CN106198452B - Gas analysis device and method based on spectrum technology - Google Patents
Gas analysis device and method based on spectrum technology Download PDFInfo
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- CN106198452B CN106198452B CN201610646880.9A CN201610646880A CN106198452B CN 106198452 B CN106198452 B CN 106198452B CN 201610646880 A CN201610646880 A CN 201610646880A CN 106198452 B CN106198452 B CN 106198452B
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- 238000004868 gas analysis Methods 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000001228 spectrum Methods 0.000 title claims abstract description 15
- 238000005516 engineering process Methods 0.000 title claims abstract description 14
- 238000004458 analytical method Methods 0.000 claims abstract description 25
- 230000003287 optical effect Effects 0.000 claims description 39
- 238000012306 spectroscopic technique Methods 0.000 claims description 9
- 230000001154 acute effect Effects 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000003595 spectral effect Effects 0.000 claims description 6
- 230000003993 interaction Effects 0.000 claims description 4
- 238000000862 absorption spectrum Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000001514 detection method Methods 0.000 description 1
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- 239000000463 material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
- G01J2003/423—Spectral arrangements using lasers, e.g. tunable
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
- G01N2021/399—Diode laser
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Abstract
The invention provides a gas analysis device and a method based on spectrum technology, wherein the gas analysis device comprises: the light source emits measuring light matched with the gas to be measured; the detector converts measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module; the detector is fixed on the voice coil motor and moves back and forth on the light path; and the analysis module is used for processing the electric signals by utilizing a spectrum technology so as to acquire the information of the gas to be detected. The invention has the advantages of high precision, simple structure, low cost and the like.
Description
Technical Field
The present invention relates to photoelectric analysis, and more particularly, to a gas analysis apparatus and method based on spectroscopic techniques.
Background
In gas sensors, the output light of the diode laser is highly divergent, and therefore a collimating optical element, such as a collimating lens, is required. The introduction of the collimating lens causes interference between the laser and the lens: the laser emitted by the laser and perpendicularly incident to the rear surface of the lens is partially reflected back to the laser, reflected at the front window of the laser, perpendicularly incident to the rear surface of the lens again, and the emergent light of the front and rear two times forms an interference. During the measurement of the gas absorption signal, fringes formed by interference will greatly reduce the gas detection limit, and therefore need to be avoided or eliminated to the greatest extent.
The traditional method for eliminating optical interference noise between the collimating lens and the laser comprises the following steps:
1. the lens is coated with an antireflection film, the interference intensity of the coated antireflection film can be reduced to a certain extent, optical noise cannot be well restrained, and the transmittance of the coated lens can be reduced along with daily wiping and mirror surface pollution;
2. the lens is at an angle to the optical axis. When the included angle between the axis of the lens and the optical axis is smaller, the suppression capability of optical interference noise is poorer; when the included angle between the lens and the optical axis is large, serious aberration exists, and the beam collimation effect is poor.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides a high-precision and low-cost gas analysis device based on a spectrum technology, which can inhibit interference noise.
The invention aims at realizing the following technical scheme:
a spectroscopic-based gas analysis device, the gas analysis device comprising:
the light source emits measuring light matched with the gas to be measured;
the detector converts measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module;
the detector is fixed on the voice coil motor and moves back and forth on the light path;
and the analysis module is used for processing the electric signals by utilizing a spectrum technology so as to acquire the information of the gas to be detected.
According to the above-described gas analysis device, preferably, the information is concentration, velocity, or temperature.
According to the gas analysis device described above, optionally, the light source includes:
the luminous body is fixed on the bracket;
the bracket is used for bearing the luminous body and is provided with an optical channel suitable for the light emitted by the luminous body to pass through;
the fixing piece is arranged on the bracket and is suitable for the emergent light to pass through;
the light collimation device is fixed on the light path of the emergent light and is suitable for collimating the emergent light;
an elastic member provided at a side portion of the light collimating device in an axial direction thereof;
and the piezoelectric device and the elastic piece are respectively arranged at two sides of the light collimation device along the axial direction of the light collimation device, and the light collimation device, the elastic piece and the piezoelectric device are restrained between the bracket and the fixing piece.
