CN102654447A - Device and method for reducing optical interference of laser gas analyzer - Google Patents
Device and method for reducing optical interference of laser gas analyzer Download PDFInfo
- Publication number
- CN102654447A CN102654447A CN2012101068252A CN201210106825A CN102654447A CN 102654447 A CN102654447 A CN 102654447A CN 2012101068252 A CN2012101068252 A CN 2012101068252A CN 201210106825 A CN201210106825 A CN 201210106825A CN 102654447 A CN102654447 A CN 102654447A
- Authority
- CN
- China
- Prior art keywords
- laser
- optical interference
- piezoelectric ceramics
- gas analyzer
- ceramics actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention discloses a device and a method for reducing optical interference of a laser gas analyzer. A position of a laser is changed according to a certain frequency and range through a piezoelectric ceramic actuator, optical interference patterns generated by laser beams in different directions at different positions through an optical path are different, and the integral of a detection spectral line in the duration finally can obtain background with weakened optical interference stripes so that the detection sensitivity and accuracy of the laser analyzer are improved. Through the device and the method for reducing the optical interference of the laser gas analyzer, disclosed by the invention, the piezoelectric ceramic actuator is arranged close to a light source of a laser, and the position of the light source of the laser and the emission direction are followed to change by flexing of the piezoelectric ceramic actuator so that a function of reducing the optical interference stripes is realized.
Description
Technical field
The present invention relates to a kind of apparatus and method that are used to reduce optical interference, be mainly used in laser gas analyzer, improve it and measure sensitivity and accuracy.
Background technology
Laser gas analyzer is a kind of " in real time " online gas detection means, often is used to fields such as petrochemical industry, iron and steel, cement, environmental protection, industrial on-line monitoring.When a beam intensity does
I 0 Laser through behind the certain density tested gas because tested gas is to the absorption of laser intensity, transmitted light intensity becomes
I t According to Lambert-Beer's law, gas absorbs the decay that sees through light and is directly proportional with the concentration of tested gas, that is:
Wherein,
Be the absorption constant of medium,
CBe gas concentration to be measured,
LBe light path.
The sensitivity of analytic system receives circuit noise and optical interference The noise, and the reduction noise has great importance to the measurement of light concentration gas.Because laser gas analyzer adopts laser instrument as work light, the coherence of its light source is very high, can between optical interface, reflect to form interference.The optical interference of laser gas analyzer is mainly derived from the reflection on lens, window surface.Usually take optical element film coated method to weaken the reflection between optical interface, the purpose that realization reduces to interfere, but its effect is limited, and poor repeatability.Through changing the position of optical element in the light path, then the detection spectrum of a period of time being carried out the integration stack is the method that a kind of effective elimination is interfered, but this method structure more complicated only is confined in the laboratory, is difficult to use in industry spot.
The present invention has designed a kind of method that reduces the laser gas analyzer optical interference.The method that is different from common change light path, the method that the present invention utilizes the piezoelectric ceramics vibration to change light source position changes light path.Utilize the good automatically controlled performance of piezoelectric ceramics actuator, enough flexible scope and intensity; The luminous position, lighting angle that make laser instrument through automatically controlled mode are by certain frequency, amplitude variations; And the result in a period of time scope carried out integration stack, and be equivalent to make fixing interference fringe to superpose mutually by coordination not, obtain weakening the effect of optical interference striped; Be not only applicable to the system of laboratory multi-pass, be applicable to the monitoring system that industry spot is online yet.
Summary of the invention
The object of the invention is exactly in order to remedy the defective of prior art, a kind of apparatus and method that reduce the laser gas analyzer optical interference to be provided.
The present invention realizes through following technical scheme:
A kind of device that is used to reduce the laser gas analyzer optical interference; The semiconductor laser and driving circuit, piezoelectric ceramics actuator and driving circuit and the two clamping plates that comprise spring bolt, frequency adjustable; Described semiconductor laser is as the light source of laser gas analyzer; Described semiconductor laser and piezoelectric ceramics actuator receive the control of its corresponding driving circuit respectively, and described two clamping plates is being put down one on the other and placed, and described spring bolt and piezoelectric ceramics actuator are placed between the two clamping plates; Be fixedly connected by spring bolt between two clamping plate, one end; Be fixedly connected by the piezoelectric ceramics actuator between the other end, described semiconductor laser is fixed in the above on those piece clamping plate and near piezoelectric ceramics actuator one end, the piezoelectric ceramics actuator is under the control of its driving circuit; The piezoelectric ceramics actuator is up-down vibration vertically, and then drives the change of semiconductor laser luminous position and lighting angle.
