CN106270842B - A kind of processing unit (plant) and method for suppressing PET microfiber dispersion corrosion - Google Patents

A kind of processing unit (plant) and method for suppressing PET microfiber dispersion corrosion Download PDF

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Publication number
CN106270842B
CN106270842B CN201610844656.0A CN201610844656A CN106270842B CN 106270842 B CN106270842 B CN 106270842B CN 201610844656 A CN201610844656 A CN 201610844656A CN 106270842 B CN106270842 B CN 106270842B
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displacement platform
microfabricated electrodes
metalwork
corroded
insulating boot
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CN106270842A (en
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张旻
胡艳涛
王晓浩
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Shenzhen Graduate School Tsinghua University
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Shenzhen Graduate School Tsinghua University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H11/00—Auxiliary apparatus or details, not otherwise provided for

Abstract

A kind of processing unit (plant) and method for suppressing PET microfiber dispersion corrosion, the device include：Reservoir；Microfabricated electrodes；High frequency pulse power supply；Vertical displacement platform, for driving the microfabricated electrodes to realize the vertical feed campaign needed for processing；Insulating boot, the insulating boot are enclosed in the periphery of the microfabricated electrodes；Three-D displacement platform, for drive the horizontal xy of the insulating boot and the vertical displacement platform realization to and vertical z to motion；The upright position of wherein described insulating boot is from the z of the three-D displacement platform to motion control, the vertical feed campaign of the microfabricated electrodes is controlled by the vertical displacement platform, and the motion of the flat scannings of the microfabricated electrodes is from the xy of the three-D displacement platform to motion control.The processing unit (plant) of the present invention and the dispersion corrosion on processing method both inhibitable type chamber surface, the influence that can also avoid fixed insulation layer from processing milling side wall.

