CN106280254A - Filler and preparation method thereof and purposes at the bottom of a kind of low-k moulding type epoxy - Google Patents

Filler and preparation method thereof and purposes at the bottom of a kind of low-k moulding type epoxy Download PDF

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CN106280254A
CN106280254A CN201610667599.3A CN201610667599A CN106280254A CN 106280254 A CN106280254 A CN 106280254A CN 201610667599 A CN201610667599 A CN 201610667599A CN 106280254 A CN106280254 A CN 106280254A
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low
formula
filler
epoxy resin
type epoxy
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王松松
封其立
单玉来
张德伟
孙波
张国
葛笑笑
周佃香
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JIANGSU ZHONGPENG NEW MATERIAL CO Ltd
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JIANGSU ZHONGPENG NEW MATERIAL CO Ltd
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K13/00Use of mixtures of ingredients not covered by one single of the preceding main groups, each of these compounds being essential
    • C08K13/04Ingredients characterised by their shape and organic or inorganic ingredients
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/04Carbon
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3442Heterocyclic compounds having nitrogen in the ring having two nitrogen atoms in the ring
    • C08K5/3445Five-membered rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/54Silicon-containing compounds
    • C08K5/541Silicon-containing compounds containing oxygen
    • C08K5/5435Silicon-containing compounds containing oxygen containing oxygen in a ring
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K7/00Use of ingredients characterised by shape
    • C08K7/16Solid spheres
    • C08K7/18Solid spheres inorganic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/002Physical properties
    • C08K2201/005Additives being defined by their particle size in general
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2203/00Applications
    • C08L2203/20Applications use in electrical or conductive gadgets
    • C08L2203/206Applications use in electrical or conductive gadgets use in coating or encapsulating of electronic parts
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2205/00Polymer mixtures characterised by other features
    • C08L2205/02Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
    • C08L2205/025Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure

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  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Epoxy Resins (AREA)

Abstract

The invention discloses a kind of low-k type (lowk) filler (MUF) at the bottom of moulding type epoxy and its production and use.This MUF is the low of 2 ~ 10% by percetage by weightkEpoxy resin, percetage by weight be 0 ~ 5% biphenyl type epoxy resin, percetage by weight be the low of 2 ~ 10%kThe composition such as coupling agent and accelerator, coloring agent, releasing agent that silica filler that phenolic curing agent, percetage by weight are 80 ~ 96%, percetage by weight are 0.01 ~ 1%.Instead of, with phenolic curing agent, the resin that dielectric constant of the prior art is higher owing to employing the epoxy resin of low-k, the MUF that therefore present invention provides has relatively low dielectric constant and dielectric loss.The MUF that the present invention provides can be widely used for high frequency microelectronics and the field such as the encapsulation of opto-electronic device and manufacture.

Description

Filler and preparation method thereof and purposes at the bottom of a kind of low-k moulding type epoxy
Technical field
The present invention relates to a kind of polymeric material field, filler at the bottom of particularly a kind of low-k moulding type epoxy and Preparation method and purposes.
Background technology
Along with integrated circuit (IC) manufactures the development towards small size Yu high density direction, interconnection delay is increasingly becoming impact One of principal element of IC performance.To this end, novel interconnecting material and interlevel dielectric material have been carried out widely studied by people.Research Result shows, the main cause causing interconnection to postpone is closely related with the dielectric constant of interconnection and interlevel dielectric material.Pass through Years of researches, current people successful Application C μ and low-k (low-k) inter-level dielectric promote the work of components and parts Make speed and reduce power consumption.Compared with traditional silicon dioxide interlayer dielectric material, it is swollen that the material newly developed is generally of heat The defects such as swollen coefficient (CTE) is higher, mechanical strength is poor.Low-k inter-level dielectric does not mate with the CTE between silicon and often exists Higher thermal and mechanical stress is formed between interface.This stress generally requires filler at the bottom of epoxy (μ nderfill) and eliminates.Research is aobvious Show have that glass transition temperature (Tg) is high, modulus μ nderfill material low, dielectric constant characteristic low with loss can be effective Avoid layering and chip rupture, be thus advantageous to improve the reliability of low-k type flip-chip.
