CN106215789B - A kind of reflux passive type micro-mixer based on jet current principle - Google Patents
A kind of reflux passive type micro-mixer based on jet current principle Download PDFInfo
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- CN106215789B CN106215789B CN201610630714.XA CN201610630714A CN106215789B CN 106215789 B CN106215789 B CN 106215789B CN 201610630714 A CN201610630714 A CN 201610630714A CN 106215789 B CN106215789 B CN 106215789B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
- B01F33/301—Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/312—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof
- B01F25/3123—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof with two or more Venturi elements
- B01F25/31233—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof with two or more Venturi elements used successively
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/312—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof
- B01F25/3124—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof characterised by the place of introduction of the main flow
- B01F25/31242—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof characterised by the place of introduction of the main flow the main flow being injected in the central area of the venturi, creating an aspiration in the circumferential part of the conduit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/23—Mixing of laboratory samples e.g. in preparation of analysing or testing properties of materials
Abstract
The present invention discloses the reflux passive type micro-mixer based on jet current principle in a kind of MEMS, n group jet stream and return-flow structure are from left to right equipped with along the central axis direction of hybrid channel, n >=4, every group of jet stream and return-flow structure are from left to right sequentially connected in series by reducing pipe, efflux nozzle, feedback channel and diffuser；Every group of jet stream and return-flow structure have 2 feedback channels being arranged symmetrically relative to central axis front and back, each feedback channel is the ring structure connected by feedback channel inlet-side channel, feedback channel transition passage, feedback channel outlet-side channel and mixed zone, the outlet of the entrance and 2 feedback channel outlet-side channels of 2 feedback channel inlet-side channels, which connects, to be communicated, and mixed zone is collectively formed；Low-pressure area is generated near efflux nozzle, the not high fluid of mixing efficiency is flowed back near efflux nozzle by feedback channel, again by jet entrainment, blending, so that two kinds of liquid realizations be promoted to be thoroughly mixed.
Description
Technical field
The present invention relates in MEMS microfluid analysis field more particularly to a kind of micro-mixer.
Background technique
Microfluidic system is realized by integrating to microchannel, Micropump, micro-valve, micro-mixer on the micro scale to micro
Control, operation and the detection of fluid have become an important branch of MEMS.It is entire to be in microfluidic system
The analysis efficiency of system depend on two or more fluids can quickly, be sufficiently mixed, therefore grinding about Microfluidic Mixing technology
Study carefully be microfluidic system research one of hot spot.As the important component of microfluidic system, micro-mixer for realizing
Differential responses object being sufficiently mixed under the conditions of minute yardstick, using more in microanalytical chemistry, biochip, micro- chemical system
Come more extensive.
Micro-mixer can be divided into passive type and active two class according to whether there is or not extra power sources.Passive type micro-mixer master
It will be using with complex geometry (such as miniflow road shape be optimized, increases baffle in fluid channel, opens up groove etc.)
Microchannel form chaotic advection, to improve the convection intensity of fluid, to increase the contact area of fluid mixing, improve mixed
Close efficiency；Active micro-mixer, which mainly passes through, increases external disturbance (such as magnetic/electric field disturbance, thermal agitation, ultrasonic wave disturbance
Deng) promote Microfluidic Mixing.In comparison, since passive type micro-mixer does not need plus exterior power source, more
Add and stablizes and be easily integrated.
On the micro scale, since Reynolds number is very low, it is difficult to turbulent flow is formed, it can only be by the molecule at two kinds of fluid contact levels
Mixing is realized in diffusion, therefore to realize that be thoroughly mixed (mixing efficiency is greater than 90%) of two kinds of fluids is highly difficult.Common is micro-
Mixer is T-type micro-mixer, only at two kinds of liquid contact surfaces, is mixed by molecule diffusion, thus general T type is micro-
Mixing efficiency near the median plane of mixer is relatively high, and close to the fluid of micro-mixer near wall almost without mixing,
Which greatly limits the overall performances of T-type micro-mixer.
Summary of the invention
The purpose of the invention is to overcome existing general T type micro-mixer to only have the mixing efficiency near median plane to compare
Height proposes a kind of reflux quilt based on jet current principle close to the lower deficiency of fluid mixing efficiency of micro-mixer near wall
Dynamic formula micro-mixer, by the lower fluid of micro-mixer near wall mixing efficiency by feedback channel flow back into mixed zone into
Row remixes, by repeatedly recycling mixing, so that two kinds of liquid realizations be promoted to be thoroughly mixed.