According to the gas analysis device described above, preferably, the holder is a sleeve having a radial portion at one end.
According to the gas analysis apparatus described above, preferably, the light collimating means, the elastic member, and the piezoelectric means are located inside the holder or the fixing member.
According to the above gas analysis device, preferably, the piezoelectric device, the light collimating device and the elastic member are sequentially disposed in a forward direction or a reverse direction along the light path direction of the outgoing light.
According to the gas analysis device described above, optionally, the light source includes:
the luminous body is fixed on the bracket;
the first bracket is used for bearing the luminous body;
the light collimation device is fixed on the light path of the emergent light of the luminous body and is used for collimating the emergent light; the included angle between the axis of the light collimation device and the optical axis of the emergent light is an acute angle;
the light collimation device is fixed on the rotating piece;
the rotating piece is rotatably arranged on the second bracket;
and the motor is used for driving the rotating piece and the light collimating device to rotate.
According to the above gas analysis device, preferably, the acute angle is less than 30 degrees.
According to the above gas analysis apparatus, preferably, the light collimating device is a plano-convex lens, and the outgoing light passes through the plane and the convex surface of the lens in order.
According to the gas analysis device described above, preferably, the light emitter is a laser.
According to the above-described gas analysis device, preferably, the measurement light corresponds to a characteristic spectral line of the gas to be measured.
The invention also aims to provide a gas analysis method based on the spectrum technology, which can effectively inhibit interference noise, and the aim of the invention is realized by the following technical scheme:
the gas analysis method of the gas analysis device described above, the gas analysis method comprising the steps of:
(A1) The light source emits measuring light matched with the gas to be measured;
(A2) The interaction of the measuring light and the gas to be measured occurs;
(A3) The detector converts the measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module; the detector fixed on the voice coil motor moves back and forth;
(A4) The analysis module processes the electrical signals by utilizing a spectroscopic technique, so that information of the gas to be detected is obtained.
According to the above gas analysis method, optionally, step (A1) further comprises the steps of:
(B1) The emergent light emitted by the luminous body passes through the optical channel;
(B2) The emergent light is collimated by the light collimating device; the piezoelectric device generates displacement so as to push the light collimation device to move back and forth;
(B3) The collimated outgoing light is emitted from the fixing member.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention creatively fixes the detector on the voice coil motor, so that the detector vibrates reciprocally, thereby changing the distance between the light source and the detector; since the spacing of the interference fringes is related to the interference distance, the interference fringes will be disturbed by the change of the distance between the detector and the light source; the interference fringes can be mutually counteracted if the accumulated and overlapped light intensities received in a certain time are accumulated, so that optical interference noise is effectively restrained;
in the process of emitting light of the luminous body, the distance between the light collimation device and the luminous body is adjusted by using a piezoelectric material (periodically in micron order), so that optical noise caused by interference is eliminated;
the surface of the light collimation device is plated with an antireflection film, so that the optical noise is further reduced;
2. the included angle between the optical axis of the emergent light of the illuminant and the axis of the light collimating device can be zero, so that the collimating effect of the emergent light is improved;
3. the voice coil motor has the advantages of high response, high speed, simple structure, small volume, convenient control and the like, can well inhibit optical interference noise between the light source and the detector in the gas sensor, can not cause interference to other optical devices of the system, and is easy to realize and low in cost.
Drawings
The present disclosure will become more readily understood with reference to the accompanying drawings. As will be readily appreciated by those skilled in the art: the drawings are only for illustrating the technical scheme of the present invention and are not intended to limit the scope of the present invention. In the figure:
FIG. 1 is a schematic view of a gas analysis apparatus according to embodiment 1 of the present invention;
fig. 2 is a schematic view of the structure of a light source according to embodiment 2 of the present invention;
fig. 3 is a schematic view of the structure of a light source according to embodiment 3 of the present invention;
fig. 4 is a schematic view of the structure of a light source according to embodiment 4 of the present invention.