In recent years, filler at the bottom of moulding type epoxy (molded μ nderfill, M Μ F) is with its production efficiency height, solidfied material The features such as porosity is low, reliability is excellent, gradually substitute filler (capillary μ at the bottom of traditional capillary type epoxy Nderfill) it is widely applied in flip chip type (flip chip) encapsulates.In low-k type Flip-Chip Using In, M Μ F material, while bearing stress buffer and elimination effect, itself also needs to have low-k feature, to adapt to envelope The performance requirement of the overall low dielectric of dress body.The key component of tradition M Μ F material, including aromatic epoxy resin, phenolic aldehyde tree The dielectric constant of the material such as fat, silicon powder is the highest, it is difficult to meet development and the exploitation of low-k M Μ F material, at present literary composition In offering, the research and development for low-k M Μ F still rarely have report.
Summary of the invention
The technical problem to be solved in the present invention is for the deficiencies in the prior art, it is proposed that one have low-k, Low water absorption, temperature tolerance are excellent, filler at the bottom of the low-k moulding type epoxy of good mechanical performance.The invention solves the problems that is another An outer preparation method that provided low-k M Μ F material is provided and including crystal wafer chip dimension Encapsulation (WLCSP), fan-out-type wafer size encapsulation (FO-WLCSP) etc. are in interior large scale integrated circuit (Μ LSI) encapsulation Application.
The technical problem to be solved in the present invention is achieved through the following technical solutions, a kind of low-k moulding type Filler at the bottom of epoxy, is characterized in, the raw material including following percentage by weight is made:
Low-k epoxy resin 2 ~ 10%;
Biphenyl type epoxy resin 0 ~ 5%;
Low-k phenolic curing agent 2 ~ 10%;
Inorganic filler 80 ~ 96%;
Accelerator 0.01 ~ 0.5%;
Coupling agent 0.1 ~ 1%;
Releasing agent 0.1 ~ 1%;
Coloring agent 0.1 ~ 1%;
Ion capturing agent 0.1 ~ 1%;
Low stress agent 0.01 ~ 0.5%.
The low-that the present invention useskEpoxy and phenolic resin can select fluorine resin, containing alicyclic structure resin (such as hydrogenation Bisphenol-A epoxy, dcpd resin etc.) or containing bulky substituent (such as fluorenyl etc.) resin etc..Result of study shows, polymer The dielectric constant of material is closely related with mole polarizability of its molecular structure and molal volume, have low mole of polarizability with And the polymer of high molal volume often has relatively low dielectric constant.(Maier G, Low dielectric constant polymers for microelectronics, Progress in Polymer Science, 2001,1:3).For For epoxy resin and phenolic resin, the hydroxyl (-OH) in its molecular structure has higher mole polarizability, therefore these trees Fat often shows higher dielectric constant (> 4.0@1MHz).In order to reduce the dielectric constant of epoxy resin and phenolic resin, People have attempted number of ways, such as, introduce low mole of polarizability group in its molecular structure (as containing fluoro substituents, alicyclic ring knot Structure etc.) or high molal volume group (such as naphthalene nucleus, fluorenyl, sulfuryl etc.).Both approach have cooperative effect sometimes, the most permissible Reduce the dielectric constant of resin simultaneously, but (the Og μ ra I. Low dielectric constant that cancels out each other sometimes epoxy resins, in Handbook of Low and High Dielectric Constant Materials and Their Applications, Volμme 1: Materials and Processing, Academic Press, 1999, Pp 213).
In the present invention, epoxy resin used is selected from structure epoxy resin (wherein n=0-10, R=-C shown in formula IxF2x+1, x =1-10), or epoxy resin (wherein n=0-10, the R that structure is as shown in Formula II1=-CxF2x+1, x=1-5 or R1=, R2=- CyF2y+1, y=1-5), or epoxy resin shown in formula III.
(Formulas I)
(Formula II)
(formula III)
The dielectric constant of above-mentioned epoxy resin cured product is between 2.5 ~ 3.5, hence it is evident that less than plain edition epoxy resin cured product (4.0-5.0).It is chosen in particular from epoxy resin (n=0, R=-CF shown in Formulas I3), epoxy resin (n=0, R shown in Formula II1=-CF3), Epoxy resin (n=0, R shown in Formula II1=, R2=-CF3), one in epoxy resin shown in formula III or by any applicable Ratio composition mixture, epoxy resin (n=0, R=-CF shown in preferred formula I3).
In above-mentioned constitutive material, described biphenyl type epoxy resin is selected from structure epoxy resin as shown in formula IV.Wherein, R =-H or-CH3
(formula IV)
In above-mentioned constitutive material, described phenolic curing agent is selected from phenolic resin (wherein n=0-10, the R=-shown in Formula V CxF2x+1, x=1-10), or the phenolic resin that structure is as shown in Formula IV (wherein n=0-10, m=1-3, and m are < n).
