CN101149300A - Piezoelectric six-dimensional large force sensor - Google Patents

Piezoelectric six-dimensional large force sensor Download PDF

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Publication number
CN101149300A
CN101149300A CNA2007101579312A CN200710157931A CN101149300A CN 101149300 A CN101149300 A CN 101149300A CN A2007101579312 A CNA2007101579312 A CN A2007101579312A CN 200710157931 A CN200710157931 A CN 200710157931A CN 101149300 A CN101149300 A CN 101149300A
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platform
boom
connecting rod
rod
force
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CN100494932C (en
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刘巍
林盛
贾振元
王永青
王福吉
赵磊
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Dalian University of Technology
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Dalian University of Technology
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Abstract

The invention belongs to the piezoelectric sensor, especially it relates to the big force splitting measurement technology of many dimension force measure in the condition of big load ability and the big force sensor with the shunt splitting actuating mode. The piezoelectric six-dimension big force sensor is made up of the up platform, low platform, the mechanism arm, six upper boom ball sockets, six connecting upper poles, six groups of piezoelectric quartz wafer, six connecting lower poles, six lower-pole ball sockets. The up and down platforms are connected with the mechanism arm through four connecting nuts, the piezoelectric quartz wafer is inserted into the flute which is matched with the boss; the upper pole is connected with the lower pole through four up and down bolts and nuts. The sensor is designed by the shunt partial load structure, which has the good load splitting effect, convenience installation, high precision, good stability and simple structure. So it is proper for measuring the six dimension big force in the heavy load operation device.

