CN106270842A - A kind of processing unit (plant) suppressing PET microfiber dispersion corrosion and method - Google Patents
A kind of processing unit (plant) suppressing PET microfiber dispersion corrosion and method Download PDFInfo
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- CN106270842A CN106270842A CN201610844656.0A CN201610844656A CN106270842A CN 106270842 A CN106270842 A CN 106270842A CN 201610844656 A CN201610844656 A CN 201610844656A CN 106270842 A CN106270842 A CN 106270842A
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- displacement platform
- microfabricated electrodes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
A kind of processing unit (plant) suppressing PET microfiber dispersion corrosion and method, this device includes: reservoir；Microfabricated electrodes；High frequency pulse power supply；Vertical displacement platform, for driving described microfabricated electrodes to realize the vertical feed campaign needed for processing；Insulating boot, described insulating boot is enclosed in the periphery of described microfabricated electrodes；Three-D displacement platform, for drive described insulating boot and described vertical displacement platform realize the xy of level to and vertical z to motion；The upright position of wherein said insulating boot by the z of described three-D displacement platform to motor control, the vertical feed campaign of described microfabricated electrodes is controlled by described vertical displacement platform, and the flat scanning of described microfabricated electrodes is moved by the xy of described three-D displacement platform to motor control.The dispersion corrosion on the processing unit (plant) of the present invention and processing method both surfaces, inhibitable type chamber, it is possible to avoid the impact that milling sidewall is processed by fixed insulation layer.
Description
Technical field
The present invention relates to a kind of processing unit (plant) suppressing PET microfiber dispersion corrosion and method.
Background technology
PET microfiber is the method using Anodic to dissolve, by the manufacture skill of micro parts machine-shaping
Art.Due to electro-chemical machining have that instrument is lossless, rapidoprint scope wide, after processing piece surface without deformation and recast layer etc.
Advantage, becomes one of key technology in high-accuracy commercial production.But at the PET microfiber neck that required precision is the highest
In territory, owing to the dispersion corrosion of electric current causes also faint corroding outside machining area, processing locality is made to be deteriorated, therefore to
Improve machining accuracy to need to reduce dispersion corrosion phenomenon by various measures.
Suppression dispersion corrosion has following several approach at present: selects suitable electrolyte, improve flow field, pole clearance and electricity
Field, employing high frequency ultra-narrow pulse power supply etc..The above measure is all the electric current distribution situation improving workpiece machining surface,
The dissolution velocity increasing processing district and non-processing interval as far as possible is poor, improves processing locality.But, when using cylindrical electrode
When carrying out electrochemistry milling microlaser cavity, die cavity upper surface is the most inevitably affected by dispersion corrosion, causes surface matter
Amount deteriorates.According to the method being coated with insulating layer coating at tool-electrode sidewall, influence whether again sidewall processing during pocketing.
Summary of the invention
Present invention is primarily targeted at for the upper surface dispersion corrosion in the micro-Milling Process of existing electrochemistry, instrument electricity
Pole lateral wall insulation processes does not has the problems such as practicality, it is provided that a kind of processing unit (plant) suppressing PET microfiber dispersion corrosion
And method, both dispersion corrosions on surface, inhibitable type chamber, it is possible to avoid the impact that milling sidewall is processed by fixed insulation layer.
For achieving the above object, the present invention is by the following technical solutions:
A kind of processing unit (plant) suppressing PET microfiber dispersion corrosion, including:
Reservoir, for placing the electrolyte used in electrochemical machining process, metalwork to be corroded is placed in liquid storage tank
In, by described electrolyte submergence；
Microfabricated electrodes, described microfabricated electrodes and described metalwork arranged opposite to be corroded；
High frequency pulse power supply, for loading high-frequency impulse between described microfabricated electrodes and described metalwork to be corroded
The signal of telecommunication so that described electrolyte is processed on described metalwork to be corroded；
Vertical displacement platform, for driving described microfabricated electrodes to realize the vertical feed campaign needed for processing；
Insulating boot, described insulating boot is enclosed in the periphery of described microfabricated electrodes；
Three-D displacement platform, for drive described insulating boot and described vertical displacement platform realize the xy of level to and vertical
Z is to motion；
The upright position of wherein said insulating boot is by the z of described three-D displacement platform to motor control, and described microfabrication is electric
The vertical feed campaign of pole is controlled by described vertical displacement platform, and the flat scanning of described microfabricated electrodes is moved by described three-dimensional
The xy of displacement platform is to motor control.