A kind of method that adopts device recited above to reduce the laser gas analyzer optical interference; Utilize luminous position, lighting angle that the piezoelectric ceramics actuator makes semiconductor laser through automatically controlled mode by certain frequency, amplitude variations; And the interference fringe of certain hour scope internal fixation superposeed by out of phase, can obtain weakening the effect of optical interference striped.
Characteristic of the present invention also is: the drives waveform of the driving circuit of piezoelectric ceramics actuator is triangular wave or sine wave; Described semiconductor laser is fixed on the clamping plate through mechanical system.
Because light was said on the surface of optical device such as window, lens that multiple reflection or scattering meeting produce and was interfered; Interfere to be superimposed upon on the waveform of scanning, show as periodic interference fringe, interference fringe is relevant with optical path length; The present invention is through changing the position and the emission angle of laser instrument; The emission light path that laser experienced is changed, and the interference fringe amplitude that is produced, shape just change accordingly, owing to amplitude, the shape of interference fringe in vibration processes are approaching at random; So the result of detection in the certain hour is carried out the amplitude that the integration stack realizes reducing interference fringe, eliminates the purpose of interfering.
General optical path change amplitude can effectively be eliminated optical interference greater than the several times of optical maser wavelength, and laser gas analyzer optical source wavelength commonly used concentrates on the near-infrared region, and commercial at present piezoelectric ceramics actuator can satisfy its requirement fully, therefore realizes than being easier to.
Advantage of the present invention is: as vibration source, make the position and the emission angle periodically-varied of semiconductor laser light source with the piezoelectric ceramics actuator, realize reducing the function of optical interference striped, improved sensitivity and the accuracy measured.
Description of drawings
Fig. 1 is the laser gas analyzer one-piece construction.
Fig. 2 is apparatus of the present invention structural drawing.
Embodiment
A kind of device that is used to reduce the laser gas analyzer optical interference; The semiconductor laser 3 and driving circuit, piezoelectric ceramics actuator 2 and driving circuit thereof and two clamping plates 1.1 and 1.2 that comprise spring bolt 1, frequency adjustable; Described semiconductor laser 3 is as the light source of laser gas analyzer; Described semiconductor laser 3 and piezoelectric ceramics actuator 2 receive the control of its corresponding driving circuit respectively, and described two clamping plates 1.1 and 1.2 is being put down one on the other and placed, and described spring bolt 1 and piezoelectric ceramics actuator 2 are placed between two clamping plates 1.1 and 1.2; Two clamping plate 1.1 and 1.2 1 ends are being fixed by spring bolt 1; The other end is being fixed by piezoelectric ceramics actuator 2, and described semiconductor laser 3 is fixed in the above on those piece clamping plate 1.1 and near piezoelectric ceramics actuator 2 one ends, piezoelectric ceramics actuator 2 is under the control of its driving circuit; Piezoelectric ceramics actuator 2 is up-down vibration vertically, and then drives the change of semiconductor laser 3 luminous positions and lighting angle.
A kind of method that adopts device recited above to reduce the laser gas analyzer optical interference; Utilize luminous position, lighting angle that piezoelectric ceramics actuator 2 makes semiconductor laser 3 through automatically controlled mode by certain frequency, amplitude variations; And the interference fringe of certain hour scope internal fixation superposeed by out of phase, can obtain weakening the effect of optical interference striped.
The drives waveform of the driving circuit of described piezoelectric ceramics actuator 2 is triangular wave or sine wave; Described laser instrument 3 is fixed on the clamping plate 1.1 through mechanical system.