Description

Piezoelectric six-dimensional large force sensor
Technical Field
The invention belongs to the field of piezoelectric sensors, and particularly relates to a large-force shunt measurement technology for realizing multi-dimensional force measurement on the premise of large bearing capacity and a large-force sensor with a parallel shunt force transmission mode.
Background
In the operation process of the heavy-load operation equipment, six-dimensional force measurement and real-time force feedback are the basis for realizing multi-equipment coordinated operation control and force compliance control. The large-force measurement technology is developed under the drive of the requirement of heavy equipment, a sensor with the bearing capacity in the range of 10-2000 kN is generally called as a large-force sensor, and the maximum rated bearing capacity of the large-force sensor in the heavy-load manufacturing equipment can be as high as more than 100 MN. The manufacturing process of the supporting type heavy duty large force sensor is complex, the technical difficulty is high, the supporting type large force sensor is produced in a large scale in a few countries, the supporting type large force sensor used by domestic small-amount heavy equipment is mainly an imported product abroad, and most heavy equipment has no large force measurement and control device so far. The bearing area, the geometric dimension and the weight of the supporting type heavy-duty large-force sensor are all increased along with the increase of the measured force, so that the installation and the maintenance are inconvenient. The design ideas of the high-force shunt measurement technology and the high-force sensor with a parallel shunt force transmission mode are from the last 60 years, and the attached high-force sensors are developed in the countries of Su, mei, jia, germany and the like. The Shenjiu honing professor of the northern industrial university in China develops an attached type large force sensor by self, the patent number is 86 1 05879, but only one-dimensional large force measurement can be realized. The existing multi-dimensional force sensor has a small force measuring range, and cannot realize large force value measurement. In heavy-load operation equipment, six-dimensional large force measurement is required for realizing force feedback control, a six-dimensional large force measurement sensor is not available in the current heavy-load operation equipment, force feedback is realized only by measuring the pressure of a hydraulic cylinder, and the instantaneity is poor. The six-dimensional large force sensor provided by the invention meets the requirement of a heavy-load operating machine on six-dimensional large force measurement.
Disclosure of Invention
The invention aims to solve the technical problem that the multi-dimensional measurement of large load force is realized by combining parallel load sharing and six-dimensional force measurement, the piezoelectric quartz is used as a sensitive element, the real-time performance of the measurement is improved, and the multi-dimensional measuring device is applied to heavy load operation equipment such as forging and pressing operation machines and the like, so that the problem that the heavy load operation equipment cannot carry out six-dimensional large force measurement is solved.
The technical scheme adopted by the invention is as follows: the piezoelectric type six-dimensional heavy force sensor comprises an upper platform 1, a lower platform 2, a mechanical arm 3, four upper platform connecting bolts 4, six upper rod spherical hinges 5, six connecting rod upper rods 6, four upper and lower rod connecting bolts 7, four upper and lower rod connecting nuts 8, six groups of piezoelectric quartz wafers 9, six connecting rod lower rods 10, six lower rod spherical hinges 11, four lower platform connecting bolts 12, four upper platform bosses a, four lower platform bosses b, six connecting rod bosses c and six connecting rod grooves d, wherein the four upper platform connecting bolts 4 are respectively arranged on the four bosses of the upper platform 1, the upper platform 1 is connected with the upper part of the mechanical arm 3 through the four upper platform connecting bolts 4, the four lower platform connecting bolts 12 are respectively arranged on the four bosses of the lower platform 2, the lower platform 2 is connected with the upper part of the mechanical arm 3 through the four lower platform connecting bolts 12, the upper rod spherical hinges 5 are connected with the upper platform 1, and the lower rod spherical hinges 11 are connected with the lower platform 2; 6 one end of connecting rod upper boom 5 is upper boom ball pivot, and the other end has a recess c, and 10 one end of connecting rod lower boom are lower boom ball pivot 11, and the other end has a boss d, inlays piezoelectric quartz crystal piece 9 in the recess c of connecting rod upper boom 6, and the boss d of connecting rod lower boom 10 cooperatees with the recess c of connecting rod upper boom 6, through four upper and lower boom coupling screw 7 and upper and lower boom coupling nut 8 with connecting rod upper boom 6 and connecting rod lower boom 10 installation together.
The piezoelectric type six-dimensional large force value sensor has the remarkable effects that the piezoelectric type six-dimensional large force value sensor is designed by adopting a parallel load sharing structure, has the characteristics of good load sharing effect, convenience in installation and operation, high precision, good stability, simple structure and the like, is suitable for measuring six-dimensional large force values in heavy load operation equipment in real time, and can improve the force compliance and flexibility of a manipulator of a heavy load operation machine.
Drawings
Fig. 1 is a front view of an assembly drawing of a piezoelectric six-dimensional force sensor, wherein 1 is an upper platform, 2 is a lower platform, 3 is a manipulator arm, 4 is an upper platform connecting bolt, 5 is an upper rod spherical hinge, 6 is a connecting rod upper rod, 7 is an upper and lower rod connecting bolt, 8 is an upper and lower rod connecting nut, 9 is a piezoelectric quartz wafer, 10 is a connecting rod lower rod, 11 is a lower rod spherical hinge, 12 is a lower platform connecting bolt, a is an upper platform boss, and b is a lower platform boss.
Fig. 2 is a top view of an assembly diagram of a piezoelectric six-dimensional high-force sensor, wherein 1 is an upper platform, 2 is a lower platform, a is an upper platform boss, and b is a lower platform boss.
Fig. 3 is an enlarged schematic view of the connecting rod, wherein c is an upper rod groove of the connecting rod, d is a lower rod boss of the connecting rod, 7 is an upper and lower rod connecting bolt, 8 is an upper and lower rod connecting nut, and 9 is a piezoelectric quartz wafer.
FIG. 4 is a schematic diagram of a piezoelectric six-dimensional high force transducer
FIG. 5 is a diagram of a piezoelectric six-dimensional high force sensor system
Detailed Description
The following description will be made in detail with reference to the accompanying drawings, wherein the upper and lower platforms are rigidly connected to the robot arm 3 through four connecting bolts, respectively, the piezoelectric quartz crystal plate 9 is embedded in the groove c of the upper rod 6 of the connecting rod, the upper and lower rods of the connecting rod are mounted together through the upper and lower rod connecting bolts 7 and the nuts 8, and the connecting rod and the upper and lower platforms are connected by a spherical hinge. When the manipulator works, the acting force of the manipulator is mainly born by the arm, and a few parts of the acting force areThe component force is loaded on each connecting rod to realize large force distribution, and the connecting rods can be regarded as two-force rods due to the spherical hinge connection, and are only subjected to axial tension and pressure, the tension and pressure on the connecting rods are measured through a group of piezoelectric quartz wafers 9 arranged on each rod, and the lower platform 2 is used as a fixing bodyA fixed platform, the upper platform 1 is used as a movable platform, and the six-dimensional force of the manipulator to be measured on the arm is set as
Figure A20071015793100051
The measured forces on each rod are expressed as vectors
Figure A20071015793100052
The force of the arm of the manipulator on the center of the upper platform
Figure A20071015793100053
Respectively recording the coordinates of 6 spherical hinge points of the upper platform as b 1 ,b 2 ,b 3 ,b 4 ,b 5 ,b 6 Their spatial position to a fixed coordinate systemExpressed by vectors, the coordinates of 6 spherical hinge points of the lower platform are respectively B 1 ,B 2 ,B 3 ,B 4 ,B 5 ,B 6 Vectorially to the position of a fixed coordinate system
Figure A20071015793100055
Denotes that, let the i-th rod axis be aligned with the unit line vector $ i, $ of the fixed coordinate system i =S i +∈S 0i ,S i ·S i =1,S i ·S 0i =0,
Figure A20071015793100056
In the formula (I), wherein,
Figure A20071015793100058
according to the force spiral theory, a force balance equation (F '; M') = F of the parallel mechanism is obtained 1 $ 1 +f 2 $ 2 +f 3 $ 3 +f 4 $ 4 +f 5 $ 5 +f 6 $ 6 Writing it in matrix form as
Figure A20071015793100059
According to the measured stress of each rod
Figure A200710157931000510
To obtain the six-dimensional force applied to the upper platform
Figure A200710157931000511
The measured stress f of each rod 1 Substituting into formula
Figure A200710157931000512
The amount of deformation (Deltal) of each rod is obtained 1 ,Δl 2 ,Δl 3 ,Δl 4 ,Δl 5 ,Δl 6 ) And obtaining the increment (delta) of the pose of the upper platform through the pose correction solution x ,Δ y ,Δ z ,θ z ,θ y ,θ x ) Displacement of center point of the above platform (. DELTA.. Delta.) x ,Δ y ,Δ z ,θ z ,θ y ,θ x ) As a boundary condition, the mechanical arm between the upper platform and the lower platform is subjected to stress analysis to obtain six-dimensional force applied to the central point of the upper platformActing force of mechanical arm on arm
Figure A200710157931000514
Combined with arm forces applied by parallel mechanisms, i.e.
Figure A200710157931000515
According to the obtained
Figure A200710157931000516
And
Figure A200710157931000517
the acting force of the mechanical arm on the arm can be obtained