Further:
The most advanced and sophisticated radius of corner of described microfabricated electrodes is 10～500nm.
Described microfabricated electrodes is tungsten, platinum or the needle-like of gold making or cylindrical electrode.
Described electrolytic solution is nitrate or chloride or alkali electrolytic solution.
The internal diameter of described insulating boot is than described microfabricated electrodes external diameter big 1-2 μm.
Described insulating boot and described microfabricated electrodes concentric locating.
Described high-frequency electrical pulses source dates includes that voltage magnitude is 1～5V, and frequency is 1～500MHz, and pulse width is
0.5ns～500ns, processing electric current density value is 2～10mA/cm2。
A kind of PET microfiber method using described device, including:
Described three-D displacement platform z, to driving described vertical displacement platform and described insulating boot to move, makes described insulating boot move
On the upside of metalwork to be corroded described in；
The high-frequency impulse signal of telecommunication, described three-dimensional position is loaded between described microfabricated electrodes and described metalwork to be corroded
Moving stage xy is taken described microfabricated electrodes to the described vertical displacement platform of drive and is treated acid gilding according to the path pre-established described
Belonging to scanning machining on part, described vertical displacement platform z is to driving described microfabricated electrodes vertical relative to described corrosion metal to be added
Straight-in feed is processed.
Further:
Before starting level processing, described microfabricated electrodes is first made vertically to enter relative to described metalwork to be corroded
Give, control described microfabricated electrodes by monitoring the current value between described microfabricated electrodes and described metalwork to be corroded
With the relative feed speed of described metalwork to be corroded, detecting according to First Speed feeding before electric current is undergone mutation, in inspection
Measure according to the second speed feeding less than described First Speed and to enter with the processing electric current density set after electric current is undergone mutation
Row processing, reaches the working depth needed for structure.
Described First Speed is 5～20 μm/s, and described second speed is 1～10 μm/s.
Adding man-hour when needs carry out milling sidewall, described vertical displacement platform z stretches out in the described microfabricated electrodes of drive
Length enough outside described insulating boot, to realize the processing of milling sidewall.
Beneficial effects of the present invention has:
The present invention proposes a kind of processing unit (plant) suppressing PET microfiber dispersion corrosion, by peripheral at machined electrode
Disposing insulating boot and be processed the design controlled by vertical displacement platform and three-D displacement platform, both surface, inhibitable type chamber was miscellaneous
Dissipate corrosion, be effectively improved the machining accuracy of microfabricated electrodes, it is possible to avoid using fixed insulation layer right in electrode sidewall in the past
Milling sidewall processes the harmful effect brought.On the one hand, insulating boot makes the electric current density around machined electrode redistribute, mainly
Concentrate on machining area, reduce the electric current density of electrode sidewall, suppress non-machining area to corrode, improve machining accuracy, through surveying
Examination machine after obtainable minimum process live width up to 100nm, higher than use identical parameters common process equipment
The processing live width arrived.On the other hand, machined electrode relative to insulating boot in the mobilizable design of vertical direction, it is possible to avoid insulation
Cover and the processing of milling sidewall is impacted.Simultaneously, it is achieved the simple in construction of this device, and processing in exhausted without carrying out electrode sidewall
The PROCESS FOR TREATMENT such as edge, process operation is simple, can be applicable in the electro-chemical machining of common plane structure and three dimensional structure, has wide
The general suitability.
Accompanying drawing explanation
Fig. 1 is the processing unit (plant) structural representation of the suppression PET microfiber dispersion corrosion of an embodiment of the present invention
Figure.
