CN106208799A - Acoustic energy sampler and apply its sound sensing element - Google Patents

Acoustic energy sampler and apply its sound sensing element Download PDF

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CN106208799A
CN106208799A CN201510216785.0A CN201510216785A CN106208799A CN 106208799 A CN106208799 A CN 106208799A CN 201510216785 A CN201510216785 A CN 201510216785A CN 106208799 A CN106208799 A CN 106208799A
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sound
film layer
film
conductive material
cavity
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CN106208799B (en
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王中林
范兴
陈俊
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Beijing Institute of Nanoenergy and Nanosystems
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Beijing Institute of Nanoenergy and Nanosystems
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Abstract

The invention provides a kind of acoustic energy sampler.This acoustic energy sampler includes: cavity shell, and its outer wall has N number of through hole, and its two ends are sealed by elastic film;M film type acoustical-electrical transducer part, is fixed on the outer wall of cavity shell, and by airtight for N number of through hole, the pipeline in cavity shell is filled acoustic medium;In sound wave row ripple communication process, M film type acoustical-electrical transducer part gathers the vibration signal being conducted out by respective through hole on cavity shell outer wall respectively, produces signal of telecommunication output.The present invention is by changing the distribution of cavity shell internal diameter and through hole to form, at device different parts, the resonant structure that natural frequency is different, realize subregional combinative resonator, thus overcome narrow being difficult to of tradition resonant structure frequency response range to take into account an efficient and difficult problem for wideband simultaneously.Based on this acoustic energy sampler, present invention also offers artificial cochlea, sonifer, sonic transducer and recording probe.

Description

Sound energy acquisition device and sound sensing part using same
Technical Field
The invention relates to the technical field of sensors in the electronic industry, in particular to a sound energy acquisition device and a cochlear implant, a hearing aid, a sound sensor and a recording probe applying the sound energy acquisition device.
Background
Acoustic energy is one of the most widespread forms of energy in nature. Everyday life is pervasive with acoustic energy in the form of speech, music, and ambient noise, for example. Sound energy has not been widely utilized due to the lack of efficient collection techniques for low density energy such as sound.
The current sound energy collection technology is mainly based on the principles of piezoelectric effect, electrostatic effect, frictional electrification effect and the like. However, existing sound energy collecting devices based on different principles have the defects of low sensitivity, narrow working frequency spectrum range and the like, and a large amount of low-density sound energy is dissipated through other ways such as air damping and the like without being converted into electric energy. Therefore, conventionally, the sound collection efficiency is mostly improved by adding an additional acoustic resonance cavity.
However, the conventional acoustic resonant cavity not only has a complex structure, but also tends to have a narrow resonant frequency band, and it is difficult to achieve sound energy collection in a wide frequency band. In addition, the method is accompanied with a series of technical problems of small volume specific power density, complex device structure, high material requirement, poor portability, difficult installation and the like.
Disclosure of Invention
Technical problem to be solved
In view of the above technical problems, the present invention provides a sound energy collecting device and a cochlear implant, a hearing aid, a sound sensor and a recording probe using the same, so as to achieve broadband and efficient sound energy collection.
(II) technical scheme
According to one aspect of the present invention, a sound energy harvesting device is provided. The sound energy collecting device includes: the cavity tube shell is provided with N through holes on the outer wall, and two ends of the cavity tube shell are sealed by elastic films to form two film windows, namely a sound wave incident window and a sound wave exit window; m film type sound-electricity conversion devices are fixed on the outer wall of the cavity tube shell and seal the N through holes, a pipeline in the cavity tube shell is filled with liquid or gas, and the sound wave conduction speed is higher than that of a sound transmission medium of air. M is less than or equal to N, the sound waves introduced from the sound wave entrance window form traveling wave propagation in the sound transmission medium, and are finally released from the sound wave exit window, and in the traveling wave propagation process, M thin film type sound-electricity conversion devices respectively collect vibration signals transmitted from corresponding through holes in the outer wall of the cavity tube shell to generate electric signals to be output.
According to another aspect of the present invention, there is provided a cochlear implant. The artificial cochlea adopts M thin film type sound-electricity conversion devices of the sound energy collecting device as the signal collecting end.
According to another aspect of the invention, a hearing aid is provided. The hearing aid uses M thin film type sound-electricity conversion devices of the sound energy collecting device as a signal collecting end.
According to another aspect of the present invention, an acoustic sensor is provided. The acoustic sensor uses M thin film type sound-electricity conversion devices of the sound energy collecting device as a signal collecting end of the acoustic sensor.
According to another aspect of the invention, a recording probe is provided. The recording probe uses M film type sound-electricity conversion devices of the sound energy collecting device as a signal collecting end.
