CN106191766A - 蒸镀装置、薄膜形成方法及有机发光显示装置制造方法 - Google Patents

蒸镀装置、薄膜形成方法及有机发光显示装置制造方法 Download PDF

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Publication number
CN106191766A
CN106191766A CN201510236310.8A CN201510236310A CN106191766A CN 106191766 A CN106191766 A CN 106191766A CN 201510236310 A CN201510236310 A CN 201510236310A CN 106191766 A CN106191766 A CN 106191766A
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CN
China
Prior art keywords
area
substrate
evaporation coating
supporting part
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510236310.8A
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English (en)
Chinese (zh)
Inventor
金学民
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Display Co Ltd
Original Assignee
Samsung Display Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Display Co Ltd filed Critical Samsung Display Co Ltd
Publication of CN106191766A publication Critical patent/CN106191766A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Electroluminescent Light Sources (AREA)
CN201510236310.8A 2014-08-22 2015-05-11 蒸镀装置、薄膜形成方法及有机发光显示装置制造方法 Pending CN106191766A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020140109969A KR102227482B1 (ko) 2014-08-22 2014-08-22 증착 장치, 이를 이용한 박막 형성 방법 및 유기 발광 표시 장치 제조 방법
KR10-2014-0109969 2014-08-22

Publications (1)

Publication Number Publication Date
CN106191766A true CN106191766A (zh) 2016-12-07

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510236310.8A Pending CN106191766A (zh) 2014-08-22 2015-05-11 蒸镀装置、薄膜形成方法及有机发光显示装置制造方法

Country Status (2)

Country Link
KR (1) KR102227482B1 (ko)
CN (1) CN106191766A (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107313014A (zh) * 2017-07-24 2017-11-03 江苏实为半导体科技有限公司 一种蒸镀装置
CN111886356A (zh) * 2018-03-20 2020-11-03 夏普株式会社 成膜用掩模及使用该成膜用掩模的显示装置的制造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107904566A (zh) * 2017-12-15 2018-04-13 京东方科技集团股份有限公司 一种蒸镀载板及蒸镀装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005256101A (ja) * 2004-03-12 2005-09-22 Mitsui Eng & Shipbuild Co Ltd 基板・マスク固定装置
CN101523571A (zh) * 2006-09-29 2009-09-02 无穷动力解决方案股份有限公司 柔性基板上沉积的电池层的掩模和材料限制
JP2013209697A (ja) * 2012-03-30 2013-10-10 Hitachi High-Technologies Corp 成膜装置および成膜方法
WO2013183374A1 (ja) * 2012-06-08 2013-12-12 シャープ株式会社 蒸着装置
CN203582967U (zh) * 2012-12-12 2014-05-07 三星显示有限公司 沉积装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005256101A (ja) * 2004-03-12 2005-09-22 Mitsui Eng & Shipbuild Co Ltd 基板・マスク固定装置
CN101523571A (zh) * 2006-09-29 2009-09-02 无穷动力解决方案股份有限公司 柔性基板上沉积的电池层的掩模和材料限制
JP2013209697A (ja) * 2012-03-30 2013-10-10 Hitachi High-Technologies Corp 成膜装置および成膜方法
WO2013183374A1 (ja) * 2012-06-08 2013-12-12 シャープ株式会社 蒸着装置
CN203582967U (zh) * 2012-12-12 2014-05-07 三星显示有限公司 沉积装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107313014A (zh) * 2017-07-24 2017-11-03 江苏实为半导体科技有限公司 一种蒸镀装置
CN111886356A (zh) * 2018-03-20 2020-11-03 夏普株式会社 成膜用掩模及使用该成膜用掩模的显示装置的制造方法

Also Published As

Publication number Publication date
KR102227482B1 (ko) 2021-03-15
KR20160024090A (ko) 2016-03-04

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