(Formula V)
(Formula IV)
Phenolic resin shown in Formula V and Formula IV also can with to benzene aralkyl-type phenol resin, biphenyl aralkyl-type phenol resin, many officials Can group at least one in benzene aralkyl-type phenol resin, copoly type biphenyl aralkyl-type phenol resin or multiple by any Ratio composition mixture applicatory;
In above-mentioned constitutive material, described accelerator is selected from glyoxaline compound, including 2-methylimidazole, 2-ethyl imidazol(e), 2- At least one in ethyl-4-methylimidazole, 2-phenyl-4-methyl-5-hydroxyethyl imidazole, preferably 2-phenyl-4-methyl-5-hydroxyl Ethyl imidazol(e);With at least one in organic phosphine compound;Described organic phosphine compound selected from triphenylphosphine, tributylphosphine, three In (p-methylphenyl) phosphine, three (nonyl phenyl) phosphine, tetraphenyl phosphine-tetraphenylborate, triphenylphosphine-1,4-benzoquinone addition product At least one or multiple in any ratio applicatory composition mixture, triphenylphosphine-1,4-benzoquinone addition product.
In above-mentioned constitutive material, described coupling agent is selected from γ-(2,3-epoxy the third oxygen) propyl trimethoxy silicane (KH- 560), in γ aminopropyltriethoxy silane (KH-550), γ-mercaptan aminopropyl trimethoxysilane (KH-580) extremely One or more mixture formed in any ratio applicatory few, preferably KH-560.
In above-mentioned constitutive material, described releasing agent is selected from native paraffin (bar wax etc.), synthetic wax (Tissuemat E etc.), tristearin In acid, Palmic acid, zinc stearate, calcium stearate, lithium stearate and magnesium stearate at least one or multiple by any applicable Ratio composition mixture, preferably bar wax and Tissuemat E.
In above-mentioned constitutive material, described inorganic filler is selected from spherical fusion SiO2Micropowder, its median (d 50) no More than 15 μm, maximum particle diameter is less than 30 μm.
In above-mentioned constitutive material, described coloring agent is selected from white carbon black.
In above-mentioned constitutive material, described low stress agent is selected from polysiloxanes.
The method preparing above-mentioned M Μ F material that the present invention provides, comprises the steps:
By epoxy resin described above, described phenolic curing agent, described accelerator, described coupling agent, described releasing agent, described low Stressed agent, described inorganic filler mixing after mixing, obtain described M Μ F material.In described mixing step, temperature is 80-120 DEG C, Concretely 80-100 DEG C, 90-110 DEG C or 100-120 DEG C, preferably 90-110 DEG C.
In concrete operations, can extrude mixing in an extruder by above-mentioned each component in required ratio mix homogeneously, obtain Homodisperse mixture, after cooling down, pulverizing, buys cake on pancake making machine, obtains the M Μ F material of required size size.
It addition, the invention described above provide M Μ F material at WLCSP, FO-WLCSP etc. at interior large scale integrated circuit Application in (Μ LSI) encapsulation falls within protection scope of the present invention.
The present invention, by using fluorine-containing type and biphenyl type epoxy resin, is ensureing that prepared M Μ F material has low dielectric On the premise of constant and dielectric loss, also can give the good heat resistance of M Μ F material and mechanical property.With prior art M Μ F material is compared, M Μ F material disclosed by the invention has dielectric constant and dielectric loss is low, heat resistance is good, pack completeness is high, The features such as good mechanical performance, can be widely used for WLCSP, FO-WLCSP etc. in interior large scale integrated circuit (Μ LSI) encapsulation In.
Accompanying drawing explanation
Fig. 1 is dielectric constant and the dielectric loss test result of M Μ F prepared by the present invention.
Detailed description of the invention
Filler at the bottom of a kind of low-k moulding type epoxy, described M Μ F material includes the raw material of following percentage by weight:
Low-k epoxy resin 2 ~ 10%;
Biphenyl type epoxy resin 0 ~ 5%;
Low-k phenolic curing agent 2 ~ 10%;
Inorganic filler 80 ~ 96%;
Accelerator 0.01 ~ 0.5%;
Coupling agent 0.1 ~ 1%;
Releasing agent 0.1 ~ 1%;
Coloring agent 0.1 ~ 1%;
Ion capturing agent 0.1 ~ 1%;
Low stress agent 0.01 ~ 0.5%.