(III) advantageous effects
According to the technical scheme, the sound energy acquisition device and the sound sensing component using the same have the following beneficial effects:
(1) the internal diameter of the cavity tube shell and the distribution of the through holes are changed to form resonance structures with different natural frequencies at different parts of the device. Therefore, the sound waves of different frequency bands can respectively form high-efficiency resonance in corresponding regions, and a composite resonant cavity of a subregion is realized, so that the technical problem that the frequency response range of the traditional resonant structure is narrow and high efficiency and broadband are difficult to take into account simultaneously is solved. In addition, the structural parameters of the corresponding area film type sound-electricity conversion device are changed to match the resonance characteristic of the cavity, so that the characteristic frequency of the device is consistent with the resonance frequency of the area, and efficient sound collection is realized. The high-efficiency and broadband sound energy collection effect can be realized through the organic combination of the two characteristics;
(2) the device works based on the principle of triboelectricity generation of the film, and can directly generate a voltage/current signal which changes along with an external sound wave signal under the condition of not needing external power supply, thereby realizing a self-powered broadband recording technology. Conventional recording technologies based on capacitors or resistors require external power to convert the change of capacitance/resistance characteristics into electrical signals. This advantage of the invention is particularly useful for reducing power consumption and reducing device size.
By combining the two aspects, the invention has the advantages of space saving, high acquisition efficiency, wide working frequency band and the like on the premise of realizing the basic functions of recording and sound energy acquisition, and is particularly suitable for different occasions such as hearing aid of human ears, energy collection, noise control and the like.
Drawings
FIG. 1 is a schematic diagram of four assembling methods of an acoustic-electric converter in an acoustic energy collection device according to the present invention;
FIG. 2 is a schematic view showing the operation of the thin film type acoustic-electric conversion device of FIG. 1 in an assembly mode III;
FIG. 3 is a schematic diagram of the operation of a sound energy harvesting device according to a second embodiment of the present invention;
fig. 4 is a schematic structural view of a sound energy collecting device according to a second embodiment of the present invention.
Detailed Description
In carrying out the present invention, the applicant has noted that the ear of humans as well as animals is a very sensitive sound energy harvesting organ. The ear collects sound energy through the external auditory canal and efficiently transmits the sound energy to the cochlea in the inner ear through the middle ear, and the cochlea efficiently converts the sound energy in a wide frequency range into an electric signal in a small space by using a special volute structure and transmits the electric signal to a nervous system. The method has the advantages of high space utilization rate, low sensitivity lower limit, wide working spectrum and the like.
The invention uses the cochlea structure of the human bionics for reference, a series of film type sound-electricity conversion devices with different working frequencies are assembled on the porous shell of the volute structure to manufacture a novel sound energy acquisition device, and a sensor, a hearing aid and a recording probe are manufactured based on the sound energy acquisition device.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
First, first embodiment
In one exemplary embodiment of the present invention, a sound energy harvesting device is provided. The sound energy collection device of the present embodiment includes: the outer wall of the cavity tube shell is provided with N through holes; and the M film type sound-electricity conversion devices are fixed on the outer wall of the cavity tube shell and seal the N through holes, and the working frequencies of the M film type sound-electricity conversion devices are different. The two ends of the cavity tube shell are sealed by elastic films to form two film windows, namely a sound wave incident window and a sound wave exit window, liquid or gaseous sound transmission media with a sound wave transmission speed higher than that of air are filled in the cavity tube shell, wherein M is less than or equal to N, sound waves guided by the sound wave incident window form traveling wave transmission in the sound transmission media and are finally released by the sound wave exit window, and in the traveling wave transmission process, M film type sound-electricity conversion devices respectively collect vibration signals transmitted by through holes in the outer wall of the cavity tube shell to generate electric signals to be output.
In this embodiment, the inner diameter of the pipeline in the cavity pipe shell is changed, and the aperture of the through hole on the outer wall of the cavity pipe shell can also be changed along with the change of the inner diameter of the pipeline, so that resonance structures with different natural frequencies are formed in different areas in the pipeline. Therefore, the sound waves of different frequency bands can respectively form high-efficiency resonance in corresponding regions, and a composite resonant cavity of a subregion is realized, so that the technical problem that the frequency response range of the traditional resonant structure is narrow and high efficiency and broadband are difficult to take into account simultaneously is solved.
In addition, the characteristic frequency of the film type sound-electricity conversion device arranged on the outer wall of the cavity tube shell is consistent with the resonance frequency of the resonance structure in the area, so that efficient sound collection is realized. Specifically, in this embodiment, along the direction from large to small of the diameter of the pipeline, the diameter of the through hole on the outer wall of the cavity tube shell is gradually reduced, and the working frequency of the corresponding thin film type sound-electricity conversion device is also gradually reduced.
The following describes each component of the sound energy collecting device of the present embodiment in detail.
In this embodiment, the cavity tube shell is a spiral casing structure formed by heating and softening a horn-shaped pipe made of thermoplastic plastic and then coiling the pipe. Before heating and softening, a plurality of through holes with the average hole diameter of 0.5mm are processed on the outer wall of the horn-shaped pipeline. Wherein, along the direction that the pipeline bore is from big to little, the through-hole aperture reduces gradually. After the pipe is coiled into a volute structure, a series of film type sound-electricity conversion devices with working frequencies sequentially reduced are sequentially installed along the direction from large caliber to small caliber of the pipeline after the pipe shell of the cavity is cooled and solidified.
In other embodiments, the cavity tube shell can also be a straight pipeline with uniform pipe diameter, the aperture of the through hole on the outer wall of the cavity tube shell changes along with the change of the distance from the through hole to the pipeline port along the inner wall of the pipeline, and the aperture of the through hole is smaller along the farther the inner wall of the pipeline from the pipeline port, so that resonance structures with different natural frequencies can be formed in different areas in the pipeline.