Detailed description of the invention
Hereinafter embodiments of the present invention are elaborated.It is emphasized that what the description below was merely exemplary,
Rather than in order to limit the scope of the present invention and application thereof.
As it is shown in figure 1, in one embodiment, a kind of processing unit (plant) suppressing PET microfiber dispersion corrosion, bag
Include reservoir 1, high frequency pulse power supply 3, microfabricated electrodes 4, vertical displacement platform 5, three-D displacement platform 6, insulating boot 7, wherein, storage
Liquid bath 1 is for placing the electrolyte 2 used in electrochemical machining process, and metalwork 8 to be corroded is placed in liquid storage tank, described
Electrolyte 2 submergence；Microfabricated electrodes 4 and described metalwork 8 arranged opposite to be corroded；High frequency pulse power supply 3 is for described
The high-frequency impulse signal of telecommunication is loaded so that described electrolyte 2 is described between microfabricated electrodes 4 and described metalwork to be corroded 8
Process on metalwork 8 to be corroded；Vertical displacement platform 5 vertically entering needed for driving described microfabricated electrodes 4 to realize processing
Give motion, it is achieved required vertical displacement；Insulating boot 7 is enclosed in the periphery of described microfabricated electrodes 4；Three-D displacement platform 6 is used
In drive described insulating boot 7 and described vertical displacement platform 5 realize the xy of level to and vertical z to motion；Wherein said absolutely
The upright position of edge cover 7 by the z of described three-D displacement platform 6 to motor control, the vertical feed campaign of described microfabricated electrodes 4
Controlled by described vertical displacement platform 5, the motion of the flat scanning of described microfabricated electrodes 4 by the xy of described three-D displacement platform 6 to
Motor control.
Wherein electrolyte 2, microfabricated electrodes 4, metalwork to be corroded 8 constitute electrochemical system, metalwork 8 structure to be corroded
Becoming the anode of electrochemical system, described microfabricated electrodes 4 constitutes the negative electrode of electrochemical system；During work, high frequency pulse power supply 3
The high-frequency impulse signal of telecommunication is loaded so that described electrolyte exists between described microfabricated electrodes 4 and described metalwork to be corroded 8
Process on described metalwork to be corroded.Described metalwork to be corroded is can the nickel of conductive material or silicon.Described reservoir 1 is all right
Reclaim in electrochemical machining process and recycle electrolyte.
Insulating boot 7 can use hollow glass insulating boot.Insulating boot 7 plays the peripheral insulative effect of microfabricated electrodes 4,
Improve the CURRENT DISTRIBUTION of machining area.Insulating boot 7 can vertically move with three-D displacement platform 6, is adjusted to desired location.Insulating boot
7 can also be other non-conducting material, and its needs customize according to described machined electrode,
In a preferred embodiment, the most advanced and sophisticated radius of corner of described microfabricated electrodes 4 is 10～500nm.
In a preferred embodiment, described microfabricated electrodes 4 is tungsten, platinum or the needle-like of gold making or cylindrical electrode 4.
In a preferred embodiment, described electrolytic solution is nitrate or chloride or alkali electrolytic solution.
In a preferred embodiment, the internal diameter of described insulating boot 7 is than described microfabricated electrodes 4 external diameter big 1-2 μm.
In a preferred embodiment, described insulating boot 7 and the concentric locating of described microfabricated electrodes 4.
In a preferred embodiment, described high frequency pulse power supply 3 parameter includes that voltage magnitude is 1～5V, frequency be 1～
500MHz, pulse width is 0.5ns～500ns, and processing electric current density value is 2～10mA/cm2。
A kind of PET microfiber method using described device, including:
Described three-D displacement platform 6z, to driving described vertical displacement platform 5 and described insulating boot 7 to move, makes described insulating boot 7
On the upside of metalwork 8 to be corroded described in moving to；Preferably, with metalwork to be corroded on the upside of gap be 1-2 μm；
The high-frequency impulse signal of telecommunication, described three-dimensional is loaded between described microfabricated electrodes 4 and described metalwork to be corroded 8
Displacement platform 6 is taken described microfabricated electrodes 4 in xy to the described vertical displacement platform 5 of drive and is treated described according to the path pre-established
Scanning machining on corrosion metalwork 8, described vertical displacement platform 5 is to be added relative to described to the described microfabricated electrodes 4 of drive in z
Corrosion metal vertical feed processing.
