CN106154426A - A kind of coupled modes for LiNbO_3 film waveguide and its implementation - Google Patents
A kind of coupled modes for LiNbO_3 film waveguide and its implementation Download PDFInfo
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- CN106154426A CN106154426A CN201610518118.2A CN201610518118A CN106154426A CN 106154426 A CN106154426 A CN 106154426A CN 201610518118 A CN201610518118 A CN 201610518118A CN 106154426 A CN106154426 A CN 106154426A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
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- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract
The invention discloses a kind of coupled modes for LiNbO_3 film waveguide and its implementation, including single-mode fiber, tantalum oxide waveguide optical grating, Lithium metaniobate Nanowire Waveguides, silicon dioxide cushion and silicon substrate, wherein, silicon dioxide under-clad layer can be in the way of using thermal oxide；LiNbO_3 film layer Direct Bonding is at silicon dioxide buffer-layer surface.Prepare tantalum oxide waveguide and optical grating construction on LiNbO_3 film surface, finally the single-mode fiber through special rubbing down is directly born against tantalum oxide waveguide surface.Optical signal directly can be entered tantalum oxide films waveguide from single-mode fiber and is then coupled to LiNbO_3 film waveguide by tantalum oxide grating.The present invention solves the difficult problem being difficult to direct etching grating on Lithium metaniobate surface, and compared to end coupling, difficulty is substantially reduced；Use the ordinary optic fibre after polishing directly and the mode of substrate pressing simultaneously, mechanical strength improves a lot, be susceptible to variations in temperature impact, improve the coupling efficiency of nanoscale lithium niobate thin-film materials.
Description
Technical field
The invention belongs to technical field of photo communication, particularly relate to a kind of coupled modes for LiNbO_3 film waveguide and
Implementation method.
Background technology
In recent years, along with information communication device, household electrical appliances and the miniaturization of industry machine, high performance, thin film technique obtains
Arrive rapid development.All kinds of novel film materials emerge in multitude, and wherein, the dielectric film material with Lithium metaniobate as representative is at light
The fields such as communication, integrated optics are widely used, and become the focus of people's research.Lithium columbate crystal be a kind of collection piezoelectricity,
The effect multifunctional materials such as electric light, acousto-optic, bullet light, Preset grating, non-linear and laser active.Nineteen sixty-five, Ballman
Use czochralski method successfully to grown high-quality lithium niobate monocrystal, start the new stage of lithium columbate crystal research.Niobium at present
Acid crystalline lithium oneself be widely used in holographic memory storage, second harmonic generator, acousto-optic sensor, wave filter, Electro-optical Modulation
Device, frequency-doubled conversion, limiter, fiber waveguide, SAW device etc..The device overwhelming majority about lithium columbate crystal is based on it
Body monocrystalline develops, but LiNbO_3 film is more superior as the carrier property of all kinds of photoelectric devices.60 years last century
Since generation, along with integrated optics and the development of thin film industry and perfect, people are optically-based for LiNbO_3 film, acousto-optic
Application on device creates great interest, this is because LiNbO_3 film device has some brighter compared with its quartz crystal device
Aobvious advantage: (1) thin film is prone to make multiple structure, is applied to waveguide device, has bigger transmission density and lower biography
Transmission loss；(2) thin film is easier to realize optionally adulterating, and then presents various property；(3) on sound surface
In wave device, utilize film substrate effect, it is possible to obtain the surface wave propagation speed bigger than body monocrystalline；(4) Lithium metaniobate is thin
Film is grown on excellent single crystal of semiconductor material silicon substrate, and integrated optoelectronics is had profound significance.So far, Lithium metaniobate
Thin film is widely used in photoelectric communication field, shows prominent advantage, causes people to pay close attention to greatly, and people have used many
The method of kind grows this thin film, such as sputtering method, epitaxy, chemical vapour deposition technique, colloidal sol. gel method, pulsed laser deposition
Deng.