The low-that the present invention useskEpoxy and phenolic resin can select fluorine resin, containing alicyclic structure resin (such as hydrogenation Bisphenol-A epoxy, dcpd resin etc.) or containing bulky substituent (such as fluorenyl etc.) resin etc..Result of study shows, polymer The dielectric constant of material is closely related with mole polarizability of its molecular structure and molal volume, have low mole of polarizability with And the polymer of high molal volume often has relatively low dielectric constant.(Maier G, Low dielectric constant polymers for microelectronics, Progress in Polymer Science, 2001,1:3).For For epoxy resin and phenolic resin, the hydroxyl (-OH) in its molecular structure has higher mole polarizability, therefore these trees Fat often shows higher dielectric constant (> 4.0@1MHz).In order to reduce the dielectric constant of epoxy resin and phenolic resin, People have attempted number of ways, such as, introduce low mole of polarizability group in its molecular structure (as containing fluoro substituents, alicyclic ring knot Structure etc.) or high molal volume group (such as naphthalene nucleus, fluorenyl, sulfuryl etc.).Both approach have cooperative effect sometimes, the most permissible Reduce the dielectric constant of resin simultaneously, but (the Og μ ra I. Low dielectric constant that cancels out each other sometimes epoxy resins, in Handbook of Low and High Dielectric Constant Materials and Their Applications, Volμme 1: Materials and Processing, Academic Press, 1999, Pp 213).
In the present invention, epoxy resin used is selected from structure epoxy resin (wherein n=0-10, R=-C shown in formula IxF2x+1, x =1-10), or epoxy resin (wherein n=0-10, the R that structure is as shown in Formula II1=-CxF2x+1, x=1-5 or R1=, R2=- CyF2y+1, y=1-5), or epoxy resin shown in formula III.
(Formulas I)
(Formula II)
(formula III)
The dielectric constant of above-mentioned epoxy resin cured product is between 2.5 ~ 3.5, hence it is evident that less than plain edition epoxy resin cured product (4.0-5.0).It is chosen in particular from epoxy resin (n=0, R=-CF shown in Formulas I3), epoxy resin (n=0, R shown in Formula II1=-CF3), Epoxy resin (n=0, R shown in Formula II1=, R2=-CF3), one in epoxy resin shown in formula III or by any applicable Ratio composition mixture, epoxy resin (n=0, R=-CF shown in preferred formula I3).
In above-mentioned constitutive material, described biphenyl type epoxy resin is selected from structure epoxy resin as shown in formula IV.Wherein, R =-H or-CH3
(formula IV)
In above-mentioned constitutive material, described phenolic curing agent is selected from phenolic resin (wherein n=0-10, the R=-shown in Formula V CxF2x+1, x=1-10), or the phenolic resin that structure is as shown in Formula IV (wherein n=0-10, m=1-3, and m are < n).
(Formula V)
(Formula IV)
Phenolic resin shown in Formula V and Formula IV also can with to benzene aralkyl-type phenol resin, biphenyl aralkyl-type phenol resin, many officials Can group at least one in benzene aralkyl-type phenol resin, copoly type biphenyl aralkyl-type phenol resin or multiple by any Ratio composition mixture applicatory;
In above-mentioned constitutive material, described accelerator is selected from glyoxaline compound, including 2-methylimidazole, 2-ethyl imidazol(e), 2- At least one in ethyl-4-methylimidazole, 2-phenyl-4-methyl-5-hydroxyethyl imidazole, preferably 2-phenyl-4-methyl-5-hydroxyl Ethyl imidazol(e);With at least one in organic phosphine compound;Described organic phosphine compound selected from triphenylphosphine, tributylphosphine, three In (p-methylphenyl) phosphine, three (nonyl phenyl) phosphine, tetraphenyl phosphine-tetraphenylborate, triphenylphosphine-1,4-benzoquinone addition product At least one or multiple in any ratio applicatory composition mixture, triphenylphosphine-1,4-benzoquinone addition product.
In above-mentioned constitutive material, described coupling agent is selected from γ-(2,3-epoxy the third oxygen) propyl trimethoxy silicane (KH- 560), in γ aminopropyltriethoxy silane (KH-550), γ-mercaptan aminopropyl trimethoxysilane (KH-580) extremely One or more mixture formed in any ratio applicatory few, preferably KH-560.