The technical solution adopted by the present invention is that: the present invention is by upper cover plate and the mixed plate being bonded with upper cover plate (24) group
At the inlet side of mixed plate is provided with the first, second access road of anterior-posterior horizontal arrangement, and the outlet side of mixed plate is provided with left and right water
The exit passageway that plain cloth is set, the first, second access road common vertical connect the import of the hybrid channel of left and right horizontal arrangement, mix
The outlet connection outlet channel for closing channel is from left to right equipped with n group jet stream and reflux knot along the central axis direction of hybrid channel
Structure, n >=4, every group of jet stream and return-flow structure by reducing pipe, efflux nozzle, feedback channel and diffuser from left to right successively
It is composed in series；Every group of jet stream and return-flow structure have 2 feedback channels being arranged symmetrically relative to central axis front and back, each feedback
Channel is connected by feedback channel inlet-side channel, feedback channel transition passage, feedback channel outlet-side channel and mixed zone
At ring structure, the outlet of the entrance and 2 feedback channel outlet-side channels of 2 feedback channel inlet-side channels connects phase
It is logical, mixed zone is collectively formed, the entrance of mixed zone connects efflux nozzle, and mixed zone exports connection diffuser by mixed zone.
Compared with prior art, the beneficial effects of the present invention are: the present invention is being penetrated using particular spray and return-flow structure
Stream spout nearby generates low-pressure area, and mixed liquor is after efflux nozzle projects and enters mixed zone, constantly volume inhale around fluid into
Incident flow, so that jet velocity constantly reduces, fluid pressure is constantly increased.The pressure of mixed zone near exit is higher than efflux nozzle
Neighbouring low-pressure area pressure, to generate reflux in feedback channel, the fluid for finally making mixing efficiency not high passes through feedback
Channel flows back near efflux nozzle, again by jet entrainment, blending, so recycles, so that it is complete to promote two kinds of liquid to realize
Mixing.Compared with other micro-mixer structures, the configuration of the present invention is simple is easy to process and integrated, and fluid returns in feedback channel
Flow rate is high, micro-mixer good combination property.
Detailed description of the invention
Fig. 1 is a kind of main structure cross-sectional view of the reflux passive type micro-mixer based on jet current principle of the present invention；
Fig. 2 is the top view of upper cover plate 28 in Fig. 1；
Fig. 3 is the cross-sectional view in Fig. 1 along the direction A-A mixed plate 24；
Fig. 4 is the partial enlarged view of single jet stream and return-flow structure in Fig. 3；
In figure: 1. first entrance channels；2. second entrance channel；3. hybrid channel；4. reducing pipe；5. efflux nozzle；6.
Mixed zone inner ring wall surface；Rounded corner in 7.；8. feedback channel inlet-side channel；Rounded corner in 9.；10. feedback channel transition is logical
Road；Rounded corner in 11.；12. feedback channel outlet-side channel；13. the outer ring wall surface of feedback channel outlet-side channel；14. outer circle
Chamfering；15. the outer ring wall surface of feedback channel transition passage；16. outer rounded corner；17. the external annulus of feedback channel inlet-side channel
Face；18. mixed zone；19. feedback channel；20. mixed zone exports；21. diffuser；22. exit passageway；23. central axis；24. mixed
Plywood；25. the second inlet hole；26. the first inlet hole；27. outlet opening；28. upper cover plate.
Specific embodiment
As shown in Figure 1, Figure 2 and Figure 3, the present invention is by upper cover plate 28 and the mixed plate being bonded together with upper cover plate 28 24
Composition, mixed plate 24 are located at the underface of upper cover plate 28.Be provided on upper cover plate 28 up and down vertically arranged first inlet hole 26,
Second inlet hole 25 and outlet opening 27, the first inlet hole 26 is identical with the structure of the second inlet hole 25, is located at inlet side, outlet
Hole 27 is located at outlet side.The first entrance channel 1 of anterior-posterior horizontal arrangement is provided in the inlet side of mixed plate 24 and second entrance is led to
Road 2 is provided with the exit passageway 22 of left and right horizontal arrangement in the outlet side of mixed plate 24.First entrance channel 1, second entrance channel
2 and exit passageway 22 depth up and down be H2,100 μm≤H2≤200 μm.First inlet hole 26, the second inlet hole 25 and go out
The positional punch directly on pyrex7740 glass of oral pore 27, these three Kong Jun are vertical through-hole, the position point in these three holes
It is not disposed below the surface in corresponding first entrance channel 1, second entrance channel 2 and exit passageway 22, these three holes
Diameter is of same size with corresponding channel below.The vertical height up and down in these three holes be H1,400 μm≤H1≤600 μm,
Equal to the thickness up and down of upper cover plate 28.Mixed plate 24 is process by dimethyl silicone polymer organosilicon (PDMS), specific work
Skill process are as follows: firstly, the thermally grown SiO on PDMS2As exposure mask, mask thicknesses are 2 μm or so；Then in SiO2It is applied on exposure mask
It smears and is protected compared with thick photoresist, using photoetching process and etch SiO2Exposure mask, thus in SiO2On etch it is identical with mask plate
Micro-mixer planar structure；Then, it is etched using Alcatel dry etch process front, etching depth H2；Finally, dry method
It removes photoresist, oxide layer is aligned with upper cover plate 28 after cleaning up and carries out electrostatic bonding.