Even if LiNbO_3 film has many advantages, in integrated photon chip encapsulation and sheet or between sheet the one of optical interconnection
Individual key issue is the coupling between fiber waveguide.In an integrated system, the geometry of different waveguide or material may phases
With, it is also possible to entirely different, this is that coupling brings the biggest challenge.Two class end face Rhizoma Nelumbinis can be roughly divided into according to coupled modes to close
Close with plane misfortune.End coupling is the method that optical fiber passes through that Waveguide end face directly couples the light into waveguide, and usual way has many
Layer pyramidal structure, three-dimensional pyramidal structure and inverted cone-shaped structure etc..But preparing of these structures is extremely difficult, and makes tolerance
Little, in addition it is also necessary to side polishes, owing to the size of general single mode fiber is between 8～10 microns, when thin-film material reaches micro-nano
The when of magnitude, ordinary optic fibre direct-coupling is utilized to can bring about huge loss, coupling package difficulty, inadaptable extensive collection
Become the development of light path.Grating coupler becomes the focus of nanometer waveguide Coupling Research as a kind of bonder.It can be
System anywhere realize signal upload download, greatly strengthen the motility of system.When the thin film using silica-base material enters
During row coupling, to use, light can be coupled to from optical fiber in the way of directly direct etching goes out grating on silicon or silicon compound silicon
In base film fiber waveguide.
But, on Lithium metaniobate material, direct etching grating is extremely difficult, and cost is high, even and if etching grating knot
Structure, also can affect its coupling effect because the side of grating is the most steep, equally, uses end coupling to yet suffer from efficiency own
Low, tolerance is little, and intensity is low, the shortcoming that difficult encapsulation is the most influenced by ambient temperature.At light device based on lithium niobate monocrystal thin film
While part development, its coupled modes urgently change.
Summary of the invention
For the problem of above existing existence, the present invention provide a kind of coupled modes for LiNbO_3 film waveguide and
Implementation method, based on grating coupled mode, uses with Lithium metaniobate material at the oxygen of communication band (1.5 microns) refractive index close
Change tantalum material and make grating, efficiently solve the difficult problem being difficult to direct etching grating on Lithium metaniobate surface, compared to end coupling,
Difficulty is substantially reduced；Use the ordinary optic fibre after polishing directly and the mode of substrate pressing simultaneously, mechanical strength has the biggest
Improve, be susceptible to variations in temperature impact, improve the coupling efficiency of nanoscale lithium niobate thin-film materials.
Technical program of the present invention lies in:
The present invention provides a kind of coupled modes for LiNbO_3 film waveguide, including single-mode fiber, tantalum oxide Waveguide
Grid, LiNbO_3 film waveguide, silicon dioxide cushion and silicon substrate, described single-mode fiber includes covering, fibre core and cuneiform optical fiber
Face, the described cuneiform optical fiber face on described single-mode fiber is connected with described tantalum oxide waveguide optical grating, described tantalum oxide waveguide optical grating
Being arranged in described LiNbO_3 film waveguide, described silicon dioxide cushion is in described LiNbO_3 film waveguide and described silicon lining
At at the end.
Further, the thickness of described tantalum oxide waveguide optical grating is 200 microns～800 microns.
The present invention also provides for a kind of implementation method for LiNbO_3 film waveguide coupled modes, it is characterised in that: include
Following steps:
(1) select single monocrystalline silicon piece of throwing as described silicon substrate, by after cleaning of silicon wafer 900 DEG C of thermal oxides carried out above,
Oxidization time is at least 20h, forms described silicon dioxide cushion after oxidation on its surface；
(2) described LiNbO_3 film waveguide and described silicon dioxide cushion are carried out surface bond；
(3) in described LiNbO_3 film waveguide surface, the tantalum oxide waveguide optical grating of special shape, the size of input are prepared
Relatively big, between 6～12 microns, it is therefore an objective to coordinate the size of single-mode fiber；The other end is tapered, can according to different devices
To reach between 1～10 micron, and there is based on tantalum oxide waveguide fabrication the tantalum oxide grating of specific period and dutycycle, its
Design parameter determines according to grating coupled Bragg condition:
T×(Neff-n1Sin θ)=m λ (m=0, ± 1, ± 2)
Wherein T is screen periods, NeffFor the effective refractive index of waveguide, n1For the refractive index in grating length direction, θ is
The input angle of optical fiber, λ is the wavelength of input light；
(4) the end face rubbing down of input single-mode fiber is formed described cuneiform optical fiber face, and the length in described cuneiform optical fiber face
Wavelength according to input optical signal is relevant, and concrete polishing length at 50～200 microns directly, exposes fibre core, remaining part
It is highly 2 microns；
(5) described single-mode fiber good for rubbing down is directly pressed together on the corresponding input of described tantalum oxide waveguide optical grating, and
Can carry out a certain degree of encapsulation, the signal of input light is in single-mode fiber passes to described tantalum oxide waveguide optical grating, then
Can be traveled to by tantalum oxide grating in the LiNbO_3 film waveguide of lower floor.