In the invention, different acoustic structures are designed along the pipe wall, so that the thin film devices arranged at different positions of the pipe wall can have different frequency responses, and thus, the wide frequency response can be expanded in space.
It should be noted that, in addition to the above-described duct of the scroll structure, the normal straight duct has similar effects to the above-described duct of the scroll structure in terms of sound frequency distribution. However, the volute structure has two advantages over a simple duct:
(1) if the device is only a straight pipeline, the whole sound energy collecting device becomes very slender and is difficult to install in narrow spaces such as cochlea, and the device is limited in practical use;
(2) the curved pipeline in the volute structure is beneficial to more concentrated application of sound pressure on the outer side pipe wall attached with the thin film device, and the effect of the curved pipeline is superior to that of a common straight pipeline.
Regarding the chamber tube shell of the volute structure, the following points are needed to explain:
(1) besides thermoplastics, other materials can be used, for example: metal, plastic, resin, plaster, paper shells, composites thereof, etc., to prepare the volute structure, and several other exemplary embodiments and corresponding preparation methods will be given below;
(2) instead of the above-described trumpet shape with one large end and one small end, other shapes of ducts may be used, such as: the spiral case structure is prepared by a straight pipeline with large two ends and small middle part and uniform pipe diameter, and the spiral case structure can also be realized by only a tubular structure if the spiral case structure is not coiled;
(3) the aperture of the through holes on the cavity tube shell is not limited to the 0.5mm, and can be selected from 100 nm-10 mm, and the hole center distance of the through holes is between 100 nm-10 mm.
Two ends of the cavity tube shell are sealed by elastic films to form two film windows. The elastic film may be a metal or polymer film, for example: rubber film, biological macromolecule film, plastic film, metal foil or composite film of the above films, etc., and the thickness is between 500nm and 0.5 mm. Sound is transmitted into or out of the chamber envelope through the flexible membrane. The working frequency range of the sound-electricity conversion device is changed along with the difference of the material and the thickness of the elastic film.
The sound transmission medium is filled in the cavity tube shell. Wherein, the sound transmission medium can be liquid or gas with higher sound wave conduction velocity than air, such as: helium, water, glycerol, or a mixture of two or more of the foregoing. The sound transmission medium with high sound wave conduction speed can ensure that sound energy can be efficiently transmitted to a corresponding resonance area, so that efficient and broadband energy collection is realized.
In this embodiment, after the sound-electricity conversion device is fixed on the outer wall of the cavity tube shell, the glycerol/water mixed solution is poured into the inner cavity of the cavity tube shell, and the opening of the pipeline is covered with a plastic elastic film with the thickness of 10 μm. When in operation, the sound wave is guided in by the plastic elastic film with a larger opening end.
Here, it should be noted that introduction of sound waves from the open ends having different sizes has different technical effects. The entrance from a large opening is beneficial to more collecting sound waves; entering from the small open end helps to enhance the response of the high frequency sound waves.
For the film type sound-electricity conversion device, it may correspond to one through hole on the cavity tube shell, or correspond to a plurality of through holes in one region on the cavity tube shell. Each of the thin film type acoustic-electric conversion devices includes: an outer membrane layer and an inner membrane layer. The inner film layer of one of the two parts is continuous to seal the through hole on the outer wall of the cavity tube shell, and the other part is provided with a small hole. And the parts of the outer film layer and the inner film layer which are contacted with each other are made of materials which are positioned at different positions of the friction electrode sequence, and cannot be simultaneously made of conductive materials, and the outer film layer and the inner film layer can move relatively.
In this embodiment, the assembly method of the acoustic-electric conversion device is shown as an assembly method I in fig. 1. The inner membrane layer is attached to the outer side of the cavity tube shell, and is a polymer film with one surface coated with a conductive material, and the conductive material faces the cavity tube shell. Specifically, the intima layer 220 is made by depositing 50nm thick aluminum on a 0.05mm thick polytetrafluoroethylene film. The outer film layer is distributed with many tiny through holes and is composed of a porous substrate (thin plate or film) coated with a conductive material. The aperture of the small holes is 100 nm-10 mm, the hole center spacing is 100 nm-10 m, and the thickness is 10 μm-10 mm. Specifically, the porous substrate is a plastic substrate with a thickness of 0.2mm, and a copper thin film with a thickness of 100nm is coated on the porous substrate to serve as a conductive material.
The high molecular film of the inner film layer is contacted with the conductive material of the outer film layer, and the high molecular film of the inner film layer and the conductive material of the outer film layer are prepared from materials positioned at different positions of the friction electrode sequence. And, when assembling, there may be a gap between the outer membrane layer and the inner membrane layer, or no gap, if any, the gap pitch is less than 20 μm.
In this embodiment, the response frequency f of the acoustic-electric conversion device is adjusted by changing the tensile elasticity of the polymer film on the inner film layer and the pore diameter of the small pore on the outer film layer. In general, as the tensile elasticity of the polymer film increases, the response frequency f of the acoustic-electric conversion device increases, and as the pore size of the small pores on the porous substrate increases, the range of the response frequency f of the acoustic-electric conversion device widens and shifts to a high frequency.
