CN106153236A - A kind of piezoelectric type hexa-dimensional force sensor - Google Patents
A kind of piezoelectric type hexa-dimensional force sensor Download PDFInfo
- Publication number
- CN106153236A CN106153236A CN201510203135.2A CN201510203135A CN106153236A CN 106153236 A CN106153236 A CN 106153236A CN 201510203135 A CN201510203135 A CN 201510203135A CN 106153236 A CN106153236 A CN 106153236A
- Authority
- CN
- China
- Prior art keywords
- quartz
- dimensional
- piezoelectric
- group
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims abstract description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000013078 crystal Substances 0.000 claims abstract description 23
- 239000000126 substance Substances 0.000 claims abstract description 19
- 238000000605 extraction Methods 0.000 claims description 17
- 238000005259 measurement Methods 0.000 abstract description 13
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 238000013461 design Methods 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The present invention relates to a kind of piezoelectric type hexa-dimensional force sensor based on the design of Stewart structure.The present invention includes sensor upper mounting plate, lower platform, six upper boom ball pivots, six connecting rod upper booms, six groups of one-dimensional sensors of piezoelectric type, six connecting rod lower beams, six lower beam ball pivots, upper lower platform is linked together by connecting rod, upper and lower ball pivot, the sensor branch of piezoelectric type one-dimensional sensor composition, six groups of one-dimensional piezoquartz crystalline substance groups are fixed between upper and lower strut by six uniform screws in the groove of composition respectively, often group quartz-crystal group is made up of four xy type piezoelectric quartz crystal plate, and quartz-crystal group is bonded together by conducting resinl by quartz wafer and electrode slice.Due to the fact that and make use of Stewart parallel-connection structure and load sharing principle, realize the measurement of wide range load, each brilliant group is made up of four piezoelectric quartz crystal plate, having high sensitivity and high accuracy, sensor has the highest measurement sensitivity, and measurement result precision is high, simple in construction, easy to install, the feature of good stability, can be applicable to the measurement aspect of great force value load.
Description
Technical field
The invention belongs to sextuple piezoelectric transducer field, relate to the heavy load measurement sensor based on Stewart structure and load sharing principle design in parallel of a kind of high accuracy, high sensitivity, six-dimensional force measurement.
Background technology
Six-dimensional force cell sensor can measurement space three-dimensional force and the size of moment, when measurement space mechanical information, there is dynamometry abundant information, the feature that dynamometry precision is high, apply operating equipment in fields such as Aero-Space, medical science, science and techniques of defence accurate control, the field such as multi-finger clever hand and Robot Force-Feedback.Six-dimension force sensor based on Stewart structure is the most superior a kind of six-dimension force sensor, the particular advantages such as its bearing capacity is strong, precision is high, response is fast, sensitivity is high, extremely designer and the favor of user, is widely used to the fields such as robot, aviation (impulsive force such as aircraft takeoffs and landings is tested), space flight (six-dimensional force test when the test of rocket model emissivity, spacecraft launching site), automobile (bump test) and shipbuilding so far.In recent years, big dynamometry scope, the six-dimensional force cell sensor of wide range have become one of high-tech product of urgent need at present, especially for apply test in the thrust of aerospace field, big dynamometry scope that experiment in flight test and wind tunnel experiment are badly in need of, large-tonnage six-dimensional force cell sensor.Its development work is paid much attention to by many countries of the world today, is considered as one of key technology relating to national security, economic development and scientific and technological progress, and is listed among national science and technology development strategy plan.Current six-dimension force sensor, dynamometry scope is smaller, it is impossible to realize large force measurement.In over-loading operation equipment, in order to realize force-feedback control, it is desirable to the high-precision measurement of six-dimension heavy force, and currently without putting into the high sensitivity heavy duty sensor of reality application, the six-dimension force sensor having been put into using also exists measures the problem that range is less.Piezoelectric six-dimensional large force sensor based on Stewart structure proposed by the invention can effectively solve the high accuracy to six-dimension heavy force sensor, high sensitivity, large bearing capacity and simple and practical requirement.
Summary of the invention
The technical problem to be solved in the present invention is by by Stewart structure, the measurement of piezo technology and load sharing principle connected applications in parallel to six-dimensional space power, realize the multidimensional measure of large-load force, using piezoquartz crystalline substance group as sensing element, improve real-time, accuracy and the sensitivity measured, it is applied in the over-loading operation equipment in extremely manufacturing technology, solves over-loading operation equipment and cannot be carried out the difficult problem that six-dimension heavy force is measured.