As shown in Figure 1, be the laser gas analyzer one-piece construction, comprise transmitter module 4, central control module 5, receiver module 6 and data processing module 7; Transmitter module 4 is directly to be fixed on detection site; Therefore the absorption cell that uses during with laboratory measurement is different, and the laser gas analyzer of on-line measurement is open light path, adopts the mode of traditional change light path to reduce the optical interference of system; Being unactual in the real-time analysis at the scene, also is to be difficult to realize.If adopt to change the luminous position of light source then many relatively easily.Adopt transmitting terminal light source VIBRATION DESIGN, make the transmitter module compact conformation, will install at the scene with aspect such as miniaturization and offer convenience.
The present invention adopts the vibration of piezoelectric ceramics actuator 2 to change position and its light emission direction of laser instrument 3; Through changing the position and the light emission direction of laser instrument 3; Be that the emission light path that laser experienced changes, the interference fringe amplitude that is at this moment produced, shape just change accordingly.Owing to amplitude, the shape of interference fringe in vibration processes are approaching at random; Data processing module 7 carries out the amplitude that the integration stack can realize reducing interference fringe according to the frequency of the driving circuit of piezoelectric ceramics actuator 2 to the result of detection in the certain hour, eliminates the purpose of interfering.
General optical path change amplitude can effectively be eliminated optical interference greater than the several times of optical maser wavelength, and laser gas analyzer optical source wavelength commonly used concentrates on the near-infrared region, and commercial at present piezoelectric ceramics actuator can satisfy its requirement fully, therefore realizes than being easier to.
Claims (4)
1. device that is used to reduce the laser gas analyzer optical interference; It is characterized in that: the semiconductor laser and driving circuit, piezoelectric ceramics actuator and driving circuit and the two clamping plates that comprise spring bolt, frequency adjustable; Described semiconductor laser is as the light source of laser gas analyzer; Described semiconductor laser and piezoelectric ceramics actuator receive the control of its corresponding driving circuit respectively; Described two clamping plates is being put down one on the other and is being placed, and described spring bolt and piezoelectric ceramics actuator are placed between the two clamping plates, is fixedly connected by spring bolt between two clamping plate, one end; Be fixedly connected by the piezoelectric ceramics actuator between the other end, described semiconductor laser is fixed in the above on those piece clamping plate and near piezoelectric ceramics actuator one end.
2. method that adopts the described device of claim 1 to reduce the laser gas analyzer optical interference; It is characterized in that: utilize luminous position, lighting angle that the piezoelectric ceramics actuator makes semiconductor laser through automatically controlled mode by certain frequency, amplitude variations; And the interference fringe of certain hour scope internal fixation superposeed by out of phase, can obtain weakening the effect of optical interference striped.
3. the device that is used to reduce the laser gas analyzer optical interference according to claim 2 is characterized in that: the drives waveform of the driving circuit of piezoelectric ceramics actuator is triangular wave or sine wave.
4. the device that is used to reduce the laser gas analyzer optical interference according to claim 3 is characterized in that: described semiconductor laser is fixed on the clamping plate through mechanical system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101068252A CN102654447A (en) | 2012-04-12 | 2012-04-12 | Device and method for reducing optical interference of laser gas analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101068252A CN102654447A (en) | 2012-04-12 | 2012-04-12 | Device and method for reducing optical interference of laser gas analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102654447A true CN102654447A (en) | 2012-09-05 |
Family
ID=46730106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012101068252A Pending CN102654447A (en) | 2012-04-12 | 2012-04-12 | Device and method for reducing optical interference of laser gas analyzer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102654447A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092890A (en) * | 2016-08-09 | 2016-11-09 | 上海禾赛光电科技有限公司 | The optical assay device of gas and method |