In above-mentioned constitutive material, described releasing agent is selected from native paraffin (bar wax etc.), synthetic wax (Tissuemat E etc.), tristearin In acid, Palmic acid, zinc stearate, calcium stearate, lithium stearate and magnesium stearate at least one or multiple by any applicable Ratio composition mixture, preferably bar wax and Tissuemat E.
In above-mentioned constitutive material, described inorganic filler is selected from spherical fusion SiO2Micropowder, its median (d 50) no More than 15 μm, maximum particle diameter is less than 30 μm.
In above-mentioned constitutive material, described coloring agent is selected from white carbon black.
In above-mentioned constitutive material, described low stress agent is selected from polysiloxanes.
The method preparing above-mentioned M Μ F material that the present invention provides, comprises the steps:
By epoxy resin described above, described phenolic curing agent, described accelerator, described coupling agent, described releasing agent, described low Stressed agent, described inorganic filler mixing after mixing, obtain described M Μ F material.In described mixing step, temperature is 80-120 DEG C, Concretely 80-100 DEG C, 90-110 DEG C or 100-120 DEG C, preferably 90-110 DEG C.
In concrete operations, can extrude mixing in an extruder by above-mentioned each component in required ratio mix homogeneously, obtain Homodisperse mixture, after cooling down, pulverizing, buys cake on pancake making machine, obtains the M Μ F material of required size size.
It addition, the invention described above provide M Μ F material at WLCSP, FO-WLCSP etc. at interior large scale integrated circuit Application in (Μ LSI) encapsulation falls within protection scope of the present invention.
Below in conjunction with specific embodiment, the present invention is further elaborated, but the present invention is not limited to following example.Institute Method of stating is conventional method if no special instructions.Described material the most all can obtain from open commercial sources.This Fluorine-containing type epoxy resin (n=0, R=-CF shown in Formulas I used in invention3, epoxide equivalent: 355 g/eq) and can be according to document (China Patent CN1962713) synthesis;Fluorine-containing type epoxy resin (n=0, R shown in Formula II used1=, R2=-CF3, epoxide equivalent: 275 g/eq) can close according to document (Jo μ rnal of Applied Polymer Science, 2011,120:148-155) Become;Fluorine-containing type epoxy resin (epoxide equivalent: 272 g/eq) shown in formula III used can according to document (Macromolec μ les, 1996,29:2006-2010) synthesis;Biphenyl type epoxy resin (R=-CH shown in formula IV used3) purchased from Mitsubishi chemistry strain Formula commercial firm (trade name YX-4000H, epoxide equivalent: 186 g/eq).Phenolic curing agent (n=0, R=-CF shown in Formula V used3, hydroxyl Base equivalent: 271 g/eq) can synthesize according to document (Chinese patent CN1962713).Phenolic curing agent shown in Formula IV (n=2, m=1, Hydroxyl equivalent: 230 g/eq) can be according to document (Reactive & F μ nctional Polymers, 2008,68:1185- 1193) synthesis.Biphenyl aralkyl-type epoxy resin as a comparison case, is purchased from Nippon Kayaku K. K's (trade name NC- 3000, epoxide equivalent: 275 g/eq);O-cresol formaldehyde type epoxy resin is purchased from Dainippon Ink Chemicals of Japan (trade name N-665- EXP-S, epoxide equivalent: 200 g/eq).Novolac firming agent as a comparison case, is purchased from Changchun, Taiwan Resins Corporation (business Name of an article 195XL-4, hydroxyl equivalent: 106 g/eq);Biphenyl aralkyl type phenol firming agent, is purchased from Japanese bright and chemical conversion strain formula Commercial firm's (trade name MEH-7851SS, hydroxyl equivalent: 200 g/eq).
Accelerator used is purchased from NSK KCC (trade name: TPP-BQ);Coupling agent γ-(2,3-used Epoxy the third oxygen) propyl trimethoxy silicane (KH-560) is purchased from Nanjing Lian Gui Chemical Co., Ltd. or other company's relative commercial Product;Spherical type molten silicon micropowder used purchased from Admatechs company of Japan (trade name: SQ-CC69, median: 5 μm, Dielectric constant: 3.82@1MHz;Dielectric loss: 0.00002@1MHz);Ion capturing agent used is purchased from Japan's consonance chemical industry Co., Ltd. (trade name: DHT-4A);Releasing agent used is purchased from Honeywell Corp. USA (trade name: AC316A);Charcoal used Black purchased from Mitsubishi KCC (trade name: MA-600);Described low stress agent is purchased from Dow Corning Corporation of Japan (commodity Name: SF-8421).