Due to the fact that and have employed above-mentioned technology, be allowed to the most concrete actively having the beneficial effect that
1, the present invention is based on grating coupled mode, uses with Lithium metaniobate material in communication band (1.5 microns) refractive index
Close tantalum oxide material makes grating, efficiently solves the difficult problem being difficult to direct etching grating on Lithium metaniobate surface.
2, the present invention is compared to traditional end coupling, significantly reduces enforcement difficulty.
3, the ordinary optic fibre after the present invention uses polishing directly and the mode of substrate pressing, has in mechanical strength and carries the most greatly
Height, is susceptible to variations in temperature impact, improves the coupling efficiency of nanoscale lithium niobate thin-film materials.
4, present configuration is succinct, safe and reliable, has good market prospect.
5, the good product performance of the present invention, service life is long.
Accompanying drawing explanation
Fig. 1 is the coupled modes schematic diagram of the present invention；
Fig. 2 is the coupled modes upper surface schematic diagram of the present invention；
The single-mode fiber structural representation that the coupled modes that Fig. 3 is the present invention are used；
Fig. 4 is the schematic three dimensional views of the coupled modes of present invention structure in addition to single-mode fiber.
In figure: 1-single-mode fiber, 2-tantalum oxide waveguide optical grating, 3-Lithium metaniobate Nanowire Waveguides, 4-silicon dioxide cushion,
5-silicon substrate, 11-covering, 12-fibre core, 13-cuneiform optical fiber face.
Detailed description of the invention
The invention will be further described with embodiment below in conjunction with the accompanying drawings, and embodiments of the present invention include but not limited to
The following example.
Embodiment: to achieve these goals, the technical solution used in the present invention is as follows:
As it is shown in figure 1, the present invention provides a kind of coupled modes for LiNbO_3 film waveguide, including single-mode fiber 1, oxygen
Changing tantalum waveguide optical grating 2, LiNbO_3 film waveguide 3, silicon dioxide cushion 4 and silicon substrate 5, single-mode fiber 1 includes covering 11, fibre
Core 12 and cuneiform optical fiber face 13, the cuneiform optical fiber face 13 on single-mode fiber 1 is connected with tantalum oxide waveguide optical grating 2, tantalum oxide waveguide
Grating 2 is arranged in LiNbO_3 film waveguide 3, and silicon dioxide cushion 4 is between LiNbO_3 film waveguide 3 and silicon substrate 5.
The present invention is further arranged to: the thickness of tantalum oxide waveguide optical grating 2 is 200 microns～800 microns.