Detailed Description
Figures 1-4 and the following description depict alternative embodiments of the invention to teach those skilled in the art how to make and reproduce the invention. In order to teach the technical solution of the present invention, some conventional aspects have been simplified or omitted. Those skilled in the art will appreciate variations or alternatives derived from these embodiments that fall within the scope of the invention. Those skilled in the art will appreciate that the features described below can be combined in various ways to form multiple variations of the invention. Thus, the invention is not limited to the following alternative embodiments, but only by the claims and their equivalents.
Example 1:
fig. 1 schematically shows a schematic configuration diagram of a spectroscopic-technique-based gas analysis apparatus of the present embodiment, which, as shown in fig. 1, includes:
a light source, such as a semiconductor laser, which emits measurement light matched with the gas to be measured, for example, the wavelength of the measurement light corresponds to a characteristic spectral line of the gas;
the detector converts measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module;
the voice coil motor is fixed on the detector and moves back and forth on the light path, so that the distance between the light source and the detector is adjusted;
the analysis module is used for processing the electric signals by utilizing spectrum technologies such as absorption spectrum and the like so as to acquire information of the gas to be detected; the analysis module is prior art in the art and will not be described in detail here.
The gas analysis method of the present embodiment, that is, the working method of the gas analysis apparatus described above, includes the steps of:
(A1) The light source emits measuring light matched with the gas to be measured, for example, the wavelength of the measuring light corresponds to the characteristic spectral line of the gas;
(A2) The interaction of the measuring light and the gas to be measured occurs;
(A3) The detector converts the measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module; the detector fixed on the voice coil motor moves back and forth, for example, the detector vibrates along the axis direction, so that the distance between the detector and the light source is adjusted; because the interval of the interference fringes is related to the interference distance, the interference fringes are disturbed by the change of the interval, and the interference fringes can be mutually counteracted if the light intensity received within a certain time is accumulated and overlapped, so that the optical interference noise is effectively restrained;
(A4) The analysis module processes the electric signals by utilizing spectrum technologies such as absorption spectrum and the like so as to acquire information of the gas to be detected.
Example 2:
the gas analysis device based on the spectroscopic technique of the present embodiment is a simplified structure, and includes:
light source fig. 2 schematically shows a schematic structure of the light source of the present embodiment, and as shown in fig. 2, the light source includes:
a luminous body 2, such as a laser for emitting monochromatic light, which is fixed to the support;
a support 1, such as a circular sleeve, for carrying the luminous body, the support being formed with an optical channel adapted to allow the light emitted by the luminous body to pass through;
a fixing member 6, such as a circular sleeve having a radial portion at one end, provided on the holder, adapted for the outgoing light to pass through; the fixing piece is matched with the bracket through threads, so that the detachable fixing piece is realized;
a light collimating device 4, such as a convex lens, which is fixed on the light path of the outgoing light and is adapted to collimate the outgoing light;
an elastic member 5, such as a rubber member, provided at a side portion of the light collimating element in an axial direction thereof;
a piezoelectric device 3, such as piezoelectric ceramic, the piezoelectric device and the elastic member are respectively arranged at two sides of the light collimating device along the axial direction of the piezoelectric device, the light collimating device, the elastic member and the piezoelectric device are restrained between the bracket and the fixing member, so that when the piezoelectric device is displaced, the light collimating device moves back and forth along with the bracket, thereby continuously adjusting the distance between the illuminant and the light collimating device, and eliminating optical noise generated by interference between the light source and the lens;
the detector converts measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module;
the voice coil motor is fixed on the detector, and moves back and forth along the axis of the detector (the axis of the detector coincides with the optical axis of the measuring light) on the optical path, so that the distance between the light source and the detector is adjusted;
the analysis module is used for processing the electric signals by utilizing spectrum technologies such as absorption spectrum and the like so as to acquire information of the gas to be detected; the analysis module is prior art in the art and will not be described in detail here.