The technical solution used in the present invention: piezoelectric type hexa-dimensional force sensor based on Stewart structure is made up of upper mounting plate 1, lower platform 3, six connecting rod upper booms of 2, six upper boom ball pivots 4, six groups of one-dimensional piezoquartz crystalline substance sensors, 6, six lower beam ball pivots 7 of 5, six connecting rod lower beams, six upper boom ball pivots 3 and six lower beam ball pivots 7 are to be fixed on upper mounting plate 1 and lower platform 2 by four fixing screws of each ball pivot seat, and the end of upper connecting rod 4 has boss a1With positioning cylinder boss a2, the end of lower connecting rod 6 has boss b1, place piezoquartz crystalline substance group groove b2And with positioning cylinder boss a2Coordinate the detent b for positioning and voltage quartz-crystal group3, one-dimensional piezoquartz crystalline substance sensor 5 is by boss a1, positioning cylinder boss a2, boss b1, place piezoquartz crystalline substance group groove b2, detent b3, six uniform fixing screws 8 and piezoquartz crystalline substance group 9 form.Piezoquartz crystalline substance group 9 is by four xy type piezoelectric quartz crystal plate (91、92、93、94), two groups of xy extraction electrodes (101、102) and a ground electrode 11 form, often group xy extraction electrode be smeared conducting resinl by the xy extraction electrode two sides that four plate shapes are identical after be attached on piezoelectric quartz crystal plate, every bauerite wafer has hole, location.
Present invention employs the brilliant group of response speed that improve sensor and sensitivity that four xy type piezoelectric quartz crystal plate are constituted, use ball pivot to fix and be effectively increased sensor bearing capacity, the method for designing using quartz-crystal group and elastic carrier parallel connection is effectively increased sensor measurement range, can also be by changing lower link wall thickness in parallel with quartz-crystal group, sensor is made to obtain different measurement ranges, it is used in combination the high rigidity that Stewart parallel institution has, compact conformation, the power mapping relations feature such as clearly, sensor is made to have high rigidity, high sensitivity, simple and compact for structure, fast response time, mapping relations are clear and definite, measure the advantages such as range is big.
Accompanying drawing explanation
Fig. 1 is based on Stewart structure piezoelectric type hexa-dimensional force sensor installation diagram front view, 1 being wherein upper mounting plate, 2 be lower platform, 3 be six upper boom ball pivots, 4 be six connecting rod upper booms, 5 be six groups of one-dimensional piezoelectric quartz sensors, 6 be six connecting rod lower beams, 7 be six lower beam ball pivots, six upper boom ball pivots 3 and six lower beam ball pivots 7 are to be fixed on upper mounting plate 1 and lower platform 2 by each ball pivot by four fixing screws.
Fig. 2 is six groups of one-dimensional piezoelectric quartz sensor sectional views, wherein a1It is upper connecting rod boss, a2It is positioning cylinder boss, b1It is lower link boss, b2It is to place piezoquartz crystalline substance group groove, b3Being detent, 8 is fixing screw, and each group of one-dimensional piezoelectric quartz sensor has six, and 9 is piezoquartz crystalline substance group.
Fig. 3 is piezoquartz crystalline substance group structure chart, wherein 91、92、93、94It is four xy type piezoelectric quartz crystal plate, 101、102Being two groups of xy extraction electrodes, 11 is a ground electrode, and often group xy extraction electrode is made up of the xy extraction electrode that four plate shapes are identical, and every bauerite wafer has hole, location.
Fig. 4 is monolithic quartz wafer and the identical xy extraction electrode schematic diagram of four plate shapes, wherein 91For piezoelectric quartz crystal plate, 102(c), 102(d), 102(e), 102F () is the xy extraction electrode that four plate shapes are identical.
Detailed description of the invention
Below in conjunction with accompanying drawing embodiment, the present invention is described in further detail.As depicted in figs. 1 and 2, in the present invention based on Stewart structure piezoelectric type hexa-dimensional force sensor by upper mounting plate 1, lower platform 2, six upper boom ball pivots 3, six connecting rod upper booms 4, six groups of one-dimensional piezoelectric quartz sensors 5, six connecting rod lower beams 6, six lower beam ball pivots 7 form, six upper boom ball pivots 3 and six lower beam ball pivots 7 are to be fixed on upper mounting plate 1 and lower platform 2 by each ball pivot by four fixing screws, the diameter of lower platform 2 is more than the diameter of upper mounting plate 1, six one-dimensional piezoelectric quartz sensors of branch road 5 are connected to upper lower platform 1 by hemihedrism structure is uniform, between 2, each branch road is the identical elevation angle, employing spherical linkage connects, connecting rod can be considered two power bars, only by axial pressure, the pressure that connecting rod is subject to is measured by often organizing piezoquartz crystalline substance group 9.
