method formula acquisition lubrication film thickness:
For the lubricating film with a thickness of 10 μm~45 μm, by ultrasonic wave, pressure reflection coefficient phase spectrum is sharp on lubricant layer
The exact value of lubrication film thickness is obtained with following formula:
Embodiment:
A series of known thickness lubrication film thicknesses are constructed with high-precision lubrication film thickness simulated experiment platform shown in fig. 5 to carry out
For actual measurement, the validity of test method of the present invention is illustrated.Promoted by spiral micrometer 6, piezo controller 5, piezoelectricity
Dynamic device 7, clamping device 8 and PC4 construct a high-precision lubrication film thickness simulated experiment platform, are constructed by the experimental bench a series of
The lubricating film of known thickness, the film thickness detecting device provided through the invention and method measure thickness from 0.1 μm -200 μm
Lubricating film, experimental measurements and setting value are coincide very well, and comparing result is as shown in Figure 6.
Claims (6)
1. a kind of supersonic detection method of gamut lubrication film thickness, which comprises the following steps:
Step 1, selecting centre frequency is the ultrasound piezoelectric element of 10MHz as ultrasonic sensor, is affixed to friction
Learn the back side of element；
Step 2, by lubrication film thickness supersonic detection device obtain ultrasonic wave on lubricant layer sound pressure reflection coefficient amplitude spectrum and
Phase spectrum；
Step 3 is for film thickness range using the amplitude spectrum and phase spectrum of sound pressure reflection coefficient of the ultrasonic wave on lubricant layer
0-10 μm of lubricating film, using ultrasonic wave on lubricant layer sound pressure reflection coefficient amplitude spectrum, obtained by ultrasonic wave spring model method
Obtain its accurate film thickness value；For film thickness range be 45 μm~+∞ lubricating film, using ultrasonic wave on lubricant layer sound pressure reflection system
Number amplitude spectrum obtains its accurate lubrication film thickness value by ultrasonic resonance method；
Step 4 is 10 μm~45 μm of lubricating film for film thickness range, using ultrasonic wave on lubricant layer sound pressure reflection coefficient
Phase spectrum obtains its accurate film thickness value using the phase value of sound pressure reflection coefficient.
2. a kind of supersonic detection method of gamut lubrication film thickness according to claim 1, which is characterized in that the step
In rapid two, the acquisition pattern of the amplitude spectrum of sound pressure reflection coefficient on lubricant layer are as follows: measurement ultrasonic wave is in tribology member to be measured first
Part and the otdr signal of Air Interface are converted to frequency-region signal by high-precision Fourier transformation as reference signal, lead to
The frequency-region signal for crossing reference signal obtains the amplitude spectrum and phase spectrum of reference signal respectively；Then measurement ultrasonic wave is on lubricant layer
Otdr signal, by same mode obtain the reflection signal frequency domain amplitude spectrum and phase spectrum；Finally by ultrasonic wave
The amplitude spectrum that signal is reflected on lubricant layer obtains sound pressure reflection coefficient amplitude spectrum divided by the amplitude spectrum of reference reflection signal；It will ginseng
Examine signal phase spectrum subtract ultrasonic wave reflected on lubricant layer signal phase spectrum obtain ultrasonic wave acoustic pressure on lubricant layer it is anti-
Penetrate the phase spectrum of coefficient.
3. a kind of supersonic detection method of gamut lubrication film thickness according to claim 1, which is characterized in that the step
In rapid three, the amplitude spectrum and phase spectrum of ultrasonic wave sound pressure reflection coefficient on lubricant layer surpass when lubricant layer two layers of material difference
The sound wave amplitude spectrum of sound pressure reflection coefficient and phase spectrum analytical expression on lubricant layer are respectively as follows:
Wherein, | R (f) | it is sound pressure reflection coefficient amplitude spectrum；R12It is ultrasonic wave in incident layer and the reflection coefficient for lubricating bed boundary；
R23It is ultrasonic wave in lubricant layer and the reflection coefficient for transmiting bed boundary；F is ultrasonic frequency；H is lubricant layer thickness；c2For ultrasound
The velocity of sound of the wave in lubricant layer；ΦRIt (f) is pressure reflection coefficient phase spectrum.
4. a kind of supersonic detection method of gamut lubrication film thickness according to claim 1, which is characterized in that the step
It is 0-10 μm of lubricating film for film thickness range in rapid three, using the amplitude spectrum of ultrasonic wave sound pressure reflection coefficient on lubricant layer,
Its accurate film thickness value, solution formula are obtained by ultrasonic wave spring model method are as follows:
Wherein, | R (f) | it is sound pressure reflection coefficient amplitude spectrum；c2The velocity of sound for being ultrasonic wave in lubricant layer；Z1For ultrasonic wave incidence
The acoustic impedance of layer medium；Z3For the acoustic impedance of transmission ultrasonic wave layer medium；ρ2For the density of lubricant layer medium；ω is ultrasonic wave angle
Frequency.
5. a kind of supersonic detection method of gamut lubrication film thickness according to claim 1, which is characterized in that the step
In rapid three, for film thickness range be 45 μm~+∞ lubricating film, using ultrasonic wave on lubricant layer sound pressure reflection coefficient amplitude
Spectrum obtains its accurate lubrication film thickness value, solution formula by ultrasonic resonance method are as follows:
Wherein, c2The velocity of sound for being ultrasonic wave in lubricant layer；Frequency interval of the Δ f between the adjacent minimum of sound pressure reflection coefficient.
6. a kind of supersonic detection method of gamut lubrication film thickness according to claim 1, which is characterized in that the step
Be 10 μm~45 μm of lubricating film for film thickness range in rapid four, using ultrasonic wave on lubricant layer sound pressure reflection coefficient phase
Spectrum obtains its accurate film thickness value, lubrication film thickness and sound pressure reflection system by the relationship of pressure reflection coefficient phase spectrum and film thickness
The analytical function relationship of several phase and ultrasonic frequency are as follows:
Wherein, c2The velocity of sound for being ultrasonic wave in lubricant layer；F is ultrasonic frequency；ρ2For the density of lubricant layer medium；Z1It is super
The acoustic impedance of sound wave incident layer medium；Z3For the acoustic impedance of transmission ultrasonic wave layer medium；ΦRIt (f) is sound pressure reflection coefficient phase
Spectrum.
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