The dielectric constant of M Μ F and dielectric loss use Agilent 4291B system test, and test temperature is 30oC, test Frequency is 102~1010Hz.Before test, sample is 100oC is vacuum dried 8h.
M Μ F Packing character evaluation methodology: use ultrasonic scanning microscope (C-SAM, Sonoscan company of the U.S.) to investigate envelope Between chip after dress and substrate, the bubble in M Μ F has nil case, and 30 chips of encapsulation carry out Packing character investigation altogether.C-SAM sweeps Retouch, exist between chip and M Μ F the chip-count of bubble less than 3 for excellent, otherwise for poor.The flip chip ball grid array used Encapsulation (FC-BGA) size is as follows: chip size: 5 × 5 × 0.2 mm;Substrate size: 20 × 20 × 0.5 mm;Space between solder balls: 150 μm;Slit separation between chip and substrate: 70 μm.
Spiral flow length is tested: use transfer moIding machine to inject in mould by M Μ F material, injection temperature: 175oC, Injection pressure: 7.0 MPa, pressing time: 120s, test M Μ F length of flow (cm).
Gel time: hot plate method, is heated to 175 ± 1 by electric hot plateoC, takes 2-3g sample powder and is placed on electric hot plate, powder Material is terminal when gradually being become colloidal state by fluid, reads required time.
Hygroscopicity is tested: powder is prepared as 80 × 10 × 4 mm battens, puts into and carry out 24h steaming and decocting in deionized water, point Weight W of batten before other experiment with computing1Weight W with the batten that absorbs water after test2, by (W2-W1)/W1× 100% calculates moisture absorption Rate.
Embodiment 1
The preparation of M Μ F material, raw material is selected from the component of following percetage by weight:
Fluorine-containing epoxy resin (Formulas I, n=0, R=-CF3) 3.44 %;
Biphenyl epoxy resin (formula IV, R=-CH3) 2.3%
Phenolic curing agent (Formula IV, n=2, m=1) 5.06%;
Accelerator (TPP-BQ) 0.3%;
Coupling agent (KH-560) 0. 2%;
Releasing agent (AC316A) 0.2%;
Coloring agent (MA-600) 0.3%
Ion capturing agent (DHT-4A) 0.1%
Low stress agent (SF-8421) 0.1 %;
Spherical fusion silica flour (SQ-CC69) 88%.
By said components in an extruder in 100oMixing extrusion under the conditions of C, obtains homodisperse M Μ F, cooling, powder Broken.Pancake making machine is beaten cake, obtains the M Μ F of required size size.Additionally above-mentioned M Μ F is made various in transfer moIding machine Sample, carries out properties test, and result is listed in table 1.
The dielectric constant test result of made M Μ F is as shown in Figure 1.
Embodiment 2
The preparation of M Μ F material, raw material is selected from the component of following percetage by weight:
Fluorine-containing epoxy resin (Formula II, n=0, R1= , R2=-CF3) 3.0%;
Biphenyl epoxy resin (formula IV, R=-CH3) 1.97%
Phenolic curing agent (Formula V, n=0, R=-CF3) 5.83%;
Accelerator (TPP-BQ) 0.3%;
Coupling agent (KH-560) 0. 2%;
Releasing agent (AC316A) 0.2%;
Ion capturing agent (DHT-4A) 0.1%
Coloring agent (MA-600) 0.3%
Low stress agent (SF-8421) 0.1 %;
Spherical fusion silica flour (SQ-CC69) 88%.
By said components in an extruder in 100oMixing extrusion under the conditions of C, obtains homodisperse M Μ F, cooling, powder Broken.Pancake making machine is beaten cake, obtains the M Μ F of required size size.Additionally above-mentioned M Μ F is made various in transfer moIding machine Sample, carries out properties test, and result is listed in table 1.
The dielectric constant test result of made M Μ F is as shown in Figure 1.
Embodiment 3
The preparation of M Μ F material, raw material is selected from the component of following percetage by weight:
Fluorine-containing epoxy resin (formula III) 5.85%;
Phenolic curing agent (Formula IV, n=2, m=1) 4.95%;
Accelerator (TPP-BQ) 0.3%;
Coupling agent (KH-560) 0. 2%;
Releasing agent (AC316A) 0.2%;
Coloring agent (MA-600) 0.3%
Ion capturing agent (DHT-4A) 0.1%
Low stress agent (SF-8421) 0.1 %;
Spherical fusion silica flour (SQ-CC69) 88%.