In the present invention, for a plurality of acoustic-electric conversion devices in the entire region or in adjacent regions, the inner membrane layers inside the acoustic-electric conversion devices may be connected integrally, or the outer membrane layers outside the acoustic-electric conversion devices may be connected integrally. In this embodiment, the inner membrane layers inside the plurality of acoustic-electric conversion devices in the adjacent regions are integrally connected.
For each inner film layer, the periphery is fixed, the thickness of the film is between 1 and 100 mu m, and the area is 0.5mm2~50cm2The film tension is between 0Pa and 100kPa, the thicknesses of the films can be the same or different, and the resonance frequency is between 20kHz and 10000 kHz. The local resonant frequency varies with the tension on each small area and the thickness of the film. On the other hand, the local resonance frequency differs depending on the local thickness of the outer film layer and the pore structure. The two components act together to cause the resonant frequencies of the film type sound-electricity conversion devices at different parts of the surface of the cavity tube shell to be different.
It should be noted that besides the assembly mode I shown in fig. 1, the present invention can also adopt various other modes of the acoustoelectric conversion device:
(1) referring to the assembly method II in fig. 1, the inner film layer is also a polymer film with one surface coated with a conductive material, and the polymer film faces the cavity case. The outer membrane layer is a porous substrate (sheet or film) with a plurality of tiny through holes distributed therein. And, the porous substrate is coated with a conductive material through which the pores also extend.
The conductive material of the inner membrane layer is contacted with the porous substrate of the outer membrane layer, and the conductive material of the inner membrane layer and the porous substrate of the outer membrane layer are prepared from materials located at different positions of the friction electrode sequence. In the process that the conductive material of the inner film layer and the porous substrate of the outer film layer rub against each other, the conductive material of the inner film layer and the conductive material of the outer film layer output electric signals together.
(2) Referring to the assembly method III of fig. 1, the inner film layer has a plurality of small holes corresponding to the plurality of through holes of the cavity case, and one surface of the small holes is coated with a triboelectric material of a conductive material, and the conductive material on the inner side of the small holes faces the cavity case. The outer film layer is a polymer film coated with a conductive material, and small holes are not distributed on the surface of the outer film layer.
The triboelectrification material of the inner film layer is contacted with the conductive material of the outer film layer, and the triboelectrification material and the conductive material are prepared from materials positioned at different positions of a triboelectrification electrode sequence. In the process that the friction electrification material of the inner film layer and the conductive material of the outer film layer rub against each other, the conductive material of the inner film layer and the conductive material of the outer film layer output electric signals together.
(3) Referring to the assembly method IV in fig. 1, the inner film layer is a single-layer structure made of a conductive material, and is directly assembled by using the porous shell with the volute structure as a substrate. It is particularly noted that the conductive material has small holes corresponding to the plurality of through holes in the volute structure. The outer film layer is a polymer film coated with a conductive material, and small holes are not distributed on the surface of the outer film layer.
The conductive material of the inner film layer is contacted with the polymer film of the outer film layer, and the conductive material of the inner film layer and the polymer film of the outer film layer are prepared from materials positioned at different positions of the friction electrode sequence. In the process of mutual friction between the conductive material of the inner film layer and the polymer film of the outer film layer, the conductive material of the inner film layer and the conductive material of the outer film layer output electric signals together.
It should be noted that, in the three types of acoustic-electric conversion devices, the contents of the aperture, the adjustment of the response frequency, the operation principle of the acoustic-electric conversion device, and the like are completely the same as those already described in the present embodiment, and a description thereof is not repeated here.
For the sound energy collecting device of the embodiment, after sound waves enter the inner pipeline of the cavity tube shell of the volute structure, the sound waves are transmitted along the pipeline, and pressure change near the tube wall can be continuously caused in the transmission process. The acoustic structures of different positions of the pipeline are different, so that the resonance structures are different, and when a certain frequency component of incident sound waves is the same as the resonance frequency of a certain part of the pipeline, the pressure change amplitude of the pipeline wall is extremely large, so that the sound-electricity conversion device at the position is pushed to generate large output, and the high-efficiency energy collection of the sound waves with different frequencies at different positions is realized.
The operation of the thin film type acoustic-electric conversion device will be described below by taking the assembly mode I in fig. 1 as an example. As shown in fig. 2, inside the acoustic-electric conversion device, under the driving of sound waves, the outer film layer and the inner film layer continuously rub or collide with each other, and simultaneously, a charge signal is generated, so that electric energy output is realized. When the contact area between the conductive material of the outer film layer and the polymer film of the inner film layer is the largest, more electrons are transferred from the conductive material to the polymer film due to different affinities of the two materials to the electrons, so that the side of the conductive material is positively charged, and the side of the polymer film is negatively charged. Next, the sound pressure effect causes the conductive material of the outer membrane layer to separate from the polymer film of the inner membrane layer and causes a change in the internal electric dipole, thereby driving electrons to flow from the conductive material of the back of the polymer film to the conductive material of the outer membrane layer via the external load until the degree of separation of the conductive material of the outer membrane layer from the polymer film of the inner membrane layer reaches a maximum. Then, the conductive material of the outer film layer and the polymer film of the inner film layer are restored to contact again, and then the reverse flow of electrons is caused. In this way, a periodic current output is formed at the external load.