The present invention also provides for a kind of implementation method for LiNbO_3 film waveguide coupled modes, it is characterised in that: include
Following steps:
(1) select single monocrystalline silicon piece of throwing as silicon substrate 5, by after cleaning of silicon wafer in 900 DEG C of thermal oxides carried out above, oxidation
Time is at least 20h, forms silicon dioxide cushion 4 after oxidation on its surface；
(2) LiNbO_3 film waveguide 3 and silicon dioxide cushion 4 are carried out surface bond；
(3) on LiNbO_3 film waveguide 3 surface, preparing the tantalum oxide waveguide optical grating 2 of special shape, the size of input is relatively
Greatly, between 6～12 microns, it is therefore an objective to coordinate the size of single-mode fiber 1；The other end is tapered, can according to different devices
To reach between 1～10 micron, and there is based on tantalum oxide waveguide fabrication the tantalum oxide Waveguide of specific period and dutycycle
Grid 2, its design parameter determines according to grating coupled Bragg condition:
T×(Neff-n1Sin θ)=m λ (m=0, ± 1, ± 2)
Wherein T is screen periods, NeffFor the effective refractive index of waveguide, n1For the refractive index in grating length direction, θ is
The input angle of optical fiber, λ is the wavelength of input light；
(4) the end face rubbing down of single-mode fiber 1 is formed cuneiform optical fiber face 13, and the length in cuneiform optical fiber face 13 is according to input
The wavelength of optical signal is relevant, and concrete polishing length at 50～200 microns directly, exposes fibre core 12, and remaining Partial Height is 2
Microns；
(5) single-mode fiber 1 good for rubbing down is directly pressed together on the corresponding input of tantalum oxide waveguide optical grating 2, it is possible to enter
The a certain degree of encapsulation of row, the signal of input light is in single-mode fiber 1 passes to tantalum oxide waveguide optical grating 2, then by oxidation
Tantalum grating 2 can travel in the LiNbO_3 film waveguide 3 of lower floor.
By using technique scheme, select silicon as substrate, facilitate manipulator and other optical devices integrated；Tantalum oxide
In the refractive index of communication band (1550nm) between 2.1～2.2, this and the refractive index close of Lithium metaniobate, use Lithium metaniobate thin
The grating coupling structure that film waveguide 3 is formed with tantalum oxide can largely reduce loss, big compared to end coupling difficulty
Big reduction；Use the single-mode fiber 1 after polishing directly and the mode of substrate pressing simultaneously, mechanical strength improve a lot,
Being susceptible to variations in temperature impact, improve the coupling efficiency of nanoscale lithium niobate thin-film materials, simplify processing technology, yield rate shows
Write.
Above one embodiment of the present of invention is described in detail, but described content has been only the preferable enforcement of the present invention
Example, it is impossible to be considered the practical range for limiting the present invention.All impartial changes made according to the present patent application scope and improvement
Deng, within all should still belonging to the patent covering scope of the present invention.
Claims (3)
1. the coupled modes for LiNbO_3 film waveguide, it is characterised in that: include single-mode fiber, tantalum oxide Waveguide
Grid, LiNbO_3 film waveguide, silicon dioxide cushion and silicon substrate, described single-mode fiber includes covering, fibre core and cuneiform optical fiber
Face, the described cuneiform optical fiber face on described single-mode fiber is connected with described tantalum oxide waveguide optical grating, described tantalum oxide waveguide optical grating
Being arranged in described LiNbO_3 film waveguide, described silicon dioxide cushion is in described LiNbO_3 film waveguide and described silicon lining
At at the end.
A kind of coupled modes for LiNbO_3 film waveguide the most according to claim 1, it is characterised in that: described oxidation
The thickness of tantalum waveguide optical grating is 200 microns～800 microns.