| CN106122798A (en) * | 2016-08-09 | 2016-11-16 | 上海禾赛光电科技有限公司 | Light source and method of work thereof |
| CN106198452B (en) * | 2016-08-09 | 2023-06-16 | 上海禾赛科技有限公司 | Gas analysis device and method based on spectrum technology |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030072245A1 (en) * | 2001-10-16 | 2003-04-17 | Fuji Xerox Co., Ltd. | Optical head and disk unit |
| US20050002102A1 (en) * | 2003-04-30 | 2005-01-06 | Carl Zeiss Smt Ag | Illuminating system having a diffuser element |
| CN101285769A (en) * | 2008-05-21 | 2008-10-15 | 聚光科技（杭州）有限公司 | Gas measuring method and its device |
| CN101592784A (en) * | 2008-05-27 | 2009-12-02 | 北京中视中科光电技术有限公司 | A kind of eliminating coherence device and method |
| CN102252982A (en) * | 2011-04-29 | 2011-11-23 | 安徽皖仪科技股份有限公司 | Wavelength drift compensation method for laser gas analyzer |
-
2012
- 2012-04-12 CN CN2012101068252A patent/CN102654447A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030072245A1 (en) * | 2001-10-16 | 2003-04-17 | Fuji Xerox Co., Ltd. | Optical head and disk unit |
| US20050002102A1 (en) * | 2003-04-30 | 2005-01-06 | Carl Zeiss Smt Ag | Illuminating system having a diffuser element |
| CN101285769A (en) * | 2008-05-21 | 2008-10-15 | 聚光科技（杭州）有限公司 | Gas measuring method and its device |
| CN101592784A (en) * | 2008-05-27 | 2009-12-02 | 北京中视中科光电技术有限公司 | A kind of eliminating coherence device and method |
| CN102252982A (en) * | 2011-04-29 | 2011-11-23 | 安徽皖仪科技股份有限公司 | Wavelength drift compensation method for laser gas analyzer |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092890A (en) * | 2016-08-09 | 2016-11-09 | 上海禾赛光电科技有限公司 | The optical assay device of gas and method |
| CN106122798A (en) * | 2016-08-09 | 2016-11-16 | 上海禾赛光电科技有限公司 | Light source and method of work thereof |
| CN106092890B (en) * | 2016-08-09 | 2019-05-28 | 上海禾赛光电科技有限公司 | The optical assay device and method of gas |
| CN106198452B (en) * | 2016-08-09 | 2023-06-16 | 上海禾赛科技有限公司 | Gas analysis device and method based on spectrum technology |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8232526B2 (en) | Analyzing apparatus | |
| CN108871640B (en) | Transient grating laser ultrasonic surface wave-based residual stress nondestructive testing system and method | |
| EP2132561B1 (en) | Photoacoustic detector for measuring fine dust | |
| CN106017519B (en) | A kind of Demodulation System for Fiber Optic Fabry-Perot Sensors and method | |
| CN106093599B (en) | Optical probe and electromagnetic field measuring equipment and measuring method thereof | |
| CN103575705A (en) | Turbidity meter and measuring method for turbidity of water | |
| CN108195825A (en) | A kind of hazardous waste detecting system based on laser induced breakdown spectroscopy | |
| CN102654447A (en) | Device and method for reducing optical interference of laser gas analyzer | |
| JP2002022564A (en) | Torque measuring instrument | |
| CN103969210A (en) | Open type CO2/H2O monitoring device based on non-dispersive infrared principle | |
| CN103471998A (en) | Ultrasonic material reflection and transmission coefficient laser measurement system | |
| CN202351175U (en) | Infrared ultraviolet double-pulse laser induced impact breakdown spectrum online in-situ detecting device | |
| EP3877724B1 (en) | Method and device for in situ process monitoring | |
| CN110376213B (en) | Optical detection system and method | |
| CN104535500A (en) | System parameter calibration method for imaging ellipsometer | |
| JP4412180B2 (en) | Laser ultrasonic inspection method and laser ultrasonic inspection device | |
| JP4403272B2 (en) | Spectroscopic measurement method and spectroscopic measurement apparatus | |
| CN107764776A (en) | Multi-wavelength adjustable meter surface plasma resonance imaging device and its application | |
| CN108287058A (en) | Correct superpower laser M2The device and method of measuring system thermal deformation | |
| JP2020530571A (en) | High-speed laser ranging device | |
| CN106597467A (en) | HOM interference principle-based range finder | |
| CN108107004B (en) | Narrow pulse laser target polarization reflection characteristic test method | |
| CN105547454B (en) | A kind of quick scanning type laser doppler vibration measuring system | |
| CN108693247B (en) | Laser surface acoustic wave detection system based on double measuring beams and use method thereof | |
| EP0104151B1 (en) | A device for the non-destructive testing of the internal stress state of heat tempered plate glass |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20120905 |