Description

A kind of processing unit (plant) and method for suppressing PET microfiber dispersion corrosion
Technical field
The present invention relates to a kind of processing unit (plant) and method for suppressing PET microfiber dispersion corrosion.
Background technology
PET microfiber is using the method for Anodic dissolving, by the manufacture skill of micro parts machine-shaping Art.Due to electrical-chemistry method have instrument is lossless, rapidoprint scope is wide, after processing piece surface without deformation and recast layer etc. Advantage, turn into one of key technology in high-accuracy industrial production.But in the very high PET microfiber neck of required precision In domain, because the dispersion corrosion of electric current causes faint also to corrode outside machining area, processing locality is set to be deteriorated, therefore in order to Improving machining accuracy needs to reduce dispersion corrosion phenomenon by various measures.
Suppressing dispersion corrosion at present has following several approach：Select suitable electrolyte, improve pole clearance flow field and electricity , using high frequency ultra-narrow pulse power supply etc..The above measure is the electric current distribution situation for improving workpiece machining surface, Increase processing district as far as possible and the dissolution velocity in non-processing section is poor, improve processing locality.But when using cylindrical electrode When carrying out electrochemistry milling microlaser cavity, die cavity upper surface is still inevitably influenceed by dispersion corrosion, causes surface matter Amount deteriorates.According to the method for applying insulating layer coating in tool-electrode side wall, side wall processing during pocketing is influenced whether again.
The content of the invention
It is a primary object of the present invention to for the upper surface dispersion corrosion in the micro- Milling Process of existing electrochemistry, instrument electricity Pole lateral wall insulation processing does not have the problems such as practicality, there is provided a kind of processing unit (plant) for suppressing PET microfiber dispersion corrosion And the dispersion corrosion of method, both inhibitable type chamber surface, the influence that can also avoid fixed insulation layer from processing milling side wall.
To achieve the above object, the present invention uses following technical scheme：
A kind of processing unit (plant) for suppressing PET microfiber dispersion corrosion, including：
Reservoir, for placing the electrolyte used in electrochemical machining process, metalwork to be corroded is placed in liquid storage tank In, submerged by the electrolyte；
Microfabricated electrodes, the microfabricated electrodes and the metalwork arranged opposite to be corroded；
High frequency pulse power supply, for loading high-frequency impulse between the microfabricated electrodes and the metalwork to be corroded Electric signal so that the electrolyte is processed on the metalwork to be corroded；
Vertical displacement platform, for driving the microfabricated electrodes to realize the vertical feed campaign needed for processing；
Insulating boot, the insulating boot are enclosed in the periphery of the microfabricated electrodes；
Three-D displacement platform, for drive the horizontal xy of the insulating boot and the vertical displacement platform realization to and it is vertical Z is to motion；
The upright position of wherein described insulating boot is electric from the z of the three-D displacement platform to motion control, the microfabrication The vertical feed campaign of pole is controlled by the vertical displacement platform, and the flat scanning of the microfabricated electrodes is moved by the three-dimensional The xy of displacement platform is to motion control.
Further：
The sophisticated radius of corner of the microfabricated electrodes is 10~500nm.
The microfabricated electrodes are the needle-like or cylindrical electrode that tungsten, platinum or gold make.
The electrolytic solution is nitrate or chloride or alkali electrolytic solution.
The internal diameter of the insulating boot is bigger 1-2 μm than the microfabricated electrodes external diameter.
The insulating boot and the microfabricated electrodes concentric locating.
The high frequency pulse power supply parameter is 1~5V including voltage magnitude, and frequency is 1~500MHz, and pulse width is 0.5ns~500ns, processing electric current density value are 2~10mA/cm2。
A kind of PET microfiber method using described device, including：
The three-D displacement platform z moves the insulating boot to driving the vertical displacement platform and the insulating boot to move To on the upside of the metalwork to be corroded；
High-frequency impulse electric signal, the three-dimensional position are loaded between the microfabricated electrodes and the metalwork to be corroded Moving stage xy takes the microfabricated electrodes to the drive vertical displacement platform and treats corrosion gold described according to the path pre-established Belong to scanning machining on part, the vertical displacement platform z hangs down to the drive microfabricated electrodes relative to the metalwork to be corroded Straight-in feed is processed.
Further：
Before horizontal processing is started, the microfabricated electrodes are first made vertically to enter relative to the metalwork to be corroded Give, the microfabricated electrodes are controlled by monitoring the current value between the microfabricated electrodes and the metalwork to be corroded With the relative feed speed of the metalwork to be corroded, feed, examining according to First Speed before detecting that electric current is undergone mutation Measure and feed according to the second speed less than the First Speed after electric current is undergone mutation and entered with the processing electric current density of setting Row processing, reaches the working depth needed for structure.