Tests show that the working frequency range of the device can reach 20Hz to 4000Hz for the sound energy collecting device of the embodiment. Under the acoustic condition of 114dB, the open-circuit voltage reaches 65V, and the short-circuit current reaches 6.8mA/m2
Second and third embodiments
In this embodiment, the resin volute pipe with only one open end is prepared by 3D printing.
Fig. 3 is a schematic view illustrating an operation principle of a sound energy collecting device according to a second embodiment of the present invention. Two side-by-side sub-lumens are nested inside the volute conduit as shown in figure 3. The inner sides of the sub-cavity pipes are separated by continuous and complete pipe walls, and are only communicated with the tail end of the volute pipeline through inner small holes, and the two sub-cavity pipes form a cavity pipe shell of the sound energy acquisition device. The outer side of the sub-cavity pipe and the whole volute pipeline share a section of pipe wall, the wall thickness of the pipe wall is 2mm, and a plurality of through holes with the average pore diameter of 1mm are distributed on the pipe wall.
Along the spiral from inside to outside direction of spiral case pipeline, the through-hole aperture increases gradually. A series of film type sound-electricity conversion devices are arranged on the outer wall of the volute, and the working frequency of the film type sound-electricity conversion devices is sequentially reduced along the spiral direction from inside to outside of the volute pipeline. The thin film type acoustic-electric conversion device is assembled in a manner shown as an assembly manner II in fig. 1, and the response frequency of the device is adjusted by changing the tensile tightness of the outer film layer and the pore diameter of the porous thin layer electrode. Wherein, the inner film layer is prepared by coating polytetrafluoroethylene with the thickness of 100nm on a porous copper foil with the thickness of 0.02 mm; the outer membrane layer was made by depositing 50nm thick aluminum on a 0.05mm thick rubber film. Then, water was poured into the pipe and a rubber film having a thickness of 10 μm was coated on the opening of the pipe.
As shown in fig. 3, sound waves are incident from one of the windows at the open end, travel along the subchamber tube filled with the sound-transmitting medium, pass through the connecting aperture at the volute tip, enter the other subchamber tube, and finally release sound pressure from the other window at the open end. The sound wave is longitudinal wave, and the sound wave is transmitted, so that the partial sound transmission medium in the sub-cavity is sequentially contracted and expanded, and the film type sound-electricity conversion device attached to the outer wall of the porous shell is pushed through the through holes in the porous shell. The polytetrafluoroethylene layer and the aluminum layer are in periodic separated contact under the driving of sound waves of the film type sound-electricity conversion device. When the contact area of the metal layer of the porous electrode and the polymer layer is the largest, more electrons are transferred from the metal layer to the polymer layer due to different affinities of the two materials to electrons, so that the metal side is positively charged, and the polymer side is negatively charged. Then, the sound pressure effect can cause the porous electrode to be separated from the polymer film and cause the change of the internal electric dipole, thereby driving electrons to flow from the back electrode on the back of the polymer film to the metal layer of the porous electrode through the external load until the separation degree of the porous electrode and the polymer film reaches the maximum. Then, the metal layer of the porous electrode comes back into contact with the polymer layer again, and then causes a reverse flow of electrons. In this way, a periodic current output is formed at the external load.
Tests show that the sound energy collecting device can output electric signals which change along with the frequency and the amplitude of external sound under the condition of not needing external power supply. The logarithm of the short-circuit current of the device is in direct proportion to the sound pressure level, and the change frequency of the short-circuit current is consistent with the external sound wave. Under the sound pressure condition of 50dB, a remarkable electric signal can be output. The response frequency range of the device can reach 20Hz to 6500Hz, the device can be easily restored to sound for playing through the existing electronic measurement and signal processing technology, and the device can be used as a broadband self-powered recording probe.
Third and fourth embodiments
The sound energy collecting device of the embodiment is also of a volute structure as a whole. Different from the second embodiment, the volute pipeline is formed by heating and softening a thermoplastic plastic pipeline with a large opening and a small middle, folding and arranging the pipeline in parallel, and spirally coiling the pipeline.
The outer wall of the thermoplastic plastic pipeline is distributed with a plurality of through holes with the average aperture of 0.6mm, and the aperture of the through holes is gradually reduced along the direction from large to small of the caliber of the pipeline. After the volute is cooled and solidified, a series of film type sound-electricity conversion devices with working frequencies which are also reduced in sequence are sequentially installed along the direction from large caliber to small caliber of the pipeline.
In this embodiment, the assembly method of the acoustic-electric conversion device is as shown in assembly method II in fig. 1. Wherein the response frequency of the device is adjusted by changing the tensile tightness of the inner membrane layer and the pore size of the outer membrane layer. When assembling, there may be or may not be a gap between the inner and outer film layers, and if there is a gap, the gap distance is less than 20 μm. Wherein, the outer film layer is prepared by coating polytetrafluoroethylene with the thickness of 100nm on a porous copper foil with the thickness of 0.02 mm; the inner membrane layer was made by depositing 50nm thick aluminum on a 0.05mm thick rubber film. Then, industrial engine oil was poured into the pipe, and a copper foil having a thickness of 5 μm was coated on the opening of the pipe. In operation, sound waves are directed through the membrane at the larger open end.
As for the sound energy collecting device of the embodiment, tests show that the working frequency range of the device can reach 50Hz to 6000 Hz. Under the acoustic condition of 114dB, the open-circuit voltage reaches 53V, and the short-circuit current reaches 4.8mA/m2.