As shown in figures 1 and 3, first entrance channel 1 and second entrance channel 2 are the access roades of two kinds of different fluids,
Their passage length is identical, is L2, and 400 μm≤L2≤800 μm.The knot in first entrance channel 1 and second entrance channel 2
Structure is identical, common vertical connect left and right horizontal arrangement hybrid channel 3 import, and about the center line of hybrid channel 3 23 before
Symmetrical afterwards, the length of hybrid channel 3 is L3,600 μm≤L3≤800 μm.The outlet connection outlet channel 22 of hybrid channel 3, with
Concentrically line 23 of exit passageway 22.First entrance channel 1 is equal with the channel width in second entrance channel 2, is L1, and identical
Channel width L7 in hybrid channel 3 and exit passageway 22, L1=L7=200 μm.
It is from left to right equidistant to be periodically equipped with n along 23 direction of central axis of hybrid channel 3 on hybrid channel 3
Group jet stream and return-flow structure, n >=4.Referring to Fig. 3 and Fig. 4, every group of jet stream and return-flow structure are by reducing pipe 4, efflux nozzle 5, anti-
Feedthrough road 19 and diffuser 21 are from left to right sequentially connected in series.
First group of jet stream of the leftmost side and the reducing pipe 4 of return-flow structure connect hybrid channel 3, last group of the rightmost side is penetrated
The 21 connection outlet channel 22 of diffuser of stream and return-flow structure.The length of exit passageway 22 is L6,1000 μm≤L6≤2000 μ
m。
In two adjacent groups jet stream and return-flow structure, left side jet stream connects right side with the end of the diffuser 21 of return-flow structure
The beginning of the reducing pipe 4 of jet stream and return-flow structure, and the end of the diffuser 21 of left side jet stream and return-flow structure and right side are penetrated
Flowing the passage length between beginning the two the reducing pipe 4 of return-flow structure is L4, and 600 μm≤L4≤800 μm, length L4 is
The distance between two adjacent groups jet stream and return-flow structure, the distance between every two adjacent groups jet stream and return-flow structure are all the same, such as
This is end to end to form periodic n group jet stream and return-flow structure.
As shown in Figure 3 and Figure 4, every group of jet stream and return-flow structure have 2 feedback channels 19, this 2 feedback channels 19 are opposite
It is arranged symmetrically before and after central axis 23.Each feedback channel 19 is by feedback channel inlet-side channel 8, feedback channel transition passage
10, the ring structure that feedback channel outlet-side channel 12 and mixed zone 18 connect into.It is symmetrical in every group of jet stream and return-flow structure
The outlets of entrance and 2 feedback channel outlet-side channels 12 of 2 feedback channel inlet-side channels 8 connect and communicate, common shape
At mixed zone 18, the i.e. entrance and 2 feedback channel outlet sides of 2 feedback channel inlet-side channels 8 of the common connection in mixed zone 18
The outlet in channel 12, and mixed zone 18 is symmetrical relative to central axis 23, has common central axis 23 with hybrid channel 3.Together
When, the entrance of mixed zone 18 connects efflux nozzle 5, and mixed zone 18 passes through 20 connection diffuser 21 of mixed zone outlet.Every group of jet stream
Export the distance between 20 with mixed zone with the efflux nozzle 5 in return-flow structure is for the axial length of L5 namely mixed zone 18
L5, L5=400 μm.