The First Speed is 5~20 μm/s, and the second speed is 1~10 μm/s.
When needing to carry out the processing of milling side wall, the vertical displacement platform z stretches out in the drive microfabricated electrodes Enough length outside the insulating boot, to realize that milling side wall is processed.
Beneficial effects of the present invention have：
The present invention proposes a kind of processing unit (plant) for suppressing PET microfiber dispersion corrosion, by machined electrode periphery Placement insulating boot is simultaneously processed the design of control by vertical displacement platform and three-D displacement platform, and both inhibitable type chamber surface was miscellaneous Corrosion is dissipated, effectively improves the machining accuracy of microfabricated electrodes, it is in the past right using fixed insulation layer in electrode sidewall also to avoid The harmful effect that the processing of milling side wall is brought.On the one hand, insulating boot redistributes the current density around machined electrode, mainly Machining area is concentrated on, reduces the current density of electrode sidewall, suppresses non-processing zonal corrosion, improves machining accuracy, through surveying Obtainable minimum process line width is up to 100nm after machining for examination, higher than obtaining for the common process equipment using identical parameters The processing line width arrived.On the other hand, machined electrode can avoid insulating relative to insulating boot in the mobilizable design of vertical direction Cover impacts to the processing of milling side wall.Meanwhile realize that the structure of the device is simple, and it is exhausted to carry out electrode sidewall in processing The PROCESS FOR TREATMENTs such as edge, process operation is simple, can be applied in the electrical-chemistry method of common plane structure and three-dimensional structure, has wide General applicability.
Brief description of the drawings
Fig. 1 is the processing unit (plant) structural representation of the suppression PET microfiber dispersion corrosion of an embodiment of the present invention Figure.
Embodiment
Embodiments of the present invention are elaborated below.It is emphasized that what the description below was merely exemplary, The scope being not intended to be limiting of the invention and its application.
As shown in figure 1, in one embodiment, a kind of processing unit (plant) for suppressing PET microfiber dispersion corrosion, bag Reservoir 1, high frequency pulse power supply 3, microfabricated electrodes 4, vertical displacement platform 5, three-D displacement platform 6, insulating boot 7 are included, wherein, storage Liquid bath 1 is used to place the electrolyte 2 used in electrochemical machining process, and metalwork 8 to be corroded is placed in liquid storage tank, described Electrolyte 2 submerges；Microfabricated electrodes 4 and the arranged opposite of metalwork 8 to be corroded；High frequency pulse power supply 3 is used for described High-frequency impulse electric signal is loaded between microfabricated electrodes 4 and the metalwork to be corroded 8 so that the electrolyte 2 is described Processed on metalwork 8 to be corroded；Vertical displacement platform 5 is used to drive the microfabricated electrodes 4 to realize vertically entering needed for processing To motion, required vertical displacement is realized；Insulating boot 7 is enclosed in the periphery of the microfabricated electrodes 4；Three-D displacement platform 6 is used In drive the insulating boot 7 and the vertical displacement platform 5 realize horizontal xy to and vertical z to motion；It is wherein described exhausted The upright position of edge cover 7 is from the z of the three-D displacement platform 6 to motion control, the vertical feed campaign of the microfabricated electrodes 4 Controlled by the vertical displacement platform 5, the motion of the flat scannings of the microfabricated electrodes 4 from the three-D displacement platform 6 xy to Motion control.
Wherein electrolyte 2, microfabricated electrodes 4, metalwork to be corroded 8 form electrochemical system, the structure of metalwork 8 to be corroded Into the anode of electrochemical system, the microfabricated electrodes 4 form the negative electrode of electrochemical system；During work, high frequency pulse power supply 3 High-frequency impulse electric signal is loaded between the microfabricated electrodes 4 and the metalwork to be corroded 8 so that the electrolyte exists Processed on the metalwork to be corroded.The metalwork to be corroded is the nickel or silicon of electrically conductive material.The reservoir 1 can be with For being reclaimed in electrochemical machining process and recycling electrolyte.
Insulating boot 7 can use hollow glass insulating boot.Insulating boot 7 plays the peripheral insulative effect of microfabricated electrodes 4, Improve the CURRENT DISTRIBUTION of machining area.Insulating boot 7 can vertically move with three-D displacement platform 6, be adjusted to required position.Insulating boot 7 can also be other non-conducting materials, and it needs to be customized according to the machined electrode,
In a preferred embodiment, the sophisticated radius of corner of the microfabricated electrodes 4 is 10~500nm.
In a preferred embodiment, the microfabricated electrodes 4 are the needle-like or cylindrical electrode 4 that tungsten, platinum or gold make.
In a preferred embodiment, the electrolytic solution is nitrate or chloride or alkali electrolytic solution.
In a preferred embodiment, the internal diameter of the insulating boot 7 is bigger 1-2 μm than the external diameter of microfabricated electrodes 4.