Fourth and fourth embodiments
In this embodiment, a volute conduit with only one open end is prepared by pulp casting and drying. Two sub-cavity pipes which are arranged side by side are nested inside the volute pipeline. The inner sides between the sub-cavity pipes are separated by a continuous and complete pipe wall and are communicated only at the tail end of the volute structure through an inner small hole. The outer side of the sub-cavity pipe and the porous shell of the whole volute structure share a section of pipe wall, the wall thickness of the pipe wall is 1.5mm, and a plurality of through holes with the average pore diameter of 1mm are distributed on the pipe wall. Along the spiral from inside to outside direction of spiral case structure pipeline, the through-hole aperture increases gradually. The two sub-cavities form a cavity tube shell of the sound energy collecting device.
As shown in an assembly mode IV in the attached figure 1, the outer wall of the volute is coated with 50nm of aluminum as an inner film layer. A series of outer film layers with different tightness are adhered to the outer wall of the volute, and the outer film layers are gradually tightened in the directions of the mouth and the top of the volute. Wherein the outer film layer is prepared by coating polytetrafluoroethylene with the thickness of 100nm on an aluminum film with the thickness of 0.01 mm. Then, helium gas is filled in the spiral case, and a polyvinyl chloride film with the thickness of 40 mu m is covered on the opening of the pipeline. Wherein the polyvinyl chloride films of the openings of the two sub-cavity tubes are separated from each other.
As for the sound energy collecting device of the embodiment, tests show that the working frequency range of the device can reach 80Hz to 5000 Hz. Under the acoustic condition of 114dB, the open-circuit voltage reaches 38V, and the short-circuit current reaches 4.6mA/m2
Fifth and fifth embodiments
Fig. 4 is a schematic structural diagram of a sound energy collecting device according to a fifth embodiment of the present invention. In the present embodiment, as shown in fig. 4, an aluminum volute pipe having only one end open is prepared by casting. Two sub-cavity pipes which are arranged side by side are nested inside the volute pipeline. The inner sides of the sub-cavity pipes are separated by continuous and complete pipe walls, and the inner sides are communicated only at the tail end of the volute pipeline through inner small holes. The outer side of the sub-cavity pipe and the whole volute share a section of pipe wall, the wall thickness of the pipe wall is 0.3mm, and a plurality of through holes with the average pore diameter of 0.8mm are distributed on the pipe wall. Along the spiral from inside to outside direction of spiral case pipeline, the through-hole aperture increases gradually.
As shown in an assembly mode III in the attached figure 1, the outer wall of the volute is coated with 150nm of polyvinylidene fluoride. A series of outer film layers with different tightness are adhered to the outer wall of the volute, and the outer film layers are gradually tightened in the directions of the mouth and the top of the volute. Wherein the outer film layer is prepared by coating 100nm thick copper on a 0.01mm thick rubber film. Then, helium gas is filled in the spiral case, and a polyvinylidene fluoride film with the thickness of 20 mu m is covered on the opening of the pipeline. Wherein the polyvinylidene fluoride films of the openings of the two sub-cavities are separated from each other.
For the sound energy of the embodimentThe test shows that the working frequency range of the whole device can reach 20 Hz-6000 Hz. Under the acoustic condition of 114dB, the open-circuit voltage reaches 43V, and the short-circuit current reaches 3.8mA/m2
Sixth and sixth embodiments
In a sixth exemplary embodiment of the present invention, there is also provided a cochlear implant to which the above-described sound energy harvesting device is applied.
The artificial cochlea is arranged in an auricle, and a signal acquisition end of the artificial cochlea is formed by N thin film type acoustic-electric conversion devices of a sound energy acquisition device. The film type sound-electricity conversion devices at different positions respectively aim at sound stimulation of different frequencies and generate electric signals of different frequencies. The cochlear implant is used as an artificial cochlear implant, a proper amount of electric energy is transmitted to an electrode series in the cochlea after being modulated, and residual acoustic nerve fibers in the cochlea are stimulated along the electrodes distributed on the series. The electroacoustic information is transmitted to the brain along the auditory pathway for interpretation. The regional sound collection structure and the electric signal output are particularly suitable for being matched with the functional characteristics of the ear nerves.
Compared with the current cochlear implant technology, the technology has the outstanding advantage that no external power supply is needed.
Seventh, seventh embodiment
In a seventh exemplary embodiment of the present invention, there is also provided a hearing aid to which the above-described sound energy harvesting device is applied.
In this hearing aid, the signal acquisition terminal of the hearing aid is constituted by N thin film type acousto-electric conversion devices of the acoustic energy acquisition device.
Because the sound energy acquisition device of the embodiment has the characteristic that the sound energy acquisition can be completed without external power supply, the power consumption of the acquisition end of the hearing aid can be saved, and the service life of the battery can be prolonged only by providing external power supply for the amplification end of the signal. Meanwhile, the acquisition end of the hearing aid does not need to be supplied with power, so that a power supply system is omitted, and the volume is reduced.
Eighth and eighth embodiments
In an eighth exemplary embodiment of the present invention, there is also provided an acoustic sensor to which the above-described acoustic energy harvesting device is applied. In the acoustic sensor, the signal acquisition end of the acoustic sensor is constituted by N thin film type acoustic-electric conversion devices of the acoustic energy acquisition device.