A kind of implementation method for LiNbO_3 film waveguide coupled modes the most according to claim 1, it is characterised in that:
Comprise the following steps:
(1) select single monocrystalline silicon piece of throwing as described silicon substrate, by after cleaning of silicon wafer in 900 DEG C of thermal oxides carried out above, oxidation
Time is at least 20h, forms described silicon dioxide cushion after oxidation on its surface；
(2) described LiNbO_3 film waveguide and described silicon dioxide cushion are carried out surface bond；
(3) in described LiNbO_3 film waveguide surface, preparing the tantalum oxide waveguide optical grating of special shape, the size of input is relatively
Greatly, between 6～12 microns, it is therefore an objective to coordinate the size of single-mode fiber；The other end is tapered, permissible according to different devices
Reach between 1～10 micron, and there is based on tantalum oxide waveguide fabrication the tantalum oxide grating of specific period and dutycycle, its tool
Body parameter determines according to grating coupled Bragg condition:
T×(Neff-n1Sin θ)=m λ (m=0, ± 1, ± 2)
Wherein T is screen periods, NeffFor the effective refractive index of waveguide, n1For the refractive index in grating length direction, θ is optical fiber
Input angle, λ is the wavelength of input light；
(4) the end face rubbing down of input single-mode fiber is formed described cuneiform optical fiber face, and the length in described cuneiform optical fiber face according to
The wavelength of input optical signal is relevant, and concrete polishing length at 50～200 microns directly, exposes fibre core, remaining Partial Height
It is 2 microns；
(5) described single-mode fiber good for rubbing down is directly pressed together on the corresponding input of described tantalum oxide waveguide optical grating, it is possible to
Carrying out a certain degree of encapsulation, the signal of input light, in single-mode fiber passes to described tantalum oxide waveguide optical grating, then passes through
Tantalum oxide grating can travel in the LiNbO_3 film waveguide of lower floor.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109358394A (en) * | 2018-10-23 | 2019-02-19 | 中山大学 | A kind of high efficiency grating coupler and preparation method thereof based on medium refractive index waveguide material |
| CN109407208A (en) * | 2018-12-13 | 2019-03-01 | 中国科学院半导体研究所 | The preparation method of optical coupling structure, system and optical coupling structure |
| CN110161625A (en) * | 2019-05-17 | 2019-08-23 | 上海交通大学 | The integrated method of silicon substrate LiNbO_3 film electrooptic modulator array |
| CN111129920A (en) * | 2019-12-30 | 2020-05-08 | 上海交通大学 | Preparation method of distributed Bragg reflection laser based on erbium-doped lithium niobate thin film |
| CN111399116A (en) * | 2020-04-24 | 2020-07-10 | 罕王微电子（辽宁）有限公司 | Stacked optical waveguide structure and preparation method thereof |
| CN111965761A (en) * | 2020-08-18 | 2020-11-20 | 上海交通大学 | Grating coupler based on lithium niobate thin film material and manufacturing method thereof |
| CN113237849A (en) * | 2021-05-11 | 2021-08-10 | 江苏大学 | Lithium niobate two-dimensional grating excited Bloch surface wave biosensor and method |
| JP2022510466A (en) * | 2018-12-13 | 2022-01-26 | 中国科学院半▲導▼体研究所 | Photocoupled structure, system and method for manufacturing the photocoupled structure |
| CN116007605A (en) * | 2023-03-30 | 2023-04-25 | 中国船舶集团有限公司第七〇七研究所 | Interference type integrated optical gyroscope and optical fiber coupling method thereof |
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|---|---|---|---|---|
| CN109358394A (en) * | 2018-10-23 | 2019-02-19 | 中山大学 | A kind of high efficiency grating coupler and preparation method thereof based on medium refractive index waveguide material |
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| CN111129920A (en) * | 2019-12-30 | 2020-05-08 | 上海交通大学 | Preparation method of distributed Bragg reflection laser based on erbium-doped lithium niobate thin film |
| CN111399116A (en) * | 2020-04-24 | 2020-07-10 | 罕王微电子（辽宁）有限公司 | Stacked optical waveguide structure and preparation method thereof |
| CN111965761A (en) * | 2020-08-18 | 2020-11-20 | 上海交通大学 | Grating coupler based on lithium niobate thin film material and manufacturing method thereof |
| CN111965761B (en) * | 2020-08-18 | 2022-08-19 | 上海交通大学 | Grating coupler based on lithium niobate thin film material and manufacturing method thereof |
| CN113237849A (en) * | 2021-05-11 | 2021-08-10 | 江苏大学 | Lithium niobate two-dimensional grating excited Bloch surface wave biosensor and method |
| CN116007605A (en) * | 2023-03-30 | 2023-04-25 | 中国船舶集团有限公司第七〇七研究所 | Interference type integrated optical gyroscope and optical fiber coupling method thereof |
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