In a preferred embodiment, the insulating boot 7 and the concentric locating of microfabricated electrodes 4.
In a preferred embodiment, the parameter of high frequency pulse power supply 3 is 1~5V including voltage magnitude, frequency is 1~ 500MHz, pulse width are 0.5ns~500ns, and processing electric current density value is 2~10mA/cm2。
A kind of PET microfiber method using described device, including：
The three-D displacement platform 6z makes the insulating boot 7 to driving the vertical displacement platform 5 and the insulating boot 7 to move It is moved to the upside of metalwork 8 to be corroded；Preferably, it is 1-2 μm with the gap on the upside of metalwork to be corroded；
High-frequency impulse electric signal, the three-dimensional are loaded between the microfabricated electrodes 4 and the metalwork to be corroded 8 Displacement platform 6 is taken the microfabricated electrodes 4 to the drive vertical displacement platform 5 in xy and treated according to the path pre-established described Corrode scanning machining on metalwork 8, the vertical displacement platform 5 treats corruption to the drive microfabricated electrodes 4 in z relative to described Lose metalwork vertical feed processing.
Further：
Before horizontal processing is started, the microfabricated electrodes 4 are first made vertically to enter relative to the metalwork 8 to be corroded Give, the microfabrication electricity is controlled by monitoring the current value between the microfabricated electrodes 4 and the metalwork to be corroded 8 Pole 4 and the relative feed speed of the metalwork 8 to be corroded, feed before detecting that electric current is undergone mutation according to First Speed, After detecting that electric current is undergone mutation according to less than the First Speed second speed feeding and it is close with the processing electric current of setting Degree is processed, and reaches the working depth needed for structure.
The First Speed is 5~20 μm/s, and the speed of the second speed is 1~10 μm/s.
When needing to carry out the processing of milling side wall, the vertical displacement platform 5z stretches out to the drive microfabricated electrodes 4 The enough length outside the insulating boot 7, to realize that milling side wall is processed.
The operation principle and the course of work of specific embodiment described further below.
Glass insulation cover is installed on three-D displacement platform, and the three-D displacement platform can realize that xyz three-dimensionals are moved, described vertical Displacement platform installation is positioned above, and then drives the insulating boot and machined electrode motion.The three-D displacement platform and hang down Straight displacement platform controls respectively, and vertical displacement platform can independently drive microfabricated electrodes vertical feed.The insulating boot it is vertical By the z direction controllings of three-D displacement platform, the feed motion of the machined electrode is controlled by vertical displacement platform, described to process electricity for position By the xy direction controllings of the three-D displacement platform, both realize that the tool-electrode is treated described at collocation for the flat scanning motion of pole Corrode metalwork top offset, machined electrode is protected by the insulating boot described in makespan, is played lateral wall insulation effect, is improved and add Work precision.
When being processed using above-mentioned suppression dispersion corrosion device, the z-axis of three-D displacement platform is first controlled to drive the insulation Cover is moved on the upside of the metalwork to be corroded, and both gaps are 1-2 μm, form machining area, the region can redistribute Current density, current density is concentrated mainly near the insulating boot internal diameter, reach the purpose for suppressing dispersion corrosion, it is processed Cheng Zhongke keeps both relative positions constant.High frequency arteries and veins is loaded between the microfabricated electrodes and the metalwork to be corroded Electric signal is rushed, the three-D displacement platform and vertical displacement platform drive the microfabricated electrodes according to the path pre-established in institute State the enterprising water-filling simple scan of metalwork to be corroded and vertical feed processing.
It is preferred that before horizontal processing electrolysis is started, the microfabricated electrodes are first made to treat corrosion gold relative to described Belong to part vertical feed, it is described micro- to control by monitoring the current value between the microfabricated electrodes and the metalwork to be corroded The relative feed speed of fining-off electrode and the metalwork to be corroded, according to First Speed before detecting that electric current is undergone mutation Feeding, according to the second speed feeding less than the First Speed and with the processing electricity of setting after detecting that electric current is undergone mutation Current density is processed, and reaches the working depth needed for structure.More preferably, the First Speed is arranged to 5~20um/s, described Second speed is arranged to 1~10 μm/s.
Above content is to combine specific/preferred embodiment further description made for the present invention, it is impossible to is recognized The specific implementation of the fixed present invention is confined to these explanations.For general technical staff of the technical field of the invention, Without departing from the inventive concept of the premise, it can also make some replacements or modification to the embodiment that these have been described, And these are substituted or variant should all be considered as belonging to protection scope of the present invention.