Ninth, ninth embodiment
In a ninth exemplary embodiment of the present invention, there is also provided a recording probe to which the above-described sound energy collecting device is applied.
In the recording probe, a signal acquisition end of the recording probe is formed by N film type sound-electricity conversion devices of a sound energy acquisition device.
For the recording probe of the embodiment, the recording probe can generate a charge signal which changes with the frequency and amplitude of the external sound wave without additional power supply of an external power supply, and the charge signal can be recorded by conventional electrical measuring equipment and restored into a sound signal by the existing signal processing technology.
In contrast to conventional recording techniques, the recording probe of the present embodiment generates a prior art compatible charge signal without requiring additional power. And the device has wide response frequency, high sensitivity and good sound restoration and reproduction capability, and is particularly suitable for occasions such as outdoor activities, stage recording, field investigation, underwater sound wave acquisition and the like.
Up to this point, the present embodiment has been described in detail with reference to the accompanying drawings. From the above description, those skilled in the art should clearly recognize the sound energy collecting device and the sound sensing part using the same of the present invention.
It should be noted that in the drawings or description, the same drawing reference numerals are used for similar or identical parts. Implementations not depicted or described in the drawings are of a form known to those of ordinary skill in the art. Furthermore, the above definitions of the various elements and methods are not limited to the particular structures, shapes or arrangements of parts mentioned in the examples, which may be easily modified or substituted by one of ordinary skill in the art, for example:
(1) the spiral winding mode of the pipeline can be replaced by folding, arranging, winding in a square shape and the like so as to be suitable for different application environments;
(2) the self-powered film type sound-electricity conversion device can be replaced by a traditional film type recording probe needing external power supply, so that the beneficial technical effects of broadband and high efficiency can be continuously kept for occasions with low power consumption requirements, and the mature and stable characteristics of the prior art are exerted;
(3) examples of parameters including particular values may be provided herein, but it should be understood that the parameters need not be exactly equal to the respective values, but may be approximated to the respective values within acceptable error tolerances or design constraints;
(4) directional phrases used in the embodiments, such as "upper," "lower," "front," "rear," "left," "right," and the like, refer only to the orientation of the figure. Accordingly, the directional terminology used is intended to be in the nature of words of description rather than of limitation.
In summary, the present invention provides a sound energy collecting device, which can form resonance structures with different natural frequencies at different positions by changing the distribution of through holes on a pipeline and the structural parameters of a corresponding area film type sound energy collecting device, thereby realizing efficient and broadband sound energy collection. The sound energy collecting device has the advantages of space saving, high collecting efficiency and the like, and has wide application prospect in the fields of cochlear implants, hearing aids, sound sensors, recording probes and the like.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (21)

1. A sound energy harvesting device, comprising:
the cavity tube shell is provided with N through holes on the outer wall, and two ends of the cavity tube shell are sealed by elastic films to form two film windows, namely a sound wave incident window and a sound wave exit window;
m film type sound-electricity conversion devices are fixed on the outer wall of the cavity tube shell and seal the N through holes, a pipeline in the cavity tube shell is filled with liquid or gas, and the sound wave conduction speed is higher than that of a sound transmission medium of air;
the sound waves introduced from the sound wave entrance window form traveling wave propagation in the sound transmission medium, and are finally released from the sound wave exit window, and in the traveling wave propagation process, the M thin film type sound-electricity conversion devices respectively collect vibration signals transmitted by corresponding through holes in the outer wall of the cavity tube shell to generate electric signals to be output.
2. The acoustic energy harvesting device of claim 1, wherein the inner diameter of the duct inside the chamber tube shell varies, and the diameter of the through holes in the outer wall of the chamber tube shell varies with the inner diameter of the duct; or,
the pipeline in the cavity pipe shell is a straight pipeline with uniform pipe diameter, and the aperture of the through hole on the outer wall of the cavity pipe shell changes along the change of the distance from the through hole to the pipeline port along the inner wall of the pipeline;
thereby forming resonant structures with different natural frequencies in different regions within the pipe.
3. The acoustic energy harvesting device of claim 1 or 2, wherein the cavity housing is a volute structure of coiled flared conduits;
or the cavity shell is a volute structure formed by large-end and small-middle-end pipelines or pipelines with uniform pipe diameters.
4. An acoustic energy harvesting device according to claim 2 or claim 3, wherein the characteristic frequency of the thin film acousto-electric transducer mounted on the outer wall of the housing is substantially the same as the resonant frequency of the resonant structure in the region.
5. The acoustic energy harvesting device according to any one of claims 2 to 4, wherein the aperture of the through hole on the outer wall of the chamber body tube shell is gradually reduced along the direction from the large aperture to the small aperture of the pipeline, and the working frequency of the corresponding film type acoustic-electric conversion device is also gradually reduced.
6. Sound energy harvesting device according to any of claims 1-5, characterized in that the aperture of the through-going holes is between 100nm and 10mm and the hole-centre spacing is between 100nm and 10 mm.
7. The acoustic energy harvesting device of any one of claims 1 to 6, wherein the chamber housing is a volute structure formed by heating and softening a trumpet-shaped pipe made of thermoplastic and then coiling the trumpet-shaped pipe.