In the present invention, one-dimensional piezoelectric quartz sensor 5 half cuts open structure such as Fig. 2, including upper connecting rod end boss a1, positioning cylinder boss a2, lower link boss b1, place piezoquartz crystalline substance group groove b2, detent b3, fixing screw 8 and piezoquartz crystalline substance group 9.Quartz-crystal group 9 is positioned in groove b2In, by positioning cylinder boss a2With detent b3Fixing screw 8 uniform with six is fixed on groove b2In, and apply certain pretightning force.
Quartz-crystal group 9 of the present invention has four identical xy type piezoelectric quartz crystal plate 91、92、93、94With two groups of xy extraction electrodes (101、102) and a ground electrode 11 form, often group xy extraction electrode be smeared conducting resinl by the xy extraction electrode two sides that four plate shapes are identical after be attached on piezoelectric quartz crystal plate, every bauerite wafer has hole, location, with xy type quartz wafer 9 during installation1On the basis of output charge is the one side of "-", and by the xy extraction electrode 10 of four same shapes2(c), 102(d), 102(e), 102F conducting resinl is smeared on () two sides after, it is arranged in uniformly on this face, then by second quartz wafer 9 of xy cut type2Output charge is the one side of "-", align according on the basis of the big chamfering of quartz wafer, paste at extraction electrode another side, form one group of xy type quartz-crystal group, do as special equipment is depressed into glue in advance, prepare another group xy type piezoquartz crystalline substance group in the same way, then on the basis of the xy type piezoquartz crystalline substance group that one of which suppresses, adhere to after conducting resinl is smeared on ground electrode 11 two sides on its face, then another group xy type piezoquartz crystalline substance group is adhered to the another side of ground electrode 11.
Claims (2)
1. a piezoelectric type hexa-dimensional force sensor based on Stewart structure, it is characterized in that sensor is by upper mounting plate 1, lower platform 2, six upper boom ball pivots 3, six connecting rod upper booms 4, six groups of one-dimensional piezoelectric quartz sensors 5, six connecting rod lower beams 6, six lower beam ball pivots 7 form, the diameter of lower platform 2 is more than the diameter of platform 1, six one-dimensional piezoelectric quartz sensors of branch road 5 are connected to upper lower platform 1 by hemihedrism structure is uniform, between 2, each branch road is the identical elevation angle, employing spherical linkage connects, in six upper boom ball pivots 3 and six lower beam ball pivots 7, each ball pivot is fixed on upper mounting plate 1 and lower platform 2 by four fixing screws, one-dimensional piezoelectric quartz sensor 5 includes connecting rod end boss a1, positioning cylinder boss a2, lower link boss b1, place piezoquartz crystalline substance group groove b2, detent b3, fixing screw 8 and piezoquartz crystalline substance group 9；Quartz-crystal group 9 is positioned in groove b2In, by positioning cylinder boss a2With detent b3Fixing screw 8 uniform with six is fixed on groove b2In, and apply certain pretightning force.
A kind of piezoelectric type hexa-dimensional force sensor based on Stewart structure the most according to claim 1, it is characterised in that quartz-crystal group 9 has four identical xy type piezoelectric quartz crystal plate 91、92、93、94With two groups of xy extraction electrodes (101、102) and a ground electrode 11 form, often group xy extraction electrode be smeared conducting resinl by the xy extraction electrode two sides that four plate shapes are identical after be attached on piezoelectric quartz crystal plate, every bauerite wafer has hole, location, the xy extraction electrode 10 of four same shapes2(c), 102(d), 102(e), 102(f), be arranged in uniformly quartz-crystal unilateral on, align on the basis of big chamfering when quartz wafer is installed, smeared by ground electrode 11 two sides between two groups of xy type quartz-crystal groups and adhere to after conducting resinl.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510203135.2A CN106153236A (en) | 2015-04-27 | 2015-04-27 | A kind of piezoelectric type hexa-dimensional force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510203135.2A CN106153236A (en) | 2015-04-27 | 2015-04-27 | A kind of piezoelectric type hexa-dimensional force sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106153236A true CN106153236A (en) | 2016-11-23 |
Family
ID=57347300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510203135.2A Pending CN106153236A (en) | 2015-04-27 | 2015-04-27 | A kind of piezoelectric type hexa-dimensional force sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106153236A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107525612A (en) * | 2017-09-06 | 2017-12-29 | 济南大学 | Wide range piezoelectric membrane three-dimensional force sensor |