Further:
Before starting level processing, described microfabricated electrodes 4 is first made vertically to enter relative to described metalwork 8 to be corroded
Give, control described microfabrication electricity by monitoring the current value between described microfabricated electrodes 4 and described metalwork to be corroded 8
The relative feed speed of pole 4 and described metalwork 8 to be corroded, detecting before electric current is undergone mutation according to First Speed feeding,
Close according to the processing electric current less than the second speed feeding of described First Speed and with setting detecting after electric current is undergone mutation
Degree is processed, and reaches the working depth needed for structure.
Described First Speed is 5～20 μm/s, and the speed of described second speed is 1～10 μm/s.
Adding man-hour when needs carry out milling sidewall, described vertical displacement platform 5z stretches out to the described microfabricated electrodes 4 of drive
Length enough outside described insulating boot 7, to realize the processing of milling sidewall.
The operation principle of specific embodiment described further below and work process.
Glass insulation cover is installed on three-D displacement platform, described three-D displacement platform be capable of xyz three-dimensional motion, described vertically
Displacement platform is installed and is positioned above, and then drives described insulating boot and the motion of described machined electrode.Described three-D displacement platform is with vertical
Straight displacement platform controls respectively, and vertical displacement platform can independently drive microfabricated electrodes vertical feed.Described insulating boot vertical
Position is controlled by vertical displacement platform by the z direction controlling of three-D displacement platform, the feed motion of described machined electrode, described processing electricity
The flat scanning motion of pole is by the xy direction controlling of described three-D displacement platform, and both collocation realize described tool-electrode and treat described
Corroding metalwork top offset, machined electrode described in makespan is protected by described insulating boot, plays lateral wall insulation effect, and raising adds
Work precision.
When using above-mentioned suppression dispersion corrosion device to be processed, the z-axis first controlling three-D displacement platform drives described insulation
Covering on the upside of metalwork to be corroded described in moving to, both gaps are 1-2 μm, constitute machining area, and this region can redistribute
Electric current density, makes electric current density be concentrated mainly near described insulating boot internal diameter, reaches to suppress the purpose of dispersion corrosion, processed
Cheng Zhongke keeps both invariant positions relatively.High frequency arteries and veins is loaded between described microfabricated electrodes and described metalwork to be corroded
Rushing the signal of telecommunication, described three-D displacement platform and vertical displacement platform drives described microfabricated electrodes according to the path pre-established in institute
State and on metalwork to be corroded, carry out horizontal sweep and vertical feed processing.
It is preferred that before starting level processing electrolysis, first make described microfabricated electrodes relative to described corrosion to be added
Metallic vertical feeding, controls described micro-by monitoring the current value between described microfabricated electrodes and described metalwork to be corroded
The relative feed speed of fining-off electrode and described metalwork to be corroded, detecting before electric current is undergone mutation according to First Speed
Feeding, electric according to the processing less than the second speed feeding of described First Speed and with setting detecting after electric current is undergone mutation
Current density is processed, and reaches the working depth needed for structure.More preferably, described First Speed is set to 5～20um/s, described
Second speed is set to 1～10 μm/s.
Above content is to combine concrete/further description the most made for the present invention, it is impossible to recognize
Determine the present invention be embodied as be confined to these explanations.For general technical staff of the technical field of the invention,
Without departing from the inventive concept of the premise, these embodiments having described that can also be made some replacements or modification by it,
And these substitute or variant all should be considered as belonging to protection scope of the present invention.