The gas analysis method of the present embodiment, that is, the working method of the gas analysis apparatus described above, includes the steps of:
(A1) The light source emits measuring light matched with the gas to be measured, for example, the wavelength of the measuring light corresponds to the characteristic spectral line of the gas, and the measuring light is specifically:
(B1) The emergent light emitted by the luminous body passes through the optical channel;
(B2) The emergent light is collimated by the light collimating device; the piezoelectric device generates displacement so as to push the light collimation device to move back and forth, thereby continuously adjusting the distance between the illuminant and the light collimation device and eliminating optical noise generated by interference between the light source and the lens;
(B3) The collimated emergent light is emitted from the fixing piece and becomes measuring light;
(A2) The interaction of the measuring light and the gas to be measured occurs;
(A3) The detector converts the measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module; the detector fixed on the voice coil motor moves back and forth, for example, the detector vibrates along the axial direction (the axis of the detector coincides with the optical axis of the measuring light), so that the distance between the detector and the light source is adjusted; because the interval of the interference fringes is related to the interference distance, the interference fringes are disturbed by the change of the interval, and the interference fringes can be mutually counteracted if the light intensity received within a certain time is accumulated and overlapped, so that the optical interference noise is effectively restrained;
(A4) The analysis module processes the electric signals by utilizing spectrum technologies such as absorption spectrum and the like so as to acquire information of the gas to be detected.
Example 3:
the gas analysis device according to the present embodiment is a simplified structure of a spectroscopic technique, and differs from embodiment 2 in that:
1. as shown in fig. 3, the light source includes:
a luminous body 2 for emitting monochromatic light; the luminous body is fixed on the first bracket;
a first support 21, such as a circular sleeve, a mounting plate, etc., for carrying the luminous body, the support being formed with an optical channel adapted to allow the light emitted by the luminous body to pass through;
a light collimating device 81, such as a plano-convex lens, fixed on the light path of the outgoing light of the luminous body, collimating the outgoing light; the included angle between the axis of the light collimation device and the optical axis of the emergent light is an acute angle, such as 2 degrees, 10 degrees, 25 degrees and the like, but not more than 30 degrees;
a rotation member 31 to which the light collimating device is fixed;
a second bracket 71 on which the rotating member is rotatably provided;
and a motor 51 for driving the rotation member and the light collimating device to rotate.
2. An analysis unit comprising: the device comprises an averager and a calculation module, wherein the averager is used for averaging spectrum data carried by an electric signal transmitted by the detector, and the calculation module processes the averaged spectrum data by utilizing a spectrum analysis technology, so that parameters of gas to be detected, such as gas content, flow rate and the like, are obtained.
The gas analysis method of the present embodiment, that is, the working method of the gas analysis apparatus described above, includes the steps of:
(A1) The measuring light emitted by the light source is collimated by the rotating light collimating device, and the wavelength of the measuring light corresponds to the characteristic spectral line of the gas;
(A2) The measuring light interacts with the gas to be measured, such as being selectively absorbed;
(A3) The detector converts the measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module; the detector fixed on the voice coil motor moves back and forth, for example, the detector vibrates along the axial direction (the axis of the detector coincides with the optical axis of the measuring light), so that the distance between the detector and the light source is adjusted; because the interval of the interference fringes is related to the interference distance, the interference fringes are disturbed by the change of the interval, and the interference fringes can be mutually counteracted if the light intensity received within a certain time is accumulated and overlapped, so that the optical interference noise is effectively restrained;
(A4) And the averager averages the spectrum data carried by the electric signals, and the calculation module processes the averaged electric signals by utilizing an absorption spectrum technology to acquire information such as the concentration of the gas to be detected.