Claims (1)

1. The piezoelectric type six-dimensional heavy force sensor is characterized by comprising an upper platform (1), a lower platform (2), a mechanical arm (3), four upper platform connecting bolts (4), six upper rod spherical hinges (5), six connecting rod upper rods (6), four upper and lower rod connecting bolts (7), four upper and lower rod connecting nuts (8), six groups of piezoelectric quartz wafers (9), six connecting rod lower rods (10), six lower rod spherical hinges (11), four lower platform connecting bolts (12), four upper platform bosses (a), four lower platform bosses (b), six connecting rod bosses (c) and six connecting rod grooves (d), wherein the four upper platform connecting bolts (4) are respectively arranged on the four bosses of the upper platform (1), the upper platform (1) is connected with the upper part of the mechanical arm (3) through the four upper platform connecting bolts (4), the four lower platform connecting bolts (12) are respectively arranged on the four bosses of the lower platform (2), the lower platform (2) is connected with the upper part of the mechanical arm (3) through the four upper platform connecting bolts (12), the upper platform connecting bolts (2) are connected with the lower platform (5), and the upper platform connecting bolts (11) are connected with the lower platform spherical hinges (11); connecting rod upper boom (6) one end is upper boom ball pivot (5), the other end has a recess (c), connecting rod lower boom (10) one end is lower boom ball pivot (11), the other end has a boss (d), inlay piezoelectricity quartz wafer (9) in recess (c) of connecting rod upper boom (6), boss (d) of connecting rod lower boom (10) cooperatees with recess (c) of connecting rod upper boom (6), install connecting rod upper boom (6) and connecting rod lower boom (10) together through four upper and lower boom connecting bolt (7) and upper and lower boom coupling nut (8).
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105716746A (en) * 2016-04-12 2016-06-29 肖军 Force measurement method for switching external force measurement into internal measurement and force measurement device adopted by same
CN106153236A (en) * 2015-04-27 2016-11-23 济南大学 A kind of piezoelectric type hexa-dimensional force sensor
CN107356361A (en) * 2017-07-03 2017-11-17 大连理工大学 A kind of measuring method of six-dimensional space power
CN110174205A (en) * 2019-04-02 2019-08-27 济南大学 A kind of joint of robot piezoelectric six-dimensional force sensor and its measurement method
CN112611497A (en) * 2019-09-18 2021-04-06 马洪文 Multi-dimensional force sensor structure of parallel rod system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353483A (en) * 2011-07-08 2012-02-15 吉林大学 Device for detecting three-dimensional micro mechanical signal

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106153236A (en) * 2015-04-27 2016-11-23 济南大学 A kind of piezoelectric type hexa-dimensional force sensor
CN105716746A (en) * 2016-04-12 2016-06-29 肖军 Force measurement method for switching external force measurement into internal measurement and force measurement device adopted by same
CN105716746B (en) * 2016-04-12 2019-02-12 肖军 A kind of force measuring method and its device for measuring force converting external force measurement to internal force measurement
CN107356361A (en) * 2017-07-03 2017-11-17 大连理工大学 A kind of measuring method of six-dimensional space power
CN110174205A (en) * 2019-04-02 2019-08-27 济南大学 A kind of joint of robot piezoelectric six-dimensional force sensor and its measurement method
CN110174205B (en) * 2019-04-02 2021-01-12 济南大学 Measuring method of piezoelectric six-dimensional force sensor for robot joint
CN112611497A (en) * 2019-09-18 2021-04-06 马洪文 Multi-dimensional force sensor structure of parallel rod system

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