Claims (10)
1. the processing unit (plant) suppressing PET microfiber dispersion corrosion, it is characterised in that including:
Reservoir, for placing the electrolyte used in electrochemical machining process, metalwork to be corroded is placed in liquid storage tank, quilt
Described electrolyte submergence；
Microfabricated electrodes, described microfabricated electrodes and described metalwork arranged opposite to be corroded；
High frequency pulse power supply, for loading high-frequency impulse telecommunications between described microfabricated electrodes and described metalwork to be corroded
Number so that described electrolyte is processed on described metalwork to be corroded；
Vertical displacement platform, for driving described microfabricated electrodes to realize the vertical feed campaign needed for processing；
Insulating boot, described insulating boot is enclosed in the periphery of described microfabricated electrodes；
Three-D displacement platform, for drive described insulating boot and described vertical displacement platform realize the xy of level to and vertical z to
Motion；
The upright position of wherein said insulating boot by the z of described three-D displacement platform to motor control, described microfabricated electrodes
Vertical feed campaign is controlled by described vertical displacement platform, and the flat scanning of described microfabricated electrodes is moved by described three-D displacement
The xy of platform is to motor control.
Processing unit (plant) the most according to claim 1, it is characterised in that the most advanced and sophisticated radius of corner of described microfabricated electrodes
It is 10～500nm.
Processing unit (plant) the most according to claim 1, it is characterised in that described microfabricated electrodes is that tungsten, platinum or gold make
Needle-like or cylindrical electrode.
Processing unit (plant) the most according to claim 1, it is characterised in that described electrolytic solution is nitrate or chloride or alkali
Electrolytic solution.
Processing unit (plant) the most according to claim 1, it is characterised in that the internal diameter of described insulating boot is than described microfabrication electricity
Pole external diameter big 1-2 μm, it is preferred that described insulating boot and described microfabricated electrodes concentric locating.
6. according to the processing unit (plant) described in any one of claim 1 to 5, it is characterised in that described high-frequency electrical pulses source dates bag
Including voltage magnitude is 1～5V, and frequency is 1～500MHz, and pulse width is 0.5ns～500ns, processing electric current density value be 2～
10mA/cm2。
7. the PET microfiber method of the processing unit (plant) used described in any one of claim 1-6, it is characterised in that
Including:
Described three-D displacement platform z, to driving described vertical displacement platform and described insulating boot to move, makes described insulating boot move to institute
State on the upside of metalwork to be corroded；
The high-frequency impulse signal of telecommunication, described three-D displacement platform is loaded between described microfabricated electrodes and described metalwork to be corroded
Xy takes described microfabricated electrodes according to the path pre-established at described metalwork to be corroded to the described vertical displacement platform of drive
Upper scanning machining, described vertical displacement platform z enters relative to described corrosion metallic vertical to be added to the described microfabricated electrodes of drive
Give processing.
Processing method the most according to claim 7, it is characterised in that before starting level processing, first make described fine
Machined electrode, relative to described metalwork vertical feed to be corroded, treats acid gilding by monitoring described microfabricated electrodes with described
Belong to the current value between part and control the relative feed speed of described microfabricated electrodes and described metalwork to be corroded, detecting
Electric current undergo mutation before according to First Speed feeding, detecting after electric current is undergone mutation according to less than the of described First Speed
Two speed feedings are also processed with the processing electric current density set, and reach the working depth needed for structure.
Processing method the most according to claim 8, it is characterised in that described First Speed is 5～20 μm/s, described second
Speed is 1～10 μm/s.
10. according to the processing method described in any one of claim 7 to 9, it is characterised in that when needs carry out milling sidewall processing
Time, the length that described vertical displacement platform z is enough outside driving described microfabricated electrodes to stretch out in described insulating boot, to realize
Milling sidewall is processed.
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| CN107052483A (en) * | 2017-03-30 | 2017-08-18 | 南京航空航天大学 | Insulation shielding jacking Electrolyzed Processing cathod system and processing method |
| CN110744153A (en) * | 2019-11-06 | 2020-02-04 | 南京工程学院 | Micro electrochemical machining fuzzy control method based on short-circuit time |
| CN114603224A (en) * | 2022-01-24 | 2022-06-10 | 南京航空航天大学 | Sealing protection follow-up device and method for inner blade sleeve material electrolytic machining |
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