By said components in an extruder in 100oMixing extrusion under the conditions of C, obtains homodisperse M Μ F, cooling, powder Broken.Pancake making machine is beaten cake, obtains the M Μ F of required size size.Additionally above-mentioned M Μ F is made various in transfer moIding machine Sample, carries out properties test, and result is listed in table 1.
The dielectric constant test result of made M Μ F is as shown in Figure 1.
Comparative example 1
The preparation of M Μ F material, raw material is selected from the component of following percetage by weight:
Biphenyl aralkyl epoxy resin (NC3000) 6.25%;
Biphenyl aralkyl phenolic curing agent (MEH-7851SS) 4.55%;
Accelerator (TPP-BQ) 0.3%;
Coupling agent (KH-560) 0. 2%;
Releasing agent (AC316A) 0.2%;
Coloring agent (MA-600) 0.3%
Ion capturing agent (DHT-4A) 0.1%
Low stress agent (SF-8421) 0.1 %;
Spherical fusion silica flour (SQ-CC69) 88%.
By said components in an extruder in 100oMixing extrusion under the conditions of C, obtains homodisperse M Μ F, cooling, powder Broken.Pancake making machine is beaten cake, obtains the M Μ F of required size size.Additionally above-mentioned M Μ F is made various in transfer moIding machine Sample, carries out properties test, and result is listed in table 1.
The dielectric constant test result of made M Μ F is as shown in Figure 1.
Comparative example 2
The preparation of M Μ F material, raw material is selected from the component of following percetage by weight:
O-cresol formaldehyde epoxy resin (N-665-EXP-S) 7.06%;
Novolac firming agent (195XL-4) 3.74%;
Accelerator (TPP-BQ) 0.3%;
Coupling agent (KH-560) 0. 2%;
Releasing agent (AC316A) 0.2%;
Coloring agent (MA-600) 0.3%
Ion capturing agent (DHT-4A) 0.1%
Low stress agent (SF-8421) 0.1 %;
Spherical fusion silica flour (SQ-CC69) 88%.
By said components in an extruder in 100oMixing extrusion under the conditions of C, obtains homodisperse M Μ F, cooling, powder Broken.Pancake making machine is beaten cake, obtains the M Μ F of required size size.Additionally above-mentioned M Μ F is made various in transfer moIding machine Sample, carries out properties test, and result is listed in table 1.
The dielectric constant test result of made M Μ F is as shown in Figure 1.
Above-described embodiment is as shown in table 1 with the performance of the M Μ F that comparative example prepares.
Table 1 implementation result
It can be seen that the M Μ F that the present invention provides is either in dielectric constant and dielectric loss, mobility, fillibility and solidification Property aspect is superior to prior art M Μ F(comparative example 1).Comparative example 2 owing to have employed low-k epoxy resin and phenolic resin, because of This dielectric constant is suitable with the M Μ F that the present invention provides with dielectric loss, but owing to not using biphenyl type epoxy resin, causes it The aspects such as its mobility and fillibility are below the M Μ F that the present invention provides.

Claims (10)

1. filler at the bottom of a low-k moulding type epoxy, it is characterised in that be made up of the raw material of following percentage by weight:
Low-k epoxy resin 2 ~ 10%;
Biphenyl type epoxy resin 0 ~ 5%;
Low-k phenolic curing agent 2 ~ 10%;
Inorganic filler 80 ~ 96%;
Accelerator 0.01 ~ 0.5%;
Coupling agent 0.1 ~ 1%;
Releasing agent 0.1 ~ 1%;
Coloring agent 0.1 ~ 1%;
Ion capturing agent 0.1 ~ 1%;
Low stress agent 0.01 ~ 0.5%.
Low dielectric the most according to claim 1 Filler at the bottom of constant moulding type epoxy, it is characterised in that: described low-k epoxy resin is selected from structure epoxy shown in formula I Resin (wherein n=0-10, R=-CxF2x+1, x=1-10), or epoxy resin (wherein n=0-10, the R that structure is as shown in Formula II1=- CxF2x+1, x=1-5 or R1=, R2=-CyF2y+1, y=1-5), or structure epoxy resin as shown in formula III:
(Formulas I)
(Formula II)
(formula III)
It is chosen in particular from epoxy resin (n=0, R=-CF shown in Formulas I3), epoxy resin (n=0, R shown in Formula II1=-CF3), Formula II institute Show epoxy resin (n=0, R1=, R2=-CF3), a kind of in epoxy resin shown in formula III or form in any proportion mixed Compound, epoxy resin (n=0, R=-CF shown in preferred formula I3).