Example 4:
the gas analysis device according to the present embodiment is a simplified structure of a spectroscopic technique, and differs from embodiment 3 in that:
1. as shown in fig. 4, the light source includes:
the illuminant 2 is a tunable semiconductor laser;
the first support 21 adopts a circular sleeve with a radial part and an axial part, and the luminous body is fixed at the center of the radial part; the portion 22 of the axial portion acts as a second mount;
the rotating member 31 adopts a bearing, and the outer ring of the bearing is fixed on the second bracket, namely, the inner side of the axial part;
the fixing piece 41 is a sleeve and is fixed on the rotating piece, namely the inner ring of the bearing;
the light collimation device 81 adopts a flat-convex lens, the lens is fixed in the fixing piece, the included angle between the axis of the lens and the optical axis of the measuring light emitted by the laser is an acute angle, such as 5 degrees, the lens is plated with an antireflection film which is convenient for the measuring light to pass through, and the convex surface is opposite to the laser;
a motor 51, such as a motor driven by electrical, pneumatic, magnetic, hydraulic or the like, is used to drive the rotation of the mount such that the light collimating means rotates, but no displacement in the direction of the optical path of the measuring light occurs.
Example 5:
the gas analysis device according to the present embodiment is a simplified structure of a spectroscopic technique, and differs from that according to embodiment 4 in that:
1. the fixing piece is not used any more, the light collimation device is directly fixed on the inner ring of the bearing, the motor directly drives the inner ring to rotate, and the inner ring is driven by friction force through the driving wheel of the motor;
2. the second bracket is arranged independently, and the outer ring of the bearing is fixed on the second bracket; the measuring light emitted by the laser passes through the light collimation device, and the included angle between the optical axis and the axis of the light collimation device is an acute angle, such as 10 degrees, 15 degrees, 20 degrees, 30 degrees, etc.
Example 6:
application of the analysis apparatus and method according to embodiment 2 of the present invention to a laser gas analyzer.
As shown in fig. 2, in this application example, the light emitter 2 is a tunable semiconductor laser; the bracket 1 adopts a circular sleeve, and the outer diameter of one end 12 of the adjacent fixed part is smaller (compared with the outer diameter of one end of the bracket adjacent to the illuminant) but the inner diameter is larger (compared with the inner diameter of one end of the bracket adjacent to the illuminant), so that an annular step is formed inside, and the bracket is provided with an external thread, and the outer diameter of one end 11 of the adjacent illuminant is larger but the inner diameter is smaller; the illuminant 1 is fixed at the end part of the larger outer diameter end of the bracket; the fixing member 6 adopts a circular sleeve with a radial part 62 at one end, and the sleeve is internally provided with internal threads which are matched with the external threads; the piezoelectric devices 3 are symmetrically distributed on the annular steps by adopting piezoelectric ceramics, cables of the piezoelectric devices penetrate through the support, the amplitude of the piezoelectric ceramics is in the micrometer level, and the resonance frequency can reach hundreds of kilohertz; a light collimation device 4 is arranged on one side of the piezoelectric device, which is opposite to the step, in the direction of the emergent light of the laser, a plane-convex lens is adopted, an included angle between the axis of the lens and the optical axis of the emergent light is zero, the lens is plated with an antireflection film which is convenient for the emergent light of the laser to pass through, and the convex surface is opposite to the laser; the elastic piece 5 is made of rubber, such as an O-shaped ring, and the piezoelectric device, the light collimation device and the elastic piece are sequentially arranged on the inner side of the smaller inner diameter part of the bracket and are positioned on the light path of the laser emergent light; the axial portion 61 of the mount is sleeved outside the smaller outer diameter portion of the mount, and the radial portion 62 blocks the elastic member such that the piezoelectric device, the light collimating device and the elastic member are compressed between the mount and the mount in the direction along which the laser emits light.
The light-emitting mode of the light source is as follows:
(A1) Laser emitted by the laser passes through an optical channel in the bracket;
(A2) The outgoing light is collimated by a plano-convex lens; the piezoelectric ceramic generates displacement to make the plane-convex lens translate back and forth, continuously adjusts the distance between the laser and the lens (but the included angle between the optical axis of the laser and the axis of the lens is still zero), eliminates the optical noise generated by interference between the laser and the lens
(A3) The collimated outgoing light is emitted from the fixing member.