Feedback channel inlet-side channel 8, feedback channel transition passage 10, these three channels of feedback channel outlet-side channel 12
Channel width be sequentially reduced, i.e., along the flow direction of fluid in feedback channel 19, the width in channel is sequentially reduced.Feedback is logical
The channel width of road outlet-side channel 12 is L11, L11=60 μm.The channel width of feedback channel transition passage 10 is L12, L12=
80μm.The channel width of feedback channel inlet-side channel 8 is L13, L13=100 μm.
The axial length of mixed zone 18 is less than the axial length of feedback channel transition passage 10, feedback channel inlet-side channel
8 and feedback channel outlet-side channel 12 it is angled with hybrid channel 3 respectively, favour hybrid channel 3, intermediate feedback is logical
Road transition passage 10 is parallel with hybrid channel 3, also parallel with mixed zone 18.The channel width of efflux nozzle 5 goes out less than mixed zone
The channel width of mouth 20.
Rounded corner transition is used to connect in the corner region that feedback channel 19 is easy to produce dead zone, the mixing in mixed zone 18
Between area's inner ring wall surface 6 and the inner ring wall surface of feedback channel inlet-side channel 8 using interior rounded corner 7 connect, interior rounded corner 7 it is interior
Radius of circle is R1, R1=200 μm；In the inner ring wall surface of feedback channel inlet-side channel 8 and the inner ring of feedback channel transition passage 10
It is connected between wall surface using interior rounded corner 9, the radius of interior rounded corner 9 is R2, R2=50 μm；Outside feedback channel inlet-side channel 8
It is connected between ring wall face 17 and the outer ring wall surface 15 of feedback channel transition passage 10 using outer rounded corner 16, the half of outer rounded corner 16
Diameter is R3, R3=125 μm；In the inner ring wall surface of feedback channel transition passage 10 and the internal ring wall of feedback channel outlet-side channel 12
It is connected between face using interior rounded corner 11, the radius of interior rounded corner 11 is R4, R4=50 μm；In feedback channel transition passage 10
Use the radius of outer rounded corner 14 for R5 between outer ring wall surface and the outer ring wall surface of feedback channel outlet-side channel 12, the μ of R5=100
m。
The inclination angle of reducing pipe 4 be θ 1, feedback channel outlet-side channel 12 inclination angle be θ 2, feedback channel inlet-side channel 8
Inclination angle theta 3, the inclination angle of diffuser 21 is θ 4, and 4=135 ° of 3=θ of θ 1=θ, 2=θ；That is the outside wall surface and feedback channel of reducing pipe 4
Outlet-side channel 12 is parallel, and the outside wall surface of diffuser 21 is parallel with feedback channel inlet-side channel 8.The runner of efflux nozzle 5 is wide
Degree is L8, L8=20 μm, flow channel length L9,100 μm≤L9≤200 μm.Mixed zone outlet 20 width of flow path be L15, L15=
40 μm, flow channel length L14,100 μm≤L14≤200 μm.The width of flow path L10 of mixed zone 18 is equal to 1 He of first entrance channel
The channel width L1 in second entrance channel 2, and the channel width L7 equal to hybrid channel 3 and exit passageway 22.Feedback channel
The distance between outer ring wall surface 15 and central axis 23 of transition passage are L16, L16=500 μm, feedback channel transition passage it is outer
The outer ring wall surface 13 of the outer ring wall surface 17 and feedback channel outlet-side channel of ring wall face 15 and feedback channel inlet-side channel is flat
It slips over to cross and connect.