8. The acoustic energy harvesting device of any of claims 1-6, wherein the acoustic energy harvesting device is a volute conduit as a whole;
two sub-cavity pipes side by side are nested inside the volute pipeline, the inner side between the two sub-cavity pipes is separated through a continuous and complete pipe wall, the two sub-cavity pipes are communicated through inner small holes only at the tail end of the volute pipeline, and the two sub-cavity pipes form a cavity pipe shell of the sound energy collecting device.
9. The acoustic energy harvesting device of claim 8, wherein the volute conduit is:
preparing by 3D printing;
alternatively, it is prepared by cast molding;
or heating and softening the thermoplastic plastic pipe with a large opening and a small middle, folding and arranging the pipe in parallel, and spirally coiling the pipe.
10. The acoustic energy harvesting device of claim 8, wherein the material of the volute conduit is plastic, resin, metal, or pulp.
11. The acoustic energy harvesting device of any of claims 1-10, wherein the thin film type acousto-electric conversion device is a self-powered or externally powered thin film type acousto-electric conversion device.
12. The acoustic energy harvesting device of claim 11, wherein the thin film type acousto-electric conversion device is a self-powered thin film type acousto-electric conversion device comprising: an outer membrane layer and an inner membrane layer;
one of the outer film layer and the inner film layer is continuous to seal the through hole on the outer wall of the cavity tube shell, and the other is distributed with small holes;
the parts of the outer film layer and the inner film layer which are contacted with each other are made of materials which are positioned at different positions of the friction electrode sequence and are not simultaneously conductive materials, and the two parts can move relatively.
13. The acoustic energy harvesting device of claim 12, wherein the inner membrane layer or the outer membrane layer is integrally connected to the entire area or a part of the area of the plurality of acousto-electric conversion devices.
14. The acoustic energy harvesting device of claim 12, wherein the operating frequency of the thin film type acousto-electric conversion device is adjusted by one or both of:
(1) adjusting the stretch tightness of one of the continuous outer film layer and the continuous inner film layer;
(2) the aperture of the small hole on the outer membrane layer or the inner membrane layer with the small hole is adjusted.
15. The acoustic energy harvesting device of claim 12, wherein the thin film type acousto-electric conversion device is assembled using one of the following:
(1) the inner film layer is a continuous film with one surface coated with a conductive material, and the conductive material faces the cavity tube shell; the outer membrane layer is formed by coating a porous substrate with a conductive material; wherein, the continuous film of the inner film layer is contacted with the conductive material of the outer film layer, and the continuous film and the conductive material are prepared by materials positioned at different positions of the friction electrode sequence;
(2) the inner film layer is a continuous film with one surface coated with a conductive material, and the continuous film faces the cavity tube shell; the outer membrane layer is formed by coating a porous substrate with a conductive material; wherein, the conductive material of the inner film layer is contacted with the porous substrate of the outer film layer, and the conductive material and the porous substrate are prepared by materials positioned at different positions of the friction electrode sequence;
(3) the inner film layer is provided with small holes corresponding to the plurality of through holes on the cavity tube shell, one surface of the inner film layer is coated with a triboelectric material of a conductive material, and the conductive material faces the cavity tube shell; the outer film layer is a continuous film coated with a conductive material; the triboelectrification material of the inner film layer is contacted with the conductive material of the outer film layer, and the triboelectrification material and the conductive material are prepared from materials positioned at different positions of a triboelectrification electrode sequence;
(4) the inner film layer is a single-layer structure formed by conductive materials, and the conductive materials are provided with small holes corresponding to a plurality of through holes on the volute structure; the outer film layer is a continuous film coated with a conductive material; the conductive material of the inner film layer is contacted with the continuous film of the outer film layer, and the conductive material of the inner film layer and the continuous film of the outer film layer are prepared from materials positioned at different positions of the friction electrode sequence.
16. The acoustic energy harvesting device of any one of claims 1 to 15, wherein the elastic film enclosing the two ends of the chamber envelope is made of a rubber film, a bio-macromolecular film, a plastic film, a metal foil or a composite film of the above films, and has a thickness of 500nm to 0.5 mm.
17. The acoustic energy harvesting device of any one of claims 1 to 15, wherein the duct-filled sound-conducting medium within the chamber tube is a mixture of one or more of the following materials: helium, water, glycerol.
18. A cochlear implant characterized by applying the sound energy collecting device according to any one of claims 1 to 17;
wherein, M thin film type sound-electricity conversion devices of the sound energy collecting device are used as the signal collecting end of the artificial cochlea.
19. A hearing aid, characterized in that a sound energy harvesting device according to any one of claims 1 to 17 is applied;
wherein, M thin film type sound-electricity conversion devices of the sound energy collecting device are used as the signal collecting end of the hearing aid.
20. An acoustic sensor, characterized in that the acoustic energy harvesting device of any one of claims 1 to 17 is applied;
m thin film type sound-electricity conversion devices of the sound energy collecting device are used as signal collecting ends of the sound sensor.
21. A recording probe, wherein the sound energy collection device of any one of claims 1 to 17 is applied;
m thin film type sound-electricity conversion devices of the sound energy collecting device are used as signal collecting ends of the recording probe.
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