Example 7:
an application example of the analysis device and method according to embodiment 2 of the present invention to a laser gas analyzer is different from embodiment 6 in that:
1. the bracket is provided with a smaller inner diameter part facing the laser and a larger inner diameter part facing the fixing piece, and the inner side of the larger inner diameter part is provided with an internal thread;
the fixing piece is matched with the bracket and provided with external threads;
2. the elastic member, the light collimating device and the piezoelectric device are sequentially arranged on the inner side of the fixing member along the emergent light direction of the laser and are extruded by the step and the fixing member, so that the light collimating device moves back and forth when the piezoelectric device has displacement.
The above embodiments are given by way of example only in the case where the light emitter is a laser, but other light emitters, such as LEDs, etc., are of course also possible.
Claims (10)
1. A gas analysis device based on spectroscopic techniques, characterized in that: the gas analysis device includes:
the light source emits measuring light matched with the gas to be measured;
the detector converts measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module;
the detector is fixed on the voice coil motor and moves back and forth on the light path, so that interference fringes are disturbed;
and the analysis module is used for processing the electric signals by utilizing a spectrum technology so as to acquire the information of the gas to be detected.
2. The gas analysis device according to claim 1, wherein: the information is concentration, speed or temperature.
3. The gas analysis device according to claim 1, wherein: the light source includes:
the luminous body is fixed on the bracket;
the bracket is used for bearing the luminous body and is provided with an optical channel suitable for the light emitted by the luminous body to pass through;
the fixing piece is arranged on the bracket and is suitable for the emergent light to pass through;
the light collimation device is fixed on the light path of the emergent light and is suitable for collimating the emergent light;
an elastic member provided at a side portion of the light collimating device in an axial direction thereof;
and the piezoelectric device and the elastic piece are respectively arranged at two sides of the light collimation device along the axial direction of the light collimation device, and the light collimation device, the elastic piece and the piezoelectric device are restrained between the bracket and the fixing piece.
4. The gas analysis device according to claim 1, wherein: the light source includes:
the luminous body is fixed on the bracket;
the first bracket is used for bearing the luminous body;
the light collimation device is fixed on the light path of the emergent light of the luminous body and is used for collimating the emergent light; the included angle between the axis of the light collimation device and the optical axis of the emergent light is an acute angle;
the light collimation device is fixed on the rotating piece;
the rotating piece is rotatably arranged on the second bracket;
and the motor is used for driving the rotating piece and the light collimating device to rotate.
5. The gas analysis device according to claim 4, wherein: the acute angle is less than 30 degrees.
6. The gas analysis device according to claim 4, wherein: the light collimation device is a flat-convex lens, and the emergent light sequentially passes through the plane and the convex surface of the lens.
7. The gas analysis device according to claim 3 or 4, wherein: the light emitter is a laser.
8. The gas analysis device according to claim 1, wherein: the measuring light corresponds to a characteristic spectral line of the gas to be measured.
9. A gas analysis method of a gas analysis apparatus according to any one of claims 1 to 8, comprising the steps of:
(A1) The light source emits measuring light matched with the gas to be measured;
(A2) The interaction of the measuring light and the gas to be measured occurs;
(A3) The detector converts the measuring light interacted with the gas to be measured into an electric signal and transmits the electric signal to the analysis module; the detector fixed on the voice coil motor moves back and forth;
(A4) The analysis module processes the electrical signals by utilizing a spectroscopic technique, so that information of the gas to be detected is obtained.
10. The gas analysis method according to claim 9, wherein: step (A1) further comprises the steps of:
(B1) The emergent light emitted by the luminous body passes through the optical channel;
(B2) The emergent light is collimated by the light collimating device; the piezoelectric device generates displacement so as to push the light collimation device to move back and forth;
(B3) The collimated outgoing light is emitted from the fixing member.
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