Mixed process of the present invention is as follows, and liquid A to be mixed enters mixed plate 24 through the second inlet hole 25 on upper cover plate 28
Second entrance channel 2, the first entrance that liquid B to be mixed enters mixed plate 24 through the first inlet hole 26 on upper cover plate 28 is logical
Road 1；It, need to be tight with syringe pump to guarantee that both different liquid As to be mixed, B identical size injection enter micro-mixer in mixed process
Lattice control the injection rate of two kinds of liquid.Two kinds of liquid merge into mixed liquor in hybrid channel 3, and on the contact surface, pass through
Preliminary mixing is completed in molecule diffusion；Then, mixed liquor enters jet stream and the return-flow structure region of periodic arrangement, passes through reducing pipe
4 pairs of mixed liquors accelerate, and generate high-speed jet by efflux nozzle 5, and the spouting velocity of jet stream is exceedingly fast, near efflux nozzle 5
Generate low-pressure area；High-speed jet enters mixed zone 18, and constantly the volume suction lower fluid of surrounding mixing efficiency enters jet stream；Due to high speed
Jet stream constantly rolls up suction surrounding fluid and enters jet stream, causes jet flow along Cheng Zengjia, effluxvelocity constantly reduces, the pressure of fluid
Also it is continuously increased therewith；When mixed liquor is reached near mixed zone outlet 20, it is attached that the pressure of mixed liquor has been apparently higher than efflux nozzle 5
Closely due to the low-pressure area of high-speed jet formation.Since efflux nozzle 5 and mixed zone outlet 20 are in the same horizontal position, thus it is mixed
It closes the mixed liquor near the higher median plane of efficiency to flow directly out from mixed zone outlet 20, the lower stream of another part mixing efficiency
Body enters feedback channel 19 under differential pressure action, logical through feedback channel inlet-side channel 8, feedback channel transition passage 10, feedback
It is returned near efflux nozzle 5 after 12 reflux of road outlet-side channel, and the high-speed jet volume generated again by efflux nozzle 5 is inhaled,
Blending, carries out secondary mixing, so recycles, and promotes two kinds of liquid realizations to be thoroughly mixed, to improve the mixing efficiency of fluid.
Feedback channel inlet-side channel 8, feedback channel transition passage 10, feedback channel outlet-side channel 12 in feedback channel 19 this three
The width in channel is sequentially reduced along fluid flow direction, is conducive to the speed for improving 19 exit fluid of feedback channel, into
One step reduces the low-pressure area pressure nearby of efflux nozzle 5, improves the reflux ratio of fluid in feedback channel, enhances chaotic advection intensity,
To achieve the purpose that improve mixing efficiency.In mixed liquor after the such jet stream of n group and return-flow structure effect, from last
The mixed liquor of group jet stream and return-flow structure outflow, has been carried out substantially and is thoroughly mixed；From last group of jet stream and return-flow structure
The mixed liquor of 20 outflow of mixed zone outlet finally flows into exit passageway 22, and flows out micro-mixer from outlet opening 27, completes mixing
Process.
Claims (8)
1. a kind of reflux passive type micro-mixer based on jet current principle is bonded by upper cover plate (28) and with upper cover plate (28)
Mixed plate (24) composition, the inlet side of mixed plate (24) are provided with the first, second access road (1,2) of anterior-posterior horizontal arrangement, mix
The outlet side of plywood (24) is provided with the exit passageway (22) of left and right horizontal arrangement, the first, second access road (1,2) common vertical
Connect the import of the hybrid channel (3) of left and right horizontal arrangement, the outlet connection outlet channel (22) of hybrid channel (3), feature
It is；From left to right be equipped with n group jet stream and return-flow structure along the central axis direction of hybrid channel (3), n >=4, every group of jet stream and time
Flow structure is from left to right sequentially connected in series group by reducing pipe (4), efflux nozzle (5), feedback channel (19) and diffuser (21)
At；Every group of jet stream and return-flow structure have 2 relative to the feedback channel (19) being arranged symmetrically before and after central axis, and each feedback is logical
Road (19) be by feedback channel inlet-side channel (8), feedback channel transition passage (10), feedback channel outlet-side channel (12) with
And the ring structure that mixed zone (18) connect into, the entrance of 2 feedback channel inlet-side channels (8) and 2 feedback channels outlets
The outlet of wing passage (12), which connects, to be communicated, and is collectively formed mixed zone (18), and the entrance of mixed zone (18) connects efflux nozzle (5),
Mixed zone (18) passes through mixed zone outlet (20) connection diffuser (21)；
Liquid A to be mixed enters second entrance channel (2) through upper cover plate (28), and liquid B to be mixed enters the through upper cover plate (28)
One access road (1), two kinds of liquid merge into mixed liquor in hybrid channel (3), preliminary to mix；Then mixed liquor enters jet stream
And return-flow structure, mixed liquor is accelerated by reducing pipe (4), high-speed jet is generated by efflux nozzle (5), in efflux nozzle
(5) low-pressure area is nearby generated；High-speed jet enters mixed zone (18), and constantly the lower fluid of volume suction surrounding mixing efficiency, which enters, penetrates
Stream；When mixed liquor reaches mixed zone outlet (20) nearby, the pressure of mixed liquor is higher than efflux nozzle (5) nearby due to high-speed jet
The low-pressure area of formation, thus the mixed liquor near the higher median plane of mixing efficiency is flowed directly out from mixed zone outlet (20), separately
A part of lower fluid of mixing efficiency under differential pressure action enter feedback channel (19), through feedback channel inlet-side channel (8),
It is returned near efflux nozzle (5) after feedback channel transition passage (10), feedback channel outlet-side channel (12) reflux, and again
The high-speed jet volume generated by efflux nozzle (5) is inhaled and blending, carries out secondary mixing；Pass through n group jet stream and reflux in mixed liquor
After structure function, realization is thoroughly mixed.