| CN108693382A (en) * | 2018-04-28 | 2018-10-23 | 北京林业大学 | A kind of parallel-connection type six-dimension acceleration transducer |
| CN109047622A (en) * | 2018-08-31 | 2018-12-21 | 苏州瑞玛精密工业股份有限公司 | Connecting rod pressure riveting mechanism |
| CN110091314A (en) * | 2019-04-26 | 2019-08-06 | 中国科学院长春光学精密机械与物理研究所 | Multi-freedom parallel connection robot |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101149300A (en) * | 2007-11-01 | 2008-03-26 | 大连理工大学 | Piezoelectric six-dimensional large force sensor |
| CN101716747A (en) * | 2009-11-18 | 2010-06-02 | 大连理工大学 | Piezoelectric type grinding force measuring device for ultraprecise grinding machine of silicon wafer |
| CN102564656A (en) * | 2012-02-20 | 2012-07-11 | 大连理工大学 | Piezoelectric quartz crystal group for measuring multi-dimensional force, and manufacturing method for piezoelectric quartz crystal group |
| CN203688114U (en) * | 2013-12-05 | 2014-07-02 | 陕西电器研究所 | Six-dimensional force sensor based on Stewart structure |
-
2015
- 2015-04-27 CN CN201510203135.2A patent/CN106153236A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101149300A (en) * | 2007-11-01 | 2008-03-26 | 大连理工大学 | Piezoelectric six-dimensional large force sensor |
| CN101716747A (en) * | 2009-11-18 | 2010-06-02 | 大连理工大学 | Piezoelectric type grinding force measuring device for ultraprecise grinding machine of silicon wafer |
| CN102564656A (en) * | 2012-02-20 | 2012-07-11 | 大连理工大学 | Piezoelectric quartz crystal group for measuring multi-dimensional force, and manufacturing method for piezoelectric quartz crystal group |
| CN203688114U (en) * | 2013-12-05 | 2014-07-02 | 陕西电器研究所 | Six-dimensional force sensor based on Stewart structure |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107525612A (en) * | 2017-09-06 | 2017-12-29 | 济南大学 | Wide range piezoelectric membrane three-dimensional force sensor |
| CN108693382A (en) * | 2018-04-28 | 2018-10-23 | 北京林业大学 | A kind of parallel-connection type six-dimension acceleration transducer |
| CN108693382B (en) * | 2018-04-28 | 2020-05-15 | 北京林业大学 | Parallel six-dimensional acceleration sensor |
| CN109047622A (en) * | 2018-08-31 | 2018-12-21 | 苏州瑞玛精密工业股份有限公司 | Connecting rod pressure riveting mechanism |
| CN110091314A (en) * | 2019-04-26 | 2019-08-06 | 中国科学院长春光学精密机械与物理研究所 | Multi-freedom parallel connection robot |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106153236A (en) | A kind of piezoelectric type hexa-dimensional force sensor | |
| CN103076131B (en) | Six-dimensional force and torque sensor for measuring large force and small torque of large mechanical arm | |
| CN101430237B (en) | Multidimensional force test system in vibration experiment | |
| CN103630285A (en) | Device for measuring RCS (Radar Cross Section) jet disturbance force and disturbance moment of near space aircraft | |
| CN106500902B (en) | A kind of strain-type multidimensional force sensor with from decoupling function | |
| CN104344804B (en) | Satellite Simulation zero-g state unit pointing accuracy measuring method | |
| CN103471751B (en) | High-precision strain type torque sensor | |
| CN203037441U (en) | Single-component rod low-speed hinge moment measuring device | |
| CN105547851A (en) | Compact device for testing interfacial shear strength of composite material and method for testing interfacial shear strength of composite material through device | |
| CN108731875B (en) | Six-dimensional force sensor calibration device and calibration method thereof | |
| CN100351622C (en) | Six-dimensional force sensor integrated strain gauge | |
| CN103940544A (en) | Double crossed beam combination type finger joint six-dimensional force sensor | |
| CN106248341A (en) | A kind of five component piezoelectric types " double balance " static demarcating device | |
| CN104568279B (en) | A kind of multi-axis force transducer | |
| CN206348091U (en) | A kind of cross beam type 3-dimensional force snesor based on compliant mechanism | |
| CN204924531U (en) | Sextuple force transducer of piezoelectric type | |
| CN107152980A (en) | A kind of piezoelectric type becomes force value and compares caliberating device | |
| CN203203742U (en) | Box type six-component balance | |
| CN106940243B (en) | Six-component measuring balance and model for wind tunnel experiment | |
| Sun et al. | Design and optimization of a novel six-axis force/torque sensor with good isotropy and high sensitivity | |
| CN203519152U (en) | Ultra-low frequency six-component micro-vibration measurement system | |
| Zhang et al. | Analysis of laminated plates and shells using B-spline wavelet on interval finite element | |
| Tu et al. | Research on actuation performance of macro fiber composites based on third order shear deformation theory | |
| CN203519229U (en) | Quartz piezoelectric six-dimensional force detecting device | |
| CN107255618B (en) | A kind of Large Launch Vehicle binding mechanism top load lubrication friction pilot system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20161123 |