Filler at the bottom of low-k moulding type epoxy the most according to claim 1, it is characterised in that: described biphenyl type ring Epoxy resins is selected from structure epoxy resin as shown in formula IV, wherein, R=-H or-CH3,
(formula IV).
Filler at the bottom of low-k moulding type epoxy the most according to claim 1, it is characterised in that: described phenolic cure Agent is selected from phenolic resin (wherein n=0-10, the R=-C shown in Formula VxF2x+1, x=1-10), or the phenolic aldehyde that structure is as shown in Formula IV Resin (wherein n=0-10, m=1-3, and m < n):
(Formula V)
(Formula IV)
Phenolic resin shown in Formula V and Formula IV also can with to benzene aralkyl-type phenol resin, biphenyl aralkyl-type phenol resin, many officials Can group at least one in benzene aralkyl-type phenol resin, copoly type biphenyl aralkyl-type phenol resin or multiple by any Ratio composition mixture applicatory.
Filler at the bottom of low-k moulding type epoxy the most according to claim 1, it is characterised in that: described accelerator choosing From glyoxaline compound or organic phosphine compound, described glyoxaline compound includes 2-methylimidazole, 2-ethyl imidazol(e), 2-second At least one in base-4-methylimidazole, 2-phenyl-4-methyl-5-hydroxyethyl imidazole, preferably 2-phenyl-4-methyl-5-hydroxyl second Base imidazoles;Described organic phosphine compound selected from triphenylphosphine, tributylphosphine, three (p-methylphenyl) phosphine, three (nonyl phenyl) phosphine, In tetraphenyl phosphine tetraphenylborate, triphenylphosphine-1,4-benzoquinone (TPP-BQ) addition product at least one or multiple by any ratio The mixture of example composition, triphenylphosphine-1,4-benzoquinone addition product.
Filler at the bottom of low-k moulding type epoxy the most according to claim 1, it is characterised in that: described coupling agent choosing From g-(2,3-epoxy the third oxygen) propyl trimethoxy silicane (KH-560), g-aminopropyltriethoxywerene werene (KH-550), g- At least one in mercaptan aminopropyl trimethoxysilane (KH-580) or the multiple mixture formed in any proportion, preferably KH-560。
Filler at the bottom of low-k moulding type epoxy the most according to claim 1, it is characterised in that: described releasing agent choosing In native paraffin, synthetic wax, stearic acid, Palmic acid, zinc stearate, calcium stearate, lithium stearate and magnesium stearate at least one Plant or the multiple mixture formed in any proportion, preferably bar wax or Tissuemat E.
Filler at the bottom of low-k moulding type epoxy the most according to claim 1, it is characterised in that: described inorganic filler Selected from spherical fusion quartz (SiO2) micropowder, the median of above-mentioned inorganic filler (d 50) less than 15 μm, maximum particle diameter is not More than 30 μm.
9. the preparation method of filler at the bottom of the low-k moulding type epoxy described in claim 1, it is characterised in that include as follows Step:
(1) by biphenyl type epoxy resin shown in low-k epoxy resin, formula IV shown in Formulas I or Formula II or formula III, Formula V or Low-k phenolic curing agent, described accelerator, described coupling agent, described releasing agent, described low stress agent, institute described in Formula IV Stating after inorganic filler mixes mixing, obtain filler at the bottom of described low-k moulding type epoxy, in described mixing step, temperature is 80-120 DEG C, specially 80-100 DEG C, 90-110 DEG C or 100-120 DEG C, preferably 90-110 DEG C;
(2) filler at the bottom of prepared low-k moulding type epoxy is bought cake on pancake making machine, obtain the low of required size size Filler at the bottom of dielectric constant moulding type epoxy.
10. the purposes of filler at the bottom of a low-k moulding type epoxy as claimed in claim 1, it is characterised in that: this is low The answering in WLCSP, FO-WLCSP microelectronic device package with optoelectronic device packaging of filler at the bottom of dielectric constant moulding type epoxy With.
CN201610667599.3A 2016-08-15 2016-08-15 Filler and preparation method thereof and purposes at the bottom of a kind of low-k moulding type epoxy Pending CN106280254A (en)

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CN109401203A (en) * 2018-11-30 2019-03-01 江苏中鹏新材料股份有限公司 Environmental protection typed gold color epoxy mold sealing material and preparation method thereof
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