2. a kind of reflux passive type micro-mixer based on jet current principle according to claim 1, it is characterized in that；Feedback channel
Inlet-side channel (8), feedback channel transition passage (10), feedback channel outlet-side channel (12) these three channels channel width
It is sequentially reduced.
3. a kind of reflux passive type micro-mixer based on jet current principle according to claim 1, it is characterized in that；Feedback channel
Transition passage (10) and hybrid channel (3), mixed zone (18) are parallel, and the axial length of mixed zone (18) is less than feedback channel mistake
The axial length of channel (10) is crossed, feedback channel inlet-side channel (8) and feedback channel outlet-side channel (12) favour respectively
Hybrid channel (3).
4. a kind of reflux passive type micro-mixer based on jet current principle according to claim 1, it is characterized in that；Efflux nozzle
(5) channel width is less than the channel width of mixed zone outlet (20).
5. a kind of reflux passive type micro-mixer based on jet current principle according to claim 1, it is characterized in that；Reducing pipe
(4) outside wall surface is parallel with feedback channel outlet-side channel (12), and the outside wall surface and feedback channel entrance side of diffuser (21) are logical
Road (8) is parallel.
6. a kind of reflux passive type micro-mixer based on jet current principle according to claim 1, it is characterized in that；Adjacent two
In group jet stream and return-flow structure, the end of the diffuser (21) of left side jet stream and return-flow structure and right side jet stream and return-flow structure
Passage length between beginning the two of reducing pipe (4) is L4,600 μm≤L4≤800 μm；In every group of jet stream and return-flow structure
Efflux nozzle (5) and mixed zone outlet the distance between (20) be L5, L5=400 μm.
7. a kind of reflux passive type micro-mixer based on jet current principle according to claim 1, it is characterized in that；Feedback channel
The channel width of outlet-side channel (12) is L11, L11=60 μm；The channel width of feedback channel transition passage (10) is L12,
L12=80μm；The channel width of feedback channel inlet-side channel (8) is L13, L13=100 μm；Feedback channel transition passage (10)
Outer ring wall surface and the distance between the central axis of hybrid channel (3) be L16, L16=500 μm.
8. a kind of reflux passive type micro-mixer based on jet current principle according to claim 3, it is characterized in that；Feedback channel
Inclination angle between inlet-side channel (8), feedback channel outlet-side channel (12) and hybrid channel (3) is 135 °.
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| CN201610630714.XA CN106215789B (en) | 2016-08-04 | 2016-08-04 | A kind of reflux passive type micro-mixer based on jet current principle |
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| CN106669512B (en) * | 2016-12-27 | 2019-10-25 | 齐鲁工业大学 | Passive type microchannel |
| CN107824066B (en) * | 2017-11-20 | 2023-04-07 | 浙江大学 | Mixer based on white sea chain ring type |
| CN107983244B (en) * | 2018-01-03 | 2020-09-11 | 燕山大学 | Forced mixer |
| CN109985544B (en) * | 2019-04-18 | 2020-06-23 | 中国石油大学(华东) | Passive micro mixer with backflow structure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200722713A (en) * | 2005-12-06 | 2007-06-16 | Univ Nat Tsing Hua | Microfluidic oscillator |
| CN102553482A (en) * | 2012-02-24 | 2012-07-11 | 张端 | Novel backflow-type micro mixer |
| CN203342716U (en) * | 2013-06-13 | 2013-12-18 | 重庆大学 | Micro-fluid mixing system |
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2016
- 2016-08-04 CN CN201610630714.XA patent/CN106215789B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200722713A (en) * | 2005-12-06 | 2007-06-16 | Univ Nat Tsing Hua | Microfluidic oscillator |
| CN102553482A (en) * | 2012-02-24 | 2012-07-11 | 张端 | Novel backflow-type micro mixer |
| CN203342716U (en) * | 2013-06-13 | 2013-12-18 | 重庆大学 | Micro-fluid mixing system |
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