Claims (11)

  1. A kind of 1. processing unit (plant) for suppressing PET microfiber dispersion corrosion, it is characterised in that including：
    Reservoir, for placing the electrolyte used in electrochemical machining process, metalwork to be corroded is placed in liquid storage tank, quilt The electrolyte submergence；
    Microfabricated electrodes, the microfabricated electrodes and the metalwork arranged opposite to be corroded；
    High frequency pulse power supply, for loading high-frequency impulse telecommunications between the microfabricated electrodes and the metalwork to be corroded Number so that the electrolyte is processed on the metalwork to be corroded；
    Vertical displacement platform, for driving the microfabricated electrodes to realize the vertical feed campaign needed for processing；
    Insulating boot, the insulating boot are enclosed in the periphery of the microfabricated electrodes；
    Three-D displacement platform, for drive the horizontal xy of the insulating boot and the vertical displacement platform realization to and vertical z to Motion；
    The upright position of wherein described insulating boot from the z of the three-D displacement platform to motion control, the microfabricated electrodes Vertical feed campaign is controlled by the vertical displacement platform, and the flat scanning of the microfabricated electrodes is moved by the three-D displacement The xy of platform is to motion control.
  2. 2. processing unit (plant) according to claim 1, it is characterised in that the sophisticated radius of corner of the microfabricated electrodes For 10~500nm.
  3. 3. processing unit (plant) according to claim 1, it is characterised in that the microfabricated electrodes are that tungsten, platinum or gold make Needle-like or cylindrical electrode.
  4. 4. processing unit (plant) according to claim 1, it is characterised in that the electrolyte is nitrate or chloride or alkali electricity Solve solution.
  5. 5. processing unit (plant) according to claim 1, it is characterised in that the internal diameter of the insulating boot is than microfabrication electricity Pole external diameter is big 1-2 μm.
  6. 6. processing unit (plant) according to claim 5, it is characterised in that the insulating boot and the microfabricated electrodes are concentric Positioning.
  7. 7. according to the processing unit (plant) described in any one of claim 1 to 6, it is characterised in that the high frequency pulse power supply parameter bag It is 1~5V to include voltage magnitude, and frequency is 1~500MHz, and pulse width is 0.5ns~500ns, processing electric current density value is 2~ 10mA/cm2。
  8. 8. a kind of usage right requires the PET microfiber method of the processing unit (plant) described in any one of 1-7, it is characterised in that Including：
    The three-D displacement platform z makes the insulating boot be moved to institute to driving the vertical displacement platform and the insulating boot to move State on the upside of metalwork to be corroded；
    High-frequency impulse electric signal, the three-D displacement platform are loaded between the microfabricated electrodes and the metalwork to be corroded Xy takes the microfabricated electrodes according to the path pre-established in the metalwork to be corroded to the drive vertical displacement platform Upper scanning machining, the vertical displacement platform z vertically enter to the drive microfabricated electrodes relative to the metalwork to be corroded To processing.
  9. 9. processing method according to claim 8, it is characterised in that before horizontal processing is started, first make described fine Machined electrode treats corrosion gold by monitoring the microfabricated electrodes relative to the metalwork vertical feed to be corroded with described Belong to the current value between part to control the relative feed speed of the microfabricated electrodes and the metalwork to be corroded, detecting Electric current is fed before undergoing mutation according to First Speed, according to less than the First Speed after detecting that electric current is undergone mutation Two speed are fed and are processed with the processing electric current density of setting, reach the working depth needed for structure.
  10. 10. processing method according to claim 9, it is characterised in that the First Speed is 5~20 μm/s, described Two speed are 1~10 μm/s.
  11. 11. according to the processing method described in any one of claim 8 to 10, it is characterised in that add when needing progress milling side wall In man-hour, the vertical displacement platform z is to driving the microfabricated electrodes to stretch out in length enough outside the insulating boot, with reality Existing milling side wall processing.
CN201610844656.0A 2016-09-22 2016-09-22 A kind of processing unit (plant) and method for suppressing PET microfiber dispersion corrosion Active CN106270842B (en)

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CN107052483B (en) * 2017-03-30 2018-12-07 南京航空航天大学 Insulation shielding jacking Electrolyzed Processing cathod system and processing method
CN110744153B (en) * 2019-11-06 2020-12-29 南京工程学院 Micro electrochemical machining fuzzy control method based on short-circuit time
CN114603224B (en) * 2022-01-24 2023-06-09 南京航空航天大学 Seal protection follow-up device and method for electrolytic machining of inner vane sleeve material

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