CN101285769B - Gas measuring method and device thereof - Google Patents
Gas measuring method and device thereof Download PDFInfo
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- CN101285769B CN101285769B CN2008100620526A CN200810062052A CN101285769B CN 101285769 B CN101285769 B CN 101285769B CN 2008100620526 A CN2008100620526 A CN 2008100620526A CN 200810062052 A CN200810062052 A CN 200810062052A CN 101285769 B CN101285769 B CN 101285769B
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Abstract
The invention relates to a gas measurement method and a gas measurement device, which are mainly used for detecting gas parameters. The device comprises an analysis unit and a laser, a sensor, a convergent component and an optical reflector which are arranged inside a supporting device, wherein, the sensor is connected with the analysis unit. The measurement method is as follows: the laser gives out laser to the convergent component which is obliquely arranged; the laser is converged by the convergent component, passes through gas to be measured and then is emitted to the optical reflector; after the laser is reflected by the reflector, the laser passes through the gas to be measured and the convergent component again and is then received by the sensor; and the sensor transmits received signals to the analysis unit, and the parameters of the gas to be measured are obtained through analysis of the analysis unit. The gas measurement method and the gas measurement device have the advantages of advanced method, reasonable and skillful light path design, low optical noise, small number of parts, high measuring precision, convenient assembly and stable and reliable operation.
Description
Technical field
The present invention relates to a kind of gas measuring method and device thereof, it is mainly used in the detected gas parameter.
Background technology
The semi-conductor laser absorption spectrum analytical technology can be used for the measurement of analytical gas, liquid chemical composition content, and physical parameters such as all right analytical gas temperature and speed are used more and more widely.This technology is a kind of high sensitivity gas analysis technology.This technological principle does, when the semiconductor laser beam of CF passed tested gas, tested gas caused light intensity decays to the absorption of beam energy, the accurately statement of available Beer-Lambert relation:
I(v)＝I
0(v)exp[-S(T)Φ(v)PXL]
I wherein
0(v) and I (when representing respectively v) that frequency is the laser incident of v and through the light intensity behind the gas of pressure P, concentration X and light path L.The strong S of line (T) is the function of temperature T.Line shape function Φ (v) characterize the shape of absorption line, relevant with the kind of gas, pressure, temperature etc.Can know that by Beer-Lambert relation (above-mentioned formula) decay of light intensity is directly proportional with tested gas content, therefore, pass through the measured light intensity dampening information during this commercial measurement gas concentration, thereby obtain the concentration of tested gas.
Realize that the laser gas measurement mechanism of this technology generally is made up of Optical Transmit Unit, light receiving unit and signal analysis unit, Optical Transmit Unit and receiving element are installed in the both sides of tested gas.The laser gas measurement mechanism has measuring accuracy height, response speed and soon, does not receive advantages such as background gas cross interference.But the transmitter unit of this measurement mechanism and receiving element are respectively in the both sides of tested gas, and the difficulty of installing, debugging is big; And safeguard inconvenient; The measurement light path of this device is limited, depends on concrete field working conditions, has limited measuring accuracy; The volume of this device is also bigger, dumb usually.
Summary of the invention
The present invention provides a kind of method advanced design in order to solve the problems of the technologies described above, and light path design is ingenious, reasonable, and measuring accuracy is high, and optical noise is less, and is stable, the rapid and reliable gas measuring method.
The present invention also provides a kind of reasonable in design in order to solve the problems of the technologies described above, and measuring accuracy is high, and signal to noise ratio (S/N ratio) is high, and parts are few, and process and assemble is simple, and is easy for installation, the gas measurement device that volume is little.
It is a kind of gas measuring method that the present invention solves the problems of the technologies described above the technical scheme that is adopted, and the steps include:
A, a branch of measuring light incide and pass the convergent lens that is obliquely installed, and pass tested gas then, the directive light reflection device;
B, light reflection device reflect measuring light, and measuring light is passed tested gas once more, incide on the convergent lens for the second time;
C, measuring light are passed convergent lens once more, receive measuring light, obtain measuring-signal;
D, analysis to measure signal obtain the parameter of gas.
Measuring light of the present invention and the angle between the normal of the optical interface on its path are non-vanishing.
Measuring light of the present invention is when inciding on the convergent lens that is obliquely installed for the first time, and a part of light is reflected by convergent lens, receives reflected light, obtains reference signal, and described measuring-signal and reference signal are analyzed, and obtains the parameter of gas.
Measuring light of the present invention is when inciding on the convergent lens that is obliquely installed for the first time, and the angle between the normal of the axis of measuring light and the plane of incidence of convergent lens is 5 °～35 °.
Convergent lens of the present invention is a plano-convex lens, and described light reflection device is a concave mirror.Plano-convex lens and concave mirror play converging action jointly, make the laser beam spot that passes tested gas less, and measurement response speed is fast.
It is a kind of gas measurement device that the present invention solves the problems of the technologies described above another technical scheme that is adopted; Comprise laser instrument, sensor, convergent lens, light reflection device, bracing or strutting arrangement and analytic unit; Bracing or strutting arrangement is made up of lock chamber and measurement passage; Be characterized in: a side of convergent lens is provided with laser instrument and sensor, and the opposite side of convergent lens is provided with light reflection device, and laser instrument, sensor, convergent lens are arranged in the lock chamber; Tilt mutually between the longitudinal axis of the primary optical axis of convergent lens and measurement passage.
Measuring light that laser instrument of the present invention sends and the angle between the normal of the optical interface on its path are non-vanishing.
Optical interface of the present invention comprises the front and rear surfaces of convergent lens, the surface of light reflection device, the photosurface of sensor.
Be provided with secondary sensor in the lock chamber of the present invention, secondary sensor is arranged on the convergent lens reflection measurement reflection of light light path.
The longitudinal axis angle of the primary optical axis relative measurement passage of convergent lens of the present invention is 8 °～35 °.
In the present invention, cardinal rule is that the normal of the optical interface of all optical device all becomes certain included angle with the light beam direct of travel, can avoid like this because the optical noise that laser causes in its surface reflection.Above-mentioned optical interface comprises the front and rear surfaces of lens, the surface of light reflection device, photosurface of sensor or the like.A crucial part of the present invention is appropriately to be provided with the angle of inclination of each optical device relative measurement passage longitudinal axis, to satisfy above-mentioned cardinal rule.In the practical implementation; Because the surface of convergent lens is a curved surface; And laser has certain angle of divergence reasons such as (usually greater than 10 °), so the direction of reflection ray is different, and also has the repeatedly situation of reflection; Therefore to reach the reflector laser of avoiding fully on all directions and arrive laser instrument and sensor, need very to be provided with rightly.
The present invention has the following advantages and beneficial effect:
Light path is return formula, measures light path and doubles, and measuring accuracy is highly sensitive with measurement.
Laser instrument and senser element place the same side of convergent lens, are convenient to laser instrument, senser element is connected with analytic unit, keep compact conformation; Convergent lens ability tested gas of effective isolation and optical device avoid measuring material pollution laser instrument, sensor in the passage; Optical device adopts integrated installation, compact conformation, and the reliability, the structure that have improved device are more stable, are convenient to Unit Installation and maintenance.And volume is littler, and is more flexible.
Optical device adopts and is obliquely installed, and reasonably designs light path, and the interference of at utmost having avoided reflection to cause has reduced optical noise, has improved detection limit and detection sensitivity; At utmost avoid reflector laser return laser light device, effectively reduce optical noise, improved measuring accuracy greatly.
Employing has the optical device of convergence function, like convergent lens and concave mirror, has dwindled hot spot, and measurement response speed is fast, and better control bundle in the angle of optical device incidence point, thereby further reduce optical noise.Optical component is few, and cost is low.
Adopt secondary sensor, can enough demarcation reduce the influence of drifting about, improved measuring stability.Can also realize the double light path measurement, improve the accuracy of measuring.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention 1;
Fig. 2 is optical device and the light path synoptic diagram of embodiment 1;
Fig. 3 is the light path synoptic diagram of the double light path of embodiment 1;
Fig. 4 is the structural representation of the embodiment of the invention 2;
Fig. 5 is optical device and the light path synoptic diagram of embodiment 2;
Fig. 6 is the structural representation of the embodiment of the invention 3;
Fig. 7 is optical device and the light path synoptic diagram of embodiment 3;
Fig. 8 is optical device and the light path synoptic diagram of embodiment 4;
Fig. 9 is optical device and the light path synoptic diagram of embodiment 5.
Embodiment
Following examples have been done further explanation to situation such as structure of the present invention, method, function and applications, are several kinds of reasonable application forms of the present invention, but scope of the present invention is not confined to following embodiment.The present invention has introduced 3-D walls and floor, and wherein the X axle is the axle perpendicular to paper, and the Y axle is along the vertical axle of paper, and the Z axle is the axle along the paper level.The longitude face is the plane at X axle and Y axle place.
Present embodiment with the lower part a kind of gas measurement device and method have been described:
Like Fig. 1, shown in Figure 2, this gas measurement device comprises laser instrument 1, sensor 2, plano-convex lens 3, concave mirror 6, bracing or strutting arrangement 5 and analytic unit 4.Bracing or strutting arrangement 5 is made up of lock chamber 11 and measurement passage 12; A side of measuring passage 12 links to each other with lock chamber 11; Opposite side is provided with concave mirror 6; Laser instrument 1, plano-convex lens 3 and sensor 2 all are installed in the lock chamber 11, and plano-convex lens 3 separates laser instrument 1, sensor 2 with the gas of measuring in the passage.
Plano-convex lens 3 passes through seal with O ring with the surface of contact of lock chamber 11; Laser instrument 1 and sensor 2 is all airtight in lock chamber 11; Being provided with like this can make plano-convex lens 3 isolate tested gas and laser instrument 1, sensor 2 effectively; Protect these optical device, especially when tested gas is corrosive gas.Can in measuring passage 12, lead to tested gas.Also can on its sidewall, have large-area air channel, tested gas can freely be got into measure passage 12.The clear aperature of measuring passage 12 is 30mm, and it is 1m that the typical case measures light path, and therefore measuring passage 12 length is about 50cm.
Gas measuring method of the present invention is:
The measuring light of laser instrument 1 emission is oblique to be mapped on the optical flat 7 of plano-convex lens 3.Angle between the normal of the axis of measuring light and optical flat 7 is 5.5 °; The angle of divergence of measuring light is 13 °; Measuring light and its angle between the normal of the optical interface of plano-convex lens 3 incidence points are acute angle; Therefore to reflect back into the laser energy of laser instrument 1 extremely low for 7 of optical flats, can ignore.
After passing optical flat 7, the measuring light oblique incidence is on the optical surface 8 of plano-convex lens 3, and the axis of measuring light and its angle between the normal of the optical interface of optical surface 8 incidence points are 27 °.
Plano-convex lens 3 has the effect of the converging and diverging measuring light and the deflected beam direction of propagation simultaneously.Measuring light is passed the tested gas of measuring in the passage 12, the oblique reflecting surface that is mapped to concave mirror 6 after passing plano-convex lens 3 refractions.
Through the reflection of concave mirror 6, measuring light is passed the tested gas of measuring in the passage 12 once more and is retreaded on the optical surface 8 that incides plano-convex lens 3, and simultaneously, 6 pairs of measuring light of concave mirror have certain converging action, and it is return to plano-convex lens 3 that measuring light can be concentrated.Through optical surface 8, measuring light incides optical flat 7, remains oblique incidence.In the present embodiment, the angle between the normal of measuring light axis and optical flat 7 is 25 °.
Measuring light incides sensor 2 after passing plano-convex lens 3, and sensor 2 also tilts to install, and the angle between the normal of its optical surface and the Z axle is 25 °, and the angle between the axis of measuring light is 8 °.
The light signal by after the gas absorption that sensor 2 will receive converts electric signal into, i.e. measuring-signal, and measuring-signal is transferred to analytic unit 4, after analyzing, obtain the parameters such as concentration of tested gas.
As shown in Figure 3, the measuring light of laser instrument 1 emission incides on the optical flat 7 of plano-convex lens 3 and has partial reflection, and this place can the light-plated reflectance coating, increases reflectivity, just can increase secondary sensor 14 detection of reflected light intensity, the detection of realization double light path.
When realizing that double light path as shown in Figure 3 detects, lock chamber 11 can also be as reference gas chamber, and the tested gas that seals concentration known therein is as reference gas.Especially for example; When tested gas is oxygen; Then directly can let be full of air in the lock chamber 11, receive reflected light with secondary sensor 14 and obtain reference signal, the measuring-signal that itself and sensor 2 are obtained obtains the oxygen concentration of tested gas jointly after the analysis in analytic unit 4.
The light path of this increase can also be for demarcating light path, and secondary sensor 14 detected signals are demarcation signal, can come the drift of correcting device with this signal.
Like Fig. 4, shown in 5, present embodiment has been described a kind of gas measurement device and method, and the difference of present embodiment and embodiment 1 is:
(1), the convex surface of plano-convex lens 3 is towards laser instrument 1 and sensor 2, the primary optical axis of plano-convex lens 3 and the angle of measuring between the longitudinal axis of passage 12 are 13 °.
(2), the axis of the measuring light of laser instrument 1 emission and the angle between the Z axle be 11.8 °, make on the oblique optical surface 8 that is mapped to plano-convex lens 3 of measuring light.The axis of measuring light and its angle between the normal of optical surface 8 incidence points are 21 °.The angle of divergence of measuring light is 13 ° in the present embodiment, and measuring light and its angle between the normal of the optical interface of plano-convex lens 3 incidence points are acute angle, thus 8 of optical surfaces to reflect back into the laser energy of laser instrument 1 extremely low, can ignore.Equally, pass optical surface 8 after, the measuring light oblique incidence is on the optical flat 7 of plano-convex lens 3, the angle between the axis of measuring light and optical flat 7 normals is 9.5 °.
(3), after measuring light is by concave mirror 6 convergence reflexs, it is return to plano-convex lens 3 that measuring light is concentrated.Pass optical flat 7 and optical surface 8 successively, remain oblique incidence.In the present embodiment, the angle between measuring light axis and optical flat 7 normals is that 13 ° of measuring light axis and its angle between the incidence point normal of optical surface 8 are 33 °.After passing plano-convex lens 3, measuring light incides sensor 2, and sensor 2 also tilts to install, and the angle between the normal of its optical surface and the Z axle is 25 °, and the angle between the axis of light beam is 7 °.
Other parts and the embodiment 1 of present embodiment are basic identical.
Present embodiment also can be arranged to the form of double light path.
Like Fig. 6, shown in 7, present embodiment has been described a kind of gas measurement device and method, and the difference of present embodiment and embodiment 1 is:
(1) position of laser instrument 1 on Y direction be higher than sensor 2, plano-convex lens 3 convex surface towards laser instrument 1 and sensor 2, the primary optical axis of plano-convex lens 3 and the angle of measuring between the longitudinal axis of passage 12 are 8 °.
(2), the axis of the measuring light of laser instrument 1 emission and the angle between the Z axle be 8.5 °, make on the oblique optical surface 8 that is mapped to plano-convex lens 3 of measuring light.The axis of light beam and its angle between the incidence point normal of optical surface 8 are 34 °; The angle of divergence of measuring light is 13 ° in the present embodiment; Measuring light and its angle between the normal of the optical interface of plano-convex lens 3 incidence points are acute angle; Therefore to reflect back into the laser energy of laser instrument 1 extremely low for 8 of optical surfaces, can ignore.Equally, pass optical surface 8 after, the measuring light oblique incidence is on the optical flat 7 of plano-convex lens 3, the angle between the normal of the axis of measuring light and optical flat 7 is 5 °.
(3), after measuring light is by concave mirror 6 convergence reflexs, it is return to plano-convex lens 3 that measuring light is concentrated.Pass optical flat 7 and optical surface 8 successively, remain oblique incidence.In the present embodiment, the angle between the normal of measuring light axis and optical flat 7 is that 9.3 ° of measuring light axis and its angle between the normal of the incidence point of optical surface 8 are 8.5 °.Pass plano-convex lens 3 back measuring light and incide sensor 2, sensor 2 also tilts to install, and the angle between the normal of its optical surface and the Z axle is 25 °, and the angle between the axis of light beam is 18 °.
Other parts and the embodiment 1 of present embodiment are basic identical.
Present embodiment also can be provided with the form of double light path.
Like Fig. 8, present embodiment has been described a kind of gas measurement device and method, and the difference of present embodiment and embodiment 1 is: what the convergent lens of present embodiment adopted is the thick lens 10 with convergence function.Angle between the longitudinal axis of the primary optical axis of thick lens 10 and measurement passage 12 is 27 °
Other parts and the embodiment 1 of present embodiment are basic identical.
Present embodiment also can be provided with the form of double light path.
Like Fig. 9, present embodiment has been described a kind of gas measurement device and method, and the difference of present embodiment and embodiment 1 is: the light reflection device of present embodiment is to adopt level crossing 13, and level crossing 13 is made up of two plane mirrors at an angle to each other.The convex surface of plano-convex lens 3 is towards laser instrument 1 and sensor 2, and the angle between the longitudinal axis of the primary optical axis of plano-convex lens 3 and measurement passage 12 is 10 °.
Other parts and the embodiment 1 of present embodiment are basic identical.
Present embodiment also can be provided with the form of double light path.
About other explanation of the present invention: 1, when tested gas is corrosive gas, because corrosive gas can corrode anti-reflection film, so the face that convergent lens contacts with tested gas can not plate anti-reflection film; 2, concave mirror of the present invention adopts is that the concave inner of plano-concave lens plates high-reflecting film, more convenient like this processing and fixing.3, in above embodiment, except the measurement light path of describing, also can produce a spot of parasitic light, but can't cause interference measuring light path.
Above-mentioned embodiment should not be construed as the restriction to protection domain of the present invention.Key of the present invention is: laser instrument and sensor are arranged on a side of convergent lens; Light reflection device is arranged on an other side of convergent lens; Convergent lens with respect to the longitudinal axis of measuring passage for being obliquely installed; Measuring light arrives light reflection device earlier after passing tested gas after the convergent lens refraction; Arriving convergent lens once more after passing tested gas through light reflection device reflection again, assembling to sensor through convergent lens then, the light signal that receives through sensor calculates the parameter of tested gas.The optical interface of all optical device all becomes to be obliquely installed with the measuring light direct of travel, and above-mentioned optical interface comprises the front and rear surfaces of lens, the surface of light reflection device, photosurface of sensor or the like.Can avoid like this because the optical noise that reflection causes.Under the situation that does not break away from spirit of the present invention, any type of change that the present invention is made all should fall within protection scope of the present invention.
Claims (7)
1. a gas measuring method the steps include:
A, laser instrument send a branch of measuring light, incide and pass convergent lens, and said convergent lens has been isolated tested gas and laser instrument, sensor, pass the tested gas of measuring in the passage then, the directive light reflection device;
Tilt mutually between the longitudinal axis of the primary optical axis of said convergent lens and measurement passage;
B, light reflection device reflect measuring light, and measuring light is passed tested gas once more, incide on the convergent lens for the second time;
C, measuring light are passed convergent lens once more, and said sensor receives measuring light, obtains measuring-signal;
D, analytic unit analysis to measure signal obtain the parameter of tested gas;
Described measuring light is when inciding on the convergent lens that is obliquely installed for the first time, and a part of light is reflected by convergent lens, and secondary sensor receives reflected light, obtains demarcation signal, with the drift of said demarcation signal correction gas measurement device.
2. gas measuring method according to claim 1 is characterized in that: described measuring light and the angle between the normal of the optical interface on its path are non-vanishing.
3. gas measuring method according to claim 2 is characterized in that: described measuring light is when inciding on the convergent lens that is obliquely installed for the first time, and the angle between the normal of the axis of measuring light and the plane of incidence of convergent lens is 5 °～35 °.
4. gas measuring method according to claim 1 is characterized in that: described convergent lens is a plano-convex lens, and the face that said plano-convex lens contacts with tested gas does not plate anti-reflection film; Described light reflection device is a concave mirror.
5. gas measurement device; Comprise laser instrument, sensor, convergent lens, light reflection device, bracing or strutting arrangement and analytic unit; Bracing or strutting arrangement by lock chamber be used for forming through the measurement passage of tested gas; It is characterized in that: a side of convergent lens is provided with laser instrument and sensor; The opposite side of convergent lens is provided with light reflection device, measures passage, and said convergent lens has been isolated measurement passage and said laser instrument, sensor, and laser instrument, sensor, convergent lens are arranged in the lock chamber; Tilt mutually between the longitudinal axis of the primary optical axis of convergent lens and measurement passage; The light that makes laser instrument send is reflected by light reflection device after passing convergent lens, measurement passage, and the light that reflects is received by sensor after passing said measurement passage, said convergent lens once more; The longitudinal axis angle of the primary optical axis relative measurement passage of described convergent lens is 8 °～35 °;
Be provided with secondary sensor in the described lock chamber, secondary sensor is arranged on the reflected light path of convergent lens first reflection measuring light; Light path between said laser instrument and the secondary sensor forms demarcates light path, and said secondary sensor connects said analytic unit.
6. gas measurement device according to claim 5 is characterized in that: measuring light that described laser instrument sends and the angle between the normal of the optical interface on its path are non-vanishing.
7. gas measurement device according to claim 6 is characterized in that: described optical interface comprises the front and rear surfaces of convergent lens, the surface of light reflection device, the photosurface of sensor.
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| NO20200904A1 (en) * | 2020-08-14 | 2022-02-15 | Optronics Tech As | Gas detector system |
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| JP2012008008A (en) * | 2010-06-24 | 2012-01-12 | Mitsubishi Heavy Ind Ltd | Ammonia compound concentration measuring device and ammonia compound concentration measuring method |
| CN102654447A (en) * | 2012-04-12 | 2012-09-05 | 安徽皖仪科技股份有限公司 | Device and method for reducing optical interference of laser gas analyzer |
| CN105527231A (en) * | 2015-12-30 | 2016-04-27 | 聚光科技(杭州)股份有限公司 | An off-axis type gas remote measurement device and a method |
| CN106122798B (en) * | 2016-08-09 | 2023-06-16 | 上海禾赛科技有限公司 | Light source and working method thereof |
| CN106198452B (en) * | 2016-08-09 | 2023-06-16 | 上海禾赛科技有限公司 | Gas analysis device and method based on spectrum technology |
| CN106092890B (en) * | 2016-08-09 | 2019-05-28 | 上海禾赛光电科技有限公司 | The optical assay device and method of gas |
| CN106370601B (en) * | 2016-08-17 | 2019-12-06 | 北京千安哲信息技术有限公司 | Gaseous wide area detection device |
| CN106290249A (en) * | 2016-10-12 | 2017-01-04 | 武汉智勤创亿信息技术有限公司 | A kind of integrated small laser gas detection components |
| CN107411720B (en) * | 2017-09-19 | 2021-03-30 | 华南师范大学 | Intravascular photoacoustic/ultrasonic imaging endoscopic probe excited by high-efficiency collimated light |
| JP6769454B2 (en) * | 2018-04-16 | 2020-10-14 | 横河電機株式会社 | Gas analyzer |
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| US5963336A (en) * | 1995-10-10 | 1999-10-05 | American Air Liquide Inc. | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use |
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| US5963336A (en) * | 1995-10-10 | 1999-10-05 | American Air Liquide Inc. | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| NO20200904A1 (en) * | 2020-08-14 | 2022-02-15 | Optronics Tech